LINOS Laseroptics and Lenses

Transcription

1 LINOS Laseroptics and Lenses Benefit from our many years of experience in the development of optical systems for laser material processing. Our broad selection of beam expansion systems and F-Theta lenses meets even the most stringent demands. This comprehensive LINOS range covers everything from fixed beam expanders to modular, variable and motorized beam expanders. We also manufacture laser beam homogenizers in cooperation with one of the market leaders in this field. The high numerical aperture of LINOS laser lenses has gained them wide popularity. Our quality criteria: Sophisticated design Many years of experience Latest optical, mechanical and mount technology! Special features: Flexible and economical: the modular bm.x expansion system. Ideal areas of application: Beam focusing, beam expansion, beam homogenizing and more, for laser material processing. 414

2 Laseroptics and Lenses Laseroptics and Lenses F-Theta-Ronar Lenses F-Theta-Ronar Lenses 355 nm 416 F-Theta-Ronar Lenses 532 nm 418 F-Theta-Ronar Lenses 1064 nm 420 Protective Glasses 422 Focus-Ronar Lenses Focus-Ronar Lenses 1064 nm/532 nm 423 Laser Beam Homogenizer Laser Beam Homogenizer, Introduction 439 Laser Beam Homogenizer for Microbench 440 Laser Beam Homogenizer, System 40 / 65 mm 440 Laseroptics, Accessories Shearcubes 441 Laser Speckle Reducer 442 Inspection System Inspec.x scan 424 Beam Expanders Variable Magnification Beam Expanders 425 Motorized Beam Expanders (Discontinued Model) 426 Motorized Beam Expanders 427 UV Laser Beam Expander Systems bm.x 428 VIS-YAG Laser Beam Expander Systems bm.x 430 NIR Laser Beam Expander Systems bm.x 432 Adapter C-Mount/M30x1 433 Fixed Magnification Beam Expanders for Material Processing (2x, 5x, 10x) 434 Laser Beam Expander System 4x and 7x 435 Laser Beam Expander System 10x 435 Laser Beam Expander System 15x 436 Laser Beam Expander System 16x/25x, without/with spatial filter 436 Laser Beam Expander System 50x and 75x with spatial filter 437 Adapter 1 to W0.8 or Ø 25 mm 438 Adapter W0.8 /1 438 Laser Line Projector 438 Phone numbers: Germany France

3 Singlets Achromats F-Theta-Ronar Lenses 355 nm The following is valid for the spec tables at the bottom: The entrance beam diameter (beam-ø) refers to the intensity 1/e 2 at Gaussian illumination. The image spot diameter (spot-ø) refers to the intensity 1/e 2 at Gaussian illumination. It can be calculated by the formula: Spot-Ø = 1.83 x λ x EFL / beam-ø The listed F-Theta-Ronar lenses accomplish the F-Theta-condition better than 0.1% except better than 1%. The mirror distances m1 and m2 are recommended values The overall scan angle Ñ refers to the maximum diagonal scan angle The scan length can be calculated with the formula: 2y'= EFL x 2Ð x π/180 The effective focal length (EFL), flange focal length (FFL) and back focal length (BFL) have been calculated by means of paraxial relations (for rays close to the optical axis). In reality, they can slightly deviate from the data shown in the following tables by the actual entrance beam diameters and mirror positions used. The data for the entrance beam diameter and the mirror positions are recommended values. Changing their values will affect both the image spot diameter and the maximum possible scan angle/diagonal. F-Theta-Ronar 355 nm No min al foca l leng th (m m) Effec tive focal lengt h EFL Fused silica lenses Back focal length (from vertex of last eleme nt or from protec tive glass surfac e) BFL Flange focal length (dista nce from mech anical flange to focus plane) FFL Scan lengt h or diag onal for area scans 2y' Max imu m scan field (mm ²) x x x x x x x *) x x *) Meets F-Theta-condition better than than 1%. 416 Phone numbers: US UK Singapore

4 Laseroptics and Lenses Laseroptics Overa ll scan angle ± theta max. ( ) Entra nce beam bund le diam eter Ø beam Image point diame ter (1/ e 2 ) for Gaus sian illu mina tion Øspot (µm) Mirr or dista nces m1/ m2 Scre w thre ad or lens diam eter Prot ectiv e glass ± /29.4 M85x1 PG ± /16 M85x1 PG ± /16 M85x1 PG ± /48 M85x1 PG ± /30 M85x1 PG Phone numbers: Germany France

