QuickChange NX Liquid Filters

Transcription

1 MICROCONTMINTION CONTROL QuickChange NX Liquid Filters High-performance, yield-enabling particle protection for aqueous-based chemistries QuickChange NX nondewetting filters deliver a cost-effective solution for clean, high-temperature filtration of aqueous-based, outgassing and base chemistries in nm technology nodes. Constructed of an all-ptfe membrane with PF supports, QuickChange NX filters utilize several membrane configurations to meet various process demands. In particular, the NXF and NXG membranes greatly improve flow rate performance while controlling contamination. The advanced cleaning standards effectively reduce metals, chlorides, and particle shedding to ensure lower organic extractables and maximize device yield. ecause QuickChange NX is packaged water-wet" in ultrapure DI water, there is no need for IP prewetting prior to use. This packaging prevents alcohol and chemical interactions, avoids potential sources of contamination, and prevents filter dewetting that leads to sudden flow loss and unscheduled filter changeouts. FETURES & ENEFITS Nondewetting PTFE membrane with PF supports Enables clean, high-temperature filtration of aqueous-based, outgassing and base chemistries in nm technology nodes PPLICTIONS Critical FEOL, MEOL and EOL processes Single wafer and batch tools for advanced nodes Critical chemical manufacturing and delivery systems Low- to mid-range ph optimized processes High-performance membrane configurations (NXF and NXG) UCM-1 cleaning Water-wet" packaging in ultrapure DI water Meet various process demands Enable high flow rate performance Control contamination Enhanced cleaning technology ensures lower organic extractables with high retention, fast startup time and improved flow rate performance Requires no IP prewetting prior to use Prevents alcohol and chemical interactions voids potential sources of contamination Prevents dewetting that can lead to sudden flow loss and unscheduled filter changeouts Comprehensive aqueousbased chemical compatibility High-temperature processes including SC1, SC, SPM, nitride etch, metal etch and various semi-aqueous resist strips Low-temperature processes including H SO, H 3 PO, HNO 3, HCl, NH OH, H O, TMH and ozonated water

2 QuickChange NX Filters SPECIFICTIONS Materials Membrane Prewet, nondewetting PTFE Supports PF FOR CRTRIDGE FILTERS Cartridge connections Code (S5-) o-rings Cartridge o-ring E-FKM, E-ETP, Chemraz or Kalrez Key (cartridge with Chemlock key only) PF FOR DISPOSLE FILTERS Shell PF Retention rating nm (NXT, NXE, NXF, NXG) 3 nm,.5,.1,. μm (NXT, NXX, NXM, NXE) Membrane area NXT NXX NXM NXE NXF NXG 3 nm,.5,.1 and. µm ".5 m (5. ft ) 1".9 m (9.7 ft ) 1.3 m (1 ft ) 1. m (19. ft ). m (3.7 ft ) " 1. m (19. ft ). m ( ft ) 3. m (3. ft ). m (7. ft ) 3".7 m (9 ft ) nm 1".9 m (9.7 ft ) m (1.5 ft ). m (5. ft ) 3 m (3.3 ft ) " 1. m (19. ft ) m (3.1 ft ). m (51.7 ft ) m (. ft )

3 SPECIFICTIONS (CONTINUED) Maximum operating conditions Maximum operating pressure:.5 MPa (5. bar; 5 C (77 F).97 MPa (.97 bar; 1 C (39 F) Maximum forward differential pressure:. MPa (. bar; 5 C (77 F).5 MPa (.5 bar; 7.5 C (39 F) Maximum reverse pressure:.3 MPa (3.5 bar; 5 5 C (77 F) Maximum operating temperature: C (39 F) Metallic extractables Standard and UCM-1: Testing conducted for 3 metals Other extractables Standard and UCM-1: TOC, Cl, F Note 1: Regarding operating conditions: pressure ratings are applicable to disposable format only. The housing type used with the QuickChange NX cartridge filter determines the actual temperature range and limits. Note : The UCM-1 cleaning technology is also available upon request. Please contact your local sales representative for more information. 3

