Laser Material Processing

Transcription

1 Laser Material Processing

2 2 02 Company Profile Qioptiq designs and manufactures photonic products precision manufacturing and responsive global and solutions, serving a wide range of markets and sourcing. Due to a series of acquisitions, Qioptiq applications in the medical and life sciences, industrial has an impressive history and pedigree, benefiting manufacturing, defense and aerospace, and research from the knowledge and experience of LINOS, and development sectors. Point Source, Rodenstock Precision Optics, Spindler & Hoyer, Gsänger, Optem, Pilkington, Avimo and The company is known for its high-quality standard others. With a total workforce exceeding 2,100, components, products and instruments, custom Qioptiq has a worldwide presence with locations modules and assemblies, leading-edge innovation, throughout Europe, Asia and the USA. 177 Rodenstock founded 19 Spindler & Hoyer founded Pilkington PE Ltd. founded, which later becomes THALES Optics Gsänger Optoelektronik founded Optem International founded Point Source founded

3 Medical & Life Sciences Index Company Profile 02 0 Our Core Competencies LINOS F-Theta-Ronar Lenses Industrial Manufacturing Overview nm /52 nm nm / /1550 nm 11 0 LINOS Beam Expanders Defense & Aerospace Overview 12 1 Manual Variable Versions 14 Motorized Versions 15 LINOS Focus-Ronar Lenses Research & Development 1996 LINOS founded through the merger of Spindler & Hoyer, Steeg & Reuter Präzisionsoptik, Franke Optik and Gsänger Optoelektronik 2000 Rodenstock Präzisionsoptik acquired by LINOS 55 nm nm 17 Insitu Inspection System 1 Protective Glasses AVIMO Group acquired by THALES Qioptiq founded as THALES sells High Tech Optics Group 2006 / Qioptiq acquires LINOS and Point Source as members of the Qioptiq group The new Qioptiq consolidates all group members under one brand

4 4 04 Our Core Competencies: Products for Laser Material Processing Benefit from over 25 years of experience in the Development development of optical systems for laser material Development of processing! - Optical system design (in-house software-system, Code V, Zemax ) Our broad selection of manual and motorized beam including back reflection analysis expanders and comprehensive range of LINOS - Mechanical design F-Theta-Ronar and Focus-Ronar lenses are engineered - Coating design to meet the most stringent requirements. We possess the expertise to offer system-level solutions such as the inspec.x scan. This in-situ process control system FEM-analysis including thermal effects for high-power applications Advanced tolerance analysis and yield focuses zoom micro-imaging through the scan head simulation adapted to Qioptiq patented and F-Theta lens to simultaneously access, process mounting and gluing technologies and test the working area.

5 05 5 Consistent High-Quality Production from Rapid Prototype to High Volume Manufacturing Quality Control State-of-the-art machinery for optics Automated measurement equipment for and mechanics production Development of in-house processes for precise assembly of optical elements Mounting techniques with accuracies down to 2 μm Active positioning and gluing technologies Cleanroom facilities Coating process from conventional optical parameters (e.g. focal length) Measurements of the image spot (1/e2) for Gaussian illumination for 55 nm, 52 nm and 1064 nm UV to NIR transmission measurements MTF testing at various wavelengths Enviromental testing (temperature, humidity, vibration, shock) Quality report on request deposition up to ion-beam-sputtering in After sales service spectral range: UV; VIS; NIR Technical support

