Gaertner ellipsometer Help Main page

Transcription

1 Gaertner ellipsometer Help Main page For New Users... Quick Information Step By Step Tutorial for Measurement & Calculation SteD By Step Tutorial for 2Angle Measurement & CalculatIon Menu Commands File menu's commands Elligsometer menu's commands Help menu's commands Toolbar buttons Except for the Context Help button, toolbar buttons have corresponding menu commands as shown below. See the corresponding menu help topic for the a detailed description. i : lave Qpen... r Eile menu$" SoveAsjxr Two4"&1 Mefi:Sll,+fement& Calcut.""n QI.liok Infonn.6ttofl M ur.""."t&g.lout.tlon I! ~~~~J

2 File Menu Commands The File menu offers the foll0'a'ing commands:," 51. New Creates a new document. Open Save Save As Save As TXT Print Opens an existing document. Saves an opened document using the same file name. Saves an opened document to a specified file name. Saves an opened document to a Text format file (with.txt extension). Prints a document. Print Preview Displays the document on the screen, as it would appear printed. Print Setup 1 23 or 4 Exit Exit Selects a printer and printer connection. Selects one of the Most Recently Used files to open if there were. Exits Gaertner Ellipsometer Measurement.

3 File menu's New... command or >_.e button on toolbar Use this command to open an existing document in a new window. If the current opened document has been changed but saved, the user will be prompted whether the user wants to save the current document or not, and it will be closed and then the specified document will be open. Keyboard shortcut Keys: CTRL+ N

4 File menu's Open... command or button on toolbar Use this command to open an existing document in a new window. If the current opened document has been changed but saved, the user will be prompted whether the user wants to save the current document or not, and it will be closed and then the specified document will be open. Keyboard shortcut Keys: CTRL+O

5 File menus Save command or button on toolbar Use this command to save and name the active document as a STORED MEASURED DATA file (SMD format type end with a.smd file extension). Gaertner Ellipsometer Measurement displays the Save As Dialog Box so the user can name the document. Keyboard shortcut Keys: CTRL + 5

6 The Save As Dialog Box To Save As A File The following options allow the user to specify the name and location of the file the user is about to save: File Name Type a new file name to save a document with a different name. A filename can contain up to eight characters and an extension of up to three characters. Gaertner Ellipsometer Measurement adds the extension the user specifies in the Save File As Type Box. Drives Select the drive in which the user wants to store the document. Directories Select the directory in which the user wants to store the document.

7 File menu's Save As... command Use this command to save and name the active document. Gaertner Ellipsometer Measurement displays the Save As Dialog Box so the user can name the document. Keyboard shortcut Keys: CTRL+A

8 File menu's Save As TXT... command or button on toolbar Use this command to save and name the active document as a TEXT file (Text format type end with a.txt file extension). Gaertner Ellipsometer Measurement displays the Save As Dialog Box so the user can name the document. Keyboard shortcut Keys: CTRL + T

9 File menu's Print... command or button on toolbar Use this command to print a document. This command presents a Print Dialog Box, where the user may specify the range of pages to be printed, the number of copies, the destination printer, and other printer setup options. Keyboard shortcut Keys: CTRL+ P

10 Print Dialog Box The following options allows the user to specify how the document should be printed: Printer This is the active printer and printer connection. Choose the Setup option to change the printer and printer connection. Setup Displays a Print Setup Dialog Box. so the user can select a printer and printer connection. Print Range Specify the pages the user wants to print: All Selection Pages Prints the entire document. Prints the currently selected text. Prints the range of pages the user specifies in the From and To boxes. Copies Specify the number ofcopies the user wants to print for the above page range. Collate Copies Prints copies in page number order, instead of separated multiple copies of each page. Print Quality Select the quality of the printing. Generally, lower quality printing takes less time to produce.

11 Print Setup Dialog Box The following options allow the user to select the destination printer and its connection. Printer Select the printer the user wants to use. Choose the Default Printer; or choose the Specific Printer option and select one of the current installed printers shown in the box. The user installs printers and configures ports using the Windows Control Panel. Orientation Choose Portrait or Landscape. Paper Size Select the size of paper that the document is to be printed on. Paper Source Some printers offer multiple trays for different paper sources. Specify the tray here. Options Displays a dialog box where the user can make additional choices about printing, specific to the type of printer the user has selected.

12 File Menu's Print Pre~iew Use this command to display the active document, as it would appear when printed. When the user chooses this command, the main window will be replaced with a print preview window in which one or two pages will be displayed in their printed format. The Print Preview Toolbar offers the user options to view either one or two pages at a time; move back and forth through the document; zoom in and out of pages; and initiate a print job. Keyboard shortcut Keys: CTRL+V

13 Print Preview Toolbar The print preview toolbar offers the user the following options: Print Bring up the print dialog box, to start a print job. Next Page Preview the next printed page. Previous Page Preview the previous printed page. One Page I Two Page Preview one or two printed pages at a lime. Zoom In Take a closer look at the printed page. Zoom Out Take a larger look at the printed page. Close Return from print preview to the editing window.

