MML-High Resolution 5M MML-HR 5M Series. MML Series

Transcription

1 Telecentric Lens Telecentric Lens SOD -X / / Zoom MORITEX high quality telecentric lenses have become the industry standard for semiconductor, FPD, and other electronics manufacturing applications that require machine vision for recognition, mounting, alignment, or inspection. Our lenses enable high contrast, high resolution and low distortion imaging with optional integrated coaxial illumination that utilizes our proprietary hot spot reduction techniques. Catalog specifications alone cannot convey the high level of MORITEX lens quality. SOD-X Series -High Resolution -HR Series -High Resolution 5M -HR 5M Series SOD-X Series Series -Standard -ST Series High Magnification Machine Micro Lens SOD-1X / 2X-VI The cutting-edge SOD-X Series consists of a unique set of multifunctional telecentric lenses designed with high NA, high magnification, and integrated coaxial illumination while providing a long working distance. They allow for high resolution imaging never seen before in a machine vision lens. Fixed Magnification Series -High Resolution 5M Series -High Resolution Series -Standard Series Series For Use with Compact Camera -ST-CM Series For Use with Near-Infrared -NIR Series Essential in alignment, gauging, and inspection applications, the Machine Micro Lens () Series are the highest quality fixed magnification, compact telecentric lenses available. The Standard (ST), High Resolution (HR), and 5 Megapixel (HR 5M) Series offer solutions for for a wide-range of machine vision systems including the NIR light range. L-8

2 Telecentric Lens SOD -X / / Zoom -Zoom Lens Series -Zoom Lens Series High-Performance Low Magnification Zoom Lens ML-Z22D Manual Click Zoom Lens ML-Z315D High Resolution Zoom Lens ML-Z755HR Series Standard Zoom Lens ML-Z755 Series This telecentric zoom lens series is used for high performance inspection and object recognition when a wide range of FOV and long WD are required. The ML-Z and ML-Z HR Series offer integrated coaxial illumination, adapter lenses, and motorized zoom function options. L-

3 Telecentric Lens SOD-X High Magnification Machine Micro Lens Super Optical Device - SOD-1X High Magnification Machine Micro Lens SOD -1X / 2X-VI The SOD-1X is the first telecentric machine vision lens that we introduced with the resolution to rival microscope objectives. The long WD and high NA have made it indispensable for high magnification alignment & inspection applications of 1x or greater. High performance rear converters allow for magnifications of 15x & 2x to be achieved without changing the working distance allowing microscope type performance in a relatively compact package. 1x optical magnification Capable of 15x and 2x with rear converter lenses High NA of.23 High resolution, 1.5μm Compact, integrated design 1 Even Better Images High Resolution and NA Achievement of high resolution that is beyond comparison with conventional machine vision lenses. 2 Wide Focus Range Deep Depth of Field Telecentric Optical System A high resolution equivalent to an objective lens with even longer depth of field has been sought after and now there is a telecentric optical system that has been implemented to widen the range of focus when viewing objects with a camera. Objective Lens NA=.26 SOD-1X NA=.23 Conventional Lens, 1x Magnification, 55mm WD Focus SOD-1X, 1x Magnification, 55mm WD L-1

4 NEW 2x optical magnification Capable of 3x and x with rear converter lenses High NA of.35 High resolution, 1μm Variable iris High Magnification Machine Micro Lens Super Optical Device - SOD-2X-VI This revolutionary 2x magnification SOD series model has a high NA & resolution that put it in the microscope objective lens class. In addition, it boasts a long WD of 3 mm that provides you with additional space to install Illumination and motion, handling, & transfer systems. The all-in-one machine vision lens has a compact body with an integrated coaxial epi-illumination also saving space & improving on-axis light quality. High Magnification Machine Micro Lens SOD -1X / 2X-VI 3 Improved Ease of Use Long WD ease of use through longer WD (working distance) while maintaining high resolution. Sufficient space for tooling and pick-up tools has been provided allowing the performance of operations thought to be impossible with conventional lenses. Operating position and work status can be confirmed by eye resulting in a reduction of operating errors. Opens the possibility of using not only coaxial but ring and various other types of illumination. This increase in lighting options allows for the imaging of objects previously difficult to view and resolve. Recognition is possible at a location with necessary separation from heat sources. Alignment and inspection are also possible during thermo compression bonding. Observation can be performed without any effects from water, oil, and foreign objects generated or moved during processing. Compact Compact design makes it possible to downsize peripheral parts and machinery. Establishment of operating space Confirmation of operation status and position possible by eye Oblique illumination is possible Separation from heat source Use in environments where substances such as water & oil are disturbed L-

5 FFFFFFFF Telecentric Lens SOD-X SOD-1X SOD-2X-VI High Magnification Machine Micro Lens SOD -1X / 2X-VI ø /-.1 3 Serial Number Label Rear Converter Lens (Option) SOD-1.5X ø8 +.3/ M3 Locking Screw to Secure a Lighting Lighting Insertion Connector for Light Guide 3-M3 Socket Head for Adjustment ø1.2 Camera tripod screw 2 3 WD 55.2± (O/I=253.7) -M3 Heli-Sert 2D ø3 1/32UNF 6.8 C mount ø3 / (12.8) 2 ø22 1/32UNF Model Magnification WD Resolution Depth Of Field NA ø5 /-.1 W.D. 3 ±.5 SOD-2X-VI ø C O O Serial Number Label SOD-2X Effective F No RoHS Label ø8 +.5/ 5.5 ø (16) 58 -M3 Heli-Sert 2D Camera tripod screw (O/I = 3) Optical Distortion ø3 J1() 1-M3 Locking Screw to Secure a Lighting Lighting Insertion Connector for Light Guide Largest Compatible Weight 3-M3 Socket Head for Adjustment C mount ø3 / (.8) 5 ø22 Mount U1(). Product Code SOD-1X 1x 55.2mm 1.5μm.17mm % 2/3" 5g A-17 SOD-2X-VI 2x 3mm 1μm ~ 3μm.57mm ~.26mm.35 ~ ~ 88.2% 2/3" 3g A-178 Dedicated Rear Converter Lens SOD-1.5X 3x 3mm 1μm ~ 3μm.38mm ~.26mm.35 ~. 2.5 ~ 132.% 2/3" - A-175 SOD-2X x 3mm 1μm ~ 3μm.2mm ~.26mm.35 ~ ~ % 2/3" - A-176 Application Sample Silicon Wafers Recognition of wafer patterns using coaxial illumination. Recognition of damage and foreign objects using ring illumination. Hard Disk Reading Head Highly uneven objects are covered by using a wide focus range. Coaxial Illumination Oblique Illumination Wiring Pattern of Tip Coaxial Illumination Ring Illumination Coaxial Illumination Coaxial Illumination Wafer (Pattern) Wafer (Damage) L-12

6 Series Essential in alignment, gauging, and inspection applications, the Machine Micro Lens () Series are the highest quality fixed magnification, compact telecentric lenses available. The Standard (ST), High Resolution (HR), and 5 Megapixel (HR 5M) Series offer solutions for a wide-range of machine vision systems including the NIR light range. -High Resolution 5M -HR 5M Series Top quality product types that boast the best contrast and NA among the entire Series. The highest possible image quality can be obtained in combination with high pixel count cameras such as the increasingly popular 5 mega pixel sensors. Various models also include iris control. Fixed Magnification Lens M M L -High Resolution -HR Series High performance Series models designed for cameras with 1.3 million pixels and up (i.e. ~.65 microns/pixel) with relatively small barrel diameters. -Standard -ST Series This series offers the highest level of optical performance when coupled with 1 thousand pixel cameras. Compact (ø 16mm) standard models with long DOF (Depth of Field) design. L-13