4 QuickChange NX Cartridge Filters DIMENSIONS QuickChange NXT Cartridge Filters Ø95 mm (3.7 ) REF Ø5.1 mm (1.7 ) Ø7 mm (.7 ) Key adds 5 mm (.197 ) to length C mm (. ) REF Length C 1".3 mm (1.33") 5 mm (9.5") 3 mm (9.57") " 9.3 mm (19.") 1 mm (1.9") 79 mm (1.") 3" 73.3 mm (9.7") 71 mm (.39") 719 mm (.31") QuickChange NXF, NXG, NXE, NXM and NXX Cartridge Filters Ø95 mm (3.7 ) REF Ø5.1 mm (1.7 ) Ø mm (3.3 ) Key adds 5 mm (.197 ) to length C mm (. ) REF Length C "* 7.3 mm (5.1") 11 mm (.33") 1.5 mm (.7") 1" mm (9.1") 7 mm (.9") 5 mm (.") " 71 mm (1.5") 5 mm (17.7") 5 mm (17.") * The " length is only available with QuickChange NXX.

5 PERFORMNCE DT QuickChange NXF 1" Cartridge Filters 3 9 QuickChange NXG 1" Cartridge Filters nm 1 nm QuickChange NXT 1" Cartridge Filters nm.5 µm.1 µm. µm QuickChange NXX " Cartridge Filters µm.1 µm. µm QuickChange NXT " Cartridge Filters nm.5 µm.1 µm. µm QuickChange NXX 1" Cartridge Filters µm.1 µm. µm QuickChange NXT 3" Cartridge Filters nm.5 µm.1 µm. µm QuickChange NXX " Cartridge Filters µm.1 µm. µm

6 PERFORMNCE DT (CONTINUED) QuickChange NXM 1" Cartridge Filters nm.5 µm.1 µm. µm QuickChange NXE 1" Cartridge Filters nm 3 nm.5 µm.1 µm QuickChange NXM " Filters µm 3 nm.1 µm 3 1. µm QuickChange NXE " Cartridge Filters nm 5 nm.5 µm µm

7 ORDERING INFORMTION This information serves as a guide. Please contact your local representative to confirm part numbers QuickChange NX Cartridge Filters: part number NXC P Retention rating W = nm Y = 3 nm Z =.5 μm V =.1 μm G =. μm Membrane area T = NXT X = NXX M = NXM E = NXE F = NXF G = NXG Length 1 = 1" = " 3 = 3" S = " Cleaning = STD C = UCM-1 O-ring = E-FKM K = Kalrez (79UP) R = Kalrez (375UP) C = Chemraz = E-ETP Chemlock key K = Yes* = No * Optional Chemlock key attached to cartridge for use with Chemlock housing only Note: The " length is only available with the NXX membrane. 7

8 QuickChange NX Chem-Line I and Chem-Line II Disposable Filters DIMENSIONS The drawings on the following pages represent the broad range of QuickChange NX Chem-Line I and Chem-Line II disposable filters. Refer to the accompanying tables for dimensional information pertaining to each category and type. Chem-Line I Disposable Filters With Standard Vent Chem-Line I T-line with Standard Vent (TH, TH) mm (.3 ) 1 mm (.3 ) mm (.3 ) C 3 mm (1. ) 1 mm (.55 ) M 1.5 Depth mm 5 mm (.9 ) Chem-Line I L-line with Standard Vent (LH) 9 mm (3.5 ) 1 mm (.55 ) mm (.3 ) 1 mm (.3 ) C 37 mm (1. ) mm (.3 ) M 1.5 Depth mm 5 mm (.9 ) mm (1. ) Ø mm (.97 ) Ø1 mm (.5 ) Ø mm (. ) mm (1. ) Ø mm (.97 ) Ø1 mm (.5 ) Ø mm (. ) Ø7 mm (5. ) Ø7 mm (5. ) Chem-Line I T-tube with Standard Vent (H, S, W, ) mm (1.57 ) C 3 mm (1. ) 1 mm (.55 ) Chem-Line I S-tube with Standard Vent (F) Ø mm (5. ) mm (1.57 ) M 1.5 Depth 17.5 mm 1 mm (.5 ) 3 mm (1. ) mm (3. ) 5 mm (.9 ) Ø mm (5. ) mm (1. ) Ø mm (.97 ) Ø1 mm (.5 ) Ø mm (. ) mm (1.77 ) mm (1. ) Ø1 mm (.5 ) Ø mm (. ) Ø mm (.9 ) 1 mm (.5 ) 3 mm (1. )