5 Singlets Achromats F-Theta-Ronar Lenses 532 nm The following is valid for the spec tables at the bottom: The entrance beam diameter (beam-ø) refers to the intensity 1/e 2 at Gaussian illumination. The image spot diameter (spot-ø) refers to the intensity 1/e 2 at Gaussian illumination. It can be calculated by the formula: Spot-Ø = 1.83 x λ x EFL / beam-ø The mirror distances m1 and m2 are recommended values Energy series: With fused silica lenses / Lenses are developed and coated for the wavelength range: nm / Damage threshold (@ 532 nm): 18 J/ cm² with pulse duration of 12 ns The listed F-Theta-Ronar lenses accomplish the F-Theta-condition better than 0.1% except < 3.4%, < 0.5% and < 1%. The overall scan angle Ñ refers to the maximum diagonal scan angle The scan length can be calculated with the formula: 2y'= EFL x 2Ð x π/180 The effective focal length (EFL), flange focal length (FFL) and back focal length (BFL) have been calculated by means of paraxial relations (for rays close to the optical axis). In reality, they can slightly deviate from the data shown in the following tables by the actual entrance beam diameters and mirror positions used. The data for the entrance beam diameter and the mirror positions are recommended values. Changing their values will affect both the image spot diameter and the maximum possible scan angle/diagonal. F-Theta-Ronar 532 nm Nom inal focal lengt h Effect ive focal lengt h EFL Back focal length (from vertex of last elemen t or from protect ive glass surface ) BFL Flange focal length (distan ce from mech anical flange to focus plane) FFL Scan length or diag onal for area scans 2y' Maxi mum scan field (mm² ) Overal l scan angle ± theta max. ( ) x 43.5 ± x 58 ± Tele centric Lens x 54.4 ± x 98.4 ± Power- Series x 98.7 ± x 70.1 ± x ± x 111 ± Energy -Series x 170 ± x ± Power- Series x ± x ± Power- Series x ± Meets F-Theta condition better than 3.4% 2 Meets F-Theta condition of 0.5% 3 Meets F-Theta condition better than 1% 418 Phone numbers: US UK Singapore

6 Laseroptics and Lenses Laseroptics Entra nce beam bundl e diame ter Ø beam Image point diamet er (1/ e 2 ) for Gaus sian illu mina tion Ø spot (µm) Mirro r distan ces m1/ m2 Screw threa d or lens diam eter Prote ctive glass / 13.5 M39x1 PG / 12.0 M85x1 PG / 32.2 M85x1 PG / 12.0 M85x1 PG / 16.0 M85x1 PG / 13.5 M39x1 PG / 24.0 M85x1 PG / 19.2 M39x1 PG / 30.0 M85x1 PG / 24.0 M85x1 PG / 24.0 M85x1 PG / 16.0 M85x1 PG / 16.0 M85x1 PG Phone numbers: Germany France

7 Singlets Achromats F-Theta-Ronar Lenses 1064 nm The following is valid for the spec tables at the bottom: The entrance beam diameter (beam-ø) refers to the intensity 1/e 2 at Gaussian illumination. The image spot diameter (spot-ø) refers to the intensity 1/e 2 at Gaussian illumination. It can be calculated by the formula: Spot-Ø = 1.83 x λ x EFL / beam-ø Energy series: With fused silica lenses / Lenses are developed and coated for the wavelength range: nm / Damage threshold (@ 1064 nm): 26 J/ cm² with pulse duration of 12 ns The listed F-Theta-Ronar lenses accomplish the F-Theta-condition better than 0.1% except < 3.4% and < 1%. The mirror distances m1 and m2 are recommended values The overall scan angle Ñ refers to the maximum diagonal scan angle The scan length can be calculated with the formula: 2y'= EFL x 2Ð x π/180 The effective focal length (EFL), flange focal length (FFL) and back focal length (BFL) have been calculated by means of paraxial relations (for rays close to the optical axis). In reality, they can slightly deviate from the data shown in the following tables by the actual entrance beam diameters and mirror positions used. The data for the entrance beam diameter and the mirror positions are recommended values. Changing their values will affect both the image spot diameter and the maximum possible scan angle/diagonal. F-Theta-Ronar 1064 nm Nomin al focal length Effect ive focal lengt h EFL Back focal length (from vertex of last eleme nt or from protect ive glass surface ) BFL Flange focal length (distan ce from mechanical flange to focus plane) FFL Scan length or diag onal for area scans 2y' Maxi mum scan field (mm² ) 63 for 532 nm and 1064 nm x x x Tele centric x x x x x for 1030 nm x x Energy- Series x x x Energy- Series x Meets F-Theta condition better than 3.4% 2 Meets F-Theta condition better than 1% 420 Phone numbers: US UK Singapore

