HTD series digital differential pressure sensors
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- Dwight Watkins
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1 The HTD differential pressure sensors are specially developed for pressure ranges from 1 mbar to 10 bar and demanding space constrictions. The sensors allow for flexible direct manifold assemblies and offer high performance and accuracy. A digital interface and analog voltage output provide OEMs maximum flexibility for any type of application. Features Pressure ranges from 1 mbar to 10 bar Single 5 V or 3 V supply Max. output current 1 ma Digital SPI or I²C output Temperature compensated range C Operating temperature range C Total pressure accuracy down to max. 0.5 %FS Temperature output, total accuracy max. 1 C Adjustable output resolution (up to 15 bits) versus sampling rate (up to 3.9 khz) Outstanding offset stability Small footprint, low profile Pressure ports for direct manifold assemblies Certificates Quality Management System according to EN ISO and EN ISO 9001 RoHS compliant Media compatibility Pressure port P1: Non-corrosive gases compatible with silicon, RTV, ceramics Al 2 O 3, Pyrex, LCP plastics. Pressure port P2: Non-corrosive gases compatible with silicon, RTV, ceramics Al 2 O 3, Pyrex, epoxy, FR4. Applications Medical Ventilators Spirometers CPAP Sleep diagnostic equipment Nebulizers Oxygen conservers/concentrators Insufflators/endoscopy Industrial HVAC VAV Filter monitoring Burner control Fuel cells Gas leak detection Fume hood Instrumentation Security systems Page 1/9
2 Maximum ratings Parameter Min. Max. Unit Supply voltage HTD...P HTD...Q V CC Output current 1 ma Lead specifications Average preheating temperature gradient 2.5 K/s Soak time approx. 3 min. Time above 217 C 50 Time above 230 C 40 s Time above 250 C 15 Peak temperature 260 C Cooling temperature gradient -3.5 K/s Temperature ranges Compensated Operating C Storage Clock frequency (SPI and I²C bus) 400 khz Pressure sensor characteristics Part no. Operating pressure Over pressure (1) Burst pressure (2) HTDM mbar HTDM2x mbar HTDM mbar 100 mbar 100 mbar HTDM mbar HTDM mbar 200 mbar 300 mbar HTDM mbar 500 mbar 750 mbar HTDM mbar 1 bar 1.5 bar HTDM mbar 1 bar 1.7 bar HTDB bar 3 bar 5 bar HTDB bar 6 bar 10 bar HTDB bar 15 bar 25 bar HTDB bar 21 bar 25 bar HTDB bar 25 bar 25 bar (1) Over pressure is the maximum pressure which may be applied without causing damage to the sensing element. (2) Burst pressure is the maximum pressure which may be applied without causing leakage damage to the sensing element. Page 2/9
3 Performance characteristics (T A =25 C) Accuracy (@ 25 C) 3 up to 5 mbar ±2 ±4 10 to 100 mbar ±0.5 ±1 all others ±0.1 ±0.3 Total accuracy ( C) 4 up to 5 mbar ±2.5 ±5 10 to 100 mbar ±0.75 ±1.25 all others ±0.25 ±0.5 Nonlinearity (BFSL) 5 ±0.1 ±0.3 Repeatability 6 up to 5 mbar ± to 100 mbar ±0.05 %FSS all others ±0.01 Position sensitivity up to 5 mbar ± to 100 mbar ±0.05 all others ±0.01 Long term drift (one year) up to 5 mbar ± to 100 mbar ±0.1 all others ±0.05 Response 15 bit 2.2 ms A/D resolution 15 D/A resolution 11 Bit Load resistance 2 kω Current consumption ma (3) Accuracy includes all effects (offset, span, non-linearity, pressure hysteresis and repeatability) at room temperature and represents maximum deviation of transducer signal from ideal characteristic. (4) Total accuracy includes all effects (offset, span, non-linearity, pressure hysteresis and repeatability) included with all temperature effects of offset and span. It describes overall error and represents maximum deviation of transducer signal from ideal characteristic in compensated temperature range from C. (5) Non-linearity is defined as the BFSL (best fit straight line) across entire pressure range. (6) Repeatability is defined as typical deviation of the output signal after 10 pressure cycles. Page 3/9
