What is an SMU Instrument, and How Do You Decide Which One is Right for Your Application? Bona, Oh
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1 What is an SMU Instrument, and How Do You Decide Which One is Right for Your Application? Bona, Oh
2 SMU Instrument Basics
3 SourceMeter SMU Instruments SMUs are precision instruments which are used for sourcing current or voltage and simultaneously measuring current, voltage and/or resistance with high speed and accuracy. + + More = Precision Power Source Precision DMM SourceMeter
4 Basic SMU Topology
5 SMUs compared to Power Supplies
6 SMUs compared to Power Supplies
7 SMUs compared to Power Supplies
8 Built-in Sweeps DC Pulse Custom
9 SMUs compared to DMMs
10 Measurement Terminology
11 Measurement Terminology Accuracy Repeatability Resolution Sensitivity A/D Converter Integration Time (NPLC)
12 Measurement Terminology Accuracy Repeatability The closeness of agreement between the result of a measurement and it s true value or accepted standard value. The closeness of agreement between successive measurements carried out under the same conditions.
13 Measurement Terminology Resolution The smallest portion of the signal that can be observed. Sensitivity The smallest change in the signal that can be detected.
14 A/D Converter Integration Time (NPLC)
15 Key Considerations for Selecting a SMU Instrument
16 Key Considerations for Selecting a SMU Instrument System-level Speed / Throughput Source Resolution vs. Stability Measure Settling Time, Offset Error, Noise Cabling and Connections
17 System-level Speed / Throughput Example: Diode / LED Test Three Measurements V f Forward Voltage V R Reverse Breakdown Voltage I L Reverse Leakage Current Measurements are compared against upper and lower limits for each parameter.
18 System-level Throughput Considerations Must consider and optimize all elements of speed: Trigger In Time Range Change Time Function Change Time Source Settling Time A/D Converter (NPLC) Measurement Speed Trigger Out Time Program Execution Time
19 Test Throughput: Actual Parts per Second (more is better!) 1 NPLC 0.1 NPLC 0.01 NPLC NPLC NPLC Non-Keithey SMU instrument Keithley 2600A Series N/A Most accurate Least accurate A SourceMeter running at 0.1 NPLC A/D conversion time is 4x faster and much more accurate than a SMU instrument running at NPLC
20 Keithley TSP Technology The SourceMeter SMU Instrument has embedded intelligence! Example TSP script: for Voltage = 1,10 do smua.source.levelv = Voltage delay(1) Current = smua.measure.i() Resistance = Voltage / Current print ("Resistance=",Resistance) End Keithley Model 2600A Series SourceMeter
21 Source Programming Resolution vs. Stability Spec sheet (Programming Resolution): Programming Resolution 20 V range Non-Keithey 6.5 Digit SMU instrument Keithley Model uv 500 uv Actual Output (Stability): Source Value = V Source Readback Displayed Value (pk-pk variation) Actual Measured Value of Source Output (pk-pk variation) Non-Keithey 6.5 Digit SMU instrument 0.0 uv uv Keithley Model uv 42.9 uv
22 Actual Source Performance: Programming Resolution vs. Stability
23 Open Circuit Offset Current at 200V: 10nA Range 3.00E-10 The Non-Keithley 6.5 Digit SMU has over 0.2 na error when the 2636A Is already settled to its 120 fa spec 2.50E A B2911A Non-Keithley SMU Absolute Value Current (A) 2.00E E E E-11 The Non-Keithley 6.5 Digit SMU takes almost 4 seconds to reach its 50pA offset spec 3.80E E-11 Time (s)
24 Comparing Specifications and Performance Spec table: SMU Lowest range Total accuracy* Resolution Non-Keithley 10nA ±(0.10% + 50pA) 10fA Keithley 2636A 100pA ±(0.15% + 120fA) 1fA *Total accuracy = Gain accuracy (%) + Offset accuracy Lowest Current Range Non-Keithley 6.5 Digit SMU: Keithley 2636A na pa fa x Offset Accuracy Spec
25 Cable and Connection Considerations Coax Cable Triax Cable
26 Cable and Connection Considerations Coax Cable Triax Cable Triax cables are included in the price of the 2635A and 2636A SourceMeter SMU Instruments
27 SourceMeter Source Measurement Unit (SMU) Instruments Industry Leading I-V Characterization & Test Tools Feature High Power SourceMeter Instruments (2651A, 2657A) Low Current SourceMeter Instruments (2635B/36B, 6430) Series 2600B System SourceMeter Instruments Series 2400 Bench SourceMeter Instruments # of Channels 1 (Optional Expansion to 32) 1 2 (Optional Expansion to 64) 1 2 (Optional Expansion to 64) 1 Current Max/Min Voltage Max/Min DC Power 2651A: 50A pulse / 100fA 2657A: 120mA/ 1fA 2651A: 40V / 100nV 2657A: 3000V/ 100nV 2651A: 200W (DC), 2000W (pulse) 2657A: 180W (DC or Pulse) 10A pulse / 10aA 10A pulse / 100aA 5A / 10pA 200V / 100nV 200V / 100nV 1100V / 1uV 2-30W per channel 30 40W per channel W Max readings/sec 38,500 1uSec / pt., 18-bit Digitizer 20,000 20,000 2,000 Interfaces GPIB, LAN (LXI), RS-232, Digital I/O, TSP-Link Channel Expansion Bus GPIB, LAN (LXI), RS-232, Digital I/O, TSP-Link Channel Expansion Bus GPIB, LAN (LXI), RS-232, USB, Digital I/O, TSP-Link Channel Expansion Bus GPIB, RS-232, Digital I/O Connectors 2651A: Screw Terminal, Banana 2657A: HV Triax, SHV Triax Screw Terminal, Adaptors for Banana or Triax Banana
28 Keithley is the Leader in SMU Instruments 20 patents issued for SMU-specific technology Numerous industry awards, including R&D100, Test of Time, Best in Test, Best Electronic Design, and more Thousands and thousands of customers Serving Semiconductor, Electronic Components, Optoelectronics, Automotive, Mil/Aero, Medical, Research & Education, and many more industries Series 2400 SourceMeter Instruments Series 2600A System SourceMeter Instruments Model 237 High-Voltage SMU Model 4200-SCS Semiconductor Characterization System S500 and S530 Parametric Test Systems
29 SMU Instrument Reference Library Choosing the Optimal Source Measurement Unit (SMU) Instrument for Your Test and Measurement Application Rapidly Expanding Array of Test Applications Continues to Drive Source Measurement Unit Instrument Technology Precision Sourcing and Measurement Techniques for Applications from Semiconductor Research and Development to High Throughput Component Test Low Level Measurements Handbook: Precision DC Current, Voltage, and Resistance Measurements (Sixth Edition)
30 Thank You!
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