Advanced Texture MetroPro Application

Transcription

1 OMP-0362G Advanced Texture MetroPro Application AdvText.app This booklet is a quick reference; it assumes that you are familiar with MetroPro and the instrument. Information on MetroPro is provided in MetroPro Quick-Start Guide, OMP-0469, and the MetroPro Reference Guide, OMP For information on the instrument, please refer to the applicable Zygo Corporation manual. Information herein is applicable as of MetroPro version The Advanced Texture Application The MetroPro Advanced Texture Application provides a complete set of controls, plots, and results, to measure and quantify the surface texture of a test part. It can be used with any of Zygo Corporation s microscopes, including the NewView and Maxim. The application is ideal for measuring surfaces that are subject to wear, including disk drive media, magnetic tape, machined metal, and films. It can also be used for any surface in which you want to visualize and measure the components of surface texture. Through digital filtering of the test data, the surface characteristics of the test part are broken down into waviness, roughness, and high frequency results. For most results, letters are used to indicate the result s classification; I refers to input or nonfiltered data; W refers to waviness data, or the more widely spaced component of surface texture; R refers to roughness data, or the smaller irregularities of the surface; and HiF refers to high frequency data, or the finer surface irregularities. The application is licensed as part of standard MetroPro. For information on licensing, see the MetroPro Quick-Start Guide. The Advanced Texture Application: Displays graphics and numeric results of the test surface as input, waviness, and roughness data. Provides simple to use and apply filtering tools. Includes advanced surface analysis options, such as the peaks and valleys analysis, bearing ratio results, summits analysis, and volume results. 1

2 Guidelines Use a System Error File - It is recommended that you create a system reference file for the objective in use and then subtract this file from the measurement. Set Light Level with Several Fringes in View - For the most accurate measurements, set the light level (press F5) when there are several fringes in the field of view. Save Your Changes - To preserve changes made to the application, select the Save Application command from the Application Window menu. In the File Handler, click the Current Selection box, enter a name for the file, ending with.app and press Enter, then click Done. Making Measurements 1. Power-up the instrument, start MetroPro, and open the application by clicking on the AdvText.app icon. 2. Click the Objective button until it displays the objective in use. Set the applicable controls within the Measure Cntrl and Analyze Cntrl icons. (See Establishing Filer Settings and Software Controls in this booklet.) 3. Place the test part on the stage under the objective. Position the objective at its working distance from the part. Don t crash the objective into the part or the stage. 4. Set the Zoom knob to the desired setting; ensure that the software Image Zoom control is set to match. Position the filter tray to FOCUS. Press the F5 key to adjust the light level. Focus the microscope for a sharp image; there should be visible fringes. 5. If there are not visible fringes, adjust for tilt in the part. To do this, press the F4 key to open the Light Level window, adjust the stage tip and tilt until the Peak Intensity readout is maximized, and press Enter to close the window. Objective Working Distance (in mm) 2.5X 5X 10X 20X 50X 10.3 mm 9.3 mm 7.4 mm 4.7 mm 3.4 mm Microscope Controls - NewView 5000 Typical microscope shown, actual controls may vary 6. Adjust the stage to center the area of interest in view. Place the filter tray to MEAS, press F5 again to adjust the light level. Refocus for high contrast fringes. 7. Fine-tune focus and stage tip and tilt for surface detail, to null or minimize the number of fringes, and to center the darkest fringe. 8. Press the F1 key or click the MEASURE button to measure. 2

