Nikon Measuring Microscopes MM Series. Nikon Measuring Microscopes. MM Series

Transcription

1 Nikon easuring icroscopes Series Nikon easuring icroscopes Series

2 Digital Imaging & etrology Next-Generation easuring icroscopes V V unction Icons Autofocus (Universal ype) aser (Autofocus) enables quick perfect focusing. ocusing Aid Series Nikon is proud to present the series of easuring icroscopes, which incorporate key performance features expected in an advanced next generation measuring microscope: Greater Accuracy Digital Imaging and Vision rocessing etrology arger Stage for Increased Workpiece Handling Non Contact Z-height easurements Coordination with Data rocessing Systems -00 E-A set with 8-Segment ing ight CYN-E1-400/V -800/U he Nikon measuring microscope can be equipped with a aser (universal type) and a ocusing Aid mechanism that provides sharper and more accurate focusing. High precision Z-axis measurement is simpler than ever. Digital image capture using a Nikon digital camera and E-ax metrology software allows rapid measurement with precise auto edge detection. A fully motorized high power microscopy model is also available for digital imaging. By offering many options in illuminators and light sources, an expanded observation range has been achieved. hese include a high-intensity white illuminator for brightfield observation, a universal epi-illuminator to respond to various observation needs, and a 1V-50W halogen light source. A motorized Z-axis movement mechanism ( models) simplifies accurate vertical motion through the use of a dedicated controller. Added body strength enables the use of larger stages, such as the S 1x8C stage, allowing for larger workpieces. Ease of operation has been greatly improved by use of various motorized controls and ergonomic design. Even the S 1x8C stage is easy to manipulate despite its large size. Stands with the integrated Controller interface and the D-E1A Data rocessor or SC counters and C-based E-ax data processing software provide excellent geometric data processing and storage. he compact and lightweight -00 ensures precise and easy usage, and offers the basic functions of the -400/800 series. V V U U V U U U U V U U V U V DUA DUA he ocusing Aid () ensures accurate Z-axis focusing. Universal Epi-illuminator ocusing Aid A universal epi-illuminator with ocusing Aid () mechanism. Variable agnification wo objective lenses can be attached, making magnification changeover easy. Z-axis otorized otion A dedicated controller provides easy and accurate up/down movements. Dual Side Coarse/ine ocus Knob Coarse/fine focus knobs are on both sides. Built-in Z-axis inear Scale Z-axis reading is possible for noncontact height measurement. rinocular DUA Optical Head Ideal for configuration with photomicrography equipment. onocular Optical Head or applications where cost performance is priority. Universal Epi-illuminator Supports a wide range of applications. Illuminator A high-intensity white illuminator for brightfield use. Video Head Video head is available. ing ight 8-segment ring lighting source. Dual Knob Knob on both sides. 3

3 Stellar eatures Enhance Z-axis easurement Accuracy aser (Universal ype) hese are the first measuring microscopes to offer an optional aser Auto- ocus. his aser system features a 0.5 second focusing speed with a repeatability as high as 0.5µm (θ). ocusing Aid () he split-prism ocusing Aid () delivers sharp patterns to allow accurate focusing during Z-axis measurements. easurement errors due to differences in the depth of focus of different objectives are minimized. Split-prism ocusing Aid () echanism Objective patterns are clearly visible because they are split vertically. aser racking on C Digital Imaging & Vision rocessing he use of a Nikon microscope digital camera and E-ax software will streamline your workflow from observation and capture, to the storage of high-definition digital images of your workpieces. Controller Backpack Interface Illumination, /Y stage and Z data can be connected to the Controller as an interface to an external computer running E-ax software for data processing and system control. S 1x8C Stage for arge Workpieces (-800 only) An enhanced body design using Computer Aided Engineering (CAE) for stress analysis enables the mounting of a larger stage to accommodate larger workpieces. A 300 x 00mm (1" x 8") stroke stage can be mounted to the ront focus ocused ear focus ront focus ocused ear focus ow reflection surface can be precisely focused, too. Illuminators Broaden Observation anges otorized Z-Axis ovement ( odel Stands) A motorized vertical movement mechanism with a 10mm/sec. speed has been incorporated. Up/down control is accurately provided with a dedicated controller. A high-intensity white illuminator is provided as standard for brightfield use. his illuminator features no bulb replacement and constant color temperature, enabling measurement with high-precision and efficiency. or the universal type (except ), a 1V-50W halogen light is included. Brightness has been substantially improved, particularly at high magnifications. Built-in Continuous ight Control A continuous light control is built into the system, enabling light control from the C without touching the dial on the main body. easurements can now be made under the same conditions, assuring precise video edge detection for repeatable measurements. Illuminator his high-intensity illuminator uses white and comes with a quick light intensity control. 8-Segment ing ight CYN-E1 his ring light enables illumination control from eight directions, eliminating the need to pull out and adjust the fiber illuminator each time a measurement is made. wist roller drive allows smooth changeover of coarse/fine stage movement Swivel plate comes as standard for S 1x8C, S 10x6B and S 8x6B. he coarse/fine changeover lever and the ESE and SEND buttons are located near the - and Y-axis knobs -axis knob (near buttons) Y-axis knob (near buttons) -800 High-recision ype (actory Option) he -800 high-precision type provides increased flexibility in choosing modules for system configurations. It enables optimum system configuration according to user needs, and provides excellent reliability during measurements with configurations consisting of a digital camera and/or other accessories. 1.5+/100 μm (high-precision type )*1* for S 8x6B, S 10x6B, S 1x8C.0+/50 μm (high-precision type1)*.5+/50 μm (standard type, calibration data included) *1 When using -800 for high precision type, object lens 10x or higher, vibration isolation table and suitable temperature controlled room are required. * Contact Nikon for details of system configuration. Improved Interface with Data rocessor and Software Interfacing to data processors and C software has been greatly improved to include comprehensive support throughout the entire measurement process, from image capture and measurements, to analysis and data storage. Data rocessor D-E1A he D-E1A Data rocessor is compact, yet easy to use. or quick measurements and data processing you can place the read-out display near the eyepiece while the control pad is placed at your fingertips. he D-E1A s seamless interface to a C platform makes it easy to perform computations and management of your measurement results. Data rocessing Software E-A Series Digital image measuring performance of the E-A software has been upgraded. Combined with Nikon s digital camera and measuring microscope, the system achieves digital image measurements with precision never before possible. 3rd-party DO Connectable (S odels) he -400S, S and -800S, S models were created for use with HEIDENHAIN QUADA-CHEK and other 3rd-party digital read-outs. hey offer an economical alternative if non-nikon data processors are used. * QUADA-CHEK is a trademark of HEIDENHAIN. Error 0 Combination precision Standard precision: (.5+/50) µm High-precision type 1: (.0+/50) µm High-precision type : (1.5+/100) µm ravel distance 4 5