9 DIMENSIONS (CONTINUED) Disposable type Length Length (overall height) Length (bottom fitting to centerline inlet fitting) Length C (inlet to outlet) Nominal dimensions for Chem-Line I with standard vent (1": NXX/NXM/NXE/NXF/NXG), (": NXX) T-line TH: 3 " inlet/outlet; 1 " vent/drain; Super Type Pillar fittings " mm (11.") 19 mm (.") 1 mm (7.9") 1" 39 mm (.5") 335 mm (13.19") 1 mm (7.9") TH: 1" inlet/outlet; 1 " vent/drain; Super Type Pillar fittings " mm (11.5") 5 mm (.") 1 mm (7.") 1" mm (.") 31 mm (13.3") 1 mm (7.") Nominal dimensions for Chem-Line I with standard vent (1": NXX/NXM/NXE/NXF/NXG), (": NXX) L-line* LH: 3 " inlet/outlet; 1 " vent/drain; Super Type Pillar fittings " 79 mm (11.") 1 mm (.5") 9 mm (3.5") 1" 395 mm (.5") 33 mm (13.") 9 mm (3.5") * L-line inlet to outlet length is inlet to centerline of outlet fitting. Nominal dimensions for Chem-Line I with standard vent (1": NXX/NXM/NXE/NXF/NXG), (": NXX) -line H: 3 " inlet/outlet; 1 " vent/drain Super Type Pillar fittings " 33 mm (13.1") 5 mm (1.") 7 mm (1.9") 1" 5 mm (17.71") 37 mm (1.57") 7 mm (1.9") S: 3 " inlet/outlet; 1 " vent/drain Super 3 Type Pillar fittings " 333 mm (13.") 53 mm (9.9") mm (1.55") 1" 9 mm (17.9") 39 mm (1.53") mm (1.55") W: 3 " inlet/outlet; 1 " vent/drain; Flowell Series fittings " 3 mm (.") 7 mm (9.7") 5 mm (9.9") 1" 3 mm (17.17") 33 mm (1.9") 5 mm (9.9") : 3 " inlet/outlet; 1 " vent/drain; FlareLock II fittings " 3 mm (.") 7 mm (9.7") 5 mm (9.9") 1" 3 mm (17.17") 33 mm (1.9") 5 mm (9.9") Disposable type Length Length (overall height) Nominal dimensions for Chem-Line I with standard vent (1": NXX/NXM/NXE/NXF/NXG), (": NXX) S-tube F: 3 " inlet/outlet; 1 " vent drain; FlareLock II fittings " 33 mm (13.5") 1" 59 mm (1.") 9

10 DIMENSIONS (CONTINUED) Chem-Line I Disposable Filters with Rotated Vent This drawing represents the Chem-Line I disposable filters with Rotated Vent. Refer to the accompanying table for specific dimensional information. Chem-Line I T-line with Rotated Vent (9S, 9S) mm (.3 ) mm (.3 ) M 1.5 Depth mm 3 mm (1. ) C 5 mm (. ) 33 mm (1.3 ) Ø mm (.97 ) Ø1 mm (.5 ) mm (1. ) Ø mm (. ) Ø7 mm (5.1 ) Disposable Type Length Length (overall height) Length (bottom fitting to centerline inlet fitting) Length C (inlet to outlet) Nominal dimensions for Chem-Line I with rotated vent (1": NXX/NXM/NXE/NXF/NXG) T-line 9S: 3 " inlet/outlet; 1 " vent drain; Super 3 Type Pillar fittings 1" 399 mm (.7") 31 mm (13.3") 17 mm (.77") 9S: 1" inlet/outlet; 1 " vent/drain; Super 3 Type Pillar fittings 1" 399 mm (.7") 31 mm (13.3") 1 mm (7.17") 1