3 Filtering - the Key to Analyzing the Surface Texture The Advanced Texture application uses digital filtering to separate data into waviness, roughness, and high frequency components. In auto mode, the software arbitrarily sets the low and high filter settings only as a starting point. It is strongly recommended that you enter your own values for the filter settings, as graphic displays and results are directly affected. The use of the terms frequency and wavelength as they relate to filtering is shown below: Term Waviness Roughness High Frequency Frequency low middle (mid) high Wavelength long moderate short One analogy to filtering is sifting dirt or sand. The size of the holes and number of screens determine what you end up with; two screens divide material into three different grades. It is similar with Advanced Texture, except the number of filters (up to two) and the filter size (frequency or wavelength) are software selectable. If both low and high filters are used, data is divided into waviness, roughness, and high frequency, which in some instances may represent noise. If just a low filter is used, data is separated into waviness and roughness. Establishing Filter Settings 1. Click the Analyze Cntrl icon to access the filter controls. Make a measurement with High Filter and Low Filter controls set to Off. Observe what happens when the High Filter and Low Filter controls are set to Auto by clicking the Analyze button (or F2). 2. Use the Filter Freq (or Filter Wavelen) result displayed in the main window as a gauge and enter your own parameters in the corresponding control. Change the High Filter and Low Filter controls to Fixed. Click the Analyze button to reanalyze the data. Try different settings and observe the effects on the results. The exact filter values to enter vary due to the test part, the objective, and your testing criteria. The R/W Profile window serves as a visual aid in observing filtering effects. (See R/W Profile in this booklet.) 3

4 Using Filter Frequency Settings The Advanced Texture FFT filter frequencies are designed to do two things: The High Frequency filter is meant to filter out noise (high frequencies) The Low Frequency filter is meant to filter out overall part shape (low frequencies) What you will have left, when these frequencies are set properly for your part, is data pertaining to the roughness or texture of your part. How do I get there? The easiest way to go about it is: 1. Set the Remove control to Cylinder if you are trying to look at roughness attributes. 2. Set filter setting to FFT Auto. This means that the software will choose a high and a low frequency limit based on the frequencies that make up your data. 3. Click Analyze. 4. Open up Analyze Attributes. Here you will see what frequencies the software chose. These may not be optimal (and usually aren t), but they are good starting points for the next steps. 5. Enter these frequencies into the control boxes for High Filter Freq and Low Filter Freq. 6. Set High FFT Filter and Low FFT Filter controls to Fixed. 7. Click Analyze again. Nothing should change at this point. 8. Now you are ready to start tweaking frequencies to get the roughness data that you are looking for. Hints for tweaking these values are: Low Filter Freq- If this value is set too low, you will see overall surface form errors in your Roughness Map. If this value is set too high, you will start to see the texture/roughness of the part in your Waviness Map. Set this number so that the part form shows up in the Waviness Map and that the texture of the part is shown in the Roughness Map. High Filter Frequency- If this value is set too low, you will see a lot of your texture and roughness missing from the map. If this value is set too high, you will have noise spikes (if they are present) swamping the roughness data. This usually shows itself as a plot of only one color. It is often necessary to set this value as high as it will allow. There are limits on both of these frequency values defined by the field of view and the camera resolution. When you hit either of these limits, MetroPro will tell you so. If you have been using a contact profilometer in the past, you may want to look at the High Freq value being related to your probe tip size. Often our noncontact methods will be able to see more roughness on a part because at high magnifications we can see deeper into skinny trenches and pits that a larger probe tip cannot. 4

5 AdvText.app To open the application, click on the AdvText.app icon. If the icon is not on the MetroPro base window, then use the Load Application command from the MetroPro Window menu to first load the application icon. The Advanced Texture Screen 5

