What is the history of this issue and ballot? This is the first submission of this ballot.

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1 Background Statement for SEMI Draft Document 5738 REVISION TO SEMI E PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR CARRIER MANAGEMENT (CMS) NOTICE: This Background Statement is not part of the balloted item It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this ballot NOTICE: For each Reject Vote, the Voter shall provide text or other supportive material indicating the reason(s) for disapproval (ie, Negative[s]), referenced to the applicable section(s) and/or paragraph(s), to accompany the vote NOTICE: Recipients of this ballot are invited to submit, with their Comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation In this context, patented technology is defined as technology for which a patent has been issued or has been applied for In the latter case, only publicly available information on the contents of the patent application is to be provided Background The E871 specification was originally published in the year 2000 as a provisional specification Although this specification is widely in use throughout the world, the provisional status was never removed SEMI regulations no longer allow for the existence of provisional standards This major revision intends to release the E871 specification without the provisional status The only way to do this was by using a major revision ballot which allowed for both title change and text change in the specification The changes are not extensive Note that the text mmhh is expected to be replace by SEMI staff with the actual publication date month and year And the text <date> with the actual date of acceptance Note that text to be added are shown in underlined blue text Deleted items are shown in strikethrough red text Formatting changes, such as changing the number of spaces, are not indicated, although numerous such changes have been made SEMI Staff will use the formatting demonstrated in this ballot What is the problem being solved? Remove the provisional status, both in the title and within the specification As a major revision, the formatting within the specification has been made more consistent and a few minor changes have been made to make the intent more clear and allow E871 to adapt to more use cases Specifically, Capacity is no longer restricted to the maximum value 25 since the restriction really served no function Several editorial changes were made as well to clean up the text Additionally, the format codes are now specified consistently Previously, they were specified erratically What is the history of this issue and ballot? This is the first submission of this ballot Who will this affect? How? Why? This changes are not expected to affect any existing implementations in any way Is this a change to an existing solution, or, is it a new activity? These are changes to an existing Specification

2 Revision Control This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI Entries have been made by the task force Date Version Name Edits Jan 6, Brian Rubow Initial edits to remove provisional status Feb 10, Inna Skvortsova Ballot formatting according to SEMI Standards Regulations The ballot results will be reviewed and adjudicated at the meetings indicated in the table below Check wwwsemiorg/standards under Standards Calendar for the latest update Review and Adjudication Information Task Force Review Committee Adjudication Group: NA GEM300 TF NA Information & Control Committee Date: April 4 th 2017 April 5 th 2017 Time & Timezone: 13:00 16:00 Pacific Time 8:00 17:00 Pacific Time Location: SEMI Headquarters SEMI Headquarters City, State/Country: Milpitas, CA/USA Milpitas, CA/USA Leader(s): Brian Rubow (Cimetrix) Jack Ghiselli (Ghiselli Consulting) Brian Rubow (Cimetrix) James Moyne (University of Michigan) Standards Staff: Inna Skvortsova (SEMI NA) iskvortsova@semiorg Inna Skvortsova (SEMI NA) iskvortsova@semiorg This meeting s details are subject to change, and additional review sessions may be scheduled if necessary Contact the task force leaders or Standards staff for confirmation Telephone and web information will be distributed to interested parties as the meeting date approaches If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff

3 673 S Milpitas Blvd Phone: SEMI Draft Document 5738 REVISION TO SEMI E PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR CARRIER MANAGEMENT (CMS) NOTICE: Additions are indicated by underline and deletions are indicated by strikethrough 1 Purpose This standard was technically approved by the global Information & Control Committee This edition was approved for publication by the global Audits and Reviews Subcommittee on <date> It was available at wwwsemiorg in June 2007 and on CD-ROM in July 2007 Originally published February 2000; previously published November This document maps the services and data of SEMI E87 to SECS-II streams and functions, and data definitions 2 Scope 21 This is a provisional specification covering equipment supporting automated access to load ports from the host point-of-view The provisional status is required because of the immaturity of implementations of integrated equipment with AMHS, and additional specifications may yet be defined Also, further exception handling and error recovery scenarios need to be defined 22 This document applies to all implementations of SEMI E87 that use the SECS-II message protocol [SEMI E5] Compliance to this standard requires compliance to both SEMI E87 and SEMI E5 NOTICE: This standard does not purport to address safety issues, if any, associated with its use It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use 3 Limitations 31 This specification applies to semiconductor equipment with SEMI E151 compliant load ports It may also be applied to other manufacturing equipment that supports automated carrier transfer and/or contains an internal buffer 32 This is a provisional specification The following areas must be completed before the provisional status is removed: Any additional services, or changes to existing services, in Carrier Management must be mapped to SECS- II messages 4 Referenced Standards and Documents 41 SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS-II) SEMI 151 Provisional Specification for 300 mm Tool Load Port SEMI E391 SECS-II Protocol for Object Services Standard (OSS) SEMI E87 Specification for Carrier Management (CMS) NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions 5 Services Mapping 51 This section shows the specific SECS-II streams and functions that shall be used for SECS-II implementation of the services defined in SEMI E87, as well as the parameter mapping for data attached to services 52 Services Message Mapping 521 Table 1 defines the relationships between SEMI E87 services and SECS-II messages This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 1 Doc 5738 SEMI

