P/N 0-027289 (Rev. A 04/4) NT PRESSURE TRANSDUCER MODELS 400, 420, 430, 4230 User Guide
Table of Contents Safety Alert Symbol... 2 Introduction... 3 Installation... 3 Mechanical Installation... 3 Electrical Installation... 4 Power Supply Requirements... 4 Warnings... 4 Unit Operation... 6 Operating Environment... 6 Process Connections... 6 Pressure Transducer Cover Assembly... 6 Pressure and Temperature Requirements... 6 Pressure Limits... 7 Pressure Reference Accuracy... 7 Linear Output Signal... 8 Troubleshooting... 9 Certifications... 2 CE Compliance... 2 Class I, Division 2 Hazardous Environments... 2 Ordering Information... 3 Model 400 Single-port... 3 Model 420 Flow-through... 4 Model 430 Single-Port... 5 Model 4230 Flow-through... 5 Installation Drawings... 6 Model 400 Single-port... 6 Model 420 Flow-through... 8 Model 430 Single-port... 20 Model 4230 Flow-through... 2 For More Information... 22 Terms and Conditions of Sale... 22 Product Warranties... 22 Maintenance... 9 Zero and Span Adjustment... 9 Reference... Physical Specifications... Electrical Specifications... Performance Specifications... ENTEGRIS, INC. USER GUIDE
Safety Alert Symbol! WARNING! Indicates a hazardous situation which, if not avoided, could result in serious injury or death. Introduction This manual is for use with the following standard NT Pressure Transducers 4000 Series Models 400, 430, 420 and 4230. These instruments have been designed for use in high purity applications in the semiconductor industry. These products feature no moving parts and no filled cavities, which reduces the possibility of a contaminated process. The wetted parts of these nonmetallic transducers are constructed with PTFE, PFA or other similar high purity inert materials.! WARNING! Attempting to install or operate NT standard 4000 Series Pressure Transducers without reviewing the instructions contained in this manual could result in personal injury or equipment damage. Cut-away Example: NT Single-port Pressure Transducer Polypropylene electrical connector option Signal conditioning circuit Cut-away Example: NT Flow-through Pressure Transducer Polypropylene electrical connector option Signal conditioning circuit Electronic pressure sensor Electronic pressure sensor PTFE Body PTFE Body Process connection Process connection 2 USER GUIDE ENTEGRIS, INC.
!! Installation WARNING! The pressure transducer has been factory sealed. Do not attempt to remove the cover of the pressure transducer. Any attempt at removal of the pressure transducer cover will void the warranty and damage the unit. NOTE: NT Pressure Transducers for DI water applications, Models 430 and 4230, are built with a removable grommet to allow adjustment of the zero and span potentiometers. WARNING! Do not tighten the nuts that protect the process connections during shipment. Do not tighten the nuts unless the proper tubing has been installed. Tightening these nuts may result in damage to the pressure transducer process connections. Mechanical Installation Standard NT Pressure Transducers utilize flared tube connections and must be used with the proper tubing size and coupling nut. When installing flared tubing to the pressure transducer, the flared tube is pushed over the transducer s fitting until the fitting reaches the smaller tube diameter. The amount of torque required to tighten the coupling nut is dependent upon the size of the fitting. Fitting Size 4 3 8 2 3 4 Torque (in lbs) 5 8 4 30 Care should be taken when installing flared tubing onto the pressure transducer. Do not use excessive torque or subject the transducer to high heat during installation. The transducer should be firmly mounted to a solid surface to ensure stability. Verify that the pressure transducer and the sig nal cable are free from mechanical stress or excessive bending from the surrounding equipment. ENTEGRIS, INC. USER GUIDE 3