4 U U U odels 3-Axis and Z-otorized odel he models have a built-in motorized Z-axis scale, enabling accurate 3-axis measurements. In addition, the optional ocusing Aid uses a split U prism to ensure Z-axis focusing accuracy and minimize measurement errors caused by the difference in the objective s depth of focus. U -800/ U -400/ U Applications: Dies & molds, inely machined parts, Stamped parts, Injection molded parts, edical devices /S ype odels 3-Axis easurement odel With a built-in Z-axis scale, this type is the basic standard for Nikon s measuring microscope series. Various models are available with or without ocusing Aid, monocular or trinocular optical head. You can select the best one according to your measuring range, use and budget. he S model is recommended for 3rd-party (non- Nikon) digital read-outs and therefore does not include the controller that interfaces with the Nikon DO. U U -800/ U -800/S with 3rd-party DO Configured with S 10x6B stage, trinocular optical head Configured with S 6x4B stage, trinocular optical head lastic Gear eeth with Smaller odule U U U U U V/V odels Variable agnification odels U hese models allow two objective lenses (low and high magnification) to be mounted simultaneously, thus making magnification changeover easy. Both low-magnification wide-field-of-view measurement and high-magnification high-precision-height measurement can be performed on a single microscope. lease check U specifications before purchasing a variable magnification model. V -800/V -400/V U -800/V U -400/V V Black Injection olding arts - Connector Applications: Dies & molds, inely machined parts, Stamped parts, Injection molded parts, edical devices Configured with S 8x6B stage, trinocular optical head U U -400/ -400/S with 3rd-party DO U Specifications ype -800/ -400/ -800/V, -800/V -400/V, -400/V Z-axis movement otorized (max. speed: 10mm/sec) anual (dual side coarse/fine focus knob) controller backpack interface Built-in Optical head onocular optical head, rinocular optical head, rinocular optical head Variable magnification optical head, Variable magnification optical head Z-axis linear scale Built-in Eyepiece inclination angle 5 Eyepiece CWN10x (ield No. 0) Objective easuring microscope objectives Objective lens magnification 1x (79mm), 3x (75mm), 5x (64mm), 10x (48mm), 0x (0mm), 50x (15mm), 100x (4mm) (working distance) Stage S 1x8C, S 10x6B, S 8x6B S 6x4B, S 4x4B, S xb S 1x8C, S 10x6B, S 8x6B, S 6x4B, S 4x4B, S xb S 6x4B, S 4x4B, S xb ight source Diascopic diascopic illuminator (standard), 1V-50W halogen light source (option)* Episcopic episcopic illuminator DUA ax. workpiece height 00mm 150mm 00mm 150mm Dimensions (W x D x H)/weight 385 x 785 x 75mm/approx. 7kg 300 x 600 x 638mm/approx. 50kg 380 x 735 x 75mm/approx. 7kg 300 x 600 x 638mm/approx. 50kg *I-S100W power supply is required 6 Configured with S 4x4B stage, trinocular optical head Specifications ype -800/ -800/S -400/ -400/S Z-axis movement anual (dual side coarse/fine focus knob) controller backpack interface Built-in Built-in Optical head onocular optical head, rinocular optical head, rinocular optical head Z-axis linear scale Built-in Eyepiece CWN10x (ield No. 0) Objective easuring microscope objectives Stage S 1x8C, S 10x6B, S 8x6B S 6x4B, S 4x4B, S xb ight source Diascopic diascopic illuminator (standard), 1V-50W halogen light source (option)* Episcopic episcopic illuminator ax. workpiece height 00mm 150mm Dimensions (W x D x H)/weight 385 x 785 x 75mm/approx. 7kg 300 x 600 x 638mm/approx. 50kg *I-S100W power supply is required 7

