Progress Report. The Laser Microengineering Experimental Station at the Jefferson Laboratory Free Electron Laser Facility

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1 Progress Report The Laser Microengineering Experimental Station at the Jefferson Laboratory Free Electron Laser Facility Project Start Date; December 17,

2 Laboratory for Laser Microengineering Science 2 THE AEROSPACE CORPORATION

3 Proposed Effort Four-year effort to establish a working facility that will enable userfriendly application of the unique FEL properties for investigations in laser microengineering science and laser material processing technology development. Effort delineated into two segments. An initial two-year effort to build an engineering model and process development station at The Aerospace Corporation - called Aerospace-Engineering Model (A-EM) a working model at the Jefferson FEL - called JLAB-working Model (JLAB-WM) A following two year effort to transition newly developed laser processes and techniques, conducting fundamental investigations in laser material interaction phenomenon, assisting/guiding new users. Henry.Helvajian@aero.org 3

4 Microengineering Station Design Overview 4

5 Microengineering Station Design - Overview Design Methodology Form team of technical leads Review literature (laser microengineering) and vendor information (for applicable technologies) Decision to use COTS software and hardware Underpinnings of the Design Design for laser direct-write processing with UV-FEL ONLY Develop a laser microengineering tool that is designed for research and development rather than for manufacturing. Sacrifice speed over precision Place strong emphasis in controlling the delivery of laser photons to a desired volume in space Synchronization of laser power, repetition rate and tool path motion Develop features not found in most commercial designs 3 coordinated axis of motion, Multiple laser wavelength operation, Multiple stations, Processing in thermal and non-thermal regimes Henry.Helvajian@aero.org 5

6 Microengineering Station Design Overview Continued User Types General User (GU), Super User (SU) and Specialist (S) System Configurations Standard layout GU operates either of two optical lines (UV-FEL and 1 µm IR- FEL) and microfabrication station Experimental layout An SU or S user can design an experiment using the two additional optical lines and other processing stations Henry.Helvajian@aero.org 6

7 Examples of laser microengineering with the proposed design Multi-color direct-write microfabrication Volumetric exposure, multi-photon exposure processing Percussion machining, ablative machining Polishing Chemical vapor deposition (with special cell) Crystallization Micro-fusing Surface texturing Investigations Laser Material Interaction Phenomena Mass & optical spectroscopy of desorption and ablation Mass removal rate measurement Pump-probe physics Multiple pulse - rep-pulse physics Small Scale Pulsed Laser Deposition (PLD) Henry.Helvajian@aero.org 7

8 Motion Control Hardware 8

9 Motion Control Subsystem Definition Hardware that enables the desired tool-path geometry or pattern to be converted into motion of the Laser Target Or both Tool Path Position Code Hardware -Drivers Amplifiers/Motors Hardware X 1, X 2, X n Primary Axes Hardware x 1, x 2, x n Secondary Axes Position Sensing Encoders X 1, X 2, X n x 1, x 2, x n Henry.Helvajian@aero.org 9

10 Proposed System Requirements Hardware must be able to provide XYZ motion in a coordinated fashion under software control. Hardware must be able to achieve coordinated motion, in the XY plane, for at least 100 mm in length. Each hardware axis must have accuracy < +3µm, repeatability < +3µm and a resolution < 2µm. Overall XYZ position error volume of <100 µm 3 Hardware drivers and associated software must be scalable in number of axis to provide more than 3 axes of coordinated motion and at least 2 other axes of non coordinated motion. Henry.Helvajian@aero.org 10

11 General Overview Motion control schemes Galvanometers: can process very large areas, have XYZ capability, very high speed, - but spot size is limited to microns Robots: can process large areas, have XYZ capability and speed - accuracy limited to 25 microns - attaching additional axis is difficult - software control is implemented via repeated pattern learning Precision Stages: can process moderate size areas, have XYZ capability, have extremely high resolution/accuracy - moderate speed - nominally set up with fixed laser beam, means moving part at high speeds - issue of vibration -Galvanometers + precision stages: increase in overall writing speed - tool path geometry delineated into high and low resolution features - increases complexity for pattern generation Henry.Helvajian@aero.org 11

