SP25 User Guide. Document part number: H A

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1 Page 1 of 78 SP25 User Guide Document part number: H A Renishaw s innovative SP25M is the world s most compact and versatile scanning probe system and is actually two sensors in one - enabling the user to scan for form measurement or reverse engineering and as a touch-trigger probe (TTP) for geometric size and position measurement. Highly accurate scanning performance with stylus lengths from 20 mm mm, together with the ability to carry Renishaw s TP20 range of touch-trigger probe modules, means that the SP25M system provides unmatched flexibility to optimise a measurement solution to suit the application. The probe is only 25 mm in diameter with an autojoint mount for compatibility with Renishaw s PH10M/MQ and PH6M probe heads. It can also be mounted using a multiwired extension bar. Together, these combinations permit excellent reach and access to part features. With its advanced modular design, the SP25M system is available as an attractively priced entry level scanning probe kit, comprising a probe body, one of the five scanning modules and matching stylus holders. The scanning modules are designed to cover specific stylus length ranges whilst maintaining excellent accuracy performance. The system can be readily expanded as desired to further increase scanning range, include TP20 touch-trigger probe functionality or an automatic changer system. The full potential of the SP25M system is realised when the measurement routine is automated. To achieve this, Renishaw has developed its most flexible change rack system ever; the FCR25, which allows rapid and repeatable exchange between all the SP25M system elements. The FCR25 is a triple port unit that mounts directly on Renishaw s MRS (modular rack system) and permits multiple port solutions (3, 6, 9, 12, 15 etc). Alternatively, two compact standalone racks: FCR25-L3 (3 port) and FCR25-L6 (6 port), will be of particular interest for use with small CMM s and optical CMM s where machine space is limited. FCR25TC is a triple port unit that is available as either single leg or MRS mounting. This is used to maintain scanning modules (SM25-1/2/3/4) at operating temperature.

2 Page 2 of 78 FCC for the SP25M system FCC Equipment label (FCC 15.19) This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: 1. This device may not cause harmful interference. 2. This device must accept any interference received, including interference that may cause undesired operation. Information to user (FCC 15.21) The user is cautioned that any changes or modifications not expressly approved by Renishaw plc or authorised representative could void the user s authority to operate the equipment. Information to user (47 CFR ) This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to Part 15 of the FCC rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with the instruction manual, may cause harmful interference to radio communications. Operation of this equipment in a residential area is likely to cause harmful interference, in which case you will be required to correct the interference at your own expense. WEEE The use of this symbol on Renishaw products and/or accompanying documentation indicates that the product should not be mixed with the general household waste upon disposal. It is the responsibility of the end user to dispose of this product at a designated collection point for waste electrical and electronic equipment (WEEE) to enable reuse or recycling. Correct disposal of this product will help save valuable resources and prevent potential negative effects on the environment. For more information, please contact your local waste disposal service or Renishaw distributor.

3 Page 3 of 78 EC declarations of conformity for the SP25 system EC DECLARATION OF CONFORMITY Renishaw plc declares that the following products comply with the applicable standards and regulations. Copies of the EC Declarations of Conformity are available on request. Name: Description: Part no. SP25M SM25-1 SM25-2 SM25-3 SM25-4 Probe body Scanning module Scanning module Scanning module Scanning module A A A A A SP25M UCC card UCC interface card A AC3 ISA interface card A

4 Page 4 of 78 General user information CAUTION: Before unpacking and installing the SP25M probe system, the user should carefully read the safety instructions in this document and ensure that they are followed at all times by all operators using the probe system. Changes to Renishaw products Renishaw reserves the right to improve, change or modify its hardware or software without incurring any obligations to make changes to Renishaw equipment previously sold. Warranty Renishaw plc warrants its equipment for a limited period (as set out in our standard terms and conditions of sale) provided that it is installed exactly as defined in associated Renishaw documentation. Prior consent must be obtained from Renishaw if non-renishaw equipment (e.g. interfaces and/or cabling) is to be used or substituted. Failure to comply with this may invalidate the Renishaw warranty. Claims under warranty must be made through authorised service centres only, which may be advised by the local Renishaw supplier or distributor. Patents Features of the Renishaws SP25M compact scanning probe system, and associated equipment, are the subjects of the patents and patents applications listed below: EP EP EP B EP EP About this user s guide JP 2,098,080 JP 3,004,050 JP 3,294,269 JP 2,510,804 JP ,444 US US 5,404,649 US 5,339,535 US 5,323,540 US 5,505,005 US 6,430,833 B1 US This document is intended as a guide to initial installation, integration and subsequent use of the Renishaw SP25M analogue scanning probe system. It assumes that the system will be installed on a co-ordinate measuring machine (CMM) that uses a controller supplied by the OEM, and that the OEM has integrated the SP25M probe by use of Renishaw s AC3 (ISA bus) analogue interface PC card. This guide therefore contains comprehensive information concerning the AC3. Some OEMs supply their CMMs with Renishaw s own controller, called the UCC1/UCC2 (universal CMM controller) which provides plug & play compatibility for all Renishaw probe systems. A SP25M/UCC daughtercard will be required for operation with the SP25M probe in a UCC1 system, but not in a UCC2 system. The user can benefit from software enhancements that Renishaw has developed specifically for the UCC, and which provide additional application functionality. Integration of SP25M via the UCC is detailed in the UCC controller documentation. There are other OEMs who prefer to integrate SP25M themselves, and helpful additional information is provided for them in appendix 1 and 2. However, the integration of a highly advanced probe system such as SP25M is a complex matter and Renishaw strongly recommends the route of AC3, or UCC1/UCC2, as mentioned above. Care of equipment Renishaw probes and associated systems are precision tools used for obtaining precise measurements and must therefore be treated with care. The SP25M probe body and scanning modules are liable to irrepairable damage if dropped or abused.

