Background Statement for SEMI Draft Document 5872B LINE ITEM REVISION TO SEMI E Specification for SECS Equipment Data Dictionary (SEDD)

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1 Background Statement for SEMI Draft Document 5872B LINE ITEM REVISION TO SEMI E Specification for SECS Equipment Data Dictionary (SEDD) NOTICE: This Background Statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this ballot. NOTICE: For each Reject Vote, the Voter shall provide text or other supportive material indicating the reason(s) for disapproval (i.e., Negative[s]), referenced to the applicable section(s) and/or paragraph(s), to accompany the vote. NOTICE: Recipients of this ballot are invited to submit, with their Comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, patented technology is defined as technology for which a patent has been issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. According to the SEMI Standards Procedure Manual, a Line-Item Ballot should include the Purpose, Scope, Limitations (if present), and Terminology (if present) sections, along with the full text of any section to which revisions are being balloted. Background When creating the first version of the SEMI E172 standard, several features were intentionally postponed. See the SNARF for ballot 5619 for reference. This ballot proposes to add the previously postponed features. The new proposed features intend to make SEDD files even more descriptive of an equipment s GEM interface implementation. E173 References SEMI standards E172 and E173 were originally balloted at the same time as ballots 5619 and 5620, respectively. The simultaneous submission made it impossible for E172 to reference E173 unless E172 was delayed. To avoid delaying the ballot development, ballot 5619 copied sections from ballot 5620 schema. This ballot proposes to remove the sections previously copied from E173 and instead imports these features from the E173 schema file which is now published and therefore can be imported. The E172 Specification includes a Complementary File; a schema file named E SEDD-Schema.xsd. A new Complementary File is included with this ballot, a schema file named E172-MMYY-SEDD-Schema.xsd. It is understood that when the ballot is approved, SEMI staff will rename this file by replacing the MM and YY with the new E172 month and year, respectively. IMPORTANT: Note that the full details of the added and deleted items within the Complementary File are not included in the text of this ballot in order to make this ballot easier to understand. The text signified the definition of the added or deleted items. See the attached Complementary File E172-MMYY-SEDD-Schema.xsd for details of the added and deleted items. The E172 Specification includes Various Material file called SEDD_TrackSys_Model404_ A new Various Material file SEDD_TrackSys_Model404_MMYY.xml is included with this ballot. It is understood that when the ballot is approved, SEMI staff will rename this file by replacing the MM and YY with the new E172 month and year, respectively. Additionally, please note that the E SECSIIMessageNotation-Schema.xsd file is included in the ballot zip file for convenience, but is not part of the ballot. This entire ballot is one line item. Note that text to be added are shown in underlined blue text. Deleted items are shown in strikethrough red text.

2 What is the problem being solved? Current E172 SEDD files that comply with E document the list of collection events, data variables, status variables, equipment constants, alarms, recipe variables and variable formats. While this is very useful, it fails to document other features of a GEM interface. This ballot proposes to enhance E172 so that SEDD files are capable of also documenting the list of: 1. S2F41/F49 remote commands and the arguments available for each command 2. SECS-II messages and the allowed format(s) for each message 3. Standards and the compliance table for each standard. 4. Predefined event reports Instead of maintaining a copy of definitions from the E173 standard, this ballot also proposes referencing E173 and removing the copied definitions. This was the original intent of the E172 and E173 authors. Note that E172 is already using SMN (E173) in the current publication. All of the changes are proposed in a single line item. What is the history of this issue and ballot? This is the third submission of this ballot. The topics of this ballot have been discussed previously in the GEM 300 task force on multiple occasions since the original ballot 5619 was introduced. The first ballot failed because of a request for more metadata about remote commands. The requested details were added. Specifically, the schema now allows the specific supported SECS-II message for each remote command to be indicated using attributes. Additionally, the object specifiers for S2F49 remote commands can be listed. The second ballot failed because the SEMIStandardType failed to account for the newer 3D prefix used for some new SEMI standards. Who will this affect? How? Why?. The changes are backward compatible so that SEDD files compatible with the E SEDD-Schema.xsd schema file will still be compatible with the new schema file. Anyone using E can upgrade to the new E173 whenever they want because new features in the SEDD file are optional. Of course, in order to take advantage of the new features, the new items would need to be added to a SEDD file. Is this a change to an existing solution, or, is it a new activity? These are new features to an existing Specification. Revision Control This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force. Date Version Name Edits August Brian Rubow Nov Brian Rubow First draft of this document, after fixing the defects in SEDD_TrackSys_Model404_MMYY.xml and adding more details to the RemoteCommand element in E172-MMYY- SEDD-Schema.xsd. Modifed SEMIStandardType to allow numbers in the prefix of standards. Added descriptions to Table 4