12 12 Proposed Design Motion control comprises three primary stages 3 linear stages (XYZ): 2 mounted in XY configuration and third (Z) mounted vertically on a support structure XY stages use an air bearing design, while Z is a cross-roller bearing. XYZ stages operate with brushless linear motors XY accuracy and repeatability < +1µm, Z < +2µm Motion control hardware mounting XY stages mounted on granite slab (overall weight with XY to 800lbs) Length of travel X stage (500 mm = 20 inches) Y stage ( 300 mm = 12 inches) Z stage (100 mm = 4 inches) Can process within a volume 100mm x 300mm x 500mm Patterning speed For microstructure patterns, believe can reach 10mm/sec velocities - with position error < 200 nm. For larger macroscopic patterns speeds close to 500mm/s possible.

13 Proposed Design Continued Architecture for axis expansion (scaling) Choose architectures that permit daisy-chaining of hardware drivers Design is based on a 5 x 8 foot optical table Although this is ample space we would like to plan for the future and add additional space for other experiments Henry.Helvajian@aero.org 13

14 Design Limitation and Risk Management Limitation: reduced processing speed - use of precision stage hardware Mitigation Approach: find stage motion combinations that offer highest speed Limitation: may need more environmental control - use of air bearing stages Mitigation Approach: if necessary use HEPA air purification system in hutch Limitation: risk of vibration & loss of accuracy - sample under constant motion Mitigation Approach: design sample holder clamping mechanism Limitation: limited patterning volume (500 x 300 x 100 mm 3 ) Mitigation Approach: No mitigation, (can procure larger stages = higher cost) Limitation: concern for relative motion - Z stage on supported bridge structure Mitigation Approach: utilize a gusseted pyramid structure mounted to table Limitation: additional complexity due to design of multiple processing stations Mitigation Approach: use motion stages with reduced travel at each station Henry.Helvajian@aero.org 14

15 PROCESS DEVELOPMENT SUBSYSTEM: Applications of Laser Microengineering Multiple-wavelength, direct-write microfabrication Precision micromachining and microstructuring Photostructurable glass Metallic substrates Diverse materials processing - polymers, ceramic composites - insulators, semiconductors - HTc superconductors, ferroelectrics Other Applications - polishing, surface texturing - microfusion, CVD Fundamental photophysics - surface photochemistry - ultrafast pump-probe spectrosc. - resonant desorption Henry.Helvajian@aero.org 15

16 UV Laser Direct-Write Volumetric Patterning in Photostructurable Glass Fabrication of integrated & functional structures Multi-wavelength processing (λ= nm) Laser irradiances < mw/µm 2 Synchronous power control for variable laser exposure processing Feature dimensions: micro (<100 µm to macro-scale (> 10 mm) Variegated & proximal high and low aspect ratio structures Aspect ratios >30:1 Automated conversion of CAD patterns into realized structures Structures retain feature sizes within 10% of calculated dimensions Henry.Helvajian@aero.org 16

ceramic composites, insulators, semiconductors λ=250-400 nm (UV) λ=1.0-3.

17 Proposed Subsystem Requirements Dual counter-rotating turbine Curved microturbine Advanced Laser Materials Processing Tungsten filaments Materials Wavelengths Average Power Pulse Repetition Rate Photosensitive glasses, metals, polymers, ceramic composites, insulators, semiconductors λ= nm (UV) λ= µm (IR) 1 µw - 1 W (surface) 1 khz - 1 MHz Fluence 20 nj/cm MJ/cm 2 FEL-3 ; Optical Design SRR 8/22/02 Spot Size at Sample Henry.Helvajian@aero.org µm dia.

