Machine Vision General Catalog

Transcription

1 MV Machine Vision General Catalog Lens Vol.1 2 rue René Laennec 515 Taissy France Fax: , Tel : hvssystem@hvssystem.com Site web :

2 Introduction Unparalleled Expertise Machine Vision Systems combine lighting, imaging, and data processing to inspect, monitor, and control industrial production processes. They have been employed in a variety of industries on a multitude of applications. As experts in providing Lighting and Imaging solutions for today s vast machine vision market, MORITEX and SCHOTT offer standard and customized solutions for illumination, lens design, and front end optical systems. With decades of experience, and extensive know-how, MORITEX and SCHOTT can provide the total machine vision illumination and imaging solution designed exclusively for you comprised from our vast product portfolio. MORITEX and SCHOTT are leading global suppliers of illumination and imaging components for machine vision applications. Our unparalleled expertise in these areas makes us uniquely qualified to service all different levels from system design to integrated lighting and imaging system solutions. Please review the products featured in this catalog and let us know how we can best serve you! Distribué par : L-2 2 rue René Laennec 515 Taissy France Fax: , Tel : hvssystem@hvssystem.com Site web :

3 Your Global Lighting and Imaging Alliance Since 27, MORITEX and SCHOTT have cooperated on a global scale. Our goal has always been to provide the ultimate products and services to our customers worldwide. By utilizing the bundled experience and expertise of these two established companies, we have made this goal a reality. As an established leader in machine vision systems with an impeccable track record of innovation, MORITEX is the only provider that can service all different levels from system design to integrated system solutions. The SCHOTT Lighting and Imaging division offers a broad range of LED and fiber optic solutions focusing on illumination, light and image transmission. In addition, SCHOTT also offers superior hybrid solutions utilizing the best of LED and fiber optic technologies. For the first time, MORITEX and SCHOTT present their entire Machine Vision portfolio together in one catalog at your convenience and reference. Thank you for taking the time to learn about MORITEX and SCHOTT and how we can provide you with the ultimate in Machine Vision solutions. If you would like more information about any of our products, please don t hesitate to contact us. MORITEX and SCHOTT, Unparalleled Expertise! L-3

4 Locations Spanning the Globe At MORITEX and SCHOTT we're here to serve you! With locations spanning more then countries across the globe, we're almost guaranteed to have an office near you. This map represents some of our main offices serving the Machine Vision industry located in Asia, Europe and the USA. Please don't hesitate to contact us if we can be of service to you. You may refer to the back cover page for contact information. San Jose U.S.A. Paris France Stafford United Kingdom Tiel Netherlands Mainz Germany Yehud Israel Tokyo Japan Shanghai China Singapore Taipei Taiwan Hong Kong China L _MV_LensKatalog.indd :

5 New Products High Magnification Machine Micro Lens SOD-2X-VI NEW The multifunctional SOD-2X-VI model is the latest addition to the SOD-X Series with an optical magnification of 2x and NA of.35 to rival microscope objective lenses while providing a long working distance (WD) of 37.5mm. P.L-11 MML Fixed Magnification Series MML1-HR11D-5M The MML1-HR11D-5M has the lowest magnification of any MML lens. It is the newest MML-HR5M Series model and is ideal for use with 5MP image sensors having resolving power of 362 lp/mm and achieving very uniform coaxial illumination over a large FOV of up to ø78.5mm. NEW P.L-16 MML-Standard MML5-ST3DVI NEW To meet the various requirements of machine vision applications, this model features.5x magnification, a variable iris, and the longest WD (working distance) of any MML-ST Series lens, 3mm. P.L-31 Line Scan Lens for 3 Color Line Sensor ML-F8C-25 NEW Designed to address the challenges of color line scan applications, this new large format F lens with an 8mm focal distance features RGB chromatic aberration correction to provide excellent performance for line sensors up to 82mm at magnifications of.2 to.5x. P.L-66 L-5

6 System Flow Chart SOD-X High Magnification Machine Micro Lens Series SOD-1X / 2X-VI Telecentric Lens MML MML Zoom Lens Series High-Performance Low Magnification Zoom Lens Manual Click Zoom Lens High Resolution Zoom Lens Series Standard Zoom Lens Series Fixed Magnification Series MML-High Resolution 5M Series MML-High Resolution Series MML-Standard Series MML Series For Micro-head Cameras MML-ST-CM Series For Near-Infrared Applications MML-NIR Series ML-Z22D ML-Z315D ML-Z755HR Series ML-Z755 Series Carl Zeiss For Distortion-free Imaging VISIONMES Macro Lens Series Non-Telecentric Macro Lens Series Low Magnification Macro Lens Series ML-N Series WD=9mm Series Macro Zoom Lens Series High Performance Macro Zoom Lens Varifocal Lens for Large Image Format Mega Pixel Macro Zoom Lens 1X Zoom Lens ML-Z18 ML-31VF MLH-3XMP MLH-1x Non-Telecentric Lens SOD-III CCTV Lens Series Coaxial Epi-illumination Unit for Objective Lens Telecentric CCTV Lens 3 Mega Pixel CCTV Lens Mega Pixel CCTV Lens CCTV Lens SOD-III MTE-55 ML-MP3 Series ML-MP Series ML Series Line Scan Lens Series for Line & Large Format Sensors Line Scan Lens for 3 Color Line Sensor For 62mm Sensor For 57mm Sensor For 35mm Sensor ML-F8C-25 ML-L12K5A Series ML-L52 ML-L235/355 ML-L Series Fiber Optic Imaging Fiber Optic Imaging Series Leached Image Bundles Wound Fiber Bundles L-6

7 Accessories Prisms Adapter OEM Products 9 Side View (Mirror) 9 Side View (Pentaprism) Variable Optical Axis Pitch Variable Pitch Side View Dual Field of View Coaxial L-Shaped Adapter Guidance Telecentric Lens Series Non-Telecentric Lenses Line Scan Lens Series Accessories Accessories Converter Lenses MTE-75 MTE-2 Partner Lens Series Fiber Optic Imaging Series Rear Converter Lenses 9º Mirror Prism Grass Covers Polarizers Ring Illumination Attachment Adapters Close-Up Rings ML-X ML-MLC ML-GA Series ML-PL Series ML-FL Series ML-EXR Series L-7

8 Telecentric Lens Telecentric Lens SOD -X / MML / MML Zoom MORITEX high quality telecentric lenses have become the industry standard for semiconductor, FPD, and other electronics manufacturing applications that require machine vision for recognition, mounting, alignment, or inspection. Our lenses enable high contrast, high resolution and low distortion imaging with optional integrated coaxial illumination that utilizes our proprietary hot spot reduction techniques. Catalog specifications alone cannot convey the high level of MORITEX lens quality. SOD-X Series MML-High Resolution MML-HR Series MML-High Resolution 5M MML-HR 5M Series SOD-X Series MML Series MML-Standard MML-ST Series High Magnification Machine Micro Lens SOD-1X / 2X-VI The cutting-edge SOD-X Series consists of a unique set of multifunctional telecentric lenses designed with high NA, high magnification, and integrated coaxial illumination while providing a long working distance. They allow for high resolution imaging never seen before in a machine vision lens. Fixed Magnification Series MML-High Resolution 5M Series MML-High Resolution Series MML-Standard Series MML Series For Use with Compact Camera MML-ST-CM Series For Use with Near-Infrared MML-NIR Series Essential in alignment, gauging, and inspection applications, the Machine Micro Lens (MML) Series are the highest quality fixed magnification, compact telecentric lenses available. The Standard (ST), High Resolution (HR), and 5 Megapixel (HR 5M) Series offer solutions for for a wide-range of machine vision systems including the NIR light range. L-8

9 Telecentric Lens SOD -X / MML / MML Zoom MML-Zoom Lens Series MML-Zoom Lens Series High-Performance Low Magnification Zoom Lens ML-Z22D Manual Click Zoom Lens ML-Z315D High Resolution Zoom Lens ML-Z755HR Series Standard Zoom Lens ML-Z755 Series This telecentric zoom lens series is used for high performance inspection and object recognition when a wide range of FOV and long WD are required. The ML-Z and ML-Z HR Series offer integrated coaxial illumination, adapter lenses, and motorized zoom function options. L-9

10 Telecentric Lens SOD-X High Magnification Machine Micro Lens Super Optical Device - SOD-1X High Magnification Machine Micro Lens SOD -1X / 2X-VI The SOD-1X is the first telecentric machine vision lens that we introduced with the resolution to rival microscope objectives. The long WD and high NA have made it indispensable for high magnification alignment & inspection applications of 1x or greater. High performance rear converters allow for magnifications of 15x & 2x to be achieved without changing the working distance allowing microscope type performance in a relatively compact package. 1x optical magnification Capable of 15x and 2x with rear converter lenses High NA of.23 High resolution, 1.5μm Compact, integrated design 1 Even Better Images High Resolution and NA Achievement of high resolution that is beyond comparison with conventional machine vision lenses. 2 Wide Focus Range Deep Depth of Field Telecentric Optical System A high resolution equivalent to an objective lens with even longer depth of field has been sought after and now there is a telecentric optical system that has been implemented to widen the range of focus when viewing objects with a CCD camera. Objective Lens NA=.26 SOD-1X NA=.23 Conventional Lens, 1x Magnification, 55mm WD Focus Position SOD-1X, 1x Magnification, 55mm WD L-1

11 NEW 2x optical magnification Capable of 3x and x with rear converter lenses High NA of.35 High resolution, 1μm Variable iris High Magnification Machine Micro Lens Super Optical Device - SOD-2X-VI This revolutionary 2x magnification SOD series model has a high NA & resolution that put it in the microscope objective lens class. In addition, it boasts a long WD of 37.5 mm that provides you with additional space to install Illumination and motion, handling, & transfer systems. The all-in-one machine vision lens has a compact body with an integrated coaxial epi-illumination also saving space & improving on-axis light quality. High Magnification Machine Micro Lens SOD -1X / 2X-VI 3 Improved Ease of Use Long WD ease of use through longer WD (working distance) while maintaining high resolution. Sufficient space for tooling and pick-up tools has been provided allowing the performance of operations thought to be impossible with conventional lenses. Operating position and work status can be confirmed by eye resulting in a reduction of operating errors. Opens the possibility of using not only coaxial but ring and various other types of illumination. This increase in lighting options allows for the imaging of objects previously difficult to view and resolve. Recognition is possible at a location with necessary separation from heat sources. Alignment and inspection are also possible during thermo compression bonding. Observation can be performed without any effects from water, oil, and foreign objects generated or moved during processing. Compact Compact design makes it possible to downsize peripheral parts and machinery. Establishment of operating space Confirmation of operation status and position possible by eye Oblique illumination is possible Separation from heat source Use in environments where substances such as water & oil are disturbed L-11

12 FFFFFFFF Telecentric Lens SOD-X SOD-1X SOD-2X-VI High Magnification Machine Micro Lens SOD -1X / 2X-VI ø /-.1 3 Serial Number Label Rear Converter Lens (Option) SOD-1.5X ø8 +.3/ M3 Hexagonal Locking Screw to Secure a Lighting Lighting Insertion Connector for Light Guide 3-M3 Hexagonal Socket Head for Adjustment of Camera Position ø1.2 Camera tripod screw 2 3 WD 55.2± (O/I=253.7) -M3 Heli-Sert 2D ø3 1/32UNF 6.8 C mount ø3 / (12.8) 2 ø22 1/32UNF Model Magnification WD Resolution Depth Of Field NA ø5 /-.1 W.D ±.5 SOD-2X-VI ø C O O Serial Number Label SOD-2X Effective F No RoHS Label ø8 +.5/ 5.5 ø (16) 58 -M3 Heli-Sert 2D Camera tripod screw (O/I = 3) Optical Distortion ø3 J1() 1-M3 Hexagonal Locking Screw to Secure a Lighting Lighting Insertion Connector for Light Guide Largest Compatible Weight CCD 3-M3 Hexagonal Socket Head for Adjustment of Camera Position C mount ø3 / (.8) 5 ø22 Mount U1(). Product Code SOD-1X 1x 55.2mm 1.5μm.17mm % 2/3" 5g A-17 SOD-2X-VI 2x 37.5mm 1μm ~ 3μm.57mm ~.26mm.35 ~ ~ 88.2% 2/3" 93g A-178 Dedicated Rear Converter Lens SOD-1.5X 3x 37.5mm 1μm ~ 3μm.38mm ~.26mm.35 ~ ~ 132.% 2/3" - A-175 SOD-2X x 37.5mm 1μm ~ 3μm.29mm ~.26mm.35 ~ ~ % 2/3" - A-176 Application Sample Silicon Wafers Recognition of wafer patterns using coaxial illumination. Recognition of damage and foreign objects using ring illumination. Hard Disk Reading Head Highly uneven objects are covered by using a wide focus range. Coaxial Illumination Oblique Illumination Wiring Pattern of Tip Coaxial Illumination Ring Illumination Coaxial Illumination Coaxial Illumination Wafer (Pattern) Wafer (Damage) L-12

13 MML Series Essential in alignment, gauging, and inspection applications, the Machine Micro Lens (MML) Series are the highest quality fixed magnification, compact telecentric lenses available. The Standard (ST), High Resolution (HR), and 5 Megapixel (HR 5M) Series offer solutions for a wide-range of machine vision systems including the NIR light range. MML-High Resolution 5M MML-HR 5M Series Top quality product types that boast the best contrast and NA among the entire MML Series. The highest possible image quality can be obtained in combination with high pixel count cameras such as the increasingly popular 5 mega pixel sensors. Various models also include iris control. Fixed Magnification Lens M M L MML-High Resolution MML-HR Series High performance MML Series models designed for cameras with 1.3 million pixels and up (i.e. ~.65 microns/pixel) with relatively small barrel diameters. MML-Standard MML-ST Series This series offers the highest level of optical performance when coupled with 1 thousand pixel cameras. Compact (ø 16mm) standard models with long DOF (Depth of Field) design. L-13

14 Telecentric Lens MML Fixed Magnification Series MML- HR 5M Provisions made to reduce coaxial illumination hot spots seen in low magnification lenses patent pending Conventional Design Lens Equipped with a noise reduction filter Cuts long wavelengths MML3-HR65D 5M / MML3-HR11D 5M Internal reflection light-scattering design MML-HR 5M Series MML-HR 5M (All models) Please note that although the lens is structured to suppress hot spots, hot spots will occur for mat surface work. Extremely Low Distortion The pursuit of high resolution with no aberration has resulted in the elimination of image bending. This means that it is no longer necessary to consider distortion offsets. High Contrast Contrast improvement has enabled image recognition with greater emphasis on the black and white shading. By converting the resolution chart image to binary form and then graphing and comparing the brightness levels, the MML-HR greatly emphasizes the difference in brightness between black and white object features when compared to our prior Mega MML. DISTOTION +Y DISTOTION +Y -1.. PERCENT PERCENT 1. Conventional MML MML-HR & MML-ST Conventional MML MML-HR & MML-ST L-1

15 Illumination Uniformity For object recognition on a matte surface with coaxial illumination, only a small amount of light is reflected from the surface requiring the coaxial light intensity to be increased. When this is done, however, the brightness in the center of the image increases due to reflection in the coaxial illumination lensing. The ST and HR Series solve this problem through a hot spot reduction technique that vastly reduces the reflection from the lens. This improves the uniformity of coaxial illumination for even matte surfaces. Below, OCR using coaxial illumination was performed on a rough, microcomputer chip surface. The MML-ST/HR brightness graph shows a reduction in the variation between the brightness in the center and periphery of the FOV which can also be seen in the sample images. Design Concept Pixel size, resolution limitation frequency, F No relation The MML HR/ST Series consist of three types of optical design focuses as well as for CCD camera compatibility. MML-STandard Format 1/2 Pixel Size 6.35µm Pixel Size [µm] MML-High Resolution Format 2/3 Pixel Size.65µm MML-High Resolution 5M Format 2/3 Pixel Size 3.5µm Pixel Size [µm] F No Spatial Frequency [lp/mm] F No MML Fixed Magnification Series MML- HR 5M 3 Different Mount Types ø3 Ring Type MML ø3 Ring Type MML-ST / HR Set Screw Type MML-ST / HR Conventional MML MML-HR & MML-ST MORITEX provides customized responses to requests for modifications of mounts and special mounts. Image Comparison for MML Series CCD Camera: 5 million pixels, 3.5µm/pixel Lens: Optical magnification 2x WD65 mm Test Chart : Resolution 5.563µm (resolving power lp/mm) MML-ST Series MML-HR Series MML-HR 5M Series VGA Class 1.3Mega Class 5 Mega Class Contrast Contrast Contrast MML2-ST65D MML2-HR65D MML2-HR65D-5M Field of view.mm L-15

