TRA Series. Compact Motorized Actuators USER S MANUAL

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Mildred Fisher
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1 Compact Motorized Actuators USER S MANUAL

2 Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport s discretion. To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products are warranted for the balance of the original warranty period, or at least 90 days. Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part. CAUTION Warranty does not apply to damage resulting from: Incorrect usage of the actuator: Driven load greater than maximum specified load. Actuator speed higher than specified speed. Improper grounding. Connectors must be properly secured. When the driven load represents an electrical risk, it must be connected to ground. Excessive or improper driven loads. Modification of the actuator or any part. This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages. No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation. This manual has been provided for information only and product specifications are subject to change without notice. Any changes will be reflected in future printings. EDH0232En /09 ii

3 Table of Contents Warranty...ii EC Declaration of Conformity...v Definitions and Symbols...vi Warnings and Cautions...vi Warnings...vii Cautions...viii 1.0 Introduction Description Design Details Characteristics Definitions Mechanical Specifications Speeds Actuator Weights Drive DC-Motor Drive Version Stepper Drive Version Motor UE10PP Motor Characteristics Command Signals for the Stepper Motor UE10MCC Motor Characteristics Command Signals for the DC-Motor Sensor Position Feedback Signal Position for the TRA-CC Pinouts Connection to Newport Controllers Warnings on Controllers Connection Cables Connection to Non-Newport Electronics TRA-CC and TRA-PPD Actuators TRA-PPM Actuators...12 iii EDH0232En /09

4 8.0 Dimensions Maintenance Maintenance Repairing...13 Service Form...15 EDH0232En /09 iv

EC Declaration of Conformity TRA Series Compact Motorized Actuators Year mark affixed: 2008 EC Declaration of Conformity We declare that the accompanying product, identified with the mark, complies

STANDARDS APPLIED: Compliance was demonstrated to the following standards to the extent applicable: NF EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory use EMC

5 EC Declaration of Conformity TRA Series Compact Motorized Actuators Year mark affixed: 2008 EC Declaration of Conformity We declare that the accompanying product, identified with the mark, complies with requirements of the Electromagnetic Compatibility Directive, 2004/108/EC. TYPE OF EQUIPMENT: Electrical equipment for measurement, control and laboratory use. STANDARDS APPLIED: Compliance was demonstrated to the following standards to the extent applicable: NF EN : 2006 Electrical equipment for measurement, control and laboratory use EMC requirements. Class A. This equipment meets: NF EN : 2003 Class A NF EN : 2001 NF EN : 2002 NF EN : 2005 NF EN : /14/2008 Dominique DEVIDAL Quality Manager Zone Industrielle Beaune-la-Rolande, France v EDH0232En /09

6 Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur. General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document. This symbol designates an area where personal injury or damage to the equipment is possible. European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations. 0.1 Warnings and Cautions The following are definitions of the Warnings, Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety, safety and preservation of the equipment, or important tips. Situation has the potential to cause bodily harm or death. CAUTION Situation has the potential to cause damage to property or equipment. NOTE Additional information the user or operator should consider. EDH0232En /09 vi

7 Warnings The translation of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area spotted with the opposite symbol, and by informing the personnel of the potential risks involved. Do not use this actuator when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state. Stop using the actuator immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the actuator yourself as this can be dangerous. Take care that this actuator is not exposed to moisture and that fluid does not get into the actuator. Nevertheless, if any fluid has entered the actuator, switch off the motor power and then disconnect the electronics from power supply. Contact your Newport service facility and request repairs. Do not insert or drop objects into this actuator, this may cause an electric shock, or lock the drive. Do not use this actuator if any foreign objects have entered the actuator. Switch off the motor power and then disconnect the electronics power supply. Contact your Newport service facility for repairs. Do not attempt to modify this actuator; this may cause an electric shock or downgrade its performance. vii EDH0232En /09