11 DIMENSIONS (CONTINUED) Chem-Line I Disposable Filters with Core Vent and Core Vent (Rotated) These drawings represent the Chem-Line I disposable filters with Core Vent and Core Vent (Rotated). Refer to the accompanying tables for specific dimensional information. Chem-Line I T-line with Core Vent (TH, TH, TS) 3 mm (1. ) mm (.3 ) C 1 mm (.55 ) Chem-Line I L-line with Core Vent (LH) 9 mm (3.5 ) C 37 mm (1. ) 1 mm (.3 ) mm (.3 ) mm (1. ) mm (1.57 ) M 1.5 Depth mm 5 mm (.9 ) Ø mm (.97 ) Ø1 mm (.5 ) Ø mm (. ) Ø mm (.9 ) 1 mm (.55 ) 1 mm (.3 ) mm (1. ) mm (.3 ) M 1.5 Depth mm 5 mm (.9 ) Ø mm (.97 ) Ø1 mm (.5 ) Ø mm (. ) Ø mm (.9 ) mm (1.57 ) Chem-Line I T-tube with Core Vent (S, W) mm (1.57 ) 3 mm (1. ) C 1 mm (.55 ) Chem-Line I T-line with Core Vent (Rotated) (9S, 9S, 9L, 9L) 3 mm (1. ) C mm (.3 ) mm (3.1 ) mm (1.57 ) M 1. Depth 17.5 m 5 mm (.9 5 mm (. ) mm (.3 ) M 1.5 Depth mm 33 mm (1.3 ) Ø mm (.97 ) Ø1 mm (.5 ) Ø1 mm (.5 ) mm (1. ) Ø mm (. ) Ø mm (.9 ) mm (1. ) Ø mm (. ) Ø mm (.9 ) mm (1.57 ) mm (1.57 ). 11

12 DIMENSIONS (CONTINUED) Disposable type Length Length (overall height) Length (bottom fitting to centerline inlet fitting) Length C (inlet to outlet) Nominal dimensions for Chem-Line I with core vent (1": NXX/NXM/NXE/NXF/NXG) T-line TH: 3 " inlet/outlet; 1 " vent/drain; Super 3 Type Pillar fittings 1" 3 mm (.") 37 mm (.7") 1 mm (7.9") TH: 1" inlet/outlet; 1 " vent/drain; Super Type Pillar fittings 1" 39 mm (.9") 333 mm (13.11") 1 mm (7.") TS: 3 " inlet/outlet; 1 " vent/drain; Super 3 Type Pillar fittings 1" 33 mm (.") 3 mm (.7") 17 mm (.77") Nominal dimensions for Chem-Line I with core vent (1": NXX/NXM/NXE/NXF/NXG) L-line* LH: 3 " inlet/outlet; 1 " vent/drain; Super Type Pillar fittings 1" 37 mm (.") 3 mm (.3") 9 mm (3.5") *L-line inlet to outlet length is inlet to centerline of outlet fitting. Nominal dimensions for Chem-Line I with core vent (1": NXX/NXM/NXE/NXF/NXG) T-tube W: 3 " inlet/outlet; 1 " vent/drain; Flowell series fittings 1" 3 mm (17.17") 33 mm (1.9") 5 mm (9.9") S: 3 " inlet/outlet; 1 " vent/drain; Super 3 Type Pillar fitting 1" 9 mm (17.9") 39 mm (1.53") mm (1.55") Nominal dimensions for Chem-Line I with core vent (rotated) (1": NXX/NXM/NXE/NXF/NXG) T-line 9S: 3 " inlet/outlet; 1 " vent/drain; Super 3 Type Pillar fittings 1" 391 mm (.37") 333 mm (13.11") 17 mm (.77") 9S: 1" inlet/outlet; 1 " vent/drain; Super 3 Type Pillar fittings 1" 391 mm (.37") 333 mm (13.11") 1 mm (7.17") 9L: 3 " inlet/outlet; 1 " vent/drain; PrimeLock fittings 1" mm (1.") 39 mm (13.7") mm (.") 9L: 1" inlet/outlet; 1 " vent/drain; PrimeLock fittings 1" mm (1.") 39 mm (13.7") 3 mm (9.5")

