INDEX Linear Gage Mu-Checker Laser Scan Micrometer

Transcription

1 INDEX Linear Gage Linear Gage/Display Unit Selection Guide G-2 Linear Gage LGK G-3 Linear Gage LGF G-4, 5 Linear Gage LGB G-6 Linear Gage LGE G-7 Linear Gage LGD/LGD-M G-8 Linear Gage LGS G-9 Laser Hologage LGH G-10 Laser Hologage G-11 Long Stroke Linear Gage LG/LGM G-12 EC Counter G-13 EG Counter G-14 EB Counter G-15 EF Counter G-16 Difference/Sum Unit LG-DF G-17 D/A Conversion Unit LG-DAI G-17 EV Counter G-18 D-EV Display Unit G-19 SENSORPAK G-19 Litematic and Litematic Head G-20, 21 Mu-Checker Mu-Checker Probe Selection Guide G-22 Mu-Checker System Diagram G-23 Lever Heads G-24 Cartridge Heads G-25 Analog Mu-Checker G-26 Digital Mu-Checker G-27 Multi Mu-Checker G-28 Multi Mu-Checker Add-On Units G-29 A/D Conversion Unit G-30 EV-16A Counter G-30 Laser Scan Micrometer Laser Scan Micrometer Selection Guide G-31, 32 Laser Scan Micrometer LSM-9506 G-33 Laser Scan Micrometer LSM-902/6900 G-34 CONTINUED NEXT PAGE

2 INDEX Laser Scan Micrometer (Continued) Laser Scan Micrometer LSM-500S G-35 Laser Scan Micrometer LSM-501S G-36 Laser Scan Micrometer LSM-503S G-37 Laser Scan Micrometer LSM-506S G-38 Laser Scan Micrometer LSM-512S G-39 Laser Scan Micrometer LSM-516S G-40 LSM-5100 Display Unit G-41 LSM-6200 Display Unit G-41 Laser Scan Micrometer Applications & Accessories G-42, 43 Laser Indicator Laser Indicator G-44

3 Sensor Systems Linear Gage Mu-Checker Laser Scan Micrometers New Products Linear Gage LGS INDEX Linear Gage Linear Gage/Display Unit Selection Guide G-2 Linear Gage LGK G-3 Linear Gage LGF G-4, 5 Linear Gage LGB G-6 Linear Gage LGE G-7 Linear Gage LGD/LGD-M G-8 Linear Gage LGS G-9 Laser Hologage LGH G-10 Laser Hologage G-11 Long Stroke Linear Gage LG/LGM G-12 EC Counter G-13 EG Counter G-14 EB Counter G-15 EF Counter G-16 Difference/Sum Unit LG-DF G-17 D/A Conversion Unit LG-DAI G-17 EV Counter G-18 D-EV Display Unit G-19 SENSORPAK G-19 Litematic and Litematic Head G-20, 21 Mu-Checker Mu-Checker Probe Selection Guide G-22 Mu-Checker System Diagram G-23 Lever Heads G-24 Cartridge Heads G-25 Analog Mu-Checker G-26 Digital Mu-Checker G-27 Multi Mu-Checker G-28 Multi Mu-Checker Add-On Units G-29 A/D Conversion Unit G-30 EV-16A Counter G-30 Laser Scan Micrometer Laser Scan Micrometer Selection Guide G-31, 32 Laser Scan Micrometer LSM-9506 G-33 Laser Scan Micrometer LSM-902/6900 G-34 Laser Scan Micrometer LSM-500S G-35 Laser Scan Micrometer LSM-501S G-36 Laser Scan Micrometer LSM-503S G-37 Laser Scan Micrometer LSM-506S G-38 Laser Scan Micrometer LSM-512S G-39 Laser Scan Micrometer LSM-516S G-40 LSM-5100 Display Unit G-41 LSM-6200 Display Unit G-41 Laser Scan Micrometer Applications & Accessories G-42, 43 Laser Indicator Laser Indicator G-44 Laser Scan Micrometer LSM-500S G-1

