v2.4.0 Release Notes Release Notes Advancing the Standard in SEM Inspection 2018 GenISys GmbH 12-Nov-18 10:12

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1 v2.4.0 Release Notes Release Notes Advancing the Standard in SEM Inspection 12-Nov-18 10:12

2 ProSEM Release Notes All rights reserved. No parts of this work may be reproduced in any form or by any means - graphic, electronic, or mechanical, including photocopying, recording, taping, or information storage and retrieval systems - without the written permission of the publisher. Products that are referred to in this document may be either trademarks and/or registered trademarks of the respective owners. The publisher and the author make no claim to these trademarks. While every precaution has been taken in the preparation of this document, the publisher and the author assume no responsibility for errors or omissions, or for damages resulting from the use of information contained in this document or from the use of programs and source code that may accompany it. In no event shall the publisher and the author be liable for any loss of profit or any other commercial damage caused or alleged to have been caused directly or indirectly by this document. Printed: November 2018 in Munich, Germany

3 Contents 3 Table of Contents I Release Version 4 1 v v v v v v2.2.1 v v v2.1.1 v v v2.0.1 v v v1.5.0 Index

4 4 ProSEM Release Notes 1 Release Version 1.1 v v2.4.0 Enhancements ProSEM project files are now saved using a binary file format by default. The new format files have file extension of.iab, and this format is both smaller and faster to save and load, typical projects are 8 to 10 times smaller and faster. The older, text-based project files, with file extension.iap, are still supported, and can be selected during project file saving using the Save As Type selection. Note that binary.iab files cannot be used to exchange project files between Windows and Linux platforms, the.iap format must be used. Line Width Roughness (LWR) is now computed together with Line Edge Roughness (LER) for lines, spaces and gratings. When the PSD graphs are displayed, there is now a "PSD graph options..." button in the lower left corner of the panel, which controls the visibility of each LER and LWR plot, as well as the fit lines and the markers indicating the fitted baseline and coherence length values. The number of CD linescans in a line/space measurement is now available in formulas using the new property CDSampleCount. For example, this is used to compute the standard error of the mean CD with the formula: CDStdDev/sqrt(CDSampleCount) Two new support functions are available which compute the distance between two measured objects in formulas. Metrology.distanceFittedFeature computes the distance between the geometrical shapes fitted for its two arguments of type 'Metrology', and Metrology.distanceNearestPoints returns the distance between the two closest edge points detected for its two arguments of type 'Metrology'. If no simple geometrical shapes were fitted for the metrology objects, 'distancefittedfeature' falls back to the behavior of 'distancenearestpoints'. Both functions return zero in case both arguments refer to the same measurement. In the formula editor, the evaluate button now also shows the data type of the formula result. Added new feature is available for sharing ROI (Region of Interest) as follows: o Multiple measurements can now "share" a single ROI. With shared ROIs, a change in one ROI's position or size changes all shared ROIs.This allows more complex measurement scenarios to be defined, such as multiple measurements on the same feature but at different signal level positions such as at the top and bottom edges. In such a case, each measurement can have independent settings such as different measurement methods, but the ROI position and size are linked between the different measurements. o The position and size of a Region of Interest (ROI) can now also be set numerically. In the Feature Detection panel's extras menu, when "Show ROI Ctrls" (3-dots menu) is enabled, the position and size of the ROI is displayed and can be changed. Additionally, the "ROI Unit Mode" item in the extras menu selects whether these ROI settings are in user units (ie, microns or nanometers), or in pixels. When the values are changed, the ROI and measurement will be updated

5 Release Version 5 when the Enter key is pressed. After changing the ROI of a stored measurement, the "Store Measurement" button must be used to update the stored measurement with the new ROI. Feature finding in batch mode has been improved. A new "Single Edge" feature type allows a single-edge position to be measured.this is useful for measuring spacing between features with different edge types, or different shape types. Measurement result from triangles have been improved with the latest edge detection improvements. The edge detection has been improved for some images through better signal baseline detection. ProSEM Performance has been improved with respect to image loading and changing measurement. Support for reading pixel size metadata from Thermo Scientific Apreo model SEMs has been added. Note that asymmetric pixel sizes, where x and y pixel sizes are not the same, is not supported at this time. The noise correction and contrast adjustment in recipe mode has been improved. Solved issues When using manual edge detection mode, the edge positions could sometimes disappear when their positions were adjusted. This has been corrected. Unexpected results could be displayed when a zoom region or ROI drawing extended outside of the image area. This has been corrected. The saved window positions could become corrupted, causing the main window to be invisible when ProSEM is next opened. This problem has been fixed.