13 DIMENSIONS (CONTINUED) Chem-Line II Disposable Filters This drawing represents the Chem-Line II disposable filters. Refer to the accompanying table for specific dimensional information. Nominal dimensions for Chem-Line II disposable filters Inlet/ outlet Vent/ drain DIMENSIONS (" filter) (1" filter) Flaretek fittings 3 " 1 " 37 mm (1.") 3 mm (9.") 33 mm (13.51") 1 " 1 37 mm (1.") 3 mm (9.5") 35 mm (1.3") 3 " 1 " 37 mm (1.") mm (9.") 359 mm (1.13") 3 " 1 " 1 mm (1.3") 5 mm (9.5") 33 mm (1.3") Ø1 mm (.1 ) 1" 1 " 37 mm (1.") 55 mm (1.") 3 mm (1.7") 1" 1 " 1 mm (1.3") 3 mm (1.37") 37 mm (1.") Flowell series fittings 11 mm (.33 ) 3 " 1 " 37 mm (1.") mm (9.77") 31 mm (1.) 3 " 1 " 1 mm (1.3") 1 mm (9.9") 35 mm (13.9") Note: = overall height = Centerline fitting length 1" 1 " 37 mm (1.") 5 mm (1.1") 371 mm (1.1") 1" 1 " 1 mm (1.3") 53 mm (9.9") 3 mm (1.1") Super 3 Type Pillar fittings (female) 3 " 1 " 37 mm (1.") 5 mm (9.") 35 mm (1.9) Super 3 Type Pillar fittings (male) 1 " 1 " 37 mm (1.") mm (.9") 31 mm (13.1") 3 " 1 " 37 mm (1.") 37 mm (9.31") 35 mm (13.7") 3 " 1 " 1 mm (1.3") 3 mm (9.9") 39 mm (13.7") 1" 1 " 37 mm (1.") 7 mm (1.") 33 mm (.7") 1" 1 " 1 mm (1.3" 7 mm (1.53") 3 mm (1.97") PrimeLock fittings 3 " 1 " 37 mm (1.") 3 mm (9.57") 35 mm (1.") 1 " 1 " 37 mm (1.") mm (9.75") 31 mm (1.") 3 " 1 " 37 mm (1.") mm (1.3") 373 mm (1.") 1" 1 " 1 mm (1.3") 3 mm (.") 13

14 PERFORMNCE DT QuickChange NXF 1" Disposable Filters 3 " I/O nm QuickChange NXG 1" Disposable Filters 3 " I/O nm QuickChange NXF 1" Disposable Filters 1 " I/O nm QuickChange NXG 1" Disposable Filters 1 " I/O nm QuickChange NXF 1" Disposable Filters 3 " I/O 3 9 QuickChange NXG 1" Disposable Filters 3 " I/O nm nm QuickChange NXF 1" Disposable Filters 1" I/O 3 9 QuickChange NXG 1" Disposable Filters 1" I/O nm nm

15 PERFORMNCE DT (CONTINUED) QuickChange NXX " Disposable Filters 3 " I/O µm.1 µm. µm QuickChange NXX 1" Disposable Filters 3 " I/O µm.1 µm. µm QuickChange NXX " Disposable Filters 1 " I/O µm.1 µm. µm QuickChange NXX 1" Disposable Filters 1 " I/O µm.1 µm. µm QuickChange NXX " Disposable Filters 3 " I/O µm.1 µm. µm QuickChange NXX 1" Disposable Filters 3 " I/O nm.5 µm.1 µm. µm QuickChange NXX " Disposable Filters 1" I/O µm.1 µm. µm QuickChange NXX 1" Disposable Filters 1" I/O µm.1 µm. µm

16 PERFORMNCE DT (CONTINUED) QuickChange NXM 1" Disposable Filters 3 " I/O nm.5 µm.1 µm. µm QuickChange NXE 1" Disposable Filters 3 " I/O nm nm.5 µm.1 µm. µm QuickChange NXM 1" Disposable Filters 1 " I/O nm.5 µm.1 µm. µm QuickChange NXE 1" Disposable Filters 1 " I/O nm 3 nm.5 µm.1 µm. µm QuickChange NXM 1" Disposable Filters 3 " I/O nm.5 µm.1 µm. µm QuickChange NXE 1" Disposable Filters 3 " I/O nm 3 nm.5 µm.1 µm. µm QuickChange NXM 1" Disposable Filters 1" I/O 3 9 QuickChange NXE 1" Disposable Filters 1" I/O nm.5 µm.1 µm. µm nm 3 nm.5 µm.1 µm. µm

