Sputtering Sensor ADVANTAGES
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- Eugene Owen
- 5 years ago
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1 The INFICON is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system. ADVANTAGES Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency Magnet to deflect free electrons away from the monitor crystal Easy installation with bendable water tubes allowing flexibility in sensor placement Rear load crystal insertion for easy crystal replacement
2 ORDERING INFORMATION... Shutter Module G G1 NOTES: Includes 78 cm (30.75") in-vac cable, crystal snatcher and manual (other length cables ordered separately) (crystals sold sepearately) Sensor In-Vacuum Cable Feedthrough Substrate Source Shutter Short 6 BNC cable Oscillator or XIU Oscillator (XIU) to instrument interconnect cable Controller or Monitor 2
3 SPECIFICATIONS G1 Maximum bakeout temp with no water 105 C Size (maximum envelope) Water, air and coax length Crystal exchange Mounting 1.36" OD x 0.69" high (3.45 cm x 1.75 cm) Standard 30" (76.2 cm) Rear-loading Customer supplied Installation Requirements Feedthrough Other Water flow rate Materials Body and holder Springs, electrical contacts Water tubes Connector 2 pass water with coax connector 2¾" ConFlat Flange - IPN " Bolt - IPN ) Customer to provide vacuum-tight braze joints or connectors for the water tubes. 2) XIU or Oscillator designed to interface with the specific deposition controller. Minimum water flow 750 cc/min, 30 C max (Do not allow to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur. If the water tube passes through a cryoshroud, drain the tubes if the water flow is stopped for any reason. Au plated Be-Cu Au plated Be-Cu Au plated Be-Cu, 0.125" (0.32 cm) O.D. 304 Stainless steel Insulators 99% Al 2 O 3 Wire Solder Crystal Magnet Teflon insulated copper Cadmium free silver and indium alloys 0.550" (1.4 cm) Diameter ALNICO 5 Alloy Optional Shutter Assembly G1 Specifications: Temperature 130 C Materials Pressure Shutter Braze 300 series stainless steel PSIG ( bar) [ kpa] operation 110 PSIG (7.6 bar) [760 kpa] maximum Pneumatically operated, requires pneumatic shutter actuator control valve, G1 Vacuum process high temperature Ni-Cr Alloy 3
4 SPECIFICATIONS Feedthrough Specifications NOTE: Sensor / Feedthrough combination specifications are determined by lowest component specification 1 inch bolt and compression fitting terminations: Materials 304 stainless steel, Teflon, ceramic, beryllium nickel, Viton Temperature Operational environment to 300ºC with water cooling or 165ºC without Mounting 1.015" ±0.010" diameter aperture CF 40 welded terminations: Materials Temperature Mounting 304 stainless steel, Teflon, ceramic, beryllium nickel Operational environment to 450ºC with water cooling or 165ºC without Mates with 2 ¾" ConFlat type flanges with 1.375" I.D. min. SPARE PARTS LIST P/N Description Ceramic Retainer Crystal Holder Retainer Spring for Crystal Holder In-Vacuum Cable (30.75 in./ 78.1 cm) Sputtering Head Cover with water lines Magnet for Sputtering Head Cover Retaining Ring (installs onto shaft of Shutter Assembly) Retaining Ring (installs onto shaft of Shutter Assembly) Spacer (installs onto shaft of Shutter Assembly) X.25 in. Teflon Screw for G1 Sputtering Head Body P X 1/8 in. Set Screw for G1 Sputtering Head Body G1 Pneumatic Shutter Assembly P2 Pivot Cover (installs onto shaft of Shutter Assembly) G2 Shutter Assembly for Pneumatic Shutter Assembly P1 Retainer Spring for and G1 Sputtering Head Bodies P4 Coupling (installs into Bellows Assembly) P4 Bellows Assembly for Pneumatic Shutter Assembly P2 Female Coax Connector for G1 Sputtering Head Body P1 Insulator for G1 Sputtering Head Body P2 Leaf Spring for G1 Sputtering Head Body G1 Sputtering Head Body with coax connector P1 Spring for Sputtering Head Cover 4
5 DIMENSIONS G1 5
6 DIMENSIONS Sputtering Head can be used with the following Feedthroughs: P/N DIMENSIONS P/N /4 CONFLAT FLANGE DIA. (6) BNC CONNECTOR CONNECTOR MICRODOT SEAMLESS TUBE (3) O.D., I.D
7 DIMENSIONS P/N G1 Mating air fitting (10-32) for G1 pneumatic shutter actuator control valve 7
8 DIMENSIONS P/N G ,73 (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC ,24 Mating air fitting (10-32) for G1 pneumatic shutter actuator control valve , , , , , , , ,34 CONFLAT FLANGE , ,60 reachus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. All trademarks are the property of their respective owners. cibe20a INFICON
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