6 Roughness/Waviness Map This is the main window shown on page 4; it shows the original measured input data side-byside with the roughness and waviness data obtained through filtering. Item H Ha High / Low Filter Freq High / Low Filter Wavelen Hmax Hq Ia Imax Iq ISizeX ISizeY Points R3z Ra Rflatness Rku Rmax Rq Rsk Rtm Description Swedish height, or the roughness between two predefined reference lines. The upper reference line exposes 5% of the data and the lower line exposes 90%. The average surface height, or average deviation, of all points from a plane fit to the high frequency data. This attribute Displays the setting of the corresponding Filter Freq control at the time of analysis. Displayed in cycles per millimeter. This attribute displays the setting of the corresponding Filter Wavelen control at the time of analysis. The maximum height of the high frequency data. The root-mean-square deviation of all points from a plane fit to the high frequency data. The average surface height, or average deviation, of all points from a plane fit to the input data. The maximum height of the input data. The root-mean-square deviation of all points from a plane fit to the input data. The largest dimension of the input data set in the x-axis. The largest dimension of the input data set in the y-axis. The number of valid data points or pixels. The distance between the third highest peak and the third lowest valley. The average surface roughness, or average deviation, of all points from a plane fit to the test part surface. A measure of deviation from a flat surface, as based on the roughness data. It is the distance between two parallel planes, obtained by applying a Chebychev fit to the surface data. Kurtosis, or a measure of the randomness of profile heights. A perfectly random surface has Rku of 3; the farther the result is from 3, the less random and more repetitive the surface is. The maximum height of the roughness data. The root-mean-square deviation of all points from a plane fit to the test part surface. Skewness, a measure of symmetry of the profile about the center line. Bearing surfaces should have negative Rsk. The average peak-to valley roughness. 6

7 Roughness/Waviness Map (continued) Item Rz Wa Wmax Wq Description Ten-point height, or the average absolute value of the five highest peaks and five lowest valleys. The average surface height, or average deviation, of all points from a plane fit to the waviness data. The maximum height of the waviness data. The root-mean-square deviation of all points from a plane fit to the waviness data. Three Bands Map The Three Bands Map is an alternative view for the main Roughness/Waviness window. It shows high frequency (high band), roughness (mid band), and waviness (low band) data sideby-side. To open the Three Bands Map window, click the Three Bands Map icon. For an explanation of the results, see Roughness/Waviness Map. 7

8 R/W Profile The R/W Profile displays a two dimensional cross section through the roughness, waviness, and input data sets. It is useful to use this window when establishing cutoff filtering settings. (See the Establishing Filtering Settings section in this booklet.) Because it is two dimensional, as opposed to the three dimensions of the Filled and Oblique plots, it makes it easier to visualize the impact of the filter cutoff setting. To open the R/W Profile window, click the Profile icon. Note that having more than one slice in the Filled Plot deactivates the superimposed profile function. Key to Roughness/Waviness (R/W) Profile Plot Calc High Frequency Off Off On On Calc Low Frequency Off On Off On Green input input input input Dark Blue - low high low Cyan - mid mid mid Red high Note: input refers to input data, low is waviness data, mid is roughness data, high is high frequency data, dash (-) is not displayed. 8

9 Surface Area The Surface Area window provides results on the surface area for the three types of data: roughness, waviness, and input. The R, W, and I refer to the roughness, waviness, and input data, respectively. The following results are provided in this window. Result RSurfAreaRatio WSurfAreaRatio ISurfAreaRatio RSurfArea WSurfArea ISurfArea RArea WArea IArea Description Surface Area Ratio is equal to (SurfArea/Area) -1. R stands for Roughness data, W for Waviness data, I for Input data. Surface Area is the area of the surface including the effects of height variations. This is always greater than or equal to Area. Area is the planar area occupied by the data, excluding the effects of height variations. 9

10 Bearing Ratio The Bearing Ratio window is used to simulate the effect of wear on a bearing surface. To open the Bearing Ratio window, click the Bearing Ratio icon. Item Mr1 Mr2 Rk Rk Midpoint Rpk Rpk Threshold Rvk Rvk Threshold RVolume V1 V2 Volume Type Description Material component relative to peaks - The material ratio at which Rpk and Rk meet. It represents the upper limit of the core roughness profile. Material component relative to valleys - The material ratio at which Rvk and Rk meet. It represents the lower limit of the core roughness profile. Core roughness depth - The long term running surface which influences the performance and life of the bearing. The midpoint of the Rk region, it is an absolute height. Reduced peak height - The top portion of the surface that is worn away in the run-in period. The threshold between the Rpk and Rk regions, it is an absolute height. Reduced valley depth - The lowest part of the surface that retains the lubricant. The threshold between the Rk and Rvk regions, it is an absolute height. The volume of the roughness data as specified by the Volume Type control. Volume 1 - The volume of material that is removed during the run-in period. V1 is an estimate of the volume of the friable, wearable surface. Volume 2 - The potential volume of retained lubricant. V2 is the estimated lube volume in the surface set by the Mr2 intercept. It is a prediction of the volume of liquid that this surface region can hold. This control specifies where the RVolume result is calculated. Settings are Above Surface or Below Surface. 10

