-SQA- SCOTTISH QUALIFICATIONS AUTHORITY HIGHER NATIONAL UNIT SPECIFICATION GENERAL INFORMATION

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1 -SQA- SCOTTISH QUALIFICATIONS AUTHORITY HIGHER NATIONAL UNIT SPECIFICATION GENERAL INFORMATION -Unit Number Superclass- -Title- PL SAFETY AND CLEANROOM PRACTICE DESCRIPTION- GENERAL COMPETENCE FOR UNIT: Describing the principles; demonstrating the working practices; and explaining the safety issues associated with semiconductor industry integrated circuit fabrication. OUTCOMES 1. describe cleanroom principles; 2. demonstrate cleanroom working practices; 3. explain integrated circuit fabrication safety issues. CREDIT VALUE: 1 HN Credit ACCESS STATEMENT: Access to the unit is at the discretion of the centre For further information contact: Committee and Administration Unit, SQA, Hanover House, 24 Douglas Street, Glasgow G2 7NQ. Additional copies of this unit may be purchased from SQA (Sales and Despatch section). At the time of publication, the cost is 1.50 (minimum order 5).

2 HIGHER NATIONAL UNIT SPECIFICATION STATEMENT OF STANDARDS UNIT NUMBER: UNIT TITLE: SAFETY AND CLEANROOM PRACTICE Acceptable performance in this unit will be the satisfactory achievement of the standards set out in this part of the specification. All sections of the statement of standards are mandatory and cannot be altered without reference to SQA. OUTCOME 1. DESCRIBE CLEANROOM PRINCIPLES PERFORMANCE CRITERIA (d) Description of the properties of a clean room is clear and concise. Description of the structure of a cleanr oom is clear and concise. Identification of sources of contaminati on is clearly stated. Description of the techniques associated with particle monitoring is clear and concise. RANGE STATEMENT Cleanroom properties: airflow; class. Cleanroom structure: layout; filtration; services. Particle sources: people; process; equipment; materials; atmosphere. Particle monitoring equipment: optical microscope; laser counter; condensation counter. EVIDENCE REQUIREMENTS Written or oral evidence of the candidate's ability to describe the structure and properties of a cleanroom. Written or oral evidence of the candidate's ability to identify the sources of contamination and describe particle monitoring techniques. 2

3 OUTCOME 2. DEMONSTRATE CLEANROOM WORKING PRACTICES PERFORMANCE CRITERIA Demonstration of the gowning and de-gowning procedure is correct. Demonstration of the correct practices associated with working in a cleanroom environment is correct. Explanation of the consequences of poor cleanroom practices on semiconductor manufacture is clear and concise. RANGE STATEMENT Consequences: yield; reliability; defectivity. EVIDENCE REQUIREMENTS Performance evidence of the candidate's ability to demonstrate gowning, de-gowning and correct practices. Written or oral evidence of the candidate's ability to explain the consequences of poor cleanroom practices. OUTCOME 3. EXPLAIN INTEGRATED CIRCUIT FABRICATION SAFETY ISSUES PERFORMANCE CRITERIA (d) (e) Explanation of the implications of Standards and Codes of Practice for employers and employees is clear and precise. Description of the classification of hazards is clear and precise. Explanation of the exposure limits is clear and precise. Explanation of the correct handling techniques for process materials is clear and precise. Description of general procedures in case of a hazardous emergency is clearly stated. RANGE STATEMENT Standards and Codes of Practice: Health and Safety at Work Act 1974; Control of Substances Hazardous to Health (COSHH). 3

