Microscopy from Carl Zeiss

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1 Microscopy from Carl Zeiss Axio Lab.A1 Compact, Ergonomic, Efficient. Axio Lab.A1 sets new standards in the microscopy of materials. Benefit from an unrivalled price-performance ratio while achieving brilliant image quality based on Carl Zeiss ICS optics. Its intuitive operation makes Axio Lab.A1 a reliable system for routine applications in the laboratory. Axio Lab.A1 offers the flexibility required for successful examinations, such as in defect analysis, quality inspection and materials testing. For convincing performance and economic efficiency in materials analysis. Key features: 5 position revolving nosepiece (bright- and darkfield) Differential interference contrast (C-DIC) 4 position reflector turret with push&click contrast modules Optimized reflected-light beam path 50W halogen reflector illumination

2 Concentration on the Essentials Uncompromising focus on ease of operation and cost-effectiveness as prime characteristics of Axio Lab.A1. The quintuple revolving nosepiece keeps all relevant objectives ready for use. Select between brightfield, brightand darkfield, DIC and polarizing objectives for enhanced operating comfort and increased specimen throughput in a broad spectrum of applications. A color-corrected reflected-light beam path with aperture and field diaphragm for optimum specimen illumination allows objectives to operate at maximum performance level. This way even the smallest sample details and color graduations can be distinguished. The four-position reflector turret with its push&click mechanism for contrast modules enables flexibility in selecting and changing between the various contrasting methods. With its stage travel of 30 mm, Axio Lab.A1 offers ample vertical space for your specimens. A 50W halogen reflector lamp and a wide-range power supply that automatically adapts to the local line voltage are integrated in the stand. Alternatively you can use an LED lamp with its convincing advantages: constant color temperature, low energy consumption, and extremely long lifetime. Benefit from the extra-large field of view (FoV number 22) and capture the essentials of your specimen at a glance. Greater flexibility, faster handling: Selection of push&click contrast modules. Everything at hand: Integrated tool storage. 2

3 Take Advantage of Flexibility Choose From a Comprehensive Range of Components With its selection of accessories, Axio Lab.A1 can be configured for any application. ZEISS EC EPIPLAN objectives are specially designed to fulfill the everyday requirements in materials labs and quality inspection. This tried-and-approved class of universal objectives offers the best combination of economic efficiency and performance. Select from a large number of Siedentopf-type binocular and trinocular tubes to cover all documentation needs with a maximum of ergonomics. Note that Axio Lab.A1 is available with differential interference contrast (C-DIC): A polarizing method that converts even the tiniest changes in the surface morphology of a specimen into brightness differences, C-DIC delivers excellent contrast in phase objects and other specimens poor in intensity contrast. The cost-effective, universal EC EPIPLAN objectives feature achromatic correction and are manufactured with low strain. The new professional microscope camera AxioCam ERc 5s, in a package with AxioVision LE image processing software, is an ideal companion to Axio Lab.A1. AxioVision LE supports the optional Interactive Measurement module, a special feature permitting the measurement of interactively defined contours: areas, orientation angles, perimeter, diameter, centroid and so on. The slider with neutral density and color filters helps to perfectly meet the requirements of your specific application. Providing a wide variety of contrasting methods and objectives to choose from, Axio Lab.A1 is the ideal instrument for materials analysis: Pure zinc, Laser-crystallized silicon on glass, EC Epiplan NEOFLUAR 5x/0.13 HD EC EPIPLAN 10x / 0.3 Steel in darkfield, EC EPIPLAN 20x / 0.4 HD Copper-phosphorus alloy, EC EPIPLAN 20x / 0.4 HD Laser-crystallized silicon on glass, EC Epiplan NEOFLUAR 5x /

4 Dimensions in mm (inches) Upright microscope Axio Lab.A1 integrated reflected light illumination Focus Manual, coaxial coarse/fine drive, 30 mm travel range Illumination Halogen reflector lamp HAL 50/12V 50W, optional LED Nosepiece 5 position nosepiece, for brightfield and darkfield, M27 Reflector turret 4 position for Push&Click modules Power supply unit Internal 12V DC 50W stabilzed V AC/50 60Hz/110VA Filter slider 2 positions; 25 mm diameter Stage Mechanical stage, 75x30 mm, coaxial drive right side, anodized surface hardcoated specimen holder included Eyepieces PL 10x/20 Br. foc. PL 10x/22 Br. foc. Camera AxioCam ERc 5s Sensor: 5 MP CMOS Sensor Resolution: 2560 (H) x 1920 (V) = 5.0 Megapixels Pixel size: 2.2 µm x 2.2 µm Interfaces: 1x SD card slot, 1x mini USB 2.0, 1x AV (S-Video), 1x DVI (HDMI) C-mount Carl MicroImaging GmbH CarlZeiss Zeiss Microscopy GmbH Jena, Germany Jena, Germany Materials Göttingen Location Industrial microscopy@zeiss.com Phone : Telefax: micro@zeiss.de /e printed Stand Information subject to change. Printed on environmentally friendly paper bleached without chlorine. Axio Lab.A1 Technical Data

5 Microscopy from Carl Zeiss Axio Scope More Flexible. More Affordable. The Versatile Solution for Routine Industrial Applications

6 Ahead in Performance More flexible in every component. More economical in every configuration. Axio Scope is your microscope down to the last detail. Modularity has always been a prerequisite for customized microscope configurations. However, modularity has never before been implemented so consistently. This new versatile stand from Carl Zeiss is your microscope in every respect. With its unusual flexibility, it can be used universally and yet, it can be individually tailored to your applications. More affordable than ever because you only buy what you need. Axio Scope can be easily upgraded to meet your growing demands. You will be equally impressed by the cost benefits and the performance. Axio Scope the upright routine microscope for industrial applications. 2

7 Contents Flexible and Affordable 6-7 Space Provides Full Freedom 8-9 Visible Differences Impressive Variety Tangible Operating Comfort Digital High Performance Unshakable Facts Axio Scope: System Overviews Solid Advantages 25 3

