Rotary Stages Mechanical-Bearing, Worm-Driven Rotary Stage Low profile and compact with aperture Precision worm-gear drive DC servo or stepper motor Continuous 360 rotary positioning Graduated tabletop High vacuum capable Optional lens mount adapter The MPSGR and MPS75GR miniature rotary stages provide accurate positioning for both the confines of the laboratory and in manufacturing environments. Compact multi-axis configurations with linear and other MPS series stages The MPSGR and MPS75GR rotary stages provide accurate positioning performance in a low profile and compact footprint. They are perfect for the confines and requirements of the laboratory and are also applicable for use in manufacturing environments. MPS-GR stages are ideal for optics, measurement, alignment and other demanding applications. Construction Features The MPS-GR stages incorporate a precision worm-gear drive mechanism and bearing components for highly accurate positioning performance over the lifetime of the product. They are available with DC servo or stepper motors. The DC servomotors for both stages are equipped with a squarewave rotary encoder. The MPSGR has a 20 mm The MPS-GR series includes a graduated tabletop. aperture and the MPS75GR has a 30 mm aperture. The MPS75GR includes a manual adjustment knob. Vacuum and Mounting Options Both stages are available with optional vacuum preparation to 10-6 torr including a vacuum-rated connector. An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Also available is an aperture Lens Mount Option (LMO) for easy mounting of standard lenses over the stage aperture. The MPSGR and MPS75GR are members of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns with adapter plates and brackets. 1 www.aerotech.com
SPECIFICATIONS Mechanical Specifications MPSGR MPS75GR Travel 360 Continuous Uncalibrated 2 arc sec 200 arc sec Accuracy (1) Calibrated 80 arc sec Resolution DC Motor 2 arc sec 1 arc sec SM Motor 2 arc sec 1 arc sec Unidirectional Repeatability (1) SM Motor 20 arc sec 10 arc sec DC Motor 8 arc sec 6 arc sec Tilt Error Motion 40 arc sec Worm Gear Ratio 80:1 100:1 Maximum Speed DC Motor 23 deg/s 180 deg/s SM Motor 4.5 deg/s 100 deg/s Aperture 20 mm 30 mm Maximum Torque (Continuous) 0.4 N-m 0.6 N-m Load Capacity Axial 4 kg 12 kg Radial 1 kg 5 kg Moment 0.25 N-m 1.5 N-m Rotor Inertia (Unloaded) 0.000031 kg-m 2 0.000141 kg-m 2 Stage Mass 0.8 kg 1.7 kg Material Anodized Aluminum Body Notes: 1. With Aerotech controllers. 2. Payload specifications are single-axis system. 3. Excessive duty cycle may impact stage accuracy. 4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. Rotary Stages Electrical Specifications Drive System Feedback MPSGR DC Motor DC Brush Servomotor with 14:1 Gearbox 512 Lines/Rev Rotary Encoder Electronic Resolution 0.565 arc sec (0.000157 ) MPSGR SM Motor 24 VDC Bipolar Stepper Motor with 43:1 Gearbox N/A 0.785 arc sec (0.000218 ) @ 480 steps/rev motor resolution MPS75GR DC Motor DC Brush Servomotor 10,000 Lines/Rev Rotary Encoder 0.324 arc sec (0.00009 ) MPS75GR SM Motor 24 VDC Bipolar Stepper Motor N/A 0.324 arc sec (0.00009 ) @ 40000 steps/rev motor resolution Maximum Bus Voltage 48 VDC 48 VDC* 48 VDC 48 VDC* Home Marker Optical Switch Optical Switch Optical Switch Optical Switch * With Aerotech control system Recommended Controller MPSGR DC Motor MPSGR SM Motor MPS75GR DC Motor A3200 Npaq/Npaq MR/Ndrive MP Multi-Axis Ensemble Ensemble LAB/Epaq/Epaq MR/Ensemble MP Single Axis Soloist Soloist MP MPS75GR SM Motor www.aerotech.com 2
