OpenPDK Production Value and Benchmark Results

OpenPDK Production Value and Benchmark Results Philippe MAGARSHACK Executive Vice-President, Design Enablement and Services June 2 nd, 2014

ST s Strong technology portfolio : Several R&D Partnerships & Manufacturing 2 nd Sources Advanced CMOS FD-SOI MEMS 2 envm Power & Discrete CMOS Image Sensor BiCMOS & Photonics Analog Mixed Signal RF SOI BCD

Target of OpenPDK Coalition 3 OpenPDK Coalition Introduction The OpenPDK Coalition was founded in mid-2010 with the goal of defining a set of open standards to allow an OpenPDK to be a created set of once open and then standards translated into allow specific an EDA vendor tools and specific foundry formats. OpenPDK to be created once and then translated into specific EDA vendor tools and specific foundry formats. This will allow an OpenPDK to be as portable across foundries and as agnostic to EDA tools as possible. Let s Start with PDK Inputs format Open Process Specification The Si2 OpenPDK standard will enable greater efficiency in PDK development, verification, and delivery. http://www.si2.org/?page=1118

WHAT IS OPS? 4 Open Process Specification (OPS) is a standardized format for exchanging all data needed to generate a complete PDK. Supplier DRM DB Layer List Device Specifications XSL parser script Exchange (standardized) OPS.xml <Process> <Libraries> <Devices> <Layers> <Rules> < > OPS.xsd parser This is the SI2 OPS standard parser parser parser parser Customer PDK DRC LVS Library PEX

2006 2009 2010 2011 2012 2013 2014 2006 First edrm & PDK automation (DRC, pcell, QAcell) 40/45nm October 2009 XML edrm program start March 2010 1 rst phase spec frozen June 2010 1 rst IBM & ST discussion about edrm solution 32/28nm August 2010 SI2 OPS Working Group Creation October 2010 ST Contribution : first OPS UML description OPS History March & October 2011 ST Contribution : 1 st & 2 nd OPS.xsd + «demo DRM 45nm 1.0» June 2011 DAC 1 st ST Results with OPS : «Dev. Lib generation from OPS» 20nm June 2012 SI2 DAC Demo : DRM-> XML-> OpenDFM (DRC) -> CDN/SNPS/MGC DRC > Layout Viewer 40nm August 2012 ST Contribution : «Updated demo DRM 45nm» (extended to address Multi Patterning / Local Interconnect Layers & specific rules / 3D Space) Since August 2012 used by ST to generate 20nm/14FDSOI/SI-Photonics PDK Device Library & Techfile November 2012 OPS.XSD 1.0 (semantic of the XML file) Since Q1 2013 used by ST to generate 3D IC PDK Addons June 2013 DAC Demo : Rule subset from ST Demo DRM 45nm translation into OpenDFM deck November 2013 OPS.XSD 1.1 with ST Contribution : «demo DRM 45nm 1.6» Q1 & Q2 2014 OPS Proof of concept Scripts : Automatic Translation OPS opendfm & OPS OpenAccess Techfile June 2014 DAC Demo & Presentation : Full ST «Demo DRM 45nm» translation into OpenDFM deck OPS translation into OpenAccess Techfile Q3 2014 OPS.XSD 1.2 with ST Contribution : «Updated demo DRM 45nm» 5 ST only

Open-PDK Value for ST 6 Self-consistent electronic DRM document to generate automatically the PDK Foundries Inputs <<<< DB OPS.XML PDK EDA Tools Standard needed to drive techno alliance & to manage multiple foundry partnership. Several Supplier Formats d i t a FM Other DB r t f OPS.XML Only one Flow PDK OPDK Working Groups motto: Write once, use many, (test forever)! EDA Tools A EDA Tools B OPS.XML PDK for Tool A PDK for Tool B

