Background The following is the complete list of the new proposed technical change(s) with their justifications:

Transcription

1 Background Statement for the Ratification Ballot of SEMI Draft Document 5274G REVISION TO ADD A NEW SUBORDINATE STANDARD: SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSen) TO SEMI E , SENSOR/ACTUATOR NETWORK STANDARD Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document. NOTICE: Recipients of this Ratification Ballot are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, patented technology is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. NOTICE: This Document was approved with additional technical change(s) during adjudication of Letter Ballot # 5274G by the North America Chapter of the Information and Control Global Technical Committee during its meeting on 4/6/2016. This Ratification Ballot is issued in order to satisfy the conditions for Letter Ballot approval by the Metrics Global Technical Committee in accordance with of the Regulations. If the Ratification Ballot voting response meets the minimum acceptance conditions per Regulations 10, then it will be automatically published. One copy of the revised Draft Document is included to show the intended final published version. Only these proposed additional technical changes are shown in the other copy of the Draft Document with revision markups showing these intended changes, as an aid to the voter. Additions are indicated by underline and deletions are indicated by strikethrough. Contents for vote are limited to only considering these proposed additional technical changes. All content for a new Standard and Safety Guideline or all proposed technical and editorial changes for revisions of Standards and Safety Guidelines that were included in the original Letter Ballot and passed TC Chapter review, including the ones passed with editorial changes, are incorporated, without revision markups, in both copies. All other editorial changes, if any, made and approved during the TC Chapter review are incorporated also, without revision markups, in both copies. Background The following is the complete list of the new proposed technical change(s) with their justifications: Technical Changes: 1. DOUBLE WORD and double word replaced with phrases that relate to 4 bytes or other information about the parameter being referred to. Table 4 Structure of the Data Attribute of ASM-GENSen Number of structure item Structure item Reference to Attribute Identifier Form Description 1 Data TimeStamp SacA08 refer to SEMI E54.1 Time of data generation 2 Length - UDINT Number of elements in DataArray 3 DataArray - ARRAY of DOUBLE WORD 4 byte elements Value of 1. Instance of SAI-GENSen SAI-GENSenA16 1. Element of DataTypeArray* 1. Element of NamesArray** Value of n. Instance of SAI-GENSen SAI-GENSenA16*** n. Element of DataTypeArray n. Element of NamesArray

2 4 ExceptionStatusExt DmA12 UDINT Exception Status of the GENSen Data TimeStamp is time of data generation and refers to the Data TimeStamp attribute of the SAC. It is represented by two double words (8 bytes). The form is the Date and Time structure defined in SEMI E54.1. This document limits the applicable Date and Time Types, defined in SEMI E54.1, to those which have maximum length of 8 bytes. If Data TimeStamp is not supported, the default value zero (8 bytes) shall be used instead DataArray is represented by an array of double words 4 byte elements of data. Each subsequent element of this array relates to an instance of the SAI-GENSenA16 (attribute Value ), where the number of the instance is related to the number of the element of the array, i.e. the i-th element represents the data value of the i-th instance of the SAI-GENSen. The form of an element is defined by the related element of the DataTypeArray ExceptionStatusExt a double word 4 byte item which contains the status of alarms and warnings of the device as described in SEMI E54.1. The byte following the last element of the DataArray is the 1.Byte as indicated in Table 8. The 4.Byte is the Exception Status. The form of the Exception Status is formatted byte, see SEMI E54.1. Table 5 Position of Exception Status in the Double Word ExceptionStatusExt 1. Byte 2.Byte 3.Byte 4.Byte Reserved Reserved Reserved Exception Status Value The Value Attribute of an instance of the SAI-GENSen is as specified in SEMI E54.1, with no additional specification that it is 4 bytes in lengthprovided. It is included here and in Table 9 for purposes of clarity only. Justification: DOUBLE WORD is not a data type in CDM. 2. Add reference to Value in Table 6 to refer to SEMI E54.1 to be consistent with Table 4 and Table 6 Sensor Analog Input GENSen Attributes Attribute Name Attribute Identifier Rqmt Access Form Name SAI-GENSenA1 Y RO Text, 16 characters maximum Value SAI-GENSenA16 Y RO See E54.1. Additional specification that it is 4 Bytes in length Context-Specific DataType SAI-GENSenA66 Y RW USINT Justification: Consistency throughout document. 3. Change milliseconds to seconds in Table 3 and INT to REAL Table 3 Assembly-GENSen Object Attributes Attribute Name Attribute ID Rqmt Access Form Description of Attribute Data* AsmA01 Y RO Structure as specified in Table 7 Structure of items as specified in Table 7 and Section NamesArray AsmA02 Y RO ARRAY of TEXT STRING Each element refers SAI- GENSenA1 in an instance of SAI- GENSen DataTypeArray AsmA03 Y RO ARRAY of USINT Each element refers to SAI- GENSenA66 in an instance of the SAI-GENSen object DeviceEnableReportRate AsmA04 N RW BOOLEAN Activation of a data report Page 1