6 6 ProSEM Release Notes 1.2 v v2.3.0 Enhancements The capability of limiting a search to a specific region of images has been added, with a new feature called: Detection Fences in the Feature Detection panel. Fences operation is enabled through the new pop-up menu in the Feature Detection panel, with the "Use Detection Fence" option. This option is set for each measurement. When Fences are enabled, an additional line of controls is shown at the bottom of the Feature Detection panel, which control the X and Y minimum and maximum of the fence, expressed as percentage of the image area. On the image, areas outside the fence, and thus excluded from Find operations, are displayed as faded. The fence positions can also be adjusted by dragging the fence edge. Each measurement setup has its own fence, but fence is copied over in case of grating/array find or batch. o When "Use Detection Fence" is enabled, four additional text ctrls (X/Y min and max) are shown in the panel o Image outside of fence is overlaid with white semi-transparent film o Borders of the fence can be dragged and moved o The fence size cannot be smaller than the active measurement box o Each measurement setup has its own fence, but fence is copied over in case of grating/array find or batch. The "Zoom Image to Region of Interest" toolbar button has been improved to behave according to what is selected in the Images panel. As before, if a single measurement is selected, the image view will zoom to show just that measurement's ROI. Now, if a group heading is selected, the image view will zoom to show that group, or if an image name is selected, the view will zoom to the Live Measurement for that image. Projects, images, and groups are now array objects, which can be indexed and have a "length" property o Added "IsGrating" and "IsArray" for groups, returning 1 or 0 depending on whether the group is a grating or an array o Added "CenterX" and "CenterY" for Lines & Spaces Measurement o Also added E0CenterX, E0CenterY (and E1...) to access individual edge centers. There have been a few improvements in creating and using formulas: All formulas now apply to the entire project automatically; it is no longer necessary to use the "Apply to Project" menu item (which has been removed). In the Variables panel, the table now always shows the value of variables or the formula results, with formula results being shown in italics font. Double-click on the name or value to see or edit the formula itself. It is no longer possible to change a variable between a formula or value; once created, the type of variable is fixed.

7 Release Version 7 Several new measurement items are available for use in JavaScript formulas: For groups, the "NumFeatures" returns the number of measured items in that group, and "IsGrating" and "IsArray" return 1 or 0 depending on whether the group is a grating or an array. For Line/Space measurements, "CenterX" and "CenterY" return the center position of the measured feature, and E0CenterX, E0CenterY, E1CenterX, and E1CenterY return the center positions of the respective edge of the line/space measurement. In formulas, the user units as set in the File > Properties can now be accessed by the MeasurementUnit property of the project object. In a formula, project.measurementunit returns either "um" or "nm". The former Batch mode has been extended in several ways and now incorporated in the new Recipe operations. For example, a Batch operation can now include multiple features or groups, in which case, each feature or group in the defined recipe is run sequentially. See the new Recipe feature for more details. Running Batch on an image item is now allowed. Batch simply sequentially runs batch on groups and individual measurements (in a default group). We also now allow batch run on default groups. In this case, each stored measurement is run sequentially. A new Recipe functionality has been added and the former "Batch" functionality has been integrated into this. Recipes extend the former Batch capability in several useful ways. A recipe can contain one or many individual measurements or groups (which in turn can each have their own Fence, for working on selected regions on each image.) When the desired feature(s) are selected in the Images panel, the new "Set As Recipe" button will define the features to measure when the recipe is run. When the "Run Recipe" button is clicked, four options are available: (1) Run on this image, (2) Run on all images without measurements, (3) Run on all images, or (4) Clear all measurements then run recipe on all images. These options allow flexibility in testing and using recipes. The defined recipe can be exported a file, which can then be imported into a new project of images for re-use. Exported recipes also include any defined variables and summary tables at the time of export. Group ID is now included in the Results table. Consequently, it is also now available as a grouping attribute in the Summary Table. The view zooming behavior has been improved when moving between objects or groups within an image. In short, the zoom magnification is maintained when possible. A title line has been added to the top of the Results Area, which identifies which measurements are being displayed, including the image filename, and if the measurement is a "Live Measurement", a stored measurement, or a Group Summary. Removed the `Item` base class of ProSEM project items, since it was of very limited practical value. o Instead, `Project`, `Image` and `Group` now derive from the standard JavaScript `Array` class and act as containers of their respective child items. In particular, the `length` property can be used to obtain a count of child items and sequential indexed access to any child is possible in addition to access by name. o `Metrology` now derives directly from the standard JavaScript `Object` class. All metrology items are instances of subclasses of `Metrology`.