7 Telecentric Lens Fixed Magnification Series - HR 5M Provisions made to reduce coaxial illumination hot spots seen in low magnification lenses patent pending Conventional Design Lens Equipped with a noise reduction filter Cuts long wavelengths 3-HR65D 5M / 3-HRD 5M Internal reflection light-scattering design -HR 5M Series -HR 5M (All models) Please note that although the lens is structured to suppress hot spots, hot spots will occur for mat surface work. Extremely Low Distortion The pursuit of high resolution with no aberration has resulted in the elimination of image bending. This means that it is no longer necessary to consider distortion offsets. High Contrast Contrast improvement has enabled image recognition with greater emphasis on the black and white shading. By converting the resolution chart image to binary form and then graphing and comparing the brightness levels, the -HR greatly emphasizes the difference in brightness between black and white object features when compared to our prior Mega. DISTOTION +Y DISTOTION +Y -1.. PERCENT PERCENT 1. Conventional -HR & -ST Conventional -HR & -ST L-1

8 Illumination Uniformity For object recognition on a matte surface with coaxial illumination, only a small amount of light is reflected from the surface requiring the coaxial light intensity to be increased. When this is done, however, the brightness in the center of the image increases due to reflection in the coaxial illumination lensing. The ST and HR Series solve this problem through a hot spot reduction technique that vastly reduces the reflection from the lens. This improves the uniformity of coaxial illumination for even matte surfaces. Below, OCR using coaxial illumination was performed on a rough, microcomputer chip surface. The -ST/HR brightness graph shows a reduction in the variation between the brightness in the center and periphery of the FOV which can also be seen in the sample images. Design Concept Pixel size, resolution limitation frequency, F No relation The HR/ST Series consist of three types of optical design focuses as well as for camera compatibility. -STandard Format 1/2 Pixel Size 6.35µm Pixel Size [µm] -High Resolution Format 2/3 Pixel Size.65µm -High Resolution 5M Format 2/3 Pixel Size 3.5µm Pixel Size [µm] F No Spatial Frequency [lp/mm] F No Fixed Magnification Series - HR 5M 3 Different Mount Types ø3 Ring Type ø3 Ring Type -ST / HR Set Screw Type -ST / HR Conventional -HR & -ST MORITEX provides customized responses to requests for modifications of mounts and special mounts. Image Comparison for Series Camera: 5 million pixels, 3.5µm/pixel Lens: Optical magnification 2x WD65 mm Test Chart : Resolution 5.563µm (resolving power 17.6 lp/mm) -ST Series -HR Series -HR 5M Series VGA Class 1.3Mega Class 5 Mega Class Contrast 1..8 Contrast 1..8 Contrast ST65D 2-HR65D 2-HR65D-5M Field of view.mm L-15

9 Telecentric Lens Fixed Magnification Series -High Resolution 5M Series Fixed Magnification Series - HR 5M High-resolution models that possess the best contrast and NA of all Series. Image acquisition with even higher image quality is realized by combining these lenses with cameras with a high number of pixels, especially emerging 5 megapixel sensors. Highest image quality model of the s Series. Supports 5 million pixels (3.3μm/pixel) * Except for -HR65DVI-5M Use of internal reflection light-scattering design and noise reduction filter for hot spot reduction Variable iris available for most models Very low distortion NEW 1-HRD-5M Model Magnification WD Resolution Depth Of Field NA Effective F No Optical Distortion Largest Compatible 3-HR65D-5M.3x 65.1mm 15.7µm 6.2mm % 2/3 22 A HR65-5M.3x 65.1mm 15.7µm 6.2mm % 2/3" A HR65DVI-5M.5x 65.3mm.3µm~1µm 2.2mm~.8mm.36~.8 7~3.6.6% 2/3" 21 A HR65VI-5M.5x 65.3mm.3µm~1µm 2.2mm~.8mm.36~.8 7~3.6.6% 2/3" 21 A-31 1-HR65DVI-5M 1x 65mm.7µm~1µm.56mm~2.2mm.71~. 7~28.28% 2/3" 1 A HR65VI-5M 1x 65mm.7µm~1µm.56mm~2.2mm.71~. 7~28.28% 2/3" 135 A-3 2-HR65DVI-5M 2x 65mm 2.22µm~15.25µm.15mm~.88mm.13~ ~.2.35% 2/3" 2 A HR65VI-5M 2x 65mm 2.22µm~15.25µm.15mm~.88mm.13~ ~.2.35% 2/3" 1 A HR65DVI-5M 3x 65mm 2.1µm~1.5µm.85mm~.2mm.157~.32.6~.% 2/3" 28 A HR65VI-5M 3x 65mm 2.1µm~1.5µm.85mm~.2mm.157~.32.6~.% 2/3" 275 A HR65DVI-5M x 65mm 2µm~8.2µm.6mm~.2mm.167~ ~ % 2/3" 2 A HR65VI-5M x 65mm 2µm~8.2µm.6mm~.2mm.167~ ~ % 2/3" 285 A HRD-5M.1x mm 1.2µm 16.mm..1% 2/3" 73 A HRD-5M.3x mm 15.7µm 6.2mm % 2/3" 212 A HR-5M.3x mm 15.7µm 6.2mm % 2/3" 2 A-3136 Weight (g) Mount Product Code L-16

10 3-HR65D-5M 3-HR65-5M 5-HR65DVI-5M (O/I=21.7) W.D max ø ø M3 3 Lighting Insertion Connector for Light Guide 1.5 ø8 +.5 ø1.2 ø M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same 5-HR65VI-5M (O/I=21.8) WD 65.3 ±2 (137) () ø3 -.1 ø M3 3 (O/I=16) (O/I=21.7) W.D max. W.D.=65 ±2 (85) ø ø HR65DVI-5M ø ø M3 3 3-M3 3 ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide 1-M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same (O/I=21.8) WD 65.3 ±2 (137) () (O/I=16) ø3 -.1 ø ø M3 3 ø1.2 1-HR65VI-5M W.D.=65 ±2 (85) ø3 -.1 ø3 -.1 Lighting Insertion Connector for Light Guide 1-M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same 3-M3 3 Fixed Magnification Series - HR 5M L-17

11 Telecentric Lens 2-HR65DVI-5M 2-HR65VI-5M 3-HR65DVI-5M Fixed Magnification Series 3-M3 (O/I=5.) 12.5 W.D.=65 ±2 (8.5) ø3 -.1 ø ø M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same (O/I=5.) 12.5 (8.5) W.D.=65 ± ø3 -.1 ø M3 (O/I=2.5) WD 65 ±2 (126.) () ø3 -.1 ø M ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide 1-M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same 8 - HR 5M 3-HR65VI-5M -HR65DVI-5M -HR65VI-5M () ø M () ø M () ø M3 3 (O/I=2.5) WD 65 ±2 (126.) ø -.1 (O/I=225.1) (12.6) WD 65 ± ø ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide 1-M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same (O/I=225.1) WD 65 ±2 (12.6) ø HRD-5M 3-HRD-5M 3-HR-5M M ø53 ø ø.5 ø3 -.1 (5.1) WD= ±3.3 O/I=(3) (O/I=26.) 12. W.D. max ø ø M3 3 Lighting Insertion Connector for Light Guide ø8 +.5 ø1.2 ø M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same (O/I=26.) W.D. max ø ø M3 3 L-

12 Fixed Magnification Series - HR 5M L-1

13 Telecentric Lens -High Resolution -HR Series Fixed Magnification Series - HR The -HR Series consists of highly versatile models that support mega pixel cameras with 1.3 million pixels or more (.65um/pixel). The entire lineup features a high resolution and contrast design that realizes amazingly high image quality which cannot be shown by numbers alone. This series provides true imaging power in high end inspections and alignment applications. Supports mega pixel s, 1.3 million pixels or greater High resolution throughout the entire field of view High NA and contrast Most models compatible with 2/3" or smaller elements WD65mm Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 5-HR65D.5x 65mm 12.8μm 3.mm % or less 2/3" 75g A-32 8-HR65D.8x 65mm 8.μm 1.2mm...2% 2/3" 6g A HR65D 1.x 65mm μm.88mm.5.3% 2/3" 58g A HR65D 1.5x 65mm 5.μm.2mm % 1/2" 53g A HR65D 2.x 65mm.5μm.27mm % 2/3" 52g A-333 -HR65D.x 65mm 3μm.mm % 2/3" g A-33 6-HR65D 6.x 65mm 3μm.6mm % 2/3" 12g A-335 -HR65DVI.x 65mm 3~13.3μm.~.53mm.2 17.~7.2.53% 2/3" 5g A-3 6-HR65DVI 6.x 65mm 3~13.μm.6~.58mm ~12.5% 2/3" 12g A-35 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2 camera. (Permissible circle of confusion on the image-formation side: μm) L-2

