Imaging Ellipsometry The next step forward. product guide

Transcription

1 Imaging Ellipsometry The next step forward product guide

2 Ellipsometry Platform Flexible investigation for the nano age Imaging Imaging Ellipsometry overcomes the spatial resolution limitations of classical ellipsometers. Small samples, structured materials or inhomogeneous surfaces, which are beyond the capabilities of other ellipsometry tools, are now visible with our Imaging Ellipsometer. Imaging Ellipsometry opens new doors to a better understanding of today s advanced thin film and biological applications. By providing diffraction limited imaging without compromising ellipsometric accuracy, Nanofilm sets the standard for modern ellipsometry. Imaging optics: - high-resolution microscopy with 1µm lateral resolution up to large field-of-view imaging Modularity With the EP 3 Nanofilm introduces a truly modular concept for Imaging Ellipsometry. From cost effective solutions to highly integrated automatic inspection systems, EP 3 stands for customization, flexibility and upgradability. Various optical, mechanical and software modules provide the building blocks to create just the right instrument for your application. Performance EP 3 also stands for a new level of performance, achieved by our redesigned proprietary opto-mechanical unit and improved software algorithms. The result is unprecedented accuracy and resolution in an Imaging Ellipsometer. Light sources: - single or multiple laser wavelengths - Xenon lamp for Spectroscopic Ellipsometry For the first time, the EP 3 offers the powerful option of Imaging Spectroscopic Ellipsometry all with micrometer spatial resolution. Convenience Whether you want push button operation or power user complexity our new EP 3 View software lets you shape the instrument, not vice versa. Imaging Ellipsometry has never been this simple. With powerful EP 3 Script macro language, you gain full control over all parameters, allowing you to easily perform complex measurements and analyses on a routine basis. Remote access: - remote control - remote servicing - process integration Customization We customize our systems to your needs. Making your application work is our mission. Check out our spec sheets and contact us today to discuss your application details.

3 Mechanics: - motorized angle-of-incidence adjustment - computer controlled X/Y/Z-stages - automatic sample alignment stages Software: - EP 3 View user interface - EP 3 Script macro language - customized push button solutions - powerful spectroscopic analysis software Accessories: - sample handling - various cells - liquid handling - prisms - various slides - AddOns System integration: - cabinet with laser safety features - anti-vibration support - combination with AFM and other technologies - benchtop version - integration of LB trough s and other technologies - process integration

4 Nanofilm Technologie GmbH Germany The EP 3 product guide Our ellipsometer platform EP 3 is a highly modular system which allows to configurate the system according to your application and requirements. For example, it is possible to choose the light source in the wavelength range from 365 to 1000 nm (further on request) either as discrete lasers or as continuous light source. For sample handling we offer a huge range of convenient and helpful accessories e.g. motorized X/Y/Z-stages, automatic alignment stages or several cells for in-situ measurements. This product guide shall help you to configure your EP 3 according to your requirements by yourself. An overview of the modules that build a complete EP 3 system is given on the next page. The further pages include more detailed information and specifications of the individual modules. We would be glad assisting you in choosing the optimum setup for your EP 3 system or other individual solutions. Please do not hesitate to contact us for further questions! Index: Page 5 Building blocks 6 General specifications 7 Setup 8 Opto-mechanical unit 10 Control 11 Accessories 15 Typical configurations

5 EP 3 building blocks These are the modules that make a complete EP 3 ellipsometer system. See seperate information for details and specs on individual modules and options. 5

6 General EP 3 specifications Ellipsometer type: Ellipsometric resolution: Mechanics: Auto-Nulling Imaging Ellipsometer in PCSA configuration precision: up to Delta deg / PSI deg (ideal laboratory conditions) accuracy: deg (Note: Ellipsometric resolution depends on the sample and measurement conditions. Values quoted here are obtained for thin films under best conditions on typical samples integrating over 10 x 10 µm 2 sample area.) Motorized Goniometer: The motorized goniometer is software controlled. Automatic multiple angle-of-incidence measurements are possible using EP 3 Script macro language. As a unique feature of Nanofilms goniometer design, there are no bearings or mechanical mounts in the axis of rotation. Instead, a double parallelogram design forms a virtual rotation axis. Therefore, sample size is not limited by the goniometer design. The Nanofilm goniometer can handle arbitrary large samples. Angle-of-incidence range: Angle resolution: Absolute angle accuracy: Speed of motion: degree degree 0.01 degree variable, approx. 10 degree/second Electronics: Power supply: Sample alignment sensor: embedded Linux operating system (internal only) communication with host PC via dedicated 100 Mbit Ethernet voltage: VAC, 50/60Hz max. current: 10 A EP3 standard sensor for precise horizontal alignment of samples accuracy 0.01 deg range + 2 deg resolution: deg (Note: ALS or manual alignment stages recommended.) 6