3 DeviceReportInhibitTimer AsmA05 N RO INT REAL Minimum report rate [msseconds] DeviceReportRate AsmA06 N RW INT REAL Report rate [msseconds] Page 1

4 Justification: Milliseconds changed to seconds to conform with E54.1, and type changed to REAL to allow for fractions of seconds. Review and Adjudication Information Task Force Review Committee Adjudication Group: Sensor Bus Task Force I&C NA TC Chapter Date: Tuesday, July 12, 2016 Wednesday, July 13, 2016 Time & Timezone: 3:30 PM to 6:00 PM, Pacific Time 8:00 AM to 4:30 PM, Pacific Time Location: San Francisco Marriott Marquis Hotel 780 Mission St. San Francisco Marriott Marquis Hotel 780 Mission St. City, State/Country: San Francisco, California / USA San Francisco, California / USA Leader(s): James Moyne (University of Michigan) Brian Rubow (Cimetrix) Jack Ghiselli (Ghiselli Consulting) Standards Staff: James Amano /jamano@semi.org James Amano /jamano@semi.org *This meeting s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person, but would like to participate by telephone/web, please contact Standards staff. Notice: Additions are indicated by underline and deletions are indicated by strikethrough.

5 SEMI Draft Document R5274G REVISION TO ADD A NEW SUBORDINATE STANDARD: SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSen) TO SEMI E , SENSOR/ACTUATOR NETWORK STANDARD *Copy with Technical Change Markup* 1 Purpose 1.1 This specification is part of a suite of standards which specify the implementation of SEMI standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model of a generic sensor device measuring one or more phenomena on a piece of semiconductor manufacturing equipment and communicating over a sensor/actuator communication network. Oftentimes such sensors are added onto the equipment as they might provide a capability that is not provided with the current equipment configuration. 2 Scope 2.1 This document describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network. 2.2 This document is applicable to sensors which are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this standard. 2.3 This document does not define terms which have been defined already in other referenced documents. 3 Limitations 3.1 This document is only applicable to sensors that are measuring analog phenomena or digital phenomena utilizing an analog method. They may report the phenomena as an analog or digital data type. Thus for example typical temperature sensors and residual gas analyzers are within scope. 3.2 This document is not applicable to sensors for which a specific device model (SDM) exists (e.g., in-situ particle monitor). NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 4 Referenced Standards and Documents 4.1 SEMI Standards SEMI E39 Object Services Standard SEMI E54 Specification for Sensor/Actuator Network SEMI E54.1 Specification for Sensor/Actuator Network Common Device Model SEMI E90 Specification for Substrate Tracking NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. 5 Terminology 5.1 Abbreviations and Acronyms Page 1

6 5.1.1 GENSen Generic Equipment Networked Sensor. GENSen may also be used herein to mean GENSen device SAI-GENSen Sensor Analog Input-GENSen (object) ASM-GENSen Assembly GENSen (object) CTX-GENSen Context-GENSen (object) FDC Fault Detection and Classification CDM Common Device Model NCS Network Communication Standard SDM Specific Device Model 5.2 Definitions Context data data which identify a specific manufacturing process or a sub process and the substrate which is processed and its location within the manufacturing equipment Data report a list of attributes for a single object. Data reports may be pre-defined Generic equipment networked sensor device measurement device which is connected to manufacturing equipment and communicates via a sensor/actuator network. It may be connected optionally in order to measure values which represent properties of the equipment or the process running RecipeID an identifier of a pre-planned and reusable portion of the set of instructions, settings, and parameters under control of a processing agent that determines the processing environment seen by the material (e.g., wafer) Recipe step a distinct subset of process specification of the recipe that represents a significant change in the recipe execution conditions or instructions from the steps that precede or follow. A recipe step is completely contained within a single recipe component. 6 Device High Level Structure 6.1 Background Every networked equipment sensor, especially those added to the equipment, can benefit from even a very basic specific device model. Control data usually provided from the equipment such as rf-power and chamber pressure does often not allow a sufficient characterization of the process in terms of Advanced Process Control, e-diagnostic, or Enhanced Equipment Quality Assurance. Legacy equipment is often limited in its capability to deliver the required amount of data. Sensors added onto the equipment can sometimes overcome this lack of capability in many instances by providing data directly into the Fault Detection and Classification (FDC) system using a unified interface. This SDM could be used to provide a model that would facilitate providing sensor data with appropriate context (e.g., RecipeID) to support its use in these applications. This basic model can establish a level of interoperability and interchangeability that represents an enhancement over the Common Device Model (CDM), e.g., by specifying the communication of certain context or other characterization data. 6.2 General Description A generic equipment networked sensor (GENSen) device is made up of a Device Manager Object, a Sensor Actuator Controller Object, one or more Sensor Analog Input-GENSen Objects, an Assembly- GENSen Object, and optionally a Context-GENSen object. The values which a GENSen device delivers are represented respectively by instances of its Sensor Analog Input-GENSen Object. A data structure as an attribute of the Assembly-GENSen Object is defined which contains all available values, i.e. the sensor data, together with a data time stamp and the exception status. Additionally the Assembly-GENSen object of the GENSen device has the attribute DataTypeArray of each value of a Sensor Analog Input-GENSen Object instance. A data consumer connected to the SAN may read the data structure as an attribute of the Assembly-GENSen Object to get all of the data of the sensor. The consumer may also read the NamesArray of the Assembly-GENSen Object which describes the sensor data and the DataTypeArray which gives all information to convert the data bytes to the appropriate format. That means the data consumer, i.e. the client, can generally get, over the communication network, most or all of the required information to determine how to interact with the sensor. The GENSen sensor may identify itself by its descriptors of the data values and its data types. The GENSen sensor measures values relevant for processing, e.g., from the manufacturing equipment. It is a data producer only; any need or mechanism for control or configuration is outside the scope of this document. The GENSen sensor has a Context-GENSen Object optionally. The attributes of the Page 2