14 *** ** 5-HR65D 8-HR65D 1-HR65D (O/I=172.8) () 37 W.D. 65.3±2 -.1 ø HR65D ## Screw 3-M3 Locking Screw ø8 +.5 ø1.2 ø15.7 Lighting Insertion Connector for Light Guide M3 Socket Head to Secure A Lighting M3 Type Threads On Opposite Side in Same (O/I=172.3) Screw 8.8 W.D. 65±2 Separable Lens Barrel ø ## *** ** 2-HR65D 3-M3 +.5 ø8 Lighting Insertion Connector for Light Guide ø1.2 1-M3 Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same (O/I=162.5) W.D. 65±2 (8) (2.7) -.1 ø3 ø () -HR65D ø ø1.2 1-M3 Fixed Magnification Series - HR ø3 ø3 ø3 (O/I 157.2) 7.6 W.D. 65± ø () ø ø M3 (O/I=162.6) W.D. 65±2 (8.1) (17) -.1 ø () ø ø1.2 6-HR65D -HR65DVI 6-HR65DVI ø3 (O/I=22.1) (.6) ø () ø W.D. 65±2 (O/I=7.2) W.D 65±2 (1.7) 1.2 ø () ø ø8 +.5 ø1.2 M3 ø ø8 +.5 ø1.2 M3 (O/I=22.1) (.5) (.) ø W.D 65±2 1-M3 ø 3 (1.7) (O/I=7.2) (2.5) M3 ø25 () ø22 ø8 ø1.2 M3 W.D 65±2 ø ø 26 ø () ø ø ø L-21

15 Telecentric Lens 5-HR65 8-HR65 1-HR HR65 Fixed Magnification Series (O/I=172.8) () 37 W.D. 65.3±2 -.1 ## *** ** ø Screw 3-M3 (O/I=172.3) Screw 8.8 W.D. 65±2 Separable Lens Barrel ## *** ø25 3-M3 3 Socket Head of Camera (O/I=162.5) W.D. 65±2 (8) (2.7) ø3 ø () -.1 (O/I 157.2) 7.6 W.D. 65± ø3 ø () -.1 (ø15.6) - HR 2-HR65 (O/I=162.6) (8.1) W.D. 65±2 (17) ø3 ø () -.1 -HR65 (O/I=7.2) W.D 65±2 (1.7) 1.2 ø3 ø () ø HR65 (O/I=22.1) (.6) W.D. 65± ø3 ø () ø Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 5-HR65.5x 65mm 12.8μm 3.mm % 2/3" 7g A-3 8-HR65.8x 65mm 8.μm 1.2mm...2% 2/3" 6g A HR65 1.x 65mm μm.88mm.5.3% 2/3" 5g A HR65 1.5x 65mm 5.μm.2mm % 1/2" 6g A-36 2-HR65 2.x 65mm.5μm.27mm % 2/3" 6g A-37 -HR65.x 65mm 3μm.mm % 2/3" 86g A-38 6-HR65 6.x 65mm 3μm.6mm % 2/3" g A-3 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) -PL25HR Dedicated prism for -HR. See page L- for details. L-22

16 -HR FG MO FG WDmm 5-HRD () 6.5 (O/I=262.65) W.D. ± ø ø M ø8 ø1.2 2-HRD (O/I=257.2) 36. W.D..± ø3 ø3 -.1 () ø ø ø M3 8-HRD (O/I=256.8) W.D. ±3.3 ø3 ø3 -.1 () ø ø8 ø M3 -HRD Screw 6.5 () (O/I=26.21) W.D. ± ø M3 3 ø ø8 ø1.2 1-M3 1-HRD (O/I=257.62) W.D. ±3.3 ø3 ø3 -.1 () ø ø ø M3 6-HRD Screw 6.5 () (O/I=288.1) W.D.± HR ø M3 3 ø MO ø8 +.3 ø1.2 1-M3 1.5-HRD (O/I 258.) W.D. 1.± HR () (O/I=262.65) W.D. ± ø ø3 ø ø ø () ø ø M3 3-M3 3 (ø21.6) Fixed Magnification Series - HR 8-HR 1-HR 1.5-HR 2-HR ø3 ø3 ø3 ø3 (O/I=256.8) W.D. ±3.3 (ø21.6) ø3 -.1 () ø (O/I=257.62) W.D. ± (ø21.6) ø3 -.1 () ø (O/I 258.) W.D. 1.± ø (ø21.6) 5 ø3 -.1 () (O/I=257.2) W.D..± (ø21.6) ø3 -.1 () ø Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 5-HRD.5x.mm 12.8μm 3.mm % 2/3" 12g A HRD.8x.mm.3μm 1.mm.36.5% 2/3" 2g A HRD 1.x.mm 7.μm.88mm % 2/3" 12g A HRD 1.5x 1.mm 5.μm.2mm % 2/3" g A-3 2-HRD 2.x.mm.5μm.27mm % 2/3" g A-31 -HRD.x.mm 3.7μm.mm % 2/3" 125g A-32 6-HRD 6.x.mm.5μm.88mm % 2/3" 1g A-33 5-HR.5x.mm 12.8μm 3.mm % 2/3" 137g A HR.8x.mm.3μm 1.mm.36.5% 2/3" 1g A HR 1.x.mm 7.μm.88mm % 2/3" 6g A HR 1.5x 1.mm 5.μm.2mm % 2/3" 8g A-35 2-HR 2.x.mm.5μm.27mm % 2/3" 1g A-355 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) L-23

17 Telecentric Lens -Standard -ST Series Fixed Magnification Series -S T Through combination with 1 thousand pixel or greater cameras, the renewed design of the -ST Series realizes high level optical performance. These compact models with a diameter of 16mm feature a long depth of field making them ideal for installation in manufacturing equipment. Compact design with a lens barrel diameter of ~ Long Depth of Field Number of pixels: 1 thousand or higher Element Size: 1/2" or less in most cases WDmm Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 1-STD 1.x.mm 7.2μm.88mm or less 1/2" 31g A STD 1.5x.1mm 5.6μm.mm or less 1/2" 31g A STD 2.x.1mm.8μm.2mm or less 1/2" 3g A-3 3-STD 3.x 37.mm.8μm.1mm or less 1/2" 33g A-32 -STD.x.mm.8μm.1mm or less 1/2" 36g A STD 6.x.3mm.8μm.1mm or less 1/2" 3g A-37 8-STD 8.x.mm.8μm.7mm or less 1/2" 2g A ST 1.x.mm 7.2μm.88mm or less 1/2" 26g A ST 1.5x.1mm 5.6μm.mm or less 1/2" 26g A-38 2-ST 2.x.1mm.8μm.2mm or less 1/2" 2g A-31 3-ST 3.x 37.mm.8μm.1mm or less 1/2" 28g A-33 -ST.x.mm.8μm.1mm or less 1/2" 31g A ST 6.x.3mm.8μm.1mm or less 1/2" 35g A-38 8-ST 8.x.mm.8μm.7mm or less 1/2" 37g A-382 *Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) *Resolution values indicate the theoretical resolution at a wavelength of 55nm. Caution: The WD mm series cannot be used with all prism adapter options. L-2