14 Print Setup Command (File Menu) Use this command to select a printer and a printer connection. This command presents a Print Setup Dialog Box where the user specifies the printer and its connection. Keyboard shortcut Keys: CTRL+V

15 File Menu's 1, ~, ~ or 4 Command Up to four documents, which the user has used recently, are listed in the File drop down menu. Choose the number that corresponds with the document, it will then be opened.

16 File Menu's Exit Command Use this command to end the Gaertner Ellipsometer Measurement session. The user can also use the Close command on the application Control menu as below. Gaertner Ellipsometer Measurement prompts the user to save documents with unsaved changes. Keyboard shortcut Keys: ALT + F4 or CTRL + X

17 Ellipsometer Menu Commands The File menu offers the following commands: Measurement & Calculation Use for single point measurement and calculation. 2 Angle Measurement &Calculation Use for 2 Angle measurement and calculation.

18 Measurement & Calculation Command or Button on Toolbar The Measurement & Calculation command or button pops up the Measurement & Calculation Dialog Box over the application window. Through this dialog box, the user can: Set instrument parameters, Set film parameters, Save the current active parameters setting into a CSF (Calculation Setup File) file, Load a parameters setting from an existing CSF file, Save the measured data and current setup to a SMD (Store Measured Data) file ora TXT (Text) file, Open a saved SMD file to the application's document area by loading, or get the Psi & Delta and two solutions and put them into the application's document area. Instrument Parameter Fields: Polarizer, Wavelength, Phi and Ambient N Change Wavelength Button: User can change the current wavelength, and the parameters associated with that wavelength. Note: When there are multiple wavelengths the button will be visible, but when there is only one wavelength the button is invisible. Film Parameter Fields: Thickness1, Thickness2, Thickness3, Thickness4, Nf1, Nf2, Nf3, Nf4, Kf1,Kf2,Kf3,Kf4,and Ns, Ks, and Calculation Mode Store Setup Button: Stores the current active measured data on the application screen's document area. (Since the application window is behind the Measurement & Calculation Dialog Box, the user may need to move the Measurement & Calculation Dialog Box by dragging it to see part of the application window's document area.) Calculation Mode Button: AutoFix Nf1, Thickness1 &Nf1, Thickness1 & PsiC I DeltaC, Thickness1 & Thickness2, Thickness & Kf1, and Substrate

19 Save Current Setup To A File Button: Opens the Save As dialog box in which the user can type in the file name to save current parameters setting. If the user doesn't type the file extension, *. CSF will be appended to the file name the user has typed in. For example, if the user typed test1 in the File name: field, the file name will be test1.csf. Since this file is a normal text file, the user can use any text editing program to see the contents. Load A Setup From A File Button: Opens the Open dialog box which displays all the *. CSF files if there are. The user can select an existing file and click the Open button, and then the file's parameters will be loaded and displayed in the Measurement & Calculation Dialog Box. Note: Whenever the user saves, the current setting to, or loads, from a CSF file, the Parameter Fife field at the top-right comer of Measurement & Calculation Dialog Box will show the associated CSF fife. However, if the user changes any of the parameters, the changes will not update the associated fife until the user saves the changed settings to the file. Measure Button: Measures the Psi and Delta through the Ellipsometer and displays them. Calculate Button: Calculates the 2 solutions with the current parameters setting using the Psi & Delta and displays the result. Measure And Calculate Button: Measures the Psi & Delta through the Ellipsometer and displays them and does the calculation in the current Calculation Mode and parameter setting using the Psi & Delta and displays the result. If the Automatic Storing Data field is set (or checked), the Psi & Delta, and the calculation result will be put into the application window's document area. Store Measured Data Button: Stores the current Psi & Delta and the two solutions (if there are calculated solutions) into the application window's document area. Note: If the Automatic Storing Data field is set (or checked), this button is not available until the Automatic Storing Data field is cleared (or unchecked). Automatic Storing Data Field: Automatically stores the Psi- Delta and the calculation results into the application window's document area. Measurement and Calculation Control Field: User can enter the Sample name, Psi, and Delta values into edit fields. Solutions 1 and Solutions 2 are entered into Thickness1 and Auto edits fields respectively. Shortcut Buttons: User may attach a Calculation Setup File to each shortcut button. This is done by the use of the small button to the right of each shortcut. The new name of the Calculation Setup File will be displayed on the button. Return Button: Closes fhe Measurement & Calculation Dialog Box and returns to the main window document area. Keyboard Shortcut Keys: Press M

