for High-Performance Routine Analysis

Transcription

1 ESCA V01/11.04 ESCA+ for High-Performance Routine Analysis - Reliable and Fast ESCA Analysis - Ease of Use - Impressive XPS Horsepower Performance - High Energy Resolution - Quantification with Industry- Standard Software - State of the Art Depth Profiling and Charge Neutralisation - Small Spot XPS

2 ESCA Analysis Fast and Reliable The new ESCA + is designed for present and future user requirements regarding reliability and performance. It combines ease of use with high performance XPS. Uniting Omicron s expertise in nanoanalytics with the latest technology available today, the ESCA + exactly meets all ESCA needs for routine surface analysis: including state-of-the-art XPS charge neutralisation and Zalar depth-profiling, ESCA + offers all prerequisites for rapid and accurately quantified XPS. The system is configured not only for the ultimate sputter depth-profiling on the XPS market, but also optimised for non-destructive Angle Resolved XPS. 5) 1) 4) 3) 2) 1) The SPHERA analyser features excellent countrates, excellent energy resolution and a smallest spot-size of below 70 µm dia. 2) The XM 1000 monochromator features a photon linewidth of below 250 mev, max. power 600 W 3) The DAR 400 dual anode source (Mg/Al) is operated using an advanced microprocessor-controlled power supply. 4) FIG-5: Differentially pumped floating column ion gun for sputtering and neutralisation 5) The optional Preparation Chamber can be customised individually. 2

3 Sample Definition and Handling Up to five samples (PHI190 format / 25mm) or a 50mm diameter sample may be loaded and pumped down rapidly. In the 25mm format, Zalar rotation is offered for ultimate depth resolution - sample heating and cooling are also available. Sample-transfer (in the preparation-chamber option) is realised by a carriage, which may accommodate up to five 25mm samples. Parking for this carriage is located in the analysis chamber, to obviate the need for inter-chamber transfer between sample runs. Performance ESCA + offers high count-rates and high energy resolution - even on magnetically permeable samples. The DAR 400 and the XM1000 monochromated X-Ray source are fully softwarecontrolled via Omicron s peripheral interface protocol - as is the FIG-5 ion source and the CN 10 neutralisation electron gun with a Ba-oxide cathode. For effective charge neutralisation the patented crossed ion and electron beam technology is used. The unmonochromated XPS source, configured at the magic angle for maximum ease-ofquantification, offers powerful performance. Sample transfer from fast entry lock to analysis chamber via a carriage on a rack and pinion drive. The XPS analysis area can be selected to less than 70 µm spot-diameter, alignment is realised with a CCD camera, a framegrabber and an optical alignment beam. For rapid ion-etch depth-profiling the FIG-5 ion source is used. The minimum spot-size is below 150 µm. Rastering like Zalar rotation and gasregulation, are software controlled. Operation in non-destructive profiling mode offers collection over a full range of ARXPS angles. The system offers the user the ability to optimise the acquisition-times for each of the selected angles. Data Reduction PHI MultiPak software - the proven industry standard for XPS data reduction - is used. Included are all sensitivity factors for quantification. Options and Upgrades The standard system configuration is upgradeable for AES, SAM/SEM, UPS and ISS. 2 3

4 ESCA + at a Glance: - Reliable and fast ESCA analysis ensuring reproducible results - Ease of Use for both sample-handling and quantification - Analysis of samples with magnetic permeability, charging samples or powders - Quantification with database using Multipak industry standard software - State-of-the-art neutralisation - cross-beam ion/electron sources CN10 and FIG-5 - High energy resolution XM1000 monochromator - Optimised for Angle-Resolved XPS - Impressive XPS horsepower performance - Zalar rotation for depth-profiling - FIG-5 ion source offering < 150 µm spot-size for powerful depth-profiling - Large samples & multiple sample loading high sample throughput - Heating and cooling in analysis sample position - Small spot analysis with optical alignment of feature of interest - Software control of all key elements - Upgradeable system Top view on ESCA + analysis chamber XM 1000 monochromator flanged on the analysis chamber. Inside view of the analysis chamber. 2 4

5 Convincing Results. A Selection... PET Polyethylene terephthalate. The C-O 2 -peak shows a FWHM of 0.71 ev. Red: aromatic ring peak Blue: C-O-peak PVF Polyvinylfluoride. The good separation and the symmetry of the C*H 2 CHF (right) and CH 2 C*HF-peaks show the effective neutralisation. Si Silicon 2p3/2 and 2p1/2. The Si 2p3/2 peak (dark blue) shows a FWHM of 0.37 ev. 2 5

6 How to contact us Headquarters: Limburger Str. 75 D Taunusstein Germany Tel. +49 (0) / Fax +49 (0) / or EUROPE UK: Omicron NanoTechnology Ltd. Tel info@omicron.co.uk France: Omicron NanoTechnology Tel omicron.nanotechnology@wanadoo.fr Italy:, Roma Tel omicron.italia@tiscali.it Switzerland: Tel info@omicronnano.ch Sweden: Rowaco AB Tel kristian@rowaco.se AMERICA Sales and Service for ESCA + in USA exclusively by Physical Electronics USA Tel. (952) marketing@phi.com Headquarters USA (for other Omicron products): Omicron NanoTechnology USA Tel. (952) info@omicronus.com Brazil: BOC Edwards Brasil Ltda. Tel. (011) edwards@boc.com.br ASIA & AUSTRALIA Japan: ULVAC-PHI, Inc. Tel salesjp@phi.com South Korea: Woosin CryoVac Ltd. Tel. (031) woosin@woosinent.co.kr Taiwan: Omega Scientific Taiwan Ltd. Tel. (02) omega001@ms3.hinet.net Singapore: Research Instruments Pte. Ltd. Tel info@ri.com.sg India: Mack International Tel. (022) macktran@vsnl.com China: Omicron China Office Tel. (010) germtech@public3.bta.net.cn Australia: Thomson Scientific Instruments Pty Ltd. Tel. (03) tsi@tsi.com.au Specifications Countrate (for 7-channel MCD, 300 W, Ag3d5/2) MgKα AlKα (monochromated) FWHM(eV) Countrate (cps) FWHM(eV) Countrate (cps) , , ,000, ,500,000 Dimensions The number of required peripheral racks depends on the individual system configuration. Intensity is that of the Ag3d5/2 peak including background. Ultimate Ag3d5/2 resolution 0.51 ev Pressure < 3x10-10 mbar Monochromator Two different types of filament, user-selectable via the power-supply allowing two alternative modes of operation for the source spot-mode and line mode, according to the filament choice. 300W in spot-mode (used for the above count rate specifications), maximum power 600W in line-mode. Maximum bakeout temperature 130ºC Small-spot XPS The smallest analysis area will be measured to be better than 70 µm, by scanning a knife-edge across the analysis area and taking 16 84% of the resultant stepwidth. Other aperture sizes are selectable in vacuo, spot size is up to 5 x 16 mm 2 Specifications and descriptions contained in this brochure are subject to alteration without notice. 105-V01/11.04 Printed by Druckerei und Verlag Klaus Koch GmbH