5 Page 5 of 78 General safety recommendations CAUTION: Before unpacking and installing the SP25M probe system, the user should carefully read the safety instructions below and ensure that they are followed at all times by all operators using the probe system. Use of controls or adjustments, or performance of procedures other than those specified herein may result in hazardous infra red radiation exposure. Operators must be trained in the use and application of the SP25M probe system and accompanying products, in the context of the machine it is fitted to, before being allowed to operate that machine. NOTE: References are made below to features indicated on the illustrations shown below. Please ensure that you clearly understand all safety instructions. Familiarisation with the SP25M system components, as shown in the following sections is recommended: System components overview Schematic diagram of probe system components Schematic diagram of FCR25 flexible change rack Schematic diagram of FCR25TC flexible change rack The SP25M probe system has mechanical overtravel protection provided in the probe +Z axis, by a fixed bumpstop. The machine control system must therefore be able to stop the motion of the machine, in this axis of the probe, before the bumpstop is reached. If this is not the case, the user must wear eye protection during operation in case of stylus breakage. Care should be taken to ensure that the optical windows (indicated damaged as they are made of glass and could cause injury. ), located on both body and module, do not become CAUTION: Permanent magnets are used in some components of the SP25M system and associated products. It is important to keep them away from items which may be affected by magnetic fields, e.g. data storage systems, pacemakers and watches etc. LED safety The SP25M body contains embedded high power LED sources (indicated sources are exposed when an SM25-# or TM25-20 module is not attached. Removing the module breaks two sets of interlock switch contacts (indicated assure user safety. ) which emit invisible infra-red radiation. These ) to automatically switch off the LED power and At suitable intervals, the interlock contacts should be inspected and checked to ensure that they are clean and free from airborne contamination such as dust, debris or swarf. In unlikely circumstances, such contamination could cause a short circuit of the pins and thus increase the risk of sending power to the LEDs, without a module being attached. Never connect conducting objects to, or between, the contacts. Follow the cleaning instructions in the Maintenance section. Before inspecting, always remove the SP25M body from the probe head. In the event of serious damage to, or a rupture of, any part of the SP25M body or scanning module outer casing, IMMEDIATELY disconnect power source, remove and do not attempt to re-use the parts, and contact your supplier for advice. Safety illustrations These diagrams show features, indicated SP25M probe body which are referred to in the safety instructions on this page. End view showing kinematic joint to module SP25 kinematic joint to module SM25 scanning modules End view showing kinematic joint to body SP25 kinematic joint to body

6 Page 6 of 78 Design principles of SP25M scanning probe operation The design features an optical transducer sensor system, which is located within the probe body, and a sprung pivoting-action motion system, which is located within the scanning module. Two infra red light emitting diodes (IREDs), mounted in the probe body, project invisible infra red beams on to mirrors mounted on the pivoting moving structure within the scanning module. The mirrors focus the beams back into the probe body where they are detected by two position sensitive devices (PSDs) which provide signal outputs in the three probe axes: p,q,r. IMPORTANT: The probe does not have fixed rate, gain or resolution and the p,q,r probe axes outputs are non-linear and non-orthogonal outputs which are converted into X, Y, Z signals by the calibration routine. Renishaw offers support and advice on scanning calibration algorithms suited to the SP25M. The scanning modules are designed to provide optimisation of accuracy and contact force over a specified stylus range, thus avoiding most of the deterioration in performance seen in other types of scanning probe as stylus length increases. The SM25-5 scanning module is designed to allow larger star/non-linear stylus combinations to be carried compared to the standard scanning modules.

7 Page 7 of 78 System components overview The highly modular system design allows flexibility for optimum configuration by the user, to suit the application. Please refer to the schematic diagrams illustrating the SP25M system components described below using the hyperlinks below: Probe system components, FCR25 flexible change rack, FCR25TC flexible change rack SP25M probe body At the heart of the system is the SP25M probe body, which houses the optical transducer and has the Renishaw autojoint at the top end to give compatibility with Renishaw s PH10M, PH10MQ and PH6M probe heads. SM25 1/2/3/4/5 scanning modules The range of scanning modules enables accurate scanning measurements, with SM25-1/2/3/4 recommended for use with linear stylus arrangements and SM25-5 recommended for use with non-linear and star stylus arrangements. SH25 1/2/3/4/5/2A/3A/4A stylus holders The range of stylus holders enables accurate scanning measurements with effective stylus lengths ranging from 20 mm mm. The SH25-1/2/3/4 holders are recommended for use with linear stylus arrangements. The SH25-5 and SH25-2A/3A/4A holders are recommended for use with non-linear and star stylus arrangements. TM25 20 TTP adaptor module (to carry TP20 modules) For rapid touch-trigger measurements, the TTP adaptor module (TM25-20) may be used. This directly takes the full range of Renishaw s TP20 stylus modules. FCR25 flexible change rack unit Rapid and repeatable changing of all system elements is possible via the flexible change rack (FCR25) a triple port unit, which is compatible with Renishaw s MRS rack system. FCR25 L3 and FCR25 L6 standalone change racks These are standalone rack options, based on the FCR25 unit and having a single leg; there is a three port version (FCR25-L3) and a six port version (FCR25-L6). These will be of particular interest to users of small CMMs or vision CMMs where space is very limited. FCR25TC (Termally controlled) change rack unit Rapid and repeatable changing of all SM25 scanning modules whilst they are maintained at the same temperature as a working probe. This is a triple port unit that is compatible with Renishaw s MRS rack system as well as a single leg 3 port version. AC3 analogue interface PC card An ISA bus card to enable integration of the SP25M system with a CMM manufacturer s own controller.

8 Page 8 of 78 Probe system components NOTE: SP25M may be interchanged with other multiwired Renishaw probes via the ACR1 or ACR3 probe changer systems. Scanning Use SM25-1/2/3/4/5 scanning modules with respective SH25-1/2/3/4/5 stylus holders to suit stylus EWL ranges from 20 mm to 400 mm. Use the -A range of stylus holders with the corresponding stylus modules. Touch probing Use TM25-20 adaptor module with any of the range of TP20 modules as shown below. Description TP20 module type 6W 6-way module LF Low force module SF Standard force module MF Medium force module EF Extended force module EM1/EM2 Extension modules

9 Page 9 of 78 FCR25 flexible change rack system FCR25 allows all SP25M elements to be rapidly interchanged automatically Each FCR25 unit has 3 ports which take SM25-# or TM25-20 modules FCR25 mounts directly on the MRS allowing multi-port systems to be created PA25-SH adaptor is used to convert a port to take SH25-# stylus holders PA25-20 adaptor is used to convert a port to take TP20 modules FCR25-L3 and FCR25-L6 are 3/6 port standalone version respectively

10 Page 10 of 78 FCR25TC flexible change rack system FCR25TC allows SP25M elements to be rapidly interchanged automatically Each FCR25TC unit has 3 ports which take SM25-# or TM25-20 modules Each FCR25TC port maintains scanning modules at operating temperature FCR25TC mounts directly on the MRS allowing multi-port systems to be created FCR25TC -L3 is 3 port standalone version available for mounting directly on the CMM bed PA25-SH and PA25-20 can not be fitted to FCR25TC

11 Page 11 of 78 SP25 specification SP25M probe system specifications summary Characteristic Requirements Probe attributes Measurement range Overtravel range Resolution Spring rate Probe dimensions Weight SP25M body SM25-1 scan module SM25-2 scan module SM25-3 scan module SM25-4 scan module SM25-5 scan module TM25-20 TTP module Scanning with 3 axis measurement (X, Y, Z) Touch-trigger probing using TP20 modules ±0.5 mm deflection in all directions in all orientations X, Y = ±2.0 mm +Z = 1.7 mm -Z = 1.2 mm Capable of <0.1 μm Nominally 0.6 N/mm - when using a module s shortest specified stylus Nominally 0.2 N/mm - when using a module s longest specified stylus Ø25 mm x length dependant on module used 65 g (2.29 oz) 35 g (1.23 oz) (including SH25-1 but excluding stylus) 40 g (1.41 oz) (including SH25-2 but excluding stylus) 49 g (1.73 oz) (including SH25-3 but excluding stylus) 71 g (2.50 oz) (including SH25-4 but excluding stylus) 45 g (1.59 oz) (including SH25-5 but excluding stylus) 40 g (1.41 oz) (including TP20 STD module, but excluding stylus) Effective stylus length range Always observe the specified stylus range for the scanning module being used. Use Renishaw M3 range of styli. SM SH25-1 = EWL 20 mm - 50 mm (0.78 in in) using 21 mm - 50 mm stylus SM SH25-2 = EWL 50mm - 105mm (1.97 in in) using 21mm - 75 mm stylus SM SH25-3 = EWL 120mm - 200mm (4.72 in in) using 21mm mm stylus SM SH25-4 = EWL 200mm - 400mm (8.66 in in) using 20mm mm stylus SM SH25-5 = EWL 50mm - 150mm (1.97 in in) using 21mm mm stylus Mounting Crash protection Multiwired autojoint - compatible with PH10M/MQ and PH6M probe heads, extension bars and ACR 1/3 sensor changers ±X, ±Y, -Z via break out of module or stylus holder +Z via integral bump-stop design Signal outputs Non-linear and non-orthogonal analogue outputs - rate gain and resolution are not fixed Power supply + 12V (±5%), -12V (+10%/+8%), +5% (+10%/-13%) dc at probe Probe calibration Requires that non-linear, third order polynomial calibration method is used Change rack options FCR25 - Triple port unit which mounts on MRS FCR25-L3/6-3/6 port 'standalone' rack versions FCR25TC - Triple port unit which mounts on MRS and warms scanning module FCR25TC-L3-3 port 'standalone' rack version Interface options UCC2 systems - No interface required UCC1 systems - SP25M daughtercard OEM controller systems - AC3 interface card Interface for TP20 also required if applicable

12 Page 12 of 78 Dimensional information probe system elements

13 Page 13 of 78 Dimensional information FCR25 options FCR25 and FCR25TC FCR25 L3 (3 port) and FCR25TC L3 FCR25 L6 (6 port)

14 Page 14 of 78 SP25 installation Note: All system elements are identified with an engraved product name. The 'front' side of system elements can be identified by the position of the engraved 'RENISHAW' name and the small alignment marks (where applicable). Please note the arrangement of the features on the kinematic joint faces of the range of SM25 modules and respective range of SH25 stylus holders. Four balls can be seen on the face of the range of SH25 stylus holders. Three of these are in a triangular pattern and form one half of the kinematic location, whilst the fourth is the 'orientation ball' which is positioned to ensure that only the respective SM25 stylus module and SH25 stylus holder combinations can be used together. When installing and using the various system elements, it is essential that the kinematic joints are clean and free from contaminants - please refer to maintenance page for further instructions and the recommended cleaning regime. Renishaw probes and associated systems are precision tools used for obtaining precise measurements and must therefore be treated with care. The SP25M probe body and scanning modules are liable to irrepairable damage if dropped or abused.