20 Step-By-Step Tutorial for Measurement & Calculation 1. Check the hardware connection between the Ellipsometer instrument and the computer. Turn on the instrument's switch. 2. Run the application. 3. Open the Measure & Calculate Box (Measurement & Calculation Dialog Box) by either the Ellipsometer menu's Measure & Calculate command or the Measure & Calculate button on tool bar.»the Measurement & Calculation Dialog Box will pop up over the application window with the Odefault.csf file's setting. The Odefault.csf file is used when the user opens the Measurement & Calculation Dialog Box for the first time in each session of the application. 4. Type a string (up to 80 characters) forthe Sample field, change some parameters: For example, Absorbing Film checked, 4000 for the Thickness1, for Nf1, for Kf1, etc. Click the Save Current Setup to a file button.»the Save As dialog box will pop up. Type test1 into the File Dame: field and click the Save button, then the current setting will be saved into the file test1.csf, and the file name will be displayed in the Setup File field of the Measurement & Calculation Dialog Box. 5. io make it easier on the user, four shortcut buttons have been added. The user may attach a Calculate Setup File (CSF) to each shortcut button. This is done by the use of the small button to the right of each shortcut button. The name of the Calculate Setup File will be displayed on the shortcut button.»when a shortcut button is clicked, three actions occur: a.) Setup parameters are set to those of the setup file linked to the shortcut button. b.) c.} The ellipsometric parameters Psi and Delta are measured at the current wavelength. A solution is calculated. Note: When the user first enters the Measurement & Calculation Dialog Box, the shortcut buttons will have the default settings. 6. Click the Store Setup button.»the current active setup will be displayed on the application screen's document area. (Since the application window is behind the Measurement & Calculation Dialog Box, the user may need to move the Measurement & Calculation Dialog Box by dragging it to see part of the application window's document area.) 7. At the bottom-left side of the Measurement & Calculation Dialog Box, click the Measure button.»itwill measure the Psi and Delta from the instrument and display it on the screen. 8. Click the Calculate button.»it will do the calculation in the current Calculation Mode with the current parameters settings and display the result to the screen.

21 9. Click the Store Measured Data button.» The current Psi-Delta and two solutions (Thickness1 and Auto [the 1st and 2nd solutions respectively]) will be displayed on the application window's document area. 10. Now, click the Measure and Calculate button.» Steps 7 and 8 will be performed right after each other. Just like step 9, the user can store this result by clicking the Store Measured Data button. If the user wants to keep storing the result of every Psi-Delta Calculation, check the box next to the Automatic Storing Data. For practice, click the Measure and Calculate button several times after the Automatic Storing Data has been set (or checked). 11. Close the Measurement & Calculation Dialog Box by clicking the Return button. 12. On the application window, the user can save the contents in the document area into an external file by the Save SMD button on the toolbar or the file menu's Save command. For practice, click the Save SMD button on the toolbar and type test1 in the File name: field of the Save As dialog box and click the Save button. The document will be saved as test1.smd file. If the user wants to save the contents in the document area into a TEXT file, click the save As TXT button" on the toolbar or the file menu's save As TXrcommand. For this text file, the usercan use any text-editing program to open and modify it. 13. Now create a new document by clicking the New button on the toolbar or file menu's New command. The document area will be cleared with new a blank document. 14. Open the Measurement & calculation Dialog Box again (see step 3).» This time, the Measurement & calculation Dialog Box will pop up over the application window with the test1.csf file's settings, which the user has used recently, rather than the Odefault.csf. The user may try to change the parameters and save it as a different parameter file as many times as the user wants (see step 4). 15. Click the Load a Setting from a file button.» The Open Dialog Box will pop up and display all the CSF files. Select a file and click the Open button. Then the Measurement & calculation Dialog Box will be re-displayed with the parameter settings of the file the user has selected. 16. Now close the Measurement & calculation Dialog Box and exit the application. >> Ifthe current document area has been changed but it has not been saved yet, the user will be prompted to save it or not. Then the application will close the application window. To see detailed descriptions about menu commands and buttons, go through the Menu Commands on the Help Main Page.

22 Phi: po- Wavelength: I (Exp)Thickness 1: j1ooo-- [AutolNfl:lt46 I Thicknessd,O' Nf2:.'~0~_ I Thickness 3: 0 Nf3: 1 0 ' Thickness 4: 1 0 Nf4: '''"0-- I Substrate Ns: Store Setup Store Measured Data Thin Oxide Measure Measure Thin Nitride and Calculate Calculate Shortcut.3 I Automatic Data Storage Shortcut 4 --_.- Polari?er: ~- AmbientN: r Kfl: 1 0 Kf2:1-0-- Kf3: 1 0 Kf4:1-0-- Ks: ~ Calculation Setup ~::a;i:~~~el~:t.csf::~~ l I Save Current Setup to a file... Iii load New Setup File I I I --- _ J I rcalculation Mode J I I r. AutoFix Nfl I, I r Thickness1 Ie Nfl,. I r Thickness1 Ie PsiC/DeitaC II I r Thickness1 Ie Thickness2 I I!r Thickness &Kfl Ie I I, Subs~ate ~"J Measurement and Calculation Control I Psi: Delta: I Thicknessl: ) Nfl: n I Sample: Usling Retultl. I I'ii, J

23 New Two Angle LGEMP Program The new Two Angle LGEMP program includes 3 additional refractive index calculation modes: Auto Nf, Measure Nf, and Fix Nt. Auto Nf --- permits the calculation of film thicknesses with computer determined film refractive indexes. The computer determines whether to base the thickness calculation on a measured value of index or on a fixed (estimated) value of film index. If the computer determines it can measure indexes at both angles then each measured index is used for the film thickness calculation. If the index can be measured at only one angle of incidence then the index is calculated for the other angle based on a dispersion formula. If the computer determines that the indexes cannot be measured at either angle then the thickness calculation is based on the user entered estimated values in the Setup. Measure Nf --- forces the measurement of both indexes regardless of their accuracy. The film thicknesses are then calculated based on these values. Unrealistic values of thickness often can result since the underlying index values are not correct. Fix Nf --- forces the calculation of film thicknesses based on fixed values of refractive index as entered by the user in the Setup.

