PHI VersaProbe III User Guide
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1 PHI VersaProbe III User Guide Created for Stanford NanoShared Facilities (SNSF) Juliet Jamtgaard October, 2016 This document was created for training purposes only. Screenshots are from SmartSoft- VersaProbe TM by Physical Electronics, a Division of ULVAC- PHI. 2
2 PHI VersaProbe 3 User Guide Features: Greater count collection with better energy resolution. Hot/cold stage. Intro Camera for easy navigation. SmartSoft software with Queue options. FIG5 Ar+ Ion gun. GCIB Ar+ cluster gun. Collection- limiting aperture for AR- XPS. Spot sizes: 9um 200um plus HP (1400x100um) Auto Neutralize, Auto Z- align options. 3
3 PHI VersaProbe Loading Sample A. C. B. D. 1. Choose Holder A. XPS Tab B. Platen Manager tab (RHS). C. Platen tab. D. Choose holder size from dropdown list. 1 inch 2 inch AR Hot Cold E. Press Load. F. If asked to save changes to previous holder, say No. **Note** The Max Z Height of the 1 and 2 holders should be 18.5mm; 16.5mm for AR holder. If your sample is thicker than 0.5mm, subtract sample thickness from Max Z height. 4
4 PHI VersaProbe Loading Sample F. C. D. B. 2. Set up file directory A. Platen Manager A. tab (RHS). B. Directory tab. C. Choose the desired directory. D. Press Update directory button. E. Press Properties button. F. Choose Lab Book tab. G. Choose desired file name settings. E. 5
5 PHI VersaProbe Loading Sample A. Ion gauge must read 3.7x10-4 Pa before gate valve will open. 5. B. 3. Backfill Intro A. System Tab B. Right- click on Intro chamber. C. Select Backfill Intro from drop- down menu. 4. Load Sample in Intro Chamber. Line up Notch in holder with screw on transfer fork. 5. Drag- and- drop Image in Intro chamber into Main chamber. 6. Follow all prompts to take photo and load sample into main chamber. 7. Never lean on transfer arm! 6
6 PHI VersaProbe 3 Choose Position(s) Sample Tab 2. Press Define Point button A. Nearby buttons for Define Area B. Define Line 3. Add Name, Comment and update type. Choose HP setting in Type. 4. Highlight desired point/area (green) and press Move to position button. 7 To use HP setting, must choose HP in Type for each position and also in X- ray Setting on Spectrum or Profile tab before starting scan.
7 PHI VersaProbe 3 Z Align Sample Tab 2. Z- Align Tab (RHS) 3. Move to desired position on Stage (see previous page.) 4. Choose X- ray Setting for Z- Align. 5. **Check Auto settings (see pg 7 step 6). 6. Press Z- Align. 7. Z- align status box will open. Click Properties button and choose Graph tab to see plot. 8. If needed, update position to new Z- height. 8
8 PHI VersaProbe 3 Spectrum Setup XPS Tab 2. Spectrum Tab (RHS) 3. Choose Xray Setting 4. Press Periodic Table button to choose elements or SU for survey. Adjust parameters for each Region. 5. Choose # of Cycles. 6. Press XPS Setup Select/De- select Auto Neutralize settings as needed. 6. 9
9 PHI VersaProbe 3 Notes before Acquisition Before starting acquisition: Make sure only desired positions are checked on Sample tab. Make sure only desired Regions are checked (XPS tab/ Spectrum Tab (RHS)). Make sure XPS Properties dialogue has been examined Auto Neutralizer is on/off as needed. If using queue feature and moving to multiple positions, can use Auto Z- Align. Ideally, Neutralizer and Ion Gun should warm up in standby for a little while before use. Can use Queue feature to automatically perform multiple tasks. If desired, take SXI image and Define points on image. Must push camera icon to save SXI before defining points. ** Press Add to Q and then delete all previous items in Q before pressing Start.*** 10
10 PHI VersaProbe 3 Spectrum Setup (cont d) 1. Two options for start: 1. If Queue is empty, press Spe to start acquisition. 2. Use the Q: Press Add to Q and delete all unwanted lines in Queue. Press Start in Queue menu. 11
11 PHI VersaProbe 3 Hardware Setup for Sputtering Before Ar+ Ion Gun sputtering: 1. Hardware tab 2. Ion gun tab (RHS) 3. Choose desired Gun Ion Gun GCIB 4. Load sputter file (never press Save ) 5. Press Standby. Ion gun will turn on auto- matically during process. 6. Return to off when done. For GCIB sputtering: Manually open valve on GCIB. Put GCIB in blank mode, not standby. Return to off when done. Manually close valve on GCIB. 12
12 PHI VersaProbe 3 Hardware Setup for Neutralizing Before sputtering: 1. Hardware tab 2. E- neut tab (RHS) 3. Load Neutralize file (never press Save ) 4. Press Standby. Neu- tralizer will operate auto- matically during process. 5. Return to off when done. 6. Neutralizer should warm up in standby for ~15 before use. 13
13 PHI VersaProbe 3 Depth Profile Setup XPS Tab 2. Profile Tab (RHS). 3. Depth Profile. 4. Choose X- ray spot size. 5. Choose Regions, sweeps and pass energies. 6. Press Sputter Rate Table to set up depth profile
14 PHI VersaProbe 3 Depth Profile Setup Check XPS Setup for Auto Neutralizer and Auto Z- align 8. Press Profile to begin or use Queue
15 PHI VersaProbe 3 Angle Profile Setup XPS Tab 2. Profile Tab (RHS). 3. Angle Profile. 4. Choose X- ray spot size. 5. Choose Regions, sweeps and pass energies. 6. Press Angle Table to set up tilt profile
16 PHI VersaProbe 3 Angle Profile Setup Check XPS Setup for Auto Neutralizer and Auto Z- align 8. Choose Acceptance Angle = Narrow. 9. Turn beam- limited aperture into place on instrument. 10. Press Angle to begin or use Queue
17 PHI VersaProbe Unloading Sample 1. Before unloading, deselect any Auto Sputter/Auto Neutralize commands from XPS Acquisition Setup. XPS tab, bottom left corner of either Spectrum or Profile tabs. See pages 13, Turn off power to Neutralizer and Ion Gun. Hardware tab, Neutralizer or Ion Gun tabs. See pages If used Ar Ion Gun (not GCIB) for sputtering or neutralizing, Pump Intro. See next page, part D. 4. If used GCIB, close valve on gun. 5. If using AR, return Beam Acceptance Aperture to Standard Position. 18
18 PHI VersaProbe Unloading Sample 1. A. C., D. 1. System tab A. Drag- and- drop image from Main chamber into Intro chamber. B. Follow all prompts to insert transfer arm and remove sample. C. Backfill Intro Right- click on Intro. Choose Backfill. Remove sample. D. Pump Intro Right- click on Intro. Choose Pump Intro. 19
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Typical System Construction Schedule; Balzers Chambers: BAK600 BAK760 QLC800
Typical System Construction Schedule; Balzers Chambers: BAK600 BAK760 QLC800 Chamber / Framework System fully dismantled. Old controls and instruments removed. Chamber and framework stripped and prepared