16 Telecentric Lens MML MML Fixed Magnification Series MML-High Resolution 5M Series MML Fixed Magnification Series MML- HR 5M High-resolution models that possess the best contrast and NA of all MML Series. Image acquisition with even higher image quality is realized by combining these lenses with cameras with a high number of pixels, especially emerging 5 megapixel sensors. Highest image quality model of the MMLs Series. Supports 5 million pixels (3.3μm/pixel) * Except for MML-HR65DVI-5M Use of internal reflection light-scattering design and noise reduction filter for hot spot reduction Variable iris available for most models Very low distortion NEW MML1-HR11D-5M Model Magnification WD Resolution Depth Of Field NA Effective F No Optical Distortion Largest Compatible CCD MML3-HR65D-5M.3x 65.1mm 15.7µm 6.2mm % 2/3 22 A-3133 MML3-HR65-5M.3x 65.1mm 15.7µm 6.2mm % 2/3" 198 A-313 MML5-HR65DVI-5M.5x 65.3mm 9.3µm~1µm 2.2mm~9.8mm.36~.8 7~3.6.6% 2/3" 21 A-3137 MML5-HR65VI-5M.5x 65.3mm 9.3µm~1µm 2.2mm~9.8mm.36~.8 7~3.6.6% 2/3" 21 A-31 MML1-HR65DVI-5M 1x 65mm.7µm~19µm.56mm~2.2mm.71~.18 7~28.28% 2/3" 1 A-3138 MML1-HR65VI-5M 1x 65mm.7µm~19µm.56mm~2.2mm.71~.18 7~28.28% 2/3" 135 A-311 MML2-HR65DVI-5M 2x 65mm 2.22µm~15.25µm.15mm~.898mm.139~ ~.92.35% 2/3" 2 A-3139 MML2-HR65VI-5M 2x 65mm 2.22µm~15.25µm.15mm~.898mm.139~ ~.92.35% 2/3" 19 A-312 MML3-HR65DVI-5M 3x 65mm 2.1µm~1.5µm.85mm~.2mm.157~ ~7.5.% 2/3" 28 A-3156 MML3-HR65VI-5M 3x 65mm 2.1µm~1.5µm.85mm~.2mm.157~ ~7.5.% 2/3" 275 A-3158 MML-HR65DVI-5M x 65mm 2µm~8.2µm.6mm~.2mm.167~ ~ % 2/3" 29 A-3157 MML-HR65VI-5M x 65mm 2µm~8.2µm.6mm~.2mm.167~ ~ % 2/3" 285 A-3159 MML1-HR11D-5M.1x 11mm 19.2µm 16.mm.18.1% 2/3" 73 A-3165 MML3-HR11D-5M.3x 11mm 15.7µm 6.2mm % 2/3" 212 A-3135 MML3-HR11-5M.3x 11mm 15.7µm 6.2mm % 2/3" 29 A-3136 Weight (g) Mount Product Code L-16

17 MML3-HR65D-5M MML3-HR65-5M MML5-HR65DVI-5M (O/I=219.7) W.D max ø ø M3 3 Hexagonal for Adjustment of Camera Position Lighting Insertion Connector for Light Guide 1.5 ø8 +.5 ø1.2 ø M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position MML5-HR65VI-5M (O/I=219.8) WD 65.3 ±2 (137) () ø3 -.1 ø M3 3 Hexagonal for Adjustment of Camera Position (O/I=167.5) (O/I=219.7) W.D max. W.D.=65 ±2 (85) ø ø MML1-HR65DVI-5M ø ø M3 3 Hexagonal for Adjustment of Camera Position 3-M3 3 Hexagonal for Adjustment of Camera Position ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide 1-M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position (O/I=219.8) WD 65.3 ±2 (137) () (O/I=167.5) ø3 -.1 ø ø M3 3 Hexagonal for Adjustment of Camera Position ø1.2 MML1-HR65VI-5M W.D.=65 ±2 (85) ø3 -.1 ø3 -.1 Lighting Insertion Connector for Light Guide 1-M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position 3-M3 3 Hexagonal for Adjustment of Camera Position MML Fixed Magnification Series MML- HR 5M L-17

18 Telecentric Lens MML MML2-HR65DVI-5M MML2-HR65VI-5M MML3-HR65DVI-5M MML Fixed Magnification Series 3-M3 Hexagonal for Adjustment of Camera Position (O/I=185.) 12.5 W.D.=65 ±2 (8.5) ø3 -.1 ø ø M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position (O/I=185.) 12.5 (8.5) W.D.=65 ± ø3 -.1 ø M3 Hexagonal for Adjustment of Camera Position (O/I=29.5) WD 65 ±2 (126.9) () ø3 -.1 ø M3 3 Hexagonal for Adjustment of Camera Position 8.8 ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide 1-M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position 8 MML- HR 5M MML3-HR65VI-5M MML-HR65DVI-5M MML-HR65VI-5M () ø M3 3 Hexagonal for Adjustment of Camera Position () ø M3 3 Hexagonal for Adjustment of Camera Position () ø M3 3 Hexagonal for Adjustment of Camera Position (O/I=29.5) WD 65 ±2 (126.9) ø -.1 (O/I=225.1) (12.6) WD 65 ± ø ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide 1-M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position (O/I=225.1) WD 65 ±2 (12.6) ø -.1 MML1-HR11D-5M MML3-HR11D-5M MML3-HR11-5M M3 3 Hexagonal for Adjustment of Camera Position ø53 ø ø18.5 ø (5.1) WD=11 ±3.3 O/I=(3) (O/I=269.9) 12. W.D. 11 max ø ø M3 3 Hexagonal for Adjustment of Camera Position Lighting Insertion Connector for Light Guide ø8 +.5 ø1.2 ø M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position (O/I=269.9) W.D. 11 max ø ø M3 3 Hexagonal for Adjustment of Camera Position L-18

19 MML Fixed Magnification Series MML- HR 5M L-19

20 Telecentric Lens MML MML-High Resolution MML-HR Series MML Fixed Magnification Series MML- HR The MML-HR Series consists of highly versatile models that support mega pixel cameras with 1.3 million pixels or more (.65um/pixel). The entire lineup features a high resolution and contrast design that realizes amazingly high image quality which cannot be shown by numbers alone. This series provides true imaging power in high end inspections and alignment applications. Supports mega pixel CCDs, 1.3 million pixels or greater High resolution throughout the entire field of view High NA and contrast Most models compatible with 2/3" or smaller CCD elements WD65mm Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML5-HR65D.5x 65mm 12.8μm 3.mm % or less 2/3" 75g A-329 MML8-HR65D.8x 65mm 8.μm 1.2mm % 2/3" 6g A-3128 MML1-HR65D 1.x 65mm 7.5μm.88mm % 2/3" 58g A-331 MML1.5-HR65D 1.5x 65mm 5.μm.2mm % 1/2" 53g A-332 MML2-HR65D 2.x 65mm.5μm.27mm % 2/3" 52g A-333 MML-HR65D.x 65mm 3μm.9mm % 2/3" 9g A-33 MML6-HR65D 6.x 65mm 3μm.6mm % 2/3" 12g A-335 MML-HR65DVI.x 65mm 3~13.3μm.9~.53mm ~ % 2/3" 95g A-39 MML6-HR65DVI 6.x 65mm 3~13.9μm.6~.58mm ~12.5% 2/3" 12g A-395 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2 CCD camera. (Permissible circle of confusion on the image-formation side: μm) L-2

21 *** ** MML5-HR65D MML8-HR65D MML1-HR65D (O/I=172.8) (9) 37 W.D. 65.3± ø MML1.5-HR65D ## Screw 3-M3 Hexagonal Locking Screw for Adjustment of Camera Position 7.5 ø8 +.5 ø1.2 ø15.7 Lighting Insertion Connector for Light Guide M3 Hexagonal Socket Head to Secure A Lighting M3 Type Threads On Opposite Side in Same Position (O/I=172.3) Screw 89.8 W.D. 65±2 Separable Lens Barrel ø ## *** ** MML2-HR65D 3-M3 Hexagonal for Adjustment of Camera Position +.5 ø8 11 Lighting Insertion Connector for Light Guide ø1.2 1-M3 Hexagonal Socket Head to Secure a Lighting M3 Type Threads On Opposite Side In Same Position (O/I=162.5) W.D. 65±2 (8) (2.7) -.1 ø3 ø () MML-HR65D 9 ø ø1.2 1-M3 Hexagonal MML Fixed Magnification Series MML- HR ø3 ø3 ø3 (O/I 157.2) 7.6 W.D. 65± ø () ø ø M3 Hexagonal (O/I=162.6) W.D. 65±2 (8.1) (17) -.1 ø () ø ø1.2 MML6-HR65D MML-HR65DVI MML6-HR65DVI ø3 (O/I=22.1) (119.6) ø () 9 ø W.D. 65±2 (O/I=187.2) W.D 65±2 (1.7) 19.2 ø () ø ø8 +.5 ø1.2 M3 Hexagonal ø ø8 +.5 ø1.2 M3 Hexagonal (O/I=22.1) (119.5) (.9) ø W.D 65±2 1-M3 Hexagonal ø 3 (1.7) (O/I=187.2) (29.5) M3 Hexagonal ø25 () ø22 9 ø8 ø1.2 M3 Hexagonal W.D 65±2 ø ø 26 ø () ø ø ø L-21

22 Telecentric Lens MML MML5-HR65 MML8-HR65 MML1-HR65 MML1.5-HR65 MML Fixed Magnification Series (O/I=172.8) (9) 37 W.D. 65.3± ## *** ** ø Screw 3-M3 Hexagonal for Adjustment of Camera Position (O/I=172.3) Screw 89.8 W.D. 65±2 Separable Lens Barrel ## *** ø25 3-M3 3 Hexagonal Socket Head for Adjustment of Camera Position 11 (O/I=162.5) W.D. 65±2 (8) (2.7) ø3 ø () (O/I 157.2) 7.6 W.D. 65± ø3 ø () (ø15.6) MML- HR MML2-HR65 (O/I=162.6) (8.1) W.D. 65±2 (17) ø3 ø () MML-HR65 (O/I=187.2) W.D 65±2 (1.7) 19.2 ø3 ø () 9 ø MML6-HR65 (O/I=22.1) (119.6) W.D. 65± ø3 ø () 9 ø Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML5-HR65.5x 65mm 12.8μm 3.mm % 2/3" 7g A-3 MML8-HR65.8x 65mm 8.μm 1.2mm % 2/3" 6g A-3129 MML1-HR65 1.x 65mm 7.5μm.88mm % 2/3" 5g A-35 MML1.5-HR65 1.5x 65mm 5.μm.2mm % 1/2" 6g A-36 MML2-HR65 2.x 65mm.5μm.27mm % 2/3" 6g A-37 MML-HR65.x 65mm 3μm.9mm % 2/3" 86g A-38 MML6-HR65 6.x 65mm 3μm.6mm % 2/3" 9g A-39 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) MML-PL25HR Dedicated 9 prism for MML-HR. See page L- for details. L-22

23 -HR11 FG MML MO FG WD11mm MML5-HR11D () 6.5 (O/I=262.65) W.D. 11± ø ø M3 3 Hexagonal +.15 ø8 ø1.2 MML2-HR11D (O/I=257.92) W.D.11.± ø3 ø3 -.1 () ø ø ø M3 Hexagonal MML8-HR11D (O/I=256.98) W.D. 11±3.3 ø3 ø3 -.1 () ø ø8 ø M3 Hexagonal MML-HR11D Screw 6.5 () (O/I=26.21) W.D. 11± ø M3 3 Hexagonal ø ø8 ø1.2 1-M3 Hexagonal MML1-HR11D (O/I=257.62) W.D. 11±3.3 ø3 ø3 -.1 () ø ø ø M3 Hexagonal MML6-HR11D Screw 6.5 () (O/I=288.1) W.D.11± HR11 ø M3 3 Hexagonal ø MML MO ø8 +.3 ø1.2 1-M3 Hexagonal MML1.5-HR11D (O/I 258.) W.D. 111.± MML5-HR () (O/I=262.65) W.D. 11± ø ø3 ø ø ø () 9 ø ø M3 Hexagonal 3-M3 3 Hexagonal (ø21.6) MML Fixed Magnification Series MML- HR MML8-HR11 MML1-HR11 MML1.5-HR11 MML2-HR11 ø3 ø3 ø3 ø3 (O/I=256.98) W.D. 11±3.3 (ø21.6) ø3 -.1 () 9 ø (O/I=257.62) W.D. 11± (ø21.6) ø3 -.1 () 9 ø (O/I 258.) W.D. 111.± ø (ø21.6) 5 ø3 -.1 () 9 (O/I=257.92) W.D. 11.± (ø21.6) ø3 -.1 () 9 ø Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML5-HR11D.5x 11.mm 12.8μm 3.mm % 2/3" 12g A-337 MML8-HR11D.8x 11.mm 9.3μm 1.mm % 2/3" 112g A-338 MML1-HR11D 1.x 11.mm 7.μm.88mm % 2/3" 12g A-339 MML1.5-HR11D 1.5x 111.mm 5.μm.2mm % 2/3" 11g A-3 MML2-HR11D 2.x 11.mm.5μm.27mm % 2/3" 11g A-31 MML-HR11D.x 11.mm 3.7μm.11mm % 2/3" 125g A-32 MML6-HR11D 6.x 11.mm.5μm.88mm % 2/3" 1g A-33 MML5-HR11.5x 11.mm 12.8μm 3.mm % 2/3" 137g A-351 MML8-HR11.8x 11.mm 9.3μm 1.mm % 2/3" 19g A-352 MML1-HR11 1.x 11.mm 7.μm.88mm % 2/3" 116g A-353 MML1.5-HR11 1.5x 111.mm 5.μm.2mm % 2/3" 98g A-35 MML2-HR11 2.x 11.mm.5μm.27mm % 2/3" 1g A-355 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) L-23

24 Telecentric Lens MML MML-Standard MML-ST Series MML Fixed Magnification Series MML-S T Through combination with 1 thousand pixel or greater cameras, the renewed design of the MML-ST Series realizes high level optical performance. These compact models with a diameter of 16mm feature a long depth of field making them ideal for installation in manufacturing equipment. Compact design with a lens barrel diameter of ~ Long Depth of Field Number of pixels: 1 thousand or higher CCD Element Size: 1/2" or less in most cases WDmm Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML1-STD 1.x.mm 7.2μm.88mm or less 1/2" 31g A-386 MML1.5-STD 1.5x.1mm 5.6μm.mm or less 1/2" 31g A-388 MML2-STD 2.x.1mm.8μm.29mm or less 1/2" 3g A-39 MML3-STD 3.x 37.9mm.8μm.19mm or less 1/2" 33g A-392 MML-STD.x.9mm.8μm.1mm or less 1/2" 36g A-377 MML6-STD 6.x.3mm.8μm.1mm or less 1/2" 39g A-379 MML8-STD 8.x.mm.8μm.7mm or less 1/2" 2g A-381 MML1-ST 1.x.mm 7.2μm.88mm or less 1/2" 26g A-387 MML1.5-ST 1.5x.1mm 5.6μm.mm or less 1/2" 26g A-389 MML2-ST 2.x.1mm.8μm.29mm or less 1/2" 29g A-391 MML3-ST 3.x 37.9mm.8μm.19mm or less 1/2" 28g A-393 MML-ST.x.9mm.8μm.1mm or less 1/2" 31g A-378 MML6-ST 6.x.3mm.8μm.1mm or less 1/2" 35g A-38 MML8-ST 8.x.mm.8μm.7mm or less 1/2" 37g A-382 *Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) *Resolution values indicate the theoretical resolution at a wavelength of 55nm. Caution: The WD mm series cannot be used with all prism adapter options. L-2