8 Laseroptics and Lenses Laseroptics Overal l scan angle ± theta max. ( ) Entra nce beam bundl e diame ter Ø beam Image point diamet er (1/ e 2 ) for Gaus sian illu mina tion Øspot (µm) Mirro r dista nces m1/ m2 Screw threa d or lens diam eter Prote ctive glass ± / 15.0 M39x1 PG ± / 13.5 M39x1 PG ± / 12.0 M85x1 PG ± / 32.0 M85x1 PG ± / 12.0 M85x1 PG ± / 13.5 M39x1 PG ± / 24.0 M76x1 PG ± / 16.0 M85x1 PG ± / 16.0 M85x1 PG ± / 19.2 M39x1 PG ± / 30.0 M85x1 PG ± / 24.0 M85x1 PG ± / 16.0 M85x1 PG ± / 24.0 M85x1 PG Phone numbers: Germany France

9 Singlets Achromats Protective Glasses Protective Glasses Fused silica lenses Protective glass Protective glass diameter Protective glass thickness AR coated for λ (nm) PG / PG VIS PG x PG PG VIS PG VIS PG PG PG / PG x PG PG x PG x PG x PG Phone numbers: US UK Singapore

10 Laseroptics and Lenses Focus-Ronar Lenses 1064 nm/532 nm Focussing lenses are optimized for high precision applications, used in laser systems for welding, cutting, drilling and structuring. This lens series is available in a number of common focal lengths, ranging from 56 mm to 120 mm. They allow a maximum possible entrance beam diameter of up to 35 mm. The broadband coating is optimized for 1064 nm with good inspection performance at VIS wavelengths. Additionally the Focus-Ronar lenses can also be used at 532 nm. With the design of three high quality and optimized lens elements a diffrac tion-limited focus is achieved. It is possible to get one standardized mechanical design for various focal lengths. Thanks to an outstanding mechanical and optical precision the lenses can be exchanged quickly and flexibly without any adjustment. Laseroptics Focus-Ronar Lenses for 1064 nm/532 nm Clear Aper ture Ø CA Diameter Length L Effective focal length EFL Flange focal length (distance from mechanical flange to focus plane) FFL Image point diameter* (@ input beam 25 mm) Øspot (µm) Diameter h h h h h h h h h h Phone numbers: Germany France

11 Singlets Achromats Inspec.x scan Typical applications for lasers and F- Theta lenses can be found in biological and medical sciences as well as industrial laser material processing. In these fields, appropriate insitu process control becomes more and more important. Due to the complex requirements, this has never been offered as a standard product. Qioptiq as vendor of high- performance Ronar F-Theta lenses as well as dedicated specialist for Optem zoom lenses now combines both systems to the optical insitu process control system Inspec.x scan. It can be integrated into existing optical paths using a beam splitter. insitu process control Manually and motorized versions available By default, Inspec.x scan supports LINOS F-Theta Ronar lenses from 160 mm to 254 mm focal length; contact us, if you are using different focal lengths! Inspection of the complete scan field is possible Minimum distortion over the complete field Can be integrated easily to the zoom system via adapter Expert advice available for integration with an existing system Example for a biochip reader using inspec.x scan Your Advantage: Laser as well as as the zoom system positioned behind the F- Theta lens can access the working area simultaneously. Processing and controling can be performed at the same time. A possible application in life sciences is shown in the drawing on the left. The use of zoom lenses allows to adapt the field of view to the particular requirements. Qioptiq has thus bridged the gap of insitu process control in an important part of the value-added chain as we offer a cost-sensitive solution for indus trial as well as R&D purposes. Exemplary calculations (for λ=680 nm) F-Theta Ronar 1064 nm f=254 mm ( ) resolution: low 32 lp/mm, high 95 lp/ mm field of view (2/3 chip): at low resolu tion Ø 16 mm, at high resolution 3.04x2.28 mm 2 Max. scan angle: low ±25, high ±24 F-Theta Ronar 1064 nm f=160 mm ( ) Resolution: low 49 lp/mm, high 139 lp/ mm Field of view (2/3 chip): low Ø 4.3 mm, high 1.70x1.27 mm 2 Max. scan angle: low ±25, high ±23 inspec.x scan consists of a special lower function module, a zoom 70XL and a 1.0x TV tube. Other combinations on request - contact us for information! Inspec.x scan Item Title Inspec.x scan R Phone numbers: US UK Singapore