15 Page 15 of 78 SP25M body installation on the probe head IMPORTANT: To ensure optimum metrology performance it is recommended that following any probe body change (either by manual or automatic method) that the probe head is unlocked and then re-locked. The SP25M probe body is mounted on a Renishaw PH10M, PH10MQ or PH6M probe head by means of the Renishaw autojoint. Locking and unlocking of the autojoint is carried out either manually using the S10 autojoint key or automatically using a Renishaw autochange rack system (ACR1 or ACR3). In both cases, the connection repeatability eliminates the need for probe requalifications (recalibration) after exchange. Manually mounting/removing the SP25M probe body to/from the probe head 1. Ensure the screwdriver slot at the rear of the SP25M body is lying across the probe axis. This is the unlocked position. 2. Carefully offer up the SP25M probe body to the probe head, aligning the dots on both body and head. 3. Firmly locate and hold the two halves of the autojoint together. 4. Insert the S10 autojoint key into the screwdriver slot and turn clockwise until it locks tight. Note, if intending to autochange the probe body in Renishaw s ACR1 or ACR3 change racks then the slot should be rotated 5 anticlockwise from the fully clockwise position. 5. Unlock and re-lock the probe head before using the probe. 6. To remove, securely hold the body whilst reversing the mounting procedure above.

16 Page 16 of 78 Fitting a module (SM25 & TM25 20) to the SP25M probe body IMPORTANT: To ensure optimum metrology performance, it is recommended that following any module change (either by manual or automatic method) that the probe head is unlocked and then re-locked. The SM25 scanning modules and TM25-20 module have an identical kinematic coupling to the SP25M probe body, which provides a repeatable connection that eliminates the need for probe requalification (calibration) after a change. The change can be carried out either manually, or fully automatically by using the FCR25 flexible change rack (highly recommended for optimum system performance). For optimum performance if an FCR25TC is not being used for module changing then we recommend that 20 minutes are allowed for the cold module to reach optimum operating temperature. If the cold module is used during the first 20 minutes then it is likely that your results will be very slightly affected due to thermal drift within the module as it reaches operating temperature. Manually mounting/removing the SM25 scanning modules or TM25 20 module to/from the SP25M body: 1. Align the front sides of the probe body and module to each other. 2. Slightly tilt the module relative to the probe body such that the two are not fully in line. 3. Carefully allow the module to engage into the body, at the front side only, ensuring that the magnetic attraction does not cause a hard collision. 4. Slowly allow the module to pivot into line with the probe body, such that the magnetic attraction gently makes the kinematic joint. 5. Unlock and re-lock the probe head before using the probe. 6. To remove, securely hold the module, carefully tilt it to break the kinematic joint and separate.

17 Page 17 of 78 Fitting SH25 stylus holders to the SM25 scanning module The range of SH25 stylus holders have a kinematic coupling to the scanning modules, which provides a repeatable connection that eliminates the need for probe requalification after a change. The change can be carried out either manually, or fully automatically by using the FCR25 flexible change rack (highly recommended for optimum performance). The stylus holders are designed only to fit with their respective scanning module, with incorrect combinations being prevented by the orientation ball in the kinematics. Use with Renishaw s M3 range of styli. Manually mounting/removing the SH25 stylus holders to/from the SM25 stylus modules: 1. Align the front sides of the module and stylus holder to each other (look for RENISHAW engraving on underside of stylus holder or alignment marks as applicable). 2. Carefully offer up the stylus holder to the scanning module, allowing the magnetic attraction to softly make the kinematic joint. Gently attempt to rotate the stylus holder to ensure correct location. 3. To remove, securely hold the scanning module, gently tilt the stylus holder to break the kinematic joint and separate. Mounting/removing a stylus to/from the SH25 stylus holders: 1. The stylus holder must be removed from the module before mounting/removing a stylus. 2. Always stay within the recommended stylus capability range (see SP25M stylus carrying capability guidelines). 3. Avoid touching the joint face on the stylus holder, as it may become dirty or contaminated. 4. Always use the correct stylus tools to tighten the M3 threaded joints between the stylus and the stylus holder, thus avoiding excess torque (causing the tool to bend). 5. To remove a stylus, reverse the above procedure.

18 Page 18 of 78 Fitting TP20 modules to TM25 20 adaptor module The full range of Renishaw s TP20 modules may be mounted on the TM25-20 adaptor module via a kinematic coupling, which provides connection repeatability that eliminates the need for probe requalification (calibration) after a change. The change can be carried out either manually, or fully automatically by using the FCR25 or FCR25TC flexible change racks (highly recommended for optimum performance). Further information about the TP20 trigger modules, including stylus-carrying capability, is given in the TP20 probe system installation and user s guide (part number H ) which can be downloaded in PDF format from Renishaw s website at Manually mounting/removing a TP20 module on/from the TM25 20 module: 1. Offer up the TP20 module to the TM25-20 module whilst aligning the orientation marks, located around the circumference of both, to each other. 2. Allow the magnetic attraction to softly make the joint. 3. To remove, securely hold the TP20 module, gently tilt it to break the kinematic joint and separate.