8 Cautions Do not place this actuator in a hostile environment such as X-Rays, hard UV, or in a vacuum environment. Only the TRA-CCV6 actuators are compatible and can be used in a vacuum environment up to 10-6 hpa. CAUTION Do not place this actuator in a location affected by dust, oil fumes or steam. This may cause an electric shock. CAUTION Do not leave this actuator in places subject to extremely high temperatures or low temperatures. This may cause an electric shock. Operating temperature: +10 to +35 C. Storage temperature: -10 to +40 C (in its original packaging). CAUTION Do not move this actuator if its motor power is on. Make sure that the cable to the electronics is disconnected before moving the actuator. Failure to do so may damage the cable and cause an electrical shock. CAUTION Be careful that the actuator is not bumped when it is being carried. This may cause it to malfunction. CAUTION When handling this actuator, always unplug the equipment from the power source for safety. CAUTION Contact your Newport service facility to request cleaning and specification control every year. EDH0232En /09 viii

in the TRA Series: TRA-CC TRA-PPD TRA-PPV6 TRA-PPM TRA6 and TRA25 motorized actuators.

9 TRA Series 1.0 Introduction This manual provides operating instructions for the actuator that you have purchased in the TRA Series: TRA-CC TRA-PPD TRA-PPV6 TRA-PPM TRA6 and TRA25 motorized actuators. RECOMMENDATION We recommend you to read attentively the chapter Connection to electronics before TRA actuator using. 561D-XYZ positioner equipped with 3 TRA6 motorized actuators. 1 EDH0232En /09

10 2.0 Description The TRA series miniature motorized actuators are the latest addition to Newport's extensive range of precision positioning devices. They provide reliable motorized motion in a lightweight and very compact package and are a lower cost alternative to the popular CMA series. The TRA actuators incorporate an excellent space saving design that allows them to be used with a wide variety of linear stages, mirror mounts, and OEM applications. TRA6 and TRA25 models provide respectively 6 mm and 12 mm travel in a slim, only 15 mm diameter housing and are the recommended choice for motorizing Ultima or Suprema mirror mounts, 561 series linear stages, and 481 and RS65 rotation stages. They are also mechanical compatible with other Newport mechanical products, but due to the limited travel range of the actuator, the total travel range provided by the mechanic may not be achievable accessible. The TRA25 provides 25 mm travel in a slightly larger package and is the recommended choice for motorizing linear stages and other devices. To provide the best fit for your application s requirements, all TRA actuators are available in stepper, stepper vacuum and closed-loop DC servo motor versions. To protect your investment, the TRA actuators include fixed integrated optical limit switches. These highly reliable switches also provide also a method for repeatable referencing/homing, for instance after shut-downs, for example. 2.1 Design Details Base Material Stainless steel body Drive Mechanism Rotating lead screw Drive Screw Pitch (mm) 0.5 Reduction Gear 256:1 Feedback TRA-CC: Motor mounted rotary encoder, 64 cts/rev. TRA-PPD & TRA-MMP: None Limit Switches Optical switches, both ends Origin Uses minimum travel limit for homing Motor TRA-CC: UE10MCC TRA-PP: UE10PP Cable Length (m) 3 Vacuum Compatibility Select TRA-PPV6 for vacuum applications up to 10-6 hpa. Maximum axial load, speed and acceleration are divided by two. Weight [lb (kg)] TRA6: 0.51 (0.23) TRA12: 0.88 (0.40) TRA25: 1.32 (0.60) EDH0232En /09 2

