HyperRapid NX SmartCleave

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1 High-Speed and High-Quality Brittle Material Processing is an industrial high-power picosecond laser that is specifically optimized for high-speed and high-quality cutting of transparent and brittle materials. Using the Coherent patented SmartCleave technology, HyperRapid NX delivers kerf-less cutting on arbitrarily curved outer or inner contours. features 1 millijoule burst energy to cut thick substrate in a single pass with sub-micron edge roughness, therefore enabling new applications in the automotive and consumer electronics markets. The 5 W average power model is optimal for cost-sensitive applications, while the 1 W version enables high speed applications up to 2 m/s. FEATURES & BENEFITS 164 nm output 1 W power to enable high throughput Over 1 μj burst energy to cut thicker samples Specified burst mode operation for repeatable performance in volume manufacturing Compact and light weight, same interfacing as standard HyperRapid NX to allow straightforward integration Right of use to the Coherent SmartCleave IP is included APPLICATIONS Cutting of strengthened and unstrengthened glass, sapphire, and ceramics Scribing and drilling of strengthened glass, sapphire, ceramics, and composite materials

2 OPTICAL SPECIFICATIONS 1,2,3,4, Single Wavelength Output (nm) Amplifier Single Pulse Repetition Rate (khz) 17 to 1 4 to 1 Output Pulse Repetition Rate Range (khz) to 1 Pulse Duration (ps) <15 Average Power (W) Average Power Stability 7 (RMS 1σ,%) Pulse Energy (µj) 25 Pulse-to-Pulse Energy Stability (RMS 1σ, %) Beam Quality Parameter (M²).3 Beam Diameter, 1 m in front of laser (mm) 5. ±.5 Beam Divergence, full angle (mrad) Beam Circularity, 1 m in front of laser (%) Beam-Pointing Stability (µrad/ C) Bore Sight Accuracy Lateral (mm) (beam to specified exit location) Angular (mrad) (beam to specified exit direction) Direction of Polarization 85 5 (peak-to-peak) 5 Vertical Polarization Ratio >1:1 Warm-up Time from Chiller Start (minutes) <45 Electrical Supply Mounting Orientation Chiller 1 to 23V AC/5 to 6 Hz/2.5 kw Horizontal Water-to-Air or Water-to-Water Dimensions Laser Head 6 x 78 x 245 mm (23.6 x 3.7 x 9.6 in.) TDK Power Supply 19 rack SMC Chiller 5 x 317 x 615 mm (19.7 x 12.5 x 24.2 in.) Weight Laser Head 7 kg (154.3 lbs.) TDK Power Supply 16 kg (135.3 lbs.) SMC Chiller 43 kg (94.8 lbs.) BURST MODE OPERATION Maximum Number of Pulses in the Burst 8 2 Burst Mode Operation Range (khz) See table on next page Total Energy in the Burst (µj) See table on next page OPERATING SPECIFICATIONS Allowed Temperature Range During Operation +15 C to +3 C (free of condensation) Humidity (%) to 9 RH, non-condensing, Dew-point <22 C 1 At lowest amplifier pulse repetition rate, unless stated otherwise. 2 Maximum output power (variable attenuator and process shutter at maximum transmission). 3 After warm-up time. 4 Steady-state (no pulse gating or change of pulse repetition rate). 5 Single-pulse operation. 6 At 5 khz. 7 Over 8 hours, ± 1 C ambient temperature. 8 Maximum number of pulses in the burst depends on repetition rate.

3 Specifications: Number of Pulses in the Burst Burst Energy 1 (µj) Max. Rep. Rate (khz) Burst energy specification is given at the minimum repetition rate. Specifications: Number of Pulses in the Burst Burst Energy 1 (µj) Max. Rep. Rate (khz) Burst energy specification is given at the minimum repetition rate Energy (µj) Burst Energy (µj) Energy (µj) Burst Energy (µj) Number of Pulses in the Burst Number of Pulses in the Burst

4 HyperRapid NX Smartcleave Burst Mode Operation Oscilloscope trace showing 5 pulses in the burst at 1 khz repetition rate. The pulses in the burst are separated by 25 ns Signal (a.u.) 1 µs Burst Spacing for 1 khz Time (a.u.) Applications Typical industrial applications served by : glass cutting (left), automotive dashboard cutting (right)

5 MECHANICAL SPECIFICATIONS Bottom View 75 mm (29.53 in.) 711 mm (28. in.) 675 mm (26.57 in.) 3 mm (11.81 in.) 254 mm (1. in.) 35 mm (13.78 in.) 365 mm (14.37 in.) 25 mm (.98 in.) Beam Output Required Space for Service 6 mm (23.62 in.) 434 mm (17.9 in.) 3 mm (11.81 in.) 78.5 mm (3.73 in.) Emission LED 58 mm (22.83 in.) Beam Height 9 mm (3.54 in.) Front View 46.5 mm (1.83 in.) 845 mm (33.27 in.) Side View mm (8.6 in.) 18 mm (.71 in.) mm (9.47 in.) Rear View 218 mm (8.58 in.) 163 mm (6.41 in.) 16 mm (6.3 in.) Required Space for Cable and Tubes Top View Coherent, Inc., 51 Patrick Henry Drive Santa Clara, CA 9554 p. (8) (48) f. (48) tech.sales@coherent.com Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent offers a limited warranty for all HRNX SmartCleave Lasers. For full details of this warranty coverage, please refer to the Service section at or contact your local Sales or Service Representative. Printed in the U.S.A. MC-2-18-M218 Copyright 218 Coherent, Inc. VISIBLE AND/OR INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. POWER, WAVELENGTH(S), AND PULSE WIDTH DEPEND ON LASER CONFIGURATION. CLASS IV LASER PRODUCT.

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