4 Hazard classification: explosive; flammable; oxidising; toxic; harmful; corrosive; irritant; high voltage; radiation; asphyxiant. Exposure limits: Maximum Exposure Limit (MEL); Occupation Exposure Standards (OESs). Handling techniques: line purging; protection requirements; extract requirements; fire extinguishing. Hazard procedures: evacuation; zones; emergency response teams. EVIDENCE REQUIREMENTS Written or oral evidence of the candidate's ability to explain the implications of the Standards and Codes of Practice. Written or oral evidence of the candidate's ability to explain the hazards, exposure limits and handling techniques associated with a substance. Written or oral evidence of the candidate's ability to describe general procedures in case of a hazardous emergency. MERIT A candidate who achieves all performance criteria for all outcomes will be awarded a pass. A pass with merit may be awarded to a candidate who achieves all outcomes and in doing so consistently demonstrates superior performance when, for example: displaying a greater depth of knowledge of cleanroom operating principles; displaying a superior knowledge of semiconductor indus try safety issues; displaying evidence of further reading or other additi onal effort ASSESSMENT In order to achieve this unit, candidates are required to present sufficient evidence that they have met all the performance criteria for each outcome within the range specified. Details of these requirements are given for each outcome. The assessment instruments used should follow the general guidance offered by the SQA assessment model and an integrative approach to assessment is encouraged. (See references at the end of support notes). Accurate records should be made of the assessment instruments used showing how evidence is generated for each outcome and giving marking schemes and/or checklists, etc. Records of candidates' achievements should also be kept. These records will be required for external verification. 4

5 SPECIAL NEEDS Proposals to modify outcomes, range statements or agreed assessment arrangements should be discussed in the first place with the external verifier. Copyright SQA 1994 Please note that this publication may be reproduced in whole or in part for educational purposes provided that: (i) (ii) no profit is derived from the reproduction; if reproduced in part, the source is acknowledged. 5

6 HIGHER NATIONAL UNIT SPECIFICATION SUPPORT NOTES UNIT NUMBER: UNIT TITLE: SAFETY AND CLEANROOM PRACTICE SUPPORT NOTES: This part of the unit specification is offered as guidance. None of the sections of the support notes is mandatory. NOTIONAL DESIGN LENGTH: SQA allocates a notional design length to a unit on the basis of the time estimated for achievement of the stated standards by a candidate whose starting point is as described in the access statement. The notional design length for this unit is 40 hours. The use of notional design length for programme design and timetabling is advisory only. CONTENT/CONTEXT The unit should be delivered in the context of cleanroom behaviour and practices which are applicable in the semiconductor industry. This unit is designed for training maintenance technicians in the semiconductor industry. There is a set of Teaching Notes available from SQA for this unit. These notes provide more information on the unit outcomes for course presenters. Corresponding to Outcome: 1. Describe cleanroom principles. There are very few widely available reference texts available on the subject of cleanrooms. The reference below is a fairly recent text and should be used to supplement the detail given within the Teaching Notes. 1. Cleanroom Design; Ed. W. Whyte; John W iley & Sons; ISBN Demonstrate cleanroom working practices. This would be best presented with the aid of video mat erial which is commercially available within the industry. Details of some appropriate videos are available in the Teaching Notes. It should be noted that most semiconductor fabrication plants have different procedures and different gowning requirements and so the general video material should be used as a basis for presentation and discussion - not a definitive model. 6

7 3. Explain integrated circuit fabrication safety issues. The description of each of the Standards and Codes of Practice should outline both the responsibilities of the employer and the employee. ASSESSMENT PROCEDURES Outcome 1: Performance criteria,, and (d) could be assessed by either a series of short answer questions; restricted response questions or a combination of both. Outcome 2: Performance Criterion could be assessed using a practical exercise in which the candidates must demonstrate gowning and de-gowning. These procedures would preferably be geared to the workplace(s) of the particular candidates. Performance Criteria and could be assessed by an assignment which could relate to the candidate's workplace. This assignment could relate the practices outlined in the video to actual maintenance or cleanroom operational procedure and an explanation of the possible consequences of poor practices. Outcome 3: Performance Criterion could be assessed by either a series of short answer questions; restricted response questions or a combination of both. Performance Criteria,, (d) and (e) could be assessed by either a practical exercise or a personal interview. These assessment methods would be based on information available from supplier gas data sheets or chemical labels. This assessment could be linked to the procedures and handling techniques which are used in the candidate's workplace. REFERENCES 1. Guide to unit writing. 2. For a fuller discussion on assessment issues, please r efer to SQA's Guide to Assessment. 3. Information for centres on SQA's operating procedu res is contained in SQA's Guide to Procedures. 4. For details of other SQA publications, please cons ult SQA's publications list. Copyright SQA 1994 Please note that this publication may be reproduced in whole or in part for educational purposes provided that: (i) (ii) no profit is derived from the reproduction; if reproduced in part, the source is acknowledged. 7