4 673 S Milpitas Blvd Phone: Table 1 Services Message Mapping Table Service Name Stream, Function SECS-II Message Name Bind S3,F17/18 Carrier Action Request/Acknowledge CancelBind S3,F17/18 Carrier Action Request/Acknowledge CancelAllCarrierOut S3,F19/20 Cancel All Carrier Out Request/Acknowledge CancelCarrier S3,F17/18 Carrier Action Request/Acknowledge CancelCarrierAtPort S3,F17/18 Carrier Action Request/Acknowledge CancelCarrierNotification S3,F17/18 Carrier Action Request/Acknowledge CancelCarrierOut S3,F17/18 Carrier Action Request/Acknowledge CancelReservationAtPort S3,F25/26 Port Action Request/Acknowledge CarrierIn S3,F17/18 Carrier Action Request/Acknowledge CarrierNotification S3,F17/18 Carrier Action Request/Acknowledge CarrierOut S3,F17/18 Carrier Action Request/Acknowledge CarrierReCreate S3,F17/18 CarrierReCreate Rquest Request/Acknowledge CarrierRelease S3,F17/18 Carrier Action Request/Acknowledge CarrierTagReadData S3,F29/30 Carrier Tag Read Data Request/Acknowledge CarrierTagWriteData S3,F31/32 Carrier Tag Write Data Request/Acknowledge ChangeAccess S3,F27/28 ChangeAccess ChangeServiceStatus S3,F25/26 Port Action Request/Acknowledge ProceedWithCarrier S3,F17/18 Carrier Action Request/Acknowledge ReserveAtPort S3,F25/26 Port Action Request/Acknowledge 53 Services Parameter Mapping 531 Table 2 maps the SEMI E87 service parameters to SECS-II Data Items NOTE 1: Use of parameters not specified for a given message in SEMI E87 is prohibited SECS-II data items not used for a given message shall be sent as zero-length items Table 2 Service Parameters to SECS-II Data Items Mapping Parameter Name Range SECS-II Data Item AccessMode Enumerated: MANUAL, AUTO ACCESSMODE AttributeData Any CATTRDATA AttributeID Text format restrictions per SEMI E391, 6 CATTRID CarrierID 1 to 80 characters CARRIERID CMAcknowledge Enumerated CAACK CMStatus Structure L,2 1 <CAACK> 2 Status Data ASCII (Format Code 20) DATA DataLength Integer (Un or SnFormat Code or 50-54) DATALENGTH DataSeg ASCII (Format Code 20) DATASEG ErrorCode Enumerated ERRCODE ErrorText 1 to 80 characters ERRTEXT LocationID ASCII (Format Code 20) LOCID This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 2 Doc 5738 SEMI

5 673 S Milpitas Blvd Phone: Parameter Name Range SECS-II Data Item PropertiesList Non-identifier properties n = number of attributes PortID Format Code 51 U1 (1 255) PTN ServiceStatus Enumerated: IN SERVICE, OUT OF SERVICE L,n 1 L,2 1 <CATTRID1> 2 <CATTRDATA1> n L,2 1< CATTRID n> 2 <CATTRDATA n> U1 Format Code 51 0 = OUT OF SERVICE 1 = IN SERVICE Status n = number of errors L,n 1 L,2 1 <ERRCODE1> 2 < ERRTEXT 1> n 1< ERRCODE n> 2 <ERRTEXT n> 54 SECS-II Data Items Without Corresponding SEMI E87 Parameters 541 Table 3 contains the SECS-II data items that do not correspond to SEMI E87 s service parameter Table 3 Additional Data Item Requirements Table Function Used by S3,F17 to differentiate between Bind, CancelCarrierOut, CancelCarrierAtPort, CancelBind, CarrierIn, ProceedWithCarrier, CancelCarrierNotification CarrierNotification services, and CarrierReCreate Used to satisfy SECS-II conventions for linking a multi-block inquiry with a subsequent multi-block message Neither required nor specified by CMS Used to inform receiver of total message length size for SECS-II multi-block conventions May also be used to indicate the length of a section of data being transmitted to or from a carrier tag Used to satisfy SECS-II multi-block requirements Neither required nor specified by SEMI E87 Used by S3,F25 to differentiate between port related, CancelReservationAtPort, and ReserveAtPort services Used by S3F27 S3,F27 to specify desired Port Access Mode SECS-II Data Item CARRIERACTION DATAID DATALENGTH GRANT PORTACTION ACCESSMODE 6 Variable Data Item Mapping 61 This section shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI E87 variable data items This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 3 Doc 5738 SEMI