5 U -Axis odels/s odels -400/S with 3rd-party DO -800/400/800S/400S (-Axis easurement odel) hese are the basic models in the -400/800 series. High in cost performance, these models are expressly designed for -axis (Y) applications. o meet your application and budget, various models are available monocular or trinocular optical heads, plus 1x8 large stage or x small stage sizes are available. he 400S and 800S models are specifically for use with non-nikon digital read-outs Applications: Dies & molds, inely machined parts, Stamped parts, Injection molded parts, edical devices Configured with S 8x6B stage, trinocular optical head U -400 Configured with S xb stage, monocular optical head -800/S with 3rd-party DO U U U -00 Compact, Space-saving, 40-kg Body he affordable -00 features a space-saving design with a footprint equivalent to an A3-size sheet, or 40 x 97 mm (main body with monocular eyepiece tube). onocular Eyepiece Head / C-mount Video Head he monocular eyepiece tube model is available for those who prefer to measure with their own eye, while the C-mount video head model provides easy video monitoring. Controller Backpack Interface for Digital eadout and Data rocessing he -00 has a backpack control interface unit for Y stage scale readout, illumination control, communication ports to external devices such as C, digital readout and so on. Simply apply the data processing unit, the D-E1A, to complicated GD & measurements. he E-A DS-V system allows easy-to-use advanced video edge detection technologies. opular digital readouts such as HEIDENHAIN ND 100 QUADA-CHEK are also available. * QUADA-CHEK is a trademark of HEIDENHAIN. White ighting Sources he built-in episcopic and diascopic light sources are all long-life white s. he optional ring lights enhance edge observation through the use of an oblique illumination angle. Applications - Small Size Die & old - Drill Bits - Inserts - ine itch Connector - edical Devices - Watch arts - Gears Compact, light, precise and easy to use measuring U microscope V for V dimensioning and tolerancing Uniquely designed for all machining engineers and inspectors GA - Insertion in Drill Bits he image was generated by optional ED/ Stitching Express software Connector - Housing Inside lastic Gear eeth with Smaller odule -00 with onocular Eyepiece ube and D-E1A U V V U V DUA V U DUA DUA DUA DUA -00 with C-mount Video Head and E-A DS-V Applications: Stamped parts, Injection molded parts, edical devices, Drills, icro tooling, Automotive Components Configured with S xb stage, trinocular optical head, ND 100 QUADA-CHEK Configured with S 8x6B stage, trinocular optical head, ND 100 QUADA-CHEK Specifications ype onocular Eyepiece ube ype C-mount Video Head ype Specifications ype /S /S Z-axis movement anual (dual side coarse/fine focus knob) controller backpack interface Built-in Built-in Optical head onocular optical head, rinocular optical head Z-axis linear scale Eyepiece Dedicated 10x (ield No. 0) CWN10x (ield No. 0) Dedicated 10x (ield No. 0) CWN10x (ield No. 0) Objective easuring microscope objectives Stage S 1x8C, S 10x6B, S 8x6B S 1x8C, S 10x6B, S 8x6B S 6x4B, S 4x4B, S xb S 6x4B, S 4x4B, S xb ight source Diascopic diascopic illuminator (standard), 1V-50W halogen light source (option)* Episcopic episcopic illuminator ax. workpiece height 00mm 150mm 00mm 150mm Dimensions (W x D x H)/weight 385 x 785 x 75mm/approx. 7kg 385 x 785 x 75mm/approx. 7kg 300 x 600 x 638mm/approx. 50kg 300 x 600 x 638mm/approx. 50kg *I-S100W power supply is required Optical head -00 monocular optical head C-mount video head for -00 YZ stroke Stage accuracy 50 mm x 50 mm x 110 mm.5 + /50 μm (with EC), 3 + /50 μm ( = measurement length in mm) Scale resolution 0.01/0.1(default)/1/10 μm ax. loading weight kg for guaranteed accuracy, 5 kg for operation agnification accuracy Objective lenses (W.D.) 0.1 % Standard: 3x (75.5 mm), Optional: 1x (79 mm), 5x (64 mm), 10x (48 mm) DUA ight sources Dimensions & weight Standard: diascopic/episcopic (white ), Optional: 8-segmented ring light (white ) 316 x 455 x 533 (W x D x H), 40 kg Input voltage range V (ax. 1.8 A) 8 9

6 High ower icroscopic odel with Universal Epi-Illuminator otorized Z-axis & icroscopic Observation ode Switchover hese Universal models combine a measuring stand with the best of Nikon s metallurgical microscope components for high resolution imaging and critical measurements. eaturing the full range of Nikon advanced U objectives and microscopy techniques including: brightfield, darkfield, DIC contrast, polarizing and epi-fluorescence. Up to five objectives may be mounted on the nosepiece. oreover, important controls in the microscope e.g. Z-axis movement, focusing and illumination switchover have been automated or motorized to streamline imaging operations such as digital image capture, digital field-of-view measurement and data storage. Brightfield Darkfield Brightfield A Wide Choice of Illuminators otorized universal illuminators are available in addition to manual types. A white illuminator is available for brightfield use. Users can choose either a 1V-50W halogen or a white light source according to observation purpose and workpiece. V-U EI Universal Epi-Illuminator his universal epi-illuminator enables brightfield, darkfield, simple polarizing, and DIC observations. he illuminator automatically opens the field and aperture diaphragms when switching observation from brightfield to darkfield. When returning to brightfield, the previous field and aperture conditions are automatically restored. V-U EI Universal Epi-Illuminator In addition to brightfield, darkfield, simple polarizing, and DIC, this illuminator enables epi-fluorescence observation. he illuminator automatically sets optimum illumination through linkage to the shutter, field and aperture diaphragms. his minimizes the complexity of operating a measuring microscope, allowing the user to concentrate on the observation. V-U EIA otorized Epi-Illuminator With the V-U EIA, the illumination changeover turret, the aperture diaphragm and the illumination voltage control have been motorized, allowing optimum image capture conditions. he aperture diaphragm is automatically optimized through linkage with objective and observation. Also, illumination parameters can be arbitrarily changed according to observation purpose and workpiece. When loaded on the type measuring microscope, the illuminator can be controlled from the microscope operation panel or a connected C. When the illumination & controller is used, the microscope can be controlled externally from a C. Epi-fluorescence DIC V-U EI Universal Epi-Illuminator ocusing Aid his universal epi-illuminator is equipped with an optical split image prism ocusing Aid () mechanism to provide greater accuracy in Z-axis measurements. Centralized Control for Different icroscopic Observations, otorized otions V-EI White Illuminator he V-EI is a light, compact white illuminator exclusively designed for brightfield use. he white maintains constant color temperature to prevent any adverse effects on measurement. External control is possible either with the attached power supply controller or the illumination & controller. Control of the motorized epi-illuminator and various light sources, universal motorized nosepiece and aperture diaphragm, DIC changeover, and other important operations can be performed at a single place via the illumination & controller. aser (Auto-ocus) he -400/800 U models are the measuring microscope series equipped with aser, these models accomplish focusing quickly with repeatability as high as 0.5μm (when a 0x objective is used). Universal otorized Nosepiece he V-NU5A universal nosepiece simplifies objective changeovers. rogrammed magnification changeover is available via the illumination & controller. otorized Z-axis ovement High-Intensity White Illuminator or 1V-50W Halogen ight Source Selectable he -400/800 models feature a motorized focusing module, enabling Z-axis movement with a dedicated controller. illuminator can be used as an episcopic light source, eliminating the need for lamp replacement while providing quick response and very low heat emission. he 1V-50W -H50C precentered lamphouse provides bright images. he low power-consumption halogen light source contributes to the compact design of the microscope while also being friendly to the environment. Defocus induced by heat drift is substantially reduced. -H50C precentered lamphouse illuminator for episcopic light source 10 11