18 1-STD 1.5-STD 2-STD 3-STD (O/I=15) W.D. ± ## *** ** 26 Screw 3-M3 of Camera M3 to Secure a Lighting M3 Type Threads on Opposite Side in Same -STD Lighting Insertion Connector for Light Guide (O/I=15.1) W.D..1±1.2 (7.) ## 26 6-STD *** ** Screw 3-M3 of Camera ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide M3 to Secure a Lighting M3 Type Threads on Opposite Side in Same (O/I=6.1) Screw W.D..1±1.2 (38.5) ## *** ** 3-M3 of Camera 8-STD +.5 ø8 ø1.2 Lighting Insertion Connector 26 for Light Guide M3 to Secure a Lighting M3 Type Threads on Opposite Side in Same Screw (O/I=16.) W.D. 37. (51.5) ± ## 26 *** ** 3-M3 +.5 ø8 ø1.2 Lighting Insertion Connector for Light Guide M3 to Secure a Lighting M3 Type Threads on Opposite Side in Same Fixed Magnification Series (O/I=13.) (5.5) W.D..± /2" Screw 3-M ø8 ø M3 (O/I=) (5.6) W.D..3± /2" Screw 3-M3 3 Socket Head +.5 ø8 ø M3 (O/I=131.3) (73.8) W.D. ± /2" Screw 3-M3 3 Socket Head +.5 ø8 ø M3 -S T 1-ST 1.5-ST 2-ST 3-ST (O/I=15) W.D. ±1.2.5 ## *** ** -.1 Screw 3-M3 (O/I=15.1) W.D..1±1.2 (7.) ## *** ** -.1 Screw 3-M3 of Camera Screw (O/I=6.1) W.D..1±1.2 (38.5) ## *** ** M3 of Camera Screw (O/I=16.) W.D. 37.±1.2 (51.5) ## *** ** 3-M3 of Camera -ST 6-ST 8-ST (O/I= 13.) (5.5) -.1 1/2" Screw 3-M3 3 (O/I= ) (5.6) -.1 1/2" Screw 3-M3 3 (O/I= 131.3) (73.8) -.1 1/2" Screw 3-M3 3 Locking Screw W.D..±2 -.1 W.D..3±2 -.1 W.D. ±2 -.1 L-25

19 7 FG MO Telecentric Lens WD65mm 8-ST65D 1-ST65D 1.5-ST65D 2-ST65D Fixed Magnification Series -S T (O/I=172.3) (8.8) W.D. 65± Screw 3-M3 M3 2-ST65DS (O/I=1.6) 3-M3 3 Socket Head Locking Screw 61.5 WD.65± ø Screw +.15 ø8 7 (). 7 ø M3 Socket Head Locking Screw (O/I=162.5) W.D. 65±2 (8) -.1 ø3 -.1 ø8 +.2 ø1.2 1-M3 Socket Head Locking Screw 3-ST65DS 3-M3 3 of Camera (O/I=.8) 5.5 WD.65 ± ø8 7 ().6 ø Lighting Insertion Connector for Light Guide 1-M3 to Secure a Lighting M3 Type Threads on Opposite Side in Same (O/I=157.2) 7.6 -ST65D (O/I=6.3) W.D 65±2 (13.8) W.D 65±2 -.1 ø3 FG 26 1/2" 3-M3 3 Screw () ø ø1.2 () ø8 +.2 ø M3 Socket Head Locking Screw 1-M3 (O/I=162.6) (8.1) W.D. 65±2 -.1 ø3 -ST65DS 3-M3 3 ø 2 (O/I=17.38) WD.66 ± ø ø8 +.2 ø1.2 1-M3 ø () 22. ø 1.2 ø 16 1-M3 Socket Head Locking Screw 6-ST65D 6-ST65DS 8-ST65DS (O/I=21.5) (8.5) W.D. 65±2 ø3 () -.1 ø8 +.2 ø1.2 1-M3 -.1 (O/I=163.53) 3-M3 3 ø WD.65.3±2 ø ø ø () 3.7 ø 1.2 ø 16 1-M3 Socket Head Locking Screw (O/I=.) 3-M3 3 ø WD.6.± () ø ø 1.2 ø 16 1-M3 Socket Head Locking Screw Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 8-ST65D x.8 65mm 12.μm 1.86mm % 1/2" g A-3 1-ST65D x1 65mm 12.5μm 1.mm % 1/2" g A ST65D x1.5 65mm 7μm.56mm % 1/2" 3g A ST65D x2 65mm 5.8μm.35mm % 1/2" g A ST65DS x2 65mm 5.6μm.35mm % 1/2" 37g A-3 3-ST65DS x3 65mm.7μm.1mm % 1/2" 35g A-312 -ST65D x 65mm.6μm.135mm % 1/2" 55g A-31 -ST65DS x 66mm.μm.13mm % 1/2" 1g A ST65D x6 65mm.6μm.1mm % 1/2" 6g A ST65DS x6 65.3mm.μm.mm % 1/2" 3g A-31 8-ST65DS x8 6.mm.μm.7mm % 1/2" 6g A-381 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-26

20 8-ST65 1-ST ST65 2-ST65 (O/I=172.3) (8.8) W.D. 65±2 -.1 ø -.1 Screw 3-M3 2-ST65S 3-M3 3 (O/I=1.6) 61.5 WD.65±2.1 ø ø ø 2 () 7 (O/I=162.5) W.D. 65±2 (8) 3-ST65S -ST65 -ST65S Fixed Magnification Series -S T 6-ST65 6-ST65S 8-ST65S (O/I=21.5) (8.5) 3-M3 3 (O/I=.8) WD.65± ø ø ø3 ø () 7 (O/I=157.2) 7.6 W.D 65±2 (O/I=6.3) ø3 () 3-M ø (O/I=163.53) (13.8) W.D 65±2 23 MO 1/2" 3-M3 3 Screw () -.1 ø3 7 () (O/I=162.6) (8.1) W.D. 65±2 3-M3 3 (O/I=17.38) 63. WD.66± ø ø ø3 -.1 ø 2 3-M3 3 ø 2 () 1 (O/I=.) ø 2 () 7 7 () W.D. 65±2 -.1 WD.65.3 ±2 ø WD.6.±2 ø Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 8-ST65 x.8 65mm 12.μm 1.86mm % 1/2" g A ST65 x1 65mm 12.5μm 1.mm % 1/2" 38g A ST65 x1.5 65mm 7μm.56mm % 1/2" 36g A ST65 x2 65mm 5.8μm.35mm % 1/2" 38g A ST65S x2 65mm 5.6μm.35mm % 1/2" 32g A ST65S x3 65mm.7μm.1mm % 1/2" 3g A-316 -ST65 x 65mm.6μm.135mm % 1/2" 5g A-356 -ST65S x 66mm.μm.13mm % 1/2" 36g A ST65 x6 65mm.6μm.1mm % 1/2" 55g A ST65S x6 65.3mm.μm.mm % 1/2" 38g A-3 8-ST65S x8 6.mm.μm.7mm % 1/2" 2g A-381 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. Optical Specifications for Recommended Combinations of Models and Rear Converter Lenses Model Converter Lenses Magnification Resolution Depth of Field Effective F No 1-ST65D/65 SOD-1.5X 1.5 X 12.5μm.mm 27. SOD-2X 2. X 12.5μm.7mm ST65D/65 SOD-1.5X 2.25X 7μm.37mm 23. SOD-2X 3X 7μm.28mm ST65D/65 SOD-1.5X 3 X 5.8μm.23mm 26 SOD-2X X 5.8μm.17mm 3.6 Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. L-27