4 Performance characteristics 5 V devices (V CC =5 V, T A =25 C) Analog output 7 Unidirectional pressure devices Zero pressure offset 0.5 Full scale span (FSS) Full scale output 4.5 Bidirectional pressure devices Zero pressure offset 2.5 Full scale span (FSS) Output at max. specified pressure 4.5 at min. specified pressure 0.5 V V Digital output (15 bit) Unidirectional pressure devices Zero pressure offset 3277 Full scale span (FSS) Full scale output Bidirectional pressure devices Zero pressure offset Full scale span (FSS) Output at max. specified pressure at min. specified pressure 3277 Temperature devices Temperature output 0 C 70 C (7) Analog output signal is ratiometric to power supply Vcc, digital signal is not ratiometric to the power supply. (8) Full Scale Span (FSS) is the algebraic difference between the output signal for the highest and lowest specified pressure. (9) Digital output signal (temperature) is not ratiometric to power supply Vcc. Temperature data are read directly on the sensing element. Page 4/9
5 Performance characteristics 3 V devices (V CC =3 V, T A =25 C) Analog output 7 Unidirectional pressure devices Zero pressure offset 0.3 Full scale span (FSS) Full scale output 2.7 Bidirectional pressure devices Zero pressure offset 1.5 Full scale span (FSS) Output at max. specified pressure 2.7 at min. specified pressure 0.3 V V Digital output (15 bit) Unidirectional pressure devices Zero pressure offset 2731 Full scale span (FSS) Full scale output Bidirectional pressure devices Zero pressure offset Full scale span (FSS) Output at max. specified pressure at min. specified pressure 2731 Temperature devices Temperature output 0 C 70 C (7) Analog output signal is ratiometric to power supply Vcc, digital signal is not ratiometric to the power supply. (8) Full Scale Span (FSS) is the algebraic difference between the output signal for the highest and lowest specified pressure. (9) Digital output signal (temperature) is not ratiometric to power supply Vcc. Temperature data are read directly on the sensing element. Page 5/9
6 Dimensional drawing 10 3,40 8 4,57 7,55 ±0,20 4,55 ±0,20 1,52 2,21 13,31 ±0,20 7 4,90 ±0,20 3 1,50 High pressure port 0,10 +0,20 0 3,10 2,50 (10) General tolerances for mechanical parts: DIN ISO 2768 Tolerances and acceptance conditions for plastic molded parts: DIN Page 6/9
7 Dimensional drawing 10 7 ±0,1 11,6 ±0,2 4,6 ±0,2 13,3 ±0,2 8 ±0,2 1,6 0,4 0,6 High pressure port 3,9 2,2 3 7,3 12,1 Soldering footprints Edge pins No open wires, open traces or vias allowed in centre area (10) General tolerances for mechanical parts: DIN ISO 2768 Tolerances and acceptance conditions for plastic molded parts: DIN Page 7/9
8 Custom adaptor Tape and reel packaging 13 inch reel, 500 pcs/reel ± ± ± Feed direction Page 8/9
9 Electrical connection Bottom view SPI bus Pin Name Function 1 Vout Analog output 2 GND Ground 3 MOSI Data IN for SPI 4 CLK SPI clock 5 SS SPI slave select 6 MISO SPI data out 7 NC Not connected 8 +Vs Positive power supply I²C bus Pin Name Function 1 Vout Analog output 2 GND Ground 3 SDA Data I/O 4 SCL I²C clock 5 I/C* Internal connection 6 I/C* Internal connection 7 NC Not connected 8 +Vs Positive power supply Note: Do not connect leadless grid array in centre area. Ordering information Series Pressure range Calibration Housing Grade Option HTD M001 1 mbar B* Bidirectional S SMD, 2 ports, axial, straight port P SPI, 15 bit, 5 V - T* [Tape and Reel] M2x5 2.5 mbar U Unidirectional E SMD, 2 ports, horizontal, barbed port Q SPI, 15 bit, 3 V * MOQ 500 pcs. M005 5 mbar * only up to 1 bar H I²C, 15 bit, 5 V M mbar J I²C, 15 bit, 3 V M mbar M mbar M mbar M mbar B001 1 bar B002 2 bar B005 5 bar B007 7 bar B bar Order code example: HTDM100BSP Page 9/9
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Features Size 52 mm MEMS capacitive measuring principle EN13849 compliant firmware E1 compliant design Interface CANopen, SAE J1939, Analog Connection M12 and cable Protection up to IP 69K Optional GIM500R
JUMO MIDAS C08. OEM Pressure Transmitter Basic. Applications. Brief description. Special features. Customer benefits
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Packaging (5) Protection (3) Isolation Voltage (4)
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CLEARCLOCK POWER OPTIMIZED 0.12ps 5x7mm XO
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accurate measurement of compressed air consumption and leakage detection Calibration certificates and continous calibration, OEKD calibration service
Series Flowmeter for compressed air and gases in Industrial Applications The flowmeter of the series, based on the measurement principle of thermal mass flow, is ideally suited for the measurement of flow
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Freescale Semiconductor Technical Data High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated The