Intel Silicon Photonics: from Research to Product

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IEEE Components, Packaging and Manufacturing Technology Chapter, Santa Clara Valley 3/8/2017 Intel Silicon Photonics: from Research to Product MARCH 8, 2017 Ling Liao Principal Engineer Silicon Photonics Product Division 2016 Product Announcement and celebration CNET Intel: Our laser chips will make sites like Google and Facebook faster Intel Circuit Marching Band in RNB Courtyard Silicon Photonics Harmony Bay PRQ Celebration www.cpmt.org/scv 1

Emergence of Hyper Scale Data Centers Data center networks are struggling to keep up with exponential data growth Google Data Center 5 ZB Worldwide Annual Data Center Traffic (~5X global internet traffic) Facebook Data Center Fort Worth, Texas >$1B >200K Servers 10K+ switches Facebook Data Center Network Design 45%+ Optical Connectivity as % of Networking Spend Other names and brands may be claimed as the property of others Source: Estimates from Facebook, Google, Cisco publications, and Intel network model Network Architecture TODAY Core Network / Inter Data Center Super Spine/Core Different technologies deployed Spine Leaf ToR Inter Data Center 10km-metro Spine-Core 500m-2km Leaf-Spine 300m-2km TOR-Leaf 100m-500m 10G/40G/100G DWDM 40G SMF 40G MMF or SMF 40G MMF or SMF Challenges: Reach Power Latency Cost Scalability Server-Top of Rack (TOR) 1m-30m 10G Cu or AOC 2

Optical Communication Transmitter Receiver ELECTRICAL DATA. Receiver Receiver OPTICAL FIBERS Transmitter ELECTRICAL DATA Laser - light source Modulator high speed encoder Detector - light sensor silicon Photonics Traditional Optics Silicon Photonics Compound semiconductor platform Specialized tools and processes Relatively low-degree of integration All silicon or silicon-compatible platform CMOS manufacturing of photonics High density interconnects made at wafer scale 6 3

Intel Hybrid Silicon laser Key differentiation: Only SiPh product with on-die lasers GR-468 aging test results: 5000 hours HTOL Bonded Hybrid Laser Silicon grating Lasers formed using wafer scale processing. Alignment has litho precision. Mirror Attached Laser Gold bumps Alignment groove Off-chip laser High Speed Silicon modulator Key tech demos: 1 GHz 10 Gbps 40 Gbps 40 Gbps optical eye Carrier dispersion: Carrier density (DN) refractive index (Dneff) optical phase (Df) Devices: MOSCAP and diode Silicon modulator x-section 25 Gbps optical eye MET electrons MOSCAP or PN holes MET Si EPI Buried oxide Si substrate 4

High speed silicon-germanium detector Key tech demos: 40 Gbps PIN, 340 GHz Gain*BW APD 40 Gbps eye High quality film: No visible defects low dark current Ge Si 25 Gbps Rx electrical eye Ge PIN detector x-section MET MET Buried oxide Si substrate Design: DFx and PDK DFM/DFT/DFD early to reduce cost and TTM Process Design Kit (PDK) Standardized Component Library Documentation o o o Process design rules Package and Assembly design rules Tapeout procedure Automated Verification o o o Example of reticle layout: Note heavy use of polygon (non-manhattan) layout Design rule check (DRC) which makes photonics layout tedious vs CMOS Layout vs schematic (LVS): verify device type, connectivity and parameters Parasitic extraction (PEX) 5

Fab: Adopt and reuse Leverage CMOS manufacturing infrastructure and methodologies Cycle time: fast TPT and priority processing can achieve additional 3-4x improvement Change control: all changes are documented and reviewed (Whitepapers and xccb) Process control: 1000 s of process and tool parameters are monitored and recorded Shift-left : in-line data and control/spec limits are used to disposition material early Test: Adopt and retrofit Speed Accuracy Repeatability Adaptability Wavelength Optical Power Ibias Ibias Source: http://www.tel.com 6

Test: Progress to HVM 2011 2012 2013 2014 2015 2016 2017 Basic 200mm Instruments: Rack Automation: None Opt. Alignment: Manual Lot Info: Manual Lot Delivery: Hand Test Start: Manual Data: Text Files Automated 300mm Instruments: Rack Automation: Some Opt. Alignment: Auto Lot Info: Auto Lot Delivery: Robot Test Start: Manual Data: Oracle DB Advanced 300mm Instruments: Integrated Automation: Full SECS/GEM Opt. Alignment: Auto Lot Info: Auto Lot Delivery: Robot Test Start: Auto Data: Oracle DB Reduce test costs by driving control and containment through automation. Accelerated cycle time: Throughput time Reduction 10x 5x Test 100X 14 7