7 Context-GENSen Object can be written by a client to transfer context data to the sensor device. The sensor device may use the context data, e.g. algorithms selected based on the process recipe used Generic Equipment Networked Sensor (GENSen) Device Description The high-level object view of a GENSen is shown in Figure 1. The GENSen is built up of objects as described in Figure 1 which include those defined in the CDM and an optional Context Object. Figure 1 High-level Object View of a Generic Equipment Networked Sensor Device (GENSen) * Value attribute specification in SAI-GENSen object is inherited from SAI object with no additional specification; included here for clarity Each data value delivered by the GENSen is referred to as an attribute Value of an instance of the Sensor Analog Input-GENSen object. If the GENSen delivers n values n instances of the SAI-GENSen have to be established. The Assembly Object of the GENSen contains a data attribute which is a structure that includes the values of all instances of the SAI-GENSen, along with a single data time stamp and the exception status both of which are attributes of the DM. Additionally it contains arrays of descriptors and of data types referring to the values the GENSen delivers. All relevant information about the sensor parameters is concentrated in the Assembly-GENSen Object (ASM-GENSen) General Requirements Device Objects All objects are defined in terms of their object name and instance identifier. Identifiers for all objects described in this document are summarized in Table 4. Table 1 GENSen Sensor Objects Object Name Object Identifier Minimum Instances Maximum Instances Device Manager (DM) GENSen1 1 1 Sensor Actuator Controller (SAC) GENSen2 1 1 Assembly-GENSen (ASM-GENSen) GENSen3 1 1 Page 3

8 Sensor Analog Input-GENSen (SAI-GENSen) GENSen4 1 Manufacturer-Specified Context-GENSen (CTX-GENSen) GENSen Device Manager Object DM The Device Manager Object instance is the device component responsible for managing and consolidating the device operation as specified in SEMI E54.1. The following sections specify the components of DM that are not specified in the Common Device Model Device Manager Object Attributes Table 2 Device Manager Object Attributes Attribute Name Attribute Identifier Rqmt Access Form Device Type DmA01 Y RO Refer to CDM (E54.1) Device Type An attribute which uniquely identifies the type of the device on the network. The device type attribute is assigned as follows: Add-on sensor device= GENSen. 6.4 Sensor/Actuator Controller Object SAC The Sensor/Actuator Controller object instance is the device component responsible for coordinating the interaction of the add-on sensor device with the sensory/actuation/control environment as specified in SEMI E54.1. NOTE 1: The Assembly Object is embedded in the SAC (see SEMI E54.1). 6.5 Assembly-GENSen Object ASM-GENSen The ASM-GENSen is an assembly object and inherits all properties, services, and behavior from the assembly object of the CDM. Additional attribute specification is provided in this document. It consolidates all data values of the sensor or sensors. The data can be polled by a data consuming entity or a data report can be initiated. The data set includes data timestamp and status information which indicates errors or warnings. The descriptor and the data type of each value are also contained in the ASM-GENSen as attributes. A data consumer could read all necessary information to interpret the measured values Assembly-GENSen Object Attributes Additional attribute specification is provided in Table 6 Table 3 Assembly-GENSen Object Attributes Attribute Name Attribute ID Rqmt Access Form Description of Attribute Data* AsmA01 Y RO Structure as specified in Table 7 Structure of items as specified in Table 7 and Section NamesArray AsmA02 Y RO ARRAY of TEXT STRING Each element refers SAI- GENSenA1 in an instance of SAI- GENSen DataTypeArray AsmA03 Y RO ARRAY of USINT Each element refers to SAI- GENSenA66 in an instance of the SAI-GENSen object DeviceEnableReportRate AsmA04 N RW BOOLEAN Activation of a data report DeviceReportInhibitTimer AsmA05 N RO INT REAL Minimum report rate [msseconds] DeviceReportRate AsmA06 N RW INT REAL Report rate [msseconds] * The structure of the Data Attribute is described in Table 7. Page 4