8 8 ProSEM Release Notes Some small improvements in Summary Tables: Variables with explicit values (not formula results) are now treated as numbers if possible. The display precision and format is derived based on the notation used. Error text such as NaN is now ignored when computing statistics. After creating a new summary table, the view now automatically switches to the new page. Some adjustments were made to the Edit Variables dialog to make editing formulas a bit easier. The dialog now opens to a larger size by default, the snippet gallery will automatically open when a formula is being edited, the font and error coloring has been improved, and user snippets saved in the gallery are now given shorter default names. In the Edit Variable dialog, for Formulas, a new field for "Display Precision" has been added, defining the number of decimal places to display the formula result in the variables panel, data tables, summary tables, and exported data tables. When loading a project file, the handling of missing or moved images has been improved, in particular in the case of a project containing only one image when that image is moved or missing. When no image file can be found, user is asked to locate first image in project. ProSEM main window size is now saved and restored from the settings. Changes The `image.sizex`, `image.sizey` and `image. PixelSize` properties are now in the units defined in ProSEM application settings, consistent with measurement dimensions. Background noise estimation now falls back to the minimum LER data value to avoid absurdly small noise level results. Hitachi SEM images with only part of the image area scanned, as indicated by "Pixel" metadata in `cond.txt` are now cropped to just the scanned area of the image. Solved Issues Under certain conditions, a PSD plot could have an incorrect minimum Y axis scaling. This has been corrected. A bug during recomputation of LER results after PSD segment averaging settings were changed could lead to endless recomputation loops. This has been corrected. After changing the pixel size either manually or from a grating pitch, sometimes the data would be recalculated twice. The redundant recalculation has been removed. For some groups of nearly horizontal lines, angle statistics could be computed incorrectly. This has been corrected so that angle statistics for line groups and in summary tables are now computed correctly, modulo 180 degrees.

9 Release Version 1.3 v v Solved Issues Fixed a crash that could occur after reloading a project file v2.2.0 Enhancements Download Documents in the Help tab saves Manual and Release Notes documentation to a user-defined folder in PDF format. Many improvements to Edge Detection to enhance reliability and performance, including refinements in handling of very large images, Canny edge detection, noise detection, and outlier point removal. Multiple improvements in Feature Finding, in both Find Similar for grating and array detection, and in Batch finding, including improved match detection and better false match rejection. Added new Feature Type: Triangle. For measured triangles, the output data includes the center position, the length of each edge, the angle of each edge from horizontal, each internal angle, the area bounded by the edge points, the area of the fitted triangle, and the bounding box. When using "Find Similar" to locate other elements of a grating, ProSEM now looks in both directions from the original template, either left and right, or up and down. Thus it is now possible to start the Find Similar for a grating using any measured feature in the grating. ProSEM now supports user-defined formulas in variable definitions. Refer to the manual for a full description of the feature usage, and many examples. Power Spectral Density (PSD)