OPDK/OPS @ ST Device Library & Techfile 1/2 OPDK Device Library definition Device List : 30 Active (MOS, BIP) + 20 Passive (Res, Capa) CDF : parameters description Callback procedures (range value, parameters checks, equations based, ) Symbol view with display information (pins, params, name) Tools Interfaces : simulation & netlisting stop views. Techfile (Layers, functions, Vias, Constraints) + layer map table + Display info. No Layout Pcell 7 OLG : OpenLibGen ST Tool that creates the OPDK Device Library from OPS.xml. OPS towards Device Library Benchmark Results Manual Generation ex: 45GS, exotic techno, OPS 1.2 + OLG First Library Generation (50 Devices) 4 m.w (Dev + Validation) 1 or 2 DKs per year 1.5 m.w (Dev + Validation) 1 or 2 DKs per year Lib N to Lib N+1 Average Update 1 m.w (4 Days + 1 Validation Day) per DK release (around 120 per year) = 120 m.w 0 m.w (2 hours & correct by construction) per DK release (around 120 per year) = 6 m.w + Automatic Documentation Generation + Quality Improvement + Automatic Documentation Generation Contents New Lib from scratch with a set of 50 devices (Mos, Res, Cap, Bip, ) 15 param per devices + associated callbacks Minimal OA Techfile Generation No Pcell One new device One new param per device One param Value updated per device One new LPP (Layer Purpose Pair) One constraint updated No Pcell update

OPDK/OPS @ ST Device Library & Techfile 2/2 8 Deployed at Production level in ST PDKs 20nm (2011)/ 14nm FD-SOI (2013) Silicon Photonics (SP) (2012) 3D IC Flow (SP + CMOS Sensor) (2013) Next in PDKs Roadmap 28nm FD-SOI PDKs (Q3 2014) RF, mmw, HV, Imager, etc Techno Nodes at 130nm from Q3/Q4 2014

OPDK/OPS @ ST Physical Verification 9 OPS to DRC With OPS & SI2 scripts, OPS Translation into a DRC deck is possible DRC format is opendfm Current Generation & Validation Flow edrm Translation Manual Generation DRC deck For Tool A DRC deck For Tool C DRC deck For Tool B Validation Validation Report on Tool C Validation Report on Tool C Comparison Comparison OPS SI2 OPS2openDFM Automatic Script opendfm Validation Validation Report on Tool A OPS replacing edrm Benefits: Time To market opendfm Automatic generation from new edrm format one opendfm Deck fits all DRC EDA Tools Quality Increase Correct by construction DRC Deck Less duplication in validating multi-deck approach.

OPDK/OPS @ ST Physical Verification 10 Deployment Status in ST PDKs 2012 Benchmark result with OpenDFM 1.0: 60% of Silicon Photonics Rules covered by opendfm Templates Towards complete Adoption by ST : opendfm 1.1 (# rule templates increase) : 2013 OPS 1.2 standard (Full coverage of DRM rule family (20nm)) : Q3 2014 Automation Script (SI2 OPS-to-openDFM) : Q1 2014 Next : EDA Vendor Long-Term commitment to opendfm Continued EDA Vendors (SNPS, CDNC, MGC) support will enable simultaneous up-to-date DRC Support by all vendors Roadmap: opendfm Support in ST PDKs at Production Level 28nm FD-SOI (Q3 2014) 14nm FD-SOI (Q4 2014) Silicon Photonics (SP) (Q3 2014)

OPDK/OPS @ ST Physical Verif : Next 11 OPS to Automated DRC QA pass/fail tests Manual Generation Current ST Internal Automation OPS & EDA Vendors Solution QA pass/fail tests generation 1x 10x 20x No Tooling maintenance DRC vs DRM consistency need to be correct by construction. DRM and other PDK inputs cross-checks DRM vs Design rules check Target : 90%-100% Coverage No existing neither automation nor tooling for verifying DRC decks Need now SI2 & EDA Vendor involvement. Target : from OPS to DRC towards DRC QA Regression 14/28nm FD-SOI (Q4 2014) Silicon Photonics (SP) (Q3 2014)

OpenPDK/OPS Next Step : PCells 12 Problems OpenPCell Addresses More productive programming effort Write once Pcell and Callback code Multi flow support Ease of integration into a PDK Assure high quality Expected Results are : Pcell generation productivity ++ Pcell quality enhancement One Spec Several Pcells code No flow supporting multiple language Fully supports SI2 OpenPcell Initiative Strong Link with OPS seen as added value Looking for Build-In Validation Concept

