Table of Contents. Quartz Crystal Deposition Controllers and Monitors. Electron Impact Emission Spectroscopy. Quartz Crystal Sensors and Feedthroughs

Transcription

1 Vacuum Control Catalog

2

3 Contents Table of Contents Quartz Crystal Deposition Controllers and Monitors Cygnus 2 Thin Film Deposition Controller OLED Applications.... A1 IC6 Thin Film Deposition Controller Optical Applications A7 XTC/3 Thin Film Deposition Controllers.... A13 SQC-310 Series Thin Film Deposition Controllers.... A17 IQM-233 Thin Film Deposition Controller Card.... A21 SQM-160 Multi-Film Rate / Thickness Monitor.... A24 STM-2XM 2-Channel Rate / Thickness Monitor.... A28 STM-2 USB Thin Film Thickness / Rate Deposition Monitor.... A30 Electron Impact Emission Spectroscopy Guardian Codeposition Control System.... B1 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor.... C1 Cool Drawer Single Sensor.... C11 Front Load Dual Sensor... C18 Cool Drawer Dual Sensor.... C24 UHV Bakeable Sensor.... C30 ALD Sensor.... C36 Sputtering Sensor... C38 Crystal 12 Sensor.... C45 CrystalSix Sensor.... C52 RSH-600 Rotary Sensor Head.... C59 Quartz Crystals INFICON Quartz Crystals.... D1 Electron Beam Gun Control HVPS/SC 10 kv Power Supply with Integrated Source Control....E1 EBS-530 Electron Beam Sweep Controller....E3 Crucible Indexer....E5 Thin Film Deposition Controllers, Monitors and Accessories - i

4 This page left blank intentionally.

5 Quartz Crystal Deposition Controllers and Monitors Quartz Crystal Deposition Controllers and Monitors

6 This page left blank intentionally.

7 Quartz Crystal Deposition Controllers and Monitors Cygnus 2 Thin Film Deposition Controller OLED Applications Excellence Repeatable Quartz Crystal Deposition Controllers and Monitors Cygnus 2 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process. Cygnus 2 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of Å/s every 1 /10 second. No other quartz crystal controller has the performance, quality, and features of Cygnus 2, allowing you to make excellence repeatable. POWERFUL PERFORMANCE Cygnus 2 can control up to six sources simultaneously, independently, or in any combination; reducing system complexity and cost by eliminating the need for two or three controllers. The optional INFICON Crystal 12 Sensor switches crystals automatically without interrupting your process. This allows for continuous rate monitoring, extending the time between tool venting. For source control, rate or thickness monitoring and recording, Cygnus 2 has 12 assignable analog outputs, Advantages INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates Auto-Z improves thickness accuracy by automatically determining the Z-Ratio as material is deposited Up to six sources can be controlled simultaneously, independently, or in any combination by one Cygnus 2, relieving the need for two or three controllers Color TFT LCD display makes it easy to see what is going on with your process 10 Hz measurement ± Hz over 100 ms sample USB data storage for screen shots, recipe storage, and data logging Thickness summing of multiple sources Measurement rate averaging for low density, very low rate materials (up to 30 seconds for use with stable sources for very low rate OLED dopant material deposition) Display rate resolution of up to Å/s 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems Non-deposit control allows for continuous source control as substrates are cycled through the deposition chamber Six DAC outputs standard, six additional optional for source control, rate or thickness monitoring Auto-Z dramatically improves the accuracy of measured thickness for multiple materials and layers. Optional Ethernet communications RoHS compliant Thin Film Deposition Controllers, Monitors and Accessories - A1

8 Quartz Crystal Deposition Controllers and Monitors Cygnus 2 (continued) six standard and six additional (optional). In addition, I/O capabilities provide up to 24 relay outputs, 28 TTL inputs, and 14 TTL outputs. A 4 meter XIU option enables you to use long in-vacuum sensor cables for large systems. For stable, high resolution rate and thickness measurement and control at extremely low rates, Cygnus 2 has measurement rate averaging; valuable for low density materials deposited at very low rates (up to 30 seconds for use with stable sources for very low rate OLED dopant material deposition). The Auto-Z function can automatically determine the Z-Ratio for organic materials, maintaining thickness and rate accuracy during the deposition of layered or doped materials. Auto-Z provides greater thickness accuracy during processes where the Z-Ratio for the material is not known or when codepositing two or more materials. All these features make it easier to measure low density materials at low rates and communicate these measurements back to the system computer for reliable process control. EFFORTLESS PROCESS SETUP Operating Cygnus 2 is easy and intuitive with a color TFT LCD display and menu-driven navigation. Information is displayed on a clear, brightly lit screen for easy viewing. Soft keys help you maneuver quickly through the on-screen menus for efficient programming. The brightly lit TFT LCD display delivers information in an easy-to-read format. INFICON ModeLock measurement technology provides significantly longer crystal life, illustrated here in the deposition of indium. HOW MODELOCK WORKS The proven INFICON ModeLock measurement system provides crystal frequency information with precision not possible from conventional active oscillator systems. It eliminates mode-hopping, a failure to maintain crystal oscillation at the fundamental frequency. ModeLock continuously tests the monitor crystal for resonance at the fundamental frequency, thereby eliminating weaknesses inherent in the conventional measurement method. Conventional measurement methods incorporate the quartz monitoring crystal as an active element of the oscillator circuit. Consequently, the crystal controls the oscillator circuit. So, as the electrical characteristics of the crystal change during deposition, the oscillator circuit becomes less stable and may hop to another resonant frequency or fail completely, resulting in an inaccurate film thickness. More powerful and precise yet faster than the conventional method, ModeLock continually tests and analyzes the phasefrequency relationship of the crystal. The crystal is not an active part of the oscillator circuit. The ModeLock measurement system determines and applies a precise frequency to the crystal, preventing the crystal from hopping, or operating at a frequency other than the fundamental. This process takes place thousands of times per second to determine the resonant frequency to a precision of Hz / 100 ms. A2 - Thin Film Deposition Controllers, Monitors and Accessories

9 Quartz Crystal Deposition Controllers and Monitors Cygnus 2 (continued) Ordering Information C Y G 2 Quartz Crystal Deposition Controllers and Monitors Expansion Slot Basic Configuration 115V 50/60 Hz 230V 50/60 Hz Optional feature (not currently available) Sensor Measurement Module (each has two sensor inputs) Standard module Two standard modules Three standard modules Optional DAC Module (base unit includes six DAC outputs) None Additional six DAC outputs Additional Computer Communications Module (RS-232 standard) None Ethernet Optional TTL Relay Module None Eight relay outputs / 14 TTL outputs Additional I/O Relay Module (Base unit includes eight relay outputs / 14 TTL inputs) 1 2 None Eight relay outputs / 14 TTL inputs Accessories and Replacement Parts Cygnus 2 Controller Accessories G1 Handheld Power Controller A handheld unit that allows remote control of deposition power levels while the controller is in manual mode. The handheld power controller plugs into the control unit front panel. Compatible with Cygnus 2, IC6, XTC/3, IC/5, and Cygnus. Thin Film Deposition Controllers, Monitors and Accessories - A3

10 Quartz Crystal Deposition Controllers and Monitors Cygnus 2 (continued) Accessories and Replacement Parts (continued) Cygnus 2, IC6 and XTC/3 XIU Packages and Interconnect Cables An XIU (oscillator) package includes all the cables between the controller and XIU (oscillator), an XIU, and the cable between the XIU and the vacuum feedthrough. One XIU (oscillator package) is required for each crystal sensor assembly connected to the controller. NOTE: The Front Load Dual or Cool Drawer Dual Sensor, when used with the XTC/3, IC6, or Cygnus 2 requires either one XIU package and one CrystalTwo Switch (PN G1 or -G2) OR two XIU packages G G G G G G G G G G G G100 Cygnus 2, IC6, XTC/3M, and XTC/3S XIU (Oscillator) Packages XIU package with 4.6 m (15 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 9.1 m (30 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 15.2 m (50 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 30.5 m (100 ft.) cable For use with Cygnus 2, IC6, and XTC/3 4 m XIU package with 4.6 m (15 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 9.1 m (30 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 15.2 m (50 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 30.5 m (100 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 4.6 m (15 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 9.1 m (30 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 15.2 m (50 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 30.5 m (100 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable G G2 Cygnus 2, IC6, XTC/3M and XTC/3S XIU ONLY (No Cables) Cygnus 2, IC6, XTC/3 XIU (oscillator) For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) Cygnus 2, IC6, XTC/3 XIU (oscillator) For XIU to sensor head cable lengths of 3 to 4 m (118 in. to 157 in.) G P P P P100 Cygnus 2, IC6, XTC/3M, and XTC/3S Interconnect Cables 15.2 cm (6 in.) cable, XIU to vacuum feedthrough 4.6 m (15 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 9.1 m (30 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 15.2 m (50 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 30.5 m (100 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU A4 - Thin Film Deposition Controllers, Monitors and Accessories

11 Quartz Crystal Deposition Controllers and Monitors Cygnus 2 (continued) Specifications Measurement Performance Frequency resolution Thickness and rate resolution / measurement 1 Measurement frequency range Thickness accuracy 2 0.5% Measurement interval Multiple measurement averaging Design Features Multiple sensor measurement Auto-Z Codeposition Process Recipe and Data Management Material programs USB memory Data logging Hardware Features Sensors 3 Single Dual / CrystalTwo CrystalSix Crystal 12 Generic Source Controls Number of sources 4 Source control voltages ± MHz ± Å 6.0 to 4.5 MHz (fixed) 0.10 s 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 s averaging allowed Yes (up to six sensors) Yes Yes (up to six sources) Six independent materials Yes Yes Six Six (with one CrystalTwo Switch per sensor input) Six Six Six Up to six 0 to ±10 V, adjustable Output resolution 15 bits over full range (0 to 10 V) Crucible positions 64 Inputs / Outputs Inputs Outputs Recorder output 4 Logic statements Communications: Standard Optional 14 standard, up to 28 optional; TTL / CMOS logic compatible or closure to ground Eight standard, up to 24 optional programmable SPST relays rated at 30 V (dc) or 30 V (ac) RMS or 42 V 2.5 amps; 14 optional TTL outputs 0 to +10 V, adjustable 100 fully programmable; up to five actions, five events per statement RS-232 Ethernet Quartz Crystal Deposition Controllers and Monitors 1 Tooling / density = 100/1, fundamental frequency = 6 MHz 2 Varies according to process; figures reflect typical accuracy 3 Maximum configuration of each type 4 Cygnus 2 has six DAC outputs standard, six more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs, however, the number of sources that can be controlled simultaneously is six. Thin Film Deposition Controllers, Monitors and Accessories - A5

12 Quartz Crystal Deposition Controllers and Monitors Cygnus 2 (continued) Specifications (continued) Display Thickness resolution Rate resolution Operation 1 Å for 0 to kå 10 Å for to kå 100 Å for to kå 1 kå for 1000 to 9999 kå Å/s for 0 to Å/s 0.01 Å/s for to Å/s 0.1 Å/s for to Å/s Power requirements 100 to 230 V (ac) ±15% Operating temperature 50 / 60 Hz ±3 Hz 0 to 50 C (32 to 122 F) Dimensions, excluding mounts (H x W x D) 133 x 483 x 330 mm (5.25 x 19 x 13 in.) Weight 5.9 kg (13 lb.) A6 - Thin Film Deposition Controllers, Monitors and Accessories

13 Quartz Crystal Deposition Controllers and Monitors IC6 Thin Film Deposition Controller Optical Applications Excellence Repeatable Quartz Crystal Deposition Controllers and Monitors The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industryleading rate resolution of Å/s every 1 /10 second. Optical processes, such as reflective coatings, band-pass filters, and AR coatings benefit from high resolution and reliability along with the ability to accommodate 50 processes of 200 layers each. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable. RELIABLE PROCESS CONTROL With a comprehensive list of features, it is easy to integrate the IC6 into your system for complete process control. The IC6 has the ability to control up to six sources simultaneously for rate and thickness control. Up to 12 analog outputs are assignable for source control or for rate or thickness recording. Advantages INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates Auto-Z improves thickness accuracy by automatically determining the Z-Ratio as material is deposited Codeposition of up to six sources simultaneously Color TFT LCD display makes it easy to see what is going on with your process ± Hz over 100 ms sample USB data storage for screen shots, recipe storage, and data logging Powerful I/O with flexibility to integrate into simple or complex systems using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs) and use of logic functions (100 logic statements) Six DAC outputs standard, six additional optional for source control, rate or thickness monitoring Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers Multiple sensor averaging for up to eight sensors 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems Optional Ethernet communications Auto-Z dramatically improves the accuracy of measured thickness for multiple materials and layers. RoHS compliant Thin Film Deposition Controllers, Monitors and Accessories - A7

14 Quartz Crystal Deposition Controllers and Monitors IC6 - Optical (continued) The logic and process control capabilities available on the IC6 include 100 programmable logic statements, 20 counters, and 20 timers. I/O capabilities provide up to 24 relay outputs, 28 TTL inputs, and 14 TTL outputs. Logic statements can be used in conjunction with external inputs or outputs; allowing the IC6 to perform functions that otherwise would require a PLC or additional equipment. Each logic statement can include up to five functions that can be linked using Boolean logic. For process recipe flexibility, the IC6 can accommodate 50 processes of 200 layers each. Processes can be linked together for a maximum of 10,000 layers. The Auto-Z function can automatically determine Z-Ratio, maintaining thickness and rate accuracy, and eliminating the need for the user to estimate the acoustic impedance. This is especially important during the deposition of different materials onto the same crystal, during codeposition of two or more materials, or when the Z-Ratio for a material is unknown. EFFORTLESS PROCESS SETUP Operating IC6 is easy and intuitive with a color TFT LCD display and menu-driven navigation. Information is displayed on a clear, brightly lit screen for easy viewing. Soft keys help you maneuver quickly through the on-screen menus for efficient programming. The brightly lit TFT LCD display delivers information in an easy-to-read format. INFICON ModeLock measurement technology provides significantly longer crystal life, illustrated here in the deposition of indium. HOW MODELOCK WORKS The proven INFICON ModeLock measurement system provides crystal frequency information with precision not possible from conventional active oscillator systems. It eliminates modehopping, a failure to maintain crystal oscillation at the fundamental frequency. ModeLock continuously tests the monitor crystal for resonance at the fundamental frequency, thereby eliminating weaknesses inherent in the conventional measurement method. Conventional measurement methods incorporate the quartz monitoring crystal as an active element of the oscillator circuit. Consequently, the crystal controls the oscillator circuit. So, as the electrical characteristics of the crystal change during deposition, the oscillator circuit becomes less stable and may hop to another resonant frequency or fail completely, resulting in an inaccurate film thickness. More powerful and precise yet faster than the conventional method, ModeLock continually tests and analyzes the phasefrequency relationship of the crystal. The crystal is not an active part of the oscillator circuit. The ModeLock measurement system determines and applies a precise frequency to the crystal, preventing the crystal from hopping, or operating at a frequency other than the fundamental. This process takes place thousands of times per second to determine the resonant frequency to a precision of Hz/100 ms. A8 - Thin Film Deposition Controllers, Monitors and Accessories

15 Quartz Crystal Deposition Controllers and Monitors IC6 - Optical (continued) Ordering Information I C 6 Quartz Crystal Deposition Controllers and Monitors Basic Configuration 115V 50/60 Hz 230V 50/60 Hz Optional DAC Module (base unit includes six DAC outputs) None Additional six DAC outputs Sensor Measurement Module (each has two sensor inputs) Standard module Two standard modules Three standard modules Four standard modules Additional Computer Communications Module (RS-232 standard) None Ethernet Additional I/O Relay Module (base unit includes eight relay outputs / 14 TTL inputs) None Optional TTL Relay Module None Eight relay outputs / 14 TTL outputs Eight relay outputs / 14 TTL inputs Accessories and Replacement Parts IC6 Controller Accessories G1 Handheld Power Controller A handheld unit that allows remote control of deposition power levels while the controller is in manual mode. The handheld power controller plugs into the control unit front panel. Compatible with IC6, XTC/3, IC/5, and Cygnus. Thin Film Deposition Controllers, Monitors and Accessories - A9

16 Quartz Crystal Deposition Controllers and Monitors IC6 - Optical (continued) Accessories and Replacement Parts (continued) Cygnus 2, IC6 and XTC/3 XIU Packages and Interconnect Cables An XIU (oscillator) package includes all the cables between the controller and XIU (oscillator), an XIU, and the cable between the XIU and the vacuum feedthrough. One XIU (oscillator package) is required for each crystal sensor assembly connected to the controller. Note: The Front Load Dual or Cool Drawer Dual sensor assembly, when used with the XTC/3, IC6 or Cygnus 2 requires either one XIU package and one CrystalTwo Switch (PN G1 or -G2) OR two XIU packages G G G G G G G G G G G G100 Cygnus 2, IC6, XTC/3M, and XTC/3S XIU (Oscillator) Packages XIU package with 4.6 m (15 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 9.1 m (30 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 15.2 m (50 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 30.5 m (100 ft.) cable For use with Cygnus 2, IC6, and XTC/3 4 m XIU package with 4.6 m (15 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 9.1 m (30 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 15.2 m (50 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 30.5 m (100 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 4.6 m (15 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 9.1 m (30 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 15.2 m (50 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 30.5 m (100 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable G G2 Cygnus 2, IC6, XTC/3M and XTC/3S XIU ONLY (No Cables) Cygnus 2, IC6, XTC/3 XIU (oscillator) For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) Cygnus 2, IC6, XTC/3 XIU (oscillator) For XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) G P P P P100 Cygnus 2, IC6, XTC/3M, and XTC/3S Interconnect Cables 15.2 cm (6 in.) cable, XIU to vacuum feedthrough 4.6 m (15 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 9.1 m (30 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 15.2 m (50 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 30.5 m (100 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU A10 - Thin Film Deposition Controllers, Monitors and Accessories

17 Quartz Crystal Deposition Controllers and Monitors IC6 - Optical (continued) Specifications Measurement Performance Frequency resolution Thickness and rate resolution / measurement 1 Measurement frequency range Thickness accuracy 2 0.5% Measurement interval Multiple measurement averaging Design Features Multiple sensor measurement Auto-Z Autotune Codeposition Process Recipe and Data Management ± MHz ± Å 6.0 to 4.5 MHz (fixed) 0.10 s 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 s averaging allowed Yes (up to eight sensors) Yes Yes Material programs 32 Process layers (per process) 200 Processes USB memory Data logging Hardware Features Sensors 3 Single Dual / CrystalTwo CrystalSix Crystal 12 Generic Source Controls Number of sources 4 Source control voltages Yes (up to six sources) 50 (processes can be linked together) Yes Yes Eight Four / eight (with CrystalTwo Switch) Eight Eight Eight Up to six 0 to ±10 V, adjustable Output resolution 15 bits over full range (0 to 10 V) Crucible positions 64 Inputs / Outputs Inputs Outputs Recorder output 4 Logic statements Communications: Standard Optional 14 standard, up to 28 optional; TTL / CMOS logic compatible or closure to ground Eight standard, up to 24 optional programmable SPST relays rated at 30 V (dc) or 30 V (ac) RMS or 42 V 2.5 amps; 14 optional TTL outputs 0 to +10 V, adjustable 100 fully programmable; up to five actions, five events per statement RS-232 Ethernet Quartz Crystal Deposition Controllers and Monitors 1 Tooling / density = 100/1, fundamental frequency = 6 MHz 2 Varies according to process; figures reflect typical accuracy 3 Maximum configuration of each type 4 The IC6 has six DAC outputs standard, six more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs, however, the number of sources that can be controlled simultaneously is six. Thin Film Deposition Controllers, Monitors and Accessories - A11