11 Peaks/Valleys The Peaks/Valleys window is used to analyze the highest and lowest portions of a test surface. The window is shown below, and the results and controls are explained in the accompanying table. To open the Peaks/Valleys window, click the Peaks/Valley icon. Item Calculate Shape Results Max Peaks/ Valleys Area Description This control activates shape results. When On, results about the shape (such as Max Ext, Min Ext, and Aspect) of a peak or a valley are calculated. This control specifies the maximum size of a data area for it to be considered as a valid peak or valley. Max Peaks/Valleys This control specifies the maximum number of peaks or valleys for the software to find. Min Peaks/ Valleys Area This control specifies the minimum size of a data area for it to be considered as a valid peak or valley. 11

12 Peaks/Valleys (continued) Item Peak Area Peak Density Peak Height Peak Lower Limit Peak Mean Height Peak Slope Peak Spacing Peak Upper Limit Peaks Reference Band Description Peak Area is the area of all peaks included in the peak analysis. Max Peak Area is the largest area of all peaks Min Peak Area is the smallest area of all peaks. Mean Peak Area is the arithmetical average of all peak areas. Rms Peak Area is the root-mean-square of all peak areas. The number of peaks per unit area. Calculated as the number of peaks divided by the map area. Height of all peaks included in the peak analysis. Max Peak Height is the largest height of all peaks. Min Peak Height is the smallest height of all peaks. Mean Peak Height is the arithmetical average height of all peaks. Rms Peak Height is the root-mean-square height of all peaks. This control specifies the lower limit of peak data in positive values. Data outside this range is trimmed. Create the Peak Lower and Upper Limit controls with the New Control command. The mean or average value of all pixels in the peak area. Max Peak Mean Height is the maximum mean height of all peaks. Min Peak Mean Height is the minimum mean height of all peaks. Mean Peak Mean Height is the arithmetical average mean height of all peaks. Rms Peak Mean Height is the root-mean-square mean height of all peaks. The slope or angle of all peaks included in the peak analysis. Slope is based on the four pixels surrounding the highest point in a given peak. Max Peak Slope is the maximum angle of all peaks. Min Peak Slope is the minimum angle of all peaks. Mean Peak Slope is the arithmetical average slope of all peaks. Rms Peak Slope is the root-mean-square slope of all peaks. The average distance between summits. Calculated as the square root of the map area divided by the number of peaks. This control specifies the upper limit of peak data in positive values. See Peak Lower Limit. The number of peaks included in the analysis. This control specifies a band for locating peaks and valleys. The band is centered around the mean plane of the data. The upper edge of the band is the reference value for finding peaks, and the lower edge is the reference for finding valleys. 12