7 Setup Stand-alone System with internal electronics, integrated table top, prepared for alignment stage and antivibration table, emergency power off switch, laser safety enclosure. Dimensions: 1050 x 700 x 1785 mm (length x width x height) Open-frame Basic aluminum frame construction for the optical unit, separate electronics box. Dimensions: 1000 x 600 x 600 mm (length x width x height) 7

8 Opto-mechanical unit Illumination Light sources The selection of a proper light source for the EP 3 depends on the complexity of the thin films that you analyze. Single layers of non-absorbing material usually may be analyzed with a single-wavelength (SW) ellipsometer. The ellipsometer is able to measure the thickness and also the refractive index of such a film. If you have more than one unknown layer, or require more information about the film and/or substrate, or if the films might become absorbing at certain wavelengths, you should consider a multiple-wavelengths (MW) or spectroscopic (SE) system. Nanofilm is able to offer a wide range of discrete laser lines to operate the EP 3, either as SW or MW systems. Internal lasers are limited by available space. Standard internal lasers are compact 532 nm solid state lasers (others on request) and require the internal laser module. External lasers for SW or MW systems require the external laser module, consisting of a fibre optics beam delivery system and modifications to the internal optics. Laser/Laser diodes Wavelength 532 nm Compatibility internal/external Power 15 mw Remarks solid state laser 532 nm internal/external 20 mw solid state laser, for simultaneous use of medium- and high-resolution 532 nm internal/external 50 mw solid state laser, high power for simultaneous use of medium- and high-resolution or low contrast applications nm external > 1mW CW all available CW laser sources are applicable when fibre coupled, for SPR a 685 nm laser diode is recommended Multiple-Wavelengths Version The MW platform holds a selection of external lasers and allows software controlled wavelenght switching. The MW platform is integrated into benchtop and stand-alone setup versions, and a separate box for the open-frame version (see Setup). Number of lasers: Laser-to-laser switching time: 2-5 (more on request) approx. 5 sec. Spectroscopic Ellipsometry (SE) option For more complex film stacks or when the determination of the optical properties over a wide range of wavelengths is required, we offer a spectroscopic version of the EP 3. This instrument gives you the widest possibilities to analyze your films, but at increased complexity of the instrument. The more complex modelling leads to more reliable results if the number of unknown parameters is high, for example multiple film thicknesses or unknown optical constants. The Spectroscopic Software Module is a powerful tool for evaluation of thin film parameters. The spectra can be modelled and fitted using a database with dispersion models of common materials and effective medium approximation. The database can be expanded easily with the users own measurements. Light source: Monochromator: Wavelengths: Detectors: Measurement time: Imaging resolution: Xenon arc lamp, lifetime: 400 hours filter wheel with 46 interference filters nm, 46 wavelengths, bandwidth + 6 nm CCD-camera, optional ICCD-camera 5 sec. (single-wavelength), 5 min. (full spectrum) 2 microns (@ 0.2 mm field-of-view) (Note: Recommended with additional solid state laser.) 8

9 Opto-mechanical unit Detection Imaging optics The EP 3 supports two different modes of imaging. A high-resolution mode allows the highest possible spatial resolutions and turns the EP 3 into an ellipsometric microscope. The medium-resolution uses the same imaging principles, but at a larger field-of-view. It requires a slight beam diameter expansion if lasers are used as light source (not needed for the spectroscopic version). The medium-resolution version is compatible with the high-resolution objectives for most applications. The real-time image has a limited depth-of-field, so both high-resolution and medium-resolution modes require the Focus scan to achieve fully focused images. Medium-resolution Field-of-view Resolution** Limiting angle* Remarks 2x 2.5 mm 4 µm 90 deg. requires beam expander 5x 0.9 mm 3 µm 90 deg. beam expander recommended High-resolution Field-of-view Resolution** Limiting angle* 10 x 0.4 mm 2 µm 90 deg. 20 x 0.2 mm 1 µm 90 deg. * The angle-of-incidence limit for samples larger than approx. 40 mm diameter is 60 deg (2 x and 5 x objective 70 deg). ** The resolution of higher wavelenghts than 532 nm is slightly lower. Cameras/detectors Standard CCD-camera: monochrome CCD Video camera, 768 x 572 pixel 8.6 x 9.3 mm pixel size frame rate: 25 fps (interlaced) wavelength range: 365 to 1000 nm High sensitive CCD-camera: solid state monochrome CCD image sensor very low noise, high sensitivity image sensor 680 x 500 pixel; 7.4 x 7.4 mm pixel size frame rate: 30 fps (interlaced) wavelength range: 365 to 1100 nm The spectral responsitivity reaches 40% quantum efficiency. The chip is peltier cooled, no active cooling is necessary. The camera shows a signal hub, which is 20 times higher than the standard camera. 9