Module packaging PIC and EIC die placement Epoxy attach and cure Wirebond/flip-chip Plasma clean Optical products - unique consideration Optical packaging Sub-mm alignment Stack-up tolerance control Mechanical stability over T and life Optical back-reflection control Thermal management Assembly process thermal budget Heat dissipation Stress management Stress/strain reduction Stress profile managment 15 Intel Silicon Photonics 1 st product (100G PSM4 QSFP28) 4 x 25 Gbps parallel single-mode Reach up to 2km (0-70C) MTP/MPO fiber pigtail or receptacle Transmitter Chip 1101001110 Electrical data in 2 km Receiver Chip Electrical data out 1101001110 8

Intel Silicon Photonics 2 st product (100G CWDM4 QSFP28) 4 x 25 Gbps WDM single-mode 500m reach (15-55C) 2km reach (0-70C) 10km reach (0-70C) Transmitter Chip 1101001110 Electrical data in 0.5-10 km Receiver Chip Electrical data out 1101001110 Core Network / Inter Data Center Network Architecture Super Spine/Core DEPLOYED TODAY UPGRADING NOW Spine Inter Data Center 10km-metro 10G/40G/100G DWDM 100/200/400G DWDM Spine-Core 500m-2km 40G SMF Leaf Leaf-Spine 300m-2km 40G MMF or SMF 100G SMF ToR TOR-Leaf 100m-500m 40G MMF or SMF Server-Top of Rack (TOR) 1m-30m 10G Cu or AOC SiPh Opportunity: flatten the network to bring reduction in power, cost, and latency. 25G Cu or AOC 9

Path to Tera-scale Data Rates Today: 25 Gbps x 4 = 100 Gbps 50 Gbps x 4 = 200Gbps Scale UP Scale OUT 25 Gbps x 8 = 200Gbps Speed Width Rate 25 x8 200G 50 x4 200G 100 x4 400G 100 x16 >1.6T Future Terabit+ Links Future of optical connectivity in Data centers Expected form factor evolution 2016 100G MSA Pluggable 400G MSA Pluggable 2018 / 2019 400/800G embedded 2020+ High density integrated Technology development for miniaturization, high-temp operation, low power process Enabling transition to 100G switch-to-switch connectivity Supporting next-generation switch 12.8Tb/s and 50G I/O Embedded optics for density, signal integrity, and power Address electrical I/O constraints Highest density Lowest system power QSFP-DD image from: http://www.qsfp-dd.com/ Other names and brands may be claimed as the property of others 10

Data center connectivity TAM Data Center 100G+ TAM $5.1B Between DC $2.1B Across DC Data Center total spend on 100G and 400G interconnects $1.2B Across row Connected world, machine-tomachine traffic, data analytics & machine learning driving exponential data growth In rack 2016 2018 2020 Continual innovation needed to support data growth Source: 2015 Intel market model based in part on Dell Oro, Crehan and Lightcounting 2015 reports Intel Silicon Photonics Intel Labs Intel Labs Ventures DCG <2000 Research, Building Block and Technology Development Product Development and Commercialization Building Blocks Lasers Modulators Mux/Demuxs Detectors Passives Packaging Feb 2004 1 GHz Si Mod Feb 2005 1st Continuous Wave Silicon Raman Laser April 2005 10 Gbps Si Mod Sept 2006 Hybrid Silicon Laser July 2007 40 Gbps Si Mod August 2007 40 Gbps PIN Photo-detector Dec 2008 340 GHz Gain*BW Avalanche Photo-detector Dec 2009 4x12.5 Gbps POC Dec 2011 2x25 Gbps POC Dec 2012 4x25 Gbps POC 2016 Product Launch 2000 2017 Spearheaded the field with numerous scientific breakthroughs and POC demonstrations. Achieved commercialization in 2016. Poised to revolutionize data center connectivity. 11

Legal Notices and Disclaimers Intel technologies features and benefits depend on system configuration and may require enabled hardware, software or service activation. Learn more at intel.com, or from the OEM or retailer. No computer system can be absolutely secure. Tests document performance of components on a particular test, in specific systems. Differences in hardware, software, or configuration will affect actual performance. Consult other sources of information to evaluate performance as you consider your purchase. For more complete information about performance and benchmark results, visit http://www.intel.com/performance. Intel, the Intel logo, Xeon and others are trademarks of Intel Corporation in the U.S. and/or other countries. *Other names and brands may be claimed as the property of others. 2016 Intel Corporation. 23 24 12