3 Review and Adjudication Information Task Force Review Committee Adjudication Group: NA GEM300 TF NA Information & Control Committee Date: April 4th 2017 April 5th 2017 Time & Time zone: 1:00PM 4:00PM Pacific Time 8:00AM 5:00PM Pacific Time Location: SEMI Headquarters SEMI Headquarters City, State/Country: Milpitas, CA/USA Milpitas, CA/USA Leader(s): Brian Rubow (Cimetrix) Jack Ghiselli (Ghiselli Consulting) Brian Rubow (Cimetrix) James Moyne (University of Michigan) Standards Staff: Inna Skvortsova (SEMI ) iskvortsova@semi.org Inna Skvortsova (SEMI ) iskvortsova@semi.org This meeting s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

4 SEMI Draft Document 5872B LINE ITEM REVISION TO SEMI E Specification for SECS Equipment Data Dictionary (SEDD) Note: Per of the SEMI Standards Procedure Manual, the introductory sections of SEMI E are provided below. 1 Purpose 1.1 The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment. This is a type of documentation, called the SECS Equipment Data Dictionary (SEDD). It is primarily intended as a means for an equipment supplier to provide such documentation to its customers. The customers are expected to use this documentation to streamline the development of the factory software that communicates with the production equipment. 1.2 This Specification is not intended to eliminate the need for traditional paper (or equivalent) equipment interface documentation. This is a supplement to that documentation. 2 Scope 2.1 The SEDD is intended to be a data set that documents key elements of a SECS-II interface. The form in which this data is provided is intended to be comprehensible to both humans and software applications. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 The potential set of information that could be communicated about a SECS-II interface is large. This Specification addresses an important subset of that information. The customer of the production equipment may need additional information about the SECS-II interface to be provided in the traditional paper (or equivalent) format. 4 Referenced Standards and Documents 4.1 SEMI Standards and Safety Guidelines SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS-II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E40 Standard for Processing Management SEMI E90 Specification for Substrate Tracking SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E164 Specification for EDA Common Metadata 4.2 W3C Standards 1 Extensible Markup Language (XML) 1.1 (Second Edition) W3C Recommendation 16 August 2006; XML Schema Definition Language (XSD) 1.1 Part 1: Structures W3C Recommendation 5 April 2012 XML Schema Definition Language (XSD) 1.1 Part 2: Datatypes W3C Recommendation 5 April 2012 NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. 1 World Wide Web Consortium, Massachusetts Institute of Technology (MIT), 32 Vassar Street, Room 32-G515, Cambridge, MA 02139, USA. Telephone ; Fax: ; Page 1

5 5 Terminology 5.1 Abbreviations and Acronyms RVP Recipe Variable Parameter SECS SEMI Equipment Communications Standard SECS-II SEMI Equipment Communications Standard SEDD SECS Equipment Data Dictionary W3C Worldwide Web Consortium XML extensible markup language 5.2 Definitions bit field a simple data structure used to store multiple bits, where each bit has a separate logical meaning. Each bit is limited to the values 1 for on and 0 for off. Individual bits are sometimes referred to as flags Discussion SECS-II does not support bit field data types, but bit fields can be represented by any of the supported data types, such as unsigned integers or binary data collection event an event that may be used to initiate the collection and reporting of data. A collection event may trigger an event report. A collection event also may start or stop one or more trace reports. [SEMI E53] equipment recipe an executable specification of an activity or process on an equipment. The recipe is the user-managed, reusable portion of the set of instructions and settings that determine the processing environment seen by the material. Recipes may be subject to change between runs or processing cycles. An equipment recipe consists of one or more recipe components. [SEMI E157] extensible markup language (XML) a markup language used for representing data rich with context and content in documents and in communications. XML is an extension of SGML, a document-oriented markup language. It was created by W3C for use on the Internet. XML can represent object-oriented structures. [SEMI E120.1] host the factory computer system or an intermediate system that represents the factory and the user to the equipment. [SEMI E87] process job a material processing job for a processing resource specifying and tracking the processing to be applied to the material. [SEMI E40] production equipment equipment used to produce semiconductor devices, including sorting, process, and metrology equipment and excluding material handling and storage equipment. [SEMI E168] recipe component an executable specification that is managed by the equipment as a separate entity (e.g., file). A recipe component represents all or part of an equipment recipe. For a multipart recipe, a recipe component may be referred to as a subrecipe. A recipe component may contain zero or more recipe steps. [SEMI E157] recipe variable parameter (RVP) a setting contained in a recipe component whose value can be adjusted by the host for an execution of that recipe without making a permanent change to the recipe Discussion An RVP can be set using features of SEMI E40 for process job management. SEMI E30 specifies that it can also be set by remote commands from the host. SEMI E30 uses the term variable parameter see variable parameter settings and CPNAME/CPVAL in SEMI E30, 4.4. In this Specification, the terms are equivalent subordinate recipe a subsidiary component of a multipart recipe. A subordinate recipe is typically executed based upon a command or setting in another equipment recipe variable parameter a formally defined variable (setting) defined in the body of a recipe, permitting the actual value to be supplied externally. [SEMI E139] SECS Equipment Data Dictionary (SEDD) a data set, formatted as an XML file, that contains definitions of key elements of a production equipment s SECS-II interface. This may include such elements as collection events, variables, and alarms. Page 2

6 1 Line Item #1 1.1 Changes to the SEMI E172 Specification NOTE to SEMI Staff: All references to E SEDD-Schema.xsd in the E172 specification are to be updated to match the new Complementary File name which is not known until the time of publication. There are multiple such references Proposal In the SEMI E172 Specification, section 4.1 SEMI Standards and Safety Guidelines, add the following additional reference: SEMI E173 Specification for XML SECS-II Message Notation (SMN) Proposal In SEMI E172 Specification, section 5.1, add the following abbreviation: SMN SECS-II Message Notation [SEMI E173] Proposal In the SEMI E172 Specification, replace the image in Figure 1 SEDD Schema in section ( Figure from E ) with the new image shown below it ( Proposed Figure 1 ), which includes the new (optional) elements. Figure 1 from E Page 3

7 Proposed Figure Proposal In the SEMI E172 Specification, section add the following text. Note that the actual MM and YY values are not known until the time of publication The Complementary File E MMYY-SEDD-Schema.xsd is a part of this Specification. It is an XML schema file. It is referred to in this Specification as the SEDD schema. Note that the SEDD schema imports Complementary File E SECSIIMessageNotation-Schema.xsd from the E173 Specification which is hereafter referred to as the SMN schema. [E RQ ] Each SEDD shall be defined in accordance with all requirements in this Specification including those in the XML schema E MMYY-SEDD-Schema.xsd that is a Complementary File to this Specification. [/RQ] Proposal In the SEMI E172 Specification, section modify the following text as follows The details of the data found in the SEDD and related requirements are defined within the SEDD schema. The following three two tables are provided as an overview of the content of the SEDD. Page 4