18 Proposed Preliminary Design: Standard Optical Configuration FEL System UV-FEL IR-FEL Fixed Expl. Fixed Expl. 2 - Fixed Optical Lines UV-FEL λ= nm IR-FEL λ= µm FEL-4 ; Optical Design SRR 8/22/02 Henry.Helvajian@aero.org Experimental Optical Lines User-integrated components optics diagnostics instrumentation

19 FEL System Laser Wavelength Selection Laser Beam Stabilization Laser Beam Homogenization/Collimation Power Selection & Modulation Selection of Laser Spot Size at Sample Additional Components & Features Standard Optical Configuration: Main Components Sample Surface FEL-5 ; Optical Design SRR 8/22/02 Henry.Helvajian@aero.org 19

20 FEL Vacuum Line PM1-UV BS1-UV COLL- UV SFA-UV λ= nm IR-BS FSM2 FSM1 Q1 Q2 LBSM-UV S UV-BS λ= µm S Laser Beam Enclosure FSM2 FSM1 Q2 Q1 LBSM-IR SFA-IR COLL- IR BS1-IR S PM1-IR S H 2 O-cooled Beam Dump HEVA-IR HeNe BS2-UV HEVA-UV HR1-UV UV Fixed HR2-UV P1-UV HeNe BS2-IR HR1-IR IR Fixed HR2-IR P1-IR PM2-UV V E-O Driver EOM1- UV PM2-IR V E-O Driver EOM1- IR P2-UV P2-IR User-Integrated Components UV Experimental V E-O Driver EOM2- UV P3-UV User-Integrated Components IR Experimental V E-O Driver EOM2- IR P3-IR HR3-UV S HR4-UV HR3-IR S HR4-IR BS3-UV S HR5-UV BS3-IR S HR5-IR Shutter PM3-IR Shutter PM3-UV HR6-UV To bottom periscope mirror HR6-IR FEL-6 ; Optical Design SRR 8/22/02 Henry.Helvajian@aero.org 20

21 Power Selection and Modulation: EOM Serial Configuration ~1 MHz input 1ps P 1 µs V E-O Driver EOM-1 P Pulse Extraction Intensity Modulation V E-O Driver EOM-2 P Repetition Rate - Velocity Matching ~1 khz to ~1 MHz output Henry.Helvajian@aero.org 21

22 FEL Control System Software and Data Handling Synchronized Control Optical System Beam Delivery and Control Actuators Sensors Wavelength Selection Beam Line HEVA EO Modulators Aperture Size Microscope Objective Shutter/Beam Stop Control Pico-Motor Control 22 FEL Status Power Meter Probes Laser Beam Stab. Module

23 Key Elements of Vision Subsystem COMPUTER AND SOFTWARE VIDEO CAMERAS VIDEO CAPTURE ILLUMINATION AUXILIARY POSITIONS 23

24 VIDEO CAMERAS LOOK-DOWN B/W with NIR CAPABILITY OFF-AXIS AT TARGET COLOR ROVING COLOR ROVING FITTED WITH MOTORIZED PAN AND TILT ALL CAMERAS FITTED WITH MOTORIZED ZOOM UV AND IR FILTERS FOR B/W 24

25 KEY VISION SYSTEM COMPONENTS Upper Optical Table Leveling Position Manual Z-Stage Z-Stage Final Alignment Iris Auxiliary Position Manual Z-Stage To Quad Splitter 3 CCD Rotary Stage with Laser Displacement Sensor Rotary Stage with Objectives Target Vacuum Chuck Goniometric Stage Color Off-Axis Camera with Motorized Zoom and Illumination To Lens Controller SIDE VIEW OF MICROENGINEERING Y-Stage STATION X-Stage Granite To Fiber Optic Illuminator Final BB Laser Mirror KEY VISION COMPONENTS From Illuminator To B/W Camera Main Optical Table Upper Optical Table Revision A WWH Motorized Shuttle FRONT VIEW OF Final Alignment Iris Pan and Tilt To Shuttle Controller To Pan and Tilt Controller MICROENGINEERING Rotary Stage and Objectives Auxiliary Position (X2) Motorized Zoom Lens STATION Z-Stage 1 X 2 Breadboard To Lens Controller Target Vacuum Chuck Goniometric Stage Roving Color Camera (Location TBD) To Quad Splitte Y-Stage X-Stage Granite Henry.Helvajian@aero.org 25 Main Optical Table