12 Laseroptics and Lenses Variable Magnification Beam Expanders Continuous variation of magnification 2x... 8x possible Wavelengths 355 nm, 405 nm, 532 nm, 633/780/830 nm or 1064 nm Settings of zoom and focussing scales according to product specific graph Mounting in customer machine at surface [A] Consideration of convergence correction at maximum setting of movable lens elements Max. entrance beam-ø at 1/e2 Gaussian beam valid for defined zoom factors, beyond the entrance beam-ø max. = 31 mm / zoom factor. Details can be found in the respective data sheet. Laseroptics 2-8x Beam Expander Variable Magnification Beam Expanders Wavelength (nm) Magnific ation factor Max. entrance beam-ø at 1/e² Gaus sian beam 1 Max. exit beam-ø Lens elements Entrance lens made of quartz Mounting diameter or thread x variable x x variable x variable x x variable /780/ x variable x variable x x variable Beyond defined zoom factors, the entrance beam-ø max. = 31 mm / zoom factor. Phone numbers: Germany France

13 Singlets Achromats Motorized Beam Expanders (Discontinued Model) Continuous variable magnification 2x...8x Wavelength 1064 nm or 532 nm (on request) User friendly WindowsTM based software 8 position pre-sets and detailed manual Reduced machine setup times by automatic change of magnification Laser protection class is maintained, as opening of the machine is omitted Motorised Beam Expanders W av ele ng th [n m] Magni fica tion factor Max. entrance beamø at 1/e 2 Gaussian beam [mm] Max. exit beam-ø [mm] Lens elements Entrance lens made of quartz Mounting diameter or thread [mm] Order-No x variabel moto rised 8.0* h x variabel moto rised 8.0* h Controller AC Supply Voltage [V] AC Supply Frequency [Hz] AC Power Supply [A] Outer dimensions [mm 3 ] Software Platform P C I n t e rf a c e Sub-D Cabel (9 Pins,1:1) [mm] Suppl y line [mm] Order-No (±10%) max 110 x 61 x 35 Windows 95/98/NT 4.0/2000/XP R S2 3 2 C ca ca Phone numbers: US UK Singapore

14 Laseroptics and Lenses Motorized Beam Expanders Continuous variable magnification 2x... 8x Wavelength nm, nm and nm Expansion and divergence adjustable Fused silica or optical glass Software running on the Windows platform and LabView Reduced machine setup times by auto matic change of magnification All-in-one design CE conform, IP 50 5 variable position pre-sets Exit diameter: 31 mm Max. entrance beam-ø at 1/e 2 Gaus sian beam valid for defined zoom factors, beyond the entrance beam-ø max. = 31 mm / zoom factor. Details can be found in the respective data sheet. Boresight error < 0.5 mrad Fast adjustment < 5 sec Different interfaces: RS232, USB 2.0, Phoenix Contact Mechanical interface via high precision pins 6 H7 or mounting diameter 39 h11 Laseroptics Motorized Beam Expander Wavelength (nm) Fused silica lenses Max. entrance beam-ø at 1/e² Gaussian beam 1 Lens elements PC Interface / Protocol SubD9/ RS Phoenix Contact / RS USB SubD9/ RS Phoenix Contact / RS USB x 8 5 SubD9/ RS x 8 5 Phoenix Contact / RS x 8 5 USB x 8 5 SubD9/ RS x 8 5 Phoenix Contact / RS x 8 5 USB x 6 5 SubD9/ RS x 6 5 Phoenix Contact / RS x 6 5 USB Beyond defined zoom factors, the entrance beam-ø max. = 31 mm / zoom factor. Phone numbers: Germany France

15 Singlets Achromats UV Laser Beam Expander Systems bm.x The laser beam expander system bm.x is the only modular beam expander system available worldwide. Its sophisticated design allows you to change the expansion ratio by exchanging a module - without any re-calibration. Of course, the beam expander family bm.x offers the LINOS precision. Worldwide unique modular design High performance optical and coating design For laser beam expanding (exit aperture 30 mm) Entrance lens fabricated from fused silica to reduce laser beam divergence Quick change between different expansion ratios by modular structure with bm.x basic module and exchangeable bm.x inserts ARB2 UV coating for nm Residual reflectance: < 0.5 % Damage threshold > 2 J/cm 2 for 10 ns laser pulses at 308 nm Internal focusing Inspec.x fully configured systems Item Title Expansion Ratio Max. beam entrance Ø Wavelength (nm) Coating Beam expander bm.x UV 1.5x 1.5x ARB2 UV G Beam expander bm.x UV 2x 2x ARB2 UV G Beam expander bm.x UV 2.5x 2.5x ARB2 UV G Components bm.x Laser Beam Expander UV Item Title Expansion Ratio Wavelength (nm) Coating bm.x UV insert 1.5x 1.5x ARB2 UV G bm.x UV insert 2x 2x ARB2 UV G bm.x UV insert 2.5x 2.5x ARB2 UV G bm.x UV basic module 1.5x - 2.5x ARB2 UV G Phone numbers: US UK Singapore