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10 Flexible and Affordable Twenty-three Stand Versions. Innumerable Interfaces. An Outstanding Solution for Your Application and Budget. A vast number of stand versions and interfaces result in unusual flexibility. This means, configuring your Axio Scope in whatever way is useful for you. Functionally and economically. New modularity Axio Scope is as individual as the applications that you use it for. You can customize your stand from five upper parts, three lower parts and two Vario columns, from simple to more complex tasks. For transmitted-light, reflectedlight or both techniques. What is important is that you no longer invest in functions that you don t use. A tangible advantage for your budget. Affordable upgrading Simpler and less costly the modular interface concept of Axio Scope makes future upgrades quite simple. An attractive economical aspect as you can install many of the components yourself without a service engineer. Versatile range of use Axio Scope provides a range of uses which are as versatile as the tasks found in industry and research. They range from simple routine applications to more complex research projects. From quality control to material analysis and development. From surface examination and structure characterization to complex digital analysis. The upper parts* I. For pure transmitted-light applications Equipment: objective turret with 6x BF II. For standard fluorescence applications Equipment: objective turret with 3x DIC/3x BF, standard light interface for HBO 50, HBO 100, HXP 120, Colibri etc. III. For LED fluorescence applications Equipment: objective turret with 3x DIC/3x BF, integrated LED illumination that can take 4 different LED modules, synchronized switching with the reflector turret, long operating life, highly economical IV. For reflected-light (BF, DF) and fluorescence applications Equipment: objective turret 6x BF/DF, standard light interface for HAL 100 or HBO, DF use in the objective turret, switchable diffuser V. For reflected-light (BF, DF, DIC) and fluorescence applications Equipment: objective turret 6x BF/DF/DIC, standard light interface for HAL 100 or HBO, DF use in the objective turret, switchable diffuser, removable aperture and field diaphragm, carrier for polarizer slider * Specimens of greater height can be examined, by inserting spacers between the upper parts (I-V) and the lower parts (A, B, C), so that the specimen space extends in z direction. This is now very easy thanks to the new customer interface. With the 30 mm spacer: extension of the maximum specimen height to 80 mm, with the 60 mm spacer: extension of the maximum specimen height to 110 mm. BF = Brightfield, DF = Darkfield, BD = Brightfield/Darkfield, DIC = Differential Interference Contrast, C-DIC = Circular DIC, Pol = Polarization contrast, LD = Long Distance (big working distance) I II III IV V 6

11 The variety of interfaces is a performance feature of Axio Scope. It varies according to the upper and lower part used. In the example upper part V and lower part B. 1. Tube for optional - intermediate plate - tube lens turret or 2. Upper part 3. Reflector space - 2x slider - 4x turret - 6x turret - ISCP (only for transmitted-light) 4. Upper part for optional - 30 mm or 60 mm spacer or for 5. Lower part 6. Stage carrier 7. Stage 8. Condenser carrier 9. Transmitted-light filter wheel 10. Compartment for 6x20 mm slider, compensators, C-DIC slider 11. Compartment for DIC slider 12. Objectives 13. Compartment for rotating polarizer 14. Removable field diaphragm level 15. Removable aperture diaphragm level 16. Reflected-light filter slider 17. Achromatic illumination adapter and interface to HAL 100/HBO etc. illumination 18. Transmitted-light filter slider The lower parts* A. For pure reflected-light microscopy and LED transmitted-light applications, very simple lower part, contains no optical path: suitable for pure reflected-light microscopy or a LED illumination (Fixed-Koehler) can be attached directly below the condenser carrier for transmitted-light applications B. All standard transmitted-light applications Illumination: 50 W reflector light, koehlerable beam path with field diaphragm and aperture diaphragm, filter slider and 6-position filter wheel C. For demanding transmitted-light applications with high-intensity illumination Illumination: 100 W halogen, koehlerable beam path with field diaphragm and aperture diaphragm, filter slider and 6-position filter wheel The stand columns For examination of large specimens for reflected-light and fluorescence applications D. Vario column 380 mm E. Vario column 560 mm A B C D E 7

12 Space Provides Full Freedom Space for Thin Sections. Space for Specimens up to 380 mm in Height. The Flexibility of the Specimen Space is Extraordinary. This highly flexible material microscope offers space even for unusual specimens. For specimens that do not correspond to the standard. The size of the specimen space can be scaled according to your needs. And this clearly makes the overall handling easier for you. From 0 to 110 mm: the scalability of the specimen space With the flexibility of its specimen space Axio Scope points the way to freedom of action and an unusual range of uses. The material stand from Carl Zeiss offers you several options for extending the specimen space. In addition to the travel in z direction Flexible option for further extension of the specimen space in z direction: spacer in 30 mm and 60 mm versions. the stage carrier can be lowered on the dovetail, the condenser carrier can be removed, e.g. if the stage should be lowered beyond the travel range, and you can further extend the specimen space at the interface between upper and lower part by inserting a 30 mm or 60 mm spacer continuously up to 110 mm. The modular interface concept allows easy handling, e.g. when using the spacer (30 mm or 60 mm) to enlarge the specimen space. 8

13 Open for exceptional specimens: with the Vario stand columns the specimen space can be extended for heights up to 380 mm. For specimen heights up to 380 mm: the stand columns The Axio Scope Vario 380 mm or Axio Scope Vario 560 mm are available to you as an alternative to the lower parts for your reflected-light and fluorescence applications. Thus you extend the specimen space for large objects up to 200 mm or 380 mm respectively. An important operating advantage is the crank device on the top of the stand columns. This crank allows to continously adjust the vertical position of the microscope body without having to use a tool. The selection of the upper part is up to you. Optimized at all heights: vibration stability Consistently low in vibration, based on a heavy metal base plate, the special design of the stand columns also fulfils high demands on stability. The specimen space is continuously adjustable for specimen thicknesses from 0 to 110 mm, simply by adjusting the height of the stage carrier. 9