9 Data is a structure which has items as defined in Table 7. Number of structure item Table 4 Structure of the Data Attribute of ASM-GENSen Structure item Reference to Attribute Identifier Form Description 1 Data TimeStamp SacA08 refer to SEMI E54.1 Time of data generation 2 Length - UDINT Number of elements in DataArray 3 DataArray - ARRAY of DOUBLE WORD 4 byte elements Value of 1. Instance of SAI-GENSen SAI-GENSenA16 1. Element of DataTypeArray* 1. Element of NamesArray** Value of n. Instance of SAI-GENSenA16*** n. Element of DataTypeArray n. Element of NamesArray SAI-GENSen 4 ExceptionStatusExt DmA12 UDINT Exception Status of the GENSen * The form of an element of the DataArray is specified by the associated element of the DataTypArray, i.e. the element with the same index. ** The descriptor of an element of the DataArray is specified by the associated element of the NamesArray, i.e. the element with the same index. *** Identifier of attributes in the respective n instances of the SAI-GENSen object; n is a non-negative integer, see SEMI E Data Structure Items Data TimeStamp is time of data generation and refers to the Data TimeStamp attribute of the SAC. It is represented by two double words (8 bytes). The form is the Date and Time structure defined in SEMI E54.1. This document limits the applicable Date and Time Types, defined in SEMI E54.1, to those which have maximum length of 8 bytes. If Data TimeStamp is not supported, the default value zero (8 bytes) shall be used instead Length is the number of elements which the DataArray contains. It is of the form unsigned double integer as described in SEMI E54.1. NOTE 2: Length is equal to the number of instances of the Sai-GENSen object DataArray is represented by an array of double words4 byte elements of data. Each subsequent element of this array relates to an instance of the SAI-GENSenA16 (attribute Value ), where the number of the instance is related to the number of the element of the array, i.e. the i-th element represents the data value of the i-th instance of the SAI-GENSen. The form of an element is defined by the related element of the DataTypeArray ExceptionStatusExt a double word4 byte item which contains the status of alarms and warnings of the device as described in SEMI E54.1. The byte following the last element of the DataArray is the 1.Byte as indicated in Table 8. The 4.Byte is the Exception Status. The form of the Exception Status is formatted byte, see SEMI E54.1. Table 5 Position of Exception Status in the Double WordExceptionStatusExt 1. Byte 2.Byte 3.Byte 4.Byte Reserved Reserved Reserved Exception Status NamesArray is array of text string. Each element of the array relates to the attribute Name of an instance of SAI-GENSen (SAI-GENSenA01) with the same order, i.e. the first element is linked to the first instance of SAI- GENSen DataTypeArray array of integer where each integer represents a data type according to SEMI E54.1 Each element of the array relates to the attribute DataType (SAI-GENSenA66) of an instance of SAI-GENSen with the same order, e.g. the first element is linked to the first instance of SAI-GENSen. Page 5