19 Page 19 of 78 FCR General Information FCR25 The FCR25 is a triple port unit, which has been designed to provide unmatched flexibility where rapid automatic changing is required. It is of passive' design so no electrical connection is required. However, during the change cycle it will be necessary to inhibit probe signals through software command. NOTE: Renishaw strongly recommends the use of FCR25 to ensure optimum performance when changing elements of the SP25M probe system. FCR25(s) can be mounted, in multiples, on the Renishaw MRS (modular rail system), thus enabling modular rack configurations with 3, 6, 9, 12, 15 etc. ports. Furthermore, any port can be used to change any of the system elements: the range of SM25 scanning modules; TM25-20 adaptor module; the range of SH25 stylus holders (by using a PA25-SH port adaptor insert); TP20 modules (by using a PA25-20 port adaptor insert). Refer to the FCR25 system diagram for further detail FCR25TC The FCR25TC is a triple port unit which has been designed to provide unmatched flexibility where rapid automatic changing of the scanning modules is required. The FCR25TC is powered by a standard 24V mains supply that is supplied with the unit. This permits the ports to be heated to bring the module to the same temperature as that of a powered SP25M probe. Despite this being a powered rack, it will still be necessary to inhibit probe signals through software command as is done for the standard FCR25. The PSU comes with 1.2 m of cable between the rack and PSU. It is possible to purchase extensions for this cable and we recommend that no more than a 5 m extension is used as the voltage drop due to the increased cable length will affect the racks performance if anything greater than this is used. This will give a maximum total length of 6.2 m. As is standard Renishaw practice no mains lead is supplied with the system. NOTE: Renishaw strongly recommends the use of FCR25TC to ensure optimum performance when changing the scanning modules of the SP25M probe system. To change any other components within the SP25M system, the FCR25 should be used. It is recommended that in installations where ultimate accuracy is required, the system is left in a powered state. The FCR25TC can be mounted, in multiples, on the Rensihaw MRS (modular rail system) in conjunction with the FCR25, enabling modular rack configurations with 3, 6, 9 12, 15 etc ports. The FCR25TC can only be used for the scanning modules and the FCR25 should be used for all the other system elements: The range of SM25 scanning modules use with FCR25TC or FCR25; TM25-20 TTP adaptor module use with FCR25TC or FCR25. For further information refer to FCR25TC system diagram.

20 Page 20 of 78 General installation information (applicable to all FCR25 types) It is assumed that the MRS alignment and therefore the FCR25 and FCR25TC, is along the X axis of the CMM (left to right when viewed from front) with the probe head positioned at A0 B0 during a change routine. If the MRS is actually aligned with the Y axis of the CMM it will be necessary to appropriately transpose all references to axis, motion and orientation. It is also assumed that the MRS has been correctly installed on the CMM as defined in the MRS modular rack system installation and user s guide (part number H ) which can be downloaded in PDF format from Renishaw s website at Where two or more FCR25 ports are to be used, it is possible to remove the adjoining plastic endcaps thus enabling an unbroken line of ports. Carefully remove these end caps, to reveal machined lugs/hole features, which are used to align the adjoining FCR25 to the other. It is not possible to do this with the FCR25TC.

21 Page 21 of 78 Mounting the FCR25 and FCR25TC to the MRS and aligning to CMM axis The procedures described below for the setting of docking positions for the system elements have proven to be simple, quick and effective to use. However, it is recommended that users practice the routines to become familiar and competent with the process. 1. The FCR25 and FCR25TC is mounted on the underside of the MRS rail and clamped in position by using T nuts, which slide along the slot on the MRS extrusion, and M8 screws (use a 5 mm hex key). One or both of the MRS rail plastic endcaps should be carefully removed to access the slot. 2. First mount the FCR25(s) and FCR25TC in the required position on the MRS and hand-tighten the screws. 3. Align the FCR25(s) and FCR25TC to the X axis of the CMM by taking two points [P1] and [P2] as shown. Re-adjust the position such that a maximum runout of 0.25 mm is achieved between [P1] and [P2]. Then securely tighten the screws. You are now ready to set the docking positions for changing the various system elements.

22 Page 22 of 78 Mounting FCR25 L3/FCR25 L6 and FCR25TC L3 on the CMM and aligning with the CMM axis 1. Place the location piece over a threaded hole at the desired position on the CMM table and secure using the screws provided. 2. Position the FCR25-L3/L6/FCR25TC-L3 over the location piece and lightly secure using the hexagonal fixing screw at the rear. Do not fully tighten the fixing screw yet as rotational alignment to CMM axis needs to be set. 3. Align the FCR25-L3/L6/ FCR25TC-L3 to the CMM s axes by taking two points at [P1] and [P2] as shown. Re-adjust rotational alignment until a maximum runout of 0.25 mm (FCR25-L3 and FCR25TC-L3) or 0.5 mm (FCR25-L6) is achieved. 4. Tighten the fixing screw. You are now ready to set the docking positions for changing the various system elements.

23 Page 23 of 78 System interconnection diagram Typical connection diagram for an AC3 installation is shown below, please refer to SP25 Installation Guide for further detail. Renishaw will be pleased to provide advice concerning connections for other system configurations - please contact your local Renishaw supplier with specific details of your system. Example of typical system connections using the AC3 analogue interface PC card CAUTION: Ensure that the appropriate switch settings are selected on the AC3 card, as shown in tables AC3 I/O space base address and AC3 SW2 settings shown on AC3 analogue interface PC card - installation web page. The SP25M probe connects to the AC3 via the PH10M, PH10MQ or PH6M head, and standard Renishaw multiwire cable(s). This cable connects directly to the head via a micro-d and terminates in a 15-way high-density D which connects directly to the rear panel of the AC3.

