XY Mapping Parts for Microanalysis

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Dorothy Adela Sparks
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1 XY Mapping Parts for Microanalysis

3 Contents Contents 1 How to set Part conditions Setting the condition of Move to XY Position (XY mapping : micro) Part Edit Mapping Conditions Other dialog boxes Conditions List dialog box Test dialog box Batch Input dialog box Options dialog box Control Stage dialog box XY Mapping Part for Microanalysis Part i

1.1 Setting the condition of Move to XY Position (XY mapping : micro) Part 1 How to set Part conditions In this chapter, how to set the XY mapping Parts conditions for microanalysis (Move to XY

5 1.1 Setting the condition of Move to XY Position (XY mapping : micro) Part 1 How to set Part conditions In this chapter, how to set the XY mapping Parts conditions for microanalysis (Move to XY Position, Next XY Position) is described. CAUTION: The XY attachment will be required for proper execution of this Part. 1.1 Setting the condition of Move to XY Position (XY mapping : micro) Part Use the Move to XY Position (XY mapping : micro) Part in combination with the Next XY Position (XY mapping) Part when repeating the execution of alignment and measurement Parts in an XY mapping measurement for micro regions. Fig Move to XY Position (XY mapping : micro) dialog box Memo Mapping condition name Edit Enter the memo (optional). The memo entered here will be displayed in the History window when this Part is running. The entered memo will also be displayed as a tool tip of the flow bar button. Select the mapping condition name. Edit the selected mapping conditions. Click this button to display the Edit Mapping Conditions dialog box. 1.2 Edit Mapping Conditions? Opens the online help of this Part. OK Cancel Sets the conditions and closes the dialog box. Does not set the conditions and closes the dialog box. XY Mapping Part for Microanalysis Part 1

6 1 How to set Part conditions 1.2 Edit Mapping Conditions In the Edit Mapping Conditions dialog box, the conditions (measurement points) of the XY mapping for micro region of the sample can be set using the provided CCD camera. Click the Edit button in the Move to XY Position (XY mapping : micro) dialog box to display the Edit Mapping Conditions dialog box. Measurement point list Destination button Measurement point map Slider Fig Edit Mapping Conditions dialog box Mapping condition name Select the mapping conditions to be edited. List Tip: To create new mapping conditions, click the List button and add a new mapping condition name in the List of conditions dialog box displayed. Opens the List of conditions dialog box, where mapping conditions can be added or deleted List of conditions dialog box Measurement point list 2 XY Mapping Part for Microanalysis Part

7 1.2 Edit Mapping Conditions Measurement point map The measurement point map not only displays the specified measurement points but is used to add measurement points clicked points on the measurement point map to the measurement point list. The Z coordinate should be set in the Options dialog box in advance Options dialog box Destination button Click one of the buttons to move the displayed area of the map around. Slider CAUTION: The buttons do not move the sample. If you want to move the sample, click the Control stage button, and move the axes of the XY stage. Zooms in/out the displayed map. Every time you click this button, the marker position indicating the measurement center will be switched as shown below. Measurement center Every time you click this button, the measurement order number will be switched as shown below. Measurement order number Every time you click this button, the grid style will be switched as shown below. XY Mapping Part for Microanalysis Part 3

8 1 How to set Part conditions Add point Adds a point to the measurement point list. To edit the position, click the value to edit, change the value, then press the Enter key. Remove point Update Removes the selected measurement point from the measurement point list. Updates the specified mapping conditions. Tip: Mapping conditions can be edited while the XY mapping measurement is running. The Update button is used to update the mapping conditions edited. Control stage Opens the Control Stage dialog box to move the XY stage axes and set the sample position to display in the measurement point map Control Stage dialog box Snapshot Test Batch input Import Export Options Close Snapshots the sample currently-placed on the stage and displays the photo in the measurement point map. Moves the sample to the specified measurement position Test dialog box Opens the Batch Input dialog box, where regularly-spaced measurement points can be set at one time Batch Input dialog box Loads the mapping conditions saved in the CSV format. Saves the mapping conditions displayed in the measurement point list in the CSV format. Opens the Options dialog box to set the conditions for snapshot, etc Options dialog box Closes the Edit Mapping Conditions dialog box. 4 XY Mapping Part for Microanalysis Part

1.3 Other dialog boxes 1.3 Other dialog boxes 1.3.1 Conditions List dialog box Mapping conditions can be added or deleted in the List of conditions dialog box.

9 1.3 Other dialog boxes 1.3 Other dialog boxes Conditions List dialog box Mapping conditions can be added or deleted in the List of conditions dialog box. Click the List button in the Edit Mapping Conditions dialog box to display the List of conditions dialog box. Conditions list Fig List of conditions dialog box Add Displays the Add dialog box to add mapping conditions. Enter the mapping conditions and click the OK button. Duplicate Display the Duplicate dialog box to duplicate the mapping conditions. Select the mapping conditions from the conditions list to be duplicated and click the Duplicate button. Then, edit the mapping condition name and click the OK button. XY Mapping Part for Microanalysis Part 5

Delete Close Deletes the mapping conditions selected in the conditions list. Closes the dialog box. 1.3.