8 1.1.6 Proposal In the SEMI E172 Specification, Table 4 Description of SEDD Sections add the new (optional) elements. Table 4 Description of SEDD Sections SEDDHeader Section Name CollectionEvents DataVariables StatusVariables EquipmentConstants Alarms RecipeVariableParameters VariableFormats SECSMessages RemoteCommands SEMIStandards DefaultReportDefinitions DefaultEventReportLinks Description The SEDDHeader section of the SEDD provides information to help identify the contents of the SEDD file and link it to the corresponding equipment. These fields are explained in Error! Reference source not found.. The CollectionEvents section of the SEDD holds a definition for each SECS-II collection event that can be reported from the equipment. Each collection event is represented by a set of data fields as listed in Error! Reference source not found. and described in the SEDD schema. The DataVariables section of the SEDD holds a definition for each data variable available to be reported with SECS-II collection events. Each data variable is represented by a set of data fields as listed in Error! Reference source not found. and described in the SEDD schema. The StatusVariables section of the SEDD holds a definition for each status variable available to be reported with SECS-II collection events and trace data messages. Each status variable is represented by a set of data fields as listed in Error! Reference source not found. and described in the SEDD schema. The EquipmentConstants section of the SEDD holds a definition for each equipment constant available to be reported with SECS-II collection events. Each equipment constant is represented by a set of data fields as listed in Error! Reference source not found. and described in the SEDD schema. The Alarms section of the SEDD holds a definition for each SECS-II Stream 5 alarm. Each alarm is represented by a set of data fields as listed in Error! Reference source not found. and described in the SEDD schema. The RecipeVariableParameters section of the SEDD contains a definition for each recipe variable parameter that can be used to adjust the settings used during execution of an equipment recipe. Each RVP is represented by a set of data fields as listed in Error! Reference source not found. and described in the SEDD schema. VariableFormats contains a list of detailed definitions of the formats of each variable defined for this production equipment. Each VariableFormat should be referenced in one or more Format fields for StatusVariables, DataVariables, EquipmentConstants, and/or RecipeVariableParameters. The list and format of SECS-II messages supported by the equipment. Include both host and equipment initiated messages. The list of S2F21/F41/F49 remote commands supported by the equipment. This minoccurs is 0 for this element for backward compatibility as well as for equipment that do not support remote commands and therefore have no remote commands. The list of SEMI standards supported by the equipment. The list of default reports provided by the equipment. The list of default event report links provided by the equipment Proposal In the SEMI E172 Specification, section modify the following text as follows and remove Table The SEDD SMN schema specifies ASC to represent an ASCII string and LST to represent a SECS-II list. Please refer to the E173 Specification for a complete listing of the SECSData notation used for the various SECS-II formats. Table 6 lists all of the formats that can be used for the data items in a SECSData element of the Page 5

9 VariableFormat structure, as specified in the SEDD schema. Using lists (LSTs), these formats can be built into complex data structures. Table 6 SECSData Data Item Formats Format Name SECS-II Format Code (Octal) Meaning LST 00 LIST (length in elements) BIN 10 Binary BOO 11 Boolean ASC 20 ASCII JIS 21 JIS-8 MBC 22 2 byte character SI byte integer (signed) SI byte integer (signed) SI byte integer (signed) SI byte integer (signed) FP byte floating point FP byte floating point UI byte integer (unsigned) UI byte integer (unsigned) UI byte integer (unsigned) UI byte integer (unsigned) ANY Any Can take any format as needed SET As specified The list of allowable format codes is specified SIA 30, 31, 32, or 34 Any signed integer format UIA 50, 51, 52, or 54 Any unsigned integer format INT 30, 31, 32, 34, 50, 51, 52, or 54 Any integer format FPA 40 or 44 Any floating point format Proposal In the SEMI E172 Specification, update the name of the Various Materials file. Note that the actual MM and YY values are not known until the time of publication The file is named SEDD_TrackSys_Model404_ MMYY.xml Proposal In the SEMI E172 Specification, add the following new subsections to section 9.5 SEDD Content SECS-II Messages The SECSMessages section lists supported SECS-II messages and the allowed format for each message. Note that the schema allows more than one message body definition for a single message The complete specification is included in the SEDD schema Consult the E173 SMN Specification for examples of messages formatted using SMN Remote Commands Page 6