11 3.0 Characteristics 3.1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of the position, precision and repeatability of the machine tools with CNC. This standard gives the definition of position uncertainty which depends on the 3 following quantities: (Absolute) Accuracy Difference between ideal position and real position. On-Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources. Linear errors include: cosine errors, inaccuracy of screw or linear scale pitch, angular deviation at the measuring point (Abbe error) and thermal expansion effects. All Newport motion electronics can compensate for linear errors. The relation between absolute accuracy and on-axis accuracy is as follow: Absolute Accuracy = On-Axis Accuracy + Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts. Reversal Value (Hysteresis) Difference between actual position values obtained for a given target position when approached from opposite directions. Minimum Incremental Motion (Sensitivity) The smallest increment of motion a device is capable of delivering consistently and reliably. Resolution The smallest increment that a motion device can be commanded to move and/or detect. The testing of on-axis accuracy, repeatability, and reversal error are made systematically with our test equipment in an air-conditioned room (20 C ±1 C ). Each rotation stage is tested with a precision optical encoder. A linear cycle with 21 measures on the travel and 4 cycles in each direction gives a total of 164 points. 3 EDH0232En /09

12 3.2 Mechanical Specifications TRA6 Travel (mm) 6 Resolution (μm) TRA6CC: TRA6PP: (2) Minimum Incremental Motion (μm) TRA6CC: 0.2 TRA6PP: 0.1 Unidirectional Repeatability, garanteed (μm) 2 Hysteresis (µm) 12 On-Axis Accuracy, guaranteed (μm) 6 Maximum Speed (mm/s) 0.2 to 0.4 according to controller and load Axial Load Capacity (N) 60 1) Assumes controller backlash compensation. Backlash value provided with each actuator. 2) Full-step resolution. TRA12 12 TRA12CC: TRA12PP: (2) TRA12CC: 0.2 TRA12PP: to 0.4 according to controller and load 60 TRA25 25 TRA25CC: TRA25PP: (2) TRA25CC: 0.2 TRA25PP: to 0.4 according to controller and load 60 NOTE For TRA-PPV6 vacuum compatible actuators to 10-6 hpa, max. speed and load capacity have to be divided by two. 3.3 Speeds The maximum speed of a TRA actuator depends on a number of factors: If a TRA-CC or TRA-PPD actuator is user with an axial load higher than 45 N, the speed must be limited to 300 µm/s. If a TRA-PPM actuator is user with an axial load higher than 45 N, the speed must be limited to 200 µm/s. If a TRA-PPM actuator is user with a NCS200 controller and a NSC-PP adaptor cable, the speed must be limited to 200 µm/s. 3.4 Actuator Weights Weights indicated are values for actuators with their cable. TRA (0.23) TRA12 [lb (kg)] 0.88 (0.40) TRA (0.60) EDH0232En /09 4

13 4.0 Drive 4.1 DC-Motor Drive Version One DC-motor-driven configuration is available: TRA-CC. DC-Motor Performance Specifications Resolution Max. Speed (1) (µm) (mm/s) Motor TRA-CC UE10MCC 1) See chapter Stepper Drive Version Stepper-motor-driven stages are offered in one half-step drive version: TRA-PP & TRA-PPD. Stepper Motor Performance Specifications Resolution Max. Speed (1) Motor (µm) (mm/s) TRA-PPM UE10PP TRA-PPD 0.4 1) See chapter 3.3 NOTE For TRA-PPV6 vacuum compatible actuators to 10-6 hpa, max. speed and load capacity have to be divided by two. 5.0 Motor 5.1 UE10PP Motor Characteristics Angle by Micro-Step Current Resistance Inductance Newport Motor ( ) (A) (Ω) (mh) Utilization UE10PP Mini-Step 5.2 Command Signals for the Stepper Motor Phase 1 Direction + Phase 2 Direction Motion Direction + 5 EDH0232En /09

14 5.3 UE10MCC Motor Characteristics Nominal Max. Motor Voltage Current Resistance Inductance (V) (A) (Ω) (mh) UE10MCC Command Signals for the DC-Motor + Motor +V + Motor +V Motor V Motor V Displacement Direction + Direction Displacement Direction + In the above drawings, + Motor signal is referred to Motor signal. ❶ When the stage moves in + Direction, the + Motor voltage is higher than Motor voltage. ❷ When the stage moves in Direction, the + Motor voltage is lower than Motor voltage. 5.5 Sensor Position Home Position EOR Limit + EOR Limit Actuator Travel Range Displacement Direction + End-of-Run are TTL type: 5 V ±5%, 2 ma max. CAUTION End-of-Run are active signals and should not be connected to any other source. Use appropriate TTL type receivers. 5.6 Feedback Signal Position for the TRA-CC Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Direction + Direction Motion Direction + EDH0232En /09 6