Electrical Installation The pressure transducer provides an analog (0 5 VDC, 0 0 VDC or 4 20 ma) electrical output proportional to the pressure measured. NOTE: The white wire is not required for the 4 20 ma output configuration, please refer to the wiring diagrams below. + GND Pressure transducer 4 20 ma output version RED WHITE BLACK No connection 4 20 ma pressure signal Display or PLC Pressure Transducer 0 5 VDC, 0 0 VDC output version Voltage pressure signal WHITE RED BLACK Display or PLC Power Supply Requirements The pressure transducer requires a 2 30 volt DC power supply with less than 2% ripple at 00 or 20 Hz. The required power supply voltage varies with the load resistance (R Load ), please refer to the formulas on page 6. The power supply must provide clean power and must be used only to power similar measurement-type devices. The power supply must not be used to power inductive loads, such as motors, relays or solenoids. These devices may produce transients that may affect the pressure transducer measurements when the inductive device is powered up or powered down. NOTE: Be sure to ground the shield of the cable to local ground.!!!! Warnings WARNING! DO NOT REMOVE OR REPLACE WHILE CIRCUIT IS LIVE UNLESS THE AREA IS KNOWN TO BE FREE OF IGNITIBLE CONCENTRATIONS OF FLAMMABLE SUBSTANCES. WARNING! DO NOT REPLACE COMPONENTS UNLESS POWER HAS BEEN DIS- CONNECTED OR THE AREA IS KNOWN TO BE FREE OF IGNITIBLE CONCENTRATIONS OF FLAMMABLE GASES OR VAPORS. WARNING! EXPLOSION HAZARD. DO NOT CONNECT WHILE THE CIRCUIT IS LIVE OR UNLESS THE AREA IS KNOWN TO BE FREE OF IGNITIBLE CONCENTRATIONS. WARNING: SUBSTITUTION OF COMPONENTS MAY IMPAIR SUITABILITY FOR DIVISION 2 4 USER GUIDE ENTEGRIS, INC.
Figure. Power Required for a 4 20 ma Loop 850 R Load (Ohms) Operating region 0 Power supply voltage (V PS ) 2 24 29 Load Resistance: Current Output (4 20 ma Configuration) If a load resistor, R Load, is used in series with the current output, the value of R Load is dependent on the supply voltage and the meter resistance and is calculated from the following formula: Load Resistance: Voltage Output (0 5, 0 0 VDC) The output impedance is kohm. The input impedance should be megohm for ±0.% load impedance error. R Load = V PS 2V 20 ma R meter where: R Load V PS R meter = maximum load resistance (ohms) =power supply voltage (volts) = meter resistance (ohms) (theoretically = 0) ENTEGRIS, INC. USER GUIDE 5
Unit Operation Operating Environment The pressure transducer is to be mounted in a well vented and controlled environment. Refer to the Reference section on page 2 for additional specifications. Process Connections To avoid possible pressure leaks, make sure all process connections have been performed in accordance with the Mechanical Installation guidelines on page 4. Pressure Transducer Cover Assembly Standard NT Pressure Transducer covers are factory sealed and should not be tampered with or opened. Opening the cover shall void the product warranty. The NT Pressure Transducers for DI water applications, Models 430 and 4230, are built with a removable grommet to allow adjustment of the zero and span potentiometers. Pressure and Temperature Requirements The minimum pressure required is atmospheric pressure. The pressure transducer may be damaged if subjected to vacuum pressure (pressure that is less than atmospheric pressure). The pressure transducer is rated for use with fluids at process temperatures between 0 65 C (50 49 F) under normal operating conditions.! WARNING! NT Pressure Transducers, Models 400, 430, 420 and 4230, may be damaged if the sensor is subjected to any level of vacuum pressure (pressure less than atmospheric pressure).! WARNING! Any attempt to remove or tamper with the transducer cover will void the warranty and damage the unit. 6 USER GUIDE ENTEGRIS, INC.