25 MML1-STD MML1.5-STD MML2-STD MML3-STD (O/I=15) W.D. ± ## *** ** 26 Screw 3-M3 Hexagonal for Adjustment of Camera Position M3 Hexagonal to Secure a Lighting M3 Type Threads on Opposite Side in Same Position MML-STD Lighting Insertion Connector for Light Guide (O/I=15.1) 11 W.D..1±1.2 (7.) ## MML6-STD *** ** Screw 3-M3 Hexagonal for Adjustment of Camera Position ø8 +.5 ø1.2 Lighting Insertion Connector for Light Guide M3 Hexagonal to Secure a Lighting M3 Type Threads on Opposite Side in Same Position (O/I=96.1) Screw W.D..1±1.2 (38.5) ## *** ** 3-M3 Hexagonal for Adjustment of Camera Position MML8-STD +.5 ø8 ø1.2 Lighting Insertion 7.5 Connector 26 for Light Guide M3 Hexagonal to Secure a Lighting M3 Type Threads on Opposite Side in Same Position Screw (O/I=16.9) W.D (51.5) ± ## 26 *** ** M3 Hexagonal for Adjustment of Camera Position +.5 ø8 ø1.2 Lighting Insertion Connector for Light Guide M3 Hexagonal to Secure a Lighting M3 Type Threads on Opposite Side in Same Position MML Fixed Magnification Series (O/I=13.9) (5.5) W.D..9± /2"CCD Screw 3-M3 3 Hexagonal ø8 11 ø M3 Hexagonal (O/I=117.5) (59.6) W.D..3± /2"CCD Screw 3-M3 3 Hexagonal Socket Head ø8 ø M3 Hexagonal (O/I=131.3) (73.8) W.D. ± /2"CCD Screw 3-M3 3 Hexagonal Socket Head ø8 ø M3 Hexagonal MML-S T MML1-ST MML1.5-ST MML2-ST MML3-ST (O/I=15) W.D. ± ## *** ** -.1 Screw 3-M3 Hexagonal for Adjustment of Camera Position (O/I=15.1) W.D..1±1.2 (7.) 11 ## *** ** -.1 Screw 3-M3 Hexagonal for Adjustment of Camera Position Screw (O/I=96.1) W.D..1±1.2 (38.5) ## *** ** M3 Hexagonal for Adjustment of Camera Position Screw (O/I=16.9) W.D. 37.9±1.2 (51.5) ## *** ** 3-M3 Hexagonal for Adjustment of Camera Position MML-ST MML6-ST MML8-ST (O/I= 13.9) (5.5) -.1 1/2"CCD Screw 3-M3 3 Hexagonal 11 (O/I= 117.5) (59.6) -.1 1/2"CCD Screw 3-M3 3 Hexagonal 11 (O/I= 131.3) (73.8) -.1 1/2"CCD Screw 3-M3 3 Hexagonal Locking Screw 11 W.D..9±2 -.1 W.D..3±2 -.1 W.D. ±2 -.1 L-25

26 7 9 FG MML MO Telecentric Lens MML WD65mm MML8-ST65D MML1-ST65D MML1.5-ST65D MML2-ST65D MML Fixed Magnification Series MML-S T (O/I=172.3) (89.8) W.D. 65± Screw 3-M3 Hexagonal M3 Hexagonal MML2-ST65DS (O/I=1.6) 3-M3 3 Hexagonal Socket Head Locking Screw 61.5 WD.65± ø Screw +.15 ø8 7 () ø M3 Hexagonal Socket Head Locking Screw (O/I=162.5) W.D. 65±2 (8) -.1 ø ø8 +.2 ø1.2 1-M3 Hexagonal Socket Head Locking Screw MML3-ST65DS 3-M3 3 Hexagonal for Adjustment of Camera Position (O/I=11.98) 59.5 WD.65 ± ø8 7 () ø Lighting Insertion Connector for Light Guide 1-M3 Hexagonal to Secure a Lighting M3 Type Threads on Opposite Side in Same Position (O/I=157.2) 7.6 MML-ST65D (O/I=186.3) W.D 65±2 (13.8) W.D 65±2 -.1 ø3 FG 26 1/2"CCD 3-M3 3 Hexagonal Screw 7.5 () ø ø1.2 () ø8 +.2 ø M3 Hexagonal Socket Head Locking Screw 1-M3 Hexagonal (O/I=162.6) (8.1) W.D. 65±2 -.1 ø3 MML-ST65DS 3-M3 3 Hexagonal ø 29 (O/I=17.38) WD.66 ± ø ø8 +.2 ø1.2 1-M3 Hexagonal ø () ø ø 16 1-M3 Hexagonal Socket Head Locking Screw MML6-ST65D MML6-ST65DS MML8-ST65DS (O/I=21.5) (118.5) W.D. 65±2 ø3 () -.1 ø8 +.2 ø1.2 1-M3 Hexagonal -.1 (O/I=163.53) 3-M3 3 Hexagonal ø WD.65.3±2 ø ø ø () ø 1.2 ø M3 Hexagonal Socket Head Locking Screw (O/I=18.) 3-M3 3 Hexagonal ø WD.6.9± (11) ø ø 1.2 ø M3 Hexagonal Socket Head Locking Screw Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML8-ST65D x.8 65mm 12.μm 1.86mm % 1/2" 9g A-311 MML1-ST65D x1 65mm 12.5μm 1.9mm % 1/2" g A-312 MML1.5-ST65D x1.5 65mm 7μm.56mm % 1/2" 3g A-362 MML2-ST65D x2 65mm 5.8μm.35mm % 1/2" g A-313 MML2-ST65DS x2 65mm 5.6μm.35mm % 1/2" 37g A-311 MML3-ST65DS x3 65mm.7μm.19mm % 1/2" 35g A-312 MML-ST65D x 65mm.6μm.135mm % 1/2" 55g A-31 MML-ST65DS x 66mm.μm.13mm % 1/2" 1g A-313 MML6-ST65D x6 65mm.6μm.91mm % 1/2" 6g A-315 MML6-ST65DS x6 65.3mm.μm.9mm % 1/2" 3g A-31 MML8-ST65DS x8 6.9mm.μm.7mm % 1/2" 6g A-381 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-26

27 MML8-ST65 MML1-ST65 MML1.5-ST65 MML2-ST65 (O/I=172.3) (89.8) W.D. 65±2 -.1 ø Screw 3-M3 Hexagonal MML2-ST65S 3-M3 3 Hexagonal (O/I=1.6) 61.5 WD.65±2.1 ø ø ø 29 () 7 11 (O/I=162.5) W.D. 65±2 (8) MML3-ST65S MML-ST65 MML-ST65S MML Fixed Magnification Series MML-S T MML6-ST65 MML6-ST65S MML8-ST65S (O/I=21.5) (118.5) 9 3-M3 3 Hexagonal (O/I=11.98) WD.65± ø ø ø3 ø () 7 11 (O/I=157.2) 7.6 W.D 65±2 (O/I=186.3) ø3 () 3-M3 3 Hexagonal -.1 ø (O/I=163.53) (13.8) W.D 65±2 MML 23 MO 1/2"CCD 3-M3 3 Hexagonal Screw () -.1 ø () (O/I=162.6) (8.1) W.D. 65±2 3-M3 3 Hexagonal (O/I=17.38) 63.9 WD.66± ø ø ø3 -.1 ø 29 3-M3 3 Hexagonal ø 29 () 11 1 (O/I=18.) ø 29 () (11) W.D. 65±2 -.1 WD.65.3 ±2 ø WD.6.9±2 ø Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML8-ST65 x.8 65mm 12.μm 1.86mm % 1/2" g A-385 MML1-ST65 x1 65mm 12.5μm 1.9mm % 1/2" 38g A-325 MML1.5-ST65 x1.5 65mm 7μm.56mm % 1/2" 36g A-363 MML2-ST65 x2 65mm 5.8μm.35mm % 1/2" 38g A-326 MML2-ST65S x2 65mm 5.6μm.35mm % 1/2" 32g A-315 MML3-ST65S x3 65mm.7μm.19mm % 1/2" 3g A-316 MML-ST65 x 65mm.6μm.135mm % 1/2" 5g A-356 MML-ST65S x 66mm.μm.13mm % 1/2" 36g A-317 MML6-ST65 x6 65mm.6μm.91mm % 1/2" 55g A-357 MML6-ST65S x6 65.3mm.μm.9mm % 1/2" 38g A-318 MML8-ST65S x8 6.9mm.μm.7mm % 1/2" 2g A-381 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. Optical Specifications for Recommended Combinations of MML Models and Rear Converter Lenses Model Converter Lenses Magnification Resolution Depth of Field Effective F No MML1-ST65D/65 SOD-1.5X 1.5 X 12.5μm.99mm 27.9 SOD-2X 2. X 12.5μm.7mm 37.2 MML1.5-ST65D/65 SOD-1.5X 2.25X 7μm.37mm 23. SOD-2X 3X 7μm.28mm 31.3 MML2-ST65D/65 SOD-1.5X 3 X 5.8μm.23mm 26 SOD-2X X 5.8μm.17mm 3.6 Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. L-27

28 FG MML MO MML MO Telecentric Lens MML WD11mm MML8-ST11D MML1-ST11D MML2-ST11D MML2-ST11DS MML Fixed Magnification Series (O/I=256.98) MML MO W.D. 11±3.3 ø3 ø () ø8 ø M3 Hexagonal MML3-ST11DS Screw 3-M3 3 Hexagonal Socket Head for Adjustment of Camera Position () 11 (O/I=2.3) W.D. 113±3. ø3 () ø ø8 +.3 ø M3 Hexagonal Socket Head Locking Screw MML-ST11D 3-M3 3 Hexagonal Socket Head Screw FG (O/I=256.9) MO MML MO 129. W.D.11±3.3 ø3 () ø ø M3 Hexagonal MML6-ST11D 1/2"CCD 3-M3 3 Hexagonal Socket Head Screw Screw (O/I=21.33) 71.8 W.D. 112± MML8-ST11D -.1 MML 3-M3 3 Hexagonal Socket Head for Adjustment of Camera Position ø8 () ø Lighting Insertion Connector for Light Guide 1-M3 Hexagonal to Secure a Lighting M3 Type Threads on Opposite Side in Same Position 1/2"CCD 3-M3 3 Hexagonal Socket Head Screw 11 MML-S T (O/I=219.7) 93.9 W.D. 18.3± ø8 ø Lighting Insertion Connector for Light Guide 1-M3 Hexagonal to Secure a Lighting M3 Type Threads on Opposite Side in Same Position (O/I=21.29) 81.9 W.D 11.8± FG ø ø M3 Hexagonal (O/I=233.5) 15.7 W.D 19.8± FG ø ø M3 Hexagonal Socket Head Locking Screw (O/I=256.3) 129. W.D 19.3± FG ø ø M3 Hexagonal Socket Head Locking Screw Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML8-ST11D.8x 11.mm 13.5μm 2.mm % 1/2" 85g A-32 MML1-ST11D 1x 113.mm 1μm 1.68mm % 1/2" 58g A-33 MML2-ST11D 2x 11.mm 11μm.66mm % 1/2" 55g A-3 MML2-ST11DS 2x 112.mm 11.2μm.66mm % 2/3" 39g A-319 MML3-ST11DS 3x 18.3mm 11.2μm.mm % 2/3" 3g A-311 MML-ST11D x 11.8mm 7μm.16mm % 1/2" 3g A-35 MML6-ST11D 6x 19.8mm 7μm.16mm % 1/2" 8g A-36 MML8-ST11D 8x 19.3mm 7μm.17mm % 1/2" 5g A-37 L-28

29 MML8-ST11 MML1-ST11 MML2-ST11 MML2-ST11S (O/I=256.3) 129. W.D 19.3 ± ML8-ST11 EX RoHS MML3-ST11S Screw (O/I=219.7) 93.9 W.D. 18.3±3.3 (ø15.6) L3-ST11S ORITEX RoHS FG FG 1/2"CCD 3-M3 3 Hexagonal Socket Head Screw M3 3 Hexagonal Socket Head for Adjustment of Camera Position -.1 () 11 (O/I=2.3) W.D. 113±3. ø3 () ø MML-ST11 (O/I=21.29) 81.9 W.D 11.8± ML-ST11 EX RoHS FG 1/2"CCD M3 3 Hexagonal Socket Head Screw (O/I=256.9) 129. W.D.11±3.3 (ø15.6) ø3 () MML6-ST11 (O/I=233.5) 15.7 W.D 19.8± ML6-ST11 EX RoHS FG 9 1/2"CCD 3-M3 3 Hexagonal Socket Head Screw Screw (O/I=21.33) 71.8 W.D. 112±3.3 (ø15.6) L2-ST11S ORITEX RoHS () MML8-ST11 (O/I=256.98) W.D. 11±3.3 (ø15.6) FG ø3 ø M3 3 Hexagonal Socket Head for Adjustment of Camera Position -.1 () MML Fixed Magnification Series M M L-S T Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML8-ST11.8x 11.mm 13.5μm 2.mm % 1/2" 78.5g A-319 MML1-ST11 1x 113.mm 1μm 1.68mm % 1/2" 5g A-32 MML2-ST11 2x 11.mm 11μm.66mm % 1/2" 5g A-321 MML2-ST11S 2x 112.mm 11.2μm.66mm % 2/3" 3g A-3111 MML3-ST11S 3x 18.3mm 11.2μm.mm % 2/3" 37g A-3112 MML-ST11 x 11.8mm 7μm.16mm % 1/2" 38g A-36 MML6-ST11 6x 19.8mm 7μm.16mm % 1/2" 3g A-365 MML8-ST11 8x 19.3mm 7μm.17mm % 1/2" 9g A-366 Optical Specifications for Machine Types Recommended for Combination with the Rear Converter Model Converter Lenses Magnification Resolution Depth of Field Effective F No MML8-ST11D/11 SOD-1.5X 1.2 x 13.5μm 1.3mm 2.2 SOD-2X 1.6 x 13.5μm 1.mm 32.2 MML1-ST11D/11 SOD-1.5X 1.5 x 1μm 1.11mm 31. SOD-2X 2. x 1μm.8mm 1.8 MML2-ST11D/11 SOD-1.5X 3 x 11μm.mm 9.8 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. L-29

30 Telecentric Lens MML WD15mm MML8-ST17D MML1-ST15D MML8-ST17 MML1-ST15 MML Fixed Magnification Series MML-S T (O/I=31.73) W.D 172.9± ø22 ø25 ø () +.5 ø8 ø M3 Hexagonal 7.3 (O/I=311.3) W.D. 156±.7 ø3 ø () ø ø8 +.5 ø M3 Hexagonal Socket Head Model Magnification WD Resolution Depth of Field NA Effective F No (O/I=31.73) W.D 172.9± ø22 ø25 ø Optical Distortion () 9 Largest Compatible CCD (O/I=311.3) W.D. 156±.7 Weight ø25 ø3 -.1 Mount () ø Product Code MML8-ST17D.8x μm 1.79mm % 1/2" 8g A-38 MML1-ST15D 1x μm 1.5mm % 1/2" 9g A-39 MML8-ST17.8x μm 1.79mm % 1/2" 76g A-322 MML1-ST15 1x μm 1.5mm % 1/2" 8g A-323 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) Optical Specifications for Machine Types Recommended for Combination with Rear Converter Model Converter Lenses Magnification Resolution Depth of Field Effective F No MML8-ST17D/17 SOD-1.5X 1.2x 12μm 1.17mm 21 SOD-2X 1.6x 12μm.88mm 28 MML1-ST15D/15 SOD-1.5X 1.5x 8.8μm.69mm 19.5 SOD-2X 2.x 8.8μm.52mm 26 Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. L-3