6 LINOS F-Theta-Ronar Lenses LINOS F F-Theta-Ronar The Lenses Basic calculations of F-Theta-Ronar lenses All LINOS F-Theta-Ronar lenses achieve diffraction limited performance. The truncated entrance-beam and the image spot refer to the intensity 1/e² at Gaussian illumination and for ideal M²=1. The spot size of LINOS F-Theta-Ronar lenses can be calculated with the following formula: 06 Spot-Ø = 1. * λ * FL / beam-ø The extreme versatility of lasers as a tool creates a broad market for focusing systems. F-Theta-Ronar Spot-Ø: image spot [mm] lenses are used in combination with mirror scanning 1.: factor of apodisation systems. High-quality LINOS F-Theta-Ronar lenses λ: wavelength [nm] are designed to achieve consistent results over the FL: focal length [mm] entire scan field and are built for a wide range of Beam-Ø: entrance-beam [mm] applications. The scan length in each direction x or y can be Drilling and fine cutting of metals and ceramics calculated by the formula: (e.g. micro drilling in PCBs) Plastic welding (e.g. fusion of plastic materials 2y= FL * 2Өy * π/10 and 2x= FL * 2Өx * π/10 without additional materials) Structuring or perforating of metallic and nonmetallic materials (e.g. solar cells, glass) Marking (e.g. of smart cards, ICs, printing plates, in-glass, dashboard designs in the automotive 2x, 2y: scan length in direction x,y [mm] FL: focal length [mm] 2Өx,y: max. scan angle Theta for each mirror [ ] π/10: conversion factor (into radians) industry) Cleaning with laser pulses for careful treatment The mirror distances m1 and m2 are recommended of industrial products (e.g. wafers) as well as values and may vary. A smaller entrance-beam restoration projects (e.g. monuments). allows larger scan angles and therefore larger scan fields are achievable. Characteristics of F-Theta lenses F-Theta lenses have two main characteristics. When a beam is deflected by a scanning mirror in front of a lens, then the scanned distance is proportional to the scanning angle. Secondly the focus position over the entire scan field is always in the same plane.

7 LINOS F-Theta-Ronar Lenses Product range of LINOS F-Theta-Ronar lenses The maximum scan field of telecentric lenses cannot exceed the lens. On the other hand the spot roundness and the impact angle is constant over the Optical glass lenses scan field. Qioptiq offers telecentric F-Theta-Ronar For all major applications a wide variety of lenses lenses made of fused silica and of optical-glass/fused- exist with various focal lengths ranging from silica combination. 100 mm to 420 mm and for different wavelengths from 52 nm to 1550 nm. Further information for all standard F-Theta-Ronar lenses is available at: Fused-silica lenses including D CAD data and Qioptiq has developed a range of sophisticated lens data sheets. F-Theta-Ronar scan lenses made of fused silica for high-power and short-pulse laser material processing. Customized solutions Fused-silica lenses provide minimized thermal focus In addition to our existing LINOS F-Theta-Ronar lenses shift and higher resistance when working at high Qioptiq offers customized solutions from adapted power density. These lenses are usable for wavelength wavelength shift of standard lenses up to complete ranges of nm, nm and 100- new designs. Please contact Qioptiq to discuss your 100 nm. A specially developed coating achieves requests with our specialists. very low reflection and absorption values. The optical designs minimize damage due to back reflections Coating onto the scanning mirrors and internal reflections. Coatings are applied on each lens surface to The LINOS fused-silica F-Theta-Ronar lenses are maximize the transmission of the complete optical suitable for fiber- and disk lasers as well as short- system like F-Theta-Ronar lenses or beam expanders. pulse and ultra-short- pulse lasers. The additional challenge for coatings in laser material applications lies in a high damage resistance. All our Telecentric lenses coatings are analyzed for laser-damage threshold With telecentric lenses the beam impact angle on values. The tests are conducted according to the the work piece is nearly perpendicular over the entire standardized test method DIN EN ISO , scan field. a multi-pulse procedure (S on 1) with given pulse lengths: Laser-damage threshold (J/cm²) Pulse length 52 nm nm nm nm nm (ns) Optical-glass lenses Fused-silica lenses 07

8 LINOS F-Theta-Ronar Lenses LINOS F-Theta-Ronar nm Fused-silica designs Telecentric versions available Focal lengths ranging from 100 mm to 255 mm, tolerance ±1% Screw thread M5x1 Transmission 96 % with good performance in VIS-range Laser-damage threshold up to 2 J/cm² at 55 nm, 9 ns, 10 Hz Includes interchangeable fused- silica protective glasses 0 LINOS F-Theta-Ronar telecentric lens for 55 nm, focal length 167 mm All lenses can be used with enlarged beam s and different mirror distances. Accordingly the scan fields and spot size s will be changed. Please feel free to send us your request. LINOS F-Theta-Ronar nm - Fused silica Focal length Scan field Max. scan angle ± Өx,y (mm²) Spot Mirror distances m1/m2 Working distance ( ) Beam truncated (μm) Protective glass Telecentric 46x46 ± / PG x99 ± / PG Telecentric 6x6 ± / PG x170 ± /0 1.1 PG