Pressure Limits Transducer Range Maximum Pressure Limit @ 23 C (73 F) Maximum Pressure Limit @ 65 C (49 F) 0 30 psig 690 kpa (00 psig) 3 690 kpa (00 psig) 2, 4 0 60 psig 034 kpa (50 psig), 3 690 kpa (00 psig) 2, 4 0 00 psig 034 kpa (50 psig), 3 690 kpa (00 psig) 2, 4 0 50 psig 30 kpa (90 psig), 3 N/A. Maximum pressure limit for 3 4 Flaretek fitting connections at 23 C (73 F) is 758 kpa (0 psig). 2. Maximum pressure limit for 3 4 Flaretek fitting connections at 65 C (49 F) is 620 kpa (90 psig). 3. Maximum pressure limit for Flaretek fitting connections at 23 C (73 F) is 57 kpa (75 psig). 4. Maximum pressure limit for Flaretek fitting connections at 65 C (49 F) is 372 kpa (54 psig). For detailed pressure limit information on Flaretek tube fitting connections, refer to the Maximum Pressure Capabilities chart in the Flaretek fittings product section on Entegris website at http://www.entegrisfluidhandling.com.! WARNING! The pressure limits for standard NT Pressure Transducers (4000 Series) decrease significantly for temperatures above 65 C (49 F). Exceeding these limits may result in personal injury or equipment damage. Pressure Reference Accuracy The accuracy of the pressure transducer output is ±% of full scale. This accuracy includes the effects of linearity, hysteresis and repeatability, measured at room temperature. Accuracy specifications for nonstandard product configurations might vary. ENTEGRIS, INC. USER GUIDE 7
Linear Output Signal The output signal of the pressure transducer is a linear function proportional to the applied pressure. 20 ma Current Output (ma) 4mA 0 psig Pressure Measurement Full scale 0 V or 5V Voltage Output (V) 0V 0 psig Pressure Measurement Full scale 8 USER GUIDE ENTEGRIS, INC.
Troubleshooting Troubleshooting the NT Pressure Transducers (4000 Series) may be accomplished by measuring the out put signal of the pressure transducer with a battery powered current/voltage meter. The meter may be placed in series with the pressure transducer to measure the current output or it may be used to directly measure the voltage output. Using the battery powered current/ volt meter is an effective method to determine whether the device or the on-site data acquisition system is not functioning properly. Maintenance: (NT Pressure Transducers for DI Water Applications, Models 430 and 4230 Only) Zero and Span Adjustment Unit Calibration Steps:. Remove pressure transducer from service. 2. Connect the pressure transducer inlet outlet port connector to a calibrated pressure source. 3. Connect the pressure transducer electrical connection to a power source. 4. Connect the pressure transducer electrical connection to a display to monitor the ma or voltage output. 5. Remove the access grommet (see Diagram A). 6. Locate the zero and span adjustment screws (see Diagram B). Diagram A ENTEGRIS, INC. USER GUIDE 9
7. At ambient pressure (no pressure applied), rotate the zero adjustment screw (see Diagram C) clockwise or counterclockwise until the display reads 4.0 ma or 0 Volts. 8. Apply full scale pressure to the unit. Rotate the span adjustment screw clockwise or counterclockwise until the display reads the full scale value (i.e., depending upon configuration: 20.0 ma, 0 Volts or 5 Volts). 9. To obtain best accuracy, repeat steps 7 and 8. 0. The calibration procedure is complete. Reinstall the access grommet.. Safely vent any applied pressure. Disconnect the display and disconnect the power. 2. Return the pressure transducer to service. Diagram B Diagram C Span Pot Zero Pot 0 USER GUIDE ENTEGRIS, INC.