14 Visible Differences Ahead in Performance for Highest Demands. Efficient Solutions for Routine Work. The Optical System Design: Unique in This Class. Outstanding in transmission, homogeneity and correction the entire optical system of Axio Scope has been tailored to the requirements of material analysis. The improved image contrast and color fidelity as well as clear increases in quality and performance are now available in the routine class. High contrast: the reflected-light beam path Newly designed, the reflected-light beam path of Axio Scope sets the standards in its class. The homogeneous illumination over the full field of view provides consistantly brilliant image quality. And with high quality in all contrasting techniques. In addition you also profit from the flexibility of the modular system. This applies for example to the retrofitable achromatic correction lens system that brings the optical quality of Axio Scope to the high IC²S level (Infinity Contrast & Color Corrected System). 100 W halogen light: the light source for reflected-light The 100 W halogen lamp ensures sufficiently bright illumination. The bulb can also be aligned in x, y and z for optimum illumination. Lamp exchange is easy it can be done without tools, without detaching the lamp housing from the stand thanks to the lamp drawer. Individually configurable: the transmitted-light beam path The great flexibility in configuring the transmitted-light beam path of the Axio Scope is new and unique. At the front you have a 6-position filter wheel, which comes equipped with integrated shutter as well as with individual gray and color filter options. At the back you can also use a filter slide, which can be easily mounted, so that nearly any combination of filters is possible. LED or halogen: the standard illuminations in transmitted-light You can choose between three lower parts optimized for different light sources. 1. For transmitted-light LED: long life, free of adjustment and thus especially economic, this illumination offers sufficient intensity for typical routine tasks. 2. For 50 W reflector illumination: it offers more than sufficient light for all standard techniques such as brightfield or phase contrast. 3. For the 100 W halogen light, ideal for thick specimens and techniques with high light requirement such as DIC at high magnifications. Reflected-light C-DIC From routine to the highest demands: the EC Epiplan objectives Customized to your requirements, Axio Scope offers you a wide range of objectives of different price and performance classes. Carl Zeiss Enhanced Contrast objectives, in short: EC, are distinguished by minimized stray light and reflections, improved transmission and improved homogeneity. The effects of the reflected-light illumination concept make the most of these quality features in Axio Scope. With excellent quality images. 10

15 Reflected-light C-DIC Reflected-light brightfield Reflected-light darkfield The objective series for the powerful material microscopes are customized for different requirements and applications from economical and flexible up to highest resolution and correction. EC Epiplan objectives Achromatically corrected and produced with low strain for performing DIC in convincing quality, the economic all-round objective series generates a flat field corrected image for an intermediate image size of 23 mm. Available as brightfield and brightfield/darkfield version. Because of the same position of the exit pupils, one can now achieve Differential Interference Contrast in circular polarized light with all EC Epiplan objectives with only one C-DIC prism. EC Epiplan-NEOFLUAR objectives The especially high-contrast objectives are corrected to a high degree and produced with low strain for brilliant C-DIC. They generate a flat field corrected 25 mm field of view. Available as DIC, BD, C-DIC, Pol and LD versions. Perfect for displaying fine color and structural details such as lamellar and spheroidal graphite. But this optical talent offers even more. Large working distances and high numeric apertures. EC Epiplan-APOCHROMAT objectives The EC Epiplan-APOCHROMAT objectives lead the field. Based on the ICS optics of Carl Zeiss, these innovative Enhanced Contrast objectives push the limits of what optics can achieve in regard to contrast and reproduction accuracy. This objective series stands for the best correction and the largest numeric aperture, e.g. the objective EC Epiplan-APOCHROMAT 20x/0.60. They are extremely well suited for imaging the finest color and structural details in the submicrometer range. You will find further information under BF = Brightfield, DF = Darkfield, BD = Brightfield/Darkfield, DIC = Differential Interference Contrast, C-DIC = Circular DIC, Pol = Polarization contrast, LD = Long Distance (big working distance) 11

16 Impressive Variety The Darker Darkfield. The More Flexible Contrasting Techniques. The Thrilling Contrasting Possibilities of Axio Scope. Tailored to the special requirements of material microscopy, a multitude of contrasting options has been implemented for Axio Scope. Suitable for every specimen, every application and unique in this class of microscope. Exchangeable: the standard lens system and the achromatic correction lens system Excellent in all techniques: the contrast Brilliant, high-contrast images are the visible result of the newly computed reflected-light beam path of the Axio Scope. Achieved by well proven IC 2 S optics plus the consistent minimization of disturbing stray light. Decisive for achieving outstanding contrast. A retrofittable achromatic correction lens system is bringing the optical quality of Axio Scope to high IC²S level (Infinity Contrast & Color Corrected System) is available to you for higher demands. Unique in this class. Interface for your reflector inserts: the infinity space Unique in this class: the interface in the infinity space. Axio Scope offers you the possibility of using reflector inserts that are most suitable for your applications. You can choose from a 2x slider for simple brightfield and darkfield applications as well reflector turrets with four or six positions. The 6x turret offers sufficient free positions to accomodate, for example BF, DF, Pol and C-DIC in reflected-light as well as BF and Pol in transmittedlight. Irrespective whether slider or turret solution: the change between the contrasting techniques is a simple matter. On one hand sliders and turrets can be fitted and changed easily with Push&Click modules, on the other hand their optical modules are kept safely and free of dust. Axio Scope offers an additional special feature. The interface for reflector inserts can be used as camera port for transmittedlight applications (ISCP: Infinity Space Camera Port). The interface in the infinity space enables a variety of applications: the 4x and 6x reflector turret, the Infinity Space Camera Port (ISCP) as well as the 2x reflector slider. 12

17 Copper sulfate crystals in transmitted-light: 1. Brightfield, 2. Polarization, 3. conventional DIC and 4. PlasDIC. With PlasDIC there is, for the first time, the possibility for the brilliant illustration of the morphology. Versatile options: the contrasting techniques The variety of reflected- and transmitted-light techniques that Axio Scope offers you is unusual in this performance class. Perfectly tailored to your tasks in routine and research. The most import contrasting techniques include: In reflected-light: Brightfield Darkfield Polarization DIC C-DIC Fluorescence In transmitted-light: Brightfield Polarization Darkfield DIC PlasDIC Phase contrast Darker: the darkfield The high quality of the newly designed reflectedlight beam path is shown in the clear enhancement of darkfield contrast. Thanks to minimizing disturbing stray light, this darkfield can cope with even the most demanding specimens. Captivating with a homogeneously black background. Delighting you by making even the finest structures visible. means that both high contrast and high resolution can be achieved with a DIC prism. For the entire series of the new all-round EC Epiplan objectives you require only one C-DIC prism for interference contrast in circularly polarized light (C-DIC). Color-neutral variety: the polarizers Axio Scope offers you a choice of polarizers of different performance classes, tailored exactly to your needs. The high degree of polarization is common to all polarizers from Carl Zeiss color-neutral in the visible spectral range and thus perfect for brilliant images and precise measurements conforming to the standards. Affordable yet powerful: PlasDIC For the first time an alternative to the DIC is available generating a Differential Interference Contrast in transmitted-light in good quality even when the object, the object carrier, the condenser or the objective have an anisotropic character. PlasDIC is the technique of choice for examining anisotropic (birefringent) specimens, if you want to gain a relief impression. With visible advantages in regard to gaining information and brilliance. Specific features such as the morphology or the crystal growth of anisotropic phases can be detected clearly better with PlasDIC than with conventional brightfield, polarization or DIC techniques. Perfect for oriented structures: C-DIC Circular DIC, in short: C-DIC, is a polarization technique that in contrast to the customary Differential Interference Contrast (DIC) works with circularly polarized light. The advantages of the patented technique for contrasting differently oriented object structures are decisive. For instead of having to rotate the specimen, simple rotation of the knurled ring of the DIC slider is sufficient with C-DIC to visualize all object information one after the other. Continuously and related to the object. In this case every required shearing orientation can be set for every oriented structure. This 13