24 2 Angle Measurement Calculation Command or 2 <1>1 Button on Toolbar The 2 Angle Measurement & Calculation command or buttonpqps up the 2 Angle Megsuremenl Calculation Dialog Box over the application window. Through this dialog box, the user can: Set instrument parameters, Set film parameters, Save the current active parameters setting into a CSF (Calculation Setup File) file, Load a parameters setting from an existing CSF file, Save the measured data and current setup to a SMD (Store Measured Data) file or a TXT (Text) file Open a saved SMD file or a TXT file to the application's document area by loading, or Get the Psi & Delta and two solutions and put them into the application's document area. Instrument Parameter Fields: Polarizer, Wavelength, Phi, Phi2, and Ambient N Change Wavelength Button: User can change the current wavelength, and the parameters associated with that wavelength. Note: When there are multiple wavelengths the button will be visible, but when there is only one wavelength the button is invisible. Starting Angle Button: User can choose whether Phi or Phi2 is the starting angle. Film Parameter Fields: Thickness1, Thickness2, Thickness3, Tnickness4, Nf1, Nf2, Nf3, Nf4, Kf1, Kf2, Kf3, Kf4, and Ns, Ks Store Setup Button: Stores the current active measured data on the application screen's document area. (Since the application window is behind the 2 Angle Measurement & Calculation Dialog Box, the user may need to move the 2 Angle Measurement & Calculation Dialog Box by dragging it to see part of the application window's document area.) Save Current Setup to a File Button: Opens the Save As Dialog Box in which the user can type in the file name to save current parameters setting. If the user doesn't type the file extension, *.CSF will be appended to the file name the user has typed in. For example, if the user typed test1 in the File name: field, the file name will.be test1.csf.

25 Load and Setup from a File Button: Opens the Open Dialog Box which displays all the *.CSF files if there are any. The user can select an existing file and click the Open button, and then the file's parameters will be loaded and displayed in the 2 Angle Measurement &Calculation Dialog Box. Note: Whenever the user saves, the current setting to, or loads, from a CSF file, the Parameter File field at the bottom-left corner of 2 Angle Measurement & Calculation Dialog Box will show the associated CSF file. However, if the user changes any of the parameters, the changes will not update the associated file until the user saves the changed settings to the file. Measure Button: Measures the Psi and Delta, for Phi and Phi2, through the Ellipsometer and displays them. Calculate Button: Calculates the matched thicknesses and indexes with the current parameters setting using the Psi & Delta, for Phi and Phi2, and displays the results. Measure and Calculate Button: Measures the Psi and Delta, for Phi and Phi2, through the Ellipsometer and displays them. Calculates the matched thicknesses and indexes, using the current parameter settings, also using the Psi & Delta, for Phi and Phi2 and displays the result. If the Automatic Storing Data field is set (or checked), the Psi & Delta, and the calculation result will be put into the application window's document area. Store Measured Data Button: Stores the current Psi & Delta, for Phi and Phi2, matched thicknesses, and indexes (if there are calculated solutions) into the application window's document area. Note: If the Automatic Storing Data field is set (or checked), this button is not available until the Automatic Storing Data field is cleared (or unchecked). Automatic Storing Data Field: Automatically stores the Psi -Delta and the calculation results into the application window's document area.

26 Measurement and Calculation Control Field: User can enter the Sample name; the Psi's, the Delta's, Minimum, and Maximum values into edit fields. Minimum and Maximum Fields: User enters the range for the thickness values. Shortcut Buttons: User may attach a Calculation Setup File (CSF) to each shortcut button. This is done by the use of the small button to the right of each shortcut. The new name of the Calculation Setup File will be displayed on the button. Return Button: Closes the 2 Angle Measurement & Calculation Dialog Box and returns to the main window document area. Keyboard Shortcut Keys: Press A