10 DeviceReportInhibitTimer (optional) An attribute which is used to identify the absolute minimal time interval (i.e., maximum rate) for reporting the attribute Data of the ASM-GENSen; expressed in seconds. A value of zero indicates that there is no minimum time interval. The value of this attribute may be related to the value of the ReportInhibitTimer parameter in the one or more SAI-GENSen object instances (see SEMI E54.1 and Section ); specification of this relationship is beyond the scope of this document DeviceEnableReportRate (optional) An attribute which enables the reporting of the attribute Data of the ASM-GENSen object based on the DeviceReportRate attribute value; a value of TRUE signifies that the reporting at the DeviceReportRate is enabled. The value of this attribute may be related to the value of the EnableReportRate parameter in the one or more SAI-GENSen object instances (see SEMI E54.1 and Section ); specification of this relationship is beyond the scope of this document DeviceReportRate (optional) An attribute which defines the time interval at which the attribute Data of the ASM-GENSen will be reported; expressed in seconds. The value of this attribute may be related to the value of the ReportRate parameter in the one or more SAI-GENSen object instances (see SEMI E54.1 and Section ); specification of this relationship is beyond the scope of this document. NOTE 3: If the DeviceEnableReportRate parameter exists for a GENSen device (it is specified as optional in this document so it may or may not exist), the Data attribute only will be reported if DeviceEnableReportRate is TRUE. 6.6 Sensor Analog Input GENSenObject (SAI-GENSen) The SAI-GENSen represents the measured values of the GENSen. It inherits attributes, services, and behavior from the Sensor Analog Input Object of the CDM. Each data value delivered by the sensor is characterized by a corresponding instance of SAI-GENSen. Additional specification on attributes is defined in this document SAI-GENSen Object Attributes Additional attribute specification is provided in Table Name The Name Attribute of an instance of the SAI-GENSen is as specified in SEMI E54.1, with the additional specification that the Name Attribute is required for this object Value The Value Attribute of an instance of the SAI-GENSen is as specified in SEMI E54.1, with no additional specification that it is 4 bytes in lengthprovided. It is included here and in Table 9 for purposes of clarity only DataType The DataType Attribute of an instance of the SAIA-GENSen has the form USINT according to SEMI E54.1, with the additional specification that the DataType Attribute is required for this object. Table 6 Sensor Analog Input GENSen Attributes Attribute Name Attribute Identifier Rqmt Access Form Name SAI-GENSenA1 Y RO Text, 16 characters maximum Value SAI-GENSenA16 Y RO See E54.1. Additional specification that it is 4 Bytes in length Context-Specific DataType SAI-GENSenA66 Y RW USINT 6.7 Context GENSen Object CTX-GENSen (optional) The CXT-GENSen object is optional and contains the context data of the process and the substrate which the GENSen monitors. The GENSen device may have the possibility to use alternative algorithms of measurement depending on attributes of CTX- GENSen. Process start and stop can be indicated by setting the attribute SubstProcState CTX-GENSen Object Attributes Additional attribute specification is provided in Table SubstIDList (optional) Object Identifier according to SEMI E90 of the processed material, e.g., wafer. If the list has only one element then SubstIDList becomes SubstID according to SEMI E LotID (optional) identifier of a group of one or more substrates of the same type. The group may be referred to for tracking of substrates in the factory according to SEMI E90. Page 6

11 SubstLocID (optional) Substrate Location ID is an identifier of the current location of the processed substrate the add-on sensor relates to, e.g., chamber identifier according to SEMI E SubstProcState (optional) Substrate Process State indicates when the process has started or finished according to SEMI E RecipeID identifier of the most recent process recipe RecipeStep (optional) most recent recipe step number. Table 7 CTX-GENSen Object Attributes Name Attribute Identifier Rqmt Access Form SubstIDList CTX-GENSenA01 N RW List of Substrate Identifiers, Refer to Substrate Object SEMI E90 LotID CTX-GENSenA02 N RW Text, Refer to Substrate Object SEMI E90 SubstLocID CTX-GENSenA03 N RW Text, Refer to Substrate Object SEMI E90 SubstProcState CTX-GENSenA04 N RW Enumerated, Refer to Substrate Object SEMI E90 RecipeID CTX-GENSenA05 Y RW TEXT RecipeStep CTX-GENSenA06 N RW INT CTX-GENSen Object Services All Context GENSen object instances must provide the services listed in Table 11. Table 8 CTX-GENSen Object Services Service Service Identifier Support required in Device Type Description of Service GetAttribute CTX-GENSenS04 Required R Return the contents of the specified attribute. SetAttribute CTX-GENSenS05 Required R Write the contents of the specified attribute GetAttribute This Service is used to read the value of a CTX-GENSen object instance attribute over the network. Table 12 describes the parameters specified for this service. See E54.1, Section 6, for further description of terminology used in this table. Table 9 CTX-GENSen Object GetAttribute Service Parameter Definition Parameter Req/Ind Rsp/Cnf Form Description AttributeID M C*, = Network-Specific Attribute Identifier of the attribute whose value is being requested. AttributeValue - M Context-Specific Value of the attribute request. * The determination of whether AttributeID is supplied in the service response/confirm is outside the scope of this document Set This Service is used to modify the value of the CTX-GENSen object instance attribute over the network. Table 13 describes the parameters specified for this service. See E54.1, Section 6, for further description of terminology used in this table. Table 10 CTX-GENSen Object SetAttribute Service Parameter Definition Parameter Req/Ind Rsp/Cnf Form Description AttributeID M C*,- Network-Specific Attribute Identifier of the attribute whose value is being modified. Page 7

12 AttributeValue M C Context-Specific Value of the attribute to modify. * The determination of whether AttributeID is supplied in the service response/confirm and how the response and confirm values might be related is outside the scope of this document. NOTICE: (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility. < End of Change Proposals > The rest of this Document is material that is required for inclusion in a ballot by the SEMI Standards Procedure Manual ( ), but it does not contain any proposed Document changes. Page 8

