HIGH VALUE MANUAL 6 to 8 Wafer Probe Station

Transcription

1 ΨProbing Solutions, Inc 400LS / 410LS HIGH VALUE MANUAL 6 to 8 Wafer Probe Station The PSI 400LS / 410LS Manual Wafer Probe Station is a powerful, yet economical 6 / 8 easy to use an analytical wafer probe station. This probe station is ideally suited for a wide range of engineering applications. These include Design Analysis, Failure Analysis, Production Process Analysis, ESD effect, Electromigration, High Voltage, Low current / Low Noise, Microwave, CV / IV. A truly versatile Shouldn t be without Manual Analytical Lab Tool for small feature probing. The Precision Lead Screw - manual stage controls are easily operated with one or both hands while positioning the wafer, manipulators and looking through the microscope. The manual 400LS has a probing target of 5 mil pads to submicron lines and design features. The Vacuum Wafer Chuck is selectable as 6 or 8 diameter either of which is capable of accepting smaller 5, 4 and 3 Wafers. Wafer Slices, Individual Die or Hybrid Substrates are accommodated on 6 or 8 Chucks using an accessory VAC-PUC vacuum concentrator on the chuck surface. Vacuum Wafer Chucks are available for Ambient, Hot and Cold Temperatures, Coaxial, Triaxial and Low Current / Low Noise versions with Gold Plated or Stainless Steel Wafer surfaces. Microscope Lift Delay adjustment which allows the probes to be raised from the wafer independent of the microscope, without changing their individual positioning and avoiding any possible collision with microscope objectives. When returned to the platen down position, the probes return to their original positions and the microscope to its In Focus position and analysis can resume undisturbed. Features Include: The PSI 400LS PLATEN Z LIFT has Vertical Locking Position. The PSI 410LS PLATEN Z LIFT has 12 Selectable Vertical Ratchet Positions, 3 inches (76mm). Microscopes available for customer s selection: A-Zoom, Meiji, Mitutoyo, Motic and Seiwa, MODULAR DESIGN: The 400LS Series Wafer Probe Stations are designed as a platform on which to build on as the Engineering Analytical Analysis task expands with design discipline as feature size shrinks. A wide variety of system accessories and upgrades are readily available to fit changing needs. Probing Solutions, Inc., 9 Enterprise Way, Dayton, NV USA Tel: Fax: sales@probingsolutions.com

2 SPECIFICATIONS Platen 243 square inches, accepts up to 10 manipulators. Magnetic stainless steel with ground-grained surface. 3 point belt driven support/lift provides excellent Stability. Optional manifolds: BNC, TRIA, TRIA/BNC and HP/KELVIN. Fine Z Lift Control True planar vertical motion with micron precision Relative Z position Graduated indicator dial (selectable) Large 6 (152mm) diameter Z control dial Resolution: 2microns per degree of revolution Range: 1 (25.4mm) Fast Z Lift Control Platen lift with three lock up positions Platen range: 1 (25.4mm) Adjustable microscope delay: 0 to 1 travel, raises microscope from 1.25 to 3.0 Vacuum Chuck Options 6 (152mm) for 3 to 6 wafers or 8 (200mm) for 4 to 8 wafers Stainless-steel for low contamination, or gold plated brass Flatness +/ (+/- 12 microns) Electrical isolation exceeds 5 Teraohms Electrically wired to BNC connector on platen Facility Requirements Power: 110V/60Hz standard, 220V/50Hz optional (2 amps) Vacuum: 20 of mercury vacuum stage, vacuum based Manipulators Dimensions, Finish and Weight 23.5 (60cm) D x 37 (94cm) W x 32 (87cm) H Grained black anodized aluminum, stainless-steel for long life 162 lbs. (74kg) Shipping Information 39 (99cm) D x 37 (94cm) W x 32 (81cm) H, with pallet Shipping weight 220 lbs. (100kg) approximate Microscope Post PSI 404LS: Hinged Dependent Vertical lift; 1.25 to 3.0 PSI 414LS: Independent Vertical Lift/Lock 12 selectable positions; 3 range Focus (Z) motion 2 (50.8mm) standard; up to 4 (100mm) option - Stage Options Precision - lead screw drive 6 x 6 (152mm x 152mm) or 8 x 8 (200mm x 200mm) Stage and chuck planarized at factory Theta rotation control: +/- 12 microns (100 T.P.I. lead screw) Proven ball and rail construction Socket Stage Adapter Options Holds PCB zero insertion socket cards for probing packaged part devices Adapters: 4.5 x 4.5 to 6 wide cards Probe Card Holder PCH Option Holds probe cards for wafer probing PCH: 4.5 or 4.5 to 6 wide/adjustable Visit our website at: Probing Solutions, Inc., 9 Enterprise Way, Dayton, NV USA Tel: Fax: sales@probingsolutions.com SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE

3 Model Number P SERIES Application Resolution Probing Solutions Inc. MANIPULATOR MATRI Resolution Travel Pitch/ aw Roll P32-VM 10 Micron < 2.3 um/ DEGREE OF KNOB ROTATION w/ 32 TPI 1" (25MM) Z Travel: 5 at 8" (200mm) of extension. Resolution:< 2.0 um/ degree of knob rotation with 100 TPI 12 Axis Arm Suggested Probing Applications Pad or Fine Pitch PCB P40-VM 5 Micron < 2.0 um/ DEGREE OF KNOB ROTATION w/ 40 TPI 1" (25MM) Z Pad or Fine Pitch PCB P100-VM 1 Micron < 1.0 um/ DEGREE OF KNOB ROTATION w/ 100 TPI 1" (25MM) Z P200-VM Sub Micron < 0.38 (SUB-MICRON) / DEGREE OF KNOB ROTATION w/ 200 TPI 1" (25MM) Z GP SERIES GP-35-R-VM 5 Micron < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI GP-45-L-VM 5 Micron < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI GP-35-R-12AR-VM 5 Micron < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI GP-45-L-12AL-VM 5 Micron < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI 5 Micron-xyz GP2-35-R-12AR-VM 1Micron Pitch aw 5 Micron-xyz GP2-45-L-12AL-VM 1Micron Pitch aw SI SERIES 5 Micron-xyz SI-12AR-VM 1Micron Pitch aw & Roll 5 Micron-xyz SI-12AL-VM 1Micron Pitch aw & Roll < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI < 2.0 um/ DEGREE OF KNOB ROTATION and 40 TPI Failure Analysis Design Verification Failure Analysis Design Verification Customer Configurable Board/Fixture Testing Customer Configurable Board/Fixture Testing Customer Configurable Board/Fixture Testing Customer Configurable Board/Fixture Testing Microwave Fine Pitch PCB Microwave Fine Pitch PCB Vertical / Horizontal and Microwave Vertical / Horizontal and Microwave PCB PCB P-SERIES GP AR-VM SI-12AR-VM GP-35-VM GP-35-12AR-VM 9 Enterprise Way, Dayton, NV, USA Phone: Fax: Website: ProbingSolutions.com

4 HIGH PRECISION MANIPULATOR P40-VM P40-VM; MANIPULATOR W/Precise 40 TPI //Z and Fast Z Control,, Z Axis: Travel: 1.00 inches (25.4 mm) Resolution: < 2.0um/degree of knob rotation For 5um Geometries Fast Z Control: Travel: 20 degrees at 3.25 inches (83 mm) of extension. Resolution: <2.3um per degree of knob rotation. Adjustable Down Stop. Equipped with Collet, Collet Holder and Collet Shaft to hold most Standard Probe Holders. Steel Base for Added Weight and Stability. Convenient Low Profile Handle for Carry and Positioning, helps prevent dropping. Vacuum Mount Base with Vacuum Release Switch Field Upgradeable to Higher/Lower Resolutions. Weight: 3.5 lbs. Five year limited warranty.

5 P7 Series Probe Holders Single Wire Coaxial Triaxial (P7 Tool holder adapter arm, shown, not included) Model P7 Series Probe Holders Made from 300 series stainless steel, the P7 probe holders accept all model 407 replaceable probe tips, and are secured with a set screw. When used with the P7 Tool Holder Adapter Arm; Z position adjustments are easy, and can accommodate a variety fixtures and probe card holders. Designed for both high temperature (-65 to 300 C) and high electrical isolation measurements. All probe holders are wired with 39 inches (1 Meter) cable. Shield/guard is terminated within 0.2 inch (5mm) of the tip. A shield wired alligator clip is provided for ground applications on all coaxial and triaxial probe holders. Materials used are RoHS compliant. Single Wire Specifications: 22ga. silver plated stranded copper wire with black PTFE insulation Standard assembly resistance > degree F BNC connector, 2 lug male, 50 ohm, 500VDC max. Coaxial Specifications: Coaxial Cable RG 178/B/U, 50 ohm, High Temp. TFE insulation, MIL-C-17 Standard assembly isolation, signal to shield: > VDC max. Ceramic insulators BNC connector, 2 lug male, 50 ohm, 500VDC max. Triaxial Specifications: Triaxial Cable <18pf/foot capacitance, Ultra-Low Triboelectric Effect. Standard assembly isolation, signal to guard: > VDC max Ceramic insulators Triaxial connector, 3 lug male, 50 ohm, 500VDC max. 1 P7 Series Specification Sheet Rev. 5A