4 Linear Gage / Display Unit Selection Guide KH Counter EC Counter EG Counter EB Counter EF Counter EV Counter Representative Code No A A A A A Applicable gages mm Laser Hologage mm Laser Hologage mm LG/LGM mm LGK/LGB/LGF mm LGK/LGF mm LGF w/origin point mark 0.001mm LGF w/origin point mark 0.001mm LG/LGM 0.001mm LGK/LGB/LGF 0.005mm LGE 0.01mm LGD/LGD-ML 0.01mm LGS Functions Number of connectable gages Display *1 *1 *1 Zero set *1 *1 *1 Presetting *1 *1 *1 Direction switch GO/NG indication GO/NG output 5-stage tolerance display/output 3-stage tolerance display/output mm/inch switch ABS gage zero set ABS/INC gage changeover Peak hold Run out (TIR) measurement Double count Sum/difference calculation Lower digit blank-out External zero set *2 *2 *2 *2 *2 *2 *2 External preset *3 External hold *3 External tolerance set (when a PC is used) External tolerance memory switch (when I/O is used) External peak-hold cancel Inter-axial calculation function Output Power-supply voltage error Overspeed error Overflow error Gage error Tolerance setting error Communication error Parallel BCD output Serial BCD output Simple analog output Tolerance judgment output *3 Limit output Segment output RS-232C output *3 *3 *3 *3 Digimatic output *5 *4 *4 *4 *4 RS link (Maximum number of gages) *1: When an optional D-EV is connected. *2: Enabled by setting 0 via external presetting. *3: Switchable between the Digimatic output. *4: Switchable between the RS-232C output. *5: Switchable between the tolerance judgment output. *3 (6) *3 (6) *3 (12) *3 (12) (60) (60) (60) G-2

5 Linear Gage LGK SERIES μm, 0.5μm or 1μm Reading Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 1μm, 0.5μm or 0.1μm Inch Resolution: Refer to the applicable counters Length standard: Photoelectric linear encoder Max. response speed: 1500mm/s, 400mm/s ( ) Contact point: ø3mm carbide Stem: ø8mm Bearing type: Stroke ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 0.4μm ( ), 2μm ( ), 4μm ( ) Cable length: 80 /2m Dust/Water protection level: IP66 Compact design with a 8mm stem diameter Excellent protection against dust and water splash (IP-66) in harsh shop-floor environments. Maximum permissible acceleration values for shock and impact, 11ms (IEC ) Output differential square wave signals for a wide range of applications. Employs linear stroke bearings on the spindle movement for durability Thrust Stem with a clamping nut is optional. Interchangeable contact points for dial indicators can be used. Applicable Counters EF counter ( A, A) EG counter ( ) EB counter ( )* EV counter ( )* * Only applicable for resolution mm and 0.001mmLGK : Rubber boot (10mm) : Extension cable (5m) : Extension cable (10m) : Extension cable (20m) 02ADE230: Air drive unit 02ADB680: Thrust stem set 02ADB682: Clamping nut 02ADB683: Wrench Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 10mm (.4 ) mm (1.5+L/50)μm 0.65N / 0.6N / 0.55N 8mm 10mm (.4 ) mm (1.5+L/50)μm 0.65N / 0.6N / 0.55N 8mm 10mm (.4 ) mm (0.8+L/50)μm 0.65N / 0.6N / 0.55N 8mm *L = Measured length (mm) **Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) MASS: 250g G-3