10 10 ProSEM Release Notes o A new global setting in ProSEM allows more control over the LER PSD computation: When the "Number of Segments" under "PSD Averaging" is set to a value greater than one, roughness statistics are not computed along the entire edge in one step but rather in the given number of segments along the edge. The power spectrums of all segments are then averaged. The "Segment Overlap" setting controls the relative length overlap between any two adjacent segments.the settings used when computing LER information are stored in the ProSEM project. When displaying a measurement that used settings different from your current defaults, ProSEM offers to recompute LER statistics with the current settings. o The LER PSD graph now displays a crosshair and reports the spatial frequency and amplitude under the cursor location. This makes it easier to identify the characteristic frequency associated with peaks in the PSD plot. o The Power Spectral Density (PSD) computation for Line Edge Roughness (LER) can now optionally be processed using a multi-segment averaging (also known as multi-taper averaging), to reduce noise in the spectrum. This is enabled in the Properties, under the heading "PSD Averaging", where the number of segments and segment overlap can be specified. o Several improvements have been made to the determination of the Power Spectral Density (PSD) of Line Edge Roughness (LER) measurements. First, the background noise is now estimated and subtracted from the spectra prior to fitting. The graph display now includes markers to show the background noise level and the 1/Xi point on the plot. o The Power Spectral Density (PSD) for measured Line Edge Roughness (LER) can now be exported, either as a PNG image of the plot or as CSV data. Select a measurement or group with LER measurements in the Images tree, then right-click and choose Export... PSD... then select the filetype,.csv or.png. The batch mode feature finding strategy has been revised to improve the robustness with different images. The calculation of grating parameters has been improved to be invariant to order of saved measurements and also is now also tolerant to missing features. Measured features can now be exported to a GDSII file. The found edge points and the fitted shape are both output, to separate data layers, and if the Export option is selected from a Group or Image name, all found features are output to the GDS file. Individual measurements and groups of measurements can now be moved into another existing measurement group or to a new group using a contextual menu item in the Images tree. This allows measurements to be grouped and rearranged as desired. Note that groups may not contain mixed measurement types; for example a single group cannot contain both line and circle measurements. Redundant redraws of the image have now been removed, improving the user experience. On Windows, ProSEM now releases its license when the system goes to sleep and tries to re-acquire it when the system wakes up. In case of errors re-acquiring the license, the user only has the option to retry or quit the application. When quitting, the currently loaded project can be saved.

11 Release Version 11 Double click on splitter sash to expand/collapse result window to 2/3 or 1/3 of window size depending on the current sash position. The calculation of grating parameters has been improved to be invariant to order of saved measurements and also is now also tolerant to missing features. Left Double-click on either variable name or value opens edit variable dialog. Changes Export options have been moved from the drop-down menu in the control panel area to the right-click context menu for the tree items. PSD export to CSV and PNG has been added as an option in the right-click context menu for tree items. Save icon in the the top left corner has been removed. Functionality is now available through the context menu. The behavior of LER PSD fitting has changed: In a first step, the white noise level of the PSD is estimated, then the remaining parameters of the exponential PSD model are fit. The graphical display now reports the background noise level as parameter "B" and contains marker lines indicating the position of "B" and "1/xi" in the plot. Solved issues Metadata for some Hitachi CDSEMs was not being properly read; this has been corrected.

12 12 ProSEM Release Notes 1.4 v v2.1.1 Enhancements Can now read metadata files for images saved by some Hitachi CDSEM systems. Commands moving to the next non-validated item now move between groups or measurements, depending on which was selected before the move. This makes inspection and validation of measurement groups such as arrays and gratings faster and easier. Several usability improvements to the Batch Mode toolbar, in the Images Panel: - Next to the batch mode buttons, ProSEM now displays counts of images and measurements in the project, measurement counts are displayed in total and for each validation state. - The tooltips on images and groups in the measurements tree now include measurement counts for items within that image or group. - The batch mode buttons that move to a non-validated measurement are now disabled when there is no remaining on non-validated measurements. Changes The behavior when opening groups of files has changed slightly: No warnings are issued for files that may be metadata files for others, but warnings are still issued for random unsupported file types. Solved Issues User-defined variables could disappear in certain circumstances.this has been corrected, so that variables should be persistent once defined. Corrected a bug that could prevent correct detection of 2D arrays.