18 Quartz Crystal Deposition Controllers and Monitors IC6 - Optical (continued) Specifications (continued) Display Thickness resolution Rate resolution Operation 1 Å for 0 to kå 10 Å for to kå 100 Å for to kå 1 kå for 1000 to 9999 kå Å/s for 0 to Å/s if rate filter time setting is 10 seconds or greater 0.01 Å/s for 0 to Å/s 0.1 Å/s for 100 to Å/s Power requirements 100 to 230 V (ac) ±15% Operating temperature 50 / 60 Hz ±3 Hz 0 to 50 C (32 to 12 F) Dimensions, excluding mounts (H x W x D) 133 x 483 x 330 mm (5.25 x 19 x 13 in.) Weight 10.5 kg (23 lb.) A12 - Thin Film Deposition Controllers, Monitors and Accessories

19 Quartz Crystal Deposition Controllers and Monitors XTC/3 Thin Film Deposition Controllers Quartz Crystal Deposition Controllers and Monitors ADVANCED, AFFORDABLE RATE CONTROL FOR SINGLE OR MULTIPLE LAYERS Now get everything you want in a thin film deposition controller for single and multiple-layer processes. XTC/3 with patented ModeLock provides proven mode-hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity. INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value. Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3. WORLDWIDE INFICON SUPPORT No matter where you are, you get fast answers, attentive service, and maximum uptime. With offices around the world, INFICON is the only manufacturer of thin film deposition controllers to offer you local service and technical support around the world. Advantages Available in single-layer and multiple-layer models Patented ModeLock technology prevents film thickness errors caused by mode-hopping Supports INFICON Crystal 12, CrystalSix, and dual sensor automatic crystal switching for maximum productivity XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, two sensors, and two sources XTC/3S single-layer model supports up to nine films, two sensors, and two sources Easy-to-read TFT LCD graphics display Films and processes can be assigned unique, descriptive names for easy retrieval Ethernet connection available Free-standing (no computer necessary) or optional Windows software for computer operation Plug-and-play replacement for INFICON XTC/2 controllers (limited to XTC/2 features and command set) Thin Film Deposition Controllers, Monitors and Accessories - A13

20 Quartz Crystal Deposition Controllers and Monitors XTC/3 (continued) Ordering Information XTC/3S Single-Layer Controller X C 3 S Rack Mount Kits Basic Unit 115 V 230 V None One unit rack mount kit Two unit rack mount kit Remote Handheld Power Controller Additional Computer Communications Module 0 1 None Handheld power controller None (RS-232 only) Ethernet module 0 1 XTC/3M Multiple-Layer Controller X C 3 M Rack Mount Kits Basic Unit 115 V 230 V None One unit rack mount kit Two unit rack mount kit Remote Handheld Power Controller Additional Computer Communications Module 0 1 None Handheld power controller None (RS-232 only) Ethernet module 0 1 A14 - Thin Film Deposition Controllers, Monitors and Accessories

21 Quartz Crystal Deposition Controllers and Monitors XTC/3 (continued) Accessories and Replacement Parts XTC/3 Accessories G G G G G G1 Ethernet Computer Communications Module A plug-in Ethernet module providing industry standard signaling protocols and connectors for accepting operational commands from remote sources. Handheld Power Controller A handheld unit that allows remote control of deposition power levels while the controller is in manual mode. The handheld power controller plugs into the control unit front panel. One unit rack mount kit Provides all required materials to mount one XTC/3 into a standard 48.3 cm (19 in.) rack. Two unit rack mount kit Provides all required materials to mount two XTC/3 units side by side in a standard 48.3 cm (19 in.) rack. XTC/3M or XTC/3S Editor / Monitor Software, on CD Windows-based applications software that allows complete programming, monitoring, and data logging of an XTC/3M or XTC/3S. XTC/3M or XTC/3S Communications Library (DLL), on CD Contains functions that allow the creation of a program for a remote computer to control either an XTC/3M or XTC/3S via an RS-232 or TCP/IP connection. Quartz Crystal Deposition Controllers and Monitors Cygnus 2, IC6 and XTC/3 XIU Packages and Interconnect Cables An XIU (oscillator) package includes all the cables between the controller and XIU (oscillator), an XIU, and the cable between the XIU and the vacuum feedthrough. One XIU (oscillator package) is required for each crystal sensor assembly connected to the controller. Note: The Front Load Dual or Cool Drawer Dual Sensor, when used with the XTC/3, IC6 or Cygnus 2 requires either one XIU package and one CrystalTwo Switch (PN G1 or -G2) OR two XIU packages G G G G G G G G G G G G100 Cygnus 2, IC6, XTC/3M, and XTC/3S XIU (Oscillator) Packages XIU package with 4.6 m (15 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 9.1 m (30 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 15.2 m (50 ft.) cable For use with Cygnus 2, IC6, and XTC/3 XIU package with 30.5 m (100 ft.) cable For use with Cygnus 2, IC6, and XTC/3 4 m XIU package with 4.6 m (15 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 9.1 m (30 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 15.2 m (50 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 30.5 m (100 ft.) XIU cable Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable 4 m XIU package with 4.6 m (15 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 9.1 m (30 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 15.2 m (50 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable 4 m XIU package with 30.5 m (100 ft.) XIU cable Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable G G2 Cygnus 2, IC6, XTC/3M and XTC/3S XIU ONLY (No Cables) Cygnus 2, IC6, XTC/3 XIU (oscillator) For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) Cygnus 2, IC6, XTC/3 XIU (oscillator) For XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) G P P P P100 Cygnus 2, IC6, XTC/3M, and XTC/3S Interconnect Cables 15.2 cm (6 in.) cable, XIU to vacuum feedthrough 4.6 m (15 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 9.1 m (30 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 15.2 m (50 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU 30.5 m (100 ft.) cable, Cygnus 2, IC6, or XTC/3 controller to XIU Thin Film Deposition Controllers, Monitors and Accessories - A15

22 Quartz Crystal Deposition Controllers and Monitors XTC/3 (continued) Specifications Feature, Parameter, or Specification XTC/3S Single Layer XTC/3M Multiple Layer Frequency resolution ± MHz ± MHz Measurement frequency range 6.0 to 5.0 MHz (fixed) 6.0 to 5.0 MHz (fixed) Measurement interval 0.25 s 0.25 s Thickness and rate resolution / measurement 1 ±0.034 Å ±0.034 Å Measurement technology ModeLock ModeLock Number of processes One 99 Number of layers One 999 Number of material programs (or films) Nine 32 Number of sensor inputs Two Two CrystalSix / Crystal 12 sensor support Yes Yes Support XTAL2 switch Yes Yes Number of source outputs Two Two Computer communications RS-232 standard, Ethernet TCP/IP optional RS-232 standard, Ethernet TCP/IP optional Max RS-232 baud rate kbps kbps Automatic crystal switch Yes Yes Number of relays 12, not event assignable 12, event assignable Number of programmable relay functions One One Functions per relay One One Relay voltage rating 30 V (dc) or 30 V (ac) RMS or 42 V peak at 2.5 A 30 V (dc) or 30 V (ac) RMS or 42 V peak at 2.5 A Number of inputs Eight TTL, 24 V (dc) max Eight TTL, 24 V (dc) max Number of programmable input functions One, not event assignable One, event assignable Number of recorder outputs One One Manual power / hand held controller Yes Yes Exhaust fan No exhaust fan No exhaust fan Test mode Yes Yes Shutter delay Yes Yes Secondary tooling Yes Yes Case dimensions Half rack, 2U high Half rack, 2U high Rate and thickness display resolution 0.1 Å/s for 0.0 to 99.9 Å/s, 1 Å/s for 100 to 999 Å/s, display thickness resolution = 1 Å 0.1 Å/s for 0.0 to 99.9 Å/s, 1 Å/s for 100 to 999 Å/s, display thickness resolution = 1 Å Film select via inputs Yes No User guide languages English, Chinese English, Chinese Control loops PID PID Software to operate from computer Yes Yes Data logging Yes Yes Quality and stability function Yes Yes Sample and hold (RateWatcher ) Yes Yes Crucible selection Yes Yes Crucible feedback input Yes Yes Select control voltage polarity Yes, ±2.5, 5, 10 V (dc); 15-bit resolution Yes, ±2.5, 5, 10 V (dc); 15-bit resolution Program lock code Yes Yes Display with graphics Yes Yes User labeled processes (cell phone style alphanumeric entry) No Yes User labeled films (cell phone style alphanumeric entry) No Yes Transfer sensor control Yes Yes XTC/2 RS-232 communications compatibility Yes (limited) Yes (limited) 1 Tooling / density = 100/1, fundamental frequency = 6 MHz A16 - Thin Film Deposition Controllers, Monitors and Accessories

23 Quartz Crystal Deposition Controllers and Monitors SQC-310 Series Thin Film Deposition Controllers Quartz Crystal Deposition Controllers and Monitors THE MOST AFFORDABLE, ADVANCED MULTI-LAYER CONTROLLER FROM THE TECHNOLOGY LEADER The INFICON SQC-310 series offers features not found in any competitors thin film controllers. In addition to advanced electronics, an improved display, and an affordable price, SQC-310 is flexible in its configuration to meet the demands of any application. For sequential deposition, SQC-310 features two sensor inputs, two source outputs, and eight digital inputs, and eight relay outputs. The optional expansion card doubles the available inputs and outputs. For codeposition, SQC-310C can monitor and control up to four sensor inputs and four source outputs simultaneously. SQC-310C also has available 16 digital inputs, and 16 relay outputs. WORLDWIDE SUPPORT OUR EXPERTISE IS YOUR COMPETITIVE ADVANTAGE INFICON is the only manufacturer of thin film deposition controllers with local service and technical support around the world including a broad selection of sensors, feedthroughs, and accessories to complement the SQC-310 series controllers. When you purchase your SQC-310 series controller or any other INFICON product you can be assured of fast answers, attentive service, and maximum uptime. Advantages Bright, color LCD display available in English or Chinese Standard RS-232 and USB (RS-232 and Ethernet optional) Easy setup and operation with a Quick Setup Menu, six context-sensitive push buttons, and convenient parameter setting knob Windows program for developing, testing, and downloading processes, and for logging instrument data to your computer for process analysis and quality control Accurate process control, especially for low deposition rates, with ±0.03 Hz resolution at 10 readings/second Storage capacity for up to 100 processes, 1,000 layers, and 50 films Monitoring of source material with a single sensor or with multiple sensors to provide accurate source distribution monitoring Thin Film Deposition Controllers, Monitors and Accessories - A17

24 Quartz Crystal Deposition Controllers and Monitors SQC-310 Series (continued) Ordering Information S Q C Channels Two QCM channels Four QCM channels 2 4 Interface Display RS-232 and USB RS-232 and Ethernet R E 1 2 English Chinese Example of a complete system: SQC310-2-R-1 SQC-310 sequential controller with two channels, RS-232 and USB interface, and English display m (10 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 3 m (10 ft.) BNC cable SL-A0E47 Front Load Single Sensor with CF40 feedthrough, welded G10 10-pack of gold-coated crystals (6 MHz) in cleanroom compatible dispenser S Q C C Channels Four QCM channels 4 Interface Display RS-232 and USB RS-232 and Ethernet R E 1 2 English Chinese A18 - Thin Film Deposition Controllers, Monitors and Accessories

25 Quartz Crystal Deposition Controllers and Monitors SQC-310 Series (continued) Accessories and Replacement Parts Accessories Handheld power control, 3 m (10 ft.) coiled cable U rack extender mounts one SQC-310 instrument in 48.3 cm (19 in.) rack U rack adapter mounts two SQC-310 instruments in 48.3 cm (19 in.) rack Quartz Crystal Deposition Controllers and Monitors Oscillators and Cables m (10 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 3 m (10 ft.) BNC cable m (25 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 7.6 m (25 ft.) BNC cable m (50 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 15.2 m (50 ft.) BNC cable m (75 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 22.8 m (75 ft.) BNC cable OSC-100 oscillator BNC cable, male / female, 15.2 cm (6 in.) m (10 ft.) BNC cable, male / male m (25 ft.) BNC cable, male / male m (50 ft.) BNC cable, male / male m (75 ft.) BNC cable, male / male BNC to Microdot adapter cable, 15.2 cm (6 in.) Thin Film Deposition Controllers, Monitors and Accessories - A19

26 Quartz Crystal Deposition Controllers and Monitors SQC-310 Series (continued) Specifications SQC-310 SQC-310C Measurement Sensor inputs Two (four optional) Four Measurement frequency range 6.5 to 1.0 MHz (adjustable) Frequency resolution 1 ±0.012 Hz at 6 MHz Thickness and rate resolution / measurement 2 ±0.015 Å Reference frequency stability ±2 ppm total, 0 to 50 C Measurement interval 0.1 to 1.0 s (adjustable) Rate display 0.01 Å/s Control Storage 100 processes, 1000 layers, 50 films Source outputs Two (four optional) Four Output signal 0 to ±10 V (dc), 15-bit Digital inputs / relays Eight / eight (16 / 16 optional) 16 / 16 Digital inputs 5 V (dc) non-isolated Relays SPST Form 1 A, 30 V (dc), 2 A maximum Interface(s) RS-232 and USB (RS-232 and Ethernet optional) Remote power control Optional Display Type 1 /4 VGA 320 x 240 active matrix color LCD Graphs Rate, deviation, power, or full screen numeric General Power 100 to 240 V (ac), 50/60 Hz, 25 W Compliance CE, RoHS Windows software Included Housing / mounting 13.3 cm (5.25 in.) half-rack 1 Resolution given for 0.25 s measurement interval 2 Tooling / density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval A20 - Thin Film Deposition Controllers, Monitors and Accessories

27 Quartz Crystal Deposition Controllers and Monitors IQM-233 Thin Film Deposition Controller Card Quartz Crystal Deposition Controllers and Monitors LOW-COST DEPOSITION CONTROL ON A PCI EXPRESS CARD The IQM-233 PCI Express card turns your computer into a thin film deposition controller. This INFICON designed and manufactured product is the ideal choice for system OEMs, or anyone wishing to incorporate a thin film deposition controller into an existing computer or PLC controlled system. Installation is simple all you need is an unoccupied PCI Express slot. IQM- 233 is available to fit in standard or small form factor computer towers. UNPARALLELED FEATURES IQM-233 features three QCM sensor inputs and three source outputs on each card. Up to two IQM-233 cards can be installed in a single computer (using optional IQS-233 software), giving you a maximum of six sensor inputs and six source outputs. Only INFICON offers this level of flexibility in a fully integrated computer controlled QCM controller. Advantages PCI Express Three sensor inputs, three control outputs Install multiple cards in a computer Codeposition of multiple sources Easy PLC integration to add I/O capabilities Easy-to-use Value price IQM-233 is compatible with standard INFICON oscillators (PN and ), so replacing an SQM-242 card does not require a new oscillator. It is also compatible with all INFICON single and dual sensor heads. CHOOSE THE SOFTWARE SOLUTION RIGHT FOR YOU IQM-233 includes basic Windows software for setup and control of simple sequential or codeposition processes with one IQM-233 card. The optional IQS-233 advanced Windows software allows for more complex process setup, including multi-layer codeposition, graphing, and PLC integration with event selectable relay / input functions. IQS-233 software also allows for use of up to two IQM-233 cards. As an alternative for customers wanting to write their own software, IQM-233 includes a LabVIEW sample program to provide basic functionality and demonstrate programming techniques. INFICON WORLDWIDE SUPPORT The IQM-233 card is designed and supported by INFICON, a worldwide leader in QCM control. No matter where you are, you get fast answers, attentive service, and the support you need to keep your INFICON product running smoothly. With offices around the world, INFICON offers local technical support and service where you need it. Thin Film Deposition Controllers, Monitors and Accessories - A21

28 Quartz Crystal Deposition Controllers and Monitors IQM-233 (continued) IQM-233 Standard software (included) IQS-233 Codeposition software (optional) Ordering Information 782-IQM-233-G1 IQM-233 QCM controller card for standard PCI Express slot ³ 782-IQM-233-G2 IQM-233 QCM controller card for Small Form Factor (SFF) PCI Express slot ³ 782-IQS-233 IQS-233 codeposition software P1 SMA to BNC adapter for IQM-233 sensor inputs (one required for each sensor input) 3 Includes 1 SMA to BNC adapter ( P1) IQM-233 Standard Software (included with IQM-233) Windows program provides basic setup and deposition control for one IQM-233 card. Simultaneous monitoring and / or control of up to three sensors and / or sources. A LabVIEW sample program and its source code are also included. Optional IQS-233 Codeposition Software Provides complete setup and deposition control for one or two IQM-233 cards. Simultaneous monitoring and/or control of up to 6 sensors and / or sources. Multi-layer process recipes, pre/post conditioning, data logging, real-time data graphing, and digital I/O capabilities (requires a PLC). Sensor IQM-233 Source Output to Power Supply 15.2 cm (6 in.) BNC cable 3 m (10 ft.) BNC cable Oscillator Power Supply PC with installed IQM-233 software IQM-233 Sensor Input to Oscillator A22 - Thin Film Deposition Controllers, Monitors and Accessories

29 Quartz Crystal Deposition Controllers and Monitors IQM-233 (continued) Accessories and Replacement Parts Oscillators and Cables m (10 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 3 m (10 ft.) BNC cable m (25 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 7.6 m (25 ft.) BNC cable m (50 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 15.2 m (50 ft.) BNC cable m (75 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 22.8 m (75 ft.) BNC cable OSC-100 oscillator BNC cable, male / female, 15.2 cm (6 in.) m (10 ft.) BNC cable, male / male m (25 ft.) BNC cable, male / male m (50 ft.) BNC cable, male / male m (75 ft.) BNC cable, male / male BNC to Microdot adapter cable, 15.2 cm (6 in.) Quartz Crystal Deposition Controllers and Monitors Specifications Computer Requirements 1.5 GHz or better CPU 2 GB RAM 200 MB of free HD space Minimum screen resolution of 1152 x 648 Windows XP SP3, Windows 7 32 / 64-bit, Window 8 32 / 64-bit One PCI Express slot (any size) is required for each IQM-233 card IQM-233 Thin Film Deposition Controller Card Sensor Inputs Three QCM Sensor Inputs Outputs Three Analog Source Outputs Connectors SMA Includes one SMA / BNC adapter Connectors 15-pin high density D-sub Measurement frequency range 6.1 to 4.0 MHz (adjustable) Signal 0 to ±10 V (dc) Frequency Resolution 1 ± MHz Resolution 15-bit plus sign (per 500 ms sample) Thickness and rate ±0.12 Å Impedance 50 Ω resolution / measurement 2 Measurement interval 0.1 to 2.0 s (adjustable) Computer 1 Resolution given for 0.25 s measurement interval 2 Tooling / density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval Interface PCIe x1 PCI Express Slot (Std or SFF) Thin Film Deposition Controllers, Monitors and Accessories - A23

30 Quartz Crystal Deposition Controllers and Monitors SQM-160 Multi-Film Rate / Thickness Monitor MULTI-CHANNEL QUARTZ CRYSTAL MONITOR SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals. Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user-selectable. In addition, frequency or mass displays can be selected. Four relay outputs allow SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start / stop and zero readings. SQM-160 comes with an RS-232 port and Windows software that allows instrument setup from a computer. The software can be used to set and store all parameters, operate the instrument, and save process data in an Excel file format. USB or Ethernet options add to the communications flexibility. Two menus control instrument setup for the 99 stored films. To access the menus, press Program. Rotate the control knob to select / edit parameters. The main display shows menu prompts, and values are shown in the auxiliary (Time) display. HIGH ACCURACY, LOW COST SQM-160 is offered in a standard frequency resolution version (SQM160-S) and a high resolution version (SQM160-H). The standard frequency resolution is 0.30 Hz at 10 readings per second. The high resolution option increases resolution to 0.03 Hz at 10 readings per second. Temperature stability is 2 ppm over the entire operating range. This combination of high accuracy and high stability are unmatched in an instrument at this price! Advantages Two measurement channels standard, an additional four optional Analog outputs for rate / thickness recording High resolution option: 0.03 Hz at 10 readings / s RS-232 standard, USB or Ethernet optional EASY TO USE The large, bright display simultaneously shows thickness and rate readings that are highly visible. When the desired thickness is reached, or time has elapsed, the shutter closes and the appropriate front panel indicators illuminate. Press the Xtal Life button at any time to view the remaining crystal life. A24 - Thin Film Deposition Controllers, Monitors and Accessories

31 Quartz Crystal Deposition Controllers and Monitors SQM-160 (continued) Typical SQM-160 System A typical QCM system consists of the SQM-160 monitor, at least one sensor/feedthrough combination, and an oscillator kit for each sensor. Quartz Crystal Deposition Controllers and Monitors Sensor Substrate Monitor In-vacuum cable Source Shutter Feedthrough Enhanced software provides a visual display of process data for easy process analysis and documentation. Backup of the SQM-160 setup data allows for process consistency cm (6 in.) BNC cable Oscillator 3 m (10 ft.) BNC cable Ordering Information S Q M Base Controller Standard resolution High resolution S H Number of Channels Two (standard) Six 2 6 R U E Interface RS-232 Only RS-232 and USB RS-232 and Ethernet Thin Film Deposition Controllers, Monitors and Accessories - A25

32 Quartz Crystal Deposition Controllers and Monitors SQM-160 (continued) Accessories and Replacement Parts Accessories U rack extender mounts one SQM-160 OR CI-100 instrument in 48.3 cm (19 in.) rack U rack adapter mounts two SQM-160 OR CI-100 instruments in 48.3 cm (19 in.) rack Oscillators and Cables m (10 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 3 m (10 ft.) BNC cable m (25 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 7.6 m (25 ft.) BNC cable m (50 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 15.2 m (50 ft.) BNC cable m (75 ft.) oscillator kit includes OSC-100 oscillator, 15.2 cm (6 in.) BNC, and 22.8 m (75 ft.) BNC cable OSC-100 oscillator BNC cable, male / female, 15.2 cm (6 in.) m (10 ft.) BNC cable, male / male m (25 ft.) BNC cable, male / male m (50 ft.) BNC cable, male / male m (75 ft.) BNC cable, male / male BNC to Microdot adapter cable, 15.2 cm (6 in.) A26 - Thin Film Deposition Controllers, Monitors and Accessories

33 Quartz Crystal Deposition Controllers and Monitors SQM-160 (continued) Specifications QCM sensor inputs Measurement frequency range Frequency resolution 1 Thickness and rate resolution / measurement 2 Standard: two; optional: four 6.5 to 1.0 MHz (adjustable) Standard: ± MHz High resolution option: ± MHz Standard: ±0.37 Å High resolution option: ±0.037 Å Reference frequency stability ±2 ppm total, over 0 to 50 C Measurement interval Measurement filter Stored films 99 Analog outputs Digital inputs / outputs Communications interface Power CE compliance RoHS compliance Housing / mounting Weight Windows software (included) 0.10 to 2.0 s (adjustable) 1 to 20 readings Two 0 to 5 V (dc), rate and thickness Two inputs, four relay outputs Standard: RS-232 Optional: USB or Ethernet 100 to 120 / 200 to 240 V (ac), 50/60 Hz, 20 W Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD Yes 1 /2 rack cabinet, 89 x 213 x 197 mm (3.5 x 8.5 x 7.75 in.) 2.7 kg (6 lb.) Provides remote setup and operation, data logging functions Quartz Crystal Deposition Controllers and Monitors 1 Resolution given for 0.25 s measurement interval 2 Tooling / density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval Thin Film Deposition Controllers, Monitors and Accessories - A27

34 Quartz Crystal Deposition Controllers and Monitors STM-2XM 2-Channel Rate / Thickness Monitor SIMPLE OPERATION FOR MANY APPLICATIONS STM-2XM is a two channel rate / thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price. STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process, or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors. Two sensor inputs allow for the use of two single quartz crystal sensors or one dual quartz crystal sensor. Ten measurements are taken per second while achieving a resolution of Å per measurement. FEATURE PACKED STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs allowing for a level of integration usually reserved for more expensive instruments. Programmable features include shutter delay, time / power monitoring, and rate sampling. Use all of these features to achieve the most accurate readings and the longest crystal life. Advantages Two measurement channels Four analog outputs for rate, rate deviation, or thickness Eight programmable digital inputs Eight programmable digital outputs High accuracy at 10 readings per second Displays mass or thickness Codeposition monitoring capabilities Operate and monitor STM-2XM through the simple front panel interface or program the STM-2XM through the included LabVIEW software. This simple software allows can be an online or offline editor for films and system parameters and is easy-to-use. EASY TO USE STM-2XM features a high contrast LCD display and intuitive menu system. On-screen hints can be found throughout the menus for simple, guided programming and operation. The easy-to-read LCD can display in accumulated mass or thickness. A28 - Thin Film Deposition Controllers, Monitors and Accessories

35 Quartz Crystal Deposition Controllers and Monitors STM-2XM (continued) Ordering Information STM-2XM-G1 STM-2XM Monitor (US power cord) STM-2XM-G2 STM-2XM Monitor (European power cord) Accessories and Replacement Parts Quartz Crystal Deposition Controllers and Monitors Rack Mount Kit mounts one STM-2XM monitor in a 48.3 cm (19 in.) rack Dual Rack Mount Kit mounts two STM-2XM monitors in a 48.3 cm (19 in.) rack Specifications Sensor inputs Compatible sensors Measurement frequency range Frequency resolution Reference frequency stability Thickness and rate resolution / measurement 1 Measurement interval Two Stored films 15 Display mode Digital inputs Digital outputs Analog outputs Analog output rating Relay rating Mains power supply Single / shuttered single or dual QCM sensor 6.0 to 5.0 MHz (fixed) ±0.03 Hz at 6 MHz ±2 ppm ±0.037 Å 0.10 s Thickness / Mass Eight Eight Four 1 Tooling / density = 100/1, fundamental frequency = 6 MHz 0 to ±10 V, 10 ma Up to 48 V (dc) V (ac), 2 A 100 to 240 V (ac) ±10%, 50/60 Hz, 2.5 VA Thin Film Deposition Controllers, Monitors and Accessories - A29

36 Quartz Crystal Deposition Controllers and Monitors STM-2 USB Thin Film Thickness / Rate Deposition Monitor Advantages SMALL IN SIZE AND PRICE, BIG IN PERFORMANCE STM-2 combines the simplicity of USB connectivity with the accuracy of a precision measurement engine, all in a compact, inexpensive package. The size and simplicity of STM-2 help make setup and operation easy and efficient. SUPERIOR PERFORMANCE STM-2 is the most accurate USB powered thin film monitor in the industry. Ten measurements are taken per second while achieving a resolution of Å per measurement. EASY AND FLEXIBLE INSTALLATION STM-2 comes with everything you need to connect a QCM sensor / feedthrough to a Windows computer. Up to 8 STM-2s monitoring up to 8 sensors can be connected to a computer simultaneously. Sensor Substrate Low cost instrument USB connection Internal oscillator High accuracy at 10 measurements per second Compatible with an external oscillator To setup STM-2, simply connect the included BNC cable from the feedthrough to STM-2, then connect STM-2 to a computer using a standard mini USB cable. No external oscillator or power supply is required. STM-2 features an internal oscillator that allows for simple and cost effective installation when STM-2 is located within 1 m (40 in.) of the quartz crystal. A standard INFICON oscillator kit can also be used for applications where STM-2 must be located farther away from the feedthrough. STM-2 SOFTWARE STM-2 includes LabVIEW software, capable of simple operation and data logging. Windows software is also included for operation and data logging of up to eight STM-2s. Feedthrough 15.2 cm (6 in.) BNC cable Source Shutter Source USB cable Monitor STM-2 A SIMPLE QCM Figure 1 shows a typical thin film deposition system. A complete QCM system consists of STM-2, a sensor, a feedthrough, a computer, and crystals. STM-2 Figure 1: Typical STM-2 installation A30 - Thin Film Deposition Controllers, Monitors and Accessories

37 Quartz Crystal Deposition Controllers and Monitors STM-2 (continued) Ordering Information STM-2 Deposition Monitor, includes: Windows software applications 15.2 cm (6 in.) BNC cable (connects STM-2 to the feedthrough) 5 m (16.4 ft.) USB cable (connects STM-2 to your computer) Quartz Crystal Deposition Controllers and Monitors Specifications Compatible sensors Sensor input Measurement frequency range 1 Frequency resolution Measurement interval Reference frequency stability Thickness and Rate resolution / measurement Thickness display resolution Interface Size Weight Non-shuttered single QCM sensor One 6.0 to 5.0 MHz (fixed) ±0.03 Hz at 6 MHz 0.10 s ±2 ppm ±0.037 Å 1 Å (display on software only) USB, v1.1 or later capable of providing 400 ma, 5 V (dc) 11.4 x 7.6 x 2.5 cm (4.5 x 3 x 1 in.) 57 g (2 oz.) Computer requirements Windows 2000, Windows XP, Windows Vista, Windows 7, or Windows 8 with one available USB 1.1 (or later) port for each STM-2 1 Tooling / density = 100/1, fundamental frequency = 6 MHz Figure 2: STM-2 Windows software Thin Film Deposition Controllers, Monitors and Accessories - A31

38 Quartz Crystal Deposition Controllers and Monitors This page left blank intentionally. A32 - Thin Film Deposition Controllers, Monitors and Accessories

39 Electron Impact Emission Spectroscopy Electron impact Emission Spectroscopy

40 This page left blank intentionally.

41 EIES Deposition Controllers Guardian Codeposition Control System PRECISE CONTROL FOR EMERGING TECHNOLOGIES Guardian Codeposition Controller, powered by electron impact emission spectroscopy (EIES), significantly improves the reproducibility of film quality during fabrication of CIGS films. Guardian provides precise control of deposition rates from 0.1 to 9999 Å/sec. The system operates one or two sensors, up to eight optical inputs and controls up to eight deposition sources, enabling codeposition of up to eight materials. The unique Guardian EIES sensor measures deposition rates more accurately without interference from residual gases while monitoring CIGS processes. Its Windows-based software provides easy setup and operation of multi-material thin film deposition processes. It is fully compatible with INFICON Sentinel sensors, providing easy integration into existing systems. Guardian Codeposition Controller is ideal for controlling simultaneous deposition of multiple materials in applications such as CIGS for photovoltaics, MBE, and superconducting thin films. SYSTEM OVERVIEW A complete Guardian system consists of at least one sensor, one detector, an optical filter, a Guardian controller, and a Windows computer (user-supplied) compatible with Guardian software. EIES is generally used to control deposition of multiple materials, so most EIES systems include additional sensors, detectors, optical components such as beam splitters, and Quartz Crystal Monitors (QCMs) for calibration or controlling deposition rate for some materials. The diagram in Figure 1 shows a typical Guardian system configuration. In this system, the Guardian controls the deposition rate of four materials, using EIES for three of the materials and a QCM for the fourth. (A common configuration for deposition of CIGS materials in photovoltaics applications.) TO CONFIGURE THE GUARDIAN CODEPOSITION SYSTEM, CONSIDER THE FOLLOWING What are the primary and secondary emission wavelengths for your deposition materials? If different materials have peaks too close to each other, you may need to monitor a secondary wavelength, which has lower signal strength. During the deposition process, what background gases are present in your vacuum chamber, and what are the emission wavelengths for those gases? If emissions from background gases interfere with the deposition materials, a gas compensating sensor is recommended. EIES is most effective with the uniquely defined spectra of atomic species. Molecular species that generate Electron Impact Emission Spectroscopy Figure 1: Conceptual system configuration. Advantages Monitor and control simultaneous deposition of up to eight materials Deposition rates from 0.1 to 9999 Å/s Integrated EIES and QCM thin film process control Ideal for CIGS thin films Thin Film Deposition Controllers, Monitors and Accessories - B1

42 EIES Deposition Controllers Guardian (continued) unstable or broad emission spectra cannot be measured accurately. EIES is not recommended for organic materials. These, and other factors, determine the optimum EIES system configuration for each specific application. Papers have been published that describe these considerations in more detail. When you are configuring your EIES system, please contact us for a thorough discussion of your application. The standard sensor has one thermionic emitter (filament) positioned near the vapor flux of the materials being deposited. The light generated travels through the light tube to the detector. A filter at the detector inlet passes the specific wavelength of interest. This sensor works well at high vacuum. The gas compensation sensor incorporates a second filament in addition to the standard sensor. This second filament is positioned so that it sees only the background gases, not the vapor flux of the materials being deposited. The Guardian software then subtracts the background gases from the signal of interest, significantly improving stability. The gas compensation sensor is recommended when emissions from background gases, such as H 2 O and CO 2, interfere with the signal from the material of interest. The detector uses a photomultiplier tube (PMT) to convert the optical / light signal from the sensor into a high resolution digital signal. A filter at the detector inlet selects the specific material wavelength of interest. The detector inlet has a built-in filter holder for standard 2.54 cm (1 in.) diameter filters. For a single material system the optical detector module can mount directly on the feedthrough. For multiple materials, a beam splitter can be used to couple the optical signal from one sensor into several detectors. The gain of each detector can be adjusted individually to optimize performance for different materials. Users familiar with optical beam handling equipment can readily design and build their own beam splitters, using standard components available from many suppliers. For best results, we recommend splitting the main beam into no more than three beams. We offer a fiber optic beam splitter that splits the main sensor optical beam into two to four beams. Please contact us with your requirements. A filter is placed in the inlet of each detector, and blocks all light except one wavelength, which is usually the primary or secondary emission wavelength for the material of interest. Filters with narrow bandwidths reject adjacent wavelengths, but also pass less of the wavelength of interest. Numerous optical filters are available on the market; we offer filters with a good balance between bandwidth and signal levels for most applications. The Guardian controller provides power for one or two sensors and up to eight optical detectors, produces up to eight source control output signals, and provides digital I/O functions (12 relays, 12 logic inputs). The controller is also the digital interface between all of these functions and your computer. Two controller models are available: The basic controller ( ) operates one sensor, the other ( ) runs two. Both models operate standard or gas compensation sensors. Guardian software provides all of the functions required for an eight sensor, eight output, multi-layer codeposition controller. Process settings, numeric data, and graphs can be displayed during all phases of deposition. The final component of an EIES system is your computer and the Guardian software supplied with every controller. The software provides everything you need to setup and operate the EIES system, and run a multi-material thin film deposition process. The software integrates a QCM, such as Q-pod transducer or SQM-242 card, for calibration of the EIES to a QCM reference, or for deposition control. The SQM-242 and SAM-242 option cards can also be used for calibration and control of analog devices. B2 - Thin Film Deposition Controllers, Monitors and Accessories

43 EIES Deposition Controllers Guardian (continued) HOW ELECTRON IMPACT EMISSION SPECTROSCOPY WORKS Guardian is powered by electron impact emission spectroscopy (EIES), a highly advanced method of controlling thin film properties during deposition of multiple films. The material being deposited is excited by a thermionic emitter, which results in creation of photons. The light created passes through an optical filter to a Specifications Sensors Operating pressure Temperature Size (approximate) Filament life (typical) Sensor-feedthrough linkage Feedthrough / flange Detector Photomultiplier tube (PMT) Spectral response Detection limit PMT gain Output resolution Optical entrance port Size Controllers Sensors Detectors Control outputs Digital I/O Power Size Compliance Guardian Sensor Patent US 7,719,681 B2 <5x10-4 Torr 450 C maximum during operation and / or bakeout 19 x 32 x 45 mm (0.75 x 1.25 x 1.75 in.) ~1000 hours at 2 ma emission (Yttria), 4 ma for Thoria Rigid ss tube, adjustable from 175 to 550 mm (7 to 22 in.) One optical and four electrical feedthroughs on CF40 (2 3 /4 in. ConFlat) Hamamatsu R7518 or equivalent 185 to 730 nm Better than 5 fw of optical input power 10 3 to 10 7 (detectors are independently adjustable) 20-bit Built-in filter holder, for filters up to 2.54 cm (1 in.) diameter and 5 mm (0.2 in.) thick 50 x 140 x 70 mm (2 x 5.5 x 2.75 in.) mounting holes on three sides (optional mounting brackets available) : operates one sensor : operates one or two sensors G22: Standard Sensor Assembly 55.9 cm (22 in.) G22: Gas Compensating Sensor Assembly 55.9 cm (22 in.) Eight optical detector channels Eight source control outputs, 0 to ±10 V (dc) programmable 12 relay outputs and 12 logic inputs V (ac), 50/60 Hz, 150 W 483 x 89 x 305 mm (19 x 3.5 x 12 in.) CE User interface software: Windows-based setup program included with Controller Software displays deposition rate: 4-digit numeric display of all channels, from to 9999 Å/s, and graphical X-Y scrolling plot with selectable scales Computer thickness: user-supplied: 4-digit numeric display with range selection, from to 9999 kå photomultiplier tube (PMT) detector, which measures the intensity of emission of the passed wavelength. Guardian then generates a signal to control the source for that material. Additional detectors, with appropriate optical filters, are used for multiple materials. Any computer with Windows 8 / 7 / Vista / XP / 2000 operating system, and Ethernet or RS-232 interface Electron Impact Emission Spectroscopy Thin Film Deposition Controllers, Monitors and Accessories - B3

44 EIES Deposition Controllers Guardian (continued) Configuration Guide Guardian uses EIES (Electron Impact Emission Spectroscopy) technology to detect and monitor the deposition of thin films. It is especially useful for CIGS applications. A complete Guardian system includes a Guardian controller, an EIES Sensor with the appropriate filament cable, and an Optical Detector with the appropriate detector cable and filter. Up to four materials can be monitored at once with a single sensor (eight materials for two sensors) using the optional beam splitter and the appropriate number of detectors. Guardian can also be paired with a Q-pod or SQM-242 QCM system for automatic calibration through the Guardian software. The following guide will help you select the options and accessories needed to build a complete Guardian system. B4 - Thin Film Deposition Controllers, Monitors and Accessories

45 EIES Deposition Controllers Guardian (continued) Ordering Information Guardian Controller (choose one) Guardian Controller for One Sensor (Standard or Gas Compensating) Guardian EIES Controller with one sensor input. This will work with either a standard or gas compensating sensor Guardian Controller for Two Sensors (Standard or Gas Compensating) Guardian EIES Controller with two sensor inputs. This will work with either a standard or gas compensating sensor in each of two inputs G G22 EIES Sensor (choose one) Guardian Standard Single Sensor and Feedthrough Assembly, 539 mm (22 in.), CF40 Flange Standard EIES single sensor. Includes CF40 (2 3 /4 in. ConFlat ) feedthrough assembly and in-vacuum hardware, standard 508 mm (20 in.) light pipe and in-vacuum EIES cable, 539 mm (22 in.). Other lengths available on request, min. 159 mm (6.25 in.), max. 813 mm (32 in.). Guardian Gas Compensating Sensor and Feedthrough Assembly, 539 mm (22 in.), CF40 Flange Gas compensating EIES sensor. Uses an additional filament to subtract the signal emitted by residual gas to achieve an accurate baseline. Detects materials that have difficulty when using a standard single sensor due to residual gas. Other lengths available on request, min. 229 mm (9 in.), max. 879 mm (34.6 in.). Beam Splitter (optional) Electron Impact Emission Spectroscopy Guardian Fiber Optic Beam Splitter (1:3) 400 mm length Splits the light beam from the sensor into three separate beams. Allows the detection of three materials from the same sensor. An optical detector and optical filter must be attached to each of the three ends x-yyy Guardian Fiber Optic Beam Splitter (1:x) yyy mm length A custom version of the standard beam splitter. The x value determines how many ways the beam is split (2 or 4) and yyy determines the length of the splitter (400 mm is typical). Filament Cable (choose one per sensor) New design attaches securely to feedthrough P P P P40 Cable that connects a standard single sensor feedthrough to the Guardian Controller. Guardian Single Filament cable, 3 m (10 ft.) Guardian Single Filament cable, 12 m (40 ft.) Cable that connects a gas compensating sensor feedthrough to the Guardian Controller. Guardian Dual Filament cable, 3 m (10 ft.) Guardian Dual Filament cable, 12 m (40 ft.) PMT Detector (select appropriate quantity) Guardian PMT Detector Works in conjunction with an optical filter to isolate and detect the light from the sensor for a given material being deposited. Optical filters sold separately. PMT Detector Cable (select appropriate quantity and length) Cable that connects the optical detector to the Guardian Guardian Detector cable, 3 m (10 ft.) Guardian Detector cable, 12 m (40 ft.) Thin Film Deposition Controllers, Monitors and Accessories - B5