21 FG MO MO Telecentric Lens WDmm 8-STD 1-STD 2-STD 2-STDS Fixed Magnification Series (O/I=256.8) MO W.D. ±3.3 ø3 ø () ø8 ø M3 3-STDS Screw 3-M3 3 Socket Head of Camera () (O/I=2.3) W.D. 3±3. ø3 () ø -.1 ø8 +.3 ø M3 Socket Head Locking Screw -STD 3-M3 3 Socket Head Screw FG (O/I=256.) MO MO 12. W.D.±3.3 ø3 () ø ø M3 6-STD 1/2" 3-M3 3 Socket Head Screw Screw (O/I=21.33) 71.8 W.D. 2± STD M3 3 Socket Head of Camera ø8 () ø Lighting Insertion Connector for Light Guide 1-M3 to Secure a Lighting M3 Type Threads on Opposite Side in Same 1/2" 3-M3 3 Socket Head Screw -S T (O/I=21.7) 3. W.D..3± ø8 ø Lighting Insertion Connector for Light Guide 1-M3 to Secure a Lighting M3 Type Threads on Opposite Side in Same (O/I=21.2) 81. W.D.8± FG ø ø M3 (O/I=233.5) 15.7 W.D 1.8± FG ø ø M3 Socket Head Locking Screw (O/I=256.3) 12. W.D 1.3± FG ø ø M3 Socket Head Locking Screw Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 8-STD.8x.mm 13.5μm 2.mm % 1/2" 85g A-32 1-STD 1x 3.mm 1μm 1.68mm % 1/2" 58g A-33 2-STD 2x.mm μm.66mm % 1/2" 55g A-3 2-STDS 2x 2.mm.2μm.66mm % 2/3" 3g A-31 3-STDS 3x.3mm.2μm.mm.3.7.8% 2/3" 3g A-3 -STD x.8mm 7μm.16mm % 1/2" 3g A-35 6-STD 6x 1.8mm 7μm.16mm % 1/2" 8g A-36 8-STD 8x 1.3mm 7μm.17mm % 1/2" 5g A-37 L-28

22 8-ST 1-ST 2-ST 2-STS (O/I=256.3) 12. W.D 1.3 ± ML8-ST EX RoHS 3-STS Screw (O/I=21.7) 3. W.D..3±3.3 (ø15.6) L3-STS ORITEX RoHS FG FG 1/2" 3-M3 3 Socket Head Screw M3 3 Socket Head of Camera -.1 () (O/I=2.3) W.D. 3±3. ø3 () ø -.1 -ST (O/I=21.2) 81. W.D.8± ML-ST EX RoHS FG 1/2" M3 3 Socket Head Screw -.1 (O/I=256.) 12. W.D.±3.3 (ø15.6) ø3 () ST (O/I=233.5) 15.7 W.D 1.8± ML6-ST EX RoHS FG 1/2" 3-M3 3 Socket Head Screw -.1 Screw (O/I=21.33) 71.8 W.D. 2±3.3 (ø15.6) L2-STS ORITEX RoHS () ST (O/I=256.8) W.D. ±3.3 (ø15.6) FG ø3 ø M3 3 Socket Head of Camera -.1 () Fixed Magnification Series M M L-S T Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 8-ST.8x.mm 13.5μm 2.mm % 1/2" 78.5g A-31 1-ST 1x 3.mm 1μm 1.68mm % 1/2" 5g A-32 2-ST 2x.mm μm.66mm % 1/2" 5g A STS 2x 2.mm.2μm.66mm % 2/3" 3g A-31 3-STS 3x.3mm.2μm.mm.3.7.8% 2/3" 37g A-32 -ST x.8mm 7μm.16mm % 1/2" 38g A-36 6-ST 6x 1.8mm 7μm.16mm % 1/2" 3g A ST 8x 1.3mm 7μm.17mm % 1/2" g A-366 Optical Specifications for Machine Types Recommended for Combination with the Rear Converter Model Converter Lenses Magnification Resolution Depth of Field Effective F No 8-STD/ SOD-1.5X 1.2 x 13.5μm 1.3mm 2.2 SOD-2X 1.6 x 13.5μm 1.mm STD/ SOD-1.5X 1.5 x 1μm 1.mm 31. SOD-2X 2. x 1μm.8mm STD/ SOD-1.5X 3 x μm.mm.8 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. L-2

23 Telecentric Lens WD15mm 8-ST17D 1-ST15D 8-ST17 1-ST15 Fixed Magnification Series -S T (O/I=31.73) W.D 172.± ø22 ø25 ø () +.5 ø8 ø1.2 1-M3 7.3 (O/I=3.3) W.D. 156±.7 ø3 ø () ø ø8 +.5 ø M3 Socket Head Model Magnification WD Resolution Depth of Field NA Effective F No (O/I=31.73) W.D 172.± ø22 ø25 ø Optical Distortion () Largest Compatible (O/I=3.3) W.D. 156±.7 Weight ø25 ø3 -.1 Mount () ø Product Code 8-ST17D.8x μm 1.7mm % 1/2" 8g A-38 1-ST15D 1x μm 1.5mm % 1/2" g A-3 8-ST17.8x μm 1.7mm % 1/2" 76g A ST15 1x μm 1.5mm % 1/2" 8g A-323 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) Optical Specifications for Machine Types Recommended for Combination with Rear Converter Model Converter Lenses Magnification Resolution Depth of Field Effective F No 8-ST17D/17 SOD-1.5X 1.2x 12μm 1.17mm 21 SOD-2X 1.6x 12μm.88mm 28 1-ST15D/15 SOD-1.5X 1.5x 8.8μm.6mm 1.5 SOD-2X 2.x 8.8μm.52mm 26 Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. L-3

24 WD3mm Lenses with a very long working distance of 3mm for are available with optical magnifications of.5x, 1X, 3X, & X for long stand-off applications. Improved flexibility and ease-of-use is achieved with variable iris control. Magnifications:.5x, 1x, 3x, & x WD=3 mm With variable iris of 22.7-C32 Slim body with external diameter of ø27. NEW 5-ST3DVI (O/I=531.6) W.D. 38 ± ø3 ø3 ø ø M2.6 ø8 +.5 ø1.2 1-M3x Socket Head to Secure a Lighting M3 Type Threads on Opposite Side in Same 1-ST3D 3-ST3DVI -ST3DVI O/I (IN AIR) (21) 6 ø1.2 W.D. 35± +.3 ø M3 Lighting Set Screw (not bonded) ø3 ø27 ø3 3-Camera Direction Adjustment Screw 1 Aperture Set Screw ø (O/I=52.8) ø15.7 W.D. 32. ø1.2 ø ø3 -.1 ø32 ø3 -.1 ø M3 M3x Socket Head to Secure a Lighting M3 Type Threads on Opposite Side in Same NEW 5-ST3DVI (O/I=553.5) ø15.7 ø1.2 W.D. 3. ø ø3 -.1 ø ø3 -.1 ø M3 M3x Socket Head to Secure a Lighting M3 Type Threads on Opposite Side in Same For Micro-head Cameras (ø17mm) -S T- CM Model Magnification WD Resolution Depth Of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 5-ST3DVI.5x 3.5mm 15.3μm~2.μm 3.6mm ~ 5.7mm.22 ~.1.~17..6% 1/2" 2g A ST3D 1x 35mm 16.6μm~21.5μm 1.8mm ~ 2.56mm.2 ~ ~32 -.1% 1/2" 15g A ST3DVI 3x 32mm μm~15 μm.3mm ~.65mm.5 ~.23 33~66.15% 1/2" 31g A ST3DVI x 3mm μm~15 μm.3mm ~.65mm.5 ~.23 ~88.1% 1/2" 32g A-3167 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) Optical Specifications for Recommended Combinations of Models & Rear Converters Model Converter Lenses Magnification Resolution Depth of Field Effective F No 1-ST3D SOD-1.5X 1.5x 15μm 1.21mm 31 SOD-2X 2.x 15μm.1mm 5. Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. For Micro-head Cameras (ø17mm) -ST-CM Series Made-to-order The -ST-CM Series consists of small diameter, lightweight models which save space and achieve a fine pitch when used with micro-head cameras with smaller mounts. L-31