OPDK/OPS @ ST Next Steps 13 SI2 OpenPDK Project has already delivered several specifications: Device Symbols, Param, Callbacks & Tools Interface ESD, Open Process Spec & Universal Layer Model Others Specs about to be released for Pcells or OPS updates Proof of concept & Scripts are now also available. They will be demonstrated during this DAC at SI2 Booth. OpenPcell & opendfm Last Spec Benchmark to be done Automatic Techfile Constraints generation. Working with EDA Vendors to find a production solution

ST strongly supports PDK Standardization : Best Time-to-market PDK for IP-design flow Best PDK Development efficiency, quality Universal data store for design information (OA) Conclusion 14 EDA Vendors adoption of OPS is now a must-have to deploy across Industry within ST foundry offer. With above action plan for OPS Proliferation ST willingness to being more involve in Open3D & Silicon Photonics TABs ST already uses OPDK in production advanced & legacy technology PDKs.

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Back-Up Slides 10/06/2014

SI2 Presentation 17 Silicon Integration Initiative Organization of industry-leading companies in the semiconductor, electronic systems and EDA tool industries. Focused on improving productivity and reducing cost in creating and producing integrated silicon systems. Through collaborative efforts, the industry can achieve higher levels of systems-onsilicon integration while reducing the cost and complexity of integrating future design systems. Several Coalition initiated through SI2 Open Access Coalition OpenPDK Coalition Design For Manufacturability Coalition Compact Model Coalition Open3D TAB Silcon Photonics (SP) TAB Low Power Coalition

SI2 DFM Coalition 18 the Design for Manufacturability Coalition (DFMC) has developed a standard interface format that describes a comprehensive set of DFM parameters that can verify that a circuit will meet it s profit targets. The DFM parameters are defined in an open-source and extensible standard format called OpenDFM which provides a common set of DFM parameters to a wide variety of physical verification and analysis tools dramatically improving the interface between EDA vendors and silicon foundries. DFM Coalition Board DFMC Technical Steering Group (TSG) Compatibility Working Group opendfm Targetting Working Group OPEX Working Group LVS Not addressed today

SI2 OPDK Coalition 19 OpenPDK Coalition Board Chair: Jim Culp, IBM OpenPDK Technical Steering Group (TSG) Chair : Gilles Namur, ST ESD Open Process Specification (OPS) Symbols, Callbacks & Parameters (SCP) Pcell XML Packaging Pcell Common Language Grammar Unified Layer Model (Jointly with DFMC) OPS to OA TechDB OPS to DRC OpenPDK Working Groups

PDK Development Flow Ecosystem 20 Foundry 2 Foundry 1 Foundry 3 Set of PDK Inputs: DRM & Device Spec (Format B) Set of PDK Inputs: DRM & Device Spec (Format A) Set of PDK Inputs: DRM & Device Spec (Format C) PDK Development Team Device Library Spices LVS DRC PEX Customer A Design & Validation With Tool Suite A Customer B Design & Validation With Tool Suite B Customer C Design & Validation With Tool Suite C Several PDK Input formats Several PDK Generation flows Several EDA Tools for the same feature to be supported

Why OPS? 21 ST was looking for a smarter & more complete electronic PDK input format because lots of data were missing or were not easy to be extracted in traditionnal edrm. Open Process Specification New Format : Allow Automation for PDK generation. Eases EDA Vendor sync. with foundries Inputs. Foundries Inputs DB OPS.xml <Process> <Libraries> <Devices> <Layers> <Rules> < > PDK EDA Tools OpenPDK At STMicroelectronics

Why OPS as a standard? 22 ST wanted to have this format defined as a standard and used across the industry because what ever is the format of the Database used by the supplier to manage the PDK inputs : The PDK generation flow remains the same. FM Supplier Other DB OPS.xml <Process> <Libraries> <Devices> <Layers> <Rules> < > Only one Flow d i t a r t f DRC PDK PEX LVS Library OpenPDK At STMicroelectronics

