IX-280-MXF Dual Laser Machining

Transcription

1 IX-280-MXF Dual Laser Machining Standard Operating Procedure Revision: 1.0 Last Updated: Feb.19/2015, Revised by Mohamad Rezaei Overview This document will provide a detailed operation procedure of the IX-280-MXF Dual Laser Machining system. Formal Training is required for all users prior to using the system. Revision History # Revised by: Date Modification 1 Mohamad Rezaei 06/20/16 Operation Manual Document No

2 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca Table of Contents IX-280-MXF Dual Laser Machining... 1 Standard Operating Procedure... 1 Overview... 1 Revision History... 1 Table of Contents... 2 General Information Deep UV Laser Fiber Laser for for High Speed Hole Drilling Prerequisites... 4 Operation Procedure Start the system Alignment... Error! Bookmark not defined. 3. Pattern conversion Start exposure IPG YLY MicroX Exit the System Reference and Files Contact Information

3 General Information The IPG-280 laser workstation establishes a new industry standard for production rate manufacturing for high performance laser cutting and drilling applications. This unique workstation configuration employs two separate lasers and beam delivery systems allowing for a high degree of flexibility for process development activities. The laser generates coherent UV light (193nm Excimer), fiber or diode pumped solid-state (DPSS) technology. 1. Deep UV Laser Excimer laser is ideal for micromachining a very wide variety of materials. Due to low average power, material cutting capability will require micro milling strategies with multiple passes resulting in low throughput nm /ArF Excimer Laser Configuration 2. Maximum Pulse Energy - 9mJ 3. Maximum Average Power - 6 Watts 4. Beam Dimensions (WxH) - 2mm x 6mm 5. Pulse duration (FWNH) 5 15 ns (Typically 10 ns) 6. Pulse Repetition Rate Hz 2. Fiber Laser for for High Speed Hole Drilling High Power QCW laser is proposed for thicker material cutting. The high average power and high peak power is ideal for thick material processing utilizing extremely energy efficient (>30%) fiber laser technology. 1. High Pulse Energy Configuration Optimized for high speed drilling operations. 2. Wavelength 1070nm 3. Power 300W Max Average Power / Peak Power 3000 W Max Peak Power 4. Pulse Width ms 3

4 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca 3. Prerequisites We ask users to take SFU laser safety training course. Formal training is required to use the system. Before you receive training, you need to contact the 4D LABS staff member to complete an application form. Operation Procedure 1. Start the system Open the main door and load your sample Start the Chroma.NET software by double clicking on IPG Chroma.NET Log in as your username and password. 4

5 Select the Setup icon at the bottom of the software window. On the Setup page select Recipe Manager then click on a proper recipe and press Load. Note: To use excimer laser select User Recipe MicroX and to use YLR fiber laser select User Recipe YLR. Never try other recipes. Select recipe here Load recipe here Select the Recipe icon, and start Home macro. Find your sample on the camera and focus on the surface using Process Excimer lens and then Inspection lens. 2. Pattern conversion The CAD Importer widget allows the user to import properly formatted CAD files (DWG and DXF formats) and convert them to Chroma.NET macros which perform the required laser process upon the shapes. 5

6 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca To import your design select the Recipe icon, Click on CAD Import. Click on Import icon then select your pattern file and press open. 6

7 Select CAD Import again to see your converted pattern design. 7

8 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca The CAD importer widget has several regions: o Parameter Sets are CAD Import process parameters. These allow you to set up a macro program for a particular laser process (machine motion, laser trigger method, process speed, etc.) You may edit the name of any parameter set by clicking the selected name You may add a new parameter set by clicking the Add button o Import and Build buttons: The Import button opens a file dialog to allow a CAD file to be imported The Build button builds the macro program(s) generated by this CAD file using the process parameters defined in the tabs below o The tabs (File, Process, Shapes and Location) The File tab has items relating to the CAD file, units, offset,macro name, etc. The Process tab contains the laser process settings The Shapes tab contains a list of all shapes in the file, their locations, etc. The Location tab has settings for where the built macro program is to be executed (current position, using beam and part aligner, determined by offset, etc.) o The 2D display Shows the enabled layers in the CAD file Supports simple manipulation (zoom, pan, zoom all, etc.) 8

9 After you select your desired file, go to the FILE tab and modify the following items: o The CAD file name (as loaded with the Import button). Note: The file name is saved with the rest of the settings, but you must manually re-load the CAD file whenever the Chroma.NET software is restarted. o Units used in CAD file This is the units used to interact with the CAD file. If this is wrong, you will usually get warned during the import process that your part is strangely small or large o Import Offset These offsets are applied to the part. Use this to move a CAD file which is not centered to a more convenient location. o Macro Name This is the name of the macro to be built. This is set to the CAD file name when it is imported. Select Process tab and modify the following items: o The parameter tree is broken down into the following major branches Layers Parameters specific to the processing of each layer in the CAD file: o Each layer may be enabled or disabled individually 9

10 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca o Each layer may be set to use the same Shared Settings, or shared settings may be set to false to make that layer s process independent of all other layers o Closed Shapes Determines how Closed Shapes are processed. Mark Move through each line of each shape with the laser firing the entire time. Drill Via hole drilling, this organizes the part into rows and uses a high speed motion and laser fire system to fire one shot into the center of every closed shape. Macro Set a number of variables (including the shape location and laser process parameters) and pass them into the Point and Closed Shape Macro. o Point Macro This macro will always is executed for every Point found in the CAD file and for every closed shape. Mostly it should be CADPointShape. o Process Start Macro It should be CADProcessStart. o Beam Location When marking shapes, this setting is used to adjust the beam location on closed shapes. Default is center, which centers the beam on the line. o Passes per shape The number of passes which will be executed for every shape on this part. Every shape is executed this number of times before moving on to the next shape. o Pulse Spacing Used with Laser Fire Axis to determine pulse spacing as the shapes are marked o Rep Rate Used with Laser Fire Axis to determine repetition rate as the shapes are marked o Process Speed The process speed to be used when the laser is on o Pulse Length The amount of time (in milliseconds) which the laser is on when drilling (Drilling mode). o Laser On Timing Bias Provides an easy means to adjust the timing of the laser on signal. During certain processes (hole drilling) this can be used to balance the laser trigger times so motion moving in the positive and negative directions creates holes in identical locations (Drilling mode). 10