18 Tangible Operating Comfort Convenient to Handle. Efficient in the Workflow. Operating Comfort and Ergonomics Fullfill Almost all Your Needs. Developed for 24 hour use. Axio Scope will convince you in quality and stability. The many intelligent details that make your routine work a great deal easier and more pleasant to deal with. Well conceived regulated: the intensity adjustment in Axio Scope is arranged on both sides around the focusing drive. Well conceived operating controls Simply intelligent the design of Axio Scope has been well conceived in every point, to make operation of the stand as comfortable and safe for you as possible in your routine work. The intensity adjustment is arranged ergonomically around the focusing drive. Positioned on both sides near the focusing drive, it can be operated extremely conveniently. For you now control illumination settings without having to take your hands off the focus drive. According to your preference with your left or right hand. Convenient stages On Axio Scope the stage carriers are designed as a customer interface with a wide range of different stage versions. These include different mechanical stages with large travel range in standard or ergonomic version. The new ergo stage is unique for Axio Scope: it offers the possibility to position the stage drive more than 90 mm along the y axis into the position that is most comfortable for you. It can be fixed in position and operated very conveniently without any need for you to change the position of your hand. A further advantage of Axio Scope: the stage carriers for reflected- and transmitted-light applications can be lowered or removed without tools using a dovetail. For instance for additional extension of the specimen space for larger specimens. Unique for Axio Scope: the new ergo stage offers the possibility of bringing the stage drive into the position that is most pleasant for you. 14

19 Ergonomic tubes Designed for long work days, Axio Scope places a special emphasis on ergonomics. The viewing angles of the ergotubes are based on modern studies and are designed for a fatigue-free, healthy posture. Two different versions are available to you. The height-adjustable ergotube with a travel range of 50 mm. The comfort ergo phototube with upright side correct image, which can be set up to suit your height in the most comfortable way possible, with a fixed viewing angle of 15 and ability to individually adjust in height and depth by up to 50 mm. Ergonomically sophisticated, the comfort ergo phototube with upright side correct image with a fixed viewing angle of 15 and individual height and depth adjustment of 50 mm. Unshakable quality Especially in routine applications, when working around the clock, the material and workmanship of the microscope are vitally important. Axio Scope is with heart and soul a microscope from Carl Zeiss. Unshakable with its sturdy stand construction and simply superior in its mechanical quality. Axio Scope is designed for fatigue-free working, e. g. the heightadjustable ergo phototube. 15

20 Digital High Performance Ready for the Leading Software. Ready for a Variety of Cameras. The Simple Step From Stand-alone Microscope to Documentation System. Your Axio Scope Imaging System is more than the sum of microscope, software and camera: a complete solution from a single source. Fully integrated in the Carl Zeiss systems approach. With the security of one hundred percent compatibility for now and the future. Simply convenient: the AxioVision microscope software Easy to operate and functional with AxioVision you extend your Axio Scope to include digital documentation. The modular microscope software from Carl Zeiss offers you all the important functions in the basic version, from acquisition and processing up to analyzing and archiving your images. AxioVision is one of the leading systems on the market. Primarily because this software is easy to operate. It is easy to adapt the user in interfaces and functions. Ideal for simplifying your routine applications through clear workflows and thus making them more efficient. Fully integrated in the Carl Zeiss systems approach, Axio Scope can be extended to a powerful imaging platform. 16

21 From AutoMeasure up to TIC: the AxioVision modules AxioVision offers you a large number of modules for flexible use especially for digital material microscopy. The TIC module is available in addition to the standard analysis modules such as Interactive Measurement, AutoMeasure and AutoMeasure plus with its functionalities for segmentation, binary image processing and automatic measurement. The TIC technique Total Interference Contrast enables accurate no-contact and thus very easy optical height and thickness measurement of object structures in the range of a few nanometers up to a few micrometers. The advantage of TIC compared with conventional layer thickness measuring instruments (profilometers, scanning force microscopy) lies in the short measuring and evaluation time with simultaneously high measuring accuracy. Pyroxene-rich chondrule fragment in Dar al Gani 327, Transmitted-light, polarization, enlarged 50x. Dr. Jutta Zipfel, Meteorite Search Section, Senckenberg Research Institute and Natural History Museum, Frankfurt am Main, Germany Great in all performance classes: the cameras From the AxioCam ICc1 or AxioCam ICc3, the smallest and most inexpensive digital color cameras, to the AxioCam HRc, the high-resolution camera: Axio Scope offers a connection for every type of camera. And Carl Zeiss provides the complete range of modern microscope cameras. Each of them carries the Carl Zeiss seal of quality. Axio Scope is also compatible with digital consumer cameras, e.g. from Canon. You receive the AxioVision LE software version free of charge. A good solution that already opens up many options for you in digital image acquisition. Ideal for routine application in materials microscopy: the inexpensive digital color cameras AxioCam ICc1 and AxioCam ICc3. 17

