What is an SMU Instrument, and How Do You Decide Which One is Right for Your Application?
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1 What is an SMU Instrument, and How Do You Decide Which One is Right for Your Application? Lishan Weng Keithley Instruments, Inc. 1 5/7/ Keithley Instruments, Inc Keithley Instruments, Inc.
2 2 5/7/ Keithley Instruments, Inc Keithley Instruments, Inc. SMU Instrument Basics
3 Basic SMU Topology 3 5/7/ Keithley Instruments, Inc.
4 SMUs compared to Power Supplies 4 5/7/ Keithley Instruments, Inc.
5 SMUs compared to Power Supplies 5 5/7/ Keithley Instruments, Inc.
6 SMUs compared to Power Supplies 6 5/7/ Keithley Instruments, Inc.
7 Built-in Sweeps DC Pulse Custom 7 5/7/ Keithley Instruments, Inc.
8 SMUs compared to DMMs 8 5/7/ Keithley Instruments, Inc.
9 9 5/7/ Keithley Instruments, Inc Keithley Instruments, Inc. Measurement Terminology
10 Measurement Terminology Accuracy Repeatability Resolution Sensitivity A/D Converter Integration Time (NPLC) 10 5/7/ Keithley Instruments, Inc.
11 Measurement Terminology Accuracy Repeatability The closeness of agreement between the result of a measurement and it s true value or accepted standard value. The closeness of agreement between successive measurements carried out under the same conditions. 11 5/7/ Keithley Instruments, Inc.
12 Measurement Terminology Resolution The smallest portion of the signal that can be observed. Sensitivity The smallest change in the signal that can be detected. 12 5/7/ Keithley Instruments, Inc.
13 A/D Converter Integration Time (NPLC) 13 5/7/ Keithley Instruments, Inc.
14 Key Considerations for Selecting a SMU Instrument 14 5/7/ Keithley Instruments, Inc Keithley Instruments, Inc.
15 Key Considerations for Selecting a SMU Instrument System-level Speed / Throughput Source Resolution vs. Stability Measure Settling Time, Offset Error, Noise Cabling and Connections 15 5/7/ Keithley Instruments, Inc.
16 System-level Speed / Throughput Example: Diode / LED Test Three Measurements V f Forward Voltage V R Reverse Breakdown Voltage I L Reverse Leakage Current Measurements are compared against upper and lower limits for each parameter. 16 5/7/ Keithley Instruments, Inc.
17 System-level Throughput Considerations Must consider and optimize all elements of speed: Trigger In Time Range Change Time Function Change Time Source Settling Time A/D Converter (NPLC) Measurement Speed Trigger Out Time Program Execution Time 17 5/7/ Keithley Instruments, Inc.
18 Test Throughput: Actual Parts per Second (more is better!) 1 NPLC 0.1 NPLC 0.01 NPLC NPLC NPLC Non-Keithey SMU instrument Keithley 2600A Series N/A Most accurate Least accurate 18 5/7/ Keithley Instruments, Inc.
19 Test Throughput: Actual Parts per Second (more is better!) 1 NPLC 0.1 NPLC 0.01 NPLC NPLC NPLC Non-Keithey SMU instrument Keithley 2600A Series N/A Most accurate Least accurate 19 5/7/ Keithley Instruments, Inc.
20 Test Throughput: Actual Parts per Second (more is better!) 1 NPLC 0.1 NPLC 0.01 NPLC NPLC NPLC Non-Keithey SMU instrument Keithley 2600A Series N/A Most accurate Least accurate 20 5/7/ Keithley Instruments, Inc.
21 Test Throughput: Actual Parts per Second (more is better!) 1 NPLC 0.1 NPLC 0.01 NPLC NPLC NPLC Non-Keithey SMU instrument Keithley 2600A Series N/A Most accurate Least accurate A SourceMeter running at 0.1 NPLC A/D conversion time is 4x faster and much more accurate than a SMU instrument running at NPLC 21 5/7/ Keithley Instruments, Inc.
22 Keithley TSP Technology The SourceMeter SMU Instrument has embedded intelligence! Example TSP script: for Voltage = 1,10 do smua.source.levelv = Voltage delay(1) Current = smua.measure.i() Resistance = Voltage / Current print ("Resistance=",Resistance) End Keithley Model 2600A Series SourceMeter 22 5/7/ Keithley Instruments, Inc.