10 The RemoteCommands section lists supported GEM remote commands, if any. When no GEM remote commands are supported, then this section may be omitted The complete specification is included in the SEDD schema SEMI Standards The SEMIStandards section lists supported SEMI standards and includes a compliance statement for each The complete specification is included in the SEDD schema Default Reports and Default Event Reports The DefaultReports section lists reported that are predefined by the equipment The DefaultEventReports section lists reports that are linked to events by the equipment The complete specification is included in the SEDD schema. Page 7

11 1.2 Changes to the E172 Complementary File Proposal In the SEMI E172 Complementary File, add the following import statement to the E172 Complementary File, as seen in the proposed Complementary File E172-MMYY-SEDD-Schema.xsd. This import statement causes the E172 Complementary File to reference the E173 Complementary File. <xs:import schemalocation="e secsiimessagenotation-schema.xsd" namespace="urn:semiorg:xsd.smn"></xs:import> Proposal In the SEMI E172 Complementary File, delete complex type DataItem, attribute group DataItemAttributes, complex type DataItemBase and simple type SECSItemFormat from the E172 Complementary File, as seen in the proposed Complementary File E172-MMYY-SEDD-Schema.xsd. These items are found in the now imported E173 Complementary file E SECSIIMessageNotation-Schema.xsd. <xs:complextype name="dataitem"> </xs:complextype> <xs:attributegroup name="dataitemattributes"> </xs:attributegroup> <xs:complextype name="dataitembase"> </xs:complextype> <xs:simpletype name="secsitemformat"> </xs:simpletype> Proposal In the SEMI E172 Complementary File, add element SECSMessages and simple type SEMIStandardType to the E172 Complementary File as part of the DataDictionary sequence, as seen in the proposed Complementary File E172-MMYY-SEDD-Schema.xsd. <xs:element name="secsmessages" minoccurs="0"> </xs:element> <xs:simpletype name="semistandardtype"> <xs:restriction base="xs:string"> <xs:pattern value=" ([A-Z0-9]{1,4}[0-9]{1,4}-((0[1-9]) (1[0-2]))[0-9][0-9]) "/> </xs:restriction></xs:simpletype> Page 8

12 1.2.4 Proposal In the SEMI E172 Complementary File, modify the definitions element SEMIStandard for elements CollectionEvent, DataVariable, StatusVariable, EquipmentConstant, and Alarm to use the simple type. <xs:element name="semistandard" type= SEMIStandardType minoccurs="0"> <xs:simpletype> <xs:restriction base="xs:string"> <xs:pattern value="(e[0-9]{1,3}-((0[1-9]) (1[0-2]))[0-9][0-9])"/> </xs:restriction> </xs:simpletype> </xs:element> Proposal In the SEMI E172 Complementary File, add element RemoteCommands to the E172 Complementary File as part of the DataDictionary sequence, as seen in the proposed Complementary File E172-MMYY-SEDD-Schema.xsd. <xs:element name="remotecommands" minoccurs="0"> </xs:element> Proposal In the SEMI E172 Complementary File, add the element SEMIStandards to the E172 Complementary File as part of the DataDictionary sequence, as seen in the proposed Complementary File E172-MMYY-SEDD-Schema.xsd. <xs:element name="semistandards" minoccurs="0"> </xs:element> Proposal In SEMI E172, add elements DefaultReports and DefaultEventReports to the E172 Complementary File as part of the DataDictionary sequence, as seen in the proposed Complementary File E172-MMYY-SEDD-Schema.xsd. <xs:element name="defaultreports" minoccurs="0"> </xs:element> <xs:element name="defaulteventreports" minoccurs="0"> </xs:element> Page 9

13 1.3 Changes to the E172 Various Material Proposal In the SEMI E172 Various Material file, add the following sections as seen in the proposed Various Material file SEDD_TrackSys_Model404_MMYY.xml. Note that the details of the added sections are not listed below. Only the new section elements are included to emphasize the changes. Please review the new Various Material file which is available as a separate file as part of this ballot. <SECSMessages> </SECSMessages> <RemoteCommands> </RemoteCommands> <SEMIStandards> </SEMIStandards> <DefaultReportDefinitions> </DefaultReportDefinitions> <DefaultEventReportLinks> </DefaultEventReportLinks> NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility. <End of Ballot> Page 10