9 LINOS F-Theta-Ronar Lenses LINOS F-Theta-Ronar /52 nm Fused-silica and optical-glass designs Telecentric versions available Focal lengths ranging from 100 mm to 420 mm, tolerance ±1% Screw thread M5x1 Transmission 96 % with good performance in VIS-range Laser-damage threshold up to 20 J/cm² at 52 nm, 6 ns, 100 Hz Includes interchangeable protective glasses All lenses can be used with enlarged beam s and different mirror distances. Accordingly the scan fields and spot size s will be changed. Please feel free to send us your request. f 52 nm, LINOS F-Theta-Ronar lens for focal length 0 mm 09 LINOS F-Theta-Ronar nm - Fused silica Focal length Scan field Max. scan angle ± Өx,y (mm²) ( ) Beam truncated Spot Mirror distances m1/m2 Working distance (μm) Protective glass 166 Telecentric 6 x 6 ± / PG x 170 ± /0 1.1 PG LINOS F-Theta-Ronar 52 nm - Optical glass Focal length Scan field Max. scan angle ± Өx,y (mm²) ( ) Beam truncated Spot Mirror distances m1/m2 Working distance (μm) Protective glass x 5 ± / PG 100 Telecentric* 54 x 54 ± / PG x 9 ± / PG x 154 ± / PG x 204 ± / PG x 275 ± /2 9.0 PG7 * Entrance lens made of fused silica

10 LINOS F-Theta-Ronar Lenses LINOS F-Theta-Ronar nm Focal lengths ranging from 100 mm to 420 mm, tolerance ±1% Screw thread M5x1, except M76x1 Transmission 97 % at nm Transmission 75 % at VIS-range Laser-damage threshold up to 6 J/cm² at 1064 nm, 10 ns, 100 Hz Includes interchangeable protective glasses All lenses can be used with 10 enlarged beam s and different mirror distances. Accordingly the scan fields and spot size s will be changed. Please feel free to send us your request. LINOS F-Theta-Ronar lens for nm, focal length 0 mm LINOS F-Theta-Ronar nm - Optical glass Focal length at 90 nm Scan field Max. scan angle ± Өx,y (mm²) ( ) Beam truncated Spot size Mirror distances m1/m2 Working distance (μm) Protective glass 100 4x4 ± / PG x94 ± / PG x96 ± /0 1.7 PG x19 ± / PG x204 ± /2 6.0 PG x259 ± / PG

11 LINOS F-Theta-Ronar Lenses LINOS F-Theta-Ronar 1064/ /1550 nm Fused-silica and optical-glass designs Telecentric versions available Focal lengths ranging from 100 mm to 420 mm, tolerance ±1 % Screw thread M5x1, except M76x1 Transmission 96 % with good performance in VIS-range Laser-damage threshold up to 40 J/cm² at 1064 nm, 9 ns, 100 Hz Includes interchangeable protective glasses All lenses can be used with enlarged beam s and different mirror distances. Accordingly the scan fields and spot size s will be changed. Please feel free to send us your request. LINOS F-Theta-Ronar lens for nm, focal length 420 mm 11 LINOS F-Theta-Ronar nm - Fused silica Focal length Scan field Max. scan angle ± Өx,y (mm²) 167 Telecentric 255 Spot Mirror distances m1/m2 Working distance ( ) Beam truncated Protective glass (μm) 4 x 4 ± /2 170 x 170 ± / PG PG x 205 ± / PG x 254 ± / PG LINOS F-Theta-Ronar Optical glass Focal length Scan field Max. scan angle ± Өx,y (mm²) ( ) Beam truncated Spot Mirror distances m1/m2 Working distance (μm) Protective glass x 62 ± / PG Telecentric* 54 x 54 ± / PG x 99 ± / PG x 115 ± / PG x 157 ± / PG x 217 ± / PG x 291 ± / PG * Entrance lens made of fused silica LINOS F-Theta-Ronar 1550 nm - Optical glass Focal length Scan field Max. scan angle ± Өx,y Spot Mirror distances m1/m2 Working distance ( ) Beam truncated (mm²) (μm) 100 Telecentric 5 x 5 ± / Protective glass PG