16 Laseroptics and Lenses Laseroptics Mounting options: - Direct mounting with M43x0.5 - Mounting with flange D80 (M4 or M6 screws) - Mounting with clamp holder Additional mounting components: - Flange D80, G Clamp holder 35, G Tube wrench 22/1.5, G Phone numbers: Germany France

17 Singlets Achromats VIS-YAG Laser Beam Expander Systems bm.x The laser beam expander system bm.x is the only modular beam expander system available worldwide. The sophisticated design allows you to change the expansion ratio by exchanging a module without any re-calibration. Of course, the beam expander bm.x family offers the LINOS precision. Due to the ARBS coating the bm.x can be used with Nd:YAG Laser as well as HeNe Lasers in the visible wavelength range. Worldwide unique modular design High performance optical and coating design For laser beam expanding (exit aper ture 30 mm) Entrance lens fabricated from fused silica to reduce laser beam divergence Quick change between different expansion ratios by modular structure with bm.x basic module and exchangeable bm.x inserts ARBS coating for high power Nd:YAG- Laser (532 nm, 1064 nm) ARBS coating suitable between 450 nm and 650 nm and for 1064 nm Internal focusing ARBS: Residual reflectance: < 1 % ( nm) / < 0.5 % ( nm) / < 0.3 % ( nm) Damage threshold: > 10 J/cm 2 for 10 ns laser pulses at 1064 nm bm.x VIS-YAG fully configured systems Item Title Expansion Ratio Wavelength (nm) Coating Laser Beam Expander bm.x VIS-YAG 1,5x 1.5x /1064 ARBS G Laser Beam Expander bm.x VIS-YAG 2x 2x /1064 ARBS G Laser Beam Expander bm.x VIS-YAG 2,5x 2.5x /1064 ARBS G Laser Beam Expander bm.x VIS-YAG 3x 3x /1064 ARBS G Laser Beam Expander bm.x VIS-YAG 3x 4x /1064 ARBS G Laser Beam Expander bm.x VIS-YAG 3x 5x /1064 ARBS G Laser Beam Expander bm.x VIS-YAG 8x 8x /1064 ARBS G Laser Beam Expander bm.x VIS-YAG 10x 10x /1064 ARBS G Components bm.x VIS-YAG 1.5x, 2x and 2.5x Item Title Expansion Ratio Wavelength (nm) Coating bm.x VIS-YAG insert 1,5x 1.5x /1064 ARBS G bm.x VIS-YAG insert 2x 2x /1064 ARBS G bm.x VIS-YAG insert 2,5x 2.5x /1064 ARBS G bm.x VIS-YAG basic module 1,5x, 2x, 2,5x /1064 ARBS G Components bm.x VIS-YAG 3x, 4x, 5x, 8x and 10x Item Title Expansion Ratio Wavelength (nm) Coating bm.x VIS-YAG insert 3x 3x /1064 ARBS G bm.x VIS-YAG insert 4x 4x /1064 ARBS G bm.x VIS-YAG insert 5x 5x /1064 ARBS G bm.x VIS-YAG insert 8x 8x /1064 ARBS G bm.x VIS-YAG insert 10x 10x /1064 ARBS G bm.x VIS-YAG basic module for 3x, 4x, 5x, 8x and 10x /1064 ARBS G Phone numbers: US UK Singapore

18 Laseroptics and Lenses Laseroptics Mounting options: - Direct mounting with M43x0.5 - Mounting with flange D80 (M4 or M6 screws) - Mounting with clamp holder Additional mounting components: - Flange D80, G Clamp holder 35, G Tube wrench 22/1.5, G Phone numbers: Germany France