6 673 S Milpitas Blvd Phone: Table 4 Variable Data Item Mapping Table Variable Name Class Format AccessMode DVVAL Format Code 51 (U1) Enumerated: 0 = MANUAL 1 = AUTO AccessModei SV Format Code 51 (U1) Enumerated: 0 = MANUAL 1 = AUTO AvailPartitionCapacity DVVAL Format Code 51 AvailPartitionCapacityi SV Format Code 51 BufferCapacityList SV L,n where n = number of partitions 1 <BufferPartitionInfo1> n <BufferPartitionInfon> BufferPartitionInfo DVVAL L, 5 1 <PartitionID> 2 <PartitionType> 3 <AvailPartitionCapacity> 4 <PartitionCapacity> 5 <UnallocatedPartitionCapacity> BufferPartitionInfoi SV L, 5 1 <PartitionIDi> 2 <PartitionTypei> 3 <AvailPartitionCapacityi> 4 <PartitionCapacityi> 5 <UnallocatedPartitionCapacityi> CarrierAccessingStatus DVVAL Format Code 51 (U1) 0 = NOT ACCESSED 1 = IN ACCESS 2 = CARRIER COMPLETE 3 = CARRIER STOPPED CarrierID DVVAL Format Code 20, 1 to 80 characters A[1 80] (Conforms to restrictions of ObjID as specified in SEMI E391, 6) CarrierIDi SV Format Code 20, 1 to 80 characters A[1 80] (Conforms to restrictions of ObjID as specified in SEMI E391, 6) CarrierIDStatus DVVAL Format Code 51 (U1) 0 = ID NOT READ 1 = [ID] WAITING FOR HOST 2 = ID VERIFICATION OK 3 = ID VERIFICATION FAILED This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 4 Doc 5738 SEMI

7 673 S Milpitas Blvd Phone: Variable Name Class Format CarrierLocationMatrix SV L,n where n = number of carrier locations 1 L,2 1 <LocationID1> 2 <CarrierID1> n L,2 1 <LocationIDn> 2 <CarrierIDn> LoadPortReservationState DVVAL Format Code 51 (U1) 0 = NOT RESERVEED 1 = RESERVED LoadPortReservationStateI SV Format Code 51 (U1) 0 = NOT RESERVED 1 = RESERVED LoadPortReservationStateList SV L,n where n = number of load ports 1<LoadPortReservationState1> n<loadportreservationstaten> LocationID DVVAL Format Code 20, 1 to 80 characters A[1 80] (Conforms to restrictions of ObjID as specified in SEMI E391, 6) LocationIDi SV Format Code 20, 1 to 80 characters A[1 80] (Conforms to restrictions of ObjID as specified in SEMI E391, 6) PartitionCapacity DVVAL Format Code 51 PartitionCapacityi SV Format Code 51 PartitionID DVVAL Format Code 20, 1 to 80 characters A[1 80] (Conforms to restrictions of ObjID as specified in SEMI E391, 6) PartitionIDi SV Format Code 20, 1 to 80 characters A[1 80] (Conforms to restrictions of ObjID as specified in SEMI E391, 6) PartitionType DVVAL Format Code 20, 1 to 64 characters A[1 64] PartitionTypei SV Format Code 20, 1 to 64 characters A[1 64] PortAssociationState DVVAL Format Code 51 (U1) 0 = NOT ASSOCIATED 1 = ASSOCIATED PortAssociationStatei SV Format Code 51 (U1) 0 = NOT ASSOCIATED 1 = ASSOCIATED This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 5 Doc 5738 SEMI