24 Page 24 of 78 SP25M Calibration The SP25M probe requires calibration before it can give accurate positional data. NOTE: As the analogue outputs from SP25M are non-linear and non-orthogonal, a third order polynomial non-linear calibration method should always be used for optimum accuracy. At the nominal free stylus position, the probe outputs will not be zero. These zero offsets are determined and saved as part of the non-linear calibration. The probe transducer gives an absolute reading, which is not lost if the probe is switched off and on again. For maximum probe performance in scanning mode, Renishaw recommends that the SP25M is qualified (calibrated) using a third order polynomial non-linear calibration method and using two different deflections such as 0.2 mm and 0.5 mm. It is very important that during scanning operation, the CMM controller maintains a deflection that is less than the higher of these qualification deflections.

25 Page 25 of 78 SP25M Operation Modes of operation The SP25M is an analogue output measurement probe and may be used in a variety of ways. Principally, these will be either as a single point measurement probe, or profile measurement/digitising probe. Scanning mode SP25M can be used as a continuous deflection analogue contact scanning probe for profile measurement or for surface digitising purposes. In this case the CMM controller must respond to the deflections of the probe in real time to maintain surface contact. Touch trigger mode (using TM25 20 with a TP20 module) SP25M can of course be used as a traditional touch-trigger probe, using all seven modules in the TP20 probe range. Operating characteristics/instructions are as given in the TP20 system installation and user s guide (part number H ) which is available as a download from Renishaw s website: Reorientation The SP25M probe may be used in different orientations when mounted on a Renishaw PH10M or PH10MQ motorised head. The design has been optimised to ensure the working range of the probe (as shown in the table - SP25M probe system specification summary) can be achieved in all orientations.

26 Page 26 of 78 SP25M technical terms Return to zero The probe has a nominal absolute centre position where the functions of stylus configuration and probe orientation cause it to rest. Because of small amounts of internal friction, when the probe is displaced from this zero point, the stylus will not return to exactly the same point on the scale and the axis deflection readings will show a different value. This characteristic of probe performance is called RETURN TO ZERO and is a feature of all analogue probes and is not a source of error as the scale system continues to monitor position. Rather, it is merely a factor which must be taken into account when designing control software for using the probe. It can be given a value which represents the diameter of a sphere around the nominal zero position within which the probe will return to reset after any displacement. SP25M has a return to zero value of less than 5 microns after a deflection of 0.5 mm (typically 1 micron). It is important to take this into account as it affects the minimum amount of deflection necessary before the stylus is considered to be in contact with the surface. Because the stylus can return to a value other than the nominal zero, the CMM must recognise the fact that the range of rest positions of the stylus must not cause machine motion, as the stylus is not necessarily in contact with a surface even though it is deflected. Minimum probe deflection The CMM controller should set a parameter for minimum probe deflection, above the return to zero value. The stylus should only be considered to be in contact with a surface while the deflection exceeds this threshold. Maximum probe deflection A spherical operating range of ±0.5 mm (±0.02 in) deflection in all direction s in all oreintations is guaranteed provided that the stylus carrying recommendations are adhered to. The mechanical travel of the scanning module is greater than the transducer operating range. If this range is exceed the axis signals (p, q, r) become invalid. Probe over range signal This signal is asserted by the probe to indicate that the transducer operating range has been exceeded. The CMM controller must then take appropriate recovery action.

27 Page 27 of 78 Using the FCR25 and FCR25TC It is assumed that the FCR25 and FCR25TC have been installed on the MRS as described on the Mounting the FCR25 and FCR25TC to MRS page. It is also assumed that SM25 module(s), TM25-20 module(s), SH25 stylus holder(s) and TP20 module(s), have all been set up as described in the installation pages of this guide. Please refer to the installation pages for clarification of the various datum positions used in these instructions. NOTE: It is necessary to inhibit the probe signal through software during the change routine.

28 Page 28 of 78 FCR25TC warm up times Prior to use both the FCR25TC and the scanning modules held within it must be fully at temperature before calibration of each module can be performed. There are two options: 1. Power up FCR25TC and leave for 60 minutes to allow it to reach operating temperature. Fit the scanning modules into the rack and leave for a further 20 minutes for the modules to reach correct operating temperature. 2. Fit the scanning modules to the cold FCR25TC and then power up the rack. Leave the rack and modules for 60 minutes to reach correct operating temperature. The graph below shows module warm up' period. The examples below are intended to explain the warm up' period that may be required in certain scenarios: Scenario 1 Warm probe with a cold module picked up from a standard FCR25 Assuming a warm' probe body is fitted to the CMM and a cold module is picked up from a standard FCR25 port the time taken to achieve stability is 20 minutes. Scenario 2 Warm probe with a cold module and a warm FCR25TC Assumes a warm' probe body is fitted to the CMM and the FCR25TC is warm. A cold module would need to be left in the FCR25TC to warm up for 20 minutes before use. Scenario 3 Cold probe with a warm module and an FCR25TC rack If a cold probe is picked up from an ACR rack and a warm module picked up from the FCR25TC rack drift will be less than 1 micron after 3 minutes