15 The incremental sensor consists of a optical scale and an encoder head. When the sensor shaft turns, the encoder head generates square signals in quadrature, sent to pins #19, #20, #23 and #24 of the 25-pin Sub-D connector. Newport Stage User Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Pin #19 Pin #23 Pin #20 Pin #24 Pin #21 Pin #22 Output Signals +5 V ±5% 150 ma max. 0 V } Encoders Power Supply Encoders are differential pair (type RS422) type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486 respectively. 7 EDH0232En /09

16 5.7 Pinouts The 25-pin Sub-D connections for TRA-PPD and TRA-CC actuators are given in the following table: UE10PP TRA-PPD UE10MCC TRA-CC Phase Phase Phase Phase 2 8 Motor End-of-Run 18 End-of-Run V 22 0 V Motor 6 + Motor 7 Motor 8 Motor Mechanical Zero 14 Shield Ground V logic 17 + End-of-Run 18 End-of-Run 19 Encoder Phase A 20 Encoder Phase B 21 Encoder Power: +5 V 22 0 V Encoder 23 Encoder Phase /A 24 Encoder Phase /B 25 The 9-pin Mini-DIN connection for the MFA-PP actuator is given in the following table: UE10PP TRA-PPM End-of-Run 2 Phase 1a 3 +5 V 4 Phase 2b 5 6 Phase 2a 7 Phase 1b 8 0 V 9 + End-of-Run EDH0232En /09 8

17 6.0 Connection to Newport Controllers 6.1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions. Disconnect the power plug under the following circumstances: If the power cord or any attached cables are frayed or damaged in any way. If the power plug is damaged in any way. If the unit is exposed to rain, excessive moisture, or liquids are spilled on the unit. If the unit has been dropped or the case is damaged. If you suspect service or repair is required. Whenever you clean the electronics unit. CAUTION To protect the unit from damage, be sure to: Keep all air vents free of dirt and dust. Keep all liquids away from the unit. Do not expose the unit to excessive moisture (85% humidity). Read this manual before using the unit for the first time. All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized. Contact your electrician to check your receptacles. This product is equipped with a 3-wire grounding type plug. Any interruption of the grounding connection can create an electric shock hazard. If you are unable to insert the plug into your wall plug receptacle, contact your electrician to perform the necessary alterations to ensure that the green (green-yellow) wire is attached to earth ground. This product operates with voltages that can be lethal. Pushing objects of any kind into cabinet slots or holes, or spilling any liquid on the product, may touch hazardous voltage points or short out parts. 9 EDH0232En /09

18 6.2 Connection On each actuator is represented a label which indicates its name, its serial number and the motor it is equipped with (ex.: UE10PP). Always turn the controller's power OFF before connecting to a actuator. Actuators may be connected to the rear panel motor connectors labeled Motor any time prior to power-up with the supplied cable assemblies. 6.3 Cables Our TRA actuators are delivered equipped with either a cable with 25-pin Sub-D connector or a Mini-DIN9 connector. They can be directly connected to our controllers/drivers. This cable is shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable). Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk. 7.0 Connection to Non-Newport Electronics Newport takes no responsibility for improper functioning or damage of a TRA actuator when it is used with any non- Newport electronics. EDH0232En /09 10