11 o Pass Interval Used when Passes per Shape is greater than 1, this enables and determines the interval of how often the Interval Macro is called. Setting this to zero disables calling the Interval Macro. This can be used to allow the part to cool or to change a process setting while multiple passes are being performed on a part. For example, if Passes per shape is 100 and Pass Interval is 5, then Interval Macro will be called every 5 passes. o Interval Macro The interval macro is called every Pass Interval passes when that feature is used. The Interval Macro is often used to perform delays (for thermal effects), adjust Z (move deeper into the part), adjust laser power, etc. Part Holder Parameter set-wide settings relating to the primary axes to be used for the CAD X and Y o CAD X Axis The axis to be used to execute motion in the CAD file s X direction o CAD Y Axis The axis to be used to execute motion in the CAD file s Y direction o High Speed 0 and 90 Lines This feature allows macros to be produced which utilize a high speed, high accuracy triggering mechanism to turn the laser on and off at high speed while passing over shapes. This feature only works on lines which are exactly at 0 or 90 degrees (+/- does not matter). o Process Motion Accel Acceleration to be used on stage process motion Delay Delay to be added after each stage process motion o Travel Motion Speed Speed to be used while moving the stage through non-process motion Accel Acceleration to be used on stage non-process motion Delay Delay to be added after each stage non-process motion Laser - Parameter set-wide settings relating to the laser o Select Laser: Allows the laser to be selected from all lasers installed on this machine 11

12 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca o User Laser Fire Axis This enables that feature, changing this Parameter Set to a Fire on the Fly process o Beam Size This is the laser beam size, in microns. This is used to alter the paths of Closed Shapes so that the beam is on the Inside or Outside, if the user has selected one of those options. The Shapes tab lists all shapes on all enabled layers in the drawing. The Location tab allows the user to locate the macro generated by the CAD importer. In the Location window select Where Run, then macro built will use the current location (when the macro is executed) as the (0,0) for the generated macro. After setting all parameters, select Build to create a macro for your pattern. Go to Recipe to see the macro. 3. Alignment To align the sample and set a coordinate for a given substrate, go to Setup window. In the Part Aligner section, add a new part aligner with a desired name. The vision part aligner allows the user to select multiple points, and may run a vision search macro for each point. Each point can be purposed for: o Angle o XY Position o Angle + XY position o Point on a circle 12

13 Add or rename a part aligner Select a point here In the Configuration tab, o Choose the camera that will be used during the alignment (Inspection or Process Camera). o Identify the parent aligner, if one exists. A parent aligner is one that gets run previously to the current aligner in the process. The position and angular corrections found during a parent aligner will be used by this aligner. This allows for a coarse alignment by one camera, followed by a fine alignment by another. If no parent aligner is defined, or if this is a parent aligner, this field will be empty. o Set the target angle. For aligners with angular points defined, the part will rotate to this target angle. o Reset Aligner to Default for Part Description 13

14 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca Choose the parent aligner Select a camera here Select a target angle here Here is an example to show how assign a created point in the Position tab to a real feature on your substrate. In this example Process Excimer camera is used to set a point. In the next step and on the Position tab the desired point is selected. The 1 st point is purposed as Angle. 14

15 On the Recipe section, Process Excimer camera is selected. The cross hair on Camera View is placed exactly on top of the alignment feature. In the Setup section, Teach Defult is pressed to assign the selected alignment feature to the 1 st point. 15

16 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca 4. Start exposure Go to Recipe and select your macro. In Fire Control Select the proper laser (MicroX or IPG YLR) Select proper laser 16

17 4.1 IPG YLY If you select IPG YLR, below the Fire Control panel go to IPG YLR setting and put the proper laser parameters. Note: You have to use only Pulse Mode and Sub Mode also has to be set on Gate. Switch camera to inspection camera and check if you have a good focus. Align you substrate under proper camera (see section 2. alignment) Switch back Process YLR and run the Cutting head to inspection plane. 17

18 Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6 E info@4dlabs.ca After setting all parameter and aligning your sample, start the macro by clicking on Play button on Macro Editor section. After finishing the process run the Retract the cutting head macro. 4.2 MicroX If you select MicroX, go to MicroX setting and make sure the parameters are set as below: o Target Energy: 5mj o Target Mode: External o Do not change other parameters Switch camera to inspection camera and check if you have a good focus. Align you substrate under proper camera (see section 2. alignment) Switch back Process Excimer. Open the RVA using a proper macro and set the VAD angle Run Start MicroX macro Hit Play button on Macro Editor section to start the process. 18

19 After finishing the process, run Stop MicroX laser macro Select Idle for microx laser 5. Exit the System Make sure you retract the cutting head for IPG laser and stop both lasers. Move the stage to a proper position to unload your sample. Close the software. Open the front door and take out your sample. Reference and Files IPG Chroma.Net software Manual and training notes. Contact Information Questions or comments in regard to this document should be directed towards Mohamad Rezaei (rezaei@4dlabs.ca) in 4D LABS at Simon Fraser University, Burnaby, BC, Canada. 19