13 Release Version v2.1.0 Enhancements A new help menu item links to the documentation for mouse and keyboard shortcuts. A new help menu item links to the documentation for mouse and keyboard shortcuts. A new feature type "Ellipses" has been added to the list of available metrology objects in ProSEM. Results for circles and ellipses are reported in the same table. Circles can be recognized by having identical major and minor diameters and therefore an aspect ratio of one. Ellipses have aspect ratios of their minor over major axis lengths that are between zero and one (exclusive). The Pixel Size panel has been redesigned to improve the clarity and ease of operation. The three methods of setting the pixel size are now selected using a radio button: read from image file metadata, by entering the explicit pixel size, or calculated from the current measurement. A new capability has been added to create a summary table from a data table of measurements. This allows a statistical summary of measurements, tabulated by various factors. For example, a summary can be the average CD for each image, or for each value of a user-defined variable. An additional Filter capability makes it possible to automatically remove some values from the calculation, for example to remove outlier measurements. A progress bar is now displayed during Project Save or Load, of Image Folder Load. The Guide box now has a close button so it can be easily closed when no longer needed. The Panels can now be expanded or collapsed more easily; in addition to clicking on the expand/collapse icon as before, the user can now alternatively click on the panel title to collapse or expand a panel. When viewing a Data Table, the user can now right-click on an entry to choose to switch to the SEM Image view of that measurement. An option to delete an entire Group has been added to context menus for Groups, and an option to delete a measurement has been added to the context menu in Results Tables. The display of inactive measurements in a group and of array or grating fit results in the form of guide lines can now be switched on and off independently of each other. The context menu for groups now allows setting the validation state of all contained measurements. The "Set Validated, Next" button now works on groups, too. A single feature or array can now serve as a template to be detected in all other images of the project. This is triggered with a new "Run Batch Measurements" button. The feature works in conjunction with the new validation state tracking: Batch detected features are initially not validated until the user decides to review them and set their status to validated.

14 14 ProSEM Release Notes It is now possible to control the sort order of the filenames displayed in the Images panel. To sort the filenames, click the 3-dot icon found at the right side of the Images Panel title bar, then from the pop-up menu chose "Sort By >" then from the submenu choose Name, Measurements or Date. Name will sort the files alphabetically by name, Date will sort by the Modification Date of the file reported by the operating system, and Measurement will sort by whether the images have completed measurements stored. With each subsequent selection of the same menu item, the sort sequence will be reversed, so you can sort in forward or reverse order of any of the criteria. When the contents of the Images panel change, the current sort order is maintained automatically. The "Additional Settings" menu now offers three new CSV data export options for the currently selected measurement: - "Export Line Edges" writes out the positions of every egde point; multiple measured lines correspond to blocks separated by blank lines in the CSV file. - "Export Line Scan" writes out the positions and intensity values along the cut line of the current measurement box. - "Export Averaged Line Scan" writes out the scan-line-parallel position and average intensity values across all scan lines parallel to the cut line in the current measurement box; the scan lines are shifted so that the first fitted edge point along each scan line is in the same position as the one along the cut line. The color of the CD marker in the 1D cut view for measurements is now similar to the cut line marker on the SEM image view. Changes The behavior of tree motion commands has changed, see manual. Solved issues Under certain circumstances, some measurement labels in the Image File tree were not displayed properly. This has been fixed. Under certain circumstances, some items in the Feature Detection Panel were not drawn at the proper size. This has been fixed.

15 Release Version 1.5 v v Enhancements The display order of ProSEM's control panels is now reconfigurable. To shift the position of a panel, move the mouse into the panel to be moved, hold down the mouse button and drag that panel to a new location, above or below other panels. The Properties menu now has options to set the line weight and the text size for the image overlays on the measurement image. Scale Bar detection has been improved. Reading of external metadata files has been made more robust. For images saved from Hitachi SEMs, if the external meta-data (.txt) files are in the same directory as the image file, the pixel size will be read from the accompanying metadata file. SEM Images saved from Elionix tools will read the pixel size from the accompanying.csv metadata file in the same directory as the image file. Solved issues In earlier versions, if a project contained only a single image and that image was deleted, ProSEM would crash. It is no longer possible to delete an image from a project with only one image. In earlier versions of ProSEM, values entered in the variables panel were not saved unless the Return key was pressed prior to saving a measurement. This has now been fixed so that values entered for variables are saved without the need to press Return v2.0.0 Enhancements The user can select in the ProSEM properties the units that ProSEM uses to display all measurements, either nm or µm. If an image file in the project can no longer be found, its name will be shown in the Image Panel in Red text. If the user then clicks on the filename, they will be given the opportunity to locate that file, thus restoring the link to that file location, and any other missing image files in that same new location. Keyboard Shortcuts have been extended for the most common functions. For the full list of available keyboard shortcuts, see section 4.2 of the ProSEM manual. The Scale Bar mode has been improved. When Scale Bar mode is selected from the Feature Type menu, the ROI is restricted to a line. For a solid scale bar, the easiest use is now to left-click inside the solid scale bar itself -- ProSEM will then automatically locate the left and right edges of the scale bar, and indicate the scale bar length with a