31 WD3mm Lenses with a very long working distance of 3mm for are available with optical magnifications of.5x, 1X, 3X, & X for long stand-off applications. Improved flexibility and ease-of-use is achieved with variable iris control. Magnifications:.5x, 1x, 3x, & x WD=3 mm With variable iris of 22.7-C32 Slim body with external diameter of ø27. NEW MML5-ST3DVI (O/I=531.6) W.D. 38 ± ø3 ø3 ø ø M2.6 Hexagonal for Adjustment of Camera Position ø8 +.5 ø1.2 1-M3x Hexagonal Socket Head to Secure a Lighting M3 Type Threads on Opposite Side in Same Position MML1-ST3D MML3-ST3DVI MML-ST3DVI O/I (IN AIR) (21) 116 ø1.2 W.D. 35±9 +.3 ø M3 Lighting Set Screw (not bonded) ø3 ø27 ø3 3-Camera Direction Adjustment Screw 1 Aperture Set Screw ø (O/I=529.98) ø15.7 W.D ø1.2 ø ø3 -.1 ø32 ø3 -.1 ø M3 Hexagonal for Adjustment of Camera Position M3x Hexagonal Socket Head to Secure a Lighting M3 Type Threads on Opposite Side in Same Position NEW MML5-ST3DVI (O/I=553.95) ø15.7 ø1.2 W.D. 3. ø ø3 -.1 ø ø3 -.1 ø M3 Hexagonal for Adjustment of Camera Position M3x Hexagonal Socket Head to Secure a Lighting M3 Type Threads on Opposite Side in Same Position For Micro-head Cameras (ø17mm) MML-S T- CM Model Magnification WD Resolution Depth Of Field NA Effective F No Optical Distortion Largest Compatible Weight CCD Mount Product Code MML5-ST3DVI.5x 3.5mm 15.3μm~2.μm 3.6mm ~ 5.7mm.22 ~.1 11.~17.9.6% 1/2" 2g A-3179 MML1-ST3D 1x 35mm 16.6μm~21.5μm 1.98mm ~ 2.56mm.2 ~ ~ % 1/2" 15g A-361 MML3-ST3DVI 3x 32mm 7.5 μm~15 μm.3mm ~.65mm.5 ~.23 33~66.15% 1/2" 31g A-3166 MML-ST3DVI x 3mm 7.5 μm~15 μm.3mm ~.65mm.5 ~.23 ~88.1% 1/2" 32g A-3167 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) Optical Specifications for Recommended Combinations of MML Models & Rear Converters Model Converter Lenses Magnification Resolution Depth of Field Effective F No MML1-ST3D SOD-1.5X 1.5x 15μm 1.21mm 31 SOD-2X 2.x 15μm.91mm 5. Caution: If combinations other than those recommended are used, dirt and scratches on the rear converter may be noticeable in the resulting images. For this reason, we do not recommend the use in any other setup for optimal performance. For Micro-head Cameras (ø17mm) MML-ST-CM Series Made-to-order The MML-ST-CM Series consists of small diameter, lightweight models which save space and achieve a fine pitch when used with micro-head cameras with smaller mounts. L-31

32 Telecentric Lens MML MML MML Series MML Fixed Magnification Series M M L WD11mm MML18-11D MML18-11 Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML18-11D.18x 11.mm 2μm 15.73mm % or less 2/3" 7g A-1 MML x 11.mm 2μm 15.73mm % or less 2/3" 7g A- 28. WD ø33 ø M3 Screw for Adjustment of Camera Position M3 Securing Screw (18 opposed) 28. WD ø33 ø75 3-M3 Screw for Adjustment of Camera Position * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. WD195mm MML-195D MML6-195D MML8-195D WD ø35 ø ø 8.5 ø2 WD ø35 ø ø ø2 WD ø35 ø ø ø2 Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML-195D x 197mm 3.97μm.12mm or less 2/3" 8g A-61 MML6-195D 6x 195mm 3.9μm.8mm or less 2/3" 9g A-62 MML8-195D 8x 19mm 3.92μm.6mm or less 2/3" 5g A-63 * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) L-32

33 WD2mm~ MML2-22D MML1-2D MML2-221D MML M3 Screw for Adjustment of Camera Position WD /3"CCD ø ø /2"CCD Screw For Securing M3 (O/I=383.2) W.D2.3± ø18 Mount Securing Screw M3 Hexagonal Socket Head to Secure a Lighting ø18 ø -.1 ø -.1 (O/I=6.) W.D221±11 1/2"CCD Screw Mount Securing Screw M3 Hexagonal Socket Head to Secure a Lighting WD ø For Near-Infrared (77nm~12nm)Applications Model Magnification WD Resolution Depth of Field NA Effective F No Optical Distortion Largest Compatible CCD Weight Mount Product Code MML2-22D.2x μm 1mm or less 2/3" 5g A-73 MML1-2D 1x μm.88mm or less 2/3" 26g A-75 MML2-221D 2x μm.mm or less 2/3" 32g A-76 MML2-22 2x μm.358mm or less 2/3" g A-7 MML- NIR * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) For Near-Infrared (77nm~12nm)Applications MML-NIR Series The MML-NIR Series is designed for a wavelength band of 77 to 12nm. This series provides special use MML lenses that allow the observation of in-wafer defects and rear patterns when combined with an infrared camera and illumination. Model MML-8D-IR MML6-8D-IR MML8-8D-IR Magnification x 6x 8x WD 82.mm 81.5mm 81mm Resolution.μm Depth of Field 5μm 33μm 27μm NA.15 Effective F No Optical Distortion.2%.22%.62% Largest Compatible CCD 2/3" Weight 9g 1g 11g Mount Product Code A-235 A-236 A-237 * Depth of field is calculated assuming a horizontal 35TV resolution using a 2/3" CCD camera. (Permissible circle of confusion on the image-formation side: 3μ) * Resolution values indicate the theoretical resolution at a wavelength of 985nm. Relative Sensitivity 1% 9% 8% 7% 6% 5% % 3% 2% 1% Spectral Characteristics NIR Camera Infrared Light Si Wafer % Wavelength (nm) L-33

34 Telecentric Lens MML Zoom Lens High-Performance Low Magnification Zoom Lens ML-Z22D High-Performance Low Magnification Zoom Lens ML-Z22D Manual Type With the largest zoom ratio of any standard telecentric zoom lens, this manual zoom type model covers a wide range of FOVs (Field of Views). It also offers integrated coaxial lighting & filters. Magnification range:.2x~2x (zoom ratio of 1:1) WD=173mm Includes a uniform coaxial illumination function that covers the entire view. Dedicated, integrated coaxial light guide (super random type), L = 8mm, & color filters are attached (red & green). ML-Z22D WD 173± ±1 ø52 ø55 ø5 ø ø5 Magnification Securing Screw Fiber Securing Screw ø9 ø7 ø.5 P.C.D8 ø68 Zoom Ring ø61 Model ML-Z22D Magnification Range WD Motor Option Magnification Effective F No.2x~2x 173mm None Available (Zoom Ratio of 1:1) ± (Manual Zoom) Depth of Field Resolution Optical Distortion NA at.2x 3.6 7mm 12μm.3% or less.3 at 1x mm 7.8μm.15% or less. at 2x 2.mm 7μm.13% or less.5 Largest Compatible CCD Weight Mount Product Code 1/2" 11g A-11 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-3

35 Manual Click Zoom Lens ML-Z315D By employing a manual click (detent) feature in the zoom system, a ±.5% magnification reproducibility is realized. Magnification can be adjusted between five different levels. Magnification range:.3x~1.5x (in 5 clicks) WD=151.2mm Includes a uniform coaxial illumination system that covers the entire view Manual Click Zoom Lens ML-Z315D ML-Z315D ø Index Point ø2 -.2 ø ø Optical Axis Adjustment Knob (O/I=36.7) (11.5) 1-M3 3 Hexagonal Socket Head For Securing Lighting ø Zoom Ring Zoom Clicks in 5 Positions (.3,.6,.8, 1.2, 1.5 ) Lens Hold Range Lighting Insertion Connector for Light Guide 5.5 Lens Hold Range W.D.151.2±7.6 Model ML-Z315D Magnification Range.3x~1.5x (Zoom Ratio of 5:1) WD 151.2mm ±7.6 With/Without Motor Without (Manual Click Zoom) Magnification Effective F No Depth of Field Resolution Optical Distortion at.3x mm 2.8μm -.9%.2 at.6x mm 12.μm -.5%.3 at.8x mm 1.μm -.2%.3 at 1.2x 1.7.8mm 8.2μm.3%. at 1.5x mm 7.μm.6%.5 NA Largest Compatible CCD Weight Mount Product Code 1/2" 52g A-112 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-35

36 Telecentric Lens MML Zoom Lens High Resolution Zoom Lens ML-Z755HR Series High Resolution Zoom Lens M L-Z755H R To exploit the full potential of high pixel count cameras, this unique high NA, high resolution telecentric zoom lens series has a long working distance and wide zoom ratio as well as adjustable iris & focus. Available with an integrated coaxial illumination system as well as other options, this lens series is versatile and ideal for extremely accurate gauging and inspection applications at various field of views (FOVs). Zoom Ratio 6:1.75x.5x Effective F No 8. Variable Aperture Focus Range +/- 3mm NA.12 (.5x) Working Distance = 7.9 mm ML-Z755HR ML-Z755HRD ML-Z755HRD-L ø8 ø ø35 ø (1-32UNF) 13.8 Adjustment ±.5 (1-32UNF) ø8 ø ø35 ø3 Zoom ring Zoom ring Aperture Adjustment Ring (O/I=33.9) (215.5) M3 Depth 5 Zoom ring Aperture Adjustment Ring ø M3 Depth 5 Aperture Adjustment Ring Lighting Insertion Connector for Light Guide ø1.2 ø M3 Depth 5 13 Lineup : 3 Models ML-Z755HR Coaxial Illumination Model D 9, Side View Model-L 13.8 Adjustment ±.5 Lighting Insertion Connector for Light Guide (O/I=33.9) (215.5) ø8 Focus Ring ±3 W.D. 7.9±2.1 ø36 ø3 8 (ø5) Focus Ring ±3 W.D. 7.9± ø36 ø3 8 (ø5) 19 8 (ø5) Model Magnification Range WD Focus Position Magnification Effective F No Depth of Field Resolution Optical Distortion NA Weight Largest Compatible CCD ML-Z755HR.75x ~.5x 7.9mm at.75x mm 7.5µm -.2%. A-313 ±3mm ML-Z755HRD at 2x 12.2mm.µm.1%.8 Approx. 65g 1/2'' A-31 ±2.1 ML-Z755HRD-L - at.5x 19.7mm 2.8µm.2%.12 A-315 * Effective F No indicates designed value when iris is open * Calculated based on permissible circle of confusion on the image-formation side:μm Mount Product Code L-36

37 Converter Lens (Optional) Attach to the end of the lens to change magnification and WD. None Model ML-Z25HR ML-Z3HR ML-Z5HR ML-Z75HR ML-Z135HR ML-Z2HR Focus Position Magnification Range WD Product Code Low High Near.75x ~.53x 7mm Middle.75x ~.53x 77mm Far.75x ~.53x 8mm Near.21x ~ 1.3x 21.5mm Middle.19x ~ 1.1x 23mm Far.16x ~.97x 299mm Near.25x ~ 1.52x 17mm Middle.23x ~ 1.36x 2mm Far.2x ~ 1.21x 237mm Near.39x ~ 2.38x 17mm Middle.38x ~ 2.27x 118mm Far.36x ~ 2.16x 131mm Near.57x ~ 3.6x 76.mm Middle.56x ~ 3.x 81.7mm Far.55x ~ 3.35x 87.1mm Near 1.x ~ 6.5x 37mm Middle 1.1x ~ 6.12x 38.6mm Far 1.2x ~ 6.17x mm Near 1.5x ~ 8.8x 17mm Middle 1.9x ~ 9.2x 18mm Far 1.53x ~ 9.25x 18.8mm A-316 A-317 A-318 A-319 A-315 A-3151 High Resolution Zoom Lens M L-Z755H R * Indicated values are based on caluculation and not guarranteed values. * When you used ML-Z25HR,ML-Z3HR,ML-Z5HR,ML-Z75HR,coaxial illumination does not cover entire view. HR Series Improves Resolution Conventional ML-Z755 NEW ML-Z755HR L-37

38 Telecentric Lens MML Zoom Lens Standard Zoom Lens ML-Z755 Series Standard Zoom Lens ML-Z755 Standard model zoom lens with outstanding functionality. Adjustment of magnification and working distance is possible through combination with optional optics. Magnification range :.75x~.5x (zoom ratio of 6:1) WD=9mm Includes a uniform coaxial illumination function that covers the entire view. Equipped with built-in focus adjustment function (WD can be adjusted to -6 mm) * Motorized zoom solution available. Manual Zoom Zoom with Coaxial Illumination Zoom with Coaxial Illumination & Deflection Function ML-Z755 ML-Z755D ML-Z755D-PL (22) Adjustment ±5 ø ø9 ø3 ø31 ø6 W.D 9 ± PCDø55 Points in Equal Intervals M3 (Securing Screw) UNF 5.9 -M3 Securing Screw P.C.D 55 ø19.5 Coaxial Fiber Input Connector (A Standard Product is Used) W.D 9 ±.5 ø ø3 ø9 ø31 ø Adjustment ± Adjustment ±5 ø ø3 ø9 ø ø PCD ø55 Points in Equal Intervals M3 (Securing Screw) Coaxial Fiber Input Connector 17 ø19.5 Focus Ring ± (A Standard Product is Used) WD 8 ±.5 ø6 All models equipped with focus, aperture, and zoom. Model ML-Z755 ML-Z755D Magnification Range.75x~.5x (Zoom Ratio of 6:1) WD 9±.5 ML-Z755D-PL 8±.5 Focus Position ~ -6mm Motor Option None Available (Manual Zoom) Magnification.75x time 2x time.5x time Effective F No Depth of Field Resolution Optical Distortion NA Operation Function mm.3mm 9.9μm 5.μm.2% or less.1% or less.3.6 All models equipped with focus, aperture, 28.1mm.2μm -.2% or less.8 and zoom. Largest Weight Compatible Mount Product Code CCD Approx. g A-118 Approx. 7g 1/2" A-119 Approx. 9g A-12 * Depth of field is calculated assuming a horizontal 2 TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. * Effective F No indicates a value when the iris is open. L-38

39 Standard Zoom Lens Options Front Converter Lens ML-Z Series Attach to end of lens to change magnification and working distance. Rear Converter Lens ML-Z2X Model Product Code ML-Z3 A-825 ML-Z A-826 ML-Z5 A-827 ML-Z7 A-828 ML-Z1 A-829 ML-Z2 A-83 Specially designed 2x rear converter. Mounting this between a lens and CCD camera can double the magnification easily without changing working distance. *May decrease the resolution. Model Product Code ML-Z2X A-836 ML-Z755 ML-Z755D Focus Magnification Magnification Model Matching Matching Position Range WD Range WD Chart Chart MIN MAX MIN MAX Near.2x ~ 1.3x 255mm.23x ~ 1.x 263mm ML-Z3 Middle.23x ~ 1.36x 283mm.22x ~ 1.33x 292mm Coaxial Illumination Cannot Far.21x ~ 1.28x 315mm.21x ~ 1.25x 325mm Cover the Entire View Near.31x ~ 1.87x 195mm.31x ~ 1.8x 2mm ML-Z Middle.3x ~ 1.81x 211mm.3x ~ 1.81x 216mm Coaxial Illumination Cannot Far.29x ~ 1.72x 229mm.29x ~ 1.72x 23mm Cover the Entire View Near.38x ~ 2.27x 16mm.37x ~ 2.25x 163mm ML-Z5 Middle.37x ~ 2.2x 17mm.37x ~ 2.21x 17mm Coaxial Illumination Cannot Far.36x ~ 2.2x 181mm.36x ~ 2.17x 185mm Cover the Entire View Near.52x ~ 3.17x 11mm.52x ~ 3.16x 115mm ML-Z7 Middle.53x ~ 3.16x 119mm.52x ~ 3.16x 121mm Coaxial Illumination Cannot Far.53x ~ 3.17x 125mm.52x ~ 3.16x 126mm Cover the Entire View Near 1.3x ~ 6.21x 53.mm 1.3x ~ 6.21x 53.8mm ML-Z1 Middle 1.5x ~ 6.33x 5.7mm 1.6x ~ 6.37x 55.1mm Far 1.8x ~ 6.9x 56.1mm 1.8x ~ 6.9x 56.5mm Near 1.5x ~ 8.77x 32.1mm 1.6x ~ 8.77x 32.3mm ML-Z2 Middle 1.9x ~ 9.1x 32.7mm 1.5x ~ 9.9x 32.9mm Far 1.5x ~ 9.26x 33.mm 1.5x ~ 9.35x 33.6mm *Magnification and working distance can be altered slightly by turning the focus adjustment ring (N F) Indicated values are based on calculation formulas. Actual measurement may differ depending on tolerance. Cannot be mounted on ML-Z755D-PL. ML-Z2X ø3 (knurl) ML-Z2X. Standard Zoom Lens Options Prism Adapter MML-P5 9 side view pentaprism type adapter. Monitor images are shown in an upright, normal position by the pentaprism. MML CCD Camera Model Product Code MML-P5 A-89 L-39