Reference The following lists the specifications for the NT Pressure Transducer product line. Please consult the factory for product specifications manufactured for nonstandard applications. NOTE: Specifications are subject to change without notice. Physical Specifications Materials: Wetted parts Body PTFE Connection type: Nonwetted parts Flared tube, NPT Electrical Specifications Sensor interface CTFE or PFA (Models 400 and 420) O-ring PFA (Models 430 and 4230) Kalrez (Models 400 and 420) EPDM(Models 430 and 4230) Polypropylene, polyethylene, PVDF (in addition to materials listed above) Input voltage: Input current: Pressure signal output ranges: Electrical connection: Electrical enclosure: (2 30 VDC) 20 ma maximum 4 20 ma, 0 5 VDC, 0 0 VDC 6, 2, 30 FEP-jacketed pigtail or polypropylene 3-pin connector Models 400 and 420) 2 FEP-jacketed pigtail (Models 430 and 4230)A IP54 Performance Specifications Reference accuracy: Process temperature: ±% of full scale (includes linearity, hysteresis and repeatability) at 23 C (73 F) 0 65 C (50 49 F) ENTEGRIS, INC. USER GUIDE
Certifications CE Compliance Entegris products have been tested to various test standards required by the EMC 89/336/EEC directive. The results of this testing are on file at Entegris and are available upon request. Please contact the factory for the latest information. The most current specifications may be found on Entegris Web site at: http://www.entegrisfluidhandling.com/ Default.asp?G=63&n=en Class I Division 2 Hazardous Environments Entegris has tested our standard products to the UL 600-, ANSI/ISA 2.2.0 standards for use in Class I, Division 2 Group A D, T6 0 C Ta 65 C hazardous environments. The results of this testing are on file at Entegris and are available upon request. All spec i fications are subject to change. Please contact the factory for the latest information. 2 USER GUIDE ENTEGRIS, INC.
Ordering Information Refer to the following for the desired configuration. Model 400 Single-port Pressure Transducer Example model number: 400-00G-F02-D06-A-P-U 030G 060G 00G 50G F02 F03 F04 W02 W03 W04 N02 N04 M02 Pressure Range 207 kpa (30 psig) 44 kpa (60 psig) 690 kpa (00 psig) 034 kpa (50 psig) Inlet/Outlet Port Connection 4 Flaretek tube fitting 3 8 Flaretek tube fitting 2 Flaretek tube fitting 4 Super 300 Type Pillar tube fitting 3 8 Super 300 Type Pillar tube fitting 2 Super 300 Type Pillar tube fitting 4 FNPT 2 FNPT 4 MNPT P P2 Sensor Interface CTFE sensor interface (default) PFA sensor interface Primary/Secondary Seal U Kalrez 4079 / Viton (default) U2 Kalrez 050 / Viton U3 Kalrez 6375 UP / Viton S Kalrez 4079 / Kalrez 4079 S2 Kalrez 050 / Kalrez 050 S3 Kalrez 6375 UP / Kalrez 6375 UP B06 B2 B30 D00 D06 D2 D30 Electrical Connector Type FEP-jacketed 6 pigtail electrical cable FEP-jacketed 2 pigtail electrical cable FEP-jacketed 30 pigtail electrical cable Polypropylene connector (cable not included) Polypropylene connector and 6 PVC cable Polypropylene connector and 2 PVC cable Polypropylene connector and 30 PVC cable A B C Electrical Outputs 4 20 ma (2 30 VDC input) 0 0 VDC (2 30 VDC input) 0 5 VDC (2 30 VDC input) ENTEGRIS, INC. USER GUIDE 3
Model 420 Flow-through Pressure Transducer Example model number: 420-00G-F02-D06-A-P-U 030G 060G 00G F02 F03 F04 F06 F08 W02 W03 W04 W06 W08 Pressure Range 207 kpa (30 psig) 44 kpa (60 psig) 690 kpa (00 psig) Inlet/Outlet Port Connection 4 Flaretek tube fitting 3 8 Flaretek tube fitting 2 Flaretek tube fitting 3 4 Flaretek* tube fitting Flaretek* tube fitting 4 Super 300 Type Pillar tube fitting 3 8 Super 300 Type Pillar tube fitting 2 Super 300 Type Pillar tube fitting 3 4 Super 300 Type Pillar tube fitting Super 300 Type Pillar tube fitting P P2 Sensor Interface CTFE sensor interface (default) PFA sensor interface Primary/Secondary Seal U Kalrez 4079 / Viton (default) U2 Kalrez 050 / Viton U3 Kalrez 6375 UP / Viton S Kalrez 4079 / Kalrez 4079 S2 Kalrez 050 / Kalrez 050 S3 Kalrez 6375 UP / Kalrez 6375 UP * For detailed pressure limit information on Flaretek tube fitting connections, refer to the Maximum Pressure Capabilities chart in the Flaretek fittings product section on Entegris website at http://www.entegrisfluidhandling.com. B06 B2 B30 D00 D06 D2 D30 Electrical Connector Type FEP-jacketed 6 pigtail electrical cable FEP-jacketed 2 pigtail electrical cable FEP-jacketed 30 pigtail electrical cable Polypropylene connector (cable not included) Polypropylene connector and 6 PVC cable Polypropylene connector and 2 PVC cable Polypropylene connector and 30 PVC cable A B C Electrical Outputs 4 20 ma (2 30 VDC input) 0 0 VDC (2 30 VDC input) 0 5 VDC (2 30 VDC input) 4 USER GUIDE ENTEGRIS, INC.