7 U U odels High ower agnification 3-Axis Z-otorized odel U U/SU odels U 3-Axis easurement High ower agnification odel he motorized system satisfies digital image capture and data storage requirements. In combination with the motorized universal epi-illuminator, it is possible to set and reproduce illumination optimized for a selected observation method and/or objective lens. ocusing and objective changeover can be electrically performed with the illumination & controller. U 1-800/U Configured with S 1x8B stage, aser, V-U EIA motorized universal epi-illuminator Applications: Semiconductor packages, Bonding placement, oop height, D panel (C), ES, Wafer level CS, HDD slider -400/U Configured with S 6x4B stage, aser, V-U EIA motorized universal epi-illuminator etallized atterns of C Specifications ype -800/U -400/U Z-axis movement otorized (max. speed: 10mm/sec) controller backpack interface Built-in Optical head C-B binocular tube, V-I3 trinocular eyepiece tube, V- tilting trinocular eyepiece tube (with built-in reticle) Z-axis linear scale Built-in Eyepiece CI10x (ield No. ), CI10x C (ield No. ) Objective CI60- U lan luor EI series, CI60- U lan luor BD series, CI60 lan EI C series Stage S 1x8C, S 10x6B, S 8x6B S 6x4B, S 4x4B, S xb ight source Diascopic diascopic illuminator (standard), 1V-50W halogen light source (option)* Episcopic White illuminator V-EI, otorized universal epi-illuminator V-U EIA*, Universal epi-illuminator V-U EI*, Universal epi-illuminator *, Universal epi-illuminator with ocusing Aid V-U EI ax. workpiece height 00mm 150mm Dimensions (W x D x H)/weight 385 x 785 x 75mm/approx. 7kg 300 x 600 x 638mm/approx. 50kg *I-S100W power supply is required U U U U U U U U U CCD D-Cell rocess Color ilter he system is equipped with a U universal epi-illuminator that responds to various observation needs such U as brightfield, darkfield, simple polarizing and DIC, as well as epi-fluorescence. A bright 1V-50W halogen light source and a white light source are available depending on the workpiece or observation purpose. he 1V-50W halogen light source provides images brighter than ever. SU models are is also available for connection to a 3rd-party DO. -800/U -800/SU with 3rd-party DO U Applications: Semiconductor packages, Bonding placement, oop height, D panel (C), ES, Wafer level CS, HDD slider Configured with S 6x4B stage, V-U universal epi-illuminator with ocusing Aid -400/U Configured with S 1x8C stage, V-U EI universal epiilluminator, tilting trinocular eyepiece tube with built-in reticle -400/SU with 3rd-party DO Specifications ype -800/U -800/SU -400/U -400/SU Z-axis movement anual (dual side coarse/fine focus knob) controller backpack interface Built-in Built-in Optical head C-B binocular tube, V-I3 trinocular eyepiece tube, V- tilting trinocular eyepiece tube (with built-in reticle) Z-axis linear scale Built-in Eyepiece CI10x (ield No. ), CI10x C (ield No. ) Objective CI60- U lan luor EI series, CI60- U lan luor BD series, CI60 DUA lan EI C series Stage S 1x8C, S 10x6B, S 8x6B S 6x4B, S 4x4B, S xb ight source Diascopic diascopic illuminator (standard), 1V-50W halogen light source (option)* Episcopic White illuminator V-EI, otorized universal epi-illuminator V-U EIA*, Universal epi-illuminator V-U EI*, Universal epi-illuminator *, Universal epi-illuminator with ocusing Aid V-U EI ax. workpiece height 00mm 150mm Dimensions (W x D x H)/weight 385 x 785 x 75mm/approx. 7kg 300 x 600 x 638mm/approx. 50kg *I-S100W power supply is required 13 U V U U V U U U

8 V V U U/S-U odels -Axis High ower agnification odel Dimensional Diagram Note: Dimensions will vary, depending on which stage and eyepiece tube are used. his model for -axis high magnification measurement U is designed exclusively of fine geometries. It is equipped with a universal epi-illuminator that allows observations such as brightfield, darkfield, simple polarizing and DIC. A bright and a white light source are available 1V-50WU halogen light source depending on the workpiece or observation purpose. he 1V-50W halogen light source provides image brightness equivalent to or higher than that of 1V-100W /U S 6x4B Stage -400V -400/ +可変倍率三眼観察部 +6x4Bステージ S 6x4B Stage U 131 U U 300 IN 0OU /SU with 3rd-party DO / +三眼観察部 +4x4Bステージ -400/ S 4x4B Stage -800/U -800/U +8x6Bステージ S 8x6B Stage /U C0.5 Ø5 Ø Semiconductor packages, Bonding placement, D panel (C), ES, HDD slider -400/U +6x4Bステージ Configured with S 1x8C stage, V-U EI universal epi-illuminator, tilting trinocular eyepiece tube with built-in reticle 380 U Applications: DUA C /SU with 3rd-party DO Ø5 Ø /U U -800/ -800/ +三眼観察部 +1x8Cステージ S 1x8C Stage 単眼観察部 +xbステージ -400/ S xb Stage Unit: mm / -800/ +三眼観察部 +10x6Bステージ S 10x6B Stage 60.7 *I-S100W power supply is required ype -800/U -800/SU -400/U -400/SU Z-axis movement anual (dual side coarse/fine focus knob) controller backpack interface Built-in Built-in Optical head C-B binocular tube, V-I3 trinocular eyepiece tube, V- tilting trinocular eyepiece tube (with built-in reticle) Z-axis linear scale Eyepiece CI10x (ield No. ), CI10x C (ield No. ) Objective CI60- U lan luor EI series, CI60- U lan luor BD series, CI60 lan EI C series Stage S 1x8C, S 10x6B, S 8x6B S 6x4B, S 4x4B, S xb ight source Diascopic diascopic illuminator (standard), 1V-50W halogen light source (option)* Episcopic White illuminator V-EI, otorized universal epi-illuminator V-U EIA*, Universal epi-illuminator V-U EI*, Universal epi-illuminator *, Universal epi-illuminator with ocusing Aid V-U EI ax. workpiece height 00mm 150mm Dimensions (W x D x H)/weight 385 x 785 x 75mm/approx. 7kg 300 x 600 x 638mm/approx. 50kg /U -800/U + +1x8Cステージ S 1x8C Stage 75 Specifications 60 Configured with S 6x4B stage, V-U EI universal epi-illuminator