10 Control Software The EP 3 comes with an easy-to-use, graphical user front end EP 3 View. The main features of this software are: Operating System runs on Windows 2000 Professional or Windows XP Professional operating system (others on request) Analysis multiple Regions-Of-Interest: evaluate up to 1000 ROIs simultaneously Micro Mapping: generate high-resolution maps of Delta/Psi, film thickness or refractive index 2D-graph for measurements and 3D-image viewer for thickness maps Optical modeling package for simulation and analysis of thin film systems, supports multiple angles and multiple-wavelengths or spectroscopic analysis (depending on the selected EP 3 version) export data to external software packages for analysis or visualization Image Processing ImageScan, a novel feature for automatic focus scan gives optimum full field-of-view focused images real-time geometrical correction for angle-dependent image aspect ratio image formats supported: PNG (in preperation: TIFF, JPG) image browser included Automation pre-defined functions for standard measurements powerful macro language EP 3 Script allows the user to simplify complex measurements into push-button operation Automatic Sample Alignment X/Y/Z-stages controlled via software for large samples communication interface to trough-software (NIMA/KSV) or other additional software Hardware Personal Computer Nanofilm provides the EP 3 including fully configured and tested PC. Minimum: 2 GHz Pentium 4 or equivalent 512 MB RAM 32 bit true color monitor, 1280 x 1024 pixel display CD-ROM drive 10

11 Accessories Sample handling Automatic sample handling: Automatic X/Y/Z-stage: (computer-controlled X/Y-stage with vertical Z-stage for sample height adjustment) travel range 90 mm (X/Y), 10 mm (Z) repeatability 1 micron (X/Y) resolution 1 micron (X/Y) ALS (Automatic Alignment Stage): accuracy 0.01 deg resolution deg Manual sample handling: Manual X/Y/Z-stage: travel range 100 mm (X/Y), 12 mm (Z) resolution deg 11

12 Accessories Cells Cells especially designed for measurements of organic materials (e.g.: proteins) in liquid ambient with the Nanofilm EP 3. Kinetic/SPR Cell Specifications: On request: volume: 0.1 ml + tubing (> 0.1 ml minimum) observed area: 4 x 8 mm field-of-view: 1.5 x 2 mm (with 2 x objective) material: PEEK (cell and tubing) and Viton for O-rings (Note: Prism required see prisms.) with temperature control and temperature unit (Note: Additional thermostat required.) Solid/Liquid Cell Specifications: On request: volume: < 3 ml angle-of-incidence: 60º material: Teflon or POM windows: AR-coated glass, BK7 sample size: 20 x 20 x 2 mm 3 or smaller external bath circulator connection with temperature control and temperature unit (Note: Additional thermostat required.) Liquid Handling The liquid handling system consists of a valve unit, a peristaltic pump and tubings. It is especially designed for kinetic measurements with the Nanofilm Kinetic Cell to examine organic materials in liquid ambient or proteinprotein interactions with the Nanofilm EP 3. Specifications: Valve unit: handling of three liquids automatically further handling of up to six liquids on request controlled by software EP 3 View Tubing pump: flow rates: ml/min 8 or 12 roles for minimal pressure fluctuations controlled by software EP 3 View Tubing: inner diameter: approx. 0.5 mm standard HPLC fittings (e.g. 1/4-28) Volume: total void volume (incl. tubing): 0.6 ml recommended sample volume: > 1.5 ml Materials: PEEK and PTFE tubings standard peristaltic pump tubing (like Tygon ST) Teflon valves Viton O-rings 12

13 Accessories Prisms for the Kinetics/SPR Cell Application Angle [ ] Material Remarks conventional glass slides (n = 1.5) 45 BK7 needs index matching fluid (n = 1.52) OptiSlides 60 BK7 needs index matching fluid (n = 1.52) SPR-slide 60 SF10 needs index matching fluid (n = 1.7) SPR on prism 60 SF10 no index matching necessary, gold coating on the prism SPR-slides for use with the Kinetics/SPR Cell glass slide for SPR, must be coated before use, size: 20 mm x 20 mm x 1.1 mm, material: SF10 SPR-slide with gold coating, suitable for SPR at 658 nm wavelength (sensitivity/noise limit: < 4 pg/mm 2 ) OptiSlides Glass slides especially designed for kinetic measurements of organic materials in liquid ambient or protein-protein interactions with the Nanofilm EP 3. Slide size: OptiSlides standard: 25 x 75 x 1.1 mm ( mm) substrate: glass, SiO 2 surface for standard applications dynamic range: nm sensitivity: 30 pg/mm 2 noise 100 pg/mm 2 minimum signal additional information like surface density available OptiSlides high sensitive: Optional: high sensitive version for advanced applications dynamic range: 0-20 nm sensitivity: 6 pg/mm 2 noise 18 pg/mm 2 minimum signal recommended for sensitive measurements of proteins in liquid ambient CHIMERAs 3D Dendritic Linker Chemistry 3D-Surface for nucleic acid arrays 3D-Surface for protein arrays (Note: For measurements with the Nanofilm Kinetic Cell a BK7 prism is essentially required. For kinetic measurements with the EP 3 we recommend our Kinetic AddOn Software 1.0.) 13

