Japan Information & Control Standards Committee Meeting Summary and Minutes

Transcription

1 Japan Information & Control Standards Committee Meeting Summary and Minutes Japan Standards Fall Meetings 2011 September 15, 2011, 13:30-17:00 Japan Time Oshima Conference Room 3, SEMI Japan Office, Committee Announcements Next Committee Meeting Friday, December 9, 2011, 13:00-17:00 Japan Time International Conference Hall, Makuhari Messe, Chiba, Japan Standards Meetings in conjunction with SEMICON Japan 2011 Table 1 Meeting Attendees Co-Chairs: Takayuki Nishimura (Dainippon Screen MFG.), Mitsuhiro Matsuda (Hitachi Kokusai Electric) SEMI Staff: Chie Yanagisawa Attendee: 8 + SEMI: 1 Company Last First Company Last First Canon Anelva Corporation Sato Mitsugu Tokyo Electron Software Technologies Dainippon Screen MFG. Nishimura Takayuki Tokyo Electron Software Technologies Hitachi High Technologies Hitachi Kokusai Electric Matsuda Sakamoto Mochizuki Toyoshima Yuko Tokyo Seimitsu Sasaki Mie Mitsuhiro Muratec Automation Kondo Hiroshi SEMI Japan Yanagisawa Chie Mitch Tadashi Table 2 Leadership Changes Group Previous Leader New Leader I&C Committee Takashi Matsuzawa (TA Step Down) Tadashi Mochizuki (Newly appointed as TA) Table 3 Ballot Results (or move to Section 4, Ballot Review) Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. Failed ballots and line items were returned to the originating task forces for re-work and re-balloting. Document # Document Title Committee Action None Table 4 Authorized Ballots # When SC/TF/WG Details 5194 Cycle 7 GEM300 TF Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Correcting some errors. Table 5 Authorized Activities # Type SC/TF/WG Details None Note: SNARFs and TFOFs are available for review on the SEMI Web site at: Japan I&C Committee 1 Septemnber 15, 2011

2 AGENDA 1. Welcome, Self Introduction, Agenda Review and SEMI Standards Legal Reminders 2. SEMI Staff Report 3. Review and Approval of Previous (2011/6/9) 4. Previous Action Item Review 5. Liaison Reports 6. Yellow Ballot Review 7. Task Force Reports 8. Old Business 9. New Business 10. Technical Session 11. Action Item Review 12. Next Meeting 13. Adjournment 1 Welcome, Reminders, and Introductions Takayuki Nishimura (Dainippon Screen MFG.) called the meeting to order at 13: Self-Introduction Attendees introduced themselves. 1.2 Agenda Review Agenda was reviewed by Takayuki Nishimura (Dainippon Screen MFG.). Agreed as it is. 1.3 SEMI Standards Legal Reminder Chie Yanagisawa (SEMI Japan) reminded SEMI standards legal reminder as follows: Program Membership Requirement SEMI Antitrust Reminder Intellectual Property Reminder International Meeting Guidelines [Attachment: JICC_ ] 2 SEMI Staff Report Chie Yanagisawa (SEMI Japan) presented the SEMI Staff Report. Of note: SEMI Event Calendar 2011 Standards Meeting Schedule Critical Dates 2011 for SEMI Standards Ballots Quick Report from SEMICON West 2011 Regulation SubCommittee Update A&R Update SEMI Standards Publications JRSC Planning Meeting PV Japan 2011 & SEMICON Japan 2011 Information of seminars [Attachment: JICC_ ] Japan I&C Committee 2 Septemnber 15, 2011

3 3 Review and Approval of Previous (2011/6/9) The committee reviewed the minutes draft of the previous meeting. To approve the previous meeting minutes as written. Mitch Sakamoto (Tokyo Electron) / Hiroshi Kondo (Muratec Automation) [Attachment: JICC_ ] 4 Action Item Review Table 6 Previous Meeting Actions Items Item # Action Item (AI holder) Status JICC_AI_ SEMI E5 includes the IP statement. The LOA or the equivalent document to be acquired for the SNARF for Revision to SEMI E5 (#5194). (Yanagisawa) Done. Paul Trio, SEMI NA Staff sent a message as following, TI patents 4,884,674 and 5,216,613 in SEMI E5 have already expired. Since these patents have already expired, no LOA request is necessary. As for E5, SEMI Publication plans to remove the TI patent notice because the patents have expired. Should there be new potentially material patented technology identified that could impact E5, we will of course comply with section 15 of the Regulations. 5 Liaison Reports 5.1 North America Information & Control Committee Liaison Report Reported by Chie Yanagisawa (SEMI Japan). Of note: Leadership Organization Chart Meeting Information Ballot Results Upcoming Ballot Subcommittee & Task Force Reports Upcoming Meeting Schedule [Attachment: JICC_ ] 5.2 European Equipment Automation Liaison Report Takayuki Nishimura (Dainippon Screen MFG.) mentioned no need to report it because the report has not been updated since Japan Information & Control Committee meetings in conjunction with SEMICON Japan Taiwan Information & Control Committee Liaison Report Takayuki Nishimura (Dainippon Screen MFG.) mentioned no need to report it because the report has not been updated since Japan Information & Control Committee meeting on April 14, Korea Liaison Report Reported by Takayuki Nishimura (Dainippon Screen MFG.). Of note: Leadership Organization Chart Meeting Information Subcommittee/TF/WG reports Japan I&C Committee 3 Septemnber 15, 2011