40 Telecentric Lens Accessory Prism Adapters Prism adapters make it possible to bend the optical axis at a right angle of 9, and to perform mark recognition for microscopic objects by modifying the pitch between 2 MML lenses to a fine pitch. 9 Side View Mirror Type Prism 9 Side View Mirror Type Prism for MML-HR MML-PL25HR When used in optical systems, images may blur or bend due to the strong effects of profile irregularity of prisms. A clear image can be acquired, however, even for HR type lenses with large NA by sorting and removing prisms with high profile irregularity during the QC process. MML- PL 25HR / MML- PL Exclusive MML-High Resolution Lens barrel diameter ø25 Length of inner optical path length 26.5mm MML-PL25HR Inner Optical Path Length ø M3 (For Securing Lens) M3 Hexagonal Socket Set Screw ( Screws Enclosed) ø Center of Field of View ± (Lens WD tan1.5 or less) ø25 MML-HR Series Model MML-PL25HR Specifications 9 Side View Mirror for HR For ø25 Product Code A Side View Mirror Type Prism MML-PL Series Using these prisms, the optical axis can be bent at a 9 right angle which is useful when space is limited. Resulting images become mirror images. MML-PL16 MML-PL18 MML-PL25 Inner Optical Path Length Inner Optical Path Length 2 ø Inner Optical Path Length 26 ø Inner Optical Path Length MML CCD Camera Center of Field of View ± (Lens WD x tan1.5 or less) ø M2.6 (For Securing Lens) M2.6 Hexagonal Socket Set Screw ( Screws Enclosed) Center of Field of View ± (Lens WD tan1.5 or less) ø M2.6 (For Securing Lens) M2.6 Hexagonal Socket Set Screw ( Screws Enclosed) Center of Field of View ± (Lens WD tan1.5 or less) ø M3 (For Securing Lens) M2.6 Hexagonal Socket Set Screw ( Screws Enclosed) WD Below Prism = Lens WD - Inner Optical Path Length Cover Glass MML-GA2 Model Compatible Sizes Inner Optical Product Path Length Code MML-PL16 For Lens 2mm A-8 MML-PL18 For ø18 Lens 2mm A-85 MML-PL25 For ø25 Lens 26mm A-86 MML-GA2 Cover Glass ø2 t=1mm A-862 L-

41 9 Side View Mirror Type Prism MML-P1,3, Resulting images become mirror images 33.5 MML-P1 For Lens *End of the Lens 25 MML-P5 MML Main Unit () 2 WD 15 Inner Optical Path Length 35.5 MML-P3 9 Side View Pentaprism Type Prism MML-P5,6,8 3-M2.6 Stopper Screw * End of the Lens 35 1 Resulting images are shown in an upright, normal position by the pentaprism. 5 Inner Optical Path Length 28.5 ø35 MML-P6 (ø25) ø18 Hole MML Main Unit *WD in the diagrams is the lens working distance minus the inner optical path length. For ø31 Lens 3-M3 Porcelain Screw (For Securing Lens) End of the Lens 6 ø31 ø For ML-Z755 ø15 Hole 25 WD Inner Optical Path Length 53 For ø25 Lens For Lens Depth WD 2 1 MML Main Unit *End of the Lens 6 Inner Optical Path Length.5 -M2.6 (For Securing Lens) WD *WD in the diagrams is the lens working distance minus the inner optical path length. ø9 * End of the Lens MML-P For ø3 Lens 3-M2.6 Stopper Screw Inner Optical Path Length 28.5 ø35 MML-P8 For ø12 Lens ø12 Depth MML Main Unit (ø3) ø18 Hole 21 WD 2 1 MML Main Unit *End of the Lens 6 Inner Optical Path Length.5 -M2.6 (For Securing Lens) WD ø9 Model Product Code MML-P1 A-81 MML-P3 A-82 MML-P A-83 MML CCD Camera Model Product Code MML-P5 A-89 MML-P6 A-81 MML-P8 A Side View Mirror Type Prism/ 9 Side View Pentaprism Type Prism/Variable Optical Axis Pitch Type MML- P1,3, / MML- P5,6,8 / MML- P2,7,9 Variable Optical Axis Pitch Type MML-P2,7,9 Mark recognition is possible for fine pitch between 2 points of microscopic objects. MML-P2 For Lens Pitch 1mm Type * End of the Lens 15 2 WD 3 MML Main Unit 3-M2 Stopper Screw 35 Inner Optical Path Length MML-P7 For Lens Pitch 5mm Type 2 MML Main Unit *End of the Lens WD ø9 Hole M2 Stopper Screw Inner Optical Path Length *WD in the diagrams is the lens working distance minus the inner optical path length. MML-P9 For ø12 Lens Pitch 5mm Type 2 MML Main Unit *End of the Lens WD ø9 Hole ø12 3-M2 Stopper Screw Inner Optical Path Length CCD Camera MML min Pitch 1mm 2mm Model Product Code MML-P2 A-817 MML-P7 A-818 MML-P9 A-819 L-1

42 Telecentric Lens Accessory Variable Optical Axis Pitch Type (Pitch 3mm) Variable Optical Axis Pitch Type (Pitch 3mm) MML-PP Series MML-PP16 MML-PP18 MML-PP25 -M2.6 M2.6 Hexagonal Socket Set Screw ( Screws Enclosed) Center of Field of View ± (Lens WD x tan2.5 or less) Inner Optical Path Length M2.6 M2.6 Hexagonal Socket Set Screw ( Screws Enclosed) Inner Optical Path Length ø ø M3 M3 Hexagonal Socket Set Screw ( Screws Enclosed) Inner Optical 5 Path Length Center of Field of View ± (Lens WD x tan2.5 or less) Inner Optical Path Length WD Below Prism = Lens WD - Inner Optical Path Length Optical Axis Pitch MML- PP Model Specification Inner Optical Path Length Optical Axis Pitch Product Code MML-PP16 For Lens 37.5mm 3mm A-82 MML-PP18 For ø18 Lens 37.5mm 3mm A-821 MML-PP25 For ø25 Lens 5mm 3mm A-822 MML-GA111 Cover Glass 1 x 11 t=1mm A-863 MML-GA1913 Cover Glass 19 x 13 t=1mm A-86.5 MML-GA1913 MML-GA111 Variable Optical Axis Prism MML-PP Series Field of View Vignetting Chart Because of its narrow-pitch design, the MML-PP Series is subject to vignetting. Since vignetting varies depending on the object, illumination etc., in the environment that the customer uses, the prism must be tested in the actual machine. *This is a calculated value only and is not guaranteed. For reference only. MML1-ST65D+1/2"CCD MML1-ST65D+1/2"CCD Field of View (Horizontal Field of View Divided into 2 Equal Sections) Model CCD MML8-ST65D/65 1/2" /3" MML1-ST65D/65 1/2" /3" MML2-ST65D/65 1/2" /3" MML-ST65D/65 1/2" /3" MML6-ST65D/65 1/2" /3" MML8-ST11D/11 1/2" /3" MML1-ST11D/11 1/2" /3" MML2-ST11D/11 1/2" /3" MML-ST11D 1/2" /3" MML6-ST11D 1/2" /3" MML8-ST11D 1/2" /3" MML1-ST15D/15 1/2" /3" MML8-ST17D/17 1/2" /3" Lowering of Light Quantity L-2

43 Variable Pitch Side View Prism MML-PSV16L/R Fine pitch and small space observation at a 9 angle are possible for alignment marks. Because of the prism's compact design, mm working distance lenses can also be used. MML-Standard for Variable Pitch Side View Prism Optical axis pitch 3mm Length of inner optical path length: 2mm WD=mm lens can also be attached MML-PSV16L MML-PSV16R POINT! Optical Axis Pitch One Side 3mm Application MML- PSV16L / R (3) (11.7) Center of Field of View 2-M2.6 ± (Lens WD tan2.5 or less) M2.6 Hexagonal Socket Set Screw (2 Screws Enclosed) (7.5) Inner Optical Path Length 2 (in air) (11.7) (3) Center of Field of View ± (Lens WD tan2.5 or less) 2-M2.6 M2.6 Hexagonal Socket Set Screw (2 Screws Enclosed) (7.5) Inner Optical Path Length 2 (in air) Model Specifications Optical Axis Pitch Product Code MML-PSV16R Side View Prism for ST Series (Right Side) One Side 3mm A-87 MML-PSV16L Side View Prism for ST Series (Left Side) One Side 3mm A-88 MML-PSV 16L/R Vignetting Reference Data Note that the MML-PSV16 is designed for fine pitch which may cause vignetting in a portion of the screen when observation is performed with a wide field of view. (Differences exist depending on the kind of lens or camera being used.) During inspection with a large field of vision, vignetting occurs in the area within the red box. Vignetting Area Inspection with a small field of vision L-3

44 Telecentric Lens Accessory Dual Field of View Prism / High Accuracy Two Fields of View Optical Unit Dual Field of View Prism MML-P2S16 2 different fields of view type for ML-PL Series. This half-mirror prism can be used to view two different field of views (FOV) on the same optical access. Same object with two fields of view, same field of view at different working distances, etc. Lens A should have a diameter of 16mm Model Specifications Product Code MML-P2S16 ST Series, 2 field of views (FOV) prism for mm A-812 Lens A MML- P2S16 / ML-2PLBOX MML-P2S16 2-M3 M3 Hexagonal Socket Set Screw 5 Inner Optical Path Length B 13 (In Air) Low Magnification High Magnification Alignment Two Focus Point Alignment Small Field of View Large Field of View Focal Position A Large Field of View Rough Alignment Focal Position A Small Field of View Fine Alignment Focal Position B 18 Inner Optical Path Length A 13 (In Air) Focal Position B High Accuracy Two Fields of View Optical Unit ML-2PLBOX Made-to-order Two field of views and two focus points can be observed using two lenses & cameras. MORITEX adjusts CCD cameras and optical units to positions desired by customers to provide support to meet specific customer requirements for lenses and illumination, condition of optical units, etc. These adjustments and quality inspection ensure high accuracy of mounted components and the resulting images. MORITEX performs adjustment and inspection to ensure high accuracy CCDs, prisms and lenses. MML-ST11mm Center Position Accuracy ±(Lens WD Tan1.5 ) MML-ST65mm Rotation Alignment Accuracy Relative Position Within ±.5 L-

45 High Accuracy Two Fields of View Optical Unit ML-W1 Coaxial L-Shaped Adapter MML-AD-L By connecting to a len's coaxial input, illumination can be inserted at right angles. A very convenient adapter for small spaces. MML-AD-L Made-to-order High Accuracy Two Fields of View Optical Unit / Coaxial L-Shaped Adapter ML-W1 / MML- AD - L C2 M3- Hexagonal Socket Set Screw to Secure a Lighting M3 Type Threads on Opposite Side in Same Position ø1.2 ø8 +.5 (MML Lens) (ø5) (Fiber Bundle Diameter) ø1 ø () (3) Model Specifications Product Code MML-AD-L L-Shaped Coaxial Adapter A-89 L-5

46 Telecentric Lens Custom Examples Total Optical Illumination System Infrared & Visible Ray Transmission System Total Optical Illumination System IR Camera Infrared Lens Si Visible Light Camera Visible Light Lens Interposer A complete lens and lighting system which uses infrared rays to transmit through a Si, GaAs, or Ge substrate to recognize IR penetration patterns. Top and Bottom Dual Field Optical System (2CCD Type) MML CCD CCD A space-saving optical system for attaching 2 opposite-facing objects with accuracy. MML Twin-View, Dual Magnification/Twin-View, Dual Focal Optical System Low Magnification Side / Upper CCD High Magnification Side / Lower CCD A space-saving optical system that is used to simultaneously observe an object at two focus distances, and two magnifications on one optical path utilizing a specific prism structure. Various OEM applications are available with combinations of more than 1 standard products and lights. Please contact us with inquiries. L-6

47 Non-Telecentric Lens Non-Telecentric Lens Macro Lens ML-N Series WD=9mm Series These short, compact nontelecentric lenses with high performance and reasonable cost are an alternative to our MML and CCTV lenses for alignment and inspection applications. Macro Zoom Lens ML-Z18 ML-31VF MLH Series The Macro Zoom Lens Series are flexible, quality lenses with a number of options that can be used for a variety of vision applications. CCTV Lens MTE-55 ML-MP3 Series ML-MP Series ML Series The most common machine vision lenses, we offer Standard, Megapixel (ML-MP), 3 Megapixel (ML-MP3) and a telecentric CCTV lens models. L-7

48 Non-Telecentric Lens Macro Lens Non-Telecentric Macro Lens ML-N Series Non-Telecentric Macro Lens ML-N Series lenses were developed to be compact, high performance models. Based on many years of experience producing MMLs (Machine Micro Lens), MORITEX adopted the non-telecentric optical system as the lens design for this series. By limiting the number of lenses in each layer to less than 3, we have succeeded in developing high performance models at reasonable prices. Magnification and working distances can be tailored to your needs by using an optional close-up ring adapter. Compact body of ML- N High resolution, low optical distortion Reasonable prices Best matching with peripherals Model Magnification WD Resolution Depth of Field Effective F No Optical Distortion Largest Compatible CCD Weight Mount (Sold Separately) Product code ML1-327N.1x 327.7mm 33.9μm 37.66mm.71.% or less 1/2 1g A-133 ML3-181N.3x 181.3mm 1.6μm 5.3mm % or less 1/2 15g A-13 ML5-132N.5x 132.5mm 11.7μm 1.95mm 6.8.8% or less 1/2 18g A-131 ML5-25N.5x 25mm 13.3µm 2.27mm 7.1.6% 1/2 9g A-135 ML1-89N 1.x 89.6mm 7.9μm.7mm 8.82.% or less 1/2 15g A-132 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. Magnification conversion table ML1-327N ML3-181N ML5-132N ML5-25N ML1-89N Close-Up Ring Thickness mm 1mm 2mm 5mm 7mm 1mm 15mm 17mm 2mm Magnification.1x.13x.17x.27x.33x.3x.6x.67x.77x WD 327.7mm 253mm 2mm 138.8mm 118.6mm 97.5mm 77.7mm 72.5mm 67.2mm Magnification.3x.32x.35x.2x.7x.5x.65x.7x.77x WD 181.3mm 17mm 162mm 1.7mm 131mm 119mm 1.6mm 1mm 9.6mm Magnification.5x.53x.55x.62x.66x.73x.85x.9x.97x WD 132.5mm 128.mm 125mm 116.3mm 111.3mm 15.2mm 97.mm 9.2mm 91mm Magnification.5x.51x.52x.56x.58x.62x.68x.71x.7x WD 25mm 26mm 22.3mm 232mm 225.8mm 217.5mm 25.6mm 21.5mm 195.7mm Magnification 1x 1.2x 1.5x 1.12x 1.16x 1.2x 1.35x 1.x 1.7x WD 89mm 88mm 87mm 85mm 83.5mm 81.5mm 78.5mm 77.3mm 75.9mm L-8