16 16 ProSEM Release Notes red line. For a segmented or hashed scale bar, holding down the shift key, click and drag a line from beyond the left edge of the scale bar to beyond the right edge of the scale bar. ProSEM will attempt to locate the outer edges of the scale bar along the drawn line, and indicate the found scale bar with a red line. The Pixel Size can then be set as before using the "Adjust From Current Feature Measurement..." button in the Pixel Size panel. The Advanced Line Edge Roughness (LER) computations have been improved. Advanced LER now consists of computation of the roughness parameters Correlation Length and Roughness Exponent, as well as a Power Spectral Density (PSD) plot. Usability of the Scale Bar mode has been improved. In Scale Bar mode, the user can now only draw a measurement line. Aside from drawing a new measurement line, the user can only change the length or move the current line but not i.e. enlarge it to a normal measurement box. This also means that when the user switches from e.g. Lines and Spaces to Scale Bar mode, the measurement box is replaced with a measurement line at the original cutline position. Changes The format of the data output for a grating measurement has been reorganized for better consistency. Several algorithm improvements for more reliable edge and feature detection have been made. The user can select in the ProSEM properties the units that ProSEM uses to display all measurements, either nm or µm. The contextual menu items in the File panel have been renamed to make their functions more clear, either "Remove image from project" for images or "Delete measurement" for single measurements. Solved issues Loading images from Windows network file-share volumes now works, for example those file paths of the form: \\server\home\folder\file.jpg

17 Release Version 1.6 v v Enhancements The methods of manually drawing a measurement region of interest (ROI) has been improved. A shift-drag of the mouse in a straight line will create a narrow measurement ROI, whereas shift-drag of a rectangle will create the corresponding rectangular measurement box. The Gratings measurement type has been expanded to now measure all line/space features within the measurement box, and report average values and descriptive statistics. This will be expanded in the future to also allow analysis of each individual feature within the grating. Image display has been improved by using an improved scaling algorithm. The formatting of the results output has been improved for some measurement types. An initial measure of Line Edge Roughness (LER) is computed for line and grating measurement types. At this point, it is simply a 3*Standard Deviation metric, but this will be expanded in future releases. The format of the data output for a grating measurement has been reorganized for better consistency. Removing images and deleting measurements from the Images List has been improved. Individual and/or all measurements from an images entry can be removed (right mouse click). Manual measurements have been significantly improved. Manual measurements are stored to data tables just like automatic measurements, but will show an "Edge Mode" of "Manual". Multiple measurement regions can now be stored for an image. Only one measurement is 'active' at one time; the active measurement is displayed in a brighter green, as well as highlighted in the measurement tree. The active measurement can be adjusted and re-stored if desired. To create a new measurement, either, click-drag a new ROI box, or when no existing measurement is selected (ie, the image name itself is selected in the Images tree), drag the measurement box to the desired location for the new measurement. Stored measurements can be renamed either by clicking on the measurement name in the Images tree, or in the data table. The Feature Mode: Grating has been redesigned to improve reliability and performance. A new element now appears in the ROI box for a grating measurement. This "Grating Adjustment Bar" allows the user to define the grating period, which aids ProSEMs detection in the case of difficult gratings. If ProSEM does not properly find your grating period, adjust the position of the "Grating Adjustment Bar" to approximate one period of your grating. ProSEM should then be able to properly find your grating. With a single-line measurement setup, clicking on the "Expand to Grating Measurement" button will search the image for similar elements, and if others are found, the measurement will be converted into a Grating type measurement of all similar elements.

18 18 ProSEM Release Notes When a Grating Measurement is displayed, clicking the "Store as Separate Measurements" button will decompose the grating into individual elements, storing each as a separate Line/Space measurement. Significant improvements in gratings, performance, and LER computation & graphing. Changes When using the CUSTOM position setting of the Sigmoidal Fit method of Feature Detection, the custom value used is now stored in the data tables and exported, in the column headed "CD POS". Two "Remove" items in the image tree contextual menus, one on a root image, and the other on measurements under an image were renamed to: o [On an image] "Remove image from project" o [On a measurement] "Delete measurement" Solved Issues If a measurement in a series of measurements is deleted and then further measurements done, the measurement naming is now correct. For example if Measurement_3 of a set of 4 measurements deleted and then a further measurement carried out, this is given the correct name Measurement_5. Using ProSEM natively on Ubuntu 14.04, the GUI was not useable, via X session it worked fine. Now it works.

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