9 High-performance Objective enses Enhances Optical erformance Standard objective lens with improved transmission rate for UV wavelength CI60- U lan luor Series he transmission rate in the UV wavelength range has been improved for the CI60- U lan luor series. hese objective lenses are suitable for various research, analysis and examination needs, while maintaining Nikon s commitment to high NA and long working distance. Only one kind of objective lens is needed for brightfield, darkfield, simple polarizing, DIC and UV epi-fluorescence observations. hese objective lenses offer high resolution and ease of use. U lan luor EI series ilting trinocular eyepiece tube V- ilting rinocular Eyepiece ube with Built-in eticle he V- tilting trinocular eyepiece tube (erect image) with built-in reticle offers comfort to all users, regardless of their stature or viewing positions. he optical path changeover of 100:0/0:80 allows simultaneous use of a monitor. Bracket for illuminators he bracket enables the V-UEI illuminator to be attached to the left or right side of -400/800 series microscopes. Compatible microscopes -axis and 3-axis -400/800 series Objective lenses with correction ring CI60 lan EI C Series Compatible illuminators Epi-illuminator V-U EI White illuminator V-EI he CI60 series includes the CI60 lan EI C series objectives to cope with the thinner cover-glass used in liquid crystal displays and highly integrated, dense devices. Coverglass correction can be continuously made from 0 mm up to 1.mm (0-0.7mm and mm for 100x) with the correction ring. he 100x objective lens offers 0.85 high NA, while enabling high-contrast imaging of cells and patterns without being affected by the coverglass. lan EI C series of objective lenses with correction ring Selectable nosepieces Highly Durable otorized Universal Nosepieces V-NU5A*/V-NU5AC* wo types of motorized universal quintuple nosepieces are available. he V-NU5A boasts greater durability thanks to a click mechanism and control system. rogrammed magnification change with a controller is possible.he V-NU5AC comes with a centering mechanism that suppresses image drift during objective changeover. * Not available for S and S models V-NU5A nosepiece V-NU5AC nosepiece CI60 Series Objectives Brightfield ype agnification NA W.D. (mm) CI lan EI.5x lan EI 1x x U lan luor EI 5x x x x x U lan EI EWD 0x x x lan EI SWD 10x x x x U lan Apo EI 50x x x With correction mechanism Without correction (50x) ype agnification NA W.D. (mm) Glass thickness correction range (mm) CI lan EI C 0x CI lan EI C 50x CI lan EI CA 100x CI lan EI CB 100x With correction at 0.7mm (50x) Brightfield/Darkfield ype agnification NA W.D. (mm) U lan luor BD 5x x x x x U lan BD EWD 0x x x U lan Apo BD 50x x x anual Nosepieces A variety of manual control nosepieces are available to suit all needs. otorized Observation Controller* his controller makes it possible to control the light source, motorized illuminator, nosepiece, Z-movement and aser. When E-A software is used, control is also possible through the software s teaching program. * Not available for S and S models Connectable units otorized universal epi-illuminator V-U EIA Halogen lamphouse -H50C (I-S100W power supply is required) C-control type high-intensity mercury fiber light source White illuminator V-EI otorized universal nosepiece V-NU5A, V-NU5AC (with centering mechanism) aser (U-) Diascopic/episcopic illumination C-N6 nosepiece (brightfield) -NBD5 nosepiece (bright/darkfield) -NU5 nosepiece (universal) 16 17

10 Stages Stages for -800 series S 1x8C Stage Nikon offers a broad range of stages to choose from including the S 1x8C stage. All models boast an outstanding accuracy of.5+/50µm (=measurement length). An optional high accuracy type (1.5+/100µm) is also available. Stage specifications ype Surface area (mm) Stage glass dimensions (mm) Stroke (mm) eading method in. reading (mm) otation range ool installation screw hall oading capacity (kg) Weight (kg) S 1x8C 448 x x x depth 10 Approx. 67 S 10x6B 398 x x x 150 ±3 (Swivel plate) 1-6 depth 10 0 Approx. 5 S 8x6B 348 x x x depth 10 Approx. 49 S 6x4B 350 x x x 100 inear encoder depth 10 Approx S 4x4B 84 x x x depth 10 Approx. 3.5 S xb ø174 ø x depth 7 5 Approx S 10x6B Stage Stage Stage Adapter his adapter is used to mount S 6x4B, S 4x4B, or S xb stage to the S 8x6B Stage otating ables Used to rotate the workpiece and align it in the direction to which the stage moves. otating able ype 4 or S 1x8C*, S 10x6B, S 8x6B or -800 otating able ype 3 or S 6x4B, S 4x4B Stages for -400 series S 6x4B Stage *When using rotating table type 4, stage stroke is limited in and Y axis. lease ask Nikon for detail. S 4x4B Stage otating table specifications able size Glass insert size otation range ool installation screw hole Weight otating table type 4 ø8mm ø6mm 360 (uncalibrated) 6-6 depth 9 Approx. 8kg otating table type 3 ø04mm ø165mm 360 (uncalibrated) 6-6 depth 10 Approx. 5kg arge Stage Adjustment Knob Enables fine adjustment of swivel plate rotation for S 1x8C, S 10x6B and S 8x6B. ilting Center ixture A Used to hold machined workpieces. or -00, S 6x4B*, S 4x4B* and S xb * otating able ype 3 is required for S 6x4B and S 4x4B. S xb Stage ax. workpiece diameter and Center height ilting angle Weight length when held level A ø68mm x 10mm 45mm 10 (in 1 increment) Approx..kg 18 19