27 Step-By-Step Tutorial for 2 Angle Measurement & Calculation 1. Check the hardware connection between the Ellipsometer instrument and the computer. Turn on the instrument's switch. 2. Run the application. 3. Open the 2 Angle Measurement Calculation Dialog Box by either the Ellipsometer menu's 2 Angle Measurement & Calculation command or the 2 Angle 2«1>1 the tool bar. button on»the 2 Angle Measurement & Calculation Dialog Box will pop up over the application window with the Odefault.csf file's setting. The Odefault.csf file is used when the user opens the 2 Angle Measurement & Calculation Dialog Box for the first time in each session of the application. 4. Type a string (up to 80 characters) for the Sample field, change some parameters: for example, 4000 for the Thickness1, for Nf1, for Kf1, etc. Click the Save Current Setup to a file button.»the Save As Dialog Box will pop up. Type test1 into the File Llame: field and click the Save button, then the current setting will be saved into the file test1.csf, and the file name will be displayed in the Setup File field of the 2 Angle Measurement & Calculation Dialog Box. 5. To make it easier on the user, four shortcut buttons have been added. The user may attach a Calculate Setup File (CSF) to each shortcut button. This is done by the use of the small button to the right of each shortcut button. The name of the Calculate Setup File will be displayed on the shortcut button.»when a shortcut button is clicked, three actions occur: a.) Setup parameters are set to those of the setup file linked to the shortcut button. b.) The ellipsometric parameters Psi and Delta, for Phi and Phi2, are measured at the wavelength. c.) A solution is calculated. Note: When the user first enters the 2 Angle Measurement & Calculation Dialog Box, the shortcut buttons will have the default settings. 6. Click the Store Setup button.»the current active setup will be displayed on the application screen's document area. (Since the application window is behind the 2 Angle Measurement & Calculation Dialog Box, the user may need to move the 2 Angle Measurement & Calculation Dialog Box by dragging it to see part of the application window's document area.)

28 7. On the right side of the 2 Angle Measurement & Calculation Dialog Box, click the Measure button.»the user will be prompted to set the angle to either Phi or Phi2, depending on which angle is checked off as the starting angle. The measured Psi and Delta for that angle will be displayed on the screen, in the appropriate columns. This same procedure will be repeated for the second angle. 8. Click the Calculate button.»it will calculate the matched thicknesses and indexes, for Phi and Phi2, using the current parameters settings and display the result to the screen for each angle. 9. Click the Store Measured Data button.» The current Psi-Delta, matched Thickness and Index, for Phi and Phi2, will be displayed on the application window's document area. 10. Now, click the Measure.and Calc:ulate button.»steps 7 and 8 will be performed right after each other. Note: Just like step 9, the user can store the results by clicking the Store Measured Data button. If the user wants to keep storing the result of every Psi-Delta and Calculation, check the box next to the Automatic Storing Data. For practice, click the Measure and Calculate button several times after the Automatic Storing Data has been set (or checked). 11. Close the 2 Angle Measurement & Calculation Dialog Box by clicking the Return button. 12. On the application window, the user can save the contents in the document area into an external file by the Save SMD button. on the toolbar or the Eile menu's Save command. For practice, click the Save SMD button on the toolbar and type test1 in the File name: field of the Save As dialog box and click the Save button. The document will be saved as test1.smd file. If the user wants to save the contents in the document area into a TEXT file, click the Save As TXT button on the toolbar or the file menu's Save As TXT command. For this text file, the user can use any text-editing program to open and modify it.

29 13. Now create a new document by clicking the New button..., on the toolbar or Eile menu's New command. The document area will be cleared with new a blank document. 14. Open the 2 Angle Measurement & Calculation Dialog Box again (see step 3).»This time, the 2 Angle Measurement & Calculation Dialog Box will pop up over the application window with the test1.csf file's settings, which the user has used recently, rather than the Odefault.csf. The user may try to change the parameters and save it as a different parameter file as many times as the user wants (see step 4). 15. Click the Load a Setting from a file button.»the Open Dialog Box will pop up and display all the CSF files. Select a file and click the Open button. Then the Measurement & Calculation Dialog Box will be re-displayed with the parameter settings of the file the user has selected. 16. Now close the 2 Angle Measurement & Calculation Dialog Box and exit the application.»if the current document area has been changed but it has not been saved yet, the user will be prompted to save it or not. Then the application will close the-application window. To see detailed descriptions about menu commands and buttons, go through the Menu Commands on the Help Main Page

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31 Help Menu Commands The Help menu offers the following commands, which provide the user assistance with this application: Help Topics Offers the user a Help System to find topics on which the user can get help, Quick Information About Offers the user a Quick Information Dialog Box. Displays the version number of this application.

32 Help Menu's Help Topics Command Use thfs command to dfsplay the openfng screen of.!:!slli2. From the opening the Help window, the user can select a specific help topic through the Contents tab, Index tab or Find tab and then jump to the specified topic for Gaertner Ellipsometer Measurement. Once the user opens a Help Topic (nke the window the user is reading now), the user can cltck the Contents button whenever the userwants to return to the Help window in which the user can select other topics through other tab again: Contents tab, Index tab or Find tab. Keyboard shortcut Keys: Press H

33 Help Menu's Quick Information Command or Button -.1J on the Toolbar Use this command to display the Quick Information Dialog Box. This gives a quick and short explanation of what the main features of this program are. Keyboard shortcut Keys: Press Q

34 Quick Information Dialog Box

35 Help Menu's About Command Use this command to display the copyright notice and version number of the current copy of Gaertner Ellipsometer Measurement the user is using. Keyboard shortcut Keys: Press G