49 ML1-327N ML3-181N ML5-132N ø3 1/2 CCD ø3 1/2, 1/3 CCD 2 ø3 1/2 CCD O/I 36.5 W.D ±16. ML5-25N -.1 C -mount 1.5 O/I 2.9 W.D ± ML1-89N 2 ø3 O/I W.D /2 CCD -.1 Non-Telecentric Macro Lens (O/I = 382.3) 11.8 ø M3 3 Hexagonal Socket Head for Adjustment of Camera Position O/I W.D ML- N W.D. 25±7.5 ø3 -.1 The magnification can be changed by using the ML-EXR Series close-up ring. Reference magnification and WD data for close-up ring combinations 35mm 3mm ML1-327N WD 25mm 2mm 15mm 1mm ML3-181N ML5-25N ML5-132N 5mm ML1-89N mm x.2x.x.6x.8x 1x 1.2x 1.x 1.6x Magnification L-9

50 Non-Telecentric Lens Macro Lens Low Magnification Macro Lens WD=9mm Series Low Magnification Macro Lens Small, high-resolution macro lenses to be mounted directly on machines. WD=9mm for all models. WD = 9mm ML-151 ML-23 ML-355 ML-51 ø32 ø1 ø32 ø32 ø32 5 (5.6) ø28 ø28 WD 9 WD 9 WD 9 ø2 ø28 M22.5 P.5 (Depth 3) WD 9 ø2 ø28 M22.5 P.5 (Depth 3) Model Magnification Effective F No WD Depth of Field Resolution Optical Distortion Weight Largest Compatible CCD Mount Product Code ML-151.1x.6 9mm 18mm 36μm.1% or less 28g 2/3" A-127 ML-23.3x 7.3 9mm 6.5mm 21μm.1% or less 39g 2/3" A-128 ML-355.5x 8. 9mm 2.7mm 13μm.1% or less 55g 2/3" A-129 ML-51 1x 8 9mm.6mm 6.3μm.1% or less 68g 2/3" A-13 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-5

51 High Performance Macro Zoom Lens ML-Z18 High performance macro lens with 8:1 magnification ratio and long working distance. By using the focus ring on the end, working distance can be changed within a range of 2mm. Zoom ratio of 8:1. Magnification range of.1x~.8x WD=213mm Focus adjustment ±2mm (magnification variation ±13%) Iris, focus, and zoom are adjustable. Equipped with locking screws. High Performance Macro Zoom Lens ML-Z18 ML-Z18 ø32 ø3 -.1 ø28.5 Range that the Lens Is Held WD 213± ø28 ø3 Aperture Adjustment Ring Zoom Ring The Lens Cannot be Held WD Adjustment Ring (Adjustment: ±1mm) Filter Mounting Screw M22.5 P.5 (Note 1) Model Magnification WD Focus Position Motor ML-Z18.1x to.8x (Zoom Ratio of 8:1) 213mm Without (Manual Zoom) Effective F No Depth of Field Resolution Optical Distortion at.1x 8.2 at.x 2.1mm 1μm.18% or less at.8x 9.3.6mm 8μm.17% or less Operation Function 32.8mm 55μm -.2% or less Manual (Adjusting Aperture, Zoom, and Focus) Weight Largest Compatible CCD Mount Product Code 1g 1/2" A-155 * Depth of field is calculated assuming a horizontal 2TV resolution using a 1/2" CCD camera. (Permissible circle of confusion on the image-formation side: μm) * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-51

52 Non-Telecentric Lens Macro Zoom Lens Varifocal Lens for Large Image Format ML-31VF Varifocal Lens for Large Image Format M L- 31V F Varifocal lens with optimized magnification and working distance for FA. The key features of this lens are the support of large, up to 1.2" CCD elements and the varifocal, variable magnification for wide field of views. This lens is great for high speed and high resolution image recognition. Supports camera format of up to 1.2 max. (15.15mmx15.15mm) Varifocal magnification variation of.3x~1x Equipped with variable aperture Equipped with screws to lock movable parts for FA Wide wavelength transmission Chart for Field of View According to CCD Element Size WD Magnification 31VF VF3 1/3 (3.6x.8) 1/2 (.8x6.) 2/3 (6.6x8.8) 1.1 (12x12.3) 1.2 (15.15x15.15).1x - 1.5mm 36x8 8x6 66x88 12x x x mm 2x32 32x2.7 x58.7 8x82 11x11.2x mm 18x2 2x32 33x 6x x x mm 1.x x x35.2 8x x6.6.3x 13mm 155.8mm 12x16 16x21 22x29.3 x1 5.5x5.5.x 11mm 127.1mm 9x12 12x x22. 3x x37.9.5x 97mm 113.mm 7.2x x x17.6 2x x3.3.6x 87mm 17.2mm 6x8 8x1.7 11x1.7 2x x x 83mm 16.mm 5.5x7. 7.x x x x23.3.7x 81mm - 5.1x x9.1 9.x x x21.6.8x 77mm -.5x6 6x8 8.3x11. 15x x18.9.9x 76mm - x x x x x16.8 1x 75mm - 3.6x.8.8x6. 6.6x8.8 12x x15.2 Optical Specifications Model Magnification WD Resolution Depth of Field Optical Distortion.3x 13.5mm 15.3μm 6.mm.7% or less ML-31VF.65x 83.2mm 8.8μm 1.6mm.2% or less 1.x 75.2mm 7.1μm.7mm.1% or less Weight Approx. 18g Mount (Sold Separately) Compatible Camera Size Supports Maximum size of 1.2" (15.15mmx15.15mm) Product Code A-3127 Option Proxar Lens Model Magnification WD Resolution Depth of Field Optical Distortion Product Code.1x 1.mm.μm 5.mm -.1% or less ML-VF3.37x 133.mm 15.3μm.9mm -.6% or less A-83.65x 16.3mm 1.8μm 2.mm -.3% or less * Calculated from permissible circle of confusion diameter of μm. * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-52

53 ML-31VF ML-VF3 13.5(at.3X) 75.2(at 1.X) ø 23 M3.5X (23.2).3x 13 ML-31VF Examples of Field of View 1/2 CCD at.3x 1.2 CCD at.3x O ø21.6 ø3 ø ø2 ø6 Transmission ø27 ø38 M3.5 Depth ML-VF3 Chart for Spectral Transmission *Simulation Values for Transmission of AR Coat + Material XXXXXXXX M3.5.5 Varifocal Lens for Large Image Format M L- 31V F mm 5.5mm Wavelength [mm] Benefits of Using a Large Element Camera Achieves a large field of view with one camera Bright pictures due to large pixel size L-53

54 Non-Telecentric Lens Macro Zoom Lens Mega Pixel Macro Zoom Lens MLH-3XMP Mega pixel Macro Zoom Lens / 1x Zoom Lens This high-performance macro zoom lens supports CCD cameras of the 1 million pixel class. The zoom range is.3x~1x by optical magnification. The resolution of 1/mm or more is realized at the center and periphery of the entire zoom range. Combination with a mega pixel CCD realizes wide-range image recognition with excellent contrast. Zoom: Optical magnification of.3x~1x WD=9mm Variable focus Variable iris Effective NO.5~Close Equipped with screws to lock movable parts (Zoom, focus, and iris) Maximum compatible camera format ~2/3 C mount MLH-3XMP Zoom Ring Focus Ring M3 P=.5 ø36 9 ø36.5 (77.5) Iris Ring U1-32UNF ø35.5 FB (IN AIR) Model Magnification WD Aperture (F No) Filter Screw Weight MLH-3XMP.3x to 1x (Manual Zoom) 9mm F.5~Close M3 P=.5 15g Largest Compatible CCD 2/3" Camera Mounts Product Code A-22 MLH -3XMP / MLH -1X 1x Zoom Lens MLH-1X A wide zoom ratio lens developed for large field of view imaging. Zoom ratio of 1:1 at a working distance of 15mm to 5mm by adjusting the focus. This lens can be used for FA, laboratory work, weak eyesight correction, and environment-related projects. Zoom ratio of 1:1 (Magnification range:.8x(min)~.8x(max)) WD=5mm(min)~15mm(max) Iris, focus, and zoom are adjustable. Equipped with locking screws. MLH-1X ø6 ø ø8 Chart for Field of View Field of View WD Magnifications 1/2 (Length mm x Width mm) 1/3 (Length mm x Width mm) 15mm.86x ~.8x 55.8 x 7. ~ 5.7 x x 56 ~.3 x 5.7 2mm.6x ~.58x 8 x 17 ~ 8.3 x 11 6 x 8 ~ 6.2 x mm.5x ~.x 17 x 12 ~ 1.9 x x 17 ~ 8.2 x 1.9 3mm.37x ~.36x 13 x 173 ~ 13.3 x x 13 ~ 1 x mm.31x ~.3x 155 x 26 ~ 16 x x 155 ~ 12 x 16 mm.2x ~.25x 185 x 26 ~ 19.2 x x 185 ~ 1. x mm.23x ~.22x 29 x 278 ~ 21.8 x x 29 ~ 16. x 21.8 Model MLH-1X Magnification.8x to.8x (Zoom Ratio of 1:1) WD 15~5mm Iris F5.6~Close Filter Size M6 P=.75 Weight 233g largest Compatible CCD 1/2" Camera Mount product Code A-19 L-5

55 Telecentric CCTV Lens MTE-55 The MTE-55 lens adopts F2.8/ f-55mm telecentric optical system that reduces angle and magnification errors when observing objects. Accurate telecentric performance is achieved when combined with the optional lens MTE2 with at a magnification of.x ~.9x. Although no telecentric effect is achieved at the magnification of infinity ~.x, it is designed to correct aberrations far better than regular lenses. Model MTE-55 Magnification Infinity to.5x (when dedicated converter is used. 1.x at max) Focal Distance f 55 F No 2.8~close Photographing Distance Infinite to 1mm Oprical Distortion.6% at max Marginal Light Quantity 78.5% Mount Filter Size M3 P.75 Largest Compatible Camera 2/3" Weight 32g Product Code A-212 Chart for Field of View by CCD Camera Size (MTE-55) WD 2/3" (Length x Width) 1/2" (Length x Width) MTE-55 1/3" (Length x Width) Optical Magnification 5 55x733 15x55 3x x x 2x32 17x22 x x176 9x12 61x82 x x73 x53 3x x x1 2x32 17x22 x x29 15x2 11x15 x x18 1x13 7x1 x.8 MTE-55 ø53 ø ( ) 92.9 (.5 ) ø3 FB Telecentric CCTV Lens MTE-55 Options x2 Converter Lens MTE2 Dedicated x2 Converter Lens Product Code MTE2 A-883 MTE2 x.75 Converter Lens MTE75 Dedicated x.75 Converter Lens Product Code MTE75 A-88 MTE75 C-mount C-mount M ø3 ø FB FB Chart for Field of View by CCD Camera Size(MTE-55+MTE2) WD 2/3" (Length x Width) MTE-55 +2xConverter Lenses (MTE2) 1/2" (Length x Width) 1/3" (Length x Width) Optical Magnification 5 275x366 27x275 15x2 x x22 12x16 85x11 x. 1 66x88 5x6 3x1 x x36 2x26 15x2 x x2 12x16 8x11 x x1 7x1 5x7 x.6 1 6x9 5x6 3x5 x.9 Chart for Field of View by CCD Camera Size(MTE-55+MTE75) WD 2/3" (Length x Width) MTE xConverter Lenses (MTE75) 1/2" (Length x Width) 1/3" (Length x Width) Optical Magnification 5 733x x733 x533 x.9 3 x586 32x26 226x293 x x23 12x16 81x19 x x97 53x7 x53 x.9 3 1x5 32x2 22x29 x x38 2x26 1x2 x x2 13x17 9x13 x.36 L-55

56 Non-Telecentric Lens CCTV Lens 3 Mega Pixel CCTV Lens ML-MP3 Series 3 Mega Pixel CCTV Lens ML- MP3 The ML-MP and ML-MP3 Mega Pixel CCTV Series are lenses developed for wide view image recognition with higher definition. The ability of the lenses to realize a resolution of higher than 1lp/mm both at the center and periphery when imaging at close distances is a particularly strong feature. In combination with a mega pixel camera, imaging with higher resolution and contrast than conventional CCTV lenses is achieved. With all models, the variable iris and focus can be set with locking screws as needed (*1). The lenses also support small FOV imaging when combined with close-up rings and rear converter lenses (*2). The 3 Mega Pixel (ML-MP3) Series is our newest lineup of high end CCTV lenses addressing the needs of applications using high pixel count image sensors. High resolving power of 3 mega pixels or higher Supports 2/3" lenses Close distance (.2 meters or greater) design suitable for machine vision Low distortion :.1% or less High image quality through improved marginal light quantity ratio Includes focus lock screws and iris lock screws Lens OD: 29mm Uniform filter mount M27 P.5 (*1) Vibration resistance is not considered in design. (*2) If a close-up ring and a rear converter lens are used, individual differences in product performance, or image deterioration occurs due to an enlargement of lens tolerance. (Images must be checked when using the lenses. Contact us if uncertain.) Note: Product performance is guaranteed only if the product is used without additional attachments. Support for Special Orders Fixed Aperture / Focus Lock Type ML-M162MP3 ML-M2518MP3 ML-M352MP3 ML-M528MP3 Focus Ring M27.5 Iris Ring (IN AIR) Focus Ring M27.5 Iris Ring (IN AIR) Focus Ring M27.5 Iris Ring (IN AIR) Focus Ring M27.5 Iris Ring (IN AIR) ø28.5 ø28.5 ø2 ø28.5 ø (33.5~36.8) 36. (36.~.7) (.9) 37.3 (37.3~.6) 5. (5.~52.7) Model Focal Distance F No Field of View(HxV) Closest Distance Filter Screw Weight Largest compatible CCD Mount Product Code ML-M162MP3 16mm F x 3.7.2m M27 P.5 53g 2/3" C mount A-229 ML-M2518MP3 25mm F x m M27 P.5 6g 2/3" C mount A-23 ML-M352MP3 35mm F x 1.3.2m M27 P.5 59g 2/3" C mount A-231 ML-M528MP3 5mm F ,5 x 1..2m M27 P.5 69g 2/3" C mount A-232 L-56

57 C Mega Pixel CCTV Lens ML-MP Series Compact CCTV lenses with high resolution design for use with 1 mega pixel or higher count sensors. Lineup of 6 models (f = 5~5mm) Compatible with mega pixel cameras Variable focus and iris Equipped with screws to lock movable parts (focus and iris) Maximum compatible camera format ~2/3 C mount Mega Pixel CCTV Lens ML- MP ML-H51MP ML-M81MP ML-M121MP ML-M161MP Index Ring Focus Ring M3 P.75 Iris Ring 1/32 UNF () Index Ring Focus Ring M3.5 P.5 Iris Ring 1/32 UNF () Index Ring Focus Ring M3.5 P.5 Iris Ring 1/32 UNF () Index Ring Focus Ring M3.5 P.5 Iris Ring 1/32 UNF () (3) ML-M251MP ML-M351MP ML-M518MP ML-M7528MP Index Ring Focus Ring M3.5 P.5 Iris Ring 1/32 UNF () ø33.5 ø32 ø32 ø.5 ø2 ø (5.5~6.8) (.6) 28.2 (28.2~29.5) (6.2) (IN AIR) ø33.5 ø ø32 ø33.5 ø32 ø32 ø33.5 ø32 ø18 ø32 ø33.5 ø32 ø18 ø32 (.8) 28.2 (28.2~29.5) Index Ring Focus Ring M3.5 P.5 Iris Ring 1/32 UNF () (1.2m) 53.5( ) (IN AIR) (1.35) ( ) ø35 ø32 C ø17.5 ø32 ø33.5 ø32 ø18 ø32 (.9) 28.2 (28.2~29.5) 36 (36~.9) (1.1) (.9) 38.2 (38.2~3.1) 1.2 Model Focal Distance F No Field of View(HxV) Closest Distance Filter Screw Weight Largest compatible CCD Mount Product Code ML-H51MP 5mm F C 51. x m M3 P.75 17g 1/2" C mount A-31 ML-M81MP 8mm F C 3.7 x m M3.5 P.5 7g 2/3" C mount A-221 ML-M121MP 12mm F C 3.8 x..15m M3.5 P.5 65g 2/3" C mount A-222 ML-M161MP 16mm F C 23. x 3.8.3m M3.5 P.5 65g 2/3" C mount A-223 ML-M251MP 25mm F C 15.1 x 2.3m M3.5 P.5 75g 2/3" C mount A-22 ML-M518MP 5mm F1.8-16C 7.9 x 1.5.5m M3.5 P.5 9g 2/3" C mount A-225 L-57