11 OV easurement with Advanced Digital Image rocessing echnology Data rocessing Software E-ax Series In combination with Nikon s industrial digital camera DS-Vi1, the E-A series software provides state-of-the-art image processing technology. Automated edge detection with sub-pixel processing enables more precise and repeatable measurement. Effectively used in conjunction with a measuring microscope/ profile projector, the E-A series software provides the user with various advanced measurements and processing functions, ranging from twodimensional data processing and image measurements, to data storage. arger icons support touch screen operation environment arger Icon ode is selectable for a touch screen operation environment. he mouseless operation enables operators to concentrate on measurements. iner video images and fast image transfer with Nikon s innovative image processing technologies he E-A DS-V software provides OV (field-ofview) measurements without a dedicated image processing board. his allows the software to be installed in high performance Cs. SVGA (800 x 600) images from the digital camera can be captured via IEEE1394b at very fast frame rates and can be processed and measured using Nikon s latest Automated Video Edge Detection and measuring algorithms. Navigation function he graphic window displays the next measurement position in brown, preventing errors and allowing speedy measurement (during replay). he current position is displayed in pink. Illumination controls, motorized nosepiece, universal epi-illuminator, and aser controls White illumination control is possible from E-A software. With motorized nosepiece, universal epiilluminator and/or aser, E-A controls magnification switchover, microscopic methods, aperture setting, aser, etc. Chart measurement A Chart with nominal shapes and tolerance lines can be generated from CAD data. It can be superimposed on the actual video image for easy and quick pass/fail judgments. unctions provided by each set DS-V set D set Data processing Navigation during replay ive video monitoring Chart measurement Automated video edge detection Interactive operation wizards Depending on measurement requirements, operators can select Quick easure, eaching easure or un eaching ile modes, with wizards. eal-time SC via DDE (Dynamic Data Exchange) Using a DDE ink function, measured data can be immediately transferred to spreadsheets such as icrosoft Excel, SC-C IV Excel, and others, making real-time SC analysis possible. Note: SC-C IV Excel is a Quality America Inc. product. 0 1

12 Data rocessor with improved accuracy and ease of use Application Software for easurement Support/Data rocessing System D-E1A etrology Software U-D D-E1A data processor has been developed to improve accuracy and efficiency as a measuring system. A 0.1µm-reading counter display is built into the compact body. he 30 x 40-pixel CD greatly improves ease of use. Effectively used in combination with a measuring microscope/profile projector, it quickly calculates and processes measurement data. Simple & interactive operation Control panel eature Oriented Operation of the D-E1A allows the user to conduct measurements by following the graphics, providing a seamless measuring environment when used in combination with the NEIV V/E-A series software. easurement results are automatically memorized as teaching steps and can be easily used as a measurement routine. DO display ist GD& compliance Geometric Dimensioning & olerancing defined by the ANSI Y 14.5 Specification is supported. In addition to ocation olerancing such as rue osition, C and C, determination of orm, Orientation and unout can be conducted interactively. IE IE IE IN easure code key [Basic feature elements] oint Calculates entered measurement point, or average point from multiple points. UN INSE IE INSE easurement code keys acro keys INSE INSE DEEE E1 E IE IN IN INSE DEEE DEEE UN UN IN E1 E1 E IE DEEE UN DEEE E1 E IE OHES INSE IE E IN IN Numeric keys OHES 4 ACO etrofit Unit 1 1 DEEE E1 E INSE DEEE E1 E Data load key Interactive navigation enables immediate operation. Simple screen layout enables easy measurement result confirmation. Suitable for lot control of inspection data such as maximum value, minimum value, range, standard deviation and process capability index. In addition to 10 standard inspection result sheet forms, it is possible to customize original forms. B and EG files can be pasted onto the inspection result sheet. A utomatic generation of graph and changeable degree/minute/second display. E asy to generate histograms, - control charts and scatter diagrams. Operating environment: Windows 7 or Windows 10 icrosoft Excel 003 or later equired memory: 51B (min) Codevelopment: Aria Co., td. UN EEA Display setting key DEEE IE INSE DEEE E1 E IE Operating environment: Windows 7 equired memory: GB (min) ecommended browsers: Windows Internet Explorer ver or later easuring ofinse circle center todeee line distance IN UN E Custom Create: Direct link to Excel sheet programs easurement data from counters and/or data processors can be transferred directly to Excel sheets. Usable measuring instruments: -400/800 series, D-E1A, V-0B, V-1B Allows data transfer to customized inspection-result sheet form hree standard inspection-result sheet forms are available ransfer from multiple worksheets allows for more efficient measurements EEA ACO E1 OAD UN OAD o use the D-E1A data processor with easuring icroscope models -40/60 or rofile rojector models, V-1B, or V-0B, a etrofit Unit is required as an interface. 1 INSE EEA 3 UN acro code key Distance acro key Disp. key INSE DEEE IN IE E1 E Calculates distance between two IE4 settings. 1 IE 3 ACOSwitches display OAD IN E1 E measured points. OHES EEA acro setup key OHES EEA egisters combination of IE Data input key IN E1 E INSE DEEE IE INSE DEEE UN Intersection OHES EEAmeasurement codes for macro oad key INSE DEEE intersection from 1 UN (1 to 3 4 Calculates point ACO OAD keys 4) ACO OAD Enters measurement points. two measured lines. easurement code IN OAD key ine IE UN INSE DEEE INSE DEEE IN IN E1 E E Calculates intersection from 1 E1 3 point 4 ACOile key E1 OAD E IE Calculates line from two entered Accessory function key IN IE OHES EEA measured point and line. measurement points or fromohes EEA [ile run] Ext1 key UN Calculates intersection point from least-square IN IN unun key E1 DEEE E1 E SetsE up print out of standard INSE multiple points by UN two measured circles. UN method. INSE DEEE INSE DEEE uns teaching file. deviation ACO OAD IE 1 3 4IE ACO angent OAD UN Circle/arc UN epeat IE key Ext key IN E1 E point IE Calculates tangent from IN E1 E Calculates circle from three EEA OHES EEA Sets up repetition IN E1 number of E OHES eserved circle. measured point and entered measurement points or teaching file. INSE DEEE INSE DEEE Calculates circle to contact two from multiple points by leastinse DEEE Others key UN DEEE OHES EEA INSE UN measured lines ACO OAD square method. [ile control] UN OHES EEA eserved ACO OAD IE to contact three Calculates circle rint key IN E1 E IN measured lines. E1 E IN OHES EEA ectangle Conducts E1 print output at E unction key E1 E OHES timing 3 4 ACO IN OAD EEA ACO OAD OHES EEA Calculates square from entered discretionary during INSE DEEE unction key [Coordinate systems] five measurement points. teaching. UN erformance differs depending on OHES origin3 4 Set (datum) UN EEA UN 1 ACO OAD displayed screen and item. 1 3 Sets 4 ACO OAD [Constructed elements] UN up origin of local coordinate OHES EEA ile key 3 4 ACO IN OAD E1 E system. IE id-point Shows menu to access ACO OADfile for file IE Calculates middle point from two controls. OHES EEA Set axis (datum) ACO OAD OHES EEA measured points. UN INSE DEEE OHES Sets up axis ofeea local coordinate Insert key system. INSE DEEE itch Inserts measurement codes ACO OAD Calculates pitch between multiple between 3 4 IE ACO OAD IN E1 Elist items. Displacement ACO OAD measured points. OHES OHES EEA IN E and OHES E1 Sets up move, rotation EEA Delete key OHES EEA reversion of local coordinate INSE DEEE id-line OHES Deletes measurement code and EEA UN system Calculates middle line from two entered measurement point ACO OAD UN measured lines. ACODeletes file during OAD file control. 4 ACO OAD IN E1 E ACO OAD IE ile control keys unction keys ulti-language support Code Coordinate reset keys CD easurement prompts, results English, German, apanese and various other Asian and European languages are supported. Nikon etrology Software U-D is browser-based geometric dimensioning software. It can be effortlessly connected to desktop Cs, laptops or DAs via Ethernet or even Wii through a Web browser such as Safari, Internet Explorer or irefox. Custom it QC: eport and chart generating program OHES EEA OHES EEA 4 4 ACO OHES EEA 4 ACO ACO OAD OAD OAD Operating environment: Windows 7 or Windows 10 icrosoft Excel 003 or later equired memory: 51B (min) Codevelopment: Aria Co., td. 3