23 Source Programming Resolution vs. Stability Spec sheet (Programming Resolution): Programming Resolution 20 V range Non-Keithey 6.5 Digit SMU instrument Keithley Model uv 500 uv Actual Output (Stability): Source Value = V Source Readback Displayed Value (pk-pk variation) Actual Measured Value of Source Output (pk-pk variation) Non-Keithey 6.5 Digit SMU instrument 0.0 uv uv Keithley Model uv 42.9 uv 23 5/7/ Keithley Instruments, Inc.
24 Actual Source Performance: Programming Resolution vs. Stability 24 5/7/ Keithley Instruments, Inc.
25 Absolute Value Current (A) Open Circuit Offset Current at 200V: 10nA Range 3.00E-10 The Non-Keithley 6.5 Digit SMU has over 0.2 na error when the 2636A Is already settled to its 120 fa spec 2.50E A B2911A Non-Keithley SMU 2.00E E E-10 The Non-Keithley 6.5 Digit SMU takes almost 4 seconds to reach its 50pA offset spec 5.00E E E-11 Time (s) 25 5/7/ Keithley Instruments, Inc.
26 Comparing Specifications and Performance Spec table: SMU Lowest range Total accuracy* Resolution Non-Keithley 10nA ±(0.10% + 50pA) Keithley 2636A 100pA ±(0.15% + 120fA) *Total accuracy = Gain accuracy (%) + Offset accuracy 10fA 1fA Lowest Current Range Non-Keithley 6.5 Digit SMU: Keithley 2636A na pa fa x Offset Accuracy Spec 26 5/7/ Keithley Instruments, Inc.
27 Cable and Connection Considerations Coax Cable Triax Cable 27 5/7/ Keithley Instruments, Inc.
28 Cable and Connection Considerations Coax Cable Triax Cable Triax cables are included in the price of the 2635A and 2636A SourceMeter SMU Instruments 28 5/7/ Keithley Instruments, Inc.
29 SourceMeter Source Measurement Unit (SMU) Instruments Industry Leading I-V Characterization & Test Tools Feature High Power SourceMeter Instruments (2651A, 2430) Low Current SourceMeter Instruments (2635A/36A, 237, 6430) Series 2600A System SourceMeter Instruments Series 2400 Bench SourceMeter Instruments # of Channels 1 (Optional Expansion to 32) 1 2 (Optional Expansion to 64) 1 2 (Optional Expansion to 64) 1 Current Max/Min 50A pulse / 1pA 10A pulse / 10aA 10A pulse / 1fA 5A / 10pA Voltage Max/Min 100V / 1uV 1100V / 1uV 200V / 1uV 1100V / 1uV DC Power W (pulse) 2-30W per channel 30 40W per channel W Max readings/sec 38,500 1uSec / pt., 18-bit Digitizer 20,000 20,000 2,000 Interfaces GPIB, LAN (LXI), RS-232, Digital I/O, TSP-Link Channel Expansion Bus GPIB, LAN (LXI), RS-232, Digital I/O, TSP-Link Channel Expansion Bus GPIB, LAN (LXI), RS-232, Digital I/O, TSP-Link Channel Expansion Bus GPIB, RS-232, Digital I/O Connectors Screw Terminal, Banana Triax Screw Terminal, Adaptors for Banana or Triax Banana 29 5/7/ Keithley Instruments, Inc.
30 Keithley is the Leader in SMU Instruments 20 patents issued for SMU-specific technology Numerous industry awards, including R&D100, Test of Time, Best in Test, Best Electronic Design, and more Thousands and thousands of customers Serving Semiconductor, Electronic Components, Optoelectronics, Automotive, Mil/Aero, Medical, Research & Education, and many more industries Series 2400 SourceMeter Instruments Series 2600A System SourceMeter Instruments Model 237 High-Voltage SMU Model 4200-SCS Semiconductor Characterization System S500 and S530 Parametric Test Systems 30 5/7/ Keithley Instruments, Inc.
31 SMU Instrument Reference Library Choosing the Optimal Source Measurement Unit (SMU) Instrument for Your Test and Measurement Application Rapidly Expanding Array of Test Applications Continues to Drive Source Measurement Unit Instrument Technology Precision Sourcing and Measurement Techniques for Applications from Semiconductor Research and Development to High Throughput Component Test Low Level Measurements Handbook: Precision DC Current, Voltage, and Resistance Measurements (Sixth Edition) /7/ Keithley Instruments, Inc.
32 Contact Keithley for Further Information Worldwide Headquarters Within USA: KEITHLEY Outside USA: Additional offices: Europe: Germany: (+49) Great Britain: (+44) Asia: China: (+86) Japan: (+81) Korea: (+82) Taiwan: (+886) /7/ Keithley Instruments, Inc.
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