19 7.1 TRA-CC and TRA-PPD Actuators Newport guarantees the "EC" compliance of the TRA Series actuators only if they are used with Newport cables and electronics. Nevertheless, the figure below indicates the recommended wiring when a TRA-PPD or TRA-CC actuator is used with non-newport electronics. Sub-D25 male Connector Connection TRA-PPD + Phase 1 Phase 1 + Phase 2 Phase 2 Connection TRA-CC + Motor + Motor Motor Motor Ground Connector Cap + End-of-Run (*) End-of-Run (*) +5 V 0 V Connector Cap 0 V logic Mechanical Zero (*) Encoder Phase A Encoder Phase /A Encoder Phase B Encoder Phase /B + End-of-Run (*) End-of-Run (*) +5 V Encoder 0 V Encoder Connector Cap * Open collector type with a 5.6 V protective Zener diode. Newport Stage 5.6 V End-of-Run or Mechanical Zero: Max. I in : 16 ma Max. V: 5.6 V If the Mechanical Zero output is not used, a 1 kω/0.25 W resistor must be connected between pins #13 and #21. Encoder and Index Pulse are differential pair type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486. Maximum characteristics used for CE compliance: UE10PP stepper motor: 8 V / 0.25 A peak UE10MCC DC-motor: 12 V / 81 ma peak 11 EDH0232En /09

7.2 TRA-PPM Actuators TRA-PPM actuators are equipped with a 9-pin mini-din non-standard connector and

NSC200 Single-Axis Low-Power Motion Controller/Driver. 8.0 Dimensions.37 (9.4) C.63 (15.

CABLE LENGTH 9.8 FT (3 M) TRA6 TRA12 TRA25 A ø B C 3.94 (100).59 (15) 0 4.45 (113).59 (15) 0 4.72 (120).

20 7.2 TRA-PPM Actuators TRA-PPM actuators are equipped with a 9-pin mini-din non-standard connector and must only be used with our NSC200 controller/driver. NSC200 Single-Axis Low-Power Motion Controller/Driver. 8.0 Dimensions.37 (9.4) C.63 (15.9) A 3/8-40 THD TRA_PPM: 9-PIN MINI-DIN CONNECTOR TRA_CC, TRA_PPD & TRA_PPV6: 25-PIN SUB-D CONNECTOR ø B CABLE LENGTH 9.8 FT (3 M) TRA6 TRA12 TRA25 A ø B C 3.94 (100).59 (15) (113).59 (15) (120).71 (18) ( ) ( ) ( ) 0 MODEL SHOWN: TRA6 DIMENSIONS IN INCHES (AND MILLIMETERS) TRA-CC & TRA-PPD TRA-PPM EDH0232En /09 12

21 9.0 Maintenance RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application. 9.1 Maintenance The TRA actuator requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and manipulated with precaution. PRECAUTIONS The TRA actuator must operate, and be stocked in a clean environment, without dust, humidity, solvents or other substances. 9.2 Repairing CAUTION Never attempt to disassemble an element of the actuator that has not been specified in this manual. To disassemble a non specified element can cause a malfunction of the actuator. If you observe a malfunction in your actuator, please immediately contact us to make arrangements for a repair. CAUTION All disassembly attempts or repair of actuator without authorization will void your warranty. 13 EDH0232En /09

22 EDH0232En /09 14

23 Service Form Your Local Representative Tel.: Fax: Name: Company: Address: Country: P.O. Number: Return authorization #: (Please obtain prior to return of item) Date: Phone Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): 15 EDH0232En /09

24 Visit Newport Online at: North America & Asia Newport Corporation 1791 Deere Ave. Irvine, CA 92606, USA Sales (949) or (800) x Technical Support (949) or (800) x Service, RMAs & Returns (949) or (800) x Europe MICRO-CONTROLE Spectra-Physics S.A.S 1, rue Jules Guesde Bât. B ZI Bois de l Épine BP Évry Cedex France Sales & Technical Support +33 (0) france@newport-fr.com Service & Returns +33 (0)

±15 V Current-Limited Power Supply

USER S GUIDE ±15 V Current-Limited Power Supply Model 0901 Newport Corporation 3635 Peterson Way Santa Clara, CA 95054 www.newport.com/newfocus EU Declaration of Conformity We declare that the accompanying