13 Peaks/Valleys (continued) Item Sort Direction Sort Key Valley Area Valley Density Valley Height Valley Lower Limit Valley Mean Height Valley Slope Valley Spacing Valley Upper Limit Valleys Description This control specifies the direction for sorting the Peak/Valley Stats table, either Decreasing or Increasing. (From largest to smallest, or from smallest to largest.) This control specifies which result (such as Height, Area, Slope, or Max Ext) is used for sorting the Peak/Valley Stats table. Valley Area is the area of all valleys included in the valley analysis. Max Valley Area is the largest area of all valleys. Min Valley Area is the smallest area of all valleys. Mean Valley Area is the arithmetical average of all valley areas. Rms Valley Area is the root-mean-square of all valley areas. The number of valleys per unit area. Calculated as the number of valleys divided by the map area. Height of all valleys included in the valley analysis. Max Valley Height is the largest height of all valleys. Min Valley Height is the smallest height of all valleys. Mean Valley Height is the arithmetical average height of all valleys. Rms Valley Height is the root-mean-square height of all valleys. This control specifies the lower limit of valley data in negative values. Data outside this range is trimmed. Create the Valley Lower and Upper Limit controls with the New Control command. The mean or average value of all pixels in the valley area. Max Valley Mean Height is the maximum mean height of all valleys. Min Valley Mean Height is the minimum mean height of all valleys. Mean Valley Mean Height is the arithmetical average mean height of all valleys. Rms Valley Mean Height is the root-mean-square mean height of all valleys. The slope or angle of all valleys included in the valley analysis. Slope is based on the four pixels surrounding the lowest point in a given valley. Max Valley Slope is the maximum angle of all valleys. Min Valley Slope is the minimum angle of all valleys. Mean Valley Slope is the arithmetical average slope of all valleys. Rms Valley Slope is the root-mean-square slope of all valleys. The average distance between valleys. Calculated as the square root of the map area divided by the number of valleys. This control specifies the upper limit of valley data in negative values. See Valley Lower Limit. The number of valleys included in the analysis. 13

14 Peaks/Valleys (continued) Item Description Items Related to Peaks Stats or Valleys Stats Windows Area Aspect Height Max Ext The planar area of the peak region or valley region. The Max Ext divided by the Min Ext. The value of the highest point in peak region or the lowest point a valley region. Peaks are positive, valleys are negative. Maximum Extent, the distance between the two most widely separated points in the peak or valley region. Mean Min Ext Slope X and Y The mean height value of all points in a peak or valley region. Minimum Extent, the sum of two greatest distances at a right angle from a line between two points defining the Max Ext in a peak or valley region. See Max Ext. The average of the absolute value of the slopes (1st derivatives) in the region. The camera X and Y coordinates of the highest point in a peak region or the lowest point in valley region. 14

15 Summits The Summits window provides analysis for the summits of the test surface. Summits are defined as points that are higher than the four nearest surrounding data points by a set threshold value. The window is shown below, and the results and controls are explained in the accompanying table. To open the Summits window, click the Summits icon. Item Absolute Cutoff Cutoff Mode Max Summits Relative Cutoff Summit Density Description This control specifies a cutoff by height, when the Cutoff Mode control is set to Absolute. Only summits with heights greater than this value are analyzed. Cutoff determines what summits are analyzed. The Cutoff Mode control selects the method used in specifying the cutoff, Relative or Absolute. The corresponding Relative or Absolute Cutoff control must also be set. This control specifies the maximum number of summits to find. This control specifies the cutoff based on a percentage of the highest summit, when the Cutoff Mode control is set to Relative. Only summits with a height greater than a calculated height are analyzed. This calculated height is equal to the maximum summit height minus the specified percentage of the range of summit heights. A value of 100 includes all summits in the analysis. The number of summits per unit map area. Calculated as the number of summits divided by the map area. 15

16 Summits (continued) Item Summit Height Summit Mean Height Summit RadCrv Summit Slope Summit Spacing Summits Threshold Description Height of all summits included in the summit analysis. Max Summit Height is the largest height of all summits. Min Summit Height is the smallest height of all summits. Mean Summit Height is the arithmetical average height of all summits. Rms Summit Height is the root-mean-square height of all summits The mean or average value of all pixels in the summit area. Max Summit Mean Height is the maximum mean height of all summits. Min Summit Mean Height is the minimum mean height of all summits. Mean v Mean Height is the arithmetical average mean height of all summits. Rms Summit Mean Height is the root-mean-square mean height of all summits. The radius of curvature of all summits included in the summit analysis. RadCrv is based on the four adjacent pixels to a given summit. Max Summit RadCrv is the maximum radius of curvature of all summits. Min Summit RadCrv is the minimum radius of curvature of all summits. Mean Summit RadCrv is the arithmetical average radius of curvature of all summits. Rms Summit RadCrv is the root-mean-square radius of curvature of all summits. The slope or angle of all summits included in the summit analysis. Slope is based on the four pixels surrounding the highest point in a given summit. Max Summit Slope is the maximum angle of all summits. Min Summit Slope is the minimum angle of all summits. Mean Summit Slope is the arithmetical average slope of all summits. Rms Summit Slope is the root-mean-square slope of all summits. The average distance between summits. Calculated as square root of the map area divided by the number of summits. The number of summits included in the analysis. This control specifies the minimum height between the central point and the four adjacent points for a data point to be considered as a summit. The higher the value, the fewer and steeper the summits. Items Related to Summits Stats Window Height The height of the central point in the summit. Mean RadCrv Slope Sort Direction Sort Key X and Y The mean height value of the five points in the summit. The radius of curvature of the best-fit sphere to the summit. The average of the absolute value of the slopes (1st derivatives) in the summit. This control specifies the direction for sorting the Summit Stats table, either Decreasing or Increasing. (From highest to lowest summit, or from lowest to highest.) This control specifies which result is used for sorting the Summit Stats table. Selections include: Height, Mean Height, Slope, RadCrv, X and Y. The camera X and Y coordinates of the central point in the summit. 16

