Lasersystems. Overview Lasersystems at ECN Engineering & Services μm 2 μm. Femtosecond. Pico~ Nano~ <2. Nano~ 2. Micro~ Milli~ Continuous

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Overview at 10.6 μm 2 μm 1565 nm 1064 nm 800 nm 532 nm 355 nm 265 nm Femtosecond Pico~ Nano~ <2 Nano~ 2 Micro~ Milli~ Continuous Legenda: : Laser systems @ ECN : Systems @ suppliers

4 axis cutting Lasag KLS 246-102 Type: Lamp pumped Nd:YAG Average power: 200 W Pulse length: 0.02 20 ms Pulse energy: 30 J (@ 0.3 ms) Repetition rate: 1000 Hz Aerotech linear stages X/Y stage: linear motor XYZ stroke: 600x400x300 mm Accuracy: 1.5 µm (X/Y) 5 µm (Z) Straightness: 3 µm (X/Y) 10 µm (Z) Rotation axis Direct drive Resolution 0.001 Optics: 50, 100 and 150 mm lenses for spot sizes of 30 to 100 µm CAD/CAM MasterCAM FineCut resonator : 20 µm wide kerfs with up to 5000 Hz pulse rates with 0.012ms pulses.

4 axis cutting Lasag KLS 321 Type: Lamp pumped Nd:YAG Average power: 200 W Pulse length: 0.2 20 ms Pulse energy: 70 J Repetition rate: 100 Hz Aerotech linear stages X/Y stage: linear motor XYZ stroke: 600x400x300 mm Accuracy: 1.5 µm (X/Y) 5 µm (Z) Straightness: 3 µm (X/Y) 10 µm (Z) Rotation axis Direct drive Resolution: 0.001 Optics: 100 mm lens, spot size ~50 µm CAD/CAM MasterCAM Mount for welding-optics to perform NC contour welding with the SLS laser.

Welding / Soldering Lasag SLS C60 Type: Lamp pumped Nd:YAG Fiber coupled Average power: 200 W Fiber core: 400 µm Pulse length: 0.2 20 ms Pulse energy: 50J Repetition rate: 500 Hz Tabletop setup with motorized Z-axis Additionally: Linear motion in 1 axis Rotation axis Optics: 50, 100 and 150 mm lenses forspot sizes of 200, 400 resp 600 µm Mergenthaler Pyrometer integrated into the pulse control. Thermal control range: from 180 to 700 deg C Response time: 0.1 ms The optics mount also on the Aerotech setup for NC welding/soldering

Welding Lasag SLS C16 Type: Lamp pumped Nd:YAG Fiber coupled Average power: 10 W Fiber core: 100 µm Pulse length: 0.2 20 ms Pulse energy: 6 J Repetition rate: 100 Hz Tabletop setup with motorized Z-axis Additionally: Linear motion in 1 axis Rotation axis Optics: 50, 100 and 150 mm lenses forspot sizes of 50, 100 resp 200 µm The optics mount also on the Aerotech setup for CNC welding/soldering

Marking Baasel LBI 6000 Type: Lamp pumped QS Nd:YAG Average power: 40 W Pulse length: 150 ns (3 khz) Pulse energy: 10 mj (3 khz) Repetition rate: 50 khz Scanner: Hurryscan 10 Field size: 200x200 mm Repeatability: < 5 µm Straightness: < 20 µm / 150 mm Beamexpander: zoom 2-8x Spotsize: typical 80 µm Vision camera, Philips Inca, integrated into the laser light path Resolution: 20 µm Repeatability of pattern recognition: 10 µm Fast and accurate product setup due to fixtures based on System 3R Integrated software solution on vision and laser processing CAD/CAM Samlight and MasterCAM

Marking Baasel LBI 6000 Type: Lamp pumped QS Nd:YAG Average power: 40 W Pulse length: 150 ns (3 khz) Pulse energy: 10 mj (3 khz) Repetition rate: 50 khz Scanner: Hurryscan 10 Field size: 200x200 mm Repeatability: < 5 µm Straightness: < 20 µm / 150 mm Beamexpander: zoom 2-8x Spotsize: typical 80 µm Vision camera, Philips Inca, integrated into the laser light path Resolution: 20 µm Repeatability of pattern recognition: 10 µm CAD/CAM Samlight and MasterCAM

