MEMS Pro V3 Layout Tutorial

Transcription

1 MEMS Pro V3 Layout Tutorial MEMSCAP Yiching Liang March 6, 2002 Launching MEMS Pro V3 Double click on the MEMS Pro V3 icon on your desktop to launch MEMS Pro Menu bar Standard toolbar Drawing toolbar SPR/BPR toolbar Layer palette Verification toolbar MEMS Pro toolbar 3D model toolbar Locator Editing toolbar Layout Area Mouse button bar Status bar 2 1 1

2 Customizing Design Environment Toolbars can be shown or hidden using View > Toolbars Select desired toolbars by checking the boxes Toolbars can be rearranged by dragging on the tabs The function of a button pops up when the mouse pointer is placed over it 3 Standard Toolbar File Edit View Cell Help CSV Shortcut buttons to commonly used menu commands: File: open, close, save, print Edit: cut, copy, paste, undo, redo, etc. View: design navigator, mouse zoom, etc. Cell: instance, copy cell CSV: cross-section view Help: on-line manual 4 2 2

3 Open File Goto File > Open Browse to Layout Demo.tdb and click OK Design navigator Lists all the cells contained in the file, and their hierarchical structure Goto View > Design Navigator Click on the + or boxes to expand/collapse the tree 5 Setup Design Technology Goto Setup > Design Technology name: MUMPS V 4.1 Technology units: Microns L-Edit internal unit Precision of internal calculations Conversion factor: 1 internal unit = 1/1000 microns 6 3 3

4 Setup Design Grid Select the Grid tab Grid display: Size of displayed grid = 1 locator unit Mouse grid: Grid for mouse click = 1 locator unit Locator units: Locator unit = 1000 internal unit (= 1 micron) Locator bar displays location of mouse pointer 7 Cells There are several ways to open a cell Double click the cell name in the design navigator Goto Cell > Open Use the Open Cell button We will create a new cell Goto Cell > New Type in new cell name: test Open that cell A blank window opens up, this is the layout area for drawing/editing layout 2-D Axes Micron grid Origin: indicated by a cross 8 4 4

5 Information Toolbars Mouse toolbar: displays functions of mouse buttons Left: left mouse button Center: middle button Right: right mouse button Mouse functions depend on Location of mouse in the application Current mode (drawing, editing, zooming, etc.) Status Bar Status bar displays context-sensitive information about items in the interface 9 Layer Palette Layer Name Color icons Layer palette (left side of the screen) displays layer names and color icons Mouse button functions on layer palette icons: Left: select active layer Middle: hide/show layer Right: hide/show/lock/unlock individual or all layers

6 Drawing Toolbar selection port instance box polygons wires circular objects Button short cuts to drawing commands: Selection: for selecting objects Drawing objects: box, polygon, circle, pie wedge, torus, port, ruler, instance To draw objects rulers Select the layer you want to draw on by clicking on the icon in the layer palette Select the shape you want to draw Click/drag on the drawing area (depending on shape) Right click to end polygons 11 Editing Toolbar Duplicate Nibble/slice Edit object Flip/rotate Merge/group Move by To edit an object Select the object using the selection tool, or right click Selected objects will usually display different colors/outlines Select the editing button

7 Viewing Transformations View > Zoom, or View > Pan Keyboard shortcuts: Home Zoom out to entire cell + Zoom in - Zoom out W Zoom to selected object Pan left Pan right Pan up Pan down Spacebar Redraw 13 Setup Layers Setup > Layers

8 Setup Layers Layers List First few layers (Grid Layer to Error Layer) are Special Layers for L-Edit system objects The rest are custom layout layers To modify layer list: Edit: select a layer from the list box and edit parameters on the right Add: click Add button Remove: click Delete button Rename: click Rename button Rearrange layer order: click or Move Layer buttons 15 Layer Parameters General: Electrical properties: capacitance, resistivity Import/Export parameters: GDSII number, CIF type & name Default wire settings Derivation: Layers can be drawn, or derived from other layers Rendering: Color display

9 Replacing Setup Information We want to reload the MUMPS design kit: File > Replace Setup Check all boxes Browse to and open MUMPS.tdb, and press OK 17 MEMS Pro Toolbar Library 3D Tools Easy MEMS Splines Tools Help

10 Library Palette Open the Library cell Library > Library Palette Standard MEMS components can be instanced into design Active Elements Passive Elements Test Elements Resonator Elements 19 MEMS Pro Toolbar Library Palette Details Click on Show Details Displays geometric parameters of the selected component that can be modified Select the first element (linear comb)

11 Inserting Components Enter parameters in the pop-up window Use default Click OK Click on the layout area to insert component 21 Library Components Close the Library Palette Window Press the Home key to zoom out to the whole layout

12 MEMS Pro Toolbar 3D Tools Edit Process Definition Import or edit process definition for creating 3D model View 3D Model Create or display 3D model Delete 3D Model Export 3D Model Export 3D model for ANSYS simulation (*.SAT or *.ANF) 23 Edit Process Definition Process definition window displays the MUMPS process

13 Generate 3D Model Import MUMPs.pdt This reloads the standard MUMPs process 3D model can be generated by 3D Tools > View 3D Model, or 25 Viewing 3D Model Press the Home key to zoom in Each layer can be shown/hidden by middleclicking the corresponding 3D layer icons Rotate/Zoom using 3D Model Toolbar Keyboard shortcut: Ctrl + mouse buttons

14 Cross Section View To display all layers Right click any of the color palette icons, and select Show All Click to generate cross-section view of 3D model Specify cross-section line in pop-up window Click Horizontal Click OK 27 Cross Section View Zoom: +, - Window zoom: press z, then drag the mouse across the region to view Fit window: Home key Pan:,,,

15 Resonator Example Library components can be combined to form whole structures Open Resonator cell 29 MEMS Pro Toolbar Easy MEMS Plate Release Adds holes and dimples to design to help with wet release. Polar Array Creates polar arrays

16 Easy MEMS Plate Release Cell > Open > Plate Release Cell contains a torus on poly0 layer 31 Plate Release Insert Holes Select the torus Open Easy MEMS > Plate Release Etch holes: Width & Length: 5, 5 Spacing: 40 Hole Layer: Hole0 Extract holes: (unchecked) Create dimples: (unchecked) Click OK

17 Released Plate Holes created on Hole0 layer 33 Easy MEMS Plate Release With Dimples Cell > Open > Plate Release With Dimples Cell contains a rectangle on poly1 layer

18 Plate Release Insert Holes Select the torus Open Easy MEMS > Plate Release Etch holes: Width & Length: 5, 5 Spacing: 20 Hole Layer: Hole1 Extract holes: (unchecked) Create dimples: (checked) Width & Length: 6,6 Ratio: 1 dimple for 2 holes Dimple Layer: Dimple Click OK 35 Released Plate Holes created on Hole1 layer Dimples created on Dimple layer

19 MEMS Pro Toolbar - Splines Create & Edit splines from polygons and wires Cell > Open > Spline Channel Select center polygon Curves > Splines > Create 37 MEMS Pro Toolbar - Splines Select Replace original object With the Ctrl key pressed, select vertices (1, 4, 5, 8), set shape factor to Angle Shape factor of (1, 4, 5, 8): 0 No change to other vertices Shape factor of (2, 3, 6, 7): 1 Click OK

20 Created Spline Channel joint smoothed out