4 Other Discussion [Attachment: JICC_ ] 6 Yellow Ballot Review 7 Task Force Report (TF Leader) 7.1 AMHS TF (Hiroshi Kondo /Muratec Automation, Mitsumasa-Ago /Daifuku) Hiroshi Kondo (Muratec Automation) reported that TF was preparing two ballots, #5227 (Reapproval for SEMI E (IBSEM)) and #5228 (Reapproval for E (STOCKER SEM)) in order to submit for Cycle GEM300 TF (Mitsuhiro Matsuda /Hitachi Kokusai Electric, Tadashi Mochizuki /Tokyo Electron Software Technologies) Mitsuhiro Matsuda (Hitachi Kokusai Electric) presented the GEM300 TF report as attached and mentioned that the draft ballot #5194 to be proposed in the following New Business section. Also TF has sent out the message to GCS members to get them know that it will propose to form global GEM300 TF around November. [Attachment: JICC_ ] 8 Old Business 9 New Business 9.1 New Ballot proposal for Doc.5194, Revision to SEMI E5 Mitsuhiro Matsuda (Hitachi Kokusai Electric) presented a Ballot #5194, Revision to E5, which was reviewed by Japan Information & Control committee. Rationale: E5 has some errors. This activity will correct them and improve E5 quality. Scope: (1)There exists a mismatch about ALCD s alarm set/clear usage. ALCD s alarm set/clear is defined Table 3 Data Item Dictionary: bit 8 = 1 means alarm set bit 8 = 0 means alarm cleared. But 9.5 Example Data Structure, example e shows: Alarm set, Category 4. (bit 8 = 0) Usage of 9.5 Example Data Structure, example e has an error. So, replace 9.5 Example Data Structure, example e, line 15, as following. <Current> Alarm set, Category 4 <New> Alarm set, Category 4 Japan I&C Committee 4 Septemnber 15, 2011

5 (2)There is an error at Message Detail of S3,F21 Port Group Definition. Structure is as follows: L, 3 1. <PORTGRPNAME> 2. <PORTACCESS> 3. L, n 1. <PTN 1 >.. n. <PTN n > PORTACCESS should be ACCESSMODE, because S3,F27 Change Access and E87.1 use ACCESSMODE as Data Item for the same meaning. So, change <PORTACCESS> into <ACCESS MODE> as follows: L, 3 1. <PORTGRPNAME> 2. <ACCESSMODE> 3. L, n 1. <PTN 1 >.. n. <PTN n > This change also effect to Table 3 Data Item Dictionay. Current ACCESSMODE s Where Used is S3F27. It should be modified to S3F21,F27. (3)Correct inconsistencies between Message Detail and Data Item Dictionary. -Some stream functions are missing from the Where Used column on Data Item Dictionary. Example) S3F28 is missing for CAACK. -Some Data Item refer to non-used stream functions at Where Used column. Example) SLOTID s Where Used is S16F11,F13,F15. But S16F13 is Not used and does not refer any deta items.. To approve the ballot #5194 for Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) to be submitted to Cycle 7. Mitsuhiro Matsuda (Hitachi Kokusai Electric)/ Hiroshi Kondo (Muratec Automation) 9.2 SNARF #5319 proposal for Reapproval for SEMI E E, Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E , Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards The SNARF (#5319) for Reapprovals for SEMI E E and SEMI E was approved at the North America Information & Control Committee meeting in conjunction with SEMICON West on July 13. However, SEMI E E and SEMI E are the direct responsibility of the Japan Information and Control Committee. So, the Japan Information & Control Committee decided to take the first action for straightening the situation. Japan I&C Committee 5 Septemnber 15, 2011