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23 Stand upper parts Stand upper part Transmitted-light Stand upper part FL/HBO Stand upper part FL-LED Stand upper part HAL 100/HBO Stand upper part HAL 100/HBO with objective turret 6x brightfield, M27 with objective turret 3x brightfield, 3x DIC, M27 with objective turret 3x brightfield, 3x DIC, M27 with objective turret 6x brightfield/darkfield, M 27 with objective turret 6x brightfield/darkfield, DIC, M27 Stand lower parts Stand lower part for LED illumination Microscope stand Axio Scope.A1 LED, 6x BF Microscope stand Axio Scope.A1 LED, FL/HBO, 3x BF, 3x DIC Microscope stand Axio Scope.A1 LED, FL-LED, 3x BF, 3x DIC Microscope stand Axio Scope.A1 LED, HAL 100/HBO, 6x BD Microscope stand Axio Scope.A1 LED, HAL 100/HBO, 6x BD DIC Stand lower part for HAL 50 illumination Microscope stand Axio Scope.A1 HAL 50, 6x BF Microscope stand Axio Scope.A1 HAL 50, FL/ HBO, 3x BF, 3x DIC Microscope stand Axio Scope.A1 HAL 50, FL-LED, 3x BF, 3x DIC Microscope stand Axio Scope.A1 HAL 50, HAL 100/HBO, 6x BD Microscope stand Axio Scope.A1 HAL 50, HAL 100/HBO, 6x BD DIC Stand lower part for HAL 100 illumination Microscope stand Axio Scope.A1 HAL 100, 6x BF Microscope stand Axio Scope.A1 HAL 100, FL/HBO, 3x BF, 3x DIC Microscope stand Axio Scope.A1 HAL 100, FL-LED, 3x BF, 3x DIC Microscope stand Axio Scope.A1 HAL 100, HAL 100/HBO, 6x BD Microscope stand Axio Scope.A1 HAL100, HAL 100/HBO, 6x BD DIC Stand column Axio Scope Vario 380 m Axio Scope stand upper part FL/HBO, 3x BF, 3x DIC, M Axio Scope stand upper part FL-LED, 3x BF, 3x DIC, M Axio Scope stand upper part HAL 100/HBO, 6x BD, M Axio Scope stand upper part HAL 100/HBO, 6x BD DIC, M Axio Scope Vario stand column 380 mm Axio Scope Vario stand column 380 mm Axio Scope Vario stand column 380 mm Axio Scope Vario stand column 380 mm Axio Scope Vario drive box, focus lift 15 mm Axio Scope Vario drive box, focus lift 15 mm Axio Scope Vario drive box, focus lift 15 mm Axio Scope Vario drive box, focus lift 15 mm Stand column Axio Scope Vario 560 mm Axio Scope stand upper part FL/HBO, 3x BF, 3x DIC, M Axio Scope stand upper part FL-LED, 3x BF, 3x DIC, M Axio Scope stand upper part HAL 100/HBO, 6x HD, M Axio Scope stand upper part HAL 100/HBO, 6x BD DIC, M Axio Scope Vario stand column 560 mm Axio Scope Vario stand column 560 mm Axio Scope Vario stand column 560 mm Axio Scope Vario stand column 560 mm Axio Scope Vario drive box, focus lift 15 mm Axio Scope Vario drive box, focus lift 15 mm Axio Scope Vario drive box, focus lift 15 mm Axio Scope Vario drive box, focus lift 15 mm

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29 Solid Advantages 23 stand combinations a perfect solution You configure your Axio Scope from five upper parts, three lower parts or two Vario columns. Made to measure for simple routine applications, for demanding research tasks, for every budget. Numerous interfaces A large number of interfaces allows an exact adaptation to requirements and budget. Economical upgrading Many components can be added on by the customer as needed easily and without additional service costs. PlasDIC and C-DIC In consistent response to many customer requests, the Differential Interference Contrast in circular polarized light (C-DIC) and the new PlasDIC relief contrast can now also be integrated in a routine microscope. Variety of reflector inserts Thanks to its customer interface in the infinity space, Axio Scope allows users to select the reflector insert most suitable for their relevant application. There is a choice of 2x slide, a 4x reflector turret and a 6x reflector turret. EC Epiplan objectives great for routine work and even high demands A new series of these high-performance objectives is now available with Axio Scope. Made to measure for routine work, inexpensive and for versatile use. Flexibility of the specimen space Designed for very varied applications, Axio Scope offers unusually large variability of the specimen space. According to configuration continuously adjustable for specimen thicknesses from 0 to 360 mm. Convenient intensity adjustment The intensity setting of the illumination is arranged on both sides close to the focusing drive and is extremely convenient to operate with the left or right hand. Conversion without tools The stage carrier can be lowered easily without tools, e.g. for extending the specimen space. Contemporary Imaging System Suitable for cameras of different performance classes as for the basic and advanced versions and extended functionality of the AxioVision microscope software, Axio Scope grows to become a powerful documentation platform. Compound barred olivine chondrule in Dar al Gani 327, enlarged 20x, 1. Transmitted-light Brightfield, 2. Transmitted-light polarization. Dr. Jutta Zipfel, Meteorite Search Section, Senckenberg Research Institute and Natural History Museum, Frankfurt am Main, Germany 1 2

30 Carl Zeiss MicroImaging GmbH Jena, Germany Industrial Göttingen Location Phone: Telefax: Information subject to change Printed on environmentally friendly paper /e printed 04.08

31 M i c r o s c o p y f r o m C a r l Z e i s s Axio Imager Vario Dedicated to Large Sample Analysis Maximum stability and precision for large samples in materials analysis and quality control.

32 Exceeds all Expectations In materials microscopy the size of the sample space is one of the determining criteria when it comes to quality testing, quality assurance and materials analysis as well as to the development of future materials. Axio Imager Vario, the new addition to the tried-and-tested Axio Imager system series does justice to these demands with consistently high optical performance, functionality and stability. Axio Imager Vario stands for maximum precision combined with the largest possible sample space in research, development and quality assurance involving solar cells, wafers or flat panel displays, for example. At a glance The outstanding features of Axio Imager Vario: Stable column design Impressive sample space with vertical extension up to 254 mm and sample travel range up to 300 mm Nosepiece focus with step-size resolution up to 10 nm Excellent optics with outstanding contrast for the best resolution Reflected-light illuminator with apochromatically corrected field lens Maximum precision and reproducibility through motorized components Title: Mono-crystalline silicon solar cell Circular Differential Interference Contrast EC Epiplan-APOCHROMAT 50x / 0.95 Right: Axio Imager.A2 Vario with MARC control unit and Axio Imager.Z2 Vario with docking station and transmitted-light module. 2

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34 Well-thought-out Components Perfectly Adapted to your Requirements Axio Imager Vario offers a flexible system platform for research, testing and development involving large material samples in areas such as the solar, flat panel and wafer industries. The column High level stability A column with aluminum base plate forms a stable basis for the Axio Imager Vario microscope, while the precise guides that have been integrated into the column allow exact adjustment of the sample space in the z-direction from a height of 0 to a maximum of 254 mm according to the objects being examined. Thanks to the lockable height stop, the sample is reliably protected against damage. The nosepiece focus Reliable focus and repeat accuracy As the sample is brought into focus by moving the nosepiece up and down, it is not necessary to move the sample itself. This means, particularly in the case of heavy samples, that it is possible to guarantee consistent focus and repeat accuracy. Both stand variants Axio Imager.A2 Vario and Axio Imager.Z2 Vario are equipped with a motorized nosepiece focus, which has a 5 mm stroke and a step-size resolution of 25 or 10 nm. 5 mm The sample is brought into focus simply by moving the nosepiece up and down. Stable column design: vibration-free working Operating elements for precise adjustment of the microscope module in the z-direction and lockable height stop. Available as an option: manual transmitted-light module, suitable for Köhler illumination, for all common contrasting techniques. 4