58 Non-Telecentric Lens CCTV Lens CCTV Lens ML Series CCTV (Closed Circuit Television) lenses were developed to recognize images in a wide field of view. With all models, the variable iris and focus can be set with locking screws as needed. (*1) The lenses also support micro imaging in combination with close-up ring and rear converter lenses. (*2) A wide range of products from f=6mm to 1mm. (*1) Vibration resistance is not considered in design. (*2) Image quality may be distorted with enlargement of lens tolerance. Variable focus and iris equipped with lock screws. Camera mount: C mount CCTV Lens ML-61 ML-813 (3.5) ML ML ø3 ML-161 ML-251 ML ø3.3 M27.5 ML-518 ML-7527 ML ø32 M3.5.5 ø3 M27 P.5 ø3.3 M27.P=.5. Focus Iris (29) (3.9) ø32 M3.5, P=.5 ø2.5. ø3.3 ø17.5 ø3 ø28 M25.5 P.5 TV LENS 8mm1:1.3 1 m B ø UNF C M ø32 M3.5, P=.5 ø2.5. Model Focal Distance F No Field of View(HxV) Closest Distance Filter Screw Weight Largest compatible CCD Mount Product Code ML-61 6mm F1. - close 2.3 x 5.6.2m M27 P.5 6g 1/2" C mount A-198 ML-813 8mm F1.3 - close 5. x m M25.5 P.5 6g 2/3" C mount A-199 ML mm F1. - close 21.9 x 29..3m M27 P.5 6g 1/2" C mount A-2 ML mm F1. - close 23. x 3..m M27 P.5 g 2/3" C mount A-21 ML mm F1. - close 21.6 x m M27 P.5 5g 1" C mount A-22 ML mm F1.9 - close 1.8 x 1..5m M27 P.5 5g 2/3" C mount A-23 ML-518 5mm F1.8 - close 7.9 x 1.5 1m M3.5 P.5 6g 2/3" C mount A-2 ML mm F2.7 - close.9 x 6.5 1m M3.5 P.5 65g 2/3" C mount A-25 ML-135 1mm F3.5 - close 3.8 x 5.1 1m M3.5 P.5 65g 2/3" C mount A-26 L-58

59 Field, WD, and Magnification when a Close-Up Ring is Used Close-Up Ring Field of View (Length x Width) ML-61 ML-813 ML-121 Field of View Field of View Field of View Field of View (Length x Width) WD Magnification (Length x Width) (Length x Width) WD Magnification (Length x Width) 1/2 1/3 1/2 1/3 1/2 1/3 Field of View (Length x Width) WD Magnification 165 x x x 96 x x x 13 x x x x x 3.11x 3 x x x 55 x 73 1 x x 6 x 79 5 x x 77 x x x 119 x x x 25 x 3 19 x x 27 x x x 38 x 5 28 x x 3 x 22 x x 38 x x x 59 x 79 5 x x 2 x x x 29 x x x 26 x 3 19 x x x 53 3 x 85.12x 23 x x x 3 x 22 x x Close-Up Ring Field of View (Length x Width) ML-161 ML-251 ML-3519 Field of View Field of View Field of View Field of View (Length x Width) WD Magnification (Length x Width) (Length x Width) WD Magnification (Length x Width) 1/2 1/3 1/2 1/3 1/2 1/3 Field of View (Length x Width) WD Magnification 19 x x x 87 x x x 66 x 87 9 x x x 86 8 x x 6 x 85 8 x x 55 x 73 1 x x 156 x x x 22 x x x 335 x x x 5 x 61 3 x x 5 x x x 7 x x x 78 x 1 58 x x 121 x x x 168 x x x 35 x 7 26 x x 2 x x x 1 x x x 52 x x x 81 x 17 6 x x 112 x 19 8 x x 29 x x x 36 x 7 27 x x 37 x 9 28 x x 39 x x x 6 x 81 5 x x 8 x x x 1 x 18 1 x x 19 x 25 1 x x 22 x 3 17 x x 16 x x x 2 x x x 3 x 5 25 x x 7.3 x x x 11 x 1 8. x x 13 x 18 1 x x 7.8 x x x 12 x x x 17 x x x 7. x x x 9.5 x x x 8.1 x x x 11 x x x 5.6 x x x 7. x x x 6. x x x 8. x x x 6.1 x x x 6.7 x x x CCTV Lens ML ML-518 ML-7527 ML-135 Close-Up Field of View Field of View Field of View Field of View Field of View Field of View Ring (Length x Width) (Length x Width) WD Magnification (Length x Width) (Length x Width) WD Magnification (Length x Width) (Length x Width) WD Magnification 1/2 1/3 1/2 1/3 1/2 1/3 9 x x x 6 x 8 5 x 6 1.8x 6 x x 6 1.1x x 76 3 x x 15 x x x 2 51 x x x 3 x x x 115 x x x 18 x x x 5 31 x 1 23 x x 3 x 23 x x 27 x x x 6 x x x 7 x x x 95 x x x 1 18 x 25 1 x x 2 x x x 19 x x x 23 x x x 37 x 9 28 x x 8 x x x x 18 1 x x 15 x 2 11 x x 15 x 2 11 x x 15 x x x 25 x x x 32 x 2 2 x x 2 1 x x x 12 x 16 9 x x 12 x 16 9 x x 12 x x x 18 x 25 1 x x 2 x x x x x x 1 x x x 1 x 1 8 x x 9.2 x x x 15 x 2 11 x x 19 x 25 1 x x x x x 8.7 x x x 9. x x x 7.7 x x x 12 x x 12.39x 16 x x x x x x 7.6 x x x 7.9 x x x 6.6 x x x 11 x x x 1 x 18 1 x x 5. x x x 6.7 x x x 7.1 x x x 5.8 x x x 9.2 x x x 12 x x x x x x 6. x x x 8.2 x x x 11 x x x x 7..1 x x 5.8 x 7.8. x x 7. x x x 9.5 x x x 6 5. x x 5..97x 7.9 x x x Indicated values are based on calculation and actual measurements may differ. Use values as a reference. Accuracy of the products is guaranteed only when used without additional attachments. Please note that when using in combination with a close-up ring or other equipment Working distance and image will be distorted due to enlargement of the lens tolerance. L-59

60 Non-Telecentric Lens Accessory Rear Converter Lens ML-X Attaching these lenses between a CCTV lens and a CCD camera enables the adjustment of magnification without changing the working distance of the system. *May decrease the resolution. Rear Converter Lens ML-X Model Product Code ML-1.5X A-89 ML-2X A-891 ML-2.5X A-892 ML-3X A-893 ML-X A-89 Configuration Lens Rear Converter Lens CCD Camera ML-1.5X ML-2X ML-2.5X ø3 ø3 Knurl ø3 Knurl ø21. ML-3X ø3 ML-X ø ø L-6

61 9 Mirror Prism ML-MLC Fully supports CCTV M25.5, 27, and 3.5. Equipped with screws to attach filters. 9 Mirror Prism Model Product Code ML-MLC A-81 ML- MLC ML-MLC M2 Hexagonal Places CCTV Attachment Bracket ML-MLC M3.5.5 Serial Number Label M Filter Plate (Detachable) Type M2 Pan Head Screw Not Yet Attached 3 CCTV Attachment Bracket M25.5, M27 Included Filter Attachment Screw M3.5 Illumination Bracket MLA-DR31M35 MLA-SCM35 CCTV Attachment Screw 2 types included for use with M25.5 and M27 Color Filter ML-R6-3 ML-R6-3 Cover Glass ML-GA35 32 M27.5 M Polarizer Filter ML-PL L-61

62 Non-Telecentric Lens Accessory / SOD-III Options for CCTV Lenses Glass Covers Polarizers (Analyzers) Ring Illumination Attachment Adapters ML-GA Series ML-PL Series ML-FL Series Options for CCTV Lens A cover glass adapter for preventing the adhesion of dirt and foreign objects to the lens surface. Options A polarizer (analyzer) adapter with revolution function for suppressing glare from objects and localized flare when used as a set with polarizer illumination. Ring illumination adapter ML-FL. ML- GA / ML- PL / ML- FL / ML- E XR Screw Pitch Model Product Code Model Product Code Model Product Code Glass Covers ML-GA255 A-859 ML-GA27 A-86 ML-GA35 A-861 Polarizer ML-PL255 A-867 ML-PL27 A-868 ML-PL35 A-869 Polarizer (With ) ML-PL255LB A-313 ML-PL27LB A-3131 ML-PL35LB A-3132 Red Filter ML-R6-25 A-831 ML-R6-27 A-832 ML-R6-3 A-833 Sharp Cut Filter ML-R6-25 A-955 ML-R6-27 A-956 ML-R6-3 A-957 Close-Up Ring ML-EXR Close-Up Ring ML-EXR Series Used when using the CCTV lens at a close distance or when enlarging the magnification. See comparison table on page P.L-63 for the field of view, working distance, and magnification when close-up ring is attached. Model Remarks Product Code ML-EXR Set of 7 (.5, 1, 2, 5, 1, 2, ) A-81 ML-EXR5.5mm A-811 ML-EXR1 1mm A-812 ML-EXR2 2mm A-813 ML-EXR5 5mm A-81 ML-EXR1 1mm A-815 ML-EXR15 15mm A-816 ML-EXR2 2mm A-817 ML-EXR25 25mm A-818 ML-EXR3 3mm A-819 ML-EXR mm A-811 ML-EXR5 5mm A-8111 ML-EXR1 1mm A-8112 ML-EXR152 Variable Type (15 to 2 mm) A-8113 ML-EXR32 Variable Type (3 to 2 mm) A-811 L-62

63 Coaxial Epi-illumination Unit for Objective Lens SOD-III Series The SOD-III is an optical unit used for coaxial illumination with objective lenses. If you are using a metallurgical microscope, this unit is effective for image input because it produces video of the same level. It is designed for infinity corrected objective lenses (bright vision) and can be used with the lenses listed below. In addition to the monocular type, the 5-hole revolver type (manual and electric) is available, which can be mounted with 5 objective lenses, Compact design Compatible with various bright field lenses Enables horizontal and various other kinds of mountings Coaxial Epi-illumination Unit for Objective Lens Model Product Code SOD-III A-171 SOD-III -M3 Depth ø32 MSG-11S, etc. ø8 35 ø3 ø3 11 SOD - III L N/O:L=6.5 M:L=7.5 ø33 Compact Objective Lens Mitsutoyo Model NA WD Product Code M Plan Apo 2 x.55 3 A-8132 M Plan Apo 5 x.1 3 A-8133 M Plan Apo 1 x A-813 M Plan Apo 2 x.2 2 A-8137 M Plan Apo SL 2 x A-8135 M Plan Apo SL 5 x A-8136 Nikon Model NA WD Product Code CF IC EPI Plan 2.5 x A-813 CF IC EPI Plan 5 x A-81 CF IC EPI Plan 1 x A A-818 CF IC EPI SLWDPlan 1 x A A-815 CF IC EPI SLWDPlan 2 x A A-816 CF IC EPI SLWDPlan 5 x A A-817 L-63

64 L-6 Non-Telecentric Lens

65 Line Scan Lens for Line & Large Format Sensors Line Scan Lens for Line & Large Format Sensors With the increasing number of line scan and large format applications, we have continued to expand our product offering beyond the compact telecentric lenses that have become an industry standard for area scan applications. We offer an assorted range of lens solutions designed for large format high resolution line and area scan cameras used for Glass, Web, TFT inspection and other applications which call for a high performance and low distortion lens. Our models support line image sensors from 2k to 12k with models compatible up to 9 mm wide and a pixel pitch of down to 5 μm. Image Format 9 mm Up to 9mm 82 mm 62 mm 58 mm 35 mm Up to 82mm Up to 62mm Up to 58mm Up to 35mm Compatible Camera Pixel 5µm 7µm 1µm 5μm/Pixel 7μm/Pixel 1μm/Pixel L-65

66 Line Scan Lens NEW Line Scan Lens for 3 Color Line Sensor 82 mm 1µm ML-F8C-25 Line Scan Lens for 3 Color Line Sensor Designed to address the challenges of color line scan applications, this new low-magnification line scan lens features RGB chromatic aberration correction to provide excellent performance for line sensors up to 82mm. By utilizing flange focal distance magnification control, magnifications of.2x.5x are achievable over varying working distances without the added cost of a complex zoom system. Although this lens can be used for a wide-range of monochrome line sensor applications, the minimization of axial chromatic aberration and chromatic aberration of magnification make it ideal for high end LCD glass inspection, patterned wafer inspection, and web printing applications that call for a high performance, low distortion lens with minimal peripheral brightness fall-off for use with a 3 CCD color sensor. Magnification adjustable.2 to.5x with flange focal distance adjustment Designed with RGB chromatic correction ML- F8C- 25 Maximum applicable sensor size: 82mm Variable iris ML-F8C-25 Magnification Range Magnification control between.2x and.5x can be done by adjusting the flange focal distance ø5 ø5 M.5x.5 ø8 Field of View WD FFD : Flange-Focal-Distance CCD Sensor Serial No. label M39x1 O/I : Object to Image Specifications at Different Magnifications Magnification WD Field of View* ø O/I FFD.2x x x x x x x *FOV for 62mm sensor in use Formulas for calculating the magnification and WD of the ML-F8-25 WD=(1 + M) f / M A FFD=(1 + M) f B f=8.55 A=3.5 B=22.9 Effective Optical Image Product Model Focal Distance Magnification WD Weight Mount F No Distortion Format Code ML-F8C mm.2x ~.5x 76.83mm~223.16mm ~22.2% 186g 82mm M39 x1 A-318 * Mount adaptor is available on request. (i.e. BTO) L-66

67 Line Scan Lens for 62mm Sensor ML-L52 62 mm 7µm This new low-magnification model ML-L series is suitable for of a wide range of applications with its adjusted magnification of.5 to.2x and WD of 2 to 1,59 mm. It can be used with image sensors of up to ø62 mm and was designed for image processing that requires peripheral light volume ratio of 8% or more with optical distortion of.1% or less. The lens comes standard with a M72-FB31.8mm camera mount and optional mounting adapters such as M /19.55 & TFL2 are available. Mounts for large format area scan cameras can also be provided..5 to.2x magnification WD from 159 to 2mm Supports 62mm sensors F2.9 High uniformity >8% Line Scan Lenses for 62mm Sensor Low distortion, <.1% Variable iris ML-L52 ML- L 52 (O/I=1713.) WD1591 ± x ø71 ø58 M72x.75 ø75 (O/I=55.) WD2 ± M72x.75 Serial No. label.2x Aperture adjustment ring Effective F No 2.9~1.8 Zoom ring Model Focal Distance Magnification WD Effective F No Optical Distortion Weight Image Format Mount Product Code ML-L52 78mm.5x ~.2x 159mm ~ 2mm 2.9~16.5.1% - 62mm M72 FB31.8 A-316 L-67