17 ORDERING INFORMTION This information serves as a guide. Please contact your local representative to confirm part numbers. QuickChange NX Chem-Line I Disposable Filters with Standard Vent: part number NXD Retention rating W = nm Y = 3 nm Z =.5 μm V =.1 μm G =. μm P Membrane area X = NXX M = NXM E = NXE F = NXF G = NXG Length 1 = 1" S = " * Cleaning = STD C = UCM-1 Fitting configuration LH TH TH H F S 9S W 9S QuickChange NX Chem-Line I Disposable Filters with Core Vent and Core Vent (Rotated): part number NXV Retention rating W = nm Y = 3 nm Z =.5 μm V =.1 μm G =. μm P Membrane area X = NXX M = NXM E = NXE F = NXF G = NXG Length 1 = 1" S = " * Cleaning = STD C = UCM-1 Fitting configuration LH TS TH 9S S 9S W 9L TH 9L *The " length is only available with the NXX membrane. Fitting Key Key Configuration Inlet /outlet Vent /drain Fitting LH L-line/L-line core vent 3 " 1 " Super Type Pillar TH T-line/T-line core vent 3 " 1 " Super Type Pillar H T-tube 3 " 1 " Super Type Pillar S T-tube/T-tube core vent 3 " 1 " Super 3 Type Pillar W T-tube/T-tube core vent 3 " 1 " Flowell series T-tube 3 " 1 " FlareLock II TH T-line core vent 1" 1 " Super Type Pillar F In-line female 3 " 1 " FlareLock II TS T-line core vent 3 " 1 " Super 3 Type Pillar 9S 9S T-line rotated vent/ T-line core vent (rotated) T-line rotated vent/ T-line core vent (rotated) 3 " 1 " Super 3 Type Pillar 1" 1 " Super 3 Type Pillar 9L T-line core vent (rotated) 3 " 1 " PrimeLock 9L T-line core vent (rotated) 1" 1 " PrimeLock 17

18 ORDERING INFORMTION (CONTINUED) This information serves as a guide. Please contact your local representative to confirm part numbers. QuickChangeNX Chem-Line II Disposable Filters: part number NX Retention rating W = nm Y = 3 nm Z =.5 μm V =.1 μm G =. μm Note: The " length is only available with QuickChange NXX. P Membrane area X = NXX M = NXM E = NXE F = NXF G = NXG Length 1 = 1" S = " Cleaning = STD C = UCM-1 Fitting configuration M31F S M1F 1S M1F M1S M1F M1S F M1S 1F F1S M1 M31L M1 M1L M1L 1 11L Fitting Key Key Configuration Inlet /outlet Vent /drain Fitting M31F In-line 3 " 1 " Flaretek M1F In-line 1 " 1 " Flaretek M1F In-line 3 " 1 " Flaretek M1F In-line 1" 1 " Flaretek F In-line offset 3 " 1 " Flaretek 1F In-line offset 1" 1 " Flaretek M1 In-line 3 " 1 " Flowell series M1 In-line 1" 1 " Flowell series In-line offset 3 " 1 " Flowell series 1 In-line offset 1" 1 " Flowell series S In-line offset 3 " 1 " Super 3 Type Pillar 1S In-line offset 1" 1 " Super 3 Type Pillar M1S In-line 1 " 1 " Super 3 Type Pillar M1S In-line 3 " 1 " Super 3 Type Pillar M1S In-line 1" 1 " Super 3 Type Pillar F1S In-line female 3 " 1 " Super 3 Type Pillar M31L In-line 3 " 1 " PrimeLock M1L In-line 1 " 1 " PrimeLock M1L In-line 3 " 1 " PrimeLock 11L In-line 1" 1 " PrimeLock 1

19 QuickChange NX P1/P/P3 Small Disposable Filters SPECIFICTIONS NX P1 NX P NX P3 Materials Membrane Prewet, nondewetting PTFE Supports PF Shell PF Retention rating nm, 3 nm,.5 μm and.1 μm Membrane area nm.19 m (.1 ft ). m (.7 ft ) 3 nm.1 m (1.1 ft ).1 m (1.9 ft ).5 m (. ft ).5 µm.1 m (1.1 ft ). m (1.3 ft ).3 m (3. ft ).1 µm.1 m (1.1 ft ).13 m (1. ft ).3 m (3. ft ) Cartridge connections N/ Maximum operating conditions Maximum operating pressure.59 MPa (5.9 bar; 5 C (77 F).19 MPa (1.9 bar; 95 C (3 F) Maximum forward differential pressure.39 MPa (3.9 bar; 57 5 C (77 F).19 MPa (1.9 bar; 95 C (3 F) Maximum reverse pressure.9 MPa (.9 bar; 5 C (77 F) Maximum operating temperature 95 C (3 F) Metallic extractables UCM-1 Testing conducted for 3 metals Other extractables Standard and UCM-1 TOC, Cl, F Note: QuickChange NX P and P3 with the nm retention rating are only available with Ultraclean (UCM-1), not Standard Clean. 19