36 GEMP CALCULATlON MODE The GEMP software acquires data from the ellipsometer and calculates the ellipsometer values of Psi and Del for the measured sample. The Calculation Mode in the software offers 6 choices for converting the results of the Psi & Del measurement into a user constructed model of the sample. The user simply clicks on the desired Calculation Mode with the computer's mouse pointer and then clicks the Calculate button after individual entries of film Thickness; film refractive index Nf and absorption Kf are entered into the sample model fields. The individual values in the setup or construction of the sample model can be repeatedly changed and recalculated until a best-fit solution for the sample is found. Although the GEMP software permits up to 4 layers with 14 individual values to be entered into the setup fields for modeling of the sample only the 1 or 2 top unknown values can be calculated since only 2 va.lues (Psi and Delta) are returned from the measurement.. The number of unknown~cannever be greater than the number known. Usually the unknowns are the top film Thickness1 and the film refractive index Nf1 with all of the other bottom 12 values entered as known parameters or fixed values. The calculated Thickness value is dependent on the accuracy of the entered known fixed values and will reflect any error in these values. AutoFix Nf1 - Calculates Top Film Thickness1 and automatically measures the film refractive index Nf1 if it is in a good measurement range. If the index value is weak and unstable then it automatically defaults to the entered value and is fixed. The index value is important because its value is used to calculate the optical path or film thickness. An example would be 500A Si02 film layer on a Silicon wafer measuring Psi and Delta The software would calculate a film refractive index of and Thickness1 of A Since Si02 is completely transparent at the measured wavelength of 6328A the absorption Kf1 is zero. This same Si02 oxide film if etched down to 1ooAwould measure a Psi of and Delta of In this thickness range the refractive index measurement is unstable so this, calculation mode permits the software to fix the index at its entered default value of 1.46 and calculate the thickness. A similar fixing of index would occur if this oxide were within a few hundred angstroms of the period value of 2800A. Again the index measurement is unstable in this thickness range (within about 25% of zero thickness or period value). Conversely the best thickness range for index measurement is mid period 1400A for Si02 and 900A for Nitrides which have a period value of 1800A. Thickness1 & Nf1 - Always returns a measured film refractive index Nf1 no matter how unstable and incorrect. Since the calculation of top film Thickness1 is dependent on this index value it will also be incorrect. This measuremerit mode is used to find an approximate value of film refractive index and thickness.

37 Thickness1 & PsiC I DeltaC - Always uses the entered value of film refractive index Nf1 to calculate the Top Film Thickness1. In addition the software also calculates one of the measured values of PsiC or DeltaC. The agreement between the measured Psi or Delta and the calculated values of PsiC or DeltaC gives an indication of the correctness of the value of index and other values in the model of the sample. This mode will give the best repeatability in thickness and if the index value is correct then this mode also gives the best and most stable film thickness measurement. This mode can be used to measure very thin films down to 1 A as well as near period films. Thickness1 & Thickness 2 - Calculates the top film Thickness1 and the film Thickness2. All other values are fixed in this calculation. An example would be a 600A Nitride layer Thickness1 on 400A of Oxide Thickness2 on a Silicon substrate. In this mode the Thickness2 behaves much like the index and becomes unstable and difficult to measure in thinner ranges of thickness. Thickness1 & Kf1 - Calculates the top film Thickness1 and the top film absorption Kf1. An example would be a polysilicon film with a approximate Thickness1 of 4000A a known index value Nf1 of 4.0 and an absorption Kf1 of about 0.3 over a 10QOA known oxide layer ona Silicon wafer. In this example the oxide layer Thickness2 and refractive index must be accurately known. The polysilicon must be known to within 800A since its high film index gives it a period value of only 800A. In most cases the absorption Kf1 of the polysilicon is more volatile not as well known as the real refractive index Nf1. Since the Nf1 is more stable, the Nf1 is fixed and the absorption Kf1 is measured. Substrate - Calculates the real Ns and imaginary part of the refractive index Ks of a bare substrate. Although the measurement itself is simple the results are more complicated because most substrates including silicon form a thin native oxide layer on the surface of the substrate when exposed to air. This offsets the calculated values. In addition, microscopic surface roughness introduces polarization errors that influence the Ks value. For uniformity and simplicity well known published II book" values are generally used in place of individual user measured values. A good substrate will be flat, stable, have a smooth highly reflective surface with a different index than the film layer being measured. If the substrate is transparent like glass or fused silica then care must be taken so that the light reflected from the bottom surface does not enter the ellipsometer. A transparent substrate can be thicker than 6mm, or have it's bottom surface roughened to scatter the light or placed in optical contact with a thicker layer to absorb me unwanted bottom reflection. A 10mm thick polished fused silica plate is an example of a good substrate.