68 C O Line Scan Lens Line Scan Lenses for 62mm Sensor ML-L12K5A Series 62 mm 5µm Line Scan Lenses for 62mm Sensor The 12K5 Series consists of high resolution models with a large format design compatible with 12, bit, 5µm pixel line sensor cameras. Utilizing the various lens barrel & mount adapters, a large number of lens variations are possible allowing for flexibility. Very high light uniformity, low distortion, and high resolution are achieved by these models making them ideal for line scan and large format area scan applications. A high-resolution model compatible with Pixel size 5μm. Maximum imager size of ø61.. Equipped with base lens and various lens barrels making it compatible with all types of cameras. The barrel is equipped with camera adjustment ring. Barrel Part Model Product Code 12K5-M A K5-M /19.55 A K5-FMT A-316 Made-to-order ML- L12K 5A ML-L1.2-12K5A (O/I=366) WD=128.9 ± ML-L1.-12K5A (O/I=369.6) WD=12.3 ± ML-L K5A + WD=73-2 (O/I=31.1) ø68 ø67 M56.5 ø5 ø52 ø5 M67.5 ø69 ø75 Thumbscrew to secure aperture adjustment ring (Tap M2, 3 locations) Aperture adjustment ring ML-L2.-12K5A ML-L3.-12K5A (O/I=22.2) WD=117 ± ø69 ø58 M67.5 ø69 ø75 (ø) ø62 ø5 M67 x.5 ø69 ø75 (ø61.) ø62 ø5 M67.5 ø69 ø75 Thumbscrew to secure aperture adjustment ring (Tap M2, 3 locations) Aperture adjustment ring Serial No. label Thumbscrew to secure aperture adjustment ring (Tap M2, 3 locations) ø68 Serial No. label Aperture adjustment ring (O/I=5) 23.9 WD=112.6 max ø7 ø75 ø6 M67.5 ø69 ø75 Thumbscrew to secure aperture adjustment ring (Tap M2, 3 locations) Serial No. label Aperture adjustment ring Thumbscrew to secure aperture adjustment ring (Tap M2, 3 locations) Serial No. label Aperture adjustment ring Base Lens Model Focal Distance Magnification WD Effective F No Optical Distortion Weight Image Format Mount Product Code ML-L1.2-12K5A 13.5mm 1.2x 128.9mm % 65g 62mm Mount Adapter 12K5 A-3163 ML-L1.-12K5A 1mm 1.x 12mm % 85g 62mm Mount Adapter 12K5 A-3152 ML-L K5A 11mm 1.75x 73mm % 98g 62mm Mount Adapter 12K5 A-3153 ML-L2.-12K5A 98.5mm 2.x 117mm % 9g 62mm Mount Adapter 12K5 A-3161 ML-L3.-12K5A 112mm 3x 112.6mm % 15g 62mm Mount Adapter 12K5 A-3162 Made-to-order L-68

69 Line Scan Lenses for 57mm Sensor ML-L235/ mm 7µm These are high performance lenses for use with 8, pixel Line Scan CCDs with element length of 57.3mm. Flexibility is provided by the variable magnification and focus adjustment included. Outstanding performance is achieved by minimizing the chromatic aberration and distortion. Advanced optical design for maximum 8-bit (57.3mm) Advanced optical design for 1 mega pixel (2 million pixels~) area CCD Designed with variable magnification (.2x~.35x or.35x~.5x) Low chromatic aberration and low distortion Designed for various mountings Line Scan Lenses for 57mm Sensor ML-L235 WD 555. (.2) WD 35.6 (.35) M6 P= (1.3~18.3) O C Aperture Adjustment Screw Magnification Adjustment Screw 1.3(.2)~121.3(.35) 1.7 ø M2.6 For Setting Mount ML-L355 WD 35.6 (.35) WD (.5) M6 P= (.35)~138.3(.5) 18 (1.3~18.3) O C Aperture Adjustment Screw Magnification Adjustment Screw 1.7 ø M2.6 For Setting Mount ML- L235/ 355 Model Focal Distance Magnification WD Effective F No Optical Distortion Weight Image Format Mount Product Code ML-L235 1mm~11.6mm x2 ~.35x 555.mm ~ 35.6mm 5.8~36.6.1% 75g 58mm Mount Adapter MT-S A-18 ML-L mm~13mm 35 x~.5x 35.6mm ~ 261.7mm 6.6~1.1% 8g 58mm Mount Adapter MT-S A-185 L-69

70 Line Scan Lens Line Scan Lenses for 35mm Sensor ML-L Series 35 mm 7µm Line Scan Lenses for 35mm Sensor Optimal for high speed processing of large fields of view. Low optical distortion, all models less than.1% Low marginal rays difference High resolution, high contrast Suitable for long working distance applications ML- L ML-L5 ML-L7 ML-L9 ML-L1.5 W.D M Porcelain screw.7 W.D M Porcelain Screw.93 W.D M Porcelain Screw W.D M Porcelain Screw ø5.2.7 ø9 ø6 Aperture Adjustment Screw ø5.2.7 ML-L7-2 W.D 2 ±6 (O/I=377.6) (3) ø ø9 ø6 Aperture Adjustment Screw ø5.2.7 ø9 ø6 Aperture Adjustment Screw ø ø55 1 ø6 Aperture Adjustment Screw Made-to-order Aperture M Adjustment Screw Porcelain Screw L=35 Line CCD Model Focal Distance Magnification WD Effective F No Optical Distortion Weight Image Format Mount Product Code ML-L5 12mm.5x 25.5mm % 7g 35mm Mount Adapter MT A-179 ML-L7 13mm.7x 19mm % 8g 35mm Mount Adapter MT A-18 ML-L9 1mm.933x 158.5mm % 8g 35mm Mount Adapter MT A-181 ML-L1 13mm 1.x 1mm % 8g 35mm Mount Adapter MT A-182 ML-L7-2 95mm.7x 2mm % 72g 35mm Mount Adapter MT A-183 * Depth of field is calculated based on resolution. * Resolution values indicate the theoretical resolution at a wavelength of 55nm. L-7

71 Camera Mount (Optional) Reference Chart for Line Scan Lens Selection Image Format / Pixel Size 35mm/7µm 58.mm/7µm 61.mm/5µm 82mm/1µm Color Mount C-mount F-mount M72 TFL2 M39 DALSA Piranha2 DALSA Piranha3 NED ML-F8C-25 *1 *1 *1 *1 *1 *1 *2 ML-L12K5A Series *1 ML-L52 *1 *2 ML-L235/355 *3 *3 ML-L Series *1 Mount adaptor is available on request. (i.e. BTO) *2 Directly mountable as standard. *3 Optional camera mounts available, but the imaging area may be affected by relatively small image circle of the lens. For ML-L12K5A 12K5-M K5-M / K5-FMT 15. ± (6.56) (1.) ± (31.8) (1.) ± ø79 ø75 ø69 M67x.5 M3 M72x.75 ø ø79 ø75 ø69 M67x.5 M3 M72x.75 ø ø79 ø75 ø69 M67x.5 M3 ø ± (19.55) Nikon F Mount P2 adapter (Detachable) Model 12K5-M K5-M / K5-FMT Mount Name DALSA Piranha3 Mount NED Mount/DALSA Piranha 2 Mount Nikon F Mount Product code A-315 A-3155 A-316 Made-to-order For ML-L52 L52-M L52-M L52-TFL2 ø75 M72x.75 (16.5) M72x.75 ø M72x.75 (29.) M72x.75 ø M72x.75 (22.3) M8x.75 ø ø6 Camer a mount adapter Model L52-M L52-M L52-TFL2 Mount Name DALSA Piranha 2 Mount DALSA Piranha3 Mount TFL2 Mount Product code A-3168 A-3169 A-317 L-71

72 Line Scan Lens For ML-L235/355 P2MT-S P3MT-S FMT-S CMT-S ø ø8-.1 ø6 ø51 ø76-.1 ø51 M9.5 ø6 ø51 M9.5 ø6 M72 P=.75 M72.75 Nikon F Mount DALSA Piranha 2 Mount DALSA Piranha 3 Mount Nikon F Mount *MORITEX can also provide mounts from various other manufacturers. Model P2MT-S P3MT-S FMT-S CMT-S Mount Name DALSA Piranha 2 Mount DALSA Piranha 3 Mount Nikon F Mount Product code A-195 A-196 A-193 A-19 Made-to-order For ML-L Series MMT FMT CMT M52 P Camer a mount adapter ø6 Flange Back 36.7 NED Compatible Mount ø6 Flange Back 6.5 Nikon Mount Model MMT FMT CMT Mount Name NED Compatible Mount Nikon Mount Product code A-191 A-189 A-192 ø5 M55 P.5 ø6 L-72

73 Partner Lens Partner Lens Carl Zeiss VISIONMES L-73

74 Partner Lens Carl Zeiss For Distortion-free Imaging VISIONMES Telecentric Lens Carl Zeiss Ultimate Measuring Environment with Outstanding Performance The ultimate in distortion-free images. Able to recognize accurate images of the structure and form of complicated objects. A high performance optical lens that presents quality at the HDTV level. For Distortion-free Imaging High numerical aperture (NA) enables the achievement of a bright image even in a short exposure time. Lineup offering a maximum diameter of ø3mm. MF T S OF OI IF MF OF IF OI S T Sin Mag. Measurement Field Object Field Image Field Distance Between Object & Image Working Distance Telecentric Range Numerical Aperture Magnification Measurement range (Length Width) Lens opening diameter at object side (ø mm) CCD element surface Distance from object surface to CCD element Distance from end of metal material to focus position Range in which measurement of an accurate image is possible if the object moves up and down Image field Object field VISIONMES Telecentric Lens Sample Images Macro Lens VISIONMES CCTV VISIONMES Backlight Parallel Light Backlight L-7

75 HDTV Level High Image Quality MTF 1. 6mm 1/3" 8mm CCD Image Field 11mm 1/2" 2/3" 16mm 1" Diffraction Limit l /mm Application Early detection of defects by performing batch inspections at various inspection points on the production line. Molding Casting Semiconductors Various Parts Wide-range, 3D inspection for dimension measurements (internal diameter, external form, diameter, concentricity) Inspection for uneven surfaces and damage in silicon wafers, pattern verification Mass batch inspection without contact for bolts, wipers, screws, plastic parts, plastic bottles and rubber products Optical Specifications Telecentric Lens for 1/3" CCD Camera (Angle 6mm) Model Object Field CCD Image Side NA Working Distance WD Telecentric Range Depth of Field Magnification (x) Measurement Field 18/6/ / 1 +/ x1 35/6/ / 2.5 +/ x27 7/6/ / 13 +/ x55 15/6/ / 16 +/ x82 Telecentric Lens for 1/2" CCD Camera (Angle 8mm) Model Object Field CCD Image Side NA Working Distance WD Telecentric Range Depth of Field Magnification (x) Measurement Field 11/8/ / 9 +/ x8 35/8/ / 2 +/ x28 7/8/ / 1.5 +/ x55 15/8/ / 12 +/ x83 15/8/.1 15* / 35 +/ x /8/.1 225* / 55 +/ x177 3/8/.1 3* / 75 +/ x236 For Distortion-free Imaging Telecentric Lens for 2/3" CCD Camera (diagonal 11 mm) Model Object Field CCD Image Side NA Working Distance WD Telecentric Range Depth of Field Magnification (x) Measurement Field 11/11/ / 2.5 +/ x8 11A/11/.2 11A (Made-to-Order) / 5 +/ x8 11B/11/.2 11B (Made-to-Order) / 5 +/ x8 13/11/ / 2 +/ x1 22/11/ / 2.5 +/ x17 22A/11/.5 22A / 5 +/ x17 35/11/ / 1. +/ x28 7/11/ / 8 +/ x55 15/11/ / 1 +/ x83 15/11/.1 15* / 25 +/ x12 225/11/.1 225* / +/ x18 3/11/.1 3* / 55 +/ x2 Telecentric Lens for 1" CCD Camera (Angle 16mm) (Made-to-Order) Model Object Field CCD Image Side NA Working Distance WD Telecentric Range Depth of Field Magnification (x) Measurement Field 8/16/.8 8* / 1 +/.5 2 3x 16/16/.1 16* LD / 2 +/.2 1 6x9 32/16/.1 32* / +/ x17 7/16/.1 7* / +/.23 x 15/16/.1 15* / 2 +/ x86 3/16/.1 3* / +/ x172 VISIONMES Telecentric Lens Telecentric Lens for 1.1" CCD Camera (Angle 18mm) Model Object Field CCD Image Side NA Working Distance WD Telecentric Range Depth of Field Magnification (x) Measurement Field 6/18/ / 1 +/.1 3 2x3 A = Object side lens (9 L-shaped type) B = Imaging side lens (9 L-shaped type) * = Variable aperture model LD = Long working distance L-75

76 Imaging Series For Flexible Imaging Applications Leached Image Bundles Leached Fiber Bundles are used primarily in endoscopes for medical, veterinary or industrial applications. Custom Leached Fiber Bundles are available on demand. Very flexible, coherent image guides They are built by multiple draws of a high index core glass, with a lower index clad glass and an acid-soluble second cladding. For Flexible Imaging Applications Leached Image Bundles Bundle diameter from.53 mm to 1.93 mm that can be used in endoscopes for space limited medical and industrial imaging applications. Bundle length up to 2 mm High resolution image transfer with fiber sizes from 7μm Part # Bundle Diameter Bundle Length Quality Area A Quality Area A Spec Quality Area B Quality Area B Spec Pixel Pixel Count Distal Proximal Sheathing Internal Diameter / Wall Thickness mm /2/1/.19 2/// 7.μ 3.5k.55 x.8.6 x / /2/1/1.22 2/// 7.5μ.5k.65 x.5 1. x 12..6/ /2/1/1.22 2/// 7.5μ.5k.65 x.5 1. x / /2/1/1.23 2/// 8.μ.5k.77 x x 15..9/ /2/1/1.23 2/// 8.μ.5k.77 x x / /2/1/1.29 2/// 7.5μ 8.2k.8 x..96 x / /2/1/1.29 2/// 7.5μ 8.2k.88 x x / /2/1/1.29 2/// 7. 5μ 8.2k.83 x 5..9 x / /2/1/1. 2/// 8.2μ 13.5k 1.27 x x / /2/1/1. 2/// 8.2μ 13.5k 1.27 x x / /2/1/1. 2/// 8.2μ 13.5k 1.16 x x / /2/1/1. 2/// 8.2μ 13.5k 1.27 x x / /2/1/1. 2/// 8.2μ 13.5k 1.16 x x / /2/1/1. 2/// 8.2μ 13.5k 1.27 x x / /2/1/1.5 2/// 7.6μ 18k 1.22 x x / /2/1/1.5 2/// 7.μ 18k 1.22 x x / /2/1/1.5 2/// 8.μ 18.k 1.27 x x / /2/1/1.5 2/// 8.μ 18.k 1.27 x x / /2/1/1.5 2/// 8.μ 18.k 1.27 x x / /2/1/1.5 2/// 8.μ 18k 1.27 x x / /2/1/1.53 2/// 8.μ 18k 1.38 x. 1.6 x / /2/1/1.53 2/// 8.μ 18k 1.38 x x / /2/1/ /// 9.1μ 18K 1.2 x x / /2/1/1.65 2/// 1.6μ 18.k 1.8 x x / /2/1/1.73 2/// 11.6μ 18.k 2.19 x x /.1 L-76

77 Leached Fiber Bundle Dimensions: in ; not to scale Leached Fiber Bundle, 1296 For Flexible Imaging Applications Leache d Image Bundle s L-77

78 Imaging Series For Ruggedized Flexible Imaging Applications Wound Fiber Bundles Wound Fiber Bundles are used in a wide range of applications, including industrial remote vision systems, ordered array detectors, hazardous environment imaging, defense and research. Custom Wound Fiber Bundles are available on demand. For Ruggedized Flexible Imaging Applications Coherent, flexible fiber optic bundle used in applications where images must be transmitted from remote locations They are composed of individual multi fibers, wound one layer at a time on a drum, bound only at the ends and flexible in the middle. Bundle formats from 2 mm x 2 mm up to mm x 35 mm. May be divided into - or made up of - multiple branches transmitting to a single output, or input. Their numerical aperture is typically.6 and standard lengths range from 61 mm to 5 mm. We can also produce custom image guide assembles in any vertical or horizontal format required to meet nonstandard Wound Fiber Bundles imaging applications. Wound Fiber Bundles Wound Fiber Bundles Wound Fiber Bundles Typical Specifications: Glass Type SCHOTT 75 Glass Quality Area 1.8 mm x 1.8 mm - 38 x 33 mm with custom capabilities Format Size 2 mm x 2 mm up to mm x 35 mm Single Fiber Size 1μm elements 6 x 6 array Numerical Aperture.6 Resolution 5 lp/mm Transmission 5 nm - 12 nm Bending Radius Determined by bundle diameter and sheathing Temperature Resistance - C to +125 C (- F to F) up to 15 C (32 F) with alternative jacketing Chemical Rsistance Select sheathing resistant against oil, grease, bases acid, fuel, water and PVC L-78