46 EIES Deposition Controllers Guardian (continued) Ordering Information (continued) Guardian EIES Optical Filters (select appropriate quantity and wavelength) Filters the beam of light received by the optical detector to single out a specified wavelength. This allows the Guardian to monitor the specific material being deposited. Other filters available on request Guardian optical filter center wavelength 202 nm, BP10 nm, (Zn) Guardian optical filter center wavelength 241 nm, BP10 nm, (Co, Au) Guardian optical filter center wavelength 252 nm, BP10 nm, (Si) Guardian optical filter center wavelength 265 nm, BP10 nm, (Ge, Pt, Ta, Ir) Guardian optical filter center wavelength 267 nm, BP3 nm, (Au) Guardian optical filter center wavelength 294 nm, BP2 nm, (Hf) (Ga [when using a gas compensating sensor]) Guardian optical filter center wavelength 304 nm, BP2 nm (Ba, In [when using a gas compensating sensor]) Guardian optical filter center wavelength 325 nm, BP10 nm, (Cu, Cd) Guardian optical filter center wavelength 358 nm, BP10 nm, (Nb, U, Cr) Guardian optical filter center wavelength 364 nm, BP10 nm, (Ti, Pb) Guardian optical filter center wavelength 396 nm, BP10 nm, (Al) Guardian optical filter center wavelength 417 nm, BP2 nm, (Ga) Guardian optical filter center wavelength 451 nm, BP5 nm, (In) Monochromator Adjustable optical filter that allows the user to specify which wavelength to single out G1 Adjustable from nm. Replacement Parts for New Sensors and Feedthrough Assembly Gxx and -601-Gxx Emitter assembly for all Gx sensors used in Gxx and -601-Gxx Guardian Photomultiplier Tube Replacement Replaces the photomultiplier tube in the optical detector G22 Guardian Sensor EIES In-vacuum Cable, 559 mm (22 in.), other lengths available A gas compensating sensor uses two cables. For retrofit to new sensors. Replacement Part for Discontinued Sensors Guardian Sensor Filament Replacement (for discontinued and -052 sensors) Replacement filaments for EIES sensors. A gas compensating sensor uses two filaments. B6 - Thin Film Deposition Controllers, Monitors and Accessories

47 Quartz Crystal Sensors and Feedthroughs Quartz Crystal Sensors and Feedthroughs

48 This page left blank intentionally.

49 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor INFICON Front Load Single Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor / feedthrough combination that can be either welded or assembled with compression fittings. SENSOR CONFIGURATIONS Two sensor configurations are offered: the standard version and the right angle (compact) version. The standard version is designed for installation from the side or bottom of the chamber having the cooling tubes parallel to the crystal face. The right angle version is designed for installation through the top of the vacuum system having the water cooling tubes perpendicular to the crystal face. Optionally, sensors can be ordered with a pneumatically driven crystal shutter to protect the crystal during source warm up, when not used during deposition of an alternate material, or to extend crystal life when used with RateWatcher or rate sampling. The shutter is designed to flip down allowing easy crystal replacement. The exposed crystal electrode is fully grounded to effectively eliminate problems due to RF interference. FEEDTHROUGHS INFICON offers two types of feedthroughs, either a 2.54 cm (1 in.) bolt feedthrough or a CF40 (2 3 /4 in. ConFlat) feedthrough. KF40 feedthroughs are available on request. FEEDTHROUGH CONNECTION Front Load Single Sensors can be ordered in combination with a feedthrough. The sensor / feedthrough connection can be either welded or made with compression fittings. Compression fittings allow for easy adjustability without the need for brazing or welding. The feedthrough can be moved along the length of the tubes allowing the length inside the vacuum systems to be adjusted over a range of 20.3 to 71.1 cm (8 to 28 in.) for E length sensors and 20.3 to cm (8 to 48 in.) for G length sensors. Once the desired length is determined, the compression fittings allow for a finger tight tube seal. Alternately, a welded connection may be chosen. If a welded connection is desired, a sensor length specification form, provided by INFICON, must be completed prior to ordering and submitted with the order. Quartz Crystal Sensors and Feedthroughs Advantages Front load crystal holder Easy installation Available with cm (1 in.) bolt feedthrough - CF40 (2 3 /4 in. ConFlat) feedthrough Adjustable length if ordered with compression fittings Sensor / feedthrough combinations available welded to customer specified lengths No brazing required if ordered with compression fittings or welded to feedthrough Thin Film Deposition Controllers, Monitors and Accessories - C1

50 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Ordering Information Front Load Single Sensor (with In-vacuum cables) S L Type of Sensor (Includes in-vacuum cable. Crystals sold separately.) Standard sensor (water lines parallel) Right angle sensor (water lines perpendicular) A B Feedthrough Connection SEE NOTE 4 Sensor not connection to feedthrough Sensor welded to feedthrough Feedthrough equipped with Ultra-Torr compression fittings (allows for adjustable sensor length) Shutter Assembly SEE NOTE 4 None Standard shutter Length of Sensor SEE NOTES 1 and 3 Standard length: 20.3 to 71.1 cm (8 to 28 in.) includes 78.1 cm (30.75 in.) in-vacuum cable. SEE NOTE 6 Extended length: 71.1 to cm (28 to 48 in.) includes cm (60 in.) in-vacuum cable. SEE NOTE E G Feedthrough SEE NOTE 2 None 2.54 cm (1 in.) bolt CF40 (2 3 /4 in. ConFlat) The following combinations are not available (SEE NOTES 4 and 5): SL-A1E38, SL-A1G38, SL-B1E38, SL-B1G38, SL-A1E47, SL-A1G47, SL-B1E47, SL-B1G47 Custom parts, special bends and other non-standard parts available Consult factory NOTE 1: Orders for a WELDED sensor / feedthrough combination cannot be accepted without a completed sensor length specification form (provided by INFICON). Once a welded sensor order is confirmed, it cannot be canceled. Sensor NOTE 2: Feedthrough configuration varies depending on options selected (with or without shutter, type of feedthrough, etc). Example: SL-A0E37 uses feedthrough PN while SL-A1E37 uses feedthrough PN G1. In-vacuum cable Feedthrough Substrate Source Shutter Controller or Monitor NOTE 3: Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough (see length specification form). NOTE 4: Sensors ordered with shutters and 1 in. bolt style feedthrough can only be welded (compression fittings not available) cm (6 in.) BNC cable Oscillator or XIU Oscillator (XIU) to instrument interconnect cable NOTE 5: Front Load sensors ordered with a CF40 feedthrough and a shutter cannot be welded due to dimensional limits of the CF40. NOTE 6: For sensors ordered without a weld connection (option 0 or 8 ), tubes are made to a length of approximately 76.2 cm (30 in.) for E length and approximately cm (48 in.) for G length sensors. Operation with a cm (60 in.) cable requires a monitor / controller with ModeLock technology (XTC/3, IC6, Cygnus 2). C2 - Thin Film Deposition Controllers, Monitors and Accessories

51 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Specifications SL-A Series Standard Single Sensor Maximum bakeout temp with no water 130 C Maximum operating isothermal environment temperature with minimum water flow 400 C SL-A Size (maximum envelope without shutter) Water tube Crystal exchange Mounting Installation Requirements Feedthrough Water flow rate Water quality Materials Body and holder Springs, electrical contacts Water tubes Connector (Microdot) 27 x x mm (1.063 x 2.42 x 0.69 in.) 3.2 mm ( 1 /8 in.) OD seamless stainless steel Front loading; self-contained package for ease of exchange Two #4-40 tapped holes on the back of the sensor body Two pass water 4.8 mm ( 3 /16 in.) OD tubing with Microdot coax connector Minimum water flow cm 3 /min, 30 C max (Do not allow to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur Extremely dirty water may result in loss of cooling capacity 304 type stainless steel Au plated Be-Cu S-304, 3.2 mm ( 1 /8 in.) OD x mm (0.015 in.) wall thickness seamless stainless steel tubing Stainless steel, Teflon and glass insulated Insulators >99% Al 2 O 3 Wire Teflon insulated copper Braze Crystal Vacuum process high temperature Ni-Cr alloy 14 mm (0.550 in.) diameter Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C3

52 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Specifications SL-B Series Right Angle Single Sensor Specifications Maximum bakeout temp. with no water 130 C Maximum operating isothermal environment temperature with minimum water flow 400 C SL-B size (maximum envelope without shutter) Water tube Crystal exchange Mounting Installation Requirements Feedthrough Other Water flow rate Water quality Materials Body and holder Springs, electrical contacts Water tubes Connector (Microdot) x x mm (1.11 x 1.06 x 1.06 in.) 3.2 mm ( 1 /8 in.) OD seamless stainless steel Front loading; self-contained package for ease of exchange Two #4-40 tapped holes on the back of the sensor body Two pass water 4.8 mm ( 3 /16 in.) OD tubing with Microdot coax connector XIU or oscillator to match specific controller, solenoid valve assembly G1 for shuttered sensors Minimum water flow cm 3 /min, 30 C max Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity 304 type stainless steel Au plated Be-Cu S-304, 3.2 mm ( 1 /8 in.) OD x mm (0.015 in.) wall thickness seamless stainless steel tubing Stainless steel, Teflon and glass insulated Insulators >99% Al 2 O 3 Wire Teflon insulated copper Braze Crystal Vacuum process high temperature Ni-Cr alloy 14 mm (0.550 in.) diameter Specifications Feedthrough Specifications NOTE: Sensor / feedthrough combination specifications are determined by lowest component specification 2.54 cm (1 in.) Bolt and Ultra-Torr (compression fitting) Terminations: Materials Temperature Mounting CF40 (2 3 /4 in. ConFlat) with welded terminations: Materials Temperature Mounting 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON Operational environment to 300 C with water cooling or 165 C without 25.8 mm ±0.25 mm (1.015 in. ±0.010 in.) diameter aperture 304 stainless steel, Teflon, ceramic, beryllium nickel Operational environment to 450 C with water cooling or 165 C without Mates with 7 cm (2 3 /4 in.) ConFlat flanges with 35 mm (1.375 in.) minimum ID C4 - Thin Film Deposition Controllers, Monitors and Accessories

53 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Spare Parts List PN Description Retainer spring (for crystal holder) Ceramic retainer In-vacuum cable, 78.1cm (30.75 in.) Set screw (for female coax) Teflon screw (for leaf spring) P4 Coupling (for bellows assembly) P2 Bellows assembly (coupling not included) P1 Finger spring contact G13 In-vacuum cable, cm (60 in.) Dimensions PN G P P P G G G G1 Description Crystal holder (includes retainer spring) Female coax Insulator (underneath leaf spring) Leaf spring Shutter module (bellows assembly, shaft assembly, and shutter assembly), 76.2 cm (30 in.) tubing Shutter module (bellows assembly, shaft assembly, and shutter assembly), cm (48 in.) tubing Shaft assembly (part of shutter module) Shutter assembly (part of shutter module) SL-A _ E Series Standard Single Sensor (sensor only) SHUTTER ADAPTER REF. ACTUATOR REF [782.3] 1.06 [27] 0.92 [23.4] 0.69 [17.5] 0.20 [5.1] [782.1] 1.33 [33.8] 1.04 [26.4] #4-40, 4 PLCS WATER WATER Quartz Crystal Sensors and Feedthroughs Dimensions SL-B _ E Series Right Angle Single Sensor (sensor only) 0.40 [10.2] 0.13 [3.3] 0.74 [18.8] CABLE [781] LONG 31.1 [790] 2.24 [57.0] 1.83 [46.5] SHUTTER ADAPTER REF. WATER 1.62 [41.1] WATER 0.34 [8.6] ASSY. SHUTTER MODULE B G1 AIR SHUTTER REF. (SHOWN ROTATED FOR CLARITY) 0.63 [16] 1.93 [49.0] 2.08 [52.5] 0.40 [10.1] #4-40, 4 PLCS 0.20 [5.1] 0.74 [18.8] 0.35 [8.9] 0.13 [3.3] 0.35 [8.9] WATER [776.5] 0.98 [24.9] 0.69 [17.5] 0.58 [14.7] 0.46 [11.7] 1.04 [26.4] 0.70 [17.8] 1.06 [27] 0.92 [23.4] 0.40 [10.2] 0.58 [14.7] REF WATER 0.06 [1.5] Thin Film Deposition Controllers, Monitors and Accessories - C5

54 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Dimensions Feedthrough used for SL-A0_47, SL-A0_40, SL-B0_47, and SL-B0_40 Sensor / Feedthrough Combinations (Feedthrough PN ) CL DIA. (6) 1.29 [6.73] [32.8] 2.75 [69.9] CL 0.40 [10.2] [4.77] 0.20 [5.1] 0.60 [15.2] 0.30 [7.6] 5.00 [127] 0.5 [12.7] 9.00 [228.60] NOTE: Metric dimensions are for reference only. Dimensions Feedthrough used for SL-A1_40 and SL-B1_40 Sensor / Feedthrough Combinations (Feedthrough PN G1) 0.26 [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC 0.60 [15.24] Mating air fitting (10-32) for G1 solenoid valve 0.30 [7.62] 1.29 [32.67] 0.35 [8.89] 0.35 [8.88] 0.50 [12.69] 2.25 [57.15] 0.50 [12.70] 2.73 [69.34] CONFLAT FLANGE 5.00 [127.00] 9.00 [228.60] C6 - Thin Film Deposition Controllers, Monitors and Accessories

55 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Dimensions Feedthrough used for SL-A0_48 and SL-B0_48 Sensor / Feedthrough Combinations (Feedthrough PN G2) 0.26 [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7]BC 0.60 [15.26] 0.30 [7.62] 9.91 [251.83] 0.20 [5.07] 2.73 [69.34] CONFLAT FLANGE 0.40 [10.16] 5.00 [127.00] 1.29 [32.78] 0.50 [12.70] Quartz Crystal Sensors and Feedthroughs Feedthrough used for SL-A1_48 and SL-B1_48 Sensor / Feedthrough Combinations (Feedthrough PN G2) 0.26 [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC 0.60 [15.24] Mating air fitting (10-32) for G1 solenoid valve 0.30 [7.62] 0.35 [8.86] 1.29 [32.64] 0.35 [8.76] 0.50 [12.57] 2.73 [69.34] CONFLAT FLANGE 5.00 [127.00] 2.25 [57.15] 0.50 [12.70] 9.91 [251.83] Thin Film Deposition Controllers, Monitors and Accessories - C7

56 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Dimensions Feedthrough used for SL-A0_37, SL-B0_37, SL-A0_30 and SL-B0_30 Sensor / Feedthrough Combinations (Feedthrough PN ) 0.75 [19.0] 5.00 [127.0] A A MICRODOT CONNECTOR [5.08] [10.16] [323.8] 2.00 [50.8] 0.30 [9.5] VITON O-RING #2-122 WASHER #1-14-UNS THD [5.08] [3.96] VIEW A - A 5.00 [127.0] BNC Connector 0.75 [19.0] Feedthrough used for SL-A0_38 and SL-B0_38 Sensor / Feedthrough Combinations (Feedthrough PN G1) C8 - Thin Film Deposition Controllers, Monitors and Accessories

57 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Dimensions Feedthrough used for SL-A1_37, SL-B1_37, SL-A1_30 and SL-B1_30 Sensor / Feedthrough Combinations (Feedthrough PN G1) 0.75 [19.0] 5.00 [127.0] A A MICRODOT CONNECTOR 0.30 [9.5] [323.8] 2.00 [50.8] 5.00 [127.0] VITON O-RING #2-122 WASHER #1-14-UNS THD BNC Connector Quartz Crystal Sensors and Feedthroughs 0.75 [19.0] [12.70] [6.35] [7.11] [4.78] [3.18] VIEW A - A Thin Film Deposition Controllers, Monitors and Accessories - C9

58 Quartz Crystal Sensors and Feedthroughs Front Load Single Sensor (continued) Dimensions Sensor Length Specification for SL-A _ 7 Sensor / Feedthrough Combinations REF cm 8 48 in. Sensor Length Specification for SL-B _ 7 Sensor / Feedthrough Combinations G G G2 SENSOR or SENSOR W SHUTTER: SL-BOE00 SL-B1EOO SL-B0G00 SL-B1G G cm 8 48 in. C10 - Thin Film Deposition Controllers, Monitors and Accessories

59 Quartz Crystal Sensors and Feedthroughs Cool Drawer Single Sensor The Cool Drawer Single Sensors allow crystal installation into the sensor from the side, convenient for systems with insufficient room for front load crystal installation. The Cool Drawer Single Sensor employs the Cool Drawer Crystal Holder which is thermally shielded by the water-cooled housing ensuring excellent crystal performance. SENSOR CONFIGURATIONS Two sensor configurations are offered: the standard version and the right angle version. The standard version is designed for installation from the side or bottom of the chamber and the cooling tubes and the crystal face are parallel. The right angle version is designed for installation through the top of the vacuum system and the water cooling tubes are perpendicular to the crystal face. Both versions are available with or without a crystal shutter. The exposed crystal electrode is fully grounded to effectively eliminate problems due to RF interference. The housing is provided with two tapped (4-40) holes for convenient mounting. FEEDTHROUGHS INFICON offers two choices for feedthrough connection types: either a 2.54 cm (1 in.) bolt feedthrough or a CF40 (2 3 /4 in. ConFlat) feedthrough. Quartz Crystal Sensors and Feedthroughs FEEDTHROUGH CONNECTIONS Cool Drawer Single Sensors must be ordered in combination with a feedthrough. The sensor / feedthrough connection can be either welded or made with compression fittings. Compression fittings allow for easy adjustability without the need for brazing or welding. The feedthrough can be moved along the length of the tubes allowing the length inside the vacuum system to be adjusted over a range of 10 to 66 cm (4 in. to 26 in.). Once the desired length is determined, the compression fittings allow for a finger tight tube seal. When selected with the welded CF40 (2 3 /4 in. ConFlat), the sensor is designed for high temperature processes where reliability is critical. Constructed of stainless steel and ceramic materials it is suitable for applications requiring high temperature bakeout (see specifications). Advantages No internal cables Cool Drawer crystal holder Easy installation Bakeable if ordered with welded CF40 flange Available with: - CF40 (2 3 /4 in. ConFlat) feedthrough cm (1 in.) bolt feedthrough Adjustable length if ordered with compression fittings No brazing required if ordered with compression fittings Sensor / feedthrough combinations available welded to customer specified lengths Thin Film Deposition Controllers, Monitors and Accessories - C11

60 Quartz Crystal Sensors and Feedthroughs Cool Drawer Single Sensor (continued) Ordering Information Cool Drawer Single Sensor (with conductor tube) C D S Type of Sensor (crystals sold separately) Standard Cool Drawer (water lines parallel to crystal face) Right angle Cool Drawer (water lines perpendicular to crystal face) A B 7 8 Feedthrough Connection Sensor welded to feedthrough SEE NOTE 3 Feedthrough equipped with Ultra-Torr compression fittings (allows for adjustable sensor length). Not available with CF40 feedthrough and shutter combination. Shutter Assembly None Standard shutter 0 1 Feedthrough SEE NOTES 2 and 5 Length of Sensor SEE NOTE cm (1 in.) bolt CF40 (2 3 /4 in. ConFlat) Length 10.2 to 66 cm (4 to 26 in.) F The following combinations are not available: CDS-A1F48, CDS-B1F48 Custom parts, special bends and other non-standard parts available Consult factory In-vacuum cable Feedthrough 15.2 cm (6 in.) BNC cable Oscillator or XIU Sensor Substrate Source Shutter Controller or Monitor Oscillator (XIU) to instrument interconnect cable NOTE 1: Orders for a WELDED sensor / feedthrough combination cannot be accepted without a completed sensor length specification form (provided by INFICON). Once a welded sensor order is confirmed, it cannot be canceled. NOTE 2: Feedthrough configuration varies depending on options selected (type of feedthrough, and connection). Example: CDS-A1F47 and -B1F47 use a twopiece hybrid feedthrough design due to dimensional limits of a standard CF40. NOTE 3: Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough (see length specification form). NOTE 4: For sensors ordered without a weld connection (option 8 ), tubes are made to a length of approximately 76.2 cm (30 in.) for standard sensors and approximately 66 cm (26 in.) for right angle sensors. NOTE 5: Cool Drawer sensors are not available without a feedthrough. C12 - Thin Film Deposition Controllers, Monitors and Accessories