10 1 How to set Part conditions Rename Display the Rename dialog box to rename the mapping condition name. Select the mapping condition name from the conditions list to be renamed and click the Rename button. Then, edit the mapping condition name and click the OK button. Delete Close Deletes the mapping conditions selected in the conditions list. Closes the dialog box Test dialog box The sample is moved to each measurement point stored in the selected mapping conditions. You can see how the sample moves in the AR-UMVI window which displays the picture taken by the CCD camera. Click the Test button to display the Test dialog box. Fig Test dialog box Interval(sec) Execute Next >> Stop Close Enter the interval time from when the sample is moved to one measurement point till when the sample is moved to the next measurement point. Moves the sample to the measurement point No. 1. After that, moves the sample to next measurement point every interval entered in the Interval(sec) box passes. Moves the sample to the next measurement point. Stops moving the sample to the next measurement point. Closes the Test dialog box 6 XY Mapping Part for Microanalysis Part

1.3 Other dialog boxes 1.3.3 Batch Input dialog box In the Batch Input dialog box, measurement points can be set on a grid.

11 1.3 Other dialog boxes Batch Input dialog box In the Batch Input dialog box, measurement points can be set on a grid. Click the Batch input button to display the Edit Mapping Conditions dialog box. Fig Batch Input dialog box Number of measurement points Displays the number of the measurement points given based on the specified conditions. Rel. Current Start / End Step OK Cancel When the Rel. box is checked, enter the absolute values of the starting and ending points. When the Rel. box is unchecked, enter the relative distance of the starting or ending point from the current position. Displays the current positions of the X, Y, and Z axes. Enter the ranges of the X, Y, and Z axes to set measurement points. Enter the step sizes along the X, Y, and Z axes to set measurement points so that the value of the distance between the starting and ending points is divisible by the entered step size. Adds the measurement points calculated based on the specified conditions to the measurement point list, and closes the Batch Input dialog box. Does not calculate measurement points and closes the Batch Input dialog box. XY Mapping Part for Microanalysis Part 7

1 How to set Part conditions 1.3.4 Options dialog box Set the environmental settings of the mapping conditions in the Options dialog box.

12 1 How to set Part conditions Options dialog box Set the environmental settings of the mapping conditions in the Options dialog box. Click the Options button in the Edit Mapping Conditions dialog box to open the Options dialog box. Snapshot settings Range Snapshot settings Origin Fig Options dialog box Select Origin only or All as the area to take a snapshot of by the CCD camera. Select Current or set to set the origin when snapshotting by the CCD camera. When you select Set, enter the positions of the X and Y axes in the X(mm) and Y(mm) boxes as the origin. Clicking the Read button sets the current positions of the X and Y axes to the X(mm) and Y(mm) boxes. Snapshot settings Origin alignment Adjusts the origin for snapshotting by the simplified auto-focus function. 8 XY Mapping Part for Microanalysis Part

13 1.3 Other dialog boxes Point settings Z position Select Current or Set to determine the Z position when setting measurement points by clicking on the measurement point map. When you select Set, enter the position of the Z axis in the Z(mm) box as the origin. Clicking the Read button sets the current position of the Z axis to the Z(mm) box. Point settings Display the selected point in the center Check the Display the selected point in the center box to move the measurement point selected in the measurement point list to the center of the measurement point map. OK Cancel Sets the conditions and closes the dialog box. Does not set the conditions and closes the dialog box. XY Mapping Part for Microanalysis Part 9

moved by operating the sample stage (X, Y, and Z axes).

Click the Control Stage button in the Edit Mapping Conditions dialog box to open the Control

Z axis Destination button X, Y axis Destination button Current Destination Step Fig. 1.3.

Enter the destination of each axis of the sample stage.

box. Enter the step size to move the corresponding axis when the Destination button is clicked.

Move by step / Move continuously When Move by step is selected, clicking the Destination button

14 1 How to set Part conditions Control Stage dialog box To snapshot of the sample to set mapping conditions, the sample can be moved by operating the sample stage (X, Y, and Z axes). The sample position can be confirmed by the picture from the CCD camera in the AR-UMVI window. Click the Control Stage button in the Edit Mapping Conditions dialog box to open the Control Stage dialog box. Z axis Destination button X, Y axis Destination button Current Destination Step Fig Control Stage dialog box Displays the current position of each axis of the sample stage. Enter the destination of each axis of the sample stage. Click the Move button to move the corresponding axis to the position entered in the Destination box. Enter the step size to move the corresponding axis when the Destination button is clicked. This is activated only when Move by step is selected. Move by step / Move continuously When Move by step is selected, clicking the Destination button moves the corresponding axis by the step size entered in the Step box. When Move continuously is selected, pressing the Destination button moves the corresponding axis. (The values in the Step boxes are ignored.) Set Close Adds the current positions to the measurement point list in the Edit Mapping Conditions dialog box. Closes the Control Stage dialog box. 10 XY Mapping Part for Microanalysis Part

Create Mask File Part

Create Mask File Part Contents Contents 1 How to set Part conditions... 1 1.1 Setting conditions... 1 1.2 Performing mask processing... 3 Create Mask File Part i 1.1 Setting conditions エラー! 参照元が見つかりません