19 Singlets Achromats NIR Laser Beam Expander Systems bm.x The laser beam expander system bm.x is the only modular beam expander system available worldwide. The sophisticated design allows you to change the expansion ratio by exchanging a module without any re-calibration. Of course, the beam expander bm.x family offers the LINOS precision. Worldwide unique modular design High performance optical and coating design For laser beam expanding (exit aperture 30 mm) Entrance lens fabricated from fused silica to reduce laser beam divergence Quick change between different expansion ratios by modular structure with bm.x basic module and exchangeable bm.x inserts ARB2 NIR coating for nm Residual reflectance: < 0.5 % Damage threshold: > 10 J/cm 2 for 20 ns laser pulses at 1064 nm Internal focusing bm.x Laser Beam Expander NIR fully configured systems Item Title Expansion Ratio Wavelength (nm) Coating Laser Beam Expander bm.x NIR 1.5x 1.5x ARB2 NIR G Laser Beam Expander bm.x NIR 2x 2x ARB2 NIR G Laser Beam Expander bm.x NIR 2.5x 2.5x ARB2 NIR G Laser Beam Expander bm.x NIR 3x 3x ARB2 NIR G Laser Beam Expander bm.x NIR 4x 4x ARB2 NIR G Laser Beam Expander bm.x NIR 5x 5x ARB2 NIR G Laser Beam Expander bm.x NIR 8x 8x ARB2 NIR G Laser Beam Expander bm.x NIR 10x 10x ARB2 NIR G Components bm.x NIR 1.5x, 2x and 2.5x Item Title Expansion Ratio Wavelength (nm) Coating Laser Beam Expander bm.x NIR 1.5x 1.5x ARB2 NIR G Laser Beam Expander bm.x NIR 2x 2x ARB2 NIR G Laser Beam Expander bm.x NIR 2.5x 2.5x ARB2 NIR G bm.x NIR basic module for 1.5x, 2x, 2.5x ARB2 NIR G Components bm.x NIR 3x, 4x, 5x, 8x and 10x Item Title Expansion Ratio Wavelength (nm) Coating bm.x NIR insert 3x 3x ARB2 NIR G bm.x NIR insert 4x 4x ARB2 NIR G bm.x NIR insert 5x 5x ARB2 NIR G bm.x NIR insert 8x 8x ARB2 NIR G bm.x NIR insert 10x 10x ARB2 NIR G bm.x NIR basic module for 3x - 10x ARB2 NIR G Phone numbers: US UK Singapore

20 Laseroptics and Lenses Laseroptics Mounting options: - Direct mounting with M43x0.5 - Mounting with flange D80 (M4 or M6 screws) - Mounting with clamp holder Additional mounting components: - Flange D80, G Clamp holder 35, G Tube wrench 22/1.5, G Adapter C-Mount/M30x1 For adaptation of the laser expansion systems bm.x on components with C- mount connection: Enables the connection to HeNe-lasers with C-mount threads Serves as connection of the laser expansion systems bm.x to the LINOS tube construction system C Adapter C-Mount/M30x1 Item Title Adapter C-Mount/M30x1 G Phone numbers: Germany France

21 Singlets Achromats Fixed Magnification Beam Expanders for Material Processing (2x, 5x, 10x) Expansion 2x, 5x or 10x Wavelength 532 nm or 1064 nm Entrance lens made of quartz High imaging quality Mounting in customer machine at Ø 27h7 or C-Mount Pointing stability during adjustment of divergence Easy fine focussing using an engraved scale with a vernier Consideration of convergence correc tion when using maximum focusing span Beam Expander 2x for 1064 nm Fixed Magnification Beam Expanders Wavelength (nm) Magnification factor Optimum entrance beam-ø at 1/ e² Gaussian Max. exit beam-ø Lens elements Entrance lens made of quartz Mounting diameter or thread beam 532 2x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount Phone numbers: US UK Singapore

22 Laseroptics and Lenses Laser Beam Expander System 4x and 7x To generate plane wave fronts To focus laser beams at long distances To reduce laser beam divergence To use in alignment work or optoelec tronic control systems Equipped with focusable exit optics Entrance aperture: Ø 4 mm Exit aperture: Ø 16 mm Entrance element: plano-concave singlet Exit element: focusable from 0.5 m to (4x); focusable from 1.5 m to (7x) Mating thread: 1"x1/32" Fits directly to most lasers Broadband anti-reflection coated with ARB2 for λ = nm Adaptable to Microbench Laseroptics Laser Beam Expander System 4x and 7x Item Title Laser beam expander system 4x G Laser beam expander system 7x G Laser Beam Expander System 10x To generate plane wave fronts To focus laser beams at great distances To reduce laser beam divergence To use in alignment work or optoelectronic control systems Equipped with focusable exit optics Entrance aperture: Ø 3 mm Exit aperture: Ø 17 mm Entrance element: air-spaced achromat Exit element: focusable from 1.5 m to Mating thread: 1"x1/32" Fits directly to most lasers Broadband anti-reflection coated with ARB2 for λ = nm Adaptable to Microbench Laser Beam Expander System 10x Item Title Laser beam expander system 10x G Phone numbers: Germany France

