Towards the Consumerization of Smart Sensors Roberto De Nuccio Business Development Manager MEMS, Sensors and High-Performance Analog Division STMicroelectronics
Micro-Electro-Mechanical Systems (MEMS) MEMS take advantage of the electrical and mechanical properties of silicon Electronic circuits Mechanical structures Semiconductor manufacturing High volume Small size Low cost 2
MEMS Motion Sensors US$M US$M 9.6% CAGR 6% CAGR 15.3% CAGR 13% CAGR 8% CAGR 25% CAGR Accelerometers Gyroscopes Source isuppli Consumer Markets Exceeding Automotive Markets in Units and Revenue 3
ST is # 1 in MEMS for consumer electronics and mobile handset market MEMS Leadership 2009 ST revenues = $218M; Market TAM = $1,170M* Manufactured > 850Mpcs accelerometers and gyroscopes to date ST leads accelerometer business in all market segments Consumer electronics and mobile handsets* 2009 ST Market Share = 50% All markets, including automotive and industrial* 2009 ST Market Share = 21% * Source: isuppli 4
ST Drives MEMS Avalanche 2005: We entered PCs 2006: We entered Gaming 2007: We entered Phones 5
ST Continues to Drive MEMS Avalanche 2008: We entered Pockets 2009: We entered Cameras 2010: Source: isuppli reverse analysis of Apple ipad 6
Sole accelerometers only are not sufficient anymore Accelerometer Senses the linear acceleration In static conditions, the projection of gravity on the three axes allows to measure tilt angles Gyroscope Measures the langular rate In dynamic conditions, the integration of the angular rate along the three axes allows to determine the 3D orientation Accelerometer Gyro Why Multiple degree of freedom are needed? Digital Compass Pressure Sensor Gyroscope Senses the earth s magnetic field In static conditions, the projectionof geomagnetc field on the three axes allows to compute heading angle Pressure Sensor Senses the absolute pressure In dynamic conditions, the sensed pressure allows to determine the altitude
Next steps towards multi-axis smart sensors 10 Degree Of Freedom (DOF) Sensor + Embedded Intelligence + Sensor Fusion
New Apps Enabled in the Industrial Market Factory Automation Logistics Building
in the High-Volume Consumer World. Point Of Interest Sport& Wellness Location Based Services Enhanced User Interface & Online Gaming Augmented Reality 10
and in High-Value Healthcare Apps Sensing Body motion Pressure Acoustic signals Bio-signals (ECG, BGCM) Bio-sensors Flexible Lens for Eye Pressure Monitoring Insulin Nano Pump Pressure Sensor Electro Cardiogram Temperature Sensor Drug Delivery Pumps Valves Nozzles Step Counter Movement Recognition 11
MEMS Ready to Enable Location Based Services Implementing enhanced tracking algorithms, MEMS sensors allow the user to exactly retrieve the position and orientation even when GPS signal is lost. Gyroscope Commercial area for: Motion tracking when GPS signal is lost Shop location Prices and discounts Magnetometer Museum for: Correct Orientation while pointing to buildings Exhibition guidelines Artwork description Accelerometer Theater and Cinema for Adding great user interface Movie information Show times Get the information you want wherever you want 12
Through the Pointing 3-Dim tagging Augmented reality
Not Only in GPS Mobile Phones! High-performance Artificial Horizon and Digital Compass are a reality with MEMS Source: Nikon Mini GPS 14
ST s Solution for Smart Sensing: inemo
Putting It All Together Miniaturization and Low Power Consumption as driving factors 50 mm 3 15 cm 3 Today Tomorrow
and Adding Wireless Capabilities 3D integration Small footprint 2D integration Thin, flexible, skin patch, integrated in clothing Source: IMEC
To Make It Happen MEMS Need to be Consumerized.that means: Smaller Cheaper Power-efficient Highly scalable 18
ST s Cristallo: Ultra-Low-Power and High Performance Accelerometer Higher flexibility at lower current Advanced power management Wide supply voltage down to 1.8V Ultra low current High versatility Extended FS range (2/4/8/16g) Multiple configurable interrupt sources 100X Lower Power Embedded features Programmable FIFO (32 levels) 3 auxiliary ADC channels 19
Gyroscopes: We Are On Time Analog Output In 2009, we announced more than 30 multi-axis gyroscopes 1X 2008 Analog Output Analog and Digital Output 2X 2009 3X E Jan 2010 Application Segments: Enhanced motion user interface Image stabilization Gaming Navigation Gyroscope market for mobile and consumer TAM 2010: $246M CAGR 2010-2013: ~20% Source: isuppli 20
Pressure Sensors as Altimeters Absolute, temperature-compensated, ultra-compact pressure sensor with digital output make it small; make it accessible Application Segments: Blood pressure sensors Navigation system Water level management Pressure sensor market for mobile and consumer TAM 2010: $47M CAGR 2010-2013: ~27% Source: isuppli 21
Compass Shows Heading A look from the inside and from the outside Accelerometer + Geo-Magnetic Sensor Application Segments: Navigation Mobile phone Picture geo-tagging Location based services 22
Challenges in Manufacturing
MEMS on 8 Silicon Wafer
Assembly Manufacturing Platforms
Challenges in design
Challenges in the Mechanical Design δ(a,ω,p, ) δc
Challenges in the Electronic design Reading tiny variation of capacitance C is 1aF over a Capacitance 1pF! Acceleration Variation of Capacitance Output Signal
Challenges for System Architecture Coriolis Gyroscope: merging a motor with an accelerometer! Sense mode Drive mode
THE BEATING HEART
Take-Away messages STMicroelectronics: the leader in MEMS for consumer electronics and mobile handsets; one-stop supplier for motion sensors, microphones, pressure sensors and digital compasses Sensor integration: new amazing services are enabled by multi-axis smart sensors STM has the capabilities and the experience to miniaturize and consumerize multi-axis smart sensors Thinking beyond the chip: Hardware and Software integration, the next step you need to manage to succeed in the MEMS space
ST SENSORS APPEAL TO YOUR SENSES THANK YOU