61 Quartz Crystal Sensors and Feedthroughs Cool Drawer Single Sensor (continued) Specifications CDS series Cool Drawer Single Sensor Specifications Finish Stainless steel, gold plated cool drawer Cooling water 0.2 GPM using 3.2 mm ( 1 /8 in.) OD tube (Do not allow to freeze) Electrical connection One standard female BNC on atmosphere side Crystal (sold separately) 14 mm (0.550 in.) diameter Air supply Shuttered sensors require 55 to 60 psi (gauge) regulated cm (1 in.) Bolt and Compression Fitting Terminations: Materials 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON Temperature Operational environment to 300 C with water cooling or 165 C without Mounting 25.8 mm ±0.25 mm (1.015 in. ±0.010 in.) diameter aperture CF40 (2 3 /4 in. ConFlat) Welded Terminations: Materials 304 stainless steel, Teflon, ceramic, beryllium nickel Temperature Operational environment to 450 C with water cooling or 200 C without Mounting Mates with 7 cm (2 3 /4 in.) ConFlat flanges with 35 mm (1.375 in.) minimum ID Spare Parts List PN Description Cool Drawer Sensor crystal retainer Cool Drawer Sensor drawer and retainer combo Cool Drawer Sensor drawer Shutter bracket Bellows cover Shutter Link * Actuator * Bellows support * Bellows cover * Threaded shaft Spacer * Bellows tube Bellows and cover assembly (Includes all parts marked with *) PN Description * Hex nut * Lockwasher * #4-40 x 3 /16 Phillips screw #4 Lockwasher Shoulder screw Washer * 6-32 x 3 /16 in. set screw * Spring Conduit brazed assembly long pin Conduit brazed assembly short pin * Bellows with 35 in. tube O-Ring for 5 port adjustable feedthrough Washer for 5 port adjustable feedthrough Quartz Crystal Sensors and Feedthroughs NOTE: Items marked with * are included in Thin Film Deposition Controllers, Monitors and Accessories - C13

62 Quartz Crystal Sensors and Feedthroughs Cool Drawer Single Sensor (continued) Dimensions CDS-A0F38 and CDS-B0F38 Cool Drawer Single Sensor / Feedthrough Combinations C14 - Thin Film Deposition Controllers, Monitors and Accessories

63 Quartz Crystal Sensors and Feedthroughs Cool Drawer Single Sensor (continued) Dimensions CDS-A0F47 and CDS-B0F47 Cool Drawer Single Sensor / Feedthrough Combinations cm (4.0 in.) cm (4 26 in.) 1.27 cm (0.5 in.) REF 7 cm DIA. (2.75 in.) 2.84 cm (1.12 in.) BRAZE (3) PLCS 3.24 cm (1.27 in.) 2.84 cm (1.12 in.) 1.22 cm (0.48 in.) 1.8 cm (0.71 in.) CDS-A0F47 SEAL #4 40 THD (2) PLCS BNC CONN cm (1/8 in.) OD WATER TUBES 0.67 cm (0.265 in.) DIA (6) PLACES 7 (2-3/4 in.) CONFLAT FLANGE 0.79 cm DIA. (0.312 in.) 0.07 cm (0.18 in.) 0.38 cm (0.15 in.) cm (4 26 in.) 1.8 cm (0.71 in.) SURFACE OF SENSOR CRYSTAL BRAZE (3) PLCS cm (4.0 in.) 1.27 cm (0.5 in.) REF 7 cm DIA. (2.75 in.) Quartz Crystal Sensors and Feedthroughs 3.24 cm (1.27 in.) SURFACE OF SENSOR CRYSTAL CDS-B0F47 SEAL BNC CONN cm (1/8 in.) OD WATER TUBES 0.67 cm (0.265 in.) DIA (6) PLACES 7 (2-3/4 in.) CONFLAT FLANGE 3.63 cm (1.43 in.) APPROX. Thin Film Deposition Controllers, Monitors and Accessories - C15

64 Quartz Crystal Sensors and Feedthroughs Cool Drawer Single Sensor (continued) Dimensions Sensor Length Specification for CDS-A0F47 Sensor / Feedthrough Combinations 1.20 cm (0.475) REF X cm 4 26 in. Centerline of crystal aperture Dimensions Sensor Length Specification for CDS-A1F47 Sensor / Feedthrough Combinations 1.20cm (0.475) REF cm 4 26 in. Centerline of crystal aperture Dimensions Sensor Length Specification for CDS-B0F47 Sensor / Feedthrough Combinations.38cm (.150) REF cm 4 26 in. Surface of Sensor Crystal C16 - Thin Film Deposition Controllers, Monitors and Accessories

65 Quartz Crystal Sensors and Feedthroughs Cool Drawer Single Sensor (continued) Dimensions Sensor Length Specification for CDS-B1F47 Sensor / Feedthrough Combinations Surface of sensor crystal 0.38 cm cm (0.15 in.) REF 4 26 in This gap is shown for clarity. The actual dimension equals Dimensions Sensor Length Specification for CDS-B0F37 Sensor / Feedthrough Combinations cm 4 26 in. WASHER 5.1 cm (2.0 in.) OD x 2.5 cm (1.0 in.) ID Quartz Crystal Sensors and Feedthroughs 1.22 cm (0.481 in.) 2.84 cm (1.12 in.) NUT 1 14 UNS x 1.4 cm (0.55 in.) THK 0.32 cm (1/8 in.) OD TUBE x 0.16 cm (0.062 in.) THK BOLT CRYSTAL VITON O-RING BNC CONNECTOR 0.81 cm (0.318 in.) 0.38 cm (0.15 in.) REF SURFACE OF SENSOR CRYSTAL Thin Film Deposition Controllers, Monitors and Accessories - C17

66 Quartz Crystal Sensors and Feedthroughs Front Load Dual Sensor INFICON Front Load Dual Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The dual sensor provides a backup crystal and is essential for critical processes where it is desirable to have a second crystal in the vacuum chamber. The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor / feedthrough combination that can be either welded or assembled with compression fittings. SENSOR CONFIGURATIONS The Front Load Dual Sensor is available in a standard mount configuration where the water tubes are parallel to the crystal face. A pneumatically driven crystal shutter comes standard to protect the backup crystal, while the primary crystal monitors the deposition rate. The shutter is designed to flip down allowing easy crystal replacement. The exposed crystal electrode is fully grounded to effectively eliminate problems due to RF interference. FEEDTHROUGHS INFICON offers two feedthroughs, a 2.54 cm (1 in.) bolt feedthrough or a CF40 (2 3 /4 in. ConFlat) feedthrough. KF40 feedthroughs are available on request. FEEDTHROUGH CONNECTION Front Load Dual Sensors can be ordered in combination with a feedthrough. The sensor / feedthrough connection can be either made with compression fittings or welded when in combination with a 2.54 cm (1 in.) bolt. If a welded connection is desired, a sensor length specification form, provided by INFICON, must be completed prior to ordering. Compression fittings allow for easy adjustability without the need for brazing or welding. The feedthrough can be moved along the length of the tubes allowing the length inside the vacuum systems to be adjusted over a range of 20.3 to 71.1 cm (8 to 28 in.) for E length sensors and 20.3 to cm (8 to 48 in.) for G length sensors. Once the desired length is determined, the compression fittings allow for a finger tight tube seal. Advantages Dual crystals Crystal shutter Front load crystal holder Easy installation Available with: cm (1 in.) bolt feedthrough - CF40 (2 3 /4 in. ConFlat) feedthrough Adjustable length if ordered with compression fittings No brazing required if ordered with compression fittings or welded to feedthrough Sensor / feedthrough combinations available welded to customer specified lengths. C18 - Thin Film Deposition Controllers, Monitors and Accessories

67 Quartz Crystal Sensors and Feedthroughs Front Load Dual Sensor (continued) Ordering Information Front Load Dual Sensor (with in-vacuum cables) D L Feedthrough Connection Type of Sensor (Includes in-vacuum cables. Crystals sold separately.) Standard dual sensor (water lines parallel to crystal face) with shutter A Sensor not connected to feedthrough Sensor welded to feedthrough Feedthrough equipped with Ultra-Torr compression fittings (allows for adjustable sensor length) Length of Sensor SEE NOTES 1 and 3 Standard length 20.3 to 71.1 cm (8 to 28 in.) includes two 78.1 cm (30.75 in.) in-vacuum cables. SEE NOTE 5 Extended length 71.1 to cm (28 to 48 in.) includes two cm (60 in.) in-vacuum cables. SEE NOTE 5 E G Feedthrough SEE NOTE 2 None 2.54 cm (1 in.) bolt CF40 (2 3 /4 in. ConFlat) The following combinations are not available (See Notes 4 and 5): DL-AE47, DL-AG47 Custom parts, special bends and other non-standard parts available Consult factory Quartz Crystal Sensors and Feedthroughs Sensor NOTE 1: Orders for a WELDED sensor / feedthrough combination cannot be accepted without a completed sensor length specification form (provided by INFICON). Once a welded sensor order is confirmed, it cannot be canceled. (2) In-vacuum cables Substrate Source Shutter Controller or Monitor NOTE 2: Feedthrough configuration varies depending on options selected (type of feedthrough and connection). Example: DL-AE37 uses feedthrough PN G1 while DL-AE48 uses feedthrough PN G2. Feedthrough G1 Solenoid Valve To PSIG air supply 15.2 cm (6 in.) BNC cable (2) Oscillators or XIUs (2) Oscillators (XIUs) to instrument interconnect cables To crystal switch relay NOTE: G1, CrystalTwo switch option allows operation with only one oscillator (XIU). (2) Indicates that two XIU or oscillator packages are required for a typical dual sensor installation. NOTE 3: Sensor lengths are measured from center of the crystal closest to the end of the sensor to the vacuum side (sealing surface) of the feedthrough (see length specification form). NOTE 4: Front Load Dual sensors ordered with a CF40 feedthrough cannot be welded due to dimensional limits of the CF40. NOTE 5: For sensors ordered without a weld connection (option 0 or 8 ), tubes are made to a length of approximately 76.2 cm (30 in.) for E length and approximately cm (48 in.) for G length sensors. Operation with cm (60 in.) in-vacuum cables requires a monitor / controller with ModeLock technology (XTC/3, IC6, Cygnus 2) Thin Film Deposition Controllers, Monitors and Accessories - C19

68 Quartz Crystal Sensors and Feedthroughs Front Load Dual Sensor (continued) Specifications DL-A _ 0 0 series Front Load Dual Sensor Specifications Maximum bakeout temp with no water 130 C Maximum operating isothermal environment temperature with minimum water flow 400 C Size (maximum envelope without shutter) Water tube and coax length, E sensor Crystal exchange Mounting Installation Requirements Feedthrough Other Utilities Water quality Materials Body and holder Springs Water tubes x x mm (1.54 x 3.23 x 1.95 in.) Standard 762 mm (30 in.) Front-loading, self-contained package for ease of exchange Shutter flips up to ease access to the holders Two #4-40 tapped holes on the back of the sensor body One CF40 (2 3 /4 in. ConFlat) with two Microdot, two pass water and air or One 2.54 cm (1 in.) bolt with two Microdot, two pass water and air 1) Valve assembly for air PN G1 2) Two oscillators or one oscillator and G1 CrystalTwo Switch designed to interface with the deposition controller. 3) For automatic operation, the deposition process controller must be designed for the implementation of this feature. 1) Minimum water flow cm 3 /min, 30 C max (Do not allow to freeze.) 2) Air, 70 to 80 psi (gauge) very low volume, DO NOT EXCEED 100 psi (gauge) Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity. 304 Type stainless steel Au plated Be-Cu Insulators >99% Al 2 O 3 Wire Teflon insulated copper Other mechanical parts Braze Crystal S-304, 3.2 mm ( 1 /8 in.) OD x mm (0.015 in.) wall thickness seamless stainless steel tubing 304 or 18-8 stainless steel Vacuum process high temperature Ni-Cr alloy 14 mm (0.550 in.) diameter C20 - Thin Film Deposition Controllers, Monitors and Accessories

69 Quartz Crystal Sensors and Feedthroughs Front Load Dual Sensor (continued) Specifications Feedthrough Specifications NOTE: Sensor / Feedthrough combination specifications are determined by lowest component specification 2.54 cm (1 in.) Bolt and Ultra-Torr (Compression Fitting) Terminations: Materials 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON Temperature Operational environment to 300 C with water cooling or 165 C without Mounting 25.8 mm ±0.25 mm (1.015 in. ±0.010 in.) diameter aperture CF 40 Welded Terminations: Materials 304 stainless steel, Teflon, ceramic, beryllium nickel Temperature Operational environment to 450 C with water cooling or 165 C without Mounting Mates with 7 cm (2 3 /4 in.) ConFlat flanges with 35 mm (1.375 in.) minimum ID Spare Parts List PN Description Retainer spring (for crystal holder) Ceramic retainer In-vacuum cable, 78.1 cm (30.75 in.) Set screw (for female coax) Teflon screw (for leaf spring) P P P G P P P G G G G G13 Coupling (for bellows assembly) Bellows assembly (coupling not included) Finger spring contact Crystal holder (includes retainer spring) Female coax Insulator (underneath leaf spring) Leaf spring Shutter module (bellows assembly, shaft assembly, and shutter assembly), 76.2 cm (30 in.) tubing Shutter module (bellows assembly, shaft assembly, and shutter assembly), cm (48 in.) tubing Shaft assembly (part of shutter module) Shutter assembly (part of shutter module) In-vacuum cable cm (60 in.) Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C21

70 Quartz Crystal Sensors and Feedthroughs Front Load Dual Sensor (continued) Dimensions Sensor Length Specification for DL-AE37 or DL-AG37 Sensor / Feedthrough Combinations 0.47 REF CUSTOMER SPECIFIED XXX (INCHES) XXX (CENTIMETERS) cm 8 48 in. Dimensions DL-AE00 or DL-AG00 Front Load Dual Sensor (Sensor Only) C22 - Thin Film Deposition Controllers, Monitors and Accessories

71 Quartz Crystal Sensors and Feedthroughs Front Load Dual Sensor (continued) Dimensions Feedthrough used for DL-A _ 4 0 Sensor / Feedthrough Combination (Shown with G1 Solenoid Valve) 24 VAC OR VDC FOR OPERATION Dimensions Quartz Crystal Sensors and Feedthroughs Feedthrough Used For DL-A _ 4 8 Sensor / Feedthrough Combination.26 [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC.4 [10.16] 2.25 [57.15].45 [11.42].45 [11.46] TYP 1.28 [32.64].2 [5.09] TYP Mating air fitting (10-32) for G1 Solenoid Valve 1.5 [38.09] TYP 3 PLCS 1.28 [32.64].5 [12.7] 2.73 [69.34] CONFLAT FLANGE 6.5 [165.1] 9.91 [251.83] TYP 3PLCS Thin Film Deposition Controllers, Monitors and Accessories - C23

72 Quartz Crystal Sensors and Feedthroughs Cool Drawer Dual Sensor The Cool Drawer Dual Sensor is designed for use in critical processes where it is desirable to have a second crystal in the vacuum chamber. Water cooled, cast stainless steel sensor body, two Cool Drawer crystal holders and a pneumatically actuated shutter provide for a rugged sensor head with the extra reliability of a backup crystal. A cleaner, more reliable vacuum system installation is possible as there are no coaxial cables inside the chamber. SENSOR CONFIGURATIONS Two sensor configurations are offered: the standard version and the right angle version. The standard version is designed for installation from the side or bottom of the chamber and the cooling tubes and the crystal face are parallel. The right angle version is designed for installation through the top of the vacuum system and the water cooling tubes are perpendicular to the crystal face. In either configuration, sensor head length can range from 10 to 66 cm (4 to 26 in.). FEEDTHROUGHS INFICON offers two choices for feedthrough types: a 2.54 cm (1 in.) bolt feedthrough or a CF40 (2 3 /4 in. ConFlat) feedthrough. FEEDTHROUGH CONNECTIONS Cool Drawer Dual Sensors must be ordered in combination with a feedthrough. The sensor / feedthrough connection can be either welded or made with compression fittings. Compression fittings allow for easy adjustability without the need for brazing or welding. Sensor head length is adjustable from 10 to 66 cm (4 to 26 in.). When selected with the welded CF40, the sensor is designed for high temperature processes where reliability is critical. Constructed of stainless steel and ceramic materials, it is suitable for applications requiring high temperature bake out (see specifications). The Cool Drawer Dual Sensor configured with the CF40 (2 3 /4 in. ConFlat) option is attached to a special two piece ConFlat feedthrough. This allows the sensor head to be rotated independently of the flange and circumvents the dimensional limitations of the CF40 flange. Sensor / feedthrough length can be specified between 10 and 66 cm (4 to 26 in.). Advantages Dual crystals Cool Drawer crystal holder No internal cables Crystal shutter Available with: - CF40 (2 3 /4 in. ConFlat) feedthrough cm (1 in.) bolt feedthrough Bakeable if ordered with welded CF40 (2 3 /4 in. ConFlat) Adjustable length if ordered with compression fittings Sensor / feedthrough combinations available welded to customer specified lengths C24 - Thin Film Deposition Controllers, Monitors and Accessories

73 Quartz Crystal Sensors and Feedthroughs Cool Drawer Dual Sensor (continued) Ordering Information Cool Drawer Dual Sensor (With Conductor Tubes) C D D Feedthrough Connection Type of Sensor (crystals sold separately) Standard Cool Drawer Dual sensor (water lines parallel to crystal face) with shutter A 7 8 Sensor welded to feedthrough Feedthrough equipped with Ultra-Torr compression fittings (allows for adjustable sensor length). Not available with CF40 feedthrough. Right angle Cool Drawer Dual sensor (water lines perpendicular to crystal face) with shutter Length of Sensor SEE NOTE 3 Length 10.2 to 66 cm (4 to 26 in.) SEE NOTE 4 B F 3 4 Feedthrough SEE NOTES 2 and cm (1 in.) bolt CF40 (2 3 /4 in. ConFlat) Quartz Crystal Sensors and Feedthroughs Custom parts, special bends and other non-standard parts available Consult factory Sensor NOTE 1: Orders for a WELDED sensor / feedthrough combination cannot be accepted without a completed sensor length specification form (provided by INFICON). Once a welded sensor order is confirmed, it cannot be canceled. (2) In-vacuum cables Substrate Source Shutter Controller or Monitor NOTE 2: Feedthrough configuration varies depending on options selected (type of feedthrough, and connection). Example: CDD-AF47 and -BF47 use a two-piece hybrid feedthrough design due to dimensional limits of a standard CF40. Feedthrough G1 Solenoid Valve To PSIG air supply 15.2 cm (6 in.) BNC cable (2) Oscillators or XIUs (2) Oscillators (XIUs) to instrument interconnect cables To crystal switch relay NOTE 3: Sensor lengths are measured from center of the crystal closest to the end of the sensor to the vacuum side (sealing surface) of the feedthrough (see length specification form). NOTE 4: For sensors ordered without a weld connection (option 8 ), tubes are made to a length of approximately 76.2 cm (30 in.) for standard sensors and approximately 66 cm (26 in.) for right angle sensors. NOTE 5: Cool Drawer sensors are not available without a feedthrough. NOTE: G1, CrystalTwo switch option allows operation with only one oscillator (XIU). (2) Indicates that two XIU or oscillator packages are required for a typical dual sensor installation. Thin Film Deposition Controllers, Monitors and Accessories - C25

