SEMI Networking Day Italy
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1 SEMI Networking Day Italy 20 th September 2012 proven technology for a new world
2 OEM Group Today Who we are OEM Group is a global company that serves both traditional semiconductor fabs, as well as emerging technologies with focus on MEMS and LED applications. Fully-integrated solutions, world-class service, and applications development from one cost-effective partner. Systems Upgrades Services Spares Foundry LED MEMS Wireless Energy Harvesting WLP Data Storage Logic 2
3 OEM Today - A Global Company Salzburg, Germany Gilbert, AZ OEM Group Headquarters Coopersburg. PA Yokohama, Japan OEM Group Japan KK Hsinchu, Taiwan OEM Group Taiwan NORTH AMERICA Sales Tool Manufacturing/remanu facturing Foundry Services Design Engineering Applications Lab Field Service Parts Distribution R&D EUROPE Sales Software engineering Field Service Parts Distribution ASIA Sales Field Service Parts Distribution Assembly Repair Service System remanufacturing
4 OEM Group Today Global Manufacturing Global Service Global Spare Part Distribution Global Procurement Proven Technology LEGENDS : 11 best-in-class product lines Install base of 33,000 + supported systems Proprietary IP Patent portfolio from eight game-changing companies 30 + years experience in each Organization 250 employees in 10 countries Combined team of the brightest, most dedicated experts from each acquisition The faces you remember, with new resources 4
5 LEGENDS : A proven and game-changing portfolio LEGENDS intellectual property owned exclusively by OEM Group Software licensing, application development Serving both mature and emergingmarkets Productivity enhancements Process and field support Custom equipment design Global service infrastructure 5
6 Product Options RTP AGHeatpulse 4100 PVD Eclipse Star Ion implant 120XP 160XP Etch AutoEtch 490 Oxide Etch, PVD 900-Series Etch 6500-Series Etch 8108 Mark II 350D 590 Poly SFI Endeavor PVD 8800 Mark IV E-Series 690 Metal AMS PVD 790 Tungsten 6
7 Product Options (Cont.ed) Semitool manual-batch process equipment is now part of our Chemical Process Technology (CPT) group. Semitool was the world leader in wet-chemical applications for 30 + years Capable of meeting any wet application demand, CADdesigned Cintillio products break new technological ground in 25/50 wafer batch process. Convenient side access Innovative and proprietary Enhanced Spray Technology Up to six rows of nozzles ensures high throughput reliable wafer surface wetting Our Newest First time in North America and Asia From left: Cintillio Spray Solvent Tool (SST), SST Dual Chamber, Spray Ozone Tool (SOT), and Spray Acid Tool (SAT) 7
8 Classics : recognized equipment, sustained and optimized for today s applications and productivity demands Leveraging our own OEM experience to 200mm, repurposed for new help customers with their equipment applications needs Customer-driven innovation For 12 + years, OEM Group has been the Sustaining support and development world leader in remanufactured equipment Commercially-creative solutions 8
9 Product Options CVD, PVD, Etch, RTP, Epi Etch Strip, Lite Etch, CVD CVD P5000 Centura 5200 Endura 5500 Mirra Rainbow TCP Alliance Aspen II Diode Aspen II Triode Aspen II ICP Concept One Concept Two 9
10 Global Manufacturing Facilities Headquarters: Phoenix, Arizona Coopersburg, Pennsylvania
11 Application Lab Capabilities Foundry services / applications development Cross-platform capable Eclipse Mark IV PVD Endeavor AT PVD Tegal 6500 etch AG Heatpulse Tegal 980 Extended Capabilities AMAT P5000 SiO 2 and Si 3 N 4 CVD (2 percent SiH 4 /H 2 ) Cintillio SST/SAT Applications Development Results-oriented solutions Fully integrated across all our systems/platforms Demonstrated in our global Apps Labs Academic and government R&D partnerships A complete collaborative network Field-proven technology DNA from world-class pedigrees
12 Global Service and Support On-Site Technical Support Man On-Site Contracts Telephone Support Platform Training System Repurposing, De-installation, and Reinstallation Upgrades Services System Size Conversions Preventative Maintenance Audit Services with diagnostic reports to assess overall system health
13 OEM Group Today Mission By acquiring branded best-in-class equipment / IP, and offering it globally from a centralized source, OEM Group will continue to serve both traditional semiconductor fabs, as well as emerging technologies. Enhanced fully-integrated solutions, world-class service, and applications development from one cost-effective partner. Systems Upgrades Services Spares Foundry LED MEMS Wireless Energy Harvesting WLP Data Storage Logic 13
14 Thank you!
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