29 Page 29 of 78 Establishing the docking position for SM25 # and TM25 20 modules In this procedure the user manually positions the probe body and module to derive the module docking position of the port (n). Throughout the procedure close observation of proximity is necessary to avoid collisions, and very fine movements are required under CMM joystick control. Eye protection should be worn and a good lighting level is highly recommended during these steps. This procedure is the same whether using FCR25 or FCR25TC. 1. Latch the port lids open using the triangular shaped plastic clips provided. 2. Place the SM25-1/2/3/4/5, or TM25-20, module to be set in the desired port(n). Steps 1 and 2 - latching port lids open and placing module into desired port (n) 3. Ensure the probe head is orientated to A0 B0 position. 4. Mount the SP25M probe body as described on the SP25M body - installation on the probe head page. 5. Inhibit the probe signal through software. NOTE: Great care is required from this point onward of this setting procedure, as there is very little clearance between the probe body/module and the port. During all movements, a constant watch must be kept to ensure no collision between parts. 6. Manually position the SP25M probe body to be directly above the module - approximate position only required at this stage. At all times during the next steps, watch closely to ensure there is no collision between parts. Step 6 onwards - watch for clearances to ensure no collision between parts 7. Slowly lower the probe body towards the module whilst at all times looking to ensure that XY position of probe body does not collide with the port. Step 6 and 7 - moving to approximate XY position then refining to ensure good alignment between body and module 8. Continue to lower the probe body slowly towards the module until the module is seen to jump upwards slightly due to the magnetic attraction. Carefully observe to see if the module jumps straight up (indicating close XY alignment), or whether it tilts in any way, (indicating poor XY alignment). Reposition and repeat as necessary until satisfied with XY alignment - continually watching to ensure the slight clearance between probe body and port. Step 8 - slowly move body downward in Z axis until module jumps straight upwards due to magnetic attraction 9. Slowly lower the probe body onto the module. Immediately stop when the LED on the probe head illuminates (the point at which electrical connection is made).

30 Page 30 of 78 Step 9 - slowly move body downward in Z axis - STOP immediately when the probe head LED is lit 10. Offset the CMM using a DCC movement of 0.75 mm in a -Z direction at a speed of 5 mm/s. 11. Create a datum co-ordinate system for the module docking position of port (n) at this position: [dat_mod_port(n)] 12. Slowly move in Y axis to clear probe from port (ensure move is in the correct direction out of the port). 13. Remove module and place back in port(n). 14. Enable the probe signal through software (probe signal now armed). 15. Repeat steps 2-13 above for all other port / module combinations required.

31 Page 31 of 78 Establishing the docking position for SH25 stylus holders In this procedure the user takes simple measurements using a special accessory, called the stylus holder setting piece (SHSP), to derive the stylus holder docking position of the port(n). Eye protection should be worn and a good lighting level is highly recommended. The SHSP is a dummy stylus holder having a short cylindrical stem of qualified length and diameter. This provides known constant values for use in calculation of the port docking position. IMPORTANT: It is necessary to turn off tip radius compensation when taking points using the SHSP, because the SHSP is itself not qualified (calibrated). However, a suitable tip qualification (calibration) should be applied - see below. Before taking points using the SHSP, you should apply a probe tip qualification (calibration) that was previously derived for a suitable configuration of SM25 + SH25 + stylus length. Ideally this configuration should be of the shortest length possible, such as SM25-1/2 + SH25-1/ mm stylus. However, where SM SH mm stylus is the only configuration available, it is recommended that the approach speed when taking points is restricted to <3 mm/s. If using a threshold deflection method to measure points, the threshold deflection should be set to mm. Failure to follow the above recommendations could lead to severe damage of the SM25 modules when taking points using the SHSP. 1. Latch the port lids open using the triangular shaped plastic clips provided. 2. The desired port(n) should be fitted with a PA25-SH port adaptor insert. First orientate the PA25-SH so that the flatter face is to the top. Carefully offer it up to the FCR25 port allowing the protruding side lugs to slide into the port slots. Gently push the PA25-SH into the port until it clips securely into the rear. Check for a good fit to the rear of the port and that there is no misalignment. Steps 1 and 2 - latching port lids open and placing PA25-SH into desired port(n) 3. Ensure the probe head is orientated to A0 B0 position. 4. Inhibit the probe signal through software. 5. Mount the desired SM25-# scanning module on the probe body. 6. Mount the SHSP on the SM25-# scanning module (use the same procedure as per section 3.3, except that there is no orientation ball/identification mark to consider). Step 6 - the SHSP is mounted to the SM25-# module 7. Enable the probe signal through software (probe signal now armed). 8. Turn 'off' tip radius compensation. 9. Measure a point in the top of port(n) [P1] and offset this point by -20 mm in the Z axis. Step 9 - take a point on port top surface Step 10 - take a point on port front side face Step 11 - taking 2 points on port inside rails 10. Measure a point in the front side lip of port(n) [P2] and offset this point by mm in the Y axis. 11. Measure two points [P3 & P4] on the inside rails at each side of the port(n) and construct a point [P5] midway between them. 12. Create a datum co-ordinate system for the stylus holder docking position of port(n), being at the X position of [P5], the Y position of [P2] and the Z position of [P1]. [dat_sh_port(n)] 13. Repeat steps 1-12 above for all other port / stylus holder combinations required.