13 SEMI E SENSOR/ACTUATOR NETWORK STANDARD This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 14, Available at and in April 2013; originally published in 1997; previously published July NOTICE: The designation of SEMI E54 was updated during the 0413 publishing cycle to reflect the reapproval of SEMI E54.1. NOTICE: The Standard that was previously designated as SEMI E54 (Standard for Sensor/Actuator Network Common Device Model) has been re-designated as SEMI E54.1. Because the Sensor/Actuator Network Standard is the parent document, it has been designated as SEMI E54. 1 Purpose 1.1 This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) standard. It provides the definition for interoperability with respect to SEMI SAN standard-compliant Sensor/Actuator devices. 2 Scope 2.1 This Standard specifies how devices interoperate on a network as part of the control system for equipment. 2.2 This Specification, which is the root of the SAN standard, defines the relationships of each of the other specifications that are components of the SEMI SAN standard. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Referenced Standards and Documents 3.1 SEMI Standards and Safety Guidelines SEMI E30 Generic Model for Communications and Control of SEMI Equipment (GEM) SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E54.1 Standard for Sensor/Actuator Network Common Device Model 3.2 ISO Standard 1 ISO 7498 Basic Reference Model for Open Systems Interconnection (OSI) 3.3 Other Documents James Rumbaugh, Michael Blaha, William Premerlani, Frederic Eddy, William Lorensen, Object-Oriented Modeling and Design, Englewood Cliffs, New Jersey: Prentice-Hall, NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. 4 Terminology 4.1 Abbreviations and Acronyms API Applications Programming Interface CDM Common Device Model. The root object application model for devices on the sensor bus DM DeviceManager. An object specified in SEMI E54.1, Standard for Sensor/Actuator Network Common Device Model. 1 International Organization for Standardization, ISO Central Secretariat, 1 rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland; Telephone: , Fax: , Page 9

14 4.1.4 IDL Interface Definition Language. A programming language-independent notation for specifying interfaces ISO International Organization for Standardization NCS Network Communication Standard. Provides the specification for mapping the CDM and SDM to specific network technologies. These standards will be incorporated as parts of the SEMI SAN standard OEM Original Equipment Manufacturer. They are usually the control system developer, but in any case they are almost always responsible for the control system OMT Object Modeling Technique. A methodology developed by James Rumbaugh, et al., for using objects to model systems OSI Open System Interconnection. A seven-layer model for communications developed by ISO OSS Object Services Standard [SEMI E39] SAN Sensor/Actuator Network. It is frequently used to reference this Standard SDM Specific Device Model. This is an application model for a specific type of sensor, actuator, or entity. 4.2 Definitions application for software, this is a working series of computer instructions that provide end user services applications model a formal description of the software elements and interactions that perform an end user task entity in software engineering, this is something that is recognizable as distinct and particular from the other things that make up a software system or program interface in information modeling, it is the boundary between two entities from which information will flow user layer in communications, this is a set software function connected to the communication protocol s top layer, usually called the applications layer, from the user s application environment. It typically allows the user application to be protocol-independent. NOTICE: (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility. Page 10

15 SEMI Draft Document R5274G REVISION TO ADD A NEW SUBORDINATE STANDARD: SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSen) TO SEMI E , SENSOR/ACTUATOR NETWORK STANDARD 1 Purpose *Copy of Intended Final Version* 1.1 This specification is part of a suite of standards which specify the implementation of SEMI standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model of a generic sensor device measuring one or more phenomena on a piece of semiconductor manufacturing equipment and communicating over a sensor/actuator communication network. Oftentimes such sensors are added onto the equipment as they might provide a capability that is not provided with the current equipment configuration. 2 Scope 2.1 This document describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network. 2.2 This document is applicable to sensors which are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this standard. 2.3 This document does not define terms which have been defined already in other referenced documents. 3 Limitations 3.1 This document is only applicable to sensors that are measuring analog phenomena or digital phenomena utilizing an analog method. They may report the phenomena as an analog or digital data type. Thus for example typical temperature sensors and residual gas analyzers are within scope. 3.2 This document is not applicable to sensors for which a specific device model (SDM) exists (e.g., in-situ particle monitor). NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 4 Referenced Standards and Documents 4.1 SEMI Standards SEMI E39 Object Services Standard SEMI E54 Specification for Sensor/Actuator Network SEMI E54.1 Specification for Sensor/Actuator Network Common Device Model SEMI E90 Specification for Substrate Tracking NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. 5 Terminology 5.1 Abbreviations and Acronyms GENSen Generic Equipment Networked Sensor. GENSen may also be used herein to mean GENSen device