12 LINOS Beam Expanders LINOS Beam Expanders s LINOS beam expanders are optical systems for beam Manual version forming used in laser material processing. They can Continuous vary the and the divergence of a laser beam between 2x and x or between and allow optimization of focus, focus 2x and 10x are available. In addition Qioptiq offers position and beam propagation. manual variable beam expanders with fused-silica magnification entrance lenses for higher laser resistance. Qioptiq offers standard versions of manual and motorized variable beam expanders made of fused The back focal length of F-Theta-Ronar or Focus- silica and/or optical glass. Ronar lenses can be modified by changing the divergence of the incoming laser beam. Fine focusing 12 LINOS Beam Expanders are optimally employed in of the beam expander compensates the focal length conjunction with LINOS F-Theta-Ronar lenses for tolerances of other optical components as well as applications including: divergence of the laser source. Laser structuring of foils Handling Laser scribing of ceramic substrates Zoom and focusing scales of the LINOS manual Cutting of solar cells beam expanders are set according to product specific Micro drilling of sheet metal graphs. The expansion factor is adjusted by turning Marking of diverse materials with encodings the focusing ring and zoom ring. To focus the beam expansion, only the focusing ring should be adjusted. All LINOS beam expanders can also be implemented The beam expander is mounted on surface A. Please in reverse mode as beam reducers. take care that the laser beam is centered on the entrance lens and parallel to the optical axis of the beam expander (x/y tilt adjustment). Beam expander with a variable expansion factor 2x to x for 1064 nm.

13 LINOS Beam Expanders Motorized version Software The motorized beam expanders of second generation The Windows -based software developed with are precise and easy to integrate. They are used in LabView allows an easy control of the motorized automatic production processes or in application beam expander. After initialization, the desired laboratories. The controller is integrated into the expansion beam expander. independent stepper motors. The lens positions for is achieved by moving the two the magnification range of 2-x are listed for each For high-power or short-pulse laser applications motorized beam expander type in provided tables. full fused-silica designs are available with excellent Ten individual pre-sets can be stored. transmission and thermal resistance performance. The beam expander can also be directly controlled The special coating with low absorption and high under other operating systems via the serial interface transmission for these fused-silica beam expanders (e.g. terminal program). All serial interface commands covers are listed in the manual. complete wavelength ranges of nm, nm and nm. Additionally Qioptiq offers the motorized beam expanders made of optical-glass versions for the wavelengths 52 nm and 1064 nm. The customer can select between three electrical interfaces (SubD9/ RS22, Phoenix Contact/RS22 or USB 2.0). Windows software mask for easy control of motorized beam expansion. Further information is available at: including D CAD data, product-specific graphs of variable beam expanders and the manual for the motorized beam expanders. Motorized beam expander with Phoenix Contact interface 1

14 LINOS Beam Expanders LINOS Variable Beam Expander Continuous variation of magnification 2x x or 2x 10x Choice between fused-silica or glass entrance lens Continuous variation of exit-beam divergence Wavelengths 55 nm, 52 nm, 6/70/0 nm or 1064 nm Precise scales allow reliable settings and high repeatability Beam expander with a variable expansion factor 2x to x for 1064 nm 14 Max. exit-beam 1 mm Max. length mm Max mm Mounting mm, reference on surface A (see page 12) LINOS Variable Beam Expander 2-x Wavelength Max. entrance-beam Entrance lens made of (nm) fused silica fused silica optical glass /70/ 0 optical glass fused silica optical glass LINOS Variable Beam Expander 2-10x Wavelength Max. entrance-beam (nm) 1064 Entrance-beam max. = 1 mm / zoom factor Entrance lens made of optical glass

15 LINOS Beam Expanders LINOS Motorized Beam Expander Continuous variable magnification Motorized beam expander with Phoenix Contact interface 2x... x Fused-silica or optical-glass designs Continuous variation of exit-beam divergence Wavelengths nm, nm or nm Software running on the Windows platform (XP, Win7) Reduce machine setup times by automatic change of magnification Maintains laser-protection class during readjustment of the beam expander All-in-one design, controller integrated CE and ROHS conform IP 20 Exit-beam : max. 1 mm 10 individual pre-sets for magnification and divergence Pointing stability < 0.5 mrad Fast adjustment from 2x to x about 5 sec Mechanical dimensions: length 20 mm, width 5 mm, height 55.5 mm Mechanical interface via high-precision holes 6H7 (recommended) or mounting 9h11 Different electronic interfaces: SubD9/ RS22, USB 2.0, Phoenix Contact/ RS22 Baud rate: 9600 bit/sec Power input 7 12 V, Phoenix Contact 7-24 V LINOS Motorized Beam Expander - Fused silica Wavelength Max. entrance-beam PC Interface (nm) SubD9/ RS Phoenix Contact/ RS USB SubD9/ RS Phoenix Contact/ RS USB SubD9/ RS Phoenix Contact/ RS USB LINOS Motorized Beam Expander - Optical glass Wavelength Max. entrance-beam PC Interface (nm) SubD9/ RS Phoenix Contact/ RS USB SubD9/ RS Phoenix Contact/ RS USB Entrance-beam max. = 1 mm / zoom factor 15