32 Page 32 of 78 Establishing the docking position for TP20 modules In this procedure the user takes a number of measurements, using the desired combination of TM TP20 module + stylus, to then calculate the TP20 module docking position. 1. Latch the port lids open using the triangular shaped plastic clips provided. 2. The desired port(n) should be fitted with a PA25-20 port adaptor insert. Orientate the PA25-20 as shown. Carefully offer it up to the FCR25 port allowing the protruding side lugs to slide into the port slots. Gently push the PA25-20 into the port and use a 2.5 mm hex key to screw it fully into the port. Check for a good fit to the rear of the port and that there is no misalignment. Steps 1 and 2 - latching port lids open and placing PA25-20 into desired port(n) 3. Ensure the PH10M head is at A0 B0 position. 4. Inhibit the probe signal through software. 5. Mount the desired combination of TM TP20 module + stylus to the probe body. 6. Enable the probe signal through software (probe signal now armed). 7. Qualify (calibrate) the stylus tip on the reference sphere. 8. Measure 4 points on the top surface of the PA25-20, create a plane [PLN1]. Translate this plane to the Z axis, offset plane by [Z - length of stylus mm] and set the Z axis origin to the plane. Step 8 - take four points on top of PA25-20 Step 9 - take two points on front side faces of PA25-20 Step 10 - take two points on port inside rails of PA Measure 2 points, [P1 and P2] on the front side faces at each side of the PA25-20, construct a line [L1] between these points, rotate this line to the X axis, offset the line by [Y+8.75 mm] and origin the Y axis position of the line. 10. Measure 2 points [P3 and P4] on the inside rails at each side of the PA25-20 and construct a point [P5] midway between them. 11. Create a datum co-ordinate system [dat_tp20_port(n)] for the TP20 module docking position of port(n), being at the position of [P5], the Y position of [L1] and the Z position of [PLN1]. 12. Repeat steps 1-13 above for all other port / TP20 module combinations required.

33 Page 33 of 78 Pick up routines Pick up routine SM25 modules and TM25 20 module Move description X axis (mm)* Y axis (mm)* Z axis (mm)* Clearance position [dat_mod_port(n)] [dat_mod_port(n)] - 30 mm [dat_mod_port(n)] + 8 mm Enter port no change [dat_mod_port(n)] no change Towards module no change no change [dat_mod_port(n)] + 3 mm Attach module(s) no change no change [dat_mod_port(n)] Exit port no change [dat_mod_port(n)] - 30 mm no change * Coordinates assume aligned with Y axis as per FCR25 mounting instructions To ensure optimum metrology performance it is recommended that following any module change the probe head is unlocked and then relocked. Pick up routine SH25 stylus holders Move description X axis (mm)* Y axis (mm)* Z axis (mm)* Clearance position [dat_sh_port(n)] [dat_sh_port(n)] - 30 mm [dat_sh_port(n)] + 8 mm Enter port no change [dat_sh_port(n)] no change Towards stylus holder(s) no change [dat_sh_port(n)] [dat_sh_port(n)] + 3 mm Attach stylus holder(s) no change [dat_sh_port(n)] [dat_sh_port(n)] Exit port no change [dat_mod_port(n)] - 30 mm no change * Coordinates assume aligned with Y axis as per FCR25 mounting instructions Pick up routine TP20 module Move description X axis (mm)* Y axis (mm)* Z axis (mm)* Clearance position [dat_tp20_port(n)] [dat_tp20_port(n)] - 30 mm ** [dat_tp20_port(n)] + 6 mm Enter port no change [dat_tp20_port(n)] no change Towards TP20 module no change [dat_tp20_port(n)] **[dat_mod_port(n)] + 3 mm Attach TP20 module(s) no change [dat_tp20_port(n)] **[dat_mod_port(n)] Exit port no change [dat_tp20_port(n)] - 30 mm no change * Coordinates assume aligned with Y axis as per FCR25 mounting instructions **Calculate nominal 'Z' docking position according to the stylus length used (see calculation formula in section Establishing the docking position for SH25 stylus holders).

34 Page 34 of 78 Put down routines Put down routine SM25 modules and TM25 20 module Move description X axis (mm)* Y axis (mm)* Z axis (mm)* Clearance position [dat_mod_port(n)] [dat_mod_port(n)] - 30 mm [dat_mod_port(n)] Enter port no change [dat_mod_port(n)] no change Detach module no change no change [dat_mod_port(n)] + 3 mm Clear of module no change no change [dat_mod_port(n)] + 8 mm Exit port no change [dat_mod_port(n)] - 30 mm no change * Coordinates assume aligned with Y axis as per FCR25 mounting instructions To ensure optimum metrology performance it is recommended that following any module change the probe head is unlocked and then relocked. Put down routine SH25 stylus holders Move description X axis (mm)* Y axis (mm)* Z axis (mm)* Clearance position [dat_sh_port(n)] [dat_sh_port(n)] - 30 mm [dat_sh_port(n)] Enter port no change [dat_sh_port(n)] no change Detach stylus holder(s) no change no change [dat_sh_port(n)] + 3 mm Clear of module no change no change [dat_sh_port(n)] + 8 mm Exit port no change [dat_sh_port(n)] - 30 mm no change * Coordinates assume aligned with Y axis as per FCR25 mounting instructions Put down routine TP20 module Move description X axis (mm)* Y axis (mm)* Z axis (mm)* Clearance position [dat_tp20_port(n)] [dat_tp20_port(n)] - 30 mm ** [dat_tp20_port(n)] Enter port no change [dat_tp20_port(n)] no change Detach TP20 module no change no change * *[dat_mod_port(n)] + 3 mm Clear of module(s) no change no change ** [dat_mod_port(n)] + 8 mm Exit port no change [dat_tp20_port(n)] - 30 mm no change * Coordinates assume aligned with Y axis as per FCR25 mounting instructions * *Calculate nominal 'Z' docking position according to the stylus length used (see calculation formula in section Establishing the docking position for SH25 stylus holders).