23 Singlets Achromats Laser Beam Expander System 15x To generate plane wave fronts To focus laser beams at great distances To reduce laser beam divergence To use in alignment work or optoelec tronic control systems Equipped with focusable exit optics Entrance aperture: Ø 3 mm Exit aperture: Ø 30 mm Entrance element: biconvex singlet Exit element: focusable from 10 m to Corrected for spherical aberration at 633 nm Mating thread: 1"x1/32" Fits directly to most lasers Broadband anti-reflection coated with ARB2 for λ = nm Adaptable to Microbench Laser Beam Expander System 15x Item Title Laser beam expander system 15x G Laser Beam Expander System 16x/25x, without/with spatial filter To generate plane wave fronts To focus laser beams at great distances To reduce laser beam divergence To use in alignment work or optoelec tronic control systems Equipped with focusable exit optics Entrance aperture: Ø 3 mm Exit aperture: Ø 30 mm Entrance element: centerable achromat Exit element: focusable from 10 m to Wavefront distortion: < λ/8 at 633 nm With spatial filters: adjustable in X, Y and Z; for 16x: Ø = 30 μm; for 25x: Ø = 20 μm Mating thread: 1"x1/32" Fits directly to most lasers Broadband anti-reflection coated with ARB2 for λ = nm Adaptable to Microbench Laser Beam Expander System 16x and 25x, without/with spatial filter Item Title Laser beam expander system 16x G Laser beam expander system 16x with spatial filter G Laser beam expander system 25x G Laser beam expander system 25x with spatial filter G Phone numbers: US UK Singapore

24 Laseroptics and Lenses Laser Beam Expander System 50x and 75x with spatial filter To generate plane wave fronts To focus laser beams at great distances To reduce laser beam divergence To use in alignment work or optoelec tronic control systems Equipped with focusable exit optics Entrance aperture: Ø 3 mm Exit aperture: Ø 78 mm Entrance element: centerable best form lens Exit element: focusable from 10 m to Wavefront distortion: < 1λ at 633 nm Spatial filter: Ø = 10 μm, adjustable in X, Y and Z Mating thread: 1"x1/32" Fits directly to most lasers Broadband anti-reflection coated with ARB2 for λ = nm Adaptable to Microbench Laseroptics Laser Beam Expander System 50x and 75x with spatial filter Item Title Laser beam expander system 50x with spatial filter G Laser beam expander system 75x with spatial filter G Phone numbers: Germany France

25 Singlets Achromats Adapter 1 to W0.8 or Ø 25 mm Accessory for Laser Beam Expander Systems Adapter 1 to W0.8 or Ø 25 mm Item Title Order-No Adapter 1 G Adapter W0.8 /1 Accessory for Laser Beam Expander System Adapter W0.8 /1 Item Title Order-No Adapter W0.8 G Laser Line Projector Accesssory for Laser Beam Expander Systems Converts circular laser beams into a narrow line Mounts onto the entrance apertures of laser Entrance aperture: Ø 4 mm Focal length: 5 mm Mating thread: 1"x1/32" For beam expander systems without spatial filters Broadband AR-coated for λ = nm Approx. line dimensions with 4x laser beam expander: at 0.5 m distance: 25 mm x 0.3 mm at 1 m distance: 60 mm x 0.5 mm at 10 m distance: 600 mm x 5 mm (each for a beam entrance Ø = 1 mm) Laser Line Projector Item Title Laser line projector G Phone numbers: US UK Singapore

26 Laseroptics and Lenses Laser Beam Homogenizer, Introduction Many applications, e.g. microscopy and material processing, require a very even distribution of the illuminating light. Non-imaging Homogenizers Imaging Homogenizers For this purpose, microlens based homogenizers are available nowadays for numerous light sources, ranging from excimer lasers to high power LEDs. Two general types are distinguished, Non-Imaging and Imaging Homogenizers. Both types split the incident beam into small sub beams. This is achieved by passage either through arrays of cylindrical lenses in a crossed configuration, or through arrays of microlenses. The sub beams are then superimposed by a spherical lens in its focal plane, leading to a homogeneously illuminated field. This spherical lens is called Fourier lens, as it effectively performs a two dimensional Fourier transformation. Fig. 1 Fig. 2 Non-Imaging Homogenizers are built from one microlens array and one spherical lens (see fig. 1). The plane of homogenization lies in the focal plane of the Fourier lens (FL), the size of the homogeneously illuminated area is determined by: Imaging Homogenizers are built from two microlens arrays and one spherical lens (see fig. 2). The plane of homogenization lies in the focal plane of the Fourier lens (FL), the size of the homogenized area is defined by: with Laseroptics The application itself should be considered when choosing between Non-Imaging and Imaging Homogenizer. As an orientation aid one should consider the Fresnel number, which is defined for microlens homogenizers by: where P LA represents the pitch of the microlens array, D FT the size of the flat top in the plane of homogenization, f FL the focal length of the Fourier lens, and l is the wavelength. The Fresnel number is the most important determinant for laser beam homogenizers based on microlens arrays. As a general rule, the uniformity of the flat top increases with higher Fresnel numbers Non-Imaging Homogenizers often show dominant diffraction effects due to Fresnel diffraction at the microlens array. In practice, Fresnel numbers of FN >10, or better FN >100, lead to homogeneous intensities. Due to the connection of the Fresnel number with the size of the flat top, Non-Imaging Homogenizers are the first choice for illuminating large areas. For small Fresnel numbers of FN < 10, or when a very even distribution is required, Imaging Homogenizers should be chosen. Here, a 12 denotes the distance between the two microlens arrays. As with Non-Imaging Homogenizers, the incident beam is split into many small sub beams with the first microlens array. The second microlens array then acts, in combination with the spherical lens, like an array of objective lenses, overlapping the sub beams of the first array in the plane of homogenization. As the size of the flat top depends in this case on the distance between the two arrays, it can easily be adjusted by moving the second array. However, great care has to be taken that the second array is not moved into the focus plane of the first array, where it could be damaged by focussed high energy laser light. Imaging Homogenizers usually use microlens arrays of identical pitch. The shape of the flat top is determined by the shape of the microlenses (e.g. square, round, hexagonal). Phone numbers: Germany France