6 P7 PROBE HOLDER CONFIGURATION MATRI Probing Solutions Inc.* * Fax: * sales@probingsolutions.com 2 P7 Series Specification Sheet Rev. 5A

7 DISPOSABLE PROBE TIP POINTS Probing Solutions offers a wide selection of disposable probe tips to choose from, depending on the design process feature to be probed and on the environmental, ambient, hot, cold, hot/cold conditions required for your specific probing application. If you do not find a probe tip that fits your application from this chart below, please call the factory, POINT RADIUS (MICRONS) POINT TAPER LENGTH POINT STLE MODEL # FINE-TIP FLEIBLE TIP SHAFT 407A HEAV DUT NEEDLE FOR LARGER TARGETS *MA BE GOLD PLATED, ADD G TO PART NUMBER CARBIDE TIP FOR CUTTING AVAILABLE IN A STRAIGHT OR CONVE TAPER HEAV DUT NEEDLE SAME SHAPE AS 407B, BUT A SHORTER LENGTH (407G) BERLLIUM COPPER NEEDLE FOR SMALL TARGETS SHARPEST PROBE NEEDLE AVAILABLE FLEIBLE CAT-WHISKER (TIP.003 ) 407B 407B-1 407B-2 407B-5* 407B-10* 407B-20* 407B-25* 407B-50* 407B-100* 407B-200* 407D 407D-3/4 407F-S 407F-C 407G 407G-1 407G-2 407G-5 407G G G G G INCLUDED ANGLE (DEGREES) TOTAL LENGTH SHANK DIAMETER MATERIAL NICKEL (Bendable) º 15º 28º 30º 19º 11º 10 6º CARBIDE NICKEL PLATED COPPER SHANK 407H º BERLLIUM COPPER NICKEL (Bendable) Probing Solutions, Inc. U.S.A. 9 Enterprise Way Dayton, NV USA Tel: Fax: sales@probingsolutions.com A

8 Disposable Probe Tip Selection Guide Probing Solutions offers a wide selection of disposable Probe Tips to choose from depending on the design process feature to be probed and the environmental, Ambient, Hot, Cold, Hot/Cold conditions required for your specific probing application. Fine-tip 407A.005" " ".020" Shank: Nickel bendable shank cat-whisker 407A-M.005" " ".020" Tip: Tungsten bendable shank and tip Heavy Duty 407B.020" " ".020" Tungsten larger targets Needle 407B-1.020" " ".020" general purpose 407B-2.020" " ".020" 407B-5*.020" " ".020" 407B-10*.020" " ".020" 407B-25*.020" " ".020" 407B-50*.020" " ".020" * may be Gold 407B-100*.020" " 9 1.4".020" plated, add G 407B-200*.020" " 3 1.4".020" to part number Small Targets 407C.005" " ".020" Dumet bendable shank with C bend (CU.FE) cat-whisker Tungsten Carbide 407D.020" " ".020" Tungsten for cutting 407D-3/4.020" " ".020" Carbide High Temperature Small Targets 407F.001" " ".020" Shank: Nickel bendable shank 407F " " ".020" Tip: Tungsten and tip cat-whisker 407F-C10 w/ C bend 407F-C10.003" " ".020" super flexible Heavy Duty 407G.020" " ".020" Tungsten same as Needle 407G-1.020" " ".020" Model 7B but 407G-2.020" " ".020" shorter shank 407G-5*.020" " ".020" length 407G-10*.020" " ".020" 407G-25*.020" " ".020" 407G-50*.020" " ".020" * may be Gold 407G-100*.020" " 9 0.5".020" plated, add G 407G-200*.020" " 3 0.5".020" to part number Low Contact 407H.020" " 8 1.4".020" Beryllium low contact Resistance Copper resistance Very Small " " ".020" Shank: Nickel bendable shank Targets 407-Short.003" " ".020" Tip: Tungsten cat-whisker sharpest probe 407-M.003" " ".020" Bendable High Compliance 407S.005" " /8".020" Tungsten very flexible