6 To request the North America Information & Control Committee to withdraw the SNARF (#5319) for Reapprovals for SEMI E E, Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E , Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards, in order that Japan Information & Control Committee could review and discuss on SEMI E118 and SEMI E Mitsuhiro Matsuda (Hitachi Kokusai Electric) / Mitch Sakamoto (Tokyo Electron) Action Item: Chie Yanagisawa (SEMI Japan) to convey the resolution to request the North America Information & Control Committee to withdraw the SNARF (#5319) for Reapprovals for SEMI E E, Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E , Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards to Paul Trio (SEMI North America), in order that Japan Information & Control Committee could review and discuss on SEMI E118 and SEMI E PIP for S2, F43 and S2, F45 message detail of SEMI E5-0611E Some typos are found in S2, F43 and S2, F45 message detail of SEMI E5-0611E. The typos are in the red dash line in S2, F43 as below. The typo should be corrected in the blue dash line in S2, F43 as bellow. Japan I&C Committee 6 Septemnber 15, 2011

7 The typos are in the red dash line in S2, F45 as below. The typo should be corrected in the blue dash line in S2, F45 as bellow. Japan I&C Committee 7 Septemnber 15, 2011

8 To request SEMI Staff to modify the typos in S2, F43 and S2, F45 message detail of SEMI E5-0611E as described above via PIP. Mitsuhiro Matsuda (Hitachi Kokusai Electric) / Tadashi Mochizuki (Tokyo Electron Software Technologies) Action Item: Chie Yanagisawa (SEMI Japan) to proceed with the PIP to modify the typos in S2, F43 and S2, F45 message detail of SEMI E5-0611E. 9.4 Technical Architect changes in Information and Control Committee Mitsuhiro Matsuda (Hitachi Kokusai Electric) reported Takashi Matsuzawa (Tokyo Electron Software Technologies) stepped down as a Technical Architect (TA) due to the change of his assignment. Tadashi Mochizuki (Tokyo Electron Software Technologies) was recommended as a new TA. To approve Tadashi Mochizuki (Tokyo Electron) as a TA of the Japan Information and Control Committee Mitsuhiro Matsuda (Hitachi Kokusai Electric) / Hiroshi Kondo (Muratec Automation) 10 Technical Session Mitsuhiro Matsuda (Hitachi Kokusai Electric) proceeded with the session. Of note: The discussion was made on the SNARF #5326 for Revision to SEMI E116 EPT and the SNARF #4946 for Revision to SEMI E87 from Korea Information & Control Committee. Mitch Sakamoto (Tokyo electron) explained RBAC: Role Base Access Control. Mitsuhiro Matsuda (Hitachi Kokusai Electric) reported the meeting of Standards Discussion on Idle Mode Communication on July 11, 2011 in conjunction with SEMICON West Japan I&C Committee 8 Septemnber 15, 2011

9 11 Action Item Review Table 7 New Action Items Item # Assigned to Details JICC_AI_ Chie Yanagisawa Chie Yanagisawa (SEMI Japan) to convey the resolution to request the North (SEMI Japan) America Information & Control Committee to withdraw the SNARF (#5319) for Reapprovals for SEMI E E, Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E , Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards to Paul Trio (SEMI North America), in order that Japan Information & Control Committee could review and discuss on SEMI E118 and SEMI E JICC_AI_ Chie Yanagisawa (SEMI Japan) Chie Yanagisawa (SEMI Japan) to proceed with the PIP to modify the typos in S2, F43 and S2, F45 message detail of SEMI E5-0611E. 12 Next meeting The next meeting of Japan Information & Control Committee is scheduled as follows: Date & Time: Friday, December 9, 2011 (Time: TBD) Venue: International Conference Hall, Makuhari Messe, Chiba, Japan 13 Adjournment Having no further business, a motion was made by Mitsuhiro Matsuda (Hitachi Kokusai Electric) to adjourn the Japan Information & Control Committee meeting at SEMI Japan Office in Tokyo. The meeting unanimously adjourned at 17:00. Respectfully submitted by: Chi Yanagisawa Senior Coordinator, Standards, EHS & Advocacy SEMI Japan Phone: cyanagisawa@semi.org Minutes approved by: Takayuki Nishimura (Dainippon Screen MFG.), Co-Chair October 31, 2011 Mitsuhiro Matsuda (Hitachi Kokusai Electric), Co-Chair November 11, 2011 Japan I&C Committee 9 Septemnber 15, 2011