17 Software Controls Some software controls are listed below. For controls not listed, or for greater detail, refer to the MetroPro Reference Guide. Control Function Controls in Measure Cntrl Acquisition Mode Camera Mode Subtract Sys Err Sys Err File Phase Res Min Mod (%) Min Area Size Image Zoom FDA Res Controls in Analyze Cntrl High FFT Filter Selects the technique used to acquire data. Settings are Scan or Phase. Scan is for the NewView. Phase is for the Maxim. Selects the effective camera size in pixels. High resolution instruments offer multiple selections. More pixels resolve smaller details, but increase processing time. Activates a system error correction function to improve measurement accuracy. When On, the data file named with the Sys Err File control is subtracted from the measurements. Recommended. Specifies the name of a data file to subtract from measurements. Selects the resolution of calculation of phase values when Acquisition Mode is set to Phase. High (the default for microscopes) provides higher resolution, but lower total range of heights. Specifies the minimum modulation necessary for a valid data point. Decrease to accept areas with poor fringe contrast or low reflectivity. Increase to exclude unwanted data points. Specifies the number of data points in a valid region. Decrease to allow smaller areas. Increase to accept larger areas and reject smaller. For microscopes with image zoom option only. It should be set to match the setting of the instrument s zoom thumbwheel. It ensures proper lateral calibration. NewView. Selects the resolution used during analysis when Acquisition Mode is set to Scan. Use Normal when measuring rough surfaces.; use High when measuring smooth surfaces and steps. Activates data filtering options for the upper limit of the bandpass filter. To obtain high frequency data, set the Filter control to Auto or Fixed. When set to Auto, the software arbitrarily sets the upper cutoff. The Auto setting should only be used as a starting point. When set to Fixed, a cutoff value must be entered in the High Filter Wavelen or the High Filter Freq controls. When set to Off, there is no upper limit to the filter. 17

18 Software Controls (continued) Control Function Controls in Analyze Cntrl (continued) Low FFT Filter High Filter Wavelen Low Filter Wavelen High Filter Freq Low Filter Freq Calc High Frequency Calc Low Frequency Filter Trim Remove Trim Trim Mode Activates data filtering options for the lower limit of the bandpass filter. To obtain waviness data, set the Filter control to Auto or Fixed. When set to Auto, the software sets the cutoff wavelength between waviness and roughness data to a fraction of the lateral extent of the data to establish a starting point for filtering. The Auto setting should only be used as a starting point. When set to Fixed, a cutoff value must be entered in the Low Filter Wavelen or the Low Filter Freq controls. When set to Off, there is no lower limit to the filter. Specifies the wavelength of the higher cutoff point between roughness and high frequency data when the High Filter control is set to Fixed. When a value is entered, a corresponding value is output in the High Filter Freq control. Specifies the wavelength of the lower cutoff point between waviness and roughness data when the Low Filter control is set to Fixed. When a value is entered, a corresponding value is output in the Low Filter Freq control. Specifies the frequency of the higher cutoff point between roughness and high frequency data when the High Filter control is set to Fixed. When a value is entered, a corresponding value is output in the High Filter Wavelen control. Specifies the frequency of the lower cutoff point between waviness and roughness data when the Low Filter control is set to Fixed. When a value is entered, a corresponding value is output in the Low Filter Wavelen control. When On, high frequency information is calculated for and displayed in the HiF plots. When Off, calculation time is reduced. When On, low frequency information is calculated for and displayed in the plots. When Off, calculation time is reduced. Selects how filtering interacts with edge data. When On, filtering performs normally and some edge data is lost. When Off, edge data is preserved that is usually lost due to filtering. The default setting is On. Specifies the surface to subtract from measurements to minimize form. Settings are Plane, Piston, Sphere, and Cylinder. Specifies the number of pixel layers to remove from edges and from obscurations. Use with the Trim Mode control. Selects the action of the Trim control. Settings are All or Outside. All trims pixels around outside and inside edges. Outside trims pixel layers at the outside edges and not around internal holes. 18