35 The stages and sample holders The perfect basis Depending on the application, four different sample stages for reflected-light and transmitted-light can be selected: manual stage with 200 mm travel range for reflected-light and transmitted-light manual stage with 300 mm travel range for reflected-light scanning stage with 200 mm travel range for reflected-light and transmitted-light scanning stage with 300 mm travel range for reflected-light and 200 mm travel range for transmitted-light The manual stages are equipped with a coupler which can be used to switch between the regular x-y drive and a handle for rapid movement. It is possible to control the scanning stages with a repeat accuracy of 1 µm either via the optional x/y drive on the Docking Station, via a separate joystick or using the PC. Numerous different insert plates and sample holders such as chucks for different wafer sizes, ensure the flexibility needed to be able to analyze the widest possible range of materials reliably. In the case of particularly tall samples, the sample stage can be dispensed with entirely. The transmitted-light module Light from below A manual transmitted-light module suitable for Köhler illumination is available as an option for all common contrasting techniques. This module can be equipped with halogen or LED illumination. In addition to a luminous field diaphragm, it also has a switchable diffusion screen, as well as an insert for a double filter wheel to hold neutral-density filter sets. Four different condensers are available. 5

36 The Microscope Modules Perfectly Equipped Manual or Motorized Whether for manual or motorized microscopy with its three available modules, Axio Imager Vario offers the right solution for every analysis need. Axio Imager.A2 Vario The partially motorized microscope module Axio Imager.A2 Vario offers a solid base for measurement, analysis and documentation in the area of materials microscopy. It is the right choice for applications where, although a large sample space is required, no motorization is necessary for changing the contrasting technique or magnification, for example. Light intensity and the motorized nosepiece focus (with 25 nm step-size resolution) can be adjusted conveniently using the freely positionable MARC (Manual Rotary Control) control unit or PC, while coding of the key components allows essential microscope parameters to be adopted by the AxioVision software. The objective and total magnification, contrasting techniques and brightness settings are stored and can be retrieved at any time. 6

37 Axio Imager.Z2 Vario The powerful Axio Imager.Z2 Vario microscope module is fully motorizable and therefore the perfect system for complex applications and challenging tasks that demand a high degree of automation. Your work is made considerably easier thanks to the motorized reflected-light beam path, which allows all light and contrast settings to be precisely reproduced. All the motorized components of the microscope module can be controlled via the docking station (which is also freely positionable) or PC ensuring a high degree of operating comfort and reproducibility. The integrated user administration also means that work can be managed simply and clearly in a multi-user environment. Use of the MARC control unit is also an option. In addition to reflected light, both Axio Imager.A2 Vario and Axio Imager.Z2 Vario microscope modules can be equipped with the manual transmitted-light unit and can be freely combined with the sample stages available. Axio Imager.Z2 Vario without focus Axio Imager.Z2 Vario without focus is the third microscope module available. Apart from the nosepiece focus, it offers the same functionality as Axio Imager.Z2 Vario. This model is recommended for situations in which the microscope module is integrated into custom solutions that make use of the external focus drive of the customer s own system. Once again, this microscope module, together with the optional Control Box, can also be controlled via the Docking Station or a PC. 7

38 The Optics Brilliant Vision Axio Imager Vario is the logical continuation of the Axio Imager family, with its tried-and-tested, renowned optical performance. The illumination concept Information in brilliant quality You will see your objects in brightfield and darkfield in proven outstanding quality. Stray light has been minimized and imaging is virtually aberration free. Excellent image contrasts is achieved, especially in interference contrast and even at high magnifications. The objective series Experience Enhanced Contrast (EC) To obtain comprehensive image information, you need to use a wide range of objectives. With the Axio Imager Vario objective series, Carl Zeiss has provided solutions for all kinds of requirements, in various price and performance categories. Further information can be found at EC EPIPLAN Objectives The economical, all-around series of objectives, which have been achromatically corrected and strain-minimized for impressive-quality DIC create a flat field image for an intermediate image size of 23 mm and are available in brightfield or brightfield/darkfield variants. The exit pupils are always identically positioned, and Differential Interference Contrast in circularly polarized light is possible with all EC EPIPLAN objectives using a single C-DIC prism. EC Epiplan-NEOFLUAR Objectives The particularly high-contrast EC Epiplan-NEOFLUAR objectives, which have been corrected to a high degree and strain minimized, enable you to achieve sharp C-DIC and create a flat, 25 mm field of view ideal for displaying fine color and structural details, e.g. lamellae in spherulitic graphite. Available as DIC/C-DIC, Brightfield/ Darkfield, Pol and LD (long working distance) variants, they also offer the additional benefits of long working distances and high numerical apertures. EC Epiplan-APOCHROMAT Objectives The EC Epiplan-APOCHROMAT objectives satisfy the very highest demands. They are ideal for imaging color and structural details in the sub-micrometer range and are renowned for offering the best correction and highest numerical apertures. Based on ICS optics from Carl Zeiss, these innovative Enhanced Contrast objectives perform at the limits of what optics can achieve with regard to contrast and reproduction accuracy. 8