25 Telecentric Lens Series Fixed Magnification Series M M L WDmm -D - Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code -D.x.mm 2μm 15.73mm % or less 2/3" 7g A-1 -.x.mm 2μm 15.73mm % or less 2/3" 7g A- 28. WD. 1 5 ø33 ø M3 Screw M3 Securing Screw ( opposed) 28. WD. 1 5 ø33 ø75 3-M3 Screw for Adjustment of Camera * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. WD15mm -15D 6-15D 8-15D WD ø35 ø ø 8.5 ø2 WD ø35 ø ø ø2 WD ø35 ø ø ø2 Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code -15D x 17mm 3.7μm.12mm or less 2/3" 8g A D 6x 15mm 3.μm.8mm or less 2/3" g A D 8x 1mm 3.2μm.6mm or less 2/3" 5g A-63 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) L-32

26 WD2mm~ 2-22D 1-2D 2-221D M3 Screw for Adjustment of Camera WD /3" ø ø /2" Screw For Securing M3 (O/I=383.2) W.D2.3± ø Mount Securing Screw. 1-M3 Socket Head to Secure a Lighting ø ø -.1 ø -.1 (O/I=6.) W.D221± 1/2" Screw Mount Securing Screw. 1-M3 Socket Head to Secure a Lighting WD ø For Near-Infrared (77nm~12nm)Applications Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible Weight Mount Product Code 2-22D.2x μm 1mm or less 2/3" 5g A D 1x μm.88mm.5.67 or less 2/3" 26g A D 2x μm.mm or less 2/3" 32g A x 22 6.μm.358mm or less 2/3" g A-7 - NIR * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) For Near-Infrared (77nm~12nm)Applications -NIR Series The -NIR Series is designed for a wavelength band of 77 to 12nm. This series provides special use lenses that allow the observation of in-wafer defects and rear patterns when combined with an infrared camera and illumination. Model -8D-IR 6-8D-IR 8-8D-IR Magnification x 6x 8x WD 82.mm 81.5mm 81mm Resolution.μm Depth of Field 5μm 33μm 27μm NA.15 Effective F No Optical Distortion.2%.22%.62% Largest Compatible 2/3" Weight g 1g g Mount Product Code A-235 A-236 A-237 * Depth of field is calculated assuming a horizontal 35TV resolution using a 2/3" camera. (Permissible circle of confusion on the image-formation side: 3μ) * Resolution values indicate the theoretical resolution at a wavelength of 85nm. Relative Sensitivity 1% % 8% 7% 6% 5% % 3% 2% 1% Spectral Characteristics NIR Camera Infrared Light Si Wafer % Wavelength (nm) L-33

27 Telecentric Lens Zoom Lens High-Performance Low Magnification Zoom Lens ML-Z22D High-Performance Low Magnification Zoom Lens ML-Z22D Manual Type With the largest zoom ratio of any standard telecentric zoom lens, this manual zoom type model covers a wide range of FOVs (Field of Views). It also offers integrated coaxial lighting & filters. Magnification range:.2x~2x (zoom ratio of 1:1) WD=173mm Includes a uniform coaxial illumination function that covers the entire view. Dedicated, integrated coaxial light guide (super random type), L = 8mm, & color filters are attached (red & green). ML-Z22D WD 173± ±1 ø52 ø55 ø5 ø ø5 Magnification Securing Screw Fiber Securing Screw ø ø7 ø.5 P.C.D8 ø68 Zoom Ring ø61 Model ML-Z22D Magnification Range WD Motor Option Magnification Effective F No.2x~2x 173mm None Available (Zoom Ratio of 1:1) ± (Manual Zoom) Depth of Field Resolution Optical Distortion NA at.2x 3.6 7mm 12μm.3% or less.3 at 1x.5.mm 7.8μm.15% or less. at 2x 2.mm 7μm.13% or less.5 Largest Compatible Weight Mount Product Code 1/2" g A- * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-3

28 Manual Click Zoom Lens ML-Z315D By employing a manual click (detent) feature in the zoom system, a ±.5% magnification reproducibility is realized. Magnification can be adjusted between five different levels. Magnification range:.3x~1.5x (in 5 clicks) WD=151.2mm Includes a uniform coaxial illumination system that covers the entire view Manual Click Zoom Lens ML-Z315D ML-Z315D ø Index Point 1 16 ø2 -.2 ø ø Optical Axis Adjustment Knob (O/I=36.7) (.5) 1-M3 3 Socket Head For Securing Lighting ø Zoom Ring Zoom Clicks in 5 s (.3,.6,.8, 1.2, 1.5 ) Lens Hold Range Lighting Insertion Connector for Light Guide 5.5 Lens Hold Range W.D.151.2±7.6 Model ML-Z315D Magnification Range.3x~1.5x (Zoom Ratio of 5:1) WD 151.2mm ±7.6 With/Without Motor Without (Manual Click Zoom) Magnification Effective F No Depth of Field Resolution Optical Distortion at.3x.3 8.2mm 2.8μm -.%.2 at.6x.1 2.mm 12.μm -.5%.3 at.8x mm 1.μm -.2%.3 at 1.2x 1.7.8mm 8.2μm.3%. at 1.5x mm 7.μm.6%.5 NA Largest Compatible Weight Mount Product Code 1/2" 52g A-2 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-35

29 Telecentric Lens Zoom Lens High Resolution Zoom Lens ML-Z755HR Series High Resolution Zoom Lens M L-Z755H R To exploit the full potential of high pixel count cameras, this unique high NA, high resolution telecentric zoom lens series has a long working distance and wide zoom ratio as well as adjustable iris & focus. Available with an integrated coaxial illumination system as well as other options, this lens series is versatile and ideal for extremely accurate gauging and inspection applications at various field of views (FOVs). Zoom Ratio 6:1.75x.5x Effective F No 8. Variable Aperture Focus Range +/- 3mm NA.12 (.5x) Working Distance = 7. mm ML-Z755HR ML-Z755HRD ML-Z755HRD-L ø8 ø ø35 ø (1-32UNF) 13.8 Adjustment ±.5 (1-32UNF) ø8 ø ø35 ø3 Zoom ring Zoom ring Aperture Adjustment Ring (O/I=33.) (215.5) M3 Depth 5 Zoom ring Aperture Adjustment Ring ø M3 Depth 5 Aperture Adjustment Ring Lighting Insertion Connector for Light Guide ø1.2 ø M3 Depth 5 13 Lineup : 3 Models ML-Z755HR Coaxial Illumination Model D, Side View Model-L 13.8 Adjustment ±.5 Lighting Insertion Connector for Light Guide (O/I=33.) (215.5) ø8 Focus Ring ±3 W.D. 7.±2.1 ø36 ø3 8 (ø5) Focus Ring ±3 W.D. 7.±2.1 1 ø36 ø3 8 (ø5) 1 8 (ø5) Model Magnification Range WD Focus Magnification Effective F No Depth of Field Resolution Optical Distortion NA Weight Largest Compatible ML-Z755HR.75x ~.5x 7.mm at.75x mm µm -.2%. A-313 ±3mm ML-Z755HRD at 2x 12.2mm.µm.1%.8 Approx. 65g 1/2'' A-31 ±2.1 ML-Z755HRD-L - at.5x 1.7mm 2.8µm.2%.12 A-315 * Effective F No indicates designed value when iris is open * Calculated based on permissible circle of confusion on the image-formation side:μm Mount Product Code L-36