74 Quartz Crystal Sensors and Feedthroughs Cool Drawer Dual Sensor (continued) Specifications CDD Series Cool Drawer Dual Sensor Specifications Finish Stainless steel, gold plated Cool Drawer Cooling water 0.2 GPM using 3.2 mm ( 1 /8 in.) OD tube, 30 C max. (Do not allow to freeze) Crystal (sold separately) 14 mm (0.550 in.) diameter Air supply 55 to 60 psi (gauge) regulated Electrical connection Two standard female BNCs on atmosphere side 2.54 cm (1 in.) Bolt and Compression Fitting Sealed Terminations Materials 304 stainless steel, Teflon, ceramic, beryllium nickel, Viton Temperature Operational environment to 300 C with water cooling or 165 C without Mounting 25.8 mm ±0.25 mm (1.015 in. ±0.010 in.) diameter aperture CF40 Welded Terminations Materials 304 stainless steel, ceramic, beryllium nickel Temperature Operational environment to 450 C with water cooling or 200 C without Mounting Mates with 7 cm (2 3 /4 in.) ConFlat flanges with 35 mm (1.375 in.) minimum ID Spare Parts List PN Description Cool Drawer Sensor crystal retainer Cool Drawer Sensor drawer and retainer combo Cool Drawer Sensor drawer * Bellows with 89 cm (35 in.) tube Shutter Link * Actuator Bellows and cover assembly (Includes all parts marked with *) * Bellows support * Bellows cover * Threaded shaft Spacer * Bellows tube * Hex nut PN Description * Lockwasher * #4-40 x 3 /16 Phillips screw #4 Lockwasher Shoulder screw Washer * 6-32 x 3 /16 in. set screw * Spring Conduit brazed assembly short pin O-Ring for 5 port adjustable feedthrough Washer for 5 port adjustable feedthrough NOTE: Items marked with * are included in C26 - Thin Film Deposition Controllers, Monitors and Accessories

75 Quartz Crystal Sensors and Feedthroughs Cool Drawer Dual Sensor (continued) Dimensions CDD-AF37, CDD-AF38 and CDD-BF38 Cool Drawer Dual Sensor / Feedthrough Combinations 1.27 cm (0.5 in.) 5.08 cm (2.0 in.) 1.8 cm (0.71 in.) 0.76 cm (0.3 in.) 6.35 cm (2.5 in.) Quartz Crystal Sensors and Feedthroughs 1.27 (.50 ) 5.08 (2.0 ) 1.8 (.71 ).76 (.300 ) 6.35 (2.5 ) Thin Film Deposition Controllers, Monitors and Accessories - C27

76 Quartz Crystal Sensors and Feedthroughs Cool Drawer Dual Sensor (continued) Dimensions CDD-AF47 and CDD-BF47 Cool Drawer Dual Sensor / Feedthrough Combinations 1.27 cm (0.50 in.) 1.27 cm (0.50 in.) CDD-AF47 Standard Configuration CDD-AF47 Standard Configuration 08 cm.0 in.) 5.08 cm (2.0 in.) 1.8 cm (0.71 in.) 1.8 cm (0.71 in.) cm (0.3 in.) cm (0.3 in.) 6.35 cm (2.5 in.) 6.35 cm (2.5 in.) 1.64 cm (0.65 in.) x cm (1.85 in.) #4-40 THD (4) PLCS A 1.80 cm (0.71 in.) 0.76 cm (0.30 in.) x in. COPPER GASKET CDD-BF47 Right Angle Configuration (1.12) VIEW A A (2.25) (1.25) (2.50) cm (4.15 in.) (0.12) TYP 4.45 cm (1.75 in.) A (2) ELECT. CONDUITS AIR TUBE (2) WATER TUBES BRAZED PORTS (5) PLCS 1-1/2 HEX NUT 1-20 UNS WASHER 1 in. ID 2-3/4 in. CONFLAT WITH ADD L KNIFE EDGE (2) BNC CONNECTORS Dimensions Sensor Length Specification for CDD-AF37 Sensor / Feedthrough Combination 1.27 cm (0.50) REF #4-40 THD (4) PLCS cm 4 26 in. Centerline of crystal aperture Dimensions Sensor Length Specification for CDD-AF47 Sensor / Feedthrough Combination 1.27 cm (0.50) REF cm 4 26 in. This gap is shown for clarity. The actual dimension equals 0 Centerline of crystal aperture C28 - Thin Film Deposition Controllers, Monitors and Accessories

77 Quartz Crystal Sensors and Feedthroughs Cool Drawer Dual Sensor (continued) Dimensions Sensor Length Specification for CDD-BF47 Sensor / Feedthrough Combination cm 4 26 in. This gap is shown for clarity. The actual dimension equals cm (.150) REF x Surface of Sensor Crystal Dimensions Sensor Length Specification for CDD-BF37 Sensor / Feedthrough Combination cm 4 26 in. Quartz Crystal Sensors and Feedthroughs 0.38 cm (.150) REF x Surface of Sensor Crystal Thin Film Deposition Controllers, Monitors and Accessories - C29

78 Quartz Crystal Sensors and Feedthroughs UHV Bakeable Sensor INFICON UHV Bakeable Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 stainless steel, molybdenum, inconel, nickel, and alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450 C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. SENSOR CONFIGURATIONS The UHV Bakeable Sensor is available in a standard configuration where the water tubes are parallel to the crystal face. Optionally, sensors can be ordered with a pneumatically driven crystal shutter to protect the crystal during source warm up, when not used during deposition of an alternate material, or to extend crystal life when used with RateWatcher or rate sampling. The exposed crystal electrode is fully grounded to effectively eliminate problems due to RF interference. FEEDTHROUGH AND FEEDTHROUGH CONNECTION All UHV Bakeable Sensors come welded to a CF40 (2 3 /4 in. ConFlat) feedthrough. Sensor length must be specified using a sensor length specification form, provided by INFICON, prior to ordering. Advantages High temperature braze and welded construction Bakeout temperatures to 450 C Crystal shutter (option) Front load crystal holder Easy installation CF40 (2 3 /4 in. ConFlat) feedthrough No brazing or welding to feedthrough required Sensor / feedthrough combination welded to customer specified lengths C30 - Thin Film Deposition Controllers, Monitors and Accessories

79 Quartz Crystal Sensors and Feedthroughs UHV Bakeable Sensor (continued) Ordering Information UHV Bakeable Sensor B K Type of Sensor (crystals sold separately) Standard (water lines parallel to crystal face) Custom parts, special bends and other non-standard parts available Consult factory In-vacuum cable Feedthrough Shutter Assembly None Standard shutter Sensor Substrate Source Shutter A 0 1 Controller or Monitor F Length of Sensor SEE NOTE 4 Standard length Shuttered sensors From 17 to cm (6.7 to 40 in.) Non-shuttered sensors From 10.2 to cm (4 to 40 in.) ** Sensor lengths over 76.2 cm (30 in.) are subject to an additional charge, as well as 2-4 weeks additional lead time. NOTE 1: Orders cannot be entered without a completed sensor length specification form (provided by INFICON). Once order is confirmed, it cannot be canceled. NOTE 2: Sensor lengths are measured from the center of the crystal to the vacuum side (sealing surface) of the feedthrough (see length specification form). NOTE 3: All Bakeable Sensors are welded to a CF40 feedthrough. NOTE 4: Shutter air tube is connected to the feedthrough tube using VCR fittings for field replacement. Quartz Crystal Sensors and Feedthroughs 15.2 cm (6 in.) BNC cable Oscillator or XIU Oscillator (XIU) to instrument interconnect cable Thin Film Deposition Controllers, Monitors and Accessories - C31

80 Quartz Crystal Sensors and Feedthroughs UHV Bakeable Sensor (continued) Specifications UHV Bakeable Sensor (PN BK-A0F) Maximum temperature (for bakeout only; water flow 450 C continuous 400 C continuous recommended during deposition) Feedthrough CF40 (2 3 /4 in. ConFlat) CF40 (2 3 /4 in. ConFlat) Sensor / feedthrough connection Welded (no fillers) Welded (no fillers) UHV Bakeable Sensor with shutter (PN BK-A1F) Water, air, and coax tubes Water: 3.2 mm ( 1 /8 in.) OD (vacuum side) Water: 3.2 mm ( 1 /8 in.) OD (vacuum side) 6.4 mm ( 1 /4 in.) OD (atmosphere side) 6.4 mm ( 1 /4 in.) OD (atmosphere side) Coax: 4.8 mm ( 3 /16 in.) OD Air: 3.2 mm ( 1 /8 in.) OD (vacuum side) 4.8 mm ( 3 /16 in.) OD (atmosphere side) Coax: 4.8 mm ( 3 /16 in.) OD Sensor head size (maximum envelope) 34 x 35 x 24 mm (1.35 x 1.38 x 0.94 in.) 34 x 35 x 31 mm (1.35 x 1.38 x 1.21 in.) Crystal exchange Front loading, self-contained package Front loading, self-contained package Cam-type locking handle Cam-type locking handle Mounting Four #4-40 tapped holes on back of sensor body Four #4-40 tapped holes on back of sensor body Minimum water flow cm 3 /min, 30 C max cm 3 /min, 30 C max. (do not allow to freeze) (do not allow to freeze) Crystal (not included with sensor) 14 mm (0.550 in.) diameter 14 mm (0.550 in.) diameter Materials Body and holder 304 stainless steel 304 stainless steel Springs Molybdenum and Inconel X-750 Molybdenum and Inconel X-750 Water, air, and coax tubes Seamless 304 stainless steel Seamless 304 stainless steel Other mechanical parts 18-8 or 304 stainless steel 18-8 or 304 stainless steel Insulators >99% Al 2 O 3 in vacuum >99% Al 2 O 3 in vacuum Wire 1) Ni (in vacuum) 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) 2) Ni plated Cu (elsewhere) Braze Vacuum process high temperature Ni-Cr alloy Vacuum process high temperature Ni-Cr alloy C32 - Thin Film Deposition Controllers, Monitors and Accessories

81 Quartz Crystal Sensors and Feedthroughs UHV Bakeable Sensor (continued) Spare Parts List PN Description PN Description Ceramic retainer P1 Shoulder washer Clamping spring P1 Shoulder washer Handle P1 #4-40 x 3 /16 screw Female Connector (includes ferrules and nut) P3 Split clamp Bakeable head contact P5 Split clamp Insulator for BNC G5 Bellows assembly 30.5 cm. (12 in) Insulator for bakeable head contact G6 Bellows assembly 50.8 cm (20 in.) BNC Body G7 Bellows assembly 76.2 cm (30 in.) Braze assembly 30.5 cm (12 in.) G5 Braze assembly with air line 30.5 cm (12 in.) Braze assembly 50.8 cm (20 in.) G6 Braze assembly with air line 50.8 cm (20 in.) Braze assembly 76.2 cm (30 in.) G7 Braze assembly with air line 76.2 cm (30 in.) #4-40 x 3 /8 screw P4 Coupling Retainer spring (part of crystal holder) #4-40 x 5 /8 screw VCR gasket #4 Split lockwasher P2 Spreader bar P G G G1 Actuator support Shaft assembly Shutter assembly Crystal holder Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C33

82 Quartz Crystal Sensors and Feedthroughs UHV Bakeable Sensor (continued) Dimensions BK-A0F Sensor / Feedthrough Combination 5.50 REF mm (4 40 in.) 23.5 mm (0.93 in.) 22.8 mm (0.90 in.) 70 mm (2.75 in.) 25 mm (1 in.) 34 mm (1.34 in.) 11 mm (0.45 in.) 38.1 mm (1.5 in.) 35 mm (ø1.373 in.) 6.4 mm (0.25 in.) 24 mm (0.95 in.) 87 mm (3.4 in.) 53 mm (2.1 in.) Dimensions BK-A1F Sensor / Feedthrough Combination 5.50 REF mm ( in.) 23.5 mm (0.93 in.) 22 mm (0.9 in.) mm (2.22 in.) SHUTTER OPEN 11 mm (0.45 in.) 38.1 mm (1.5 in.) 35 mm (ø1.373 in.) 6.4 mm (0.25 in.) 30.7 mm 87 mm (3.4 in.) 53 mm (2.1 in.) 70 mm (ø2.75 in.) 11 mm (0.45 in.) C34 - Thin Film Deposition Controllers, Monitors and Accessories

83 Quartz Crystal Sensors and Feedthroughs UHV Bakeable Sensor (continued) Dimensions Sensor Length Specification for BK-A0F and BK-A1F Sensor / Feedthrough Combinations cm 4 40 in cm in. Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C35

84 Quartz Crystal Sensors and Feedthroughs ALD Sensor OPTIMUM ACCURACY, UPTIME AND MINIMAL MAINTENANCE FOR ALD APPLICATIONS INFICON ALD Sensors bring the repeatability, precision and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450 C, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference. DESIGNED SPECIFICALLY FOR ALD A unique feature of the INFICON ALD sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard (QCM) is not suitable. FEEDTHROUGH AND FEEDTHROUGH CONNECTION INFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a CF40 (2 3 /4 in. ConFlat) feedthrough. Advantages Operating temperature up to 450 C Sensor is compatible with most ALD process temperatures Gas purge line keeps back of crystal free of deposition material Significantly reduces maintenance Maximizes system uptime Maximizes measurement accuracy Welded CF40 (2 3 /4 in. ConFlat) option Custom length with no customer welding required O-ring compression fitting option Easy sensor length adjustment Three high temperature crystals available, optimized for 120, 240, and 285 C Stable readings with low noise at high process temperatures Ask about custom high temperature crystals Get the right crystal for your process HIGH TEMPERATURE CRYSTALS FOR MORE ACCURATE MEASUREMENTS The INFICON ALD Sensor can achieve the best measurement accuracy and lower frequency noise in high temperature applications when used with INFICON s new high temperature quartz crystals. These high temperature crystals are optimized for 120, 240, and 285 C applications, so you always have the right crystal for your process. Crystals optimized for other temperatures may be available. Contact INFICON for your needs. C36 - Thin Film Deposition Controllers, Monitors and Accessories

85 Quartz Crystal Sensors and Feedthroughs ALD Sensors (continued) Ordering Information ALD Sensors G G G4 Welded ALD Sensor (requires completed length specification form) Adjustable ALD Sensor, length adjustable from to mm (4 to 15.5 in.) Adjustable ALD Sensor, length adjustable from to mm (4 to 35.5 in.) High Temperature Crystals G C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of G C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of G C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10 Specifications Feature, Parameter, or Specification Welded ALD Sensor (PN G4) Adjustable ALD Sensor (PN G2 and G4) Maximum temperature 450 C continuous 130 C continuous Feedthrough CF40 (2 3 /4 in. ConFlat) CF40 (2 3 /4 in. ConFlat) equipped with O-ring compression fittings Sensor / feedthrough connection Welded (no fillers) O-ring compression fittings Gas and coax tubes Sensor head size (maximum envelope) Crystal exchange Gas: 3.2 mm ( 1 /8 in.) OD (vacuum side) 6.4 mm ( 1 /4 in.) OD (atmosphere side) Coax: 4.8 mm ( 3 / 16 in.) OD Gas: 3.2 mm ( 1 / 8 in.) OD Coax: 4.8 mm ( 3 / 16 in.) OD 34 x 35 x 24 mm (1.35 x 1.38 x 0.94 in.) 34 x 35 x 24 mm (1.35 x 1.38 x 0.94 in.) Front loading, self-contained package Cam-type locking handle Front loading, self-contained package Cam-type locking handle Mounting Four #4-40 tapped holes on back of sensor body Four #4-40 tapped holes on back of sensor body Materials Body and holder 304 stainless steel 304 stainless steel Springs Molybdenum and Inconel X-750 Molybdenum and Inconel X-750 Gas and coax tubes Seamless 304 stainless steel Seamless 304 stainless steel Other mechanical parts 18-8 or 304 stainless steel 18-8 or 304 stainless steel Insulators >99% Al 2 O 3 in vacuum >99% Al 2 O 3 in vacuum Wire 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) Braze Vacuum process high temperature Ni-Cr alloy Vacuum process high temperature Ni-Cr alloy O-ring compression fittings N/A 304 stainless steel, Viton Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C37

86 Quartz Crystal Sensors and Feedthroughs Sputtering Sensor The INFICON Sputtering Sensor is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system. Advantages Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency Magnet to deflect free electrons away from the monitor crystal Easy installation with bendable water tubes allowing flexibility in sensor placement Rear load crystal insertion for easy crystal replacement Ordering Information Sensor Sputtering Sensor G G1 Sputtering Sensor Sputtering Sensor Shutter Module In-vacuum cable Substrate Source Shutter Controller or Monitor NOTE: Includes 78 cm (30.75 in.) in-vacuum cable, crystal snatcher, pack of 10 silver crystals, and manual (other in-vacuum cable lengths available separately) Feedthrough 15.2 cm (6 in.) BNC cable Oscillator or XIU Oscillator (XIU) to instrument interconnect cable C38 - Thin Film Deposition Controllers, Monitors and Accessories

87 Quartz Crystal Sensors and Feedthroughs Sputtering Sensor (continued) Specifications G1 Sputtering Sensor Maximum bakeout temp with no water 105 C Maximum operating isothermal environment temp with minimum water flow 400 C Size (maximum envelope) Water, air and coax length Crystal exchange Mounting Crystal Installation Requirements Feedthrough Minimum water flow Materials Body and holder Springs, electrical contacts Water tubes Connector 3.45 cm OD x 1.75 cm (1.36 x 0.69 in.) Standard 76.2 cm (30 in.) Rear-loading Customer supplied 14 mm (0.550 in.) diameter 2 pass water with coax connector 750 cm 3 /min, 30 C max (Do not allow to freeze) Au plated Be-Cu Au plated Be-Cu Au plated Be-Cu, 0.32 cm ( 1 /8 in.) OD 304 Stainless steel Insulators 99% Al 2 O 3 Wire Teflon insulated copper Solder Magnet Cadmium free silver and indium alloys ALNICO 5 Alloy Optional Shutter Assembly G1 Specifications: Temperature 130 C Materials Pressure Shutter Braze 300 series stainless steel 90 to 95 psi (gauge) operation 100 psi (gauge) maximum Pneumatically operated, requires solenoid valve, PN G1 Vacuum process high temperature Ni-Cr Alloy Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C39

88 Quartz Crystal Sensors and Feedthroughs Sputtering Sensor (continued) Specifications Feedthrough Specifications NOTE: Sensor / Feedthrough combination specifications are determined by lowest component specification 2.54 cm (1 in.) Bolt and Ultra-Torr (compression fitting) Terminations: Materials 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON Temperature Operational environment to 300 C with water cooling or 165 C without Mounting ±0.25 mm (1.015 ±0.010 in.) diameter hole CF 40 (2 3 /4 in. ConFlat) Welded Terminations: Materials 304 stainless steel, Teflon, ceramic, beryllium nickel Temperature Operational environment to 450 C with water cooling or 165 C without Mounting Mates with CF40 (2 3 /4 in. ConFlat) flanges with 35 mm. (1.375 in.) ID min. Spare Parts List PN Description Ceramic retainer Crystal holder Retainer spring for crystal holder In-vacuum cable 78.1 cm (30.75 in.) Sputtering head cover with water lines Magnet for sputtering head cover Retaining ring (installs onto shaft of shutter assembly) Retaining ring (installs onto shaft of shutter assembly) Spacer (installs onto shaft of shutter assembly) X 1 /4 in. Teflon screw for G1 sputtering head body P X 1 /8 in. set screw for G1 sputtering head body G1 Pneumatic shutter assembly P2 Pivot cover (installs onto shaft of shutter assembly) G2 Shutter assembly for pneumatic shutter assembly P1 Retainer spring for and G1 sputtering head bodies P4 Coupling (installs into bellows assembly) P4 Bellows assembly for pneumatic shutter assembly P2 Female coax connector for G1 sputtering head body P1 Insulator for G1 sputtering head body P3 Leaf spring for G1 sputtering head body G1 Sputtering head body with coax connector P1 Spring for sputtering head cover C40 - Thin Film Deposition Controllers, Monitors and Accessories