26 BB Laser Mirror Picomotors From Dual Fiber Optic Illuminator Laser beam transistions from main table through this hole Illuminator Collimating Head From Vision Computer LABView I/O Motorized Iris Quartz Window Rotary Solenoid BB AL Mirror Dichroic Beamspitter High Speed Shutter Dichroic Beamspitter Beam Block Spectral Filter Solenoids (IR & UV) Motorized Zoom Lens From Vision Computer LABView I/O From Lens Controller Laser beam transistions to machining objective through this hole BB Laser Mirror Picomotors Manual XYZ Stage B/W NIR Video Camera To Framegrabber Power Meter 26 KEY VISION COMPONENTS ON UPPER OPTICAL TABLE

27 NTSC Video Output From Roving Camera (Color) LCD Monitor Video Input CPU NTSC Video Output From Off-Axis Camera (3 CCD Color) Quad Splitter VCR STANDARD INTERFACE CONFIGURATION Electronic Micrometer NTSC Video Output From B/W NIR Digital Camera Digital Framegrabber Digital Vision System Computer (Comp 2) KEY COMPONENTS OF VIDEO CAPTURE SYSTEM 27

28 Software & Data Handling User CAD CAM GUI & System Control SW Motion Control Software FEL X Y Z Stages Vision System Sensors in Optical System Actuators in Optical System Henry.Helvajian@aero.org 28

29 CAD SOFTWARE (COMPUTER AIDED DESIGN) The CAD Software chosen for machine is SolidWorks TM. Software allows design of 3D shapes and save it in various common formats DXF, IGES, parasolid, SAT. 29

pocketing, contouring, then the user selects laser wavelength, microscope objective, spot size.

30 CAM SOFTWARE The CADCAM software allows importing of models from CAD environments in various formats; e.g. IE.. DXF, IGES, parasolid- Mastercam TM software chosen In the CAM software the user will choose machining operations, pocketing, contouring, then the user selects laser wavelength, microscope objective, spot size. Finally, the User chains the geometry to create a toolpath that is downloaded as G-Code format, to the motion controller Henry.Helvajian@aero.org 30

31 Software Module Sequences Start 31

Conclusions We have finished the design of a laser microengineering station that will be one-of-a-kind facility, Design presented at a SRR (August

32 Conclusions We have finished the design of a laser microengineering station that will be one-of-a-kind facility, Design presented at a SRR (August 22, 2002), Approval for continuing operations has been received, Hardware procurement finished expecting equipment soon Henry.Helvajian@aero.org 32

33 Laser Fabrication of hotplate Pattern Filament in Tungsten Coil Dimensions Height 25 µm, Width ~ 35µm Surface Roughness <1.2 µm RMS Application: Optical Microspectrometer Sponsor: NASA/GRC Ticks 10 µm Henry.Helvajian@aero.org 33

3 PICOSAT Pairs in Orbit 3 x 4 x 1 Quick Facts Temperature (C) 55 50 45 40 35 30 23 Contact 1-3 21 Contact 1 21 Contact 6 21 Contact 5 21 Contact 2,

experiment Uploaded mission schedule 100 tether length Gold wire dipoles embedded in tether to enhance radar cross section 25 PICOSAT 21 20 PICOSATs

34 3 PICOSAT Pairs in Orbit 3 x 4 x 1 Quick Facts Temperature (C) Contact Contact 1 21 Contact 6 21 Contact 5 21 Contact 2, 3 21 Contact 4 23 Contact 5 23 Contact 4 64 mw radio output power 21 day optimal mission life MEMS switches payload Thermocouple Crosslink experiment Uploaded mission schedule 100 tether length Gold wire dipoles embedded in tether to enhance radar cross section 25 PICOSAT PICOSATs PICOSAT Deployed Henry.Helvajian@aero.org 34 2/6/0012:00:00 2/7/000:00:00 2/7/0012:00:00 2/8/000:00:00 2/8/0012:00:00 2/9/000:00:00 2/9/0012:00:00 Time

35 Adam Huang Bill Hansen Frank Livingston Dan Harps Lee Steffeney Dave Taylor Seigfried Janson Henry Helvajian Pete Fuqua Meg Abraham 35

The Laser Microengineering Experimental Station at the Jefferson Laboratory Free Electron Laser Facility

The Laser Microengineering Experimental Station at the Jefferson Laboratory Free Electron Laser Facility Henry Helvajian The Aerospace Corporation Los Angeles, California Proposed Effort Establish a working