39 Axio Imager Vario also offers you the convenience of being able to control all functions remotely. The tube lens turret Increase your flexibility With its flexible magnification range, the Axio Imager Vario tube lens turret offers greater variability when it comes to adapting the desired frame. The tube lens turret is available in two variants: 1) Encoded: this variant allows you to achieve an exact magnification and automatically save the scaling factors that can be derived from this in the image for the analysis. Measurement results are reliable, documentable and reproducible. 2) Motorized: this variant offers you additional operating comfort for your system solutions. And Axio Imager Vario tube lens turret offers yet another advantage: the use of a focusable Bertrand lens, an important component for the easy observation of the objective exit pupil. The modulator turret Easy to operate Switching quickly and easily from one contrasting technique to another the C-DIC modulator turret has been developed precisely with this goal in mind. Each of the four positions can be conveniently selected with a simple turn. The motorized variant is particularly easy to operate. When switching to interference contrast, the correct module with the setting you have previously defined is automatically activated. If you switch to brightfield or darkfield, the blank position will also be automatically selected for fast and, above all, reproducible results. The motorized diaphragms Constant image quality Using the motorized aperture and luminous field diaphragms you can achieve error-free, reproducible settings and, consequently, constant image conditions. Motorization guarantees you comparable results and higher productivity by automating the workflow. The aperture diaphragm Simple, but clever It is often simple optimized detail that can improve your day-to-day work. A perfect example of this is the newly developed aperture diaphragm from Carl Zeiss. This is a slider with a motorized aperture-diaphragm revolver. The special feature is a disk with fixed diaphragms that rotates rather than the usual aperture iris that is opened and closed. Thanks to this improved component, we are able to guarantee you a twofold advantage: greater repeat accuracy and a longer life for the component. More options, faster handling: The reflector turrets with Push & Click Modules. The nosepiece Flexibility in detail The nosepiece provides room for up to seven objectives. You now have a sufficient number of objectives to use the entire standard magnification series. This increases reliabilty and the sample throughput rate. Naturally, it is also possible to combine objectives. The reflector turret Switching made easy All Push&Click contrast modules can be stored securely in six or ten positions and activated as needed using manual or motorized method. Greater comfort, simpler changing of contrasting techniques: The modulator turret for interference contrast. 9

40 The Contrasting Techniques Observing in New Dimensions Numerous imaging options improve the visualization of your samples. For demanding tasks, Carl Zeiss innovative C-DIC technique makes it possible to achieve a clearly visible improvement in your results. Test structures, period 1.6 µm EC Epiplan-APOCHROMAT 50x / 0.95, 8 / 0, camera-adapter 0.63x Brightfield and darkfield Maximum homogeneity and a stray light free image background In brightfield the Axio Imager Vario provides homogeneous illumination and exceptional contrast while, in darkfield, the background is so dark that the technique has earned a special name: ADF Advanced Darkfield. By minimizing disturbing stray light and reducing the longitudinal color aberration of the illumination optics, this darkfield is suitable for the most challenging of samples and impresses even when faced with the finest of structures. Switching between techniques only requires a simple turn. The motorized stand models allow you to work particularly quickly and conveniently. Surface of a silicon wafer recorded with a 5x EC Epliplan-APOCHROMAT objective. The same point is shown in three different contrasting techniques: Brightfield, darkfield and C-DIC. Thanks to the different contrasting, different details become visible on the surface of the wafer in each case. Brightfield Darkfield C-DIC Perfect for all structures Circular Differential Interference Contrast (C-DIC) is an optical polarization procedure that, in contrast to the common differential interference contrast (DIC), works with circular, polarized light. The advantages of this procedure are crucial for the contrasting of diverse directed object structures. There is no longer the need for the preparation be turned in the azimuth with the C-DIC, a simple turn in the operating element of the C-DIC slider or modulator turret is sufficient and all successive object information can be captured. Additionally, it also allows for every chosen fragmentation of every directed structure to be adjusted. This means that with one DIC prism, a high contrast as well as a high resolution can be achieved. C-DIC 10

41 The Software Utilizing Modularity In the fields of material research and design, requirements and areas of application are changing. Modular and customizable, the AxioVision image analysis software, combines with Axio Imager Vario in order to offer you maximum flexibility and capability when analyzing your images. Simple, clearly presented user interface for camera control and image acquisition. MosaiX image of a gearwheel, 15 x 20 tiles. AxioVision Basic AxioVision offers you automated control of your ZEISS microscope, allowing you to acquire, analyze and document features such as crystalline microstructures in your samples in a single operation. Only AxioVision enables you to benefit from the ZVI image format, developed by Carl Zeiss specifically for microscopy. The quality, content and meaningfulness of your valuable images are retained with no loss of information and with the added benefit of integrated documentation of the imaging conditions essential for repeatability and the validation of your data. Depending on your requirements, the functionality of your selected system can be expanded to include various modules or adapted to individual applications, meaning that you have an expandable solution for your microscopy applications. MosaiX Developed to enable you to aquire images of large objects, MosaiX scans your samples in their entirety in just one process. An overall image is then created from the individual image tiles. This serves as an ideal overview image for navigating around the sample or as the basis for further analyses. From the MosaiX image you can perform measurements that cross image fields the tiles present no restriction allowing you to gain valuable insights into the context and relationships of features of interest. Detailed view: individual tile of the MosaiX image. 11

42 The Cameras Preserving What You See Axio Imager Vario provides an outstanding platform for using a wide range of cameras, with the AxioCam family of Carl Zeiss forming the ideal combination. The AxioCam family Flexibility and performance As customized components in the Carl Zeiss Systems environment, camera, microscope and software are perfectly matched to form a system solution in digital imaging that opens up new perspectives in the areas of performance, flexibility and operating comfort and for both research and routine applications. Axio Imager Vario microscope platform offers great flexibility in camera use thanks to its standardized camera ports (C Mount) in the stand and a complete assortment of camera adaptors. From digital compact cameras (e.g., from Canon) up to professional, research-grade cameras of the Carl Zeiss AxioCam family, a wide variety of cameras are supported by the AxioVision image capture and analysis software. All digital cameras from Carl Zeiss are offered complete with a free entree-level version of AxioVision and guarantee optimal image quality. Some models are also available in a black and white version with an extended sensitivity range. The sophisticated integration of Carl Zeiss cameras delivers important advantages: high speed, correct resolution, optimized live images or automatic exposure adjustment. All cameras in the AxioCam family are controlled via a uniform user interface in AxioVision. Naturally, you can also adapt the camera operation individually to the wide range of applications you work on. Entry Level AxioCam ERc 5s Economical and extremely flexible 5 megapixel CMOS camera AxioCam ICc Economical CCD cameras with 1.4 or 3.3 megapixel Mid-Range AxioCam MRc High-quality 1.4 megapixel camera with good signal quality and a large dynamic range AxioCam MRc5 High-quality 5 megapixel camera with good signal quality High-End AxioCam HRc 13 megapixel camera with maximum resolution, extremely flexible settings and the maximum possible signal quality 12