ST was looking for an efficient way to generated several PDKs in parallel without a huge over cost. OPS is an answer to this issue. Once OPS is complete enough to produce a PDK : Why OPS? 23 You can produce any kind of PDK. DRC PDK for Tool A PEX EDA Tools A EDA Tools B OPS.xml <Process> <Libraries> <Devices> <Layers> <Rules> < > LVS DRC Library PDK for Tool B PEX Even better, with the help of EDA Vendors : OPS could become a techfile LVS Library OpenPDK At STMicroelectronics

A concrete OPS example 24 ST is ready to produce their own edrm in OPS format. OPS.xml <Process> <Libraries> <Devices> <Layers> <Rules> < > < > OPS.xsd All along the process of definition of OPS, ST has contributed with several DRM examples : demo DRM 45nm. The examples contain a complete DRM.pdf and its associated OPS.xml file aligned with the OPS.xsd defined by SI2 OPDKC OPS WG (available on SI2 website)

OPS.xml <Process> <Libraries> <Devices> <Layers> <Rules> < > < > OPS : Automation for DRC & Techfile Constraints GroundRuler 25 Techfile Coder DRC Coder Enriched OPS.xml <Process> <Libraries> <Devices> <Layers> <Rules> < Templates > < > < > New Template In-House Template DB Reference to DRM DB OPS Enriched OPS Reference to New Template opendfm Template DB New Template Generator In-House Template DB Techfile Code DRC Code New Template

OPS to DRC Generation 26 OpenDFM File OPS XML The Target Calibre, PVS or ICV Runsets

OPS to DRC Generation 27 The Result : SI2 propose a script that automatically generate an opendfm Deck from an OPS.XML file The full set of rules of the demo DRM 45nm provided by ST has been converted in opendfm through this script Next Steps ST will benchmark this tool on a real technology : OPS.xml extracted from a real DRM opendfm Execution of the opendfm deck on DRC Regression Test cases Comparison with hand made DRC deck results on the same testcases.

OPS : Automation for Techfile Generation 28 OPS XML file <Process> <Libraries> <Devices> <Layers> <Rules> < > < > The Target Techfile All Layers Design Layers Derived Layers Via Definitions Physical Constraints Tool Directives

OPS To Techfile Generation 29 The Result : SI2 propose a script that automatically generate an OA techdb (openaccess techfile) with all the info relative to the layers ST current usage of OPS Coverage Layers Display GDS (Layer map side file) ST already has its own flow using OPS as input file to generate part of the techfile in some technos. Next Steps : Extend the automatic techfile generation with the process constraints through templates as decribed in previous slides. Extend the coverage of technos using this kind of automation. The Bi-Directional Translation allows to create an OPS file from an existing OA DB. Very Helpful for OPS Adoption

OPS : Automation for PDK device Library PDK Device Library generation push button flow from an OPS.xml as input. 30 Ref Symbols Library OPS.xsd Pcells Library OPS XML file <Process> <Libraries> <Devices> <Layers> <Rules> < > < > OpenLibGen is an ST Internal API & Tools. ST already has its own flow using OPS as input file to generate part of the techfile in some technos. Next Steps : Extend the automatic techfile generation with the process constraints through templates as described in previous slides. Extend the coverage of technos using this kind of automation. Parameter Setup File.. Callbacks Directory Spiltted Techfile Directory >

OPS : Automation for PDK documentation Device Library Documentation for End-User. 31 OPS.xsd OPS XML file <Process> <Libraries> <Devices> <Layers> <Rules> < > < > OpenLibGen is an ST Internal API & Tools. ST already has its own flow using OPS as input file to generate part of the techfile in some technos. Next Steps : Extend the doc template to enhance the full device Library documentation Device Lib Documentation Template (Word) Device Lib Documentation (Word) OPS Introduction

Open Pcells 32 Process Inputs Process Constraints Layer Definitions Devices PDK Spec Capture Tool OPS XML file <Process> <Libraries> <Devices> <Layers> <Rules> < > PDK Generation Tool PyCell Plugin TCL Plugin Custom Designer PDK Pyxis PDK PDK Testing Tool Models Vias Code Repository SKILL Python CLG SKILL Plugin Virtuoso PDK OPS with its PCells XML Repository solution is language agnostic and with the use of translators, the data can be adopted to any companies proprietary solution. OPS Introduction

OPS Introduction