89 Quartz Crystal Sensors and Feedthroughs Sputtering Sensor (continued) Dimensions G1 Sputtering Sensor Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C41

90 Quartz Crystal Sensors and Feedthroughs Sputtering Sensor (continued) Dimensions Sputtering Head can be used with the following feedthroughs: PN [19.0] 5.00 [127.0] A A FEMALE JACK COAX IPN [5.08] [10.16] [323.8] 2.00 [50.8] 0.30 [9.5] VITON O-RING #2-122 WASHER #1-14-UNS THD [5.08] [3.96] 5.00 [127.0] ASSY. BNC CONN. C G1 VIEW A - A 0.75 [19.0] Dimensions PN G1 C42 - Thin Film Deposition Controllers, Monitors and Accessories

91 Quartz Crystal Sensors and Feedthroughs Sputtering Sensor (continued) Dimensions PN CL DIA. (6) CL BNC CONNECTOR 2-3/4 CONFLAT FLANGE CONNECTOR MICRODOT SEAMLESS TUBE (3) O.D., I.D CL Dimensions PN G [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7]BC Quartz Crystal Sensors and Feedthroughs 0.60 [15.26] 0.30 [7.62] 9.91 [251.83] 0.20 [5.07] 0.40 [10.16] 1.29 [32.78] 0.50 [12.70] 2.73 [69.34] CONFLAT FLANGE 5.00 [127.00] Thin Film Deposition Controllers, Monitors and Accessories - C43

92 Quartz Crystal Sensors and Feedthroughs Sputtering Sensor (continued) Dimensions PN G [19.0] 5.00 [127.0] MICRODOT CONNECTOR [12.70] 0.38 [9.7] A A [6.35] [7.11] 2.00 [50.8] VITON O-RING #2-122 #1-14-UNS THD [4.78] [323.8] WASHER [3.18] BNC CONNECTOR VIEW A - A 5.00 [127.0] 0.75 [19.0] Mating air fitting (10-32) for G1 solenoid valve Dimensions PN G [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC 0.60 [15.24] Mating air fitting (10-32) for G1 solenoid valve 0.30 [7.62] 1.29 [32.67] 0.35 [8.89] 0.35 [8.88] 0.50 [12.69] 2.25 [57.15] 0.50 [12.70] 2.73 [69.34] CONFLAT FLANGE 5.00 [127.00] 9.00 [228.60] C44 - Thin Film Deposition Controllers, Monitors and Accessories

93 Quartz Crystal Sensors and Feedthroughs Crystal 12 Sensor The INFICON Crystal 12 Sensor is critical for long processes demanding continuous rate control. Whether an OLED, MBE, Solar or other process having an extended period between chamber venting, the Crystal 12 Sensor offers the security of 12 quartz monitor crystals in one sensor head. When used with Cygnus 2, IC6, XTC/3M, XTC/3S, SQC310 or SQC310C, the Crystal 12 automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open. Crystal indexing is accomplished with a pneumatically driven mechanism. This pneumatic drive provides better thermal stability than competitive units using expensive in-vacuum, heat generating, electric motors. One-eighth inch water cooling tubes keep the sensor head thermally stable and allow flexibility in sensor placement. Quartz Crystal Sensors and Feedthroughs Advantages Holds 12 crystals with robust, automatic switching to maximize process uptime Easy-to-remove carousel allows fast replacement of all 12 crystals Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat-generating motors) 3.2 mm ( 1 /8 in.) tubes maintain thermal stability and allow flexibility in sensor placement Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance Optional mounting-post kit can be user-modified to accommodate metric hardware Optional crystal shutter available Thin Film Deposition Controllers, Monitors and Accessories - C45

94 Quartz Crystal Sensors and Feedthroughs Crystal 12 Sensor (continued) Ordering Information Crystal 12 Sensor X L 1 2 Type of Sensor (crystals sold separately) None Base unit Crystal 12 sensor In-vacuum Cable Assembly Length None 78 cm (30.75 in.) SEE NOTE cm (6 in.) 30.5 cm (12 in.) 61 cm (24 in.) 91.4 cm (36 in.) cm (48 in.) cm (60 in.) cm (72 in.) Solenoid Valve SEE NOTE 2 No Yes Mounting Post with Hardware None Mounting post kit Front Deposition Shield One (included in base unit) Spare front deposition shield Crystal Carousel Assembly One (included in base unit) Spare crystal carousel assembly 0 1 To PSIG air supply To crystal switch relay G1 Solenoid Valve Controller or Monitor Oscillator (XIU) to instrument interconnect cable Oscillator or XIU Sensor Substrate Source Shutter Custom parts, special bends and other non-standard parts available Consult factory NOTE 1: Auto Crystal Switch only with IC6, Cygnus, XTC/3M, XTC/3S, SQC-310, and SQC-310C. NOTE 2: The Crystal 12 Sensor requires the G1 solenoid valve with orifice installed (orifice PN , included in Crystal 12 ship kit). NOTE 3: All in-vacuum lengths are supported with IC6, Cygnus and XTC/3. SQC-310 and SQC-310C support in-vacuum lengths up to 78 cm (30.75 in.) only. NOTE 4: Position feedback is not available with SQC-310 or SQC-310C. C46 - Thin Film Deposition Controllers, Monitors and Accessories

95 Quartz Crystal Sensors and Feedthroughs Crystal 12 Sensor (continued) Specifications XL12 Series Crystal 12 Sensor Specifications Maximum bakeout temp with no water 130 C Maximum operating isothermal 300 C environment temperature with minimum water flow Size (maximum envelope) Water and air length Crystal exchange Mounting Weight Crystal (not included with sensor) Installation Requirements Feedthrough Mounting Air and water connections Minimum water flow Air supply Materials Plate, Material Shield, Mechanical Parts, Body and Carousel Springs, Electrical Contacts Water and air tubes Connector 102 mm (4.0 in.) dia. x 84 mm (3.3 in.) height 121 mm (4.75 in.) dia. x 88 mm (3.46 in.) with optional mounting posts installed 762 mm (30 in.) Front-loading Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (PN G1) 2.23 kg (4.92 lb.) 14 mm (0.550 in.) diameter One 2 3 /4 in. ConFlat with one coaxial feedthrough, two pass water, one air, PN G1, or, One 2 3 /4 in. ConFlat with one coaxial feedthrough, two pass water, one air with Ultra-Torr compression fittings (PN G2) or, One 2.54 cm (1 in.) bolt with one coaxial feedthrough, two pass water, one air PN G1 User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, PN G1, may be purchased for this purpose User to provide vacuum-tight braze joints or connectors for the water and air tubes. Solenoid valve for air, PN G1 (see PN configuration), with a 0.56 mm (0.022 in.) orifice installed by the user. (Orifice included with Crystal12 ship kit) cm 3 /min, 30 C max (Do not allow water to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur Regulated air supply 80 to 90 psi (gauge) operation 100 psi (gauge) maximum 2 m (79 in.) maximum length of 3.2 mm ( 1 /8 in.) tubing between sensor head and the solenoid valve 304 type stainless steel Au plated Be-Cu, Au Plated 302 stainless steel S-304, 3.2 mm ( 1 /8 in.) OD x 0.4 mm (0.016 in.) wall thickness x 762 mm (30 in.) length seamless stainless steel tubing Stainless steel Insulators Teflon, Peek Cable Teflon insulated copper plated steel Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C47

96 Quartz Crystal Sensors and Feedthroughs Crystal 12 Sensor (continued) Specifications Feedthrough Specifications Note: Sensor / feedthrough combination specifications are determined by lowest component specification. Example: Crystal 12 with CF40 (2 3 /4 in. ConFlat) is only rated to 300 C, not 450 C 2.54 cm (1 in.) Bolt and Ultra-Torr (compression fitting) Terminations: Materials Temperature Mounting CF 40 (2 3 /4 in. ConFlat) Welded Terminations: Materials Temperature Mounting 304 stainless steel, Teflon, ceramic, beryllium nickel, Viton Operational environment to 300 C with water cooling or 165 C without ±0.25 mm (1.015 ±0.010 in.) diameter hole 304 stainless steel, Teflon, ceramic, beryllium nickel Operational environment to 450 C with water cooling or 165 C without Mates with CF40 (2 3 /4 in. ConFlat) flanges with 35 mm (1.375 in.) ID min and O-ring compression fittings or other vacuum fittings C48 - Thin Film Deposition Controllers, Monitors and Accessories

97 Quartz Crystal Sensors and Feedthroughs Crystal 12 Sensor (continued) Spare Parts List PN Description P3 Actuator cover G1 Housing G1 Deposition shield P2 Pneumatic actuator P1 Detent P2 Stop ratchet P2 Ratchet P2 Extension spring P2 Spring post G1 Electrical connection G1 Pawl and actuator P2 Bearing shaft Ball bearing G1 Carousel P1 Aperture plate (without dowel pin) Dowel pin P1 Resistor network support P1 Resistor network insulator G1 Resistor network P1 Contact terminal (carousel component) P1 Crystal insulator (carousel component) P6 Leaf spring (carousel component) P1 Grounding leaf spring P1 Torsion spring P1 Spring P1 Spindle Spindle bearing (spindle component) E-Ring (spindle component) P1 Location screw (spindle component) PN Description x 762 mm ( 1 /8 x 30 in.) seamless tubing #4 Split lock washer #4-40 x 3 /16 Hex socket head screw Retaining ring Shaft spacer #2 Split lock washer #4-40 x 3.12 Hex head screw #0-80 x 3 /8 Phillips pan head screw #2 Internal lock washer #2-56 x 3 /16 Phillips screw #4 Split lock washer #2 Flat washer #2-56 x 1 /4 Hex socket screw #2 Internal lock washer P2 Detent spacer #0-80 Split washer P1 #0-80 x Flat washer P1 #0-80 x Socket head screw #4-40 x 1 /4 Flat head screw P1 #2-56 Torsion spring shoulder screw #2 Split lock washer #2-56 x 3 /16 Phillips screw #4 Split lock washer #4-40 x 1 1 /8 socket head screw P2 #6-32 x 1 /8 set screw #6 Flat washer #6 Split lock washer #6-32 x 3 /8 socket head screw P2 #6-32 x 1 /8 set screw Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C49

98 Quartz Crystal Sensors and Feedthroughs Crystal 12 Sensor (continued) Dimensions XL12 series Crystal 12 Sensor [23.30] OPTIONAL KIT- MOUNTING POSTS. QTY 3 IPN# G1 [74.27] 2.30 [58.39] 1.92 [48.87].375 TYP [9.52] OPTIONAL WATER SEE NOTES 4,6,7 IN VACUUM CABLE o4.00 [101.60] XXXXX 3.69 CRYSTAL G1.616 [16] [93.78] 4.75 [120.65] AIR OPTIONAL 4.37 [111.12] OPTIONAL.50 #4-40 X.19 [4.8] DP MOUNTING HOLES QTY [16] 1.80 [45.85].32 [8.13] 1.25 [31.75] [12.70] PLCS [25.40] 3.46 [88.01] 3 PLCS OPTIONAL Dimensions The Crystal 12 sensor can be used with the following feedthroughs: PN G [19.0] 5.00 [127.0] [12.70] MICRODOT CONNECTOR [6.35] [7.11] 0.38 [9.7] A A [4.78] 2.00 [50.8] VITON O-RING #2-122 #1-14-UNS THD VIEW A - A [3.18] [323.8] WASHER BNC CONNECTOR 5.00 [127.0] 0.75 [19.0] C50 - Thin Film Deposition Controllers, Monitors and Accessories

99 Quartz Crystal Sensors and Feedthroughs Crystal 12 Sensor (continued) Dimensions PN G [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC 0.60 [15.24] Mating air fitting (10-32) for G1 solenoid valve 0.30 [7.62] 1.29 [32.67] 0.35 [8.89] 0.35 [8.88] CONFLAT FLANGE Dimensions 2.73 [69.34] 0.50 [12.69] 5.00 [127.00] 2.25 [57.15] 0.50 [12.70] 9.00 [228.60] Quartz Crystal Sensors and Feedthroughs PN G [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC 0.60 [15.24] Mating air fitting (10-32) for G1 solenoid valve 0.30 [7.62] 0.35 [8.86] 1.29 [32.64] 0.35 [8.76] 0.50 [12.57] 2.73 [69.34] CONFLAT FLANGE 5.00 [127.00] 2.25 [57.15] 0.50 [12.70] 9.91 [251.83] Thin Film Deposition Controllers, Monitors and Accessories - C51

100 Quartz Crystal Sensors and Feedthroughs CrystalSix Sensor The INFICON CrystalSix Sensor is critical for long processes demanding continuous rate control. Whether an OLED, MBE, solar, long optical coating, or other processes having an extended period between chamber venting, the CrystalSix sensor offers the security of 6 quartz monitor crystals in one sensor head. When used with an INFICON thin film controller the CrystalSix automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continued deposition rate monitoring. Crystal indexing is accomplished with a pneumatically driven mechanism. This pneumatic drive provides better crystal thermal stability than competitive units using expensive in-vacuum, heat generating, electric motors. One-eighth inch water cooling tubes keep the sensor head thermally stable and allow flexibility in sensor placement. When used with certain INFICON thin film controllers, the sensor provides position feedback so specific positions can be used with specific materials. Advantages Holds six crystals with robust, automatic switching to maximize process uptime Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heatgenerating motors) 3.2 mm ( 1 /8 in.) tubes maintain thermal stability and allow flexibility in sensor placement Optional crystal shutter available C52 - Thin Film Deposition Controllers, Monitors and Accessories

101 Quartz Crystal Sensors and Feedthroughs CrystalSix Sensor (continued) Ordering Information CrystalSix Sensor G1 SPS-1039-G1 CrystalSix Sensor CrystalSix Sensor with Shutter To PSIG air supply To crystal switch relay G1 Solenoid Valve Controller or Monitor Oscillator (XIU) to instrument interconnect cable Oscillator or XIU Sensor Substrate Source Shutter NOTE 1: Auto Crystal Switch only with IC6, IC/5, Cygnus, XTC/3M, XTC/3S, SQC-310, and SQC-310C. NOTE 2: Position feedback is not available with SQC-310 or SQC-310C. NOTE 3: The CrystalSix sensor requires the G1 solenoid valve with orifice installed (PN , included in CrystalSix ship kit). Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C53

102 Quartz Crystal Sensors and Feedthroughs CrystalSix Sensor (continued) Specifications G1 CrystalSix Sensor Specifications Maximum bakeout temp with no water 130 C Maximum operating isothermal environment temperature with minimum water flow 400 C Water, air and coax length Crystal exchange Mounting Size (maximum envelope) Crystal (sold separately) Installation Requirements Feedthrough Mounting Utilities Minimum water flow Regulated air supply Materials Plate, holders, material shield, mechanical parts Springs, electrical contacts Water and air tubes Connector (Microdot) 76 cm (30 in.) Front-loading, extraction tool required (included) Six #4-40 tapped holes on the back of the sensor body 9.7 cm (3.8 in.) diameter x 5.1 cm (2.0 in.) height 14 mm (0.550 in.) diameter One CF40 (2 3 /4 in. ConFlat) with one coaxial feedthroughs, two pass water, one air (PN G1) or, One CF40 (2 3 /4 in. ConFlat) with one coaxial feedthrough, two pass water, one air with Ultra-Torr compression fittings (PN G2) or, One 2.54 cm (1 in.) bolt with one coaxial feedthrough, two pass water, one air (PN G1) User to provide mounting structure adequate to support weight of CrystalSix and designed to facilitate removal and replacement with minimal change in exact position. Solenoid valve for air, PN G1 (sold separately), with a 0.56 mm (0.022 in.) orifice installed by the user. (Orifice included with CrystalSix ship kit) cc/min, 30 C max (Do not allow water to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur 80 to 90 psi (gauge) operation 100 psi (gauge) maximum 2 m (79 in.) maximum length of 3.2 mm ( 1 /8 in.) tubing between sensor head and the solenoid valve 304 type stainless steel Au plated Be-Cu, Au Plate Inconel, 303 stainless steel S-304, 0.32 cm ( 1 /8 in.) OD x 0.04 cm (0.016 in.) wall thickness x 76 cm (30 in.) length seamless stainless steel tubing Stainless steel Insulators >99% Al 2 O 3 Cable Body and carousel Teflon insulated copper 2024 T351 Aluminum C54 - Thin Film Deposition Controllers, Monitors and Accessories

103 Quartz Crystal Sensors and Feedthroughs CrystalSix Sensor (continued) Spare Parts List CrystalSix Sensors PN Description Retaining spring (part of crystal holder) Ceramic retainer In-vacuum cable 78 cm (30.75 in.) #2 lockwasher (part of heat shield assembly) Retaining ring (secures bearing located next to pawl and actuator stem) Compression spring (on carousel shaft) Ball bearing (underneath carousel) Bearing (makes contact with pawl and actuator stem) Teflon washer (on carousel shaft) Shim spacer (part of heat shield assembly) Bearing (at center of top plate weld assembly) Wire x 1.06 in. (clamps heat shield retaining pin) #2-56 nut (part of heat shield assembly) P1 Retaining spring (clamps crystal holders to carousel) P1 Bottom insulator (underneath leaf springs) P2 Leaf spring P2 Retaining pin (part of heat shield assembly) G1 Heat shield assembly P2 Extension spring (part of top plate weld assembly) P3 Corrugated spring 11.2 cm (4.40 in.) G1 Carousel assembly (includes resistor network and electrical contacts) G1 Crystal holder G1 Top plate weld assembly P2 Actuator cover P2 Water line P2 Bellows assembly P3 Carousel electrical contacts (set of eight) P1 Detent P2 Ratchet P2 Stop ratchet G1 Pawl and actuator stem G1 Resistor network assembly P1 Contact insulator (underneath carousel electrical contacts) Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C55

104 Quartz Crystal Sensors and Feedthroughs CrystalSix Sensor (continued) Dimensions G1 CrystalSix Sensor Dimensions The CrystalSix Sensor G1 can be used with the following feedthroughs: PN G [19.0] 5.00 [127.0] MICRODOT CONNECTOR [6.35] [12.70] [7.11] 0.38 [9.7] A A [4.78] [323.8] 2.00 [50.8] VITON O-RING #2-122 #1-14-UNS THD WASHER VIEW A - A [3.18] BNC CONNECTOR 5.00 [127.0] 0.75 [19.0] C56 - Thin Film Deposition Controllers, Monitors and Accessories

105 Quartz Crystal Sensors and Feedthroughs CrystalSix Sensor (continued) Dimensions PN G [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC 0.60 [15.24] Mating air fitting (10-32) for G1 solenoid valve 0.30 [7.62] 1.29 [32.67] 0.35 [8.89] 0.35 [8.88] 2.73 [69.34] CONFLAT FLANGE Dimensions 0.50 [12.69] 5.00 [127.00] 2.25 [57.15] 0.50 [12.70] 9.00 [228.60] Quartz Crystal Sensors and Feedthroughs PN G [6.73] (6) HOLES EQ SP ON A 2.31 DIA [58.7] BC 0.60 [15.24] Mating air fitting (10-32) for G1 solenoid valve 0.30 [7.62] 0.35 [8.86] 1.29 [32.64] 0.35 [8.76] 0.50 [12.57] 2.73 [69.34] CONFLAT FLANGE 5.00 [127.00] 2.25 [57.15] 0.50 [12.70] 9.91 [251.83] Thin Film Deposition Controllers, Monitors and Accessories - C57

106 Quartz Crystal Sensors and Feedthroughs CrystalSix Sensor (continued) Dimensions The CrystalSix Sensor with shutter SPS-1039-G1 can be used with feedthrough PN G1 C58 - Thin Film Deposition Controllers, Monitors and Accessories