13 Digital Camera for icroscopes Digital Sight DS Vi1-3 he all-in-one digital camera for microscopes enables display, measurement, image capture and storage with a simple touch of the finger or stylus. No C connection is necessary. arge, high-definition display for immediate microscopic observation Stand-alone camera control unit DS-3 has 8.4-inch CD monitor (GA) DS-Vi1 camera head with 5.0-megapixel CCD provides high frame rate of 1fps and allows smooth focusing on monitor. rotractor Eyepieces (or all measuring microscopes except those with universal illumination) Note: onocular adapter (standard equipment) is required when using these eyepieces with trinocular tubes. Digital rotractor Eyepiece* otate the crosshairs in the viewfield to measure the angle. Display unit: 1 minute, 10 minutes * Not available for S and S models 1-inute eading Eyepiece he viewfield includes crosshairs and 60º lines, and angle indexes are read by appropriate microscopes. he measuring range is 360º. 10-inute eading Eyepiece he viewfield includes crosshairs and angle indexes, and when the knurled ring at the lower section of the eyepiece tube is turned, the crosshairs and the vernier both rotate up to 180º. Scene mode provides optimal photography with ease Optimal imaging parameters are preset for different sample types. Up to seven custom modes can be set. Wafer IC-chip etal Ceramic Board D DS-Vi1-3 configured with -800/ Various measuring tools are available Scale and grid line display, two-point distance measurement, and other measuring tools are available as standard. Convenient tools such as text input, line and graphic drawing, and super-impose are supported. easurement results can be stored as CSV file for easy report generation with other C software. Illuminators 8-Segment ing ight CYN-E1 he CYN-E1 enables flexible illumination from eight directions. It is not necessary to adjust the position of illumination fibers by hand at each measurement and/or observation. Can be used with measuring microscope -400/800. Can be used with E-max series software. he S-3C cable is standard with the illuminator. An E-BUS cable is required to control the illuminator with E-A. iber-optics Bifurcated and ing Illuminators As an illuminator with reflective mirror is used, a bright light source is obtained and the brightness is adjustable. he ring fiber illuminator produces cone-shaped illumination, minimizing shadows caused by any unevenness on the workpiece surface. he bifurcated fiber enables flexible illumination from two directions. Cannot be used with metallurgical microscope objectives. Cannot be mounted when 0x, 50x and 100x measuring microscope objectives are used. Objectives 1x, 3x, 5x, 10x, 0x, 50x, 100x hese compact objectives feature long working distances and excellent resolution. All have almost the same parfocal distances, come with lens adapter for quick and easy replacement. he 3x objective is standard with the microscope. agnification 1x 3x 5x 10x 0x 50x 100x W.D. (mm) Adapter for External Illuminator (except 8-Segment ing ight CYN-E1) his adapter mounts standard Stereo icroscope ing Illuminators onto the -400/800 stands with objectives. ay be used to mount iber Optic ing, fluorescent lamp ring and ring illuminators. ing Illuminator his illuminator uses 60 high output white s with a variable intensity control and constant color temperature. he s have a very long service life making them ideal for a production environment as there are no bulbs to change. Cannot be used with metallurgical microscope objectives. Cannot be mounted when 0x, 50x and 100x measuring microscope objectives are used. Direct C-mount Adapter Used to install a C-mount NSC CCV camera on the microscope. o use, replace the straight tube in a trinocular tube with this adapter. Note: V-V tube is required. 4 5

