Length, Singapore, NMC, A*STAR (National Metrology Centre, Agency for Science, Technology and Research)

Transcription

1 Calibration or m nm 0.5 MHz 2 95% No LS/L/ nm fm 2 95% No LS/L/ THz 12 khz 2 95% No LS/L/ nm fm 2 95% No LS/L/ THz 1.2 khz 2 95% No LS/L/003 steel ceramic tungsten carbide steel, reference and test the same ceramic, reference and test the same Q[29, 0.67L ], L in mm, s nm to 73 nm Q[29, 0.60L ], L in mm, s nm to 67 nm Q[29, 0.47L ], L in mm, s nm to 55 nm Q[36, 1.0L ], L in mm, s nm to 107 nm Q[36, 0.9L ], L in mm, s nm to 97 nm LS/GB/001 LS/GB/001 LS/GB/001 LS/GB/002 LS/GB/002 The BIPM key comparison database, May /5

2 Calibration or Gass scale: line spacing L Gass scale: line spacing L glass scale: line spacing, L Stage micrometer: line spacing L Grid plate: grid point coordinates L 1-D grating: pitch P 2-D grating: pitch P External cylinder (plug, pin, wire) micro-cmm Optical comparison, Ultra QV CMM m mm mm mm 1 10 mm mm nm nm tungsten carbide, reference and test the same Q[36, 0.7L ], L in mm, s nm to 79 nm L, SQRT(0.0008L )] L, SQRT(0.0005L )] Q[0.524, L, SQRT(0.002L)], L in mm L, SQRT(0.0005L )] Q[0.51, L, SQRT(0.002L )], L in mm Q(0.06, 1.2E- 03P ), P in nm Q(0.06, 1.2E- 03P ), P in nm LS/GB/002 LS/S/002 LS/S/ % No LS/S/002 LS/S/002 LS/GP/ mm % No D034 P/001 P/002 The BIPM key comparison database, May /5

3 Calibration or Internal cylinder (ring) Sphere (ball) sphere (ball): Cross calibration by Optical polygon: face using autocollimator circle dividers angle and indexing table s Instruments artifacts Autocollimator: error of indicated angle autocollimator: error of indicated angle block: included angle Optical flat: flatness, F Optical flat: flatness, F Optical parallel: flatness, F m mm % No D mm % No D039 Stylus profilometer mm % No LS/BD/001 Small angle generator Reference autocollimator and small angle generator Autocollimator and indexing table interferometer " 2 95% No LS/AG/ ' 0.4 " 2 95% No LS/AG/002 0 ±150 " 0.08 " 2 95% No LS/AG/002 A 0 90 or ' or " 0.7 " 2 95% No LS/AG/ Interferometry Interferometry mm % No LS/GPI/ mm % No D mm % No D028 The BIPM key comparison database, May /5

4 Calibration or texture texture Parallelism, P External cylinder (plug, ring, wire) Internal cylinder (ring) Direct probing using electrical comparator m mm % No D028 Stylus size 1 mm to 150 mm % No D039 Stylus size 5 mm to 150 mm % No D039 Sphere (ball) Stylus size 5 mm to 50 mm % No D039 Sphere(Hemisphere) : roundness R external cylinder (plug, ring, wire): roundness R internal cylinder (ring): roundness R sphere (ball): roundness R (groove) depth (step height) standard (eg. ISO Type A), h Roughness standard: ISO roughness parameters (eg. Ra ) Multi-step, work piece on spindle roundness 0 2 size 5 mm to 100 mm 0 2 size 1 mm to 150 mm 0 2 size 5 mm to 150 mm 0 2 size 5 mm to 50 mm Stylus Lateral travelling range 0 mm to 50 mm Q[7, 33R ]; R in Q(1.5, h ), h in Q(36, 30Ra ), Ra in D058 D034A D006A D039A P/001 D9 The BIPM key comparison database, May /5

5 Calibration or Type A2): step parameters: Ra/Rq R parameters: Rz/Rt R parameters: RSm confocal microscope White light interferometer m Q[0.02, 0.01h ], h in μm 2 95% No LS/ Q[3,4h ], h in μm LS/SH/002 stylus Q[4,2h ], h in μm stylus stylus stylus stylus Q[20,2h ], h in μm Q[9, 18R ], R in Q[27, 18R ], R in Q[87, 4.4RSm ], RSm in The BIPM key comparison database, May /5