16 LINOS Focus-Ronar Lenses LINOS Focus-Ronar 55 nm Focusing lenses are optimized for highprecision applications, as used in laser systems for welding, cutting, drilling and structuring. Focal lengths ranging from 5 mm to 120 mm Flexible lens exchange without any adjustment Three-lens-element designs Full fused-silica designs Diffraction limited up to 17.5 mm 5 41h7 16 (1/e²) entrance-beam High clear aperture 5 mm Housing 41h7 mm Transmission 9% Laser-damage threshold 5 J/cm² at 55 nm, 5 ns, 100 Hz WD LINOS Focus-Ronar 55 nm Focal length Length L Working distance WD

17 LINOS Focus-Ronar Lenses LINOS Focus-Ronar nm Focusing lenses are optimized for highprecision applications, as used in laser systems for welding, cutting, drilling and structuring. Focal lengths ranging from 5 mm to 120 mm Flexible lens exchange without any adjustment Three-lens-element designs High clear aperture 5 mm Housing 41h7 mm The coating is optimized for 1064 nm, T 97% and T(52 nm) 96% 17 Good inspection performance at VIS 5 41h7 wavelengths Laser-damage threshold 10 J/cm² at 1064 nm, 9 ns, 100 Hz Laser-damage threshold 6 J/cm² at 52 nm, 6 ns, 100 Hz WD LINOS Focus-Ronar nm Focal length Length L Working distance for 1064 nm Working distance for 52 nm

18 Insitu Inspection System Insitu Inspection System Inspec.x scan Process control is an important part of each modern production process to achieve appropriate quality at optimized cost within the value chain. As a provider of highperformance F-Theta-Ronar lenses and precision Optem micro-imaging lenses, Qioptiq now combines both systems to the optical insitu process control system inspec.x scan for laser material processing applications. Typical applications are control of melting pools and welding seams, monitoring cutting kerfs and laser positioning. Insitu inspection from 0 nm to 1 inspec.x scan (l.) and OPTEM Zoom 70XL lens system 1000 nm (other inspection wavelengths on request) High flexibility for various inspection goals Full compatibility with all standard LINOS F-Theta-Ronar and Focus-Ronar lenses Full compatibility with Optem Zoom 70XL lens system Application-specific beam splitters and filters can be provided by Qioptiq too Expert advice for setup and integration Insitu Inspection System Inspec.x scan Type Zoom FOV (mm²) with 1064 nm/160 mm F-Theta lens FOV (mm²) with 1064 nm/256 mm F-Theta lens inspec.x scan zoom 1x to 7x.0 x 6.0 to 1.1 x x 9.6 to 1. x 1.4 on request inspec.x scan fixed 1x.0 x x 9.6 on request

19 Protective Glasses Protective Glasses Optimum protection for the optical system Coated on both sides High transmission for the corresponding wavelength or wavelength range High laser-damage threshold Short delivery time 19 Protective Glasses Protective glass Protective glass Protective glass thickness AR coated for λ Fused silica PG ,VIS PG ,6 PG ,VIS PG ,VIS PG PG PG /1064 PG ,6 x PG x PG x PG ,6 x PG x PG PG PG PG PG (nm) x x

20 Discover the Q! 20 Qioptiq supplies cutting edge technology for all optical requirements of Industrial Manufacturing. Worldwide production capacities and state-of-theart manufacturing plants guarantee an impressive portfolio of photonic products and solutions. Join us on a journey of discovery in our Laser Material Processing brochure! Photonics for Innovation QIOPTIQ Photonics GmbH & Co. KG LMP Laser Material Processing Hans-Riedl-Straße Feldkirchen Germany Phone Fax Internet +49 (0) (0) lmp@qioptiq.de