Model 430 Single-port Pressure Transducer Example model number: 430-00G-F02-A Pressure Range Electrical Outputs 030G 207 kpa (30 psig) A 4 20 ma (2 30 VDC input) 060G 44 kpa (60 psig) B 0 0 VDC (2 30 VDC input) 00G 690 kpa (00 psig) C 0 5 VDC (2 30 VDC input) 50G 034 kpa (50 psig) Inlet/Outlet Port Connection F02 4 Flaretek tube fitting F03 3 8 Flaretek tube fitting F04 2 Flaretek tube fitting W02 4 Super 300 Type Pillar tube fitting W03 3 8 Super 300 Type Pillar tube fitting W04 2 Super 300 Type Pillar tube fitting N02 4 FNPT N04 2 FNPT M02 4 MNPT Model 4230 Flow-through Pressure Transducer Example model number: 4230-00G-F02-A 030G 060G 00G F02 F03 F04 F06 F08 W02 W03 W04 W06 W08 Pressure Range 207 kpa (30 psig) 46 kpa (60 psig) 690 kpa (00 psig) Inlet/Outlet Port Connection 4 Flaretek tube fitting 3 8 Flaretek tube fitting 2 Flaretek tube fitting 3 4 Flaretek tube fitting* Flaretek tube fitting* 4 Super 300 Type Pillar tube fitting 3 8 Super 300 Type Pillar tube fitting 2 Super 300 Type Pillar tube fitting 3 4 Super 300 Type Pillar tube fitting Super 300 Type Pillar tube fitting Electrical Outputs A 4 20 ma (2 30 VDC input) ** B 0 0 VDC (2 30 VDC input) C 0 5 VDC (2 30 VDC input) * For detailed pressure limit information on Flaretek tube fitting connections, refer to the Maximum Pressure Capabilities chart in the Flaretek fittings product section on Entegris website at http://www.entegrisfluidhandling.com. ENTEGRIS, INC. USER GUIDE 5
Installation Drawings 400 Single-port Pressure Transducer with Flared Connection 3 conductor FEP-jacketed cable, pigtail connection (BXX) (Cable length up to 30 feet) 25.4 mm (.00 ) A Ø 47.8 mm (.88 ) ELECTRICAL CONNECTOR INFORMATION Wire Red VDC+ Black VDC 4 20 ma (2 30 VDC) Voltage (2 30 VDC) White Not used 0 5 VDC signal or 0 0 VDC signal B Inlet/Outlet Port Connection A B 4 Flaretek 76.2 mm (3.00 ) 25.2 mm (0.99 ) 3 8 Flaretek 76.2 mm (3.00 ) 26.9 mm (.06 ) 2 Flaretek 76.2 mm (3.00 ) 29.0 mm (.4 ) 3 conductor connector/ cable (DXX) (Cable length up to 30 feet) Ø 47.8 mm (.88 ) 76.2 mm (3.00 ) A ELECTRICAL CONNECTOR INFORMATION Pin Wire 0 Black VDC Red VDC+ 4 20 ma (2 30 VDC) Voltage (2 30 VDC) 2 White Not used 0 5 VDC signal or 0 0 VDC signal Receptacle with plug removed B Inlet/Outlet Port Connection A B 4 Flaretek 76.2 mm (3.00 ) 25.2 mm (0.99 ) 3 8 Flaretek 76.2 mm (3.00 ) 26.9 mm (.06 ) 2 Flaretek 76.2 mm (3.00 ) 29.0 mm (.4 ).4 mm (0.45 ) 6 USER GUIDE ENTEGRIS, INC.