107 Quartz Crystal Sensors and Feedthroughs RSH-600 Rotary Sensor Head RSH-600 Rotary Sensor Heads are designed for demanding processes, employing very thick films and several different materials. SENSOR CONFIGURATIONS RSH-600 holds six crystals in a thermally shielded, water cooled housing, ensuring excellent crystal performance in temperature environments up to 300 C. Crystals are housed in an easy to remove Teflon and stainless steel crystal holder. Crystal position is incremented pneumatically by applying a 1 second pulse to a 115 V (ac) or 24 V (dc) solenoid valve. A 7-pin connector provides individual switch closures to ground to indicate the current crystal position. FEEDTHROUGHS RSH-600 can be configured with a flat head for top mount installation through an O-ring sealed feedthrough (not included). The 45 angle head can be configured for installation through the side of the chamber. Standard head covers are made of stainless steel. Copper head covers are available for applications where temperature is a concern. RSH-600 is available in the following in-vacuum lengths: Crystal retainer assembly and standard stainless steel cover Quartz Crystal Sensors and Feedthroughs 200 mm (7.9 in.) 350 mm (13.8 in.) 450 mm (17.7 in.) 540 mm (21.3 in.) 650 mm (25.6 in.) 750 mm (29.5 in.) NOTE: Angled heads add 11 mm (0.4 in.) to in-vacuum length. Copper Head Cover Advantages Six crystals Position feedback Adjustable length Rugged design 45 Angle Head Thin Film Deposition Controllers, Monitors and Accessories - C59

108 Quartz Crystal Sensors and Feedthroughs RSH-600 Rotary Sensor Head (continued) Ordering Information Rotary Sensor Head RSH-600 Sensor Voltage Type of Sensor Stainless steel flat head Stainless steel angle head Copper flat head Copper angle head Volts 24 Volts Length of Sensor (in-vacuum length) 200 mm (7.9 in.) 350 mm (13.8 in.) 450 mm (17.7 in.) 540 mm (21.3 in.) 650 mm (25.6 in.) 750 mm (29.5 in.) NOTE: Angled heads add 11 mm (0.4 in.) to in-vacuum length. To 55 PSIG air supply To crystal switch relay Oscillator (XIU) to instrument interconnect cable Oscillator or XIU Feedthrough Sensor Substrate Source Shutter Controller or Monitor C60 - Thin Film Deposition Controllers, Monitors and Accessories

109 Quartz Crystal Sensors and Feedthroughs RSH-600 Rotary Sensor Head (continued) Specifications RSH600 Specifications Number of crystals Crystal size Installation aperture Overall length Adjustable length in vacuum Power requirement Crystal switching method Cooling method Air and water connections six Maximum bakeout temperature without water 130 C Operating temperature Weight Spare Parts List PN Description Spring retainer assembly flat 14 mm (0.550 in.) diameter 50.8 mm (2.0 in.) diameter See chart on the following page See chart on the following page 115V (ac) or 24V (dc) V (dc) solenoid valve assembly Retaining screw for flat crystal retainer Crystal holder flat (includes ) Spring retainer assembly angled Retaining screw for angled crystal retainer Crystal holder angled Signal and ground contact module Spring retainer contact kit flat (set of six) Air 55 psi (4 kg/cm 2 ) regulated 5L/m at 2 kg/cm 2 (28 psi) (Do not allow to freeze) One ¼ in. quick connect for air, two ¼ in. compression fittings for water 300 C max with water cooling and stainless steel head cover 400 C max with water cooling and copper head cover ~ 3.8 kg (8.5 lb.), varies with overall length Spring contact for crystal retainer assembly pin male connector pin female connector M3x6 SOC head screw for flat crystal retainer Accessories PN Description RSH-600 adjustable flange Crystal retainer assembly, flat Crystal retainer assembly, angled Sensor head cover, stainless steel, flat Sensor head cover, stainless steel, angled Sensor head cover, copper, flat Sensor head cover, copper, angled NOTE: Conversion from flat to angled head requires parts numbers and either or Conversion from angled to flat requires parts numbers and either or Quartz Crystal Sensors and Feedthroughs Thin Film Deposition Controllers, Monitors and Accessories - C61

110 Quartz Crystal Sensors and Feedthroughs RSH-600 Rotary Sensor Head (continued) Dimensions 19.1 Crystal Aperture ANGLE HEAD Ø50 φ Angle Head ±2 Flat Head 200 mm (7.9 in.) 350 mm (13.8 in.) 450 mm (17.7 in.) 540 mm (21.3 in.) 650 mm (25.6 in.) Angle Head 211 mm (8.3 in.) 361 mm (14.2 in.) 461 mm (18.2 in.) 551 mm (21.7 in.) 661 mm (26.0 in.) 750 mm (29.6 in.) 761 mm (29.9 in.) Flat Head ±2 208 (43) 15 FLAT HEAD Ø50 φ50 (Ø58) Ø74 Crystal Aperture O-Ring Mounting Surface Optional Mounting Flange Crystal Position Connector (43.5) Solenoid Valv e (21) Water Inlet (Tube Ø1/4" ) BCD Ø74 4- Ø5.5 Mounting Holes 15 Air Inlet Tu be O.D. Ø1/4 in. BNC Connector Sensor Crystal 74 Ø (118.1) Crystal Aperture DIMENSIONS IN mm EXCEPT WHEN NOTED C62 - Thin Film Deposition Controllers, Monitors and Accessories

111 Quartz Crystals INFICON Quartz Crystals

112 This page left blank intentionally.

113 Quartz Crystals INFICON Quartz Crystals GET THE HIGH QUALITY INFICON CRYSTALS YOU WANT, WHEN YOU WANT THEM, AT AN AFFORDABLE PRICE. INFICON quartz crystals meet all your requirements for reliability, availability and affordability. From raw quartz to finished monitor crystal, no one else can promise complete quality control. Because, now, the major supplier of blank quartz crystals is part of INFICON. DELIVERING JUST THE RIGHT CRYSTAL Available in 5 and 6 MHz with silver, gold, or stress-reducing alloy electrodes, INFICON quartz crystals are produced to stringent specifications and carefully inspected to assure high yields and optimum reliability. Our AT-cut plano-convex design reduces errors in deposition rate and thickness by minimizing spurious vibrational modes (or mode hopping). And you now have a choice of sizes: Sloan-style or INFICON standard. Plus a high-level of available inventory to meet both your immediate and long-term requirements. We also offer the flexibility to produce crystals to your specific sizes and frequencies. CHOOSING THE RIGHT CRYSTAL Our continuing research into quartz crystal characteristics results in ongoing improvements to offer the highest reliability in your process. We recommend gold crystals for most applications. However, silver crystals will provide superior performance in processes with high heat loads, such as sputtering. They may also improve the deposition of oxides. And alloy crystals are recommended for optical coating with dielectric materials and for semiconductor processes with high-stress materials. HIGH TEMPERATURE CRYSTALS Designed specifically for ALD and other applications where water cooling is not possible, INFICON s high temperature quartz crystals provide you with superior performance and frequency stability at sustained high temperatures. High temperature crystals are available optimized for a variety of temperatures. FOUR CONVENIENT PACKAGES Cleanroom compatible dispenser holds 10 crystals which can be dispensed directly into the sensor holder or with the tool provided. Flat-pack carousel dispenser holds 10 crystals which are extracted by vacuum pencil or dispensed directly into the holder. Compact box holds 10 crystals which are extracted by vacuum pencil or tweezers. 50-Pack holds 50 crystals in a clear rectangular plastic package that is convenient for high volume production and easy to store and stack. Crystals are extracted by vacuum pencil. 100% TESTING AND INSPECTION To ensure maximum lifetime in your process and stable and accurate rate control, each crystal is examined for: Resistance Resistance is checked to assure measurement stability and longer coating life. Resistance is an indicator of electrical contact and electrode adhesion. Frequency Starting frequency within a small specification range is verified to ensure accurate thickness measurement. Curvature An electrical test for curvature is performed to assure resonance stability. Poor curvature results in measurement stability degrading more rapidly. Visual Conformity Each crystal is inspected for electrode uniformity, surface flaws, and other imperfections that are indicators of poor electrode adhesion and contamination. INFICON Quartz Crystals Thin Film Deposition Controllers, Monitors and Accessories - D1

114 Quartz Crystals INFICON Quartz Crystals (continued) Ordering Information Description (crystals are 14 mm (0.55 in.) diameter and 10 crystals per pack unless otherwise noted) Part Number 6 MHz Gold, in cleanroom compatible dispenser G10 6 MHz Silver, in cleanroom compatible dispenser G10 6 MHz Alloy, in cleanroom compatible dispenser G1 6 MHz Gold Thermal Shock, in cleanroom compatible dispenser... SPC-1157-G10 6 MHz Gold, in flat-pack carousel dispenser G10 6 MHz Silver, in flat-pack carousel dispenser G10 6 MHz Alloy, in flat-pack carousel dispenser G10 6 MHz Gold Thermal Shock, in flat-pack carousel dispenser... SPC-1194-G10 6 MHz Gold, in compact box... SPC-1093-G10 6 MHz Silver, in compact box G10 6 MHz Alloy, in compact box G10 5 MHz Gold, in cleanroom compatible dispenser G2 5 MHz Silver, in cleanroom compatible dispenser G2 5 MHz Alloy, in cleanroom compatible dispenser G1 5 MHz Gold, in flat-pack carousel dispenser G10 5 MHz Silver, in flat-pack carousel dispenser G10 5 MHz Alloy, in flat-pack carousel dispenser G10 5 MHz Gold, in compact box G10 5 MHz Silver, in compact box G10 5 MHz Alloy, in compact box G10 5 MHz Gold, 12.4 mm (0.490 in.) diameter, in cleanroom compatible dispenser G10 High temperature crystals 120 C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of G C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of G C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of G10 D2 - Thin Film Deposition Controllers, Monitors and Accessories

115 Electron Beam Gun Control Electron Beam Gun Control

116 This page left blank intentionally.

117 Electron Beam Gun Control HVPS/SC 10 kv Power Supply with Integrated Source Control POWERFUL PERFORMANCE IN A COMPACT DESIGN HVPS/SC is a solid state high voltage power supply with an integrated source controller used in electron beam (e-beam) vacuum deposition systems. Its revolutionary design makes it one of the smallest, most efficient, and feature packed high voltage power supplies on the market. POWERFUL PERFORMANCE HVPS/SC has adjustable output voltage from 4 to 10.2 kv and adjustable emission current from 10 to 999 ma. This makes it compatible with a variety of electron beam guns. Zero voltage switching (ZVS) technology and near unity power factor help make the HVPS/SC over 90% efficient with less than 1% emission current ripple for a precise and reliable electron beam. BUILT TO LAST HVPS/SC is rugged and reliable. Designed for continuous duty and / or continuous arcing, full arc recovery can be achieved in just 15 ms. A low stored energy of less than 2 Joules of energy at 10 kw helps quickly dissipate arcs with minimal effect on rate control. Each HVPS/SC is fully tested and burned-in to ensure proper operation and durability. COMPACT DESIGN AND EASY INTEGRATION HVPS/SC combines a power supply and source controller with a direct-to-filament design, eliminating the need for an external filament transformer. This space-saving design uses less than half the rack space of most competitive power supplies and source controllers and makes integration into the tool easy. Connection to a computer or PLC can be made through standard USB, RS-232, and RS-485 connections. Advantages 4 to 10.2 kv output voltage, 10 to 999 ma emission current output Ultra-low stored energy (less than 2 10 kw output) 12 V, 70 A integrated filament supply to regulate emission Near unity power factor and >90% efficient Accurate: <1% ripple and regulation Fast arc response: full arc recovery in about 15 ms Rugged: rated for continuous duty and continuous arcing, or anything in between Short circuit / over-heating / over voltage protection Compact: 3 U height Programmable arc rate threshold and arc delay Integrated source control (filament current supply) and filament transformer for easy installation Integrated power line filter Electron Beam Gun Control Thin Film Deposition Controllers, Monitors and Accessories - E1

118 Electron Beam Gun Control HVPS/SC (continued) Ordering Information HVPS/SC-208 HVPS/SC High Voltage Power Supply (Low mains voltage V) HVPS/SC-400 HVPS/SC High Voltage Power Supply (High mains voltage V) Specifications Electron beam gun outputs Emission current HV output voltage Filament current range One 10 to 999 ma 4k 10.2 kv (negative relative to ground) 0 70 Amps, 12V Filament current regulation Less than 1% Energy storage Ripple and regulation Less than 1% Arc event response Short circuit protection Over-voltage protection Over-heating protection User interface Interface input rating Digital input functions Filament output Analog input Analog outputs (2) Relay rating / output functions Communications Less than 2 J at 10 kw output Full recovery in about 15 ms Yes Yes Yes 240 x 64 backlit high-contrast, long-life LCD, seven status indicators Spin knob, dedicated system keys 5-36 V (ac) V (dc) isolated or grounded non-isolated, contact closure Door / Safety Interlock, Remote Mode, Remote On, Vac and Water interlocks Supply cable 0 10 V emission current control input 0 10 V indicating ma 0 10 V indicating 0 10 kv SPST, 30 V (dc) or RMS, 2 Amp, Power Supply On, Power Supply Ready USB, RS-232 / RS-485 Operating temperature 10 to 40 C Cooling Size Weight Input power Power factor Compliance Forced air, two internal fans Front panel: (H x W) Standard 3U height, full rack width x cm (5.2 x 19.0 in.) Case: (H x W x D) x x cm (5.2 x 17.1 x 17.2 in.) 22.7 kg (50 lb.) 3-phase, 208 or 400 V 0.99 (near unity) CE, RoHS E2 - Thin Film Deposition Controllers, Monitors and Accessories

119 Electron Beam Gun Control EBS-530 Electron Beam Sweep Controller CUSTOMIZABLE E-BEAM SWEEP CONTROL EBS-530 Electron Beam Sweep Controller generates a large number of precision sweep patterns for use with electron beam (e-beam) deposition sources. The user may select from the basic shapes provided (circle, figure-8, line and point), or create userdefined patterns to optimize deposition control of metals and dielectric materials. Variations on the basic shapes can be created by applying the provided pattern modifiers. Pattern modifiers provided include power, sweep frequency, rotational speed and power profile. Operation and programming is easy through the user-friendly touchscreen LCD display. EBS-530 can store up to 32 different sweep patterns. Sweep patterns can easily be selected from the front panel, through remote input, or through the standard RS-232 / RS-485 interface. Advantages Powerful, easy-to-use calibration function allows compensation for irregularities in gun magnetics High output current: 0 to 5 A (ac) with 10 Ohm loads Drives grounded or floating coils High frequency response: 500 Hz for coils <8 mh, 200 Hz for coils = 33 mh Pattern types: circle, figure-8, line, point and user-defined Handheld controller for manual beam control and calibration RS-232 / RS-485 communications inputs Input power: 85 to 265 V (ac), 50/60 Hz Power factor = 0.99 at maximum coil current Starting with a fixed set of basic sweep patterns that are embedded in the Sweep Control, the user can design e-beam sweep patterns that are ideally suited to the characteristics of the source and deposition materials. The sweep patterns generated by EBS-530 produce dual current outputs which can drive the X and Y sweep coils of most electron beam deposition sources. EBS-530 features a calibration function to compensate for differences between types and brands of e-beam guns and provides optimum heating of the deposition material. Electron Beam Gun Control Thin Film Deposition Controllers, Monitors and Accessories - E3

120 Electron Beam Gun Control EBS-530 (continued) Ordering Information EBS-530 EBS-530 Electron Beam Sweep Controller Specifications Output Coil output current Coil configurations Output frequency response (X and Y) Maximum coil 5 Amps Peak 10 Ohms Nominal cable length Patterns Predefined patterns User patterns 32 X / Y points per user pattern 255 Pattern Parameters -5.0 to 5.0 Amps peak per coil (3.5 A rms) Two coils with one side grounded Two coils with each side floating 500 Hz for coils <8 mh 200 Hz for coils = 33 mh 6.1 m (20 ft.) Gain 0 to 110% Power profile Shape Spin speed (rate of shape rotation) Shape speed (time to draw one shape) General User interface Mouse / remote input Digital inputs Digital input type Digital input functions Relay outputs Relay output functions Relay rating Communications Cooling Size (H x W x D) Weight Input power Power factor Regulatory compliance Circle, figure-8, line, point Vary current density according to 1/R X Circle, figure-8, line, point, user-defined 0 to 1000 RPM 0 to 1000 ms 240 x 64 backlit LCD touchscreen Dedicated system keys PS2 Nine Contact closure Interlock Remote mode Pattern select (1 to 32) Sweep On / Off Three Sweep Ready Sweep On Beam in pocket SPST, 30 V (dc) or RMS, 2 Amp RS-232 / RS-485 Forced air, one internal fan 8.9 x 42.9 x 29.2 cm (3.5 x 16.9 x 11.5 in.) 4.5 kg (10 lb.) 85 to 265 V (ac), 50/60 Hz 460 VA (10 Ohm coil R, 5 A peak current in each coil) 0.99 at maximum coil current CE, RoHS E4 - Thin Film Deposition Controllers, Monitors and Accessories

121 Electron Beam Gun Control CI-100 Crucible Indexer AFFORDABLE, RELIABLE CONTROL OF MULTI-POCKET E-BEAM SOURCES The CI-100 Crucible Indexer is used to rotate multi-pocket electron beam sources through a rotary vacuum feedthrough. It consists of a controller, motor drive, mounting bracket, and interconnecting cable. Configuration is flexible to adapt to your specific system and process. The CI-100 is compatible with virtually all e-beam sources, and the digital I/O is compatible with existing indexers. SIMPLE, INTUITIVE SETUP AND OPERATION From the front panel, you can control your process with ease: - Indicate selected pocket, or sweep speed if on a banana. - Select control from the front panel, or through external I/O. - Move indexer clockwise or counter-clockwise. - Move indexer to next pocket, or jogs in 1.8 steps. - Calibrate position or set speed. - Indicate selected pocket. - Indicate indexer is positioned at a valid pocket. - Indicate indexer is moving. Advantages Direct drive no pulleys to set or adjust Electronic calibration of position no mechanical adjustments Small, cool-running high-torque 1.13 N m (160 ozf in) motor drive Mounts on standard 2.54 cm (1 in.) bolt or CF40 (2 3 /4 in. ConFlat) feedthroughs User-configurable for any pocket / banana layout Eight predefined pocket / banana configurations included Digital I/O compatible with existing indexers System Configuration Setup: You can easily customize your configuration with the simple Windows-based software included. Electron Beam Gun Control Thin Film Deposition Controllers, Monitors and Accessories - E5

122 Electron Beam Gun Control CI-100 Crucible Indexer (continued) Ordering Information Crucible Indexer 782-CI-100 CI-100 Crucible Indexer (includes controller and motor) U rack extender mounts one SQM-160 OR CI-100 instrument in 48.3 cm (19 in.) rack U rack adapter mounts two SQM-160 OR CI-100 instruments in 48.3 cm (19 in.) rack Specifications Motor Drive Motor type Micro-stepper Torque 1.1 N m (160 ozf in) Speed (RPM) Low: 0.05, 0.06, 0.08, 0.10, 0.12, 0.15, 0.19, 0.24, 0.30, 0.37 High: 0.5, 0.6, 0.8, 1.0, 1.2, 1.5, 1.9, 2.4, 3.0, 3.7 Resolution 1.8 Repeatability 0.25 Size (height x width x depth) 89 x 89 x 122 mm (3.5 x 3.5 x 4.8 in.) Weight 1.5 kg (3.2 lb.) Power 12 W (supplied by controller) Controller Pockets Up to eight Digital inputs Binary or BCD encoded Low = 0 to 2 V (dc), high = 4 to 24 V (dc), non-isolated Communications RS-232 Size (height x width x depth) 88 x 213 x 197 mm (3.5 x 8.4 x 7.75 in.) Weight 2.7 kg (6 lb.) Power / V (ac), 50/60 Hz, 20 W Compliance CE (LVD and ECD) Interconnecting cable 3 m (10 ft.), standard DB25 Motor Drive Mount: shown with mounting bracket and flexible coupling attached. E6 - Thin Film Deposition Controllers, Monitors and Accessories