19 Software Controls (continued) Control Function Controls in Analyze Cntrl (continued) Fill Data Fill Max Remove Spikes Spike Height (xrms) When On, holes or missing data points are filled, based on the setting of the Fill Max control. When Off, missing data points are not filled. The default setting is Off. Specifies the maximum size of a data hole that is filled when the Fill Data control is On. It is the total number of pixels in any one data hole. When On, spikes are removed from the data based on the setting of the Spike Height control. When Off, data spikes are not removed. For each point, the rms height of the surrounding points is calculated; if the point height is greater than the entered value times the rms it is removed. An entry is ignored unless the Remove Spikes control is On. Other Operations Operation Load and open an application Save data Print results Save changes made to controls, plots, results, and windows Turn off the system How to Select the Load Application command from the MetroPro base window menu. Click on the application icon to open it. Click the Save Data button. In the File Handler, click the Current Selection box, enter a name for the file, ending with.dat, and press Enter, then click Done. Click the word zygo in the window you want to print or select the Print command from the window s menu. In the Print Panel, click the Print button. You must save the application under a new name. Select the Save Application command from the Application Window menu. In the File Handler, click the Current Selection box, enter a name for the file, ending with.app and press Enter, then click Done. Warning! Improper shutdown may damage the instrument. Select the Quit command from the MetroPro menu; turn off power after you have shut down from within Windows. 19

20 Troubleshooting Symptom Application not functional. No data error or graphic displays appear incomplete or with holes. Poor repeatability of results. Plots labeled High Frequency are blank. Plots labeled waviness are blank. Possible Cause and Fix MetroPro is not licensed; contact Zygo Corporation for licensing information. The hardware key is not installed. Install the hardware key and restart the computer. The instrument is not properly focused or the fringes are not nulled. Focus the instrument and null the fringes. The Min Mod (%) control is high; decrease the value. Improper light level. Press F4 to open the Light Level window and manually adjust the light level to maximize intensity without saturation. NewView scan length may be too short. Increase length with Scan Length control. Parts moving during measurement. Check the support stage and fixturing. Noisy environment. Look at the video monitor for fringe drift or vibration; these signs indicate a noisy environment. Check for air drafts; ensure that the computer is not contributing noise to the vibration isolation system. Improper light level. Press F4 to open the Light Level window and manually adjust the light level to maximize intensity without saturation. The Calc High Frequency control is Off, or a value is not entered in the High Filter Wavelen (or Freq) control. Set the control to On and/or enter a filter value. The Calc Low Frequency control is Off, or a value is not entered in the Low Filter Wavelen (or Freq) control. Set the control to On and/or enter a filter value. Zygo Corporation Phone: (860) OMP-0362G 01/2004 Laurel Brook Road Customer Support: (800) Copyright 2004 Zygo Corporation P.O. Box inquire@zygo.com Zygo and the Zygo logo are Middlefield, CT Web Site: registered trademarks of U.S.A. Zygo Corporation.