16 5.1.2 SAI-GENSen Sensor Analog Input-GENSen (object) ASM-GENSen Assembly GENSen (object) CTX-GENSen Context-GENSen (object) FDC Fault Detection and Classification CDM Common Device Model NCS Network Communication Standard SDM Specific Device Model 5.2 Definitions Context data data which identify a specific manufacturing process or a sub process and the substrate which is processed and its location within the manufacturing equipment Data report a list of attributes for a single object. Data reports may be pre-defined Generic equipment networked sensor device measurement device which is connected to manufacturing equipment and communicates via a sensor/actuator network. It may be connected optionally in order to measure values which represent properties of the equipment or the process running RecipeID an identifier of a pre-planned and reusable portion of the set of instructions, settings, and parameters under control of a processing agent that determines the processing environment seen by the material (e.g., wafer) Recipe step a distinct subset of process specification of the recipe that represents a significant change in the recipe execution conditions or instructions from the steps that precede or follow. A recipe step is completely contained within a single recipe component. 6 Device High Level Structure 6.1 Background Every networked equipment sensor, especially those added to the equipment, can benefit from even a very basic specific device model. Control data usually provided from the equipment such as rf-power and chamber pressure does often not allow a sufficient characterization of the process in terms of Advanced Process Control, e-diagnostic, or Enhanced Equipment Quality Assurance. Legacy equipment is often limited in its capability to deliver the required amount of data. Sensors added onto the equipment can sometimes overcome this lack of capability in many instances by providing data directly into the Fault Detection and Classification (FDC) system using a unified interface. This SDM could be used to provide a model that would facilitate providing sensor data with appropriate context (e.g., RecipeID) to support its use in these applications. This basic model can establish a level of interoperability and interchangeability that represents an enhancement over the Common Device Model (CDM), e.g., by specifying the communication of certain context or other characterization data. 6.2 General Description A generic equipment networked sensor (GENSen) device is made up of a Device Manager Object, a Sensor Actuator Controller Object, one or more Sensor Analog Input-GENSen Objects, an Assembly- GENSen Object, and optionally a Context-GENSen object. The values which a GENSen device delivers are represented respectively by instances of its Sensor Analog Input-GENSen Object. A data structure as an attribute of the Assembly-GENSen Object is defined which contains all available values, i.e. the sensor data, together with a data time stamp and the exception status. Additionally the Assembly-GENSen object of the GENSen device has the attribute DataTypeArray of each value of a Sensor Analog Input-GENSen Object instance. A data consumer connected to the SAN may read the data structure as an attribute of the Assembly-GENSen Object to get all of the data of the sensor. The consumer may also read the NamesArray of the Assembly-GENSen Object which describes the sensor data and the DataTypeArray which gives all information to convert the data bytes to the appropriate format. That means the data consumer, i.e. the client, can generally get, over the communication network, most or all of the required information to determine how to interact with the sensor. The GENSen sensor may identify itself by its descriptors of the data values and its data types. The GENSen sensor measures values relevant for processing, e.g., from the manufacturing equipment. It is a data producer only; any need or mechanism for control or configuration is outside the scope of this document. The GENSen sensor has a Context-GENSen Object optionally. The attributes of the Context-GENSen Object can be written by a client to transfer context data to the sensor device. The sensor device may use the context data, e.g. algorithms selected based on the process recipe used. Page 1

17 6.2.1 Generic Equipment Networked Sensor (GENSen) Device Description The high-level object view of a GENSen is shown in Figure 1. The GENSen is built up of objects as described in Figure 1 which include those defined in the CDM and an optional Context Object. Figure 2 High-level Object View of a Generic Equipment Networked Sensor Device (GENSen) * Value attribute specification in SAI-GENSen object is inherited from SAI object with no additional specification; included here for clarity Each data value delivered by the GENSen is referred to as an attribute Value of an instance of the Sensor Analog Input-GENSen object. If the GENSen delivers n values n instances of the SAI-GENSen have to be established. The Assembly Object of the GENSen contains a data attribute which is a structure that includes the values of all instances of the SAI-GENSen, along with a single data time stamp and the exception status both of which are attributes of the DM. Additionally it contains arrays of descriptors and of data types referring to the values the GENSen delivers. All relevant information about the sensor parameters is concentrated in the Assembly-GENSen Object (ASM-GENSen) General Requirements Device Objects All objects are defined in terms of their object name and instance identifier. Identifiers for all objects described in this document are summarized in Table 4. Table 1 GENSen Sensor Objects Object Name Object Identifier Minimum Instances Maximum Instances Device Manager (DM) GENSen1 1 1 Sensor Actuator Controller (SAC) GENSen2 1 1 Assembly-GENSen (ASM-GENSen) GENSen3 1 1 Sensor Analog Input-GENSen (SAI-GENSen) GENSen4 1 Manufacturer-Specified Context-GENSen (CTX-GENSen) GENSen5 0 1 Page 2