14 Counters 3-Axis/-Axis Counters -axis and 3-axis counters are available. he separate display unit can be mounted on the measuring microscope. Counters can be connected with data processors and digital printers via the S-3C port. 3-axis counter Vibration Isolation able rovides a stable, even surface by reducing floor vibrations. It is compatible with measuring microscopes, data processing systems, external light modulators and computers. Installation part Dimensions -400/ (W) x 689 (D) mm 1058 (W) x 689 (D) x 751 (H) mm -00 System Diagram B99000 Eye Guard for CWN 10x Eyepiece EDG0100 Eyepiece 10x EDG0600 rotractor 10 eading EDG0701 rotractor 1 eading A EDG50700 Digital rotoractor for onocular Head S EDH0410 Concentric Circles ( mm diameters in 0. mm increments) EDG40105 Eyepiece ens 10x for onocular Head H S EDD5000 Epi-illuminator for onocular Optical Head EDC onocular Optical Head C-mount Camera H S QA1010 DS-Vi1, etc. EDC C-mount Video Head QA500 DS-U3 CCU Q1010 DS Camera I/ Cable IEEE1394b Cable 0000 Y eset Switch Counter emote Switch EE000 oot Switch 4 A04 Connection Cable for Simultaneous Use of emote and oot Switch -axis counter Y eset Switch An Y reset switch can be attached to the microscope body so that coordinates can be easily reset while stage is in operation. EK segment ing ight CYN-E1 ED0010 Objective ens 1x ED0031 Objective ens 3x ED005 Objective ens 5x ED010 Objective ens 10x EA0409 Adapter for External Illuminator K6034 ing Illuminator H 4910 C- luorescent ing amp 8 W ED50001 easuring icroscope Objective Adapter E39610 C-ID Bifurcated iber ight Guide E39610 C-I ing iber Illuminator Guide G40000 ilting Center ixture A N5760 C- ight Source for iber Illuminator E-BUS Cable ort, USB ort, etc. EB5000 -axis Digital Counter SC-E1 Digital hermal rinters DU-414/S651-4 Y-axis -axis EA0411 E-BUS Cable 90/940 C-S115/30 luorescent ing Illuminator with ransformer EDA Stand Controller Backpack Interface Z: anual otion rint out counter values once connected to rear control box of measuring microscope -400/800. emote Switch Enables ESE and SEND remote control of counter for -00. USB Cable IEEE1394b Cable ED1000 E-A DS-V/D Sytem AE00101 AC Adapter Q5050 DS AC Adapter (100-40V) AE0810 ower Cord (100-10V) AE08410 ower Cord (0-40V) oot Switch EB51500 D-E1A Data rocessor Unit DU-414 S651-4 Can be used to reset Digital rotractor counter. Used to send load command to D-E1A and DU-414. rees both hands to enhance measurement efficiency. -00 Dimensional Diagram Standard 300mm Scale his scale is used to calibrate measuring stage travel up to 300mm. Both 10mm-interval sensor patterns and calibrations are provided. It is made of low expansion glass to minimize thermal error. Accuracy: Within 1µm against compensation values. emplates he following dedicated templates are available to facilitate profile comparison and measurements. Standard angle templates (standard equipment) Concentric; diameter * Note: Designed for 3x objectives. *Cannot be attached to monocular type Ø107 Ø174 Ø mm Depth 6 7

15 -400/800 System Diagram B99000 Eye Guard for CWN 10x Eyepiece N EDG0100 Eyepiece 10x N EDG0600 rotractor 10 eading EDG40105 Eyepiece ens 10x for onocular Head EA0340 onocular Eyepiece ube Adapter N N B0105 E CWN 10x EDB4005 Binocular ube C C-mount Camera QD4005 C-mount Adapter BB63435 V-V ube Digital Sight Series BB9106 C-B Binocular ube BB6345 V-I3 rinocular Eyepiece ube K EDB50300 V- ilting rinocular Eyepiece ube with Built-in eticle B7700 S xb Stage G40000 ilting Center ixture A A05 arge Sage Adjustment Knob *When using rotating table type 4, stage stroke is limited in and Y axis. lease ask Nikon for detail. E50110 otating able ype 4* EDG0701 rotractor 1 eading A EDG50700 Digital rotoractor for onocular Head C K EDC55000 U- Unit A B57700 S 8x6B Stage B EDH40400 Concentric Circles eticle (0.-4.6mm diameters in 0.mm increments) U EDD50001 Epi-illuminator D EDD5001 Epi-illuminator for 400/800 onocular Optical Head BE60310 V-U EIA BE60300 V-U EI BE6001 V-U EI EDC500 V-U EI E BE60500 V-EI G B37700 S 4x4B Stage E4100 otating able ype 3 B67700 S 10x6B Stage B K EDC50005 rinocular Optical Head C S H S D ED50001 easuring icroscope Objective Adapter C EDC5000 rinocular Optical Head H S D EDC51000 Variable agnification EDC5100 Variable agnification Optical Head U D Optical Head U D C Objective ens EK divided ing Illuminator for Variable agnification Optical Head EA0411 E-BUS Cable C Objective ens EDC5005 onocular Optical Head H S EDC54005 U Bracket ount V U AN UO BD Objective ens UE4050, etc. V-NU5A Nosepiece B60105, etc. A3017 U Nosepiece Adapter 3-5 U AN UO EI Objective ens UE1050, etc. B B47700 S 6x4B Stage A A EH8000 Stage Adapter for 800 B77700 S 1x8C Stage B ED0010 Objective ens 1x ED0031 Objective ens 3x ED005 Objective ens 5x ED010 Objective ens 10x ED001 Objective ens 0x ED0501 Objective ens 50x ED001 Objective ens 100x E A A A E E B E B E B E EDA54300 EDA /S 400/S Stand Z: anual otion S: Z-axis Scale EDA54000 EDA / Stand Controller Backpack Interface Z: anual otion : Z-axis Scale EDA / Stand Controller Backpack Interface Z otorized Control with inear Scale EDA58300 EDA /S 800/S Stand Z: anual otion S: Z-axis Scale EDA58000 EDA / Stand Controller Backpack Interface Z: anual otion : Z-axis Scale EDA / Stand Controller Backpack Interface Z otorized Control with inear Scale EK segment ing ight CYN-E1 EA0409 Adapter for External Illuminator EA0411 E-BUS Cable K6034 ing Illuminator H 4910 C- luorescent ing amp 8W 91/940 C-S115/30 luorescent ing Illuminator with ransformer E39610 C-ID Bifurcated iber ight Guide E39610 C-I ing iber Illuminator Guide N5760 C- ight Source for iber Illuminator E EDD U Epi amphouse V EDD51001 Dia-illuminator A3045 V-H50W 1V50W- Halogen amp A V50W amp G E551 I-S100W ower Supply Q EDD500 Halogen ight Intensity Control Cable ower Source Unit for otorized Z-axis otorized Z-axis Console Q EDE51000 otorized U EI Driver EDE /800 U- Controller EB5000 -axis Digital Counter SC-E1 EA0364 SC13 Display Arm EB axis Digital Counter SC3-E1 EB51500 Data rocessor Console D-E1A EE000 oot Switch 4 E-A DS-V ype E-A D ype 0000 Y eset Switch Counter emote Switch Desktop C Desktop C Q AE00101 AC Adapter Q5056 AC Adapter Dsi (100-40V) Identical with 5061 AC Adapter AE0810/410 ower Cord 8 9