SPECIFICATIONS Rotary Stages MPSGR maximum load versus offset. MPSGR continuous torque versus speed. MPS75GR maximum load versus offset. MPS75GR continuous torque versus speed. 3 www.aerotech.com
MPSGR Rotary Stages STAGE CABLE EXIT 3M LENGTH 23 SQ 4X M3X0.5 4 4X 3.4 THRU ALL 6.5 TO DEPTH SHOWN A 9.5 31.5 0.8 4 27 54 DETAIL A 20 H6 5.75 127 41.5 26 20.5 TYP 12.5 58 5 25 4X M3X0.5 HELICOIL 4.5 MAX THREAD NO DEEPER DAMAGE TO STAGE CAN RESULT 0.8 4X M4X0.7 8 20 CLEAR APERTURE REF REF www.aerotech.com 4
Rotary Stages MPSGR-MP FROM FAR SIDE 4X 3.4 THRU ALL 6.5 4.5 6.5 4X 6.8 SLOT THRU 25.4 25 4X M3X0.5 HELICOIL 4.5 12.5 13 20.5 THRU 54 8 75 76.2 90 MPSGR-LMO 4X M3X0.5 HELICOIL 4.5 41.5 A 4X 3.4 THRU ALL 6 4 8 23 SQ C-MOUNT THREAD (1 INCH-32UN-2B) 20.5 23 SQ A 2 SECTION A-A 5 www.aerotech.com
AP1-MPS 3.4 THRU ALL 6.5 4.5 (8) PLACES 25 M3X0.5 4.5 (4) PLACES Rotary Stages 25 6.5 C L 58 C L 20.5 THRU 10 54 www.aerotech.com 6
Rotary Stages HDZ-MPSGR 3.4 THRU ALL 6.4 TO DEPTH SHOWN (8) PLACES 25 25 R6.4 (4) PLACES M3X0.5 4.5 (8) PLACES 69.3 40.3 22 8 SQ. APERTURE TYP 3.5 58 7 www.aerotech.com
MPS75GR Rotary Stages STAGE CABLE EXIT 3M LENGTH 30 SQ 4X M4X0.7 4 SCREW CLEARANCE BELOW THREAD = 4 A 11 4X 4.5 THRU ALL 8 TO DEPTH SHOWN 70 41 0.5 DETAIL A 30 H6 9.8 30 CLEAR APERTURE 6 12 36 72 193 TO DETACH KNOB REMOVE M4 SET SCREW 16 65 28 TYP 20 82 7.5 30 4X M4X0.7 HELICOIL 6 0.8 www.aerotech.com 8
Rotary Stages MPS75GR-MP FROM FAR SIDE 4X 4.5 THRU ALL 8 4.5 70 6 4X 6.8 SLOT THRU.8 30 72 4X M4X0.7 HELICOIL 6 20 15.5 30.5 THRU 8 100 101.6 115 MPS75GR-LMO 4X M4X0.7 HELICOIL 6 52.5 A 4X 4.5 THRU ALL 8 4.5 8 30 SQ M32X0.75-6H THREAD 29 30 SQ A SECTION A-A 2 9 www.aerotech.com
AP2-MPS 4.5 THRU ALL 8 4.5 (8) PLACES 33 M4X0.7 8 (4) PLACES Rotary Stages 33 6 C L 70 82 M3.7x0.5 6 (4) PLACES C L 30.5 THRU 72 10 www.aerotech.com 10
Rotary Stages HDZ-MPS75GR 4.5 THRU ALL 9.5 TO DEPTH SHOWN (8) PLACES 33 33 70 R10 (4) PLACES M4X0.7 6 (8) PLACES 70 110.5 69.5 28 13 44 SQ. APERTURE TYP 8 75 82 11 www.aerotech.com
ORDERING INFORMATION Ordering Example MPS GR -TTM -G80 -DC -MP -NSL Series MPS Size GR 75GR Stage Construction Option Worm-Gear Stage MPSGR Miniature Positioning Series rotary stage with 20 mm clear aperture MPS75GR Miniature Positioning Series rotary stage with 30 mm clear aperture and manual adjustment knob Stage Construction Option -VAC Vacuum preparation of the stage and motor to 10-6 torr Tabletop Gear Ratio Motor Options Options Testing Options -VAC -TTM -G80 (MPSGR) -G100 (MPS75GR) -DC -SM -MP -LMO -PLOTS -NO PLOTS Rotary Stages Tabletop -TTM Metric pattern/thread tabletop Worm Gear Ratio -G80 80:1 worm gear ratio (MPSGR only) -G100 100:1 worm gear ratio (MPS75GR only) Motor -DC -SM Options -MP -LMO Testing -PLOTS -NO PLOTS DC servomotor with 3 meter integral cable Stepping motor with 3 meter integral cable Breadboard mounting plate Aperture lens mount option Accuracy and repeatability plots No performance plots Accessories (to be ordered as separate line item) HALAR High-accuracy system error correction for accuracy and repeatability AP1-MPS Adapter mounting plate; mounts MPSGR to MPSSL AP2-MPS Adapter mounting plate; mounts MPSGR/MPS75GR to MPS75SL HDZ-MPSGR HDZ right-angle bracket; mounts MPSGR to MPSSL HDZ-MPS75GR HDZ right-angle bracket; mounts MPS75GR to MPS75SL www.aerotech.com 12