14 Accessories Beam expander Specifications: Beam cutter for use with 2 x and 5 x objectives makes a 7 times larger beam diameter placed in the beam between compensator and sample manually switched into the beam suitable to illuminate a large field of view homogeneously, e.g. > 2 mm x 2.5 mm with the 2 x objective can only be ordered together with a new EP 3 Specifications: for measurements on thin (> 0.2 mm) transparent substrates (e.g. glass, polymer foils), whenever the substrate thickness is smaller than the beam diameter produces a shadow in the field-of-view, where no light from the bottom side of the substrate is interfering with the ordinary light being reflected from the top side. without the beam cutter the interference makes data fitting difficult and thickness evaluation insensitive. adjustable horizontally, vertically, and in the angle-ofincidence manually switched into the beam Software AddOns EP 3 View Kinetic Software 1.0 EP 3 View Kinetic Software 1.0 provides the tools for the complete recording, visualization and evaluation of kinetic measurements on protein arrays. As an integrated part of Nanofilm EP 3 View, Kinetic Software 1.0 imports all relevant data during measurements and allows extensive online and post-run analysis. Features: Benefits: direct transfer of collected data easy-made background correction complex kinetic analysis clearly arranged graphic user interface easy to use More Software AddOns in preparation. 14

15 Typical configurations EP 3 standard configuration Single-wavelength: Model Description EP 3 base optical unit, camera, electronics, alignment sensor, EP 3 View software Image Scanner for full-field imaging 10 x objective objective for 2 µm image resolution Internal Laser Module attenuator, optics (laser not included) 532 nm, 15 mw laser source internal solid state laser Motorized Goniometer continuous angle degrees Open-frame simple instrument mount Multiple-wavelengths: Model EP 3 base Image Scanner Description optical unit, camera, electronics, alignment sensor, EP 3 View software for full-field imaging 10 x objective objective for 2 µm image resolution MW platform/3 532 nm, 15 mw laser source Solid state laser 635 nm Laser Diode 830 nm Laser Diode Motorized Goniometer Open-frame external laser module, software and multiple-wavelengths platform for three laser, (laser not included) continuous angle degrees simple instrument mount Spectroscopic Ellipsometry (SE): Model EP 3 base Image Scanner Description optical unit, camera, electronics, alignment sensor, EP 3 View software for full-field imaging 10 x objective objective for 2 µm image resolution Internal Laser Module 532 nm, 15 mw laser source internal solid state laser SE platform Motorized Goniometer Open-frame attenuator, optics, switching mirror (laser not included) external platform, filterwheel with 46 interference filters for nm, Xenon arc lamp continuous angle degrees simple instrument mount Remarks: configurations include PC and monitor upgradings possible, upgrading from EP 3 -BAM also possible integration of other technologies (AFM, fluoreszence microscopy,...) on request 15

16 Key Features q Modular design, configurable, upgradeable q High precision nulling ellipsometry method q Superior spatial resolution (down to 1 µm), outperforming all other ellipsometer designs q Large area Imaging Ellipsometry up to several square centimeters q Single or multiple laser wavelengths q Imaging Spectroscopic Ellipsometry q Novel motorized goniometer for angle-of-incidence adjustment q EP 3 View software for instrument control and data analysis under Windows q Powerful EP 3 Script macro language q Multiple Regions-Of-Interest and, mapping q Remote control and servicing via LAN Applications q Basic and applied materials research q Non-destructive quality control of surfaces, thin films and coatings q Thin films on semiconductors, metals, glass, etc. q Storage media, flat panel displays, OLEDs q Quality control of Biochips and Biosensors for genomics and proteomics research q Marker-free biochip reader q Organic thin films, polymers, anisotropic films, optical coatings, magnetic films q Self-assembled monolayers and Langmuir-Blodgett films q Microcontact printing q Adsorption, corrosion, and electrochemistry at surfaces q Films at liquid/solid, liquid/gas, or liquid/liquid interfaces q And many more Benefits q Direct visualization of your sample q Unambiguous, reliable results even on structured surfaces or small specimens q Higher throughput, fast and easy operation USA: Accurion Scientific Instruments 935 Hamilton Avenue Menlo Park, CA Tel.: (650) Fax: (650) info@accurion.com Nanofilm Technologie GmbH Postfach Goettingen Anna-Vandenhoeck-Ring Goettingen, Germany Tel.: +49(0)551/ Fax: +49(0)551/ info@nanofilm.de All rights reserved