400 Single-port Pressure Transducer with NPT Connection 3 conductor Teflon -jacketed cable, pigtail connection (BXX) (Cable length up to 30 feet) 25.4 mm (.00 ) A Ø 47.8 mm (.88 ) ELECTRICAL CONNECTOR INFORMATION Wire Red VDC+ Black VDC 4 20 ma (2 30 VDC) Voltage (2 30 VDC) White Not used 0 5 VDC signal or 0 0 VDC signal B Inlet/Outlet Port Connection A B 4 MNPT 76.2 mm (3.00 ) 5.0 mm (0.59 ) 4 FNPT 82.3 mm (3.24 ) 2 FNPT 88.9 mm (3.50 ) 3 conductor connector/cable (DXX) (Cable length up to 30 feet) Ø 47.8 mm (.88 ) 76.2 mm (3.00 ) ELECTRICAL CONNECTOR INFORMATION Pin Wire 0 Black VDC Red VDC+ 4 20 ma (2 30 VDC) Voltage (2 30 VDC) 2 White Not used 0 5 VDC signal or 0 0 VDC signal A Inlet/Outlet Port Connection A B 4 MNPT 76.2 mm (3.00 ) 5.0 mm (0.59 ) 4 FNPT 82.3 mm (3.24 ) 2 FNPT 88.9 mm (3.50 ) Receptacle with plug removed B.4 mm (0.45 ) ENTEGRIS, INC. USER GUIDE 7
420 Flow-through Pressure Transducer with Flared Connection 44.5 mm (.75 ) 44.5 mm (.75) 47.2 mm (.86 ) 59.9 mm (2.36 ) 5. mm (0.20 ) (2) 3 conductor FEP-jacketed cable, pigtail connection (BXX) (Cable length up to 30 feet) 25.4 mm (.00 ) A C 6.4 mm(0.25 ) B ELECTRICAL CONNECTOR INFORMATION Wire Red VDC+ Black VDC 4 20 ma (2 30 VDC) Voltage (2 30 VDC) White Not used 0 5 VDC signal or 0 0 VDC signal Inlet/Outlet Port Connection A B C 4 Flaretek 89.7 mm (3.53 ) 94.5 mm (3.72 ) 8.5 mm (0.73 ) 3 8 Flaretek 89.7 mm (3.53 ) 98.3 mm (3.87 ) 7.0 mm (0.67 ) 2 Flaretek 96.0 mm (3.78 ) 02.4 mm (4.03 ) 2.6 mm (0.85 ) 3 4 Flaretek 04.4 mm (4. ) 08.5 mm (4.27 ) 25.4 mm (.00 ) Flaretek 2.5 mm (4.43 ) 20.7 mm (4.75 ) 30.5 mm (.20 ) 8 USER GUIDE ENTEGRIS, INC.