8 673 S Milpitas Blvd Phone: Variable Name Class Format PortAssociationStateList SV L,n where n = number of load ports 1 <PortAssociationState1> n <PortAssociationStaten> PortID DVVAL Format Code 51 PortIDi SV Format Code 51 PortStateInfo DVVAL L,2 1 <PortAssociationState> 2 <PortTransferState> PortStateInfoi SV L,2 1 <PortAssociationStatei> 2 <PortTransferStatei> PortStateInfoList SV L,n where n = number of load ports 1 <PortStateInfo1> n <PortStateInfon> PortTransferState DVVAL Format Code 51 (U1) 0 = OUT OF SERVICE 1 = TRANSFER BLOCKED 2 = READY TO LOAD 3 = READY TO UNLOAD PortTransferStatei SV Format Code 51 (U1) 0 = OUT OF SERVICE 1 = TRANSFER BLOCKED 2 = READY TO LOAD 3 = READY TO UNLOAD PortTransferStateList SV L,n where n = number of load ports 1 <PortTransferState1> n <PortTransferStaten> Reason DVVAL Format Code 51 (U1) 0 = VERIFICATION NEEDED 1 = VERIFICATION BY EQUIPMENT UNSUCCESSFUL 2 = READ FAIL 3 = IMPROPER SUBSTRATE POSITION SlotMapStatus DVVAL Format Code 51 (U1) 0 = SLOT MAP NOT READ 1 = [SLOT] WAITING FOR HOST 2 = SLOT MAP VERIFICATION OK 3 = SLOT MAP VERIFICATION FAILED This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 6 Doc 5738 SEMI

9 673 S Milpitas Blvd Phone: SlotMap Variable Name Class Format DVVAL L, n where n= capacity Capacity (125) 1 Format Code 51 enumerated Enumerated 2 Format Code 51 enumerated Enumerated 3 Format Code 51 enumerated n Format Code 51 enumerated Each as 51 (U1) 0 = UNDEFINED 1 = EMPTY 2 = NOT EMPTY 3 = CORRECTLY OCCUPIED 4 = DOUBLE SLOTTED 5 = CROSS SLOTTED UnAllocatedPartitionCapacity DVVAL Format Code 51 UnAllocatedPartitionCapacityi SV Format Code 51 7 SECS-II Attribute Definitions 71 Carrier Object SECS-II Attributes Definitions 711 The following are the SECS-II structure definitions for the SEMI E87 Carrier Object Table 5 Carrier Object Attribute Definitions ObjType Attribute Name 1 Carrier Attribute Data Form: SECS-II Structure ObjID 1 <CARRIERID> (Conforms to the restrictions of ObjID as specified in SEMI E391, 6) Capacity CarrierAccessingStatus CarrierIDStatus ContentMap LocationID Format Code 51 (U1) Capacity Capacity Range: 1 25 to 255 Capacity Examples: 1, 13, 25 Format Code 51 (U1) CarrierAccessingStatus CarrierAccessingStatus enumerated per Variable CarrierAccessingStatus Format Code 51 (U1) CarrierIDStatus CarrierIDStatus enumerated per Variable CarrierIDStatus L, n where n=capacity 1 L,2 1 Format Code 20 (A) LotID 2 Format Code 20 (A) SubstID n L,2 1 Format Code 20 (A) LotID 2 Format Code 20 (A) SubstID 2 SubstID conform conforms to the restrictions of ObjID as specified in SEMI E391, 6 Format Code 20 (A) LocationID LocationID conforms to the restrictions of ObjID as specified in SEMI E391, 6 This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 7 Doc 5738 SEMI

10 673 S Milpitas Blvd Phone: Attribute Name SlotMap L, n n=capacity 1 Format Code 51 (U1) enumerated n Format Code 51 (U1) enumerated SlotMapStatus SubstrateCount Usage enumerated Enumerated per variable SlotMap Attribute Data Form: SECS-II Structure Format Code 51 (U1) SlotMapStatus SlotMapStatus enumerated per Variable SlotMapStatus Format Code 51 (U1) SubstrateCount SubstrateCount Range: 0 to 25 Capacity SubstrateCount Examples: 1, 3, 21, 25 Format Code 20 (A) Usage Usage is equipment defined, examples: TEST, DUMMY, PRODUCT NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein Standards and Safety Guidelines are subject to change without notice By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility <End of Ballot> This is a Draft Document of the SEMI International Standards program No material on this page is to be construed as an official or adopted Standard or Safety Guideline activity All other reproduction and/or distribution without the prior written consent of SEMI is prohibited Page 8 Doc 5738 SEMI