20 DIMENSIONS These drawings represent the small disposable filters (P1/P/P3). Refer to the accompanying tables for specific dimensional information. QuickChange NX P1 Small Disposable Filters 13 mm (.5 ) 57 mm (. ).5 mm (. ) Nominal dimensions small disposables P1 Fitting type Dimension Super Type Pillar mm (.7") Flaretek compatible 17 mm (5.79") QuickChange NX P Small Disposable Filters Nominal dimensions small disposables P Fitting type Dimension Dimension. mm(3.31 ) 9. mm(3.5 ) mm Super Type Pillar 3 mm (1.") 1 mm (5.5") mm Super 3 Type Pillar 31 mm (1.") 135 mm (5.3") 3 " Super 3 Type Pillar 31 mm (1.") 135 mm (5.3") 3 " Flaretek compatible 3 mm (1.") mm (.5") QuickChange NX P3 Small Disposable Filters Nominal dimensions small disposables P3 Fitting type Dimension Dimension. mm (3.31 ) 9. mm (3.5 ) mm Super Type Pillar 3 mm (1.") 19 mm (7.") 1 " Super Type Pillar 3 mm (1.") mm (.3") mm Super 3 Type Pillar 31 mm (1.") 19 mm (7.") 3 " Super 3 Type Pillar 31 mm (1.") 19 mm (7.") 1 " Super 3 Type Pillar 31 mm (1.") 199 mm (7.") 3 " Flaretek compatible 3 mm (1.") mm (.")

21 PERFORMNCE DT QuickChange NX P1 Disposable Filters QuickChange NX P Disposable Filters nm.5 µm.1 µm nm µm 1.1 µm QuickChange NX P3 Disposable Filters Typical mm and 3 Fittings µm. 3 nm.1 µm QuickChange NX P3 Disposable Filters Typical 1 Fittings nm.5 µm.1 µm QuickChange NX P Disposable Filters nm 1 QuickChange NX P3 Disposable Filters ( nm) I/O 5 1 I/O

22 ORDERING INFORMTION This information serves as a guide. Please contact your local representative to confirm part numbers. QuickChange NX P1 Disposable Filters: part number NXP 1 P QuickChange NX P P3 Disposable Filters: part number NXP P Retention rating Y = 3 nm Z =.5 μm V =.1 μm Fitting type MH M11F M11H Retention rating W = nm Y = 3 nm Z =.5 μm V =.1 μm Type = P 3 = P3 Cleaning = Standard C = UCM-1 Fitting type MH MS MWW M31F M31S M1H M1S Fitting key Key Inlet/outlet Vent/drain Fitting MH mm mm Super Type Pillar M11F 1 " 1 " Flaretek M11H 1 " 1 " Super Type Pillar MH mm mm Super Type Pillar MS mm mm Super 3 Type Pillar MWW mm mm Flowell M31F 3 " 1 " Flaretek M31S 3 " 1 " Super 3 Type Pillar M1H 1 " 1 " Super Type Pillar M1S 1 " 1 " Super 3 Type Pillar FOR MORE INFORMTION Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit entegris.com and select the Contact Us link to find the customer service center nearest you. TERMS ND CONDITIONS OF SLE ll purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit entegris.com and select the Terms & Conditions link in the footer. Corporate Headquarters 9 Concord Road illerica, M 11 US Customer Service Tel Fax Toll Free 39 3 Entegris, the Entegris Rings Design, Pure dvantage, and Chemlock Savana, are Chem-Line trademarks, FlareLock of Entegris,, Inc. 1-XX Flaretek, PrimeLock Entegris,, Inc. QuickChange ll rights, and reserved. Torrento are Printed trademarks in the of US Entegris, 1-75ENT-1 Inc.; Flowell is a trademark of Flowell Corporation; Pillar is a registered trademark of Nippon Pillar Packing Company, Ltd.; Chemraz is a registered trademark of Greene, Tweed and Co.; Kalrez is a trademark of E. I. du Pont de Nemours and Company Entegris, Inc. ll rights reserved. Printed in the US 37-75ENT-917