18 6.3 Device Manager Object DM The Device Manager Object instance is the device component responsible for managing and consolidating the device operation as specified in SEMI E54.1. The following sections specify the components of DM that are not specified in the Common Device Model Device Manager Object Attributes Table 2 Device Manager Object Attributes Attribute Name Attribute Identifier Rqmt Access Form Device Type DmA01 Y RO Refer to CDM (E54.1) Device Type An attribute which uniquely identifies the type of the device on the network. The device type attribute is assigned as follows: Add-on sensor device= GENSen. 6.4 Sensor/Actuator Controller Object SAC The Sensor/Actuator Controller object instance is the device component responsible for coordinating the interaction of the add-on sensor device with the sensory/actuation/control environment as specified in SEMI E54.1. NOTE 1: The Assembly Object is embedded in the SAC (see SEMI E54.1). 6.5 Assembly-GENSen Object ASM-GENSen The ASM-GENSen is an assembly object and inherits all properties, services, and behavior from the assembly object of the CDM. Additional attribute specification is provided in this document. It consolidates all data values of the sensor or sensors. The data can be polled by a data consuming entity or a data report can be initiated. The data set includes data timestamp and status information which indicates errors or warnings. The descriptor and the data type of each value are also contained in the ASM-GENSen as attributes. A data consumer could read all necessary information to interpret the measured values Assembly-GENSen Object Attributes Additional attribute specification is provided in Table 6 Table 3 Assembly-GENSen Object Attributes Attribute Name Attribute ID Rqmt Access Form Description of Attribute Data* AsmA01 Y RO Structure as specified in Table 7 Structure of items as specified in Table 7 and Section NamesArray AsmA02 Y RO ARRAY of TEXT STRING Each element refers SAI- GENSenA1 in an instance of SAI- GENSen DataTypeArray AsmA03 Y RO ARRAY of USINT Each element refers to SAI- GENSenA66 in an instance of the SAI-GENSen object DeviceEnableReportRate AsmA04 N RW BOOLEAN Activation of a data report DeviceReportInhibitTimer AsmA05 N RO REAL Minimum report rate [seconds] DeviceReportRate AsmA06 N RW REAL Report rate [seconds] * The structure of the Data Attribute is described in Table 7. Page 3

19 Data is a structure which has items as defined in Table 7. Number of structure item Table 4 Structure of the Data Attribute of ASM-GENSen Structure item Reference to Attribute Identifier Form Description 1 Data TimeStamp SacA08 refer to SEMI E54.1 Time of data generation 2 Length - UDINT Number of elements in DataArray 3 DataArray - ARRAY of 4 byte elements Value of 1. Instance of SAI-GENSen SAI-GENSenA16 1. Element of DataTypeArray* 1. Element of NamesArray** Value of n. Instance of SAI-GENSenA16*** n. Element of DataTypeArray n. Element of NamesArray SAI-GENSen 4 ExceptionStatusExt DmA12 UDINT Exception Status of the GENSen * The form of an element of the DataArray is specified by the associated element of the DataTypArray, i.e. the element with the same index. ** The descriptor of an element of the DataArray is specified by the associated element of the NamesArray, i.e. the element with the same index. *** Identifier of attributes in the respective n instances of the SAI-GENSen object; n is a non-negative integer, see SEMI E Data Structure Items Data TimeStamp is time of data generation and refers to the Data TimeStamp attribute of the SAC. It is represented by 8 bytes. The form is the Date and Time structure defined in SEMI E54.1. This document limits the applicable Date and Time Types, defined in SEMI E54.1, to those which have maximum length of 8 bytes. If Data TimeStamp is not supported, the default value zero (8 bytes) shall be used instead Length is the number of elements which the DataArray contains. It is of the form unsigned double integer as described in SEMI E54.1. NOTE 2: Length is equal to the number of instances of the Sai-GENSen object DataArray is represented by an array of 4 byte elements of data. Each subsequent element of this array relates to an instance of the SAI-GENSenA16 (attribute Value ), where the number of the instance is related to the number of the element of the array, i.e. the i-th element represents the data value of the i-th instance of the SAI- GENSen. The form of an element is defined by the related element of the DataTypeArray ExceptionStatusExt a 4 byte item which contains the status of alarms and warnings of the device as described in SEMI E54.1. The byte following the last element of the DataArray is the 1.Byte as indicated in Table 8. The 4.Byte is the Exception Status. The form of the Exception Status is formatted byte, see SEMI E54.1. Table 5 Position of Exception Status in the ExceptionStatusExt 1. Byte 2.Byte 3.Byte 4.Byte Reserved Reserved Reserved Exception Status NamesArray is array of text string. Each element of the array relates to the attribute Name of an instance of SAI-GENSen (SAI-GENSenA01) with the same order, i.e. the first element is linked to the first instance of SAI- GENSen DataTypeArray array of integer where each integer represents a data type according to SEMI E54.1 Each element of the array relates to the attribute DataType (SAI-GENSenA66) of an instance of SAI-GENSen with the same order, e.g. the first element is linked to the first instance of SAI-GENSen DeviceReportInhibitTimer (optional) An attribute which is used to identify the absolute minimal time interval (i.e., maximum rate) for reporting the attribute Data of the ASM-GENSen; expressed in seconds. A value Page 4