27 Singlets Achromats Laser Beam Homogenizer for Microbench For homogenous intensity distributions for laser and illumination systems Production according to custom specifications Pre-assembled and tested Module consisting of microbench components Design of a fly s eye condenser Quartz glass for applications from UV to IR AR coating on request. Device (only mechanical parts) consists of: Item title Mounting plate 25 G Centering mounting plate 25 G Mount CL 22.5 G Aperture 10x10mm* G Aperture 5x5mm* G *Note: You need 2 pieces of the G and either 2 pieces of mount G or 2 pieces of mount G Microlens arrays and Fourier lens depending on custom specifications, screws and rods see Microbench Laser Beam Homogenizer, System 40 / 65 mm For homogenous intensity distribution Flat-top uniformities up to below 5% achievable Compatible with various optics systems For wavelengths from 193 nm to 3 µm Low-power version (up to laser class 3B) / High-power version (up to laser class 4) available Edge steepnes < 20 % Flatness factor < 0.9 Illumination of the entry aperture > 80 % System 40 mm Please specify when ordering: Beam diameter and divergence Wavelength and laser power Dimension and distance of the flat- top System 65 mm Laser Beam Homogenizer 40 / 65 mm Item Title Laser Beam Homogenizer 40 / 65 mm on request 440 Phone numbers: US UK Singapore

28 Laseroptics and Lenses Shearcubes The laser beam is being reflected at both front and back side of the wedge-shaped beam splitter plate. Both reflected beams are overlapped. The area of overlap is imaged on the dispersion plate of the Shear Plate Interferometer and can be observed easily. The laser beam is collimated, once the interference fringes are parallel to a reference line on the dispersion plate. If the beam expander is focussing or defocussing, respectively, the fringes are rotated clockwise or counter clockwise, respectively. Laseroptics A quantitative analysis of the interfero gram allows for the determination of the radius of curvature R of the wavefront. The laser divergence DIV can be determ ined easily, if radius of curvature R and diameter of the laser beam d Strahl are known. S Φ For fast determination of laser collim ation Other applications: Determination of refractive index of plane plates (accuracy ±1 * 10-3 ) Determination of focal lengths of lenses(accuracy ±3 %) Determination of radius of curvature of concave and convex mirrors (accu racy ±3 %) Three versions available for beam diameters between 1 mm and 25 mm Compatible with LINOS Microbench, Nanobench, and Tube C systems Beam entrance height: 20 mm Robust and easy to use d f S df R = λ sin Θ d DIV = R Strahl Shearcubes Item Title Wavelength range (nm) Collimation Accuracy µrad Refractive Index Shearcube 1-3 mm nm G Shearcube 3-8 mm nm G Shearcube 8-25 mm nm G Phone numbers: Germany France

29 Singlets Achromats Laser Speckle Reducer Speckle noise from a laser-based system is reduced by dynamically diffusing the laser beam. An electro-active polymer membrane is internally fed with two electrical control signals that selectively move a central diffuser in x- and y- direction. The LSR-3000 series integrates fully certified drive electronics powered through a single micro-usb connector. The LSR is available in two versions: the LSR-3005 and the LSR-3010 that exhibit a clear aperture of 5 mm and 10 mm, respectively. Power supply: 5 V DC (micro-usb interface) Power consumption: 310 mw CCD image of a laser spot with LSR-3005 on CCD image of a laser spot without LSR-3005 on Mechanical drawing of LSR-3005 (left) and LSR (right) Laser Speckle Reducer LSR3000 Item Title Diameter Wavelength range (nm) Clear Aper ture Ø Diffusion angle ( ) Diameter Thickness Oscilla tion frequency (Hz) LSR VIS G LSR VIS G LSR VIS G LSR NIR G LSR NIR G LSR NIR G LSR VIS G LSR VIS G LSR VIS G Phone numbers: US UK Singapore