38 ELLIPSOMETRY CONSTANTS Material Symbol N K ( 6328A unless Source specified) Acrylics ( gen. purpose) Aluminum ( bulk) A Aluminum ( metallic) Shiles Aluminum ( metallic) Shiles Aluminum ( polished) Greef Aluminum ( sputtered) 2.26 Aluminum ( UHV deposited) Nyce Aluminum Carbide A14C3 2.7 Aluminum Fluoride A1F u Mathis Aluminum Oxide ( film ) A Antimony ( bulk) Sb Antimony Trioxide Sb ? Mathis Antimony Trisulphide SB2S u Mathis Arsenic Selenide As2Se3 N/A N/A 6320 Palik Arsenic Sulfide ( crystalline) As2S3 3.19(a) N/A 6250 Palik Arsenic Sulfide ( crystalline) As2S ( b ) N/A Palik Arsenic Sulfide ( crystalline) As2S ( c) 6.2 x 10-6 ( c) Palik Arsenic Sulfide ( vitreous) a-as2s x Palik Arsenic Trisulphide As2S3 2.8? Mathis Asphaltum ( bitumen) Barium Fluoride BaF u Mathis Barium Oxide BaO 1.98? Mathis Barium Sulphide BaS 2.16? Mathis Beryllium Oxide BeO 1.72? Mathis Bismuth Fluoride BiF u Mathis Bismuth Fluoride BiF u Mathis Bismuth Oxide Bi ? Mathis Bismuth Trisulphide Bi2S3 1.5? Mathis Boron Oxide B ? Mathis Cadmium ( bulk) Cd Cadmium Fiuoride CdF2 1.56? Mathis Cadmium Oxide CdO 2.5 Cadmium Selenide CdSe u Mathis Cadmium Siliside CdSi ? Mathis Cadmium Sulphide CdS 2.4? Mathis Cadmium Telluride CdTe Palik Cadmium Telluride CdTe N/A 6250 Palik Calcium Fluoride CaF ? Mathis Calcium Oxide CaO 1.84? Mathis Calcium Silicate CaO-Si ? Mathis Calcium Sulphide CaS 2.14? Mathis Caicium Tungstate CaW ? Mathis Carbon to 0.04 Cellulose Acetate Celluiose Acetate Butyrate Cellulose Nitride Cellulose Propionate Cerium Fluoride CeF u Mathis Cerium Oxide Ce ? Mathis Cesium Bromide CsBr 1.70? Mathis Page 1

39 Material Symbol N K ( 6328A unless Source specified) Cesium Chloride CsC1 1.64? Mathis Cesium Iodide Csi 1.79? Mathis Chioiote Na5A13F ? Mathis Chromium ( bulk) Cr Chromium Oxide Cr Cobalt ( bulk) Co Cobalt Chromium CoCr Cobalt deposited 3.10 Copolyvinyi Chloride Acetate Copper ( bulk) Cu Copper ( evap. ) Copper ( evap. ) Copper ( evap. ) Copper ( evap. ) Palik Copper Chloride CuC1 1.93? Mathis Copper Oxide Cu u Mathis Copper Oxide CuO 2.63? Mathis Copper Sulfide CuS 1.45? Mathis Corn Oil Cryolite Na3AIF A Mathis Cubic Carbon ( Diamond) C ( neg1. ) 6439 Palik Cubic Carbon ( Diamond) C ( c ) Diamond C 2.42 Ethyl Cellulose Gadolinium Gallium Garnet GGG Small Value 6330 Gadolinium Oxide Gd u Mathis Gadolinium Aluminum GaA1As3.0 Arsenide Gallium Arsenide GaAs Gallium Arsenide GaAs Gallium Arsenide GaAs Gallium Arsenide GaAs Palik Gallium Arsenide GaAs Palik Gallium Arsenide GaAs Palik Gallium Arsenide GaAs Gallium Phosphide GaP N/A 6300 Palik Garnet:: Common, black 3CaOFe2033Si Garnet:: Common, black A12033Fe03Si Garnet:: Common, black 3CaOA12033Si Garnet:: Common, black 3MnOA1203ASi Garnet:: Common, black 3CaOCr2033Si Gelatin Germanium ( bulk) Ge Germanium ( evap. ) Germanium ( evap. ) Palik Germanium ( evap. ) 5.5 N/A 6358 Palik Glass, Borisilicate Glass, Schott ? Mathis Gold ( bulk) Gold ( electrol. ) Gold ( evap. ) Gold ( plated) N/A (- 3) 6199 Palik Gold ( sputtered) Au Page 2

40 Material Symbol N K ( 632SA unless Source specified) Hafnium Oxide Hf u Mathis Indium Antimonide InSb Palik Indium Arsenide InAs Paiik Indium Phosphide InP 3.42 Indium Phosphide InP Indium Phosphide InP Paiik Indium Phosphide InP Palik Indium Tin Oxide 1.83 ( 85% transparent) Iridium Ir Paiik Iron Oxide ( red) Fe Lanthanum Bromide LaBr3 1.94? Mathis Lanthanum Fluoride LaF u Mathis Lanthanum Oxide La u Mathis Lead Chloride PbC12 2.2? Mathis Lead Fiuoride PbF u Mathis Lead Iodide Pbl2 2.7? Mathis Lead Oxide PbO 2.55? Mathis Lead Selenide PbSe Paiik Lead Sulfide PbS Paiik Lead Telluride PbTe (6.4 ) ( 4.3) 6199 Korn & Braunst Lithium Bromide LiBr 1.78? Mathis Lithium Chloride LiC1 1.66? Mathis Lithium Fluoride LiF ( neg1. ) 6400 Paiik Lithium Niobate LiNb ord ( 1. ) 6439 Paiik Lithium Niobate LiNb ext ( II ) Palik Lithium Oxide Li ? Mathis Magnesium Chloride MgC12 1.6? Mathis Magnesium Fluoride MgF Magnesium Oxide MgO 1.7? Mathis Manganese Sulphide MnS 2.7? Mathis Melamine Formaldehyde 1.6 Mercury Hg Mercury Oxide HgO Molybdenum Trioxide Mo03 1.9? Mathis Neodymium Fluoride NdF u Mathis Nickel ( bulk) Ni Nickel ( bulk) Ni Nickel ( electrol. ) Nickel ( eleclrol. ) Paiik Nickel Oxide NiO 2.18? Mathis Niobium ( bulk) Nb Niobium Pentoxide Nb ? Mathis Oil Lube 1.36 Paraffin Phenoi Formaldehyde Photoresist 1.64 Platinum ( bulk) Pt Platinum ( eleclrol. ) Platinum ( electrol. ) Paiik Polyamide 1.6 Page 3