44.5 mm (.75 ) 44.5 mm (.75) 47.2 mm (.86 ) 59.9 mm (2.36 ) 5. mm(0.20 ) (2) 3 conductor connector/cable (DXX) (Cable length up to 30 feet) 76.2 mm (3.00 ) Receptacle with plug removed.4 mm (0.45 ) A C 6.4 mm (0.25 ) B ELECTRICAL CONNECTOR INFORMATION Pin Wire 0 Black VDC Red VDC+ 4 20 ma (2 30 VDC) Voltage (2 30 VDC) 2 White Not used 0 5 VDC signal or 0 0 VDC signal Inlet/Outlet Port Connection A B C 4 Flaretek 89.7 mm (3.53 ) 94.5 mm (3.72 ) 8.5 mm (0.73 ) 3 8 Flaretek 89.7 mm (3.53 ) 98.3 mm (3.87 ) 7.0 mm (0.67 ) 2 Flaretek 96.0 mm (3.78 ) 02.4 mm (4.03 ) 2.6 mm (0.85 ) 3 4 Flaretek 04.4 mm (4. ) 08.5 mm (4.27 ) 25.4 mm (.00 ) Flaretek 2.5 mm (4.43 ) 20.7 mm (4.75 ) 30.5 mm (.20 ) ENTEGRIS, INC. USER GUIDE 9
430 Single-port Pressure Transducer 3conductor FEP-jacketed cable Pigtail connection (Cable length 2 feet) 25.4 mm (.00 ) S Z Ø47.5 mm (.87 ) A B ELECTRICAL CONNECTOR INFORMATION Wire Red VDC+ Black VDC 4 20 ma (2 30 VDC) Voltage (2 30 VDC) White Not used 0 5 VDC signal or 0 0 VDC signal Inlet/Outlet Port Connection A B 4 Flaretek 79.2 mm (3.2 ) 25.2 mm (0.99 ) 3 8 Flaretek 79.2 mm (3.2 ) 26.9 mm (.06 ) 2 Flaretek 79.2 mm (3.2 ) 29.0 mm (.4 ) 4 MNPT 79.2 mm (3.2 ) 5.0 mm (0.59 ) 4 FNPT 87.9 mm (3.46 ) 2 FNPT 94.5 mm (3.72 ) 20 USER GUIDE ENTEGRIS, INC.
4230 Flow-through Pressure Transducer 44.5 mm (.75 ) 44.5 mm (.75 ) 59.9 mm (2.36 ) 5. mm(0.20 ) 25.4 mm (.00 ) 3conductor FEP-jacketed cable Pigtail connection (cable length 2 feet) S Z A C B ELECTRICAL CONNECTOR INFORMATION Wire Red VDC+ Black VDC 4 20 ma (2 30 VDC) Voltage (2 30 VDC) White Not used 0 5 VDC signal or 0 0 VDC signal Inlet/Outlet Port Connection A B C 4 Flaretek 95.3 mm (3.75 ) 94.5 mm (3.72 ) 8.5 mm (0.73 ) 3 8 Flaretek 95.3 mm (3.75 ) 98.3 mm (3.87 ) 7.0 mm (0.67 ) 2 Flaretek 0.6 mm (4.00 ) 02.4 mm (4.03 ) 2.6 mm (0.85 ) 3 4 Flaretek 0.0 mm (4.33 ) 08.5 mm (4.27 ) 25.4 mm (.00 ) Flaretek 8. mm (4.65 ) 20.7 mm (4.75 ) 30.5 mm (.20 ) ENTEGRIS, INC. USER GUIDE 2
For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit www.entegris.com and select the Legal Notices link from the footer. Product Warranties For Product Warranties, visit www.entegris.com and select the Legal Notices link from the footer. 22 USER GUIDE ENTEGRIS, INC.
Entegris, the Entegris Rings Design, Creating a Material Advantage, NT and Flaretek are registered trademarks of Entegris, Inc. Kalrez and Viton are registered trademarks of DuPont Dow Elastomers, L.L.C. Teflon is a registered trademark of E.I. du Pont de Nemours and Company. Pillar is a registered trademark of Nippon Pillar Packaging Company, Ltd. ENTEGRIS, INC. Corporate Headquarters 29 Concord Road Billerica, MA 082 USA Customer Service Tel. + 952 556 48 Customer Service Fax + 952 556 8022 In North America 800 394 4083 www.entegris.com 2004 204 Entegris, Inc. All rights reserved Printed in USA P/N 0-027289 (Rev. A 04/4) 3960-5426ENT-044