43 50 mm continuous height adjustment. The Ergonomics Relax While You Work The Ergophototube Relaxed work For applications where great importance is attached to ergonomics, two different Ergophototubes are available: the Ergophototube with an upright, unreversed image, 44 mm continuous height adjustment and 20 viewing angle and the Comfort-Ergophototube with an upright, unreversed image, 50 mm continuous height adjustment and continuous horizontal extension of 50 mm and 15 viewing angle. The docking station Remote Microscopy The freely positionable docking station operating module makes it possible to control the light intensity and all motorized components of the Axio Imager.Z2 Vario. It has a coarse and fine focus drive, a freely programmable ring of buttons and a touch screen (TFT). In order to simplify complex steps, all the main functions have been grouped together on the touch-screen. This allows you to control all motorized components easily at the touch of a button and to display and control the microscope status. If required, the integrated light and contrast managers ensure the best possible light and contrast setting. In addition to fixed presettings, it is also possible to store complex procedures as individual settings and retrieve them at any time on a user-specific basis with just the touch of a button. Axio Imager.Z2 Vario is therefore ideal fore use even in a multi-user environment. 50 mm continuous horizontal extension. The Comfort-Ergotube allows the user to adopt a relaxed position even when working with large sample stages. For users who want or need to sacrifice direct viewing into the microscope, a tube module is available without an eyepiece for viewing. MARC (Manual Rotary Control) Numerous functions all in one place The control unit MARC enables you to control key microscope functions, which can all be operated intuitively and extremely conveniently using just one hand via the coarse and fine drive knob and a ring of buttons. Depending on the microscope module connected, MARC can be used in different ways: with Axio Imager.A2 Vario the unit is also used in addition to focusing and the brightness control to open and close the shutter to the light intensity values of the nosepiece position and to switch between reflected-light and transmitted-light. In the case of Axio Imager.Z2 Vario, on the other hand, MARC can be used as an optional control unit alongside the docking station. In this case the configuration of the buttons reflects the ring of buttons on the docking station. Users who prefer working with two focus drive knobs can therefore use MARC and the docking station at the same time in parallel. MARC can either be positioned freely using the tabletop base or attached to manual stages close to the x-y drive. The advantage of this is that the user can focus, control brightness and move the sample with just one hand. The docking station offers the possibility of controlling the motorized stage via an optional coaxial drive. The MARC control unit allows the key functions to be controlled intuitively and extremely conveniently with just one hand. 13

44 Axio Imager Vario Technical Data Component Option Axio Imager.A2 Vario Axio Imager.Z2 Vario Axio Imager.Z2 Vario without focus Stand manual motorized Control box O Coding (can be read out from PC) Remote control MARC + O O Docking Station with TFT - O O Contrast manager Light manager - +* +** +** Tube lens turret coded O - - motorized - O O Reflector turret 6-pos. coded pos. motorized - O O 6-pos. motorized ACR - O O Nosepiece 6-pos. coded POL Vario O pos. coded BD DIC Vario O pos. motorized POL Vario - O O 6-pos. motorized BD DIC - O O 7-pos. motorized BD - - O Modulator turret for C-DIC/TIC manual O O O motorized - O O Transmitted-light illumination manual O O O Double filter wheel manual O O O (transmitted light) motorized Reflected-light illumination manual motorized Luminous field diaphragm manual + O O (reflected light) motorized - O O Aperture diaphragm manual O O O (reflected light) motorized - O O Aperture diaphragm (reflected light) with motorized - O O aperture-diaphragm revolver Double filter wheel manual O O O (reflected light) motorized - O O FL attenuator manual O O O motorized - O O Light switching manual O*** + + reflected light/transmitted light via Docking Station / MARC O*** O*** O*** Mixed light manual O**** O**** O**** via Docking Station - O*** O*** Nosepiece focus motorized, 10 nm step size resolution motorized, 25 nm step size resolution Apotome - O O O Scanning stages DC stepper motors O O O 14

45 Microscope module Axio Imager.A2 Vario Axio Imager.Z2 Vario Axio Imager.Z2 Vario without focus Height of sample space mm (reflected light, without stage) mm (reflected light, with stage) 0-88 mm (transmitted light, with stage) mm (reflected light, without stage) mm (reflected light, with stage) 0-88 mm (transmitted light, with stage) - Stroke of nosepiece focus 5 mm 5 mm - Depth of sample space 385 mm (optical axis to column) 385 mm (optical axis to column) - Maximum travel range of stages 300 mm x 300 mm 300 mm x 300 mm - Maximum transmitted-light area 200 mm x 200 mm 200 mm x 200 mm - Dimensions of microscope module Mass of microscope module 180 x 260 x 420 mm (height x width x depth) 17.5 to 20 kg depending on equipment Mass of base plate and column approx. 78 kg approx. 78 kg - Dimensions of base plate 700 mm x 574 mm (width x depth) 700 mm x 574 mm (width x depth) - Eyepiece Field of view number 23 or 25 Objective magnification 1x - 150x Objectives Reflected light: EC EPIPLAN, EC Epiplan-NEOFLUAR, EC Epiplan-APOCHROMAT Transmitted light: N-ACHROPLAN, EC Plan-NEOFLUAR, Plan-APOCHROMAT, C-APOCHROMAT, FLUAR Special: LD EPIPLAN, LD EC Epiplan-NEOFLUAR Tubes Stages Illumination Tube without binocular eyepiece, binocular tubes, phototubes, ergotubes and ergophototubes Manual mechanical stages and motorized scanning stages for reflected light and transmitted light with travel ranges of 200 mm x 200 mm or 300 mm x 300 mm 12V 100W HAL, 100W HBO, VIS LED Contrasting techniques Reflected light: brightfield, darkfield, differential interference contrast, circular differential interference contrast, simple polarization, fluorescence Transmitted light: brightfield, darkfield, differential interference contrast, polarization, phase contrast + Included with stand O Optional - Not possible * Light manager manual Imager ** Light manager motorized Imager *** With additional CAN-power supply **** With additional power supply 15

46 At a glance The outstanding features of Axio Imager Vario: Stable column design Impressive sample space with vertical extension up to 254 mm and sample travel range up to 300 mm Nosepiece focus with step-size resolution up to 10 nm Excellent optics with outstanding contrast for the best resolution Reflected-light illuminator with apochromatically corrected field lens Maximum precision and reproducibility thanks to motorized components Carl Zeiss MicroImaging GmbH Jena, Germany Industrial Göttingen Location Phone : Telefax : micro@zeiss.de Information subject to change. Printed on environmentally friendly paper bleached without chlorine /e printed 06.10