7 axis UV Rofin Baasel 20E-THG Type: Diode pumped QS Nd:YAG Wavelength: 355 nm Average power: 1.5 W Pulse length: 30 ns (15 khz) Pulse energy: 0.1 mj (15 khz) Repetition rate: 50 khz Average power: 20W Pulse length: 20 ns (5 khz) Pulse energy: 4 mj (5 khz) Repetition rate: 50 khz Vision camera, Philips Dica, integrated into the laser light path Resolution: 5 µm Fast and accurate product setup due to fixtures based on System 3R Motorized attenuator Integrated software solution on scanner, stage and attenuator IR processing @ 1064nm also possible (scanner details: see Marking Laser ) Scanner: Hurryscan 10 Scanner: Hurryscan 10 Optics: 100 mm ftheta telecentric Field size: 50x50 mm Repeatability: < 2 µm Straightness: < 5 µm / 50 mm Spot size: typical 25 µm Aerotech XYZΘ system: X/Y stage: linear motor XYZ stroke: 600x400x300 mm Accuracy: 1.5 µm (X/Y) 5 µm (Z) Straightness: 3 µm (X/Y) 10 µm (Z) Rotation: Direct drive CAD/CAM: MasterCAM

5 axis Fiber SPI 20W/G3 Type: Diode pumped fiber MoPa Average power: 20 W Pulse length: 60 ns (25 khz) Pulse energy: 0.8 mj (25 khz) Repetition rate: 50 khz Integrated software solution on scanner and stage positioning MoPa concept enables high pulse energies at high frequencies: Scanner: Hurryscan 20 Field size: 120x120 mm Repeatability: < 5 µm Straightness: < 20 µm / 100 mm Beamexpander: zoom 2-8x Spot size: typical 50 µm Aerotech XY station XY stroke: 300x300 mm Accuracy: 2 µm Straightness: CAD/CAM: Samlight and MasterCAM Pulse energy at high repetition rate Pulse energy (mj) 0.2 0.15 0.1 0.05 SPI Waveform 2 SPI Waveform 3 SPI Waveform 4 SPI Waveform 5 20W Q switched vanadate 0 0 100 200 300 400 500 Repetition rate (khz)

2D Processing Laser sources cw CO2 laser λ 10.6 µm P ~100 W cw & pulsed Fibre laser λ 1070 nm P ~ 200 W cw Fibre laser λ 1565 nm P ~ 20 W Siemens Sinumerik 840D control 3 degrees of freedom: X-Y translation and rotation (440 x 440 mm ). Maximum speed: 100 mm/s Compatible with common CNC codes Scanner & nozzle optics for 1070 nm and 10.6 µm Laser type/wavelength/pulsed or cw mode depending on application. Flexible tool, multiple purposes (multiple lasers and optics available) Semi-automated alignment based on vision Additional temperature logging of process Enhanced process control with direct pyrometer feedback with respect to laser power

1565 nm Fibre Laser details cw Fibre laser λ 1565 nm P ~ 20 W Scanner optics 3 degrees of freedom: X-Y translation and rotation (100 x 100 mm ). Maximum speed: 2000 mm/s Unique wavelength

1064 nm Pulsed solid state Laser details Trumpf HL 204P pulsed solid state laser: λ=1064 nm Pulse Power: 0.3-7 kw Pulse Energy max: 75 J Pulse Length: 0.3-10/20 ms (max length depends on pulse energy) 4 fibres, each 10 metres long Beam optics with camera option Spot diameter 550 µm 4 fibres: time sharing Working distance: approx. 120 mm Maximum pulse frequency: 600 Hz Programmable pulse shapes In combination with the long fibres the compact beam delivery optics mount on and can be integrated with various set-ups in ECN s laboratory. Laser spot welding & cutting are typical application areas. Each fibre can have its own pulse characteristics, because of time sharing.

1060 nm Fibre Laser details Pulsed fibre laser λ = 1060 nm P = 18 W Max Pulse Frequency: 600 khz Pulselengths = 1, 5 & 10 ns Beam Quality : M 2 =1.2 Scanner optics 3 degrees of freedom: X-Y translation and rotation (100 x 100 mm ). Maximum speed: 2000 mm/s Short Pulse

532 nm Fibre Laser details Pulsed fibre laser λ = 532 nm P = 5 W Pulselength = 1 ns Beam Quality : M 2 =1.2 Scanner optics 3 degrees of freedom: X-Y translation and rotation (100 x 100 mm ). Maximum speed: 2000 mm/s Short Pulse

Three color sub Pico laser Laser details Pulse widht tunable λ = 1030 nm, 515 nm, 340 nm P = 10 W @ 1030 nm Pulselength = 200 fs to 10 ps Beam Quality : M 2 =1.2 XYZ with galvo integration On the fly marking Galvo stage integration continous by: adjustable pulselenght from 200 fs to 10 ps Scanner optics, 3 wavelengths 4 degrees of freedom: X-Y-Z translation and rotation (limited to 100 x 100 mm ). R2R setup available Maximum speed: 2500 mm/s