41 Material Symbol N K ( 8328A unless Source specified) Polyelhylene Polysilieon Irene Polysilieon ( amorphous) Polysilieon ( large grain P doped) Polystyrene Polystyrene Buladiene Polyvinyl Acelal Polyvinyl Acelale Polyvinyl Chloride Polassium Bromide KBr 1.56? Mathis Polassium Chloride KC ( neg1. ) 6400 Palik Polassium Fluoride KF 1.35? Malhis Polassium Iodide KI 1.68? Malhis Praseodymium Oxide Pr ? Malhis Quartz ( Fused Silica Silicon Dioxide Glass) Rhodium Rh Palik Rubber - chlorinaled Rubidium Chloride RbC1 1.49? Malhis Sapphire ( crystalline) A Sapphire ( cryslalline ) A Scandium Oxide Sc u Malhis Selenite CaS042H Selenile CaS042H Selenite CaS042H Silicide ( similar 10 poly) Silicon Si Silicon Si Palik Silicon Si Palik Silicon Si Palik Silicon Si Palik Silicon ( Amorphous) a-si Silicon ( Amorphous) a-si Palik Silicon ( Amorphous) a-si ( 4.71 ) ( ) 6199 Palik Silicon Carbide SiC Silicon Carbide SiC N/A 6199 Palik Silicon Dioxide ( cryslalline ) Si rd (6278 ) Palik Silicon Dioxide ( srystailine ) Si ext Palik Silicon Dioxide ( deposited) Si Silicon Dioxide ( Glass) Si02- glass Palik or quartz Silicon Dioxide ( grown) Si Silicon Dioxide ( grown) Si Silicon Monoxide SiO Palik ( noncryslalline ) Silicon Nitride Si3N ( noncryslailine ) Silicon Nitride Si3N ( negl. ) 6199 Palik Silicon Oxide Si Page 4

42 Material Symbol N K ( 6328A unless Source ( specified) Silox ( mixture of saline & oxygen) Index varies with phosphorous doping Silver (bulk) Ag Silver ( evap. ) Ag Silver ( evap. ) Ag Palik Silver Bromide AgBr 2.25? Mathis Silver Chloride AgC1 2.07? Mathis Silver Iodide Ag1 2.21? Mathis Sodium Bromide NaBr 1.64? Mathis Sodium Chloride NaC Palik Sodium Cyanide NaCN 1.45? Mathis Sodium Fluoride NaF u Mathis Sodium Hydroxide NaOH 1.36? Mathis Spinel Mg035A ? Mathis Strontium Fluoride SrF2 1.44? Mathis Strontium Oxide SrO 1.87? Mathis Strontium Sulphide SrS 2.11? Mathis Tantalum ( bulk) Ta Tantalum Pentoxide Ta Thaliium Bromide T1Br 2.3? Mathis Thaliium Chloride T1C1 2.78? Mathis Thaliium Iodide ( B ) T Thorium Bromide ThBr u Mathis Thorium Dioxide Th u Mathis Thorium Fluoride ThF4 1.52? Mathis Thorium Oxynuoride ThOF2 1.52? Mathis Tin Oxide Sn Titanium ( evap. ) Ti Titanium Dioxide ( Rutile) Ti =nll, 2.58=n Palik Titanium Nitride TiN Titanium Oxide TiO 2.2 Tungsten ( bulk) W Tungsten ( buik ) W Palik Tungsten Trioxide W ? Mathis Vanadium ( bulk) Va X-Ray ( substrate) 1.74 X-Ray Film Ytterbium Fluoride YbF u Mathis yttrium Oxide Y SmaliVaiue 6330 Zinc ( bulk) Zn Zinc ( evap. ) Zn Zinc Selenide ZnSe 2.6? Mathis Zinc Sulfide ( cubic) ZnS N/A(-3.6x 10-6) 6199 Palik Zinc Sulfide ( hexagonal) ZnS-hex 2.38 ord 6x10-2ord 6199 Palik Zinc Sulfide (hexagonal) ZnS-hex 2.36 ext N/A Palik Zinc Sulfide ( hexagonal) ZnS-hex 2.354ord N/A 6250 Palik Zinc Sulfide ( hexagonal) ZnS-hex ext N/A Palik Zinc Telluride ZnTe u Mathis Zirconium Oxide Zr Mathis Page 5