Edge CDG025D2 with EtherCAT Torr / mbar

Transcription

1 Edge CDG025D2 with Torr / mbar INFICON temperature compensated Edge CDG025D2 with Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature compensated, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of signal conditioning for all applications with fieldbus interface. BEFITS Easy integration,, wide variety of full scales and flanges, standard with two set points Easy one push button or remote signal zero command, zero adjustable Diagnostic port for quick service and maintenance Corrosion resistant ceramic sensor Excellent long term signal stability Temperature compensated Sensor protected from contamination Compliance & standards: CE,, UL, SEMI, Edge CDG025D2 with Torr / mbar

2 ORDER INFORMATION 2 Edge CDG025D2 with Torr / mbar

3 SPECIFICATIONS Type 000 Torr, 00 mbar Torr / mbar Torr / mbar 0.25 Torr / mbar 0. Torr / mbar Accuracy () % of reading Temperature effect on zero Temperature effect percent FS/ C on span % of reading / C, max. kpa (absolute) Resolution percent FS Lowest reading percent FS Lowest suggested reading percent FS Lowest suggested control pressure Temperature percent FS Sensor C Operation (ambient) C Bakeout at flange C Storage C Supply voltage VDC or ±5 V Power consumption VDC or ±5 V VDC or ±5 V VDC or ±5 V VDC or ±5 V At operating temperature W Output signal (analog) V (dc) Response time (2) ms / 30 (3) Degree of protection IP 40 IP 40 IP 40 IP 40 IP 40 Standards CE conformity /-6-3, 600 & ETL certification UL 600, No /-6-3, 600 & UL 600, No /-6-3, 600 & UL 600, No /-6-3, 600 & UL 600, No /-6-3, 600 & UL 600, No.600 SEMI compliance SEMI S2 SEMI S2 SEMI S2 SEMI S2 SEMI S2 3 Edge CDG025D2 with Torr / mbar

4 SPECIFICATIONS Type 000 Torr, 00 mbar Electrical connection D-sub, Torr / mbar D-sub, 5 Torr / mbar 0.25 Torr / mbar D-sub, 5 D-sub, 5 0. Torr / mbar D-sub, 5 Number of setpoints 2 (SP,SP2) 2 (SP,SP2) 2 (SP,SP2) 2 (SP,SP2) 2 (SP,SP2) Relay contact V (dc) Relay contact A (dc) Hysteresis percent FS Diagnostic port Protocol RS232-C RS232-C RS232-C RS232-C RS232-C Read Set Materials exposed to vacuum Internal volume (AISI 36L (⁴)) (AISI 36L (⁴)) (AISI 36L (⁴)) (AISI 36L (⁴)) (AISI 36L (⁴)) I. volume /2'' tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) I. volume DN 6 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) I. volume DN 6 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) I. volume 8 VCR cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) Weight Weight /2'' tube g Weight DN 6 ISO KF g Weight DN 6 CF-R g Weight 8 VCR g Edge CDG025D2 with Torr / mbar

5 SPECIFICATIONS Type Protocol Communication standards Node address Physical layer Digital functions read Digital functions set Mailbox (CoE) Process data connector Cable 000 Torr, 00 mbar 00BASE-Tx Torr / mbar 00BASE-Tx Torr / mbar 0.25 Torr / mbar 00BASE-Tx 00BASE-Tx 0. Torr / mbar 00BASE-Tx Data rate Kbps Cable length m (ft.) 00 (330) 00 (330) 00 (330) 00 (330) 00 (330) 5 Edge CDG025D2 with Torr / mbar

6 () Non-linearity, hysteresis, repeatability at 25 C ambient operating temperature without temperature effects after 2 hours operation. (2) Increase 0 90 percent FS (3) For pressure control type only (4) 8% Cr, 0% Ni, 3% Mo, 69% Fe DIMSIONS reachus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. RateWatcher is a trademark of INFICON. All other trademarks are the property of their respective owners. (206-09) 206 INFICON