30 Converter Lens (Optional) Attach to the end of the lens to change magnification and WD. None Model ML-Z25HR ML-Z3HR ML-Z5HR ML-Z75HR ML-Z135HR ML-Z2HR Focus Magnification Range WD Product Code Low High Near.75x ~.53x 7mm Middle.75x ~.53x 77mm Far.75x ~.53x 8mm Near.21x ~ 1.3x 21.5mm Middle.1x ~ 1.1x 23mm Far.16x ~.7x 2mm Near.25x ~ 1.52x 17mm Middle.23x ~ 1.36x 2mm Far.2x ~ 1.21x 237mm Near.3x ~ 2.38x 17mm Middle.38x ~ 2.27x 8mm Far.36x ~ 2.16x 131mm Near.57x ~ 3.6x 76.mm Middle.56x ~ 3.x 81.7mm Far.55x ~ 3.35x 87.1mm Near 1.x ~ 6.5x 37mm Middle 1.1x ~ 6.12x 38.6mm Far 1.2x ~ 6.17x mm Near 1.5x ~ 8.8x 17mm Middle 1.x ~.2x mm Far 1.53x ~.25x.8mm A-316 A-317 A-3 A-31 A-315 A-3151 High Resolution Zoom Lens M L-Z755H R * Indicated values are based on caluculation and not guarranteed values. * When you used ML-Z25HR,ML-Z3HR,ML-Z5HR,ML-Z75HR,coaxial illumination does not cover entire view. HR Series Improves Resolution Conventional ML-Z755 NEW ML-Z755HR L-37

31 Telecentric Lens Zoom Lens Standard Zoom Lens ML-Z755 Series Standard Zoom Lens ML-Z755 Standard model zoom lens with outstanding functionality. Adjustment of magnification and working distance is possible through combination with optional optics. Magnification range :.75x~.5x (zoom ratio of 6:1) WD=mm Includes a uniform coaxial illumination function that covers the entire view. Equipped with built-in focus adjustment function (WD can be adjusted to -6 mm) * Motorized zoom solution available. Manual Zoom Zoom with Coaxial Illumination Zoom with Coaxial Illumination & Deflection Function ML-Z755 ML-Z755D ML-Z755D-PL (22) Adjustment ±5 ø ø ø3 ø31 ø6 W.D ± PCDø55 Points in Equal Intervals M3 (Securing Screw) UNF 5. -M3 Securing Screw P.C.D 55 ø1.5 Coaxial Fiber Input Connector (A Standard Product is Used) W.D ±.5 ø ø3 ø ø31 ø Adjustment ± Adjustment ±5 ø ø3 ø ø ø PCD ø55 Points in Equal Intervals M3 (Securing Screw) Coaxial Fiber Input Connector 17 ø1.5 Focus Ring ± (A Standard Product is Used) WD 8 ±.5 ø6 All models equipped with focus, aperture, and zoom. Model ML-Z755 ML-Z755D Magnification Range.75x~.5x (Zoom Ratio of 6:1) WD (mm) ±.5 ML-Z755D-PL 8±.5 Focus ~ -6mm Motor Option None Available (Manual Zoom) Magnification.75x time 2x time.5x time Effective F No Depth of Field Resolution Optical Distortion NA Operation Function mm.3mm.μm 5.μm.2% or less.1% or less.3.6 All models equipped with focus, aperture, 28.1mm.2μm -.2% or less.8 and zoom. Largest Weight Compatible Mount Product Code Approx. g A-8 Approx. 7g 1/2" A- Approx. g A-12 * Depth of field is calculated assuming a horizontal 2 TV resolution using a 1/2" camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Effective F No indicates a value when the iris is open. L-38

32 Standard Zoom Lens Options Front Converter Lens ML-Z Series Attach to end of lens to change magnification and working distance. Rear Converter Lens ML-Z2X Model Product Code ML-Z3 A-825 ML-Z A-826 ML-Z5 A-827 ML-Z7 A-828 ML-Z1 A-82 ML-Z2 A-83 Specially designed 2x rear converter. Mounting this between a lens and camera can double the magnification easily without changing working distance. *May decrease the resolution. Model Product Code ML-Z2X A-836 ML-Z755 ML-Z755D Focus Magnification Magnification Model Matching Matching Range WD Range WD Chart Chart MIN MAX MIN MAX Near.2x ~ 1.3x 255mm.23x ~ 1.x 263mm ML-Z3 Middle.23x ~ 1.36x 283mm.22x ~ 1.33x 22mm Coaxial Illumination Cannot Far.21x ~ 1.28x 315mm.21x ~ 1.25x 325mm Cover the Entire View Near.31x ~ 1.87x 15mm.31x ~ 1.8x 2mm ML-Z Middle.3x ~ 1.81x 2mm.3x ~ 1.81x 216mm Coaxial Illumination Cannot Far.2x ~ 1.72x 22mm.2x ~ 1.72x 23mm Cover the Entire View Near.38x ~ 2.27x 16mm.37x ~ 2.25x 163mm ML-Z5 Middle.37x ~ 2.2x 17mm.37x ~ 2.21x 17mm Coaxial Illumination Cannot Far.36x ~ 2.2x 1mm.36x ~ 2.17x 5mm Cover the Entire View Near.52x ~ 3.17x mm.52x ~ 3.16x 5mm ML-Z7 Middle.53x ~ 3.16x mm.52x ~ 3.16x 121mm Coaxial Illumination Cannot Far.53x ~ 3.17x 125mm.52x ~ 3.16x 126mm Cover the Entire View Near 1.3x ~ 6.21x 53.mm 1.3x ~ 6.21x 53.8mm ML-Z1 Middle 1.5x ~ 6.33x 5.7mm 1.6x ~ 6.37x 55.1mm Far 1.8x ~ 6.x 56.1mm 1.8x ~ 6.x 56.5mm Near 1.5x ~ 8.77x 32.1mm 1.6x ~ 8.77x 32.3mm ML-Z2 Middle 1.x ~.1x 32.7mm 1.5x ~.x 32.mm Far 1.5x ~.26x 33.mm 1.5x ~.35x 33.6mm *Magnification and working distance can be altered slightly by turning the focus adjustment ring (N F) Indicated values are based on calculation formulas. Actual measurement may differ depending on tolerance. Cannot be mounted on ML-Z755D-PL. ML-Z2X ø3 (knurl) ML-Z2X. Standard Zoom Lens Options Prism Adapter -P5 side view pentaprism type adapter. Monitor images are shown in an upright, normal position by the pentaprism. Camera Model Product Code -P5 A-8 L-3

33 Telecentric Lens Accessory Prism Adapters Prism adapters make it possible to bend the optical axis at a right angle of, and to perform mark recognition for microscopic objects by modifying the pitch between 2 lenses to a fine pitch. Side View Mirror Type Prism Side View Mirror Type Prism for -HR -PL25HR When used in optical systems, images may blur or bend due to the strong effects of profile irregularity of prisms. A clear image can be acquired, however, even for HR type lenses with large NA by sorting and removing prisms with high profile irregularity during the QC process. - PL 25HR / - PL Exclusive -High Resolution Lens barrel diameter ø25 Length of inner optical path length 26.5mm -PL25HR Inner Optical Path Length ø M3 (For Securing Lens) M3 Socket Set Screw ( Screws Enclosed) ø Center of Field of View ± (Lens WD tan1.5 or less) ø25 -HR Series Model -PL25HR Specifications Side View Mirror for HR For ø25 Product Code A-813 Side View Mirror Type Prism -PL Series Using these prisms, the optical axis can be bent at a right angle which is useful when space is limited. Resulting images become mirror images. -PL16 -PL -PL25 Inner Optical Path Length Inner Optical Path Length 2 ø +.1 Inner Optical Path Length 26 ø Inner Optical Path Length Camera Center of Field of View ± (Lens WD x tan1.5 or less) ø M2.6 (For Securing Lens) M2.6 Socket Set Screw ( Screws Enclosed) Center of Field of View ± (Lens WD tan1.5 or less) ø M2.6 (For Securing Lens) M2.6 Socket Set Screw ( Screws Enclosed) Center of Field of View ± (Lens WD tan1.5 or less) ø M3 (For Securing Lens) M2.6 Socket Set Screw ( Screws Enclosed) WD Below Prism = Lens WD - Inner Optical Path Length Cover Glass -GA2 Model Compatible Sizes Inner Optical Product Path Length Code -PL16 For Lens 2mm A-8 -PL For ø Lens 2mm A-85 -PL25 For ø25 Lens 26mm A-86 -GA2 Cover Glass ø2 t=1mm A-862 L-

34 Side View Mirror Type Prism -P1,3, Resulting images become mirror images P1 For Lens *End of the Lens 25 -P5 Main Unit () 2 WD 15 Inner Optical Path Length P3 Side View Pentaprism Type Prism -P5,6,8 3-M2.6 Stopper Screw * End of the Lens 35 1 Resulting images are shown in an upright, normal position by the pentaprism. 5 Inner Optical Path Length 28.5 ø35 -P6 (ø25) ø Hole Main Unit *WD in the diagrams is the lens working distance minus the inner optical path length. For ø31 Lens 3-M3 Porcelain Screw (For Securing Lens) End of the Lens 6 ø31 ø For ML-Z755 ø15 Hole 25 WD Inner Optical Path Length 53 For ø25 Lens For Lens Depth WD 2 1 Main Unit *End of the Lens 6 Inner Optical Path Length.5 -M2.6 (For Securing Lens) WD *WD in the diagrams is the lens working distance minus the inner optical path length. ø * End of the Lens -P For ø3 Lens 3-M2.6 Stopper Screw Inner Optical Path Length 28.5 ø35 -P8 For ø12 Lens ø12 Depth Main Unit (ø3) ø Hole 21 WD 2 1 Main Unit *End of the Lens 6 Inner Optical Path Length.5 -M2.6 (For Securing Lens) WD ø Model Product Code -P1 A-81 -P3 A-82 -P A-83 Camera Model Product Code -P5 A-8 -P6 A-81 -P8 A-8 Side View Mirror Type Prism/ Side View Pentaprism Type Prism/Variable Optical Axis Pitch Type - P1,3, / - P5,6,8 / - P2,7, Variable Optical Axis Pitch Type -P2,7, Mark recognition is possible for fine pitch between 2 points of microscopic objects. -P2 For Lens Pitch 1mm Type * End of the Lens 15 2 WD 3 Main Unit 3-M2 Stopper Screw 35 Inner Optical Path Length -P7 For Lens Pitch 5mm Type 2 Main Unit *End of the Lens WD ø Hole M2 Stopper Screw Inner Optical Path Length *WD in the diagrams is the lens working distance minus the inner optical path length. -P For ø12 Lens Pitch 5mm Type 2 Main Unit *End of the Lens WD ø Hole ø12 3-M2 Stopper Screw Inner Optical Path Length Camera min Pitch 1mm 2mm Model Product Code -P2 A-817 -P7 A-8 -P A-81 L-1

35 Telecentric Lens Accessory Variable Optical Axis Pitch Type (Pitch 3mm) Variable Optical Axis Pitch Type (Pitch 3mm) -PP Series -PP16 -PP -PP25 -M2.6 M2.6 Socket Set Screw ( Screws Enclosed) Center of Field of View ± (Lens WD x tan2.5 or less) Inner Optical Path Length M2.6 M2.6 Socket Set Screw ( Screws Enclosed) Inner Optical Path Length ø ø M3 M3 Socket Set Screw ( Screws Enclosed) Inner Optical 5 Path Length Center of Field of View ± (Lens WD x tan2.5 or less) Inner Optical Path Length WD Below Prism = Lens WD - Inner Optical Path Length Optical Axis Pitch - PP Model Specification Inner Optical Path Length Optical Axis Pitch Product Code -PP16 For Lens 3mm 3mm A-82 -PP For ø Lens 3mm 3mm A-821 -PP25 For ø25 Lens 5mm 3mm A-822 -GA1 Cover Glass 1 x t=1mm A-863 -GA3 Cover Glass 1 x 13 t=1mm A GA3 -GA1 Variable Optical Axis Prism -PP Series Field of View Vignetting Chart Because of its narrow-pitch design, the -PP Series is subject to vignetting. Since vignetting varies depending on the object, illumination etc., in the environment that the customer uses, the prism must be tested in the actual machine. *This is a calculated value only and is not guaranteed. For reference only. 1-ST65D+1/2" ST65D+1/2" Field of View (Horizontal Field of View Divided into 2 Equal Sections) Model ST65D/65 1/2" /3" ST65D/65 1/2" /3" ST65D/65 1/2" /3" ST65D/65 1/2" /3" ST65D/65 1/2" /3" STD/ 1/2" /3" STD/ 1/2" /3" STD/ 1/2" /3" STD 1/2" /3" STD 1/2" /3" STD 1/2" /3" ST15D/15 1/2" /3" ST17D/17 1/2" /3" Lowering of Light Quantity L-2

36 Variable Pitch Side View Prism -PSV16L/R Fine pitch and small space observation at a angle are possible for alignment marks. Because of the prism's compact design, mm working distance lenses can also be used. -Standard for Variable Pitch Side View Prism Optical axis pitch 3mm Length of inner optical path length: 2mm WD=mm lens can also be attached -PSV16L -PSV16R POINT! Optical Axis Pitch One Side 3mm Application - PSV16L / R (3) (.7) Center of Field of View 2-M2.6 ± (Lens WD tan2.5 or less) M2.6 Socket Set Screw (2 Screws Enclosed) () Inner Optical Path Length 2 (in air) (.7) (3) Center of Field of View ± (Lens WD tan2.5 or less) 2-M2.6 M2.6 Socket Set Screw (2 Screws Enclosed) () Inner Optical Path Length 2 (in air) Model Specifications Optical Axis Pitch Product Code -PSV16R Side View Prism for ST Series (Right Side) One Side 3mm A-87 -PSV16L Side View Prism for ST Series (Left Side) One Side 3mm A-88 -PSV 16L/R Vignetting Reference Data Note that the -PSV16 is designed for fine pitch which may cause vignetting in a portion of the screen when observation is performed with a wide field of view. (Differences exist depending on the kind of lens or camera being used.) During inspection with a large field of vision, vignetting occurs in the area within the red box. Vignetting Area Inspection with a small field of vision L-3

37 Telecentric Lens Accessory Dual Field of View Prism / High Accuracy Two Fields of View Optical Unit Dual Field of View Prism -P2S16 2 different fields of view type for ML-PL Series. This half-mirror prism can be used to view two different field of views (FOV) on the same optical access. Same object with two fields of view, same field of view at different working distances, etc. Lens A should have a diameter of 16mm Model Specifications Product Code -P2S16 ST Series, 2 field of views (FOV) prism for mm A-812 Lens A - P2S16 / ML-2PLBOX -P2S16 2-M3 M3 Socket Set Screw 5 Inner Optical Path Length B 13 (In Air) Low Magnification High Magnification Alignment Two Focus Point Alignment Small Field of View Large Field of View Focal A Large Field of View Rough Alignment Focal A Small Field of View Fine Alignment Focal B Inner Optical Path Length A 13 (In Air) Focal B High Accuracy Two Fields of View Optical Unit ML-2PLBOX Made-to-order Two field of views and two focus points can be observed using two lenses & cameras. MORITEX adjusts cameras and optical units to positions desired by customers to provide support to meet specific customer requirements for lenses and illumination, condition of optical units, etc. These adjustments and quality inspection ensure high accuracy of mounted components and the resulting images. MORITEX performs adjustment and inspection to ensure high accuracy s, prisms and lenses. -STmm Center Accuracy ±(Lens WD Tan1.5 ) -ST65mm Rotation Alignment Accuracy Relative Within ±.5 L-

38 High Accuracy Two Fields of View Optical Unit ML-W1 Coaxial L-Shaped Adapter -AD-L By connecting to a len's coaxial input, illumination can be inserted at right angles. A very convenient adapter for small spaces. -AD-L Made-to-order High Accuracy Two Fields of View Optical Unit / Coaxial L-Shaped Adapter ML-W1 / - AD - L C2 M3- Socket Set Screw to Secure a Lighting M3 Type Threads on Opposite Side in Same ø1.2 ø8 +.5 ( Lens) (ø5) (Fiber Bundle Diameter) ø1 ø () (3) Model Specifications Product Code -AD-L L-Shaped Coaxial Adapter A-8 L-5