6 Linear Gage LGF SERIES μm, 0.5μm or 1μm Reading Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 1μm, 0.5μm or 0.1μm Inch Resolution: Refer to the applicable counters Length standard: Photoelectric linear encoder Max. response speed: 1500mm/s, (400mm/s: , ) Contact point: ø3mm carbide Stem: ø8mm or ø15mm Bearing type: Stroke ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 4μm ( , , ), 2μm ( , , ) or 0.4μm ( , ) Cable length: 80 /2m Dust/Water protection level: IP66 Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 10mm (.4 ) mm (0.8+L/50)μm 1.2N / 1.1N / 1.0N 8mm 10mm (.4 ) mm (1.5+L/50)μm 1.2N / 1.1N / 1.0N 8mm 10mm (.4 ) mm (1.5+L/50)μm 1.2N / 1.1N / 1.0N 8mm 25mm (1 ) mm (0.8+L/50)μm 4.6N / 4.3N / 4.0N 15mm 25mm (1 ) mm (1.5+L/50)μm 4.6N / 4.3N / 4.0N 15mm 25mm (1 ) mm (1.5+L/50)μm 4.6N / 4.3N / 4.0N 15mm 50mm (2 ) mm (1.5+L/50)μm 5.7N / 5.3N / 4.9N 15mm 50mm (2 ) mm (1.5+L/50)μm 5.7N / 5.3N / 4.9N 15mm *L = Measured length (mm) **Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) Applicable Counters EF counter ( A, A) EG counter ( ) EB counter ( ) EV counter ( ) : Rubber boot (10mm) : Rubber boot (25mm) : Rubber boot (50mm) : Extension cable (5m*) : Extension cable (10m*) : Extension cable (20m*) 02ADB680: Thrust stem set (for 10mm range models) 02ADB690: Thrust stem set (for 25, 50mm range models) *not available for and Clamping nut for thrust stem M9.5x (HIROSE) RM12BPG-6P ø or longer (stroke) (screw top height) , / MASS: 250g 20.4 Connecting cable 2m 6 RM12BPG-6P (HIROSE) Connecting cable 2m ø Clamping nut for thrust stem ø15 M14x or longer (screw top height) , / MASS: 290g Clamping nut for thrust stem M14x ø or longer (stroke) (screw top height) , MASS: 380g G-4

7 Linear Gage LGF with Origin Point Mark SERIES μm or 1μm Reading Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 1μm or 0.5μm Inch Resolution: Refer to the applicable counters Length standard: Photoelectric linear encoder Max. response speed: 1500mm/s Contact point: ø3mm carbide Stem: ø8mm or ø15mm Bearing type: Stroke ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 4μm ( , , ) or 2μm ( , , ) Cable length: 80 /2m Dust/Water protection level: IP Applicable Counters EF counter ( A, A) EB counter ( ) EG counter ( ) EV counter ( ) : Rubber boot (10mm) : Rubber boot (25mm) : Rubber boot (50mm) 02ADB680: Thrust stem set (for 10mm range models) 02ADB690: Thrust stem set (for 25, 50mm range models) Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 10mm (.4 ) mm (1.5+L/50)μm 1.2N / 1.1N / 1.0N 8mm w/ origin point mark 10mm (.4 ) mm (1.5+L/50)μm 1.2N / 1.1N / 1.0N 8mm w/ origin point mark 25mm (1 ) mm (1.5+L/50)μm 4.6N / 4.3N / 4.0N 15mm w/ origin point mark 25mm (1 ) mm (1.5+L/50)μm 4.6N / 4.3N / 4.0N 15mm w/ origin point mark 50mm (2 ) mm (1.5+L/50)μm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark 50mm (2 ) mm (1.5+L/50)μm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark *L = Measured length (mm) **Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) Clamping nut for thrust stem M9.5X ø or longer (stroke) ø (screw top height) , MASS: 250g Sleeve ø Clamping nut for thrust stem M14x ø15 26 or longer (screw top height) , MASS: 290g Clamping nut for thrust stem M14x ø or longer (stroke) (screw top height) , MASS: 380g G-5

8 Linear Gage LGB SERIES mm Reading Extremely compact design. Available with an outside diameter as small as 8mm. The small photoelectric linear encoder assures high precision over the entire stroke range , H , H, , , H, , The ball bearings used in the spindle unit ensure superb durability , Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 5mm (.2 ) mm 2μm 0.65N / 0.6N / 0.55N 8mm 5mm (.2 ) H 0.001mm 1μm 0.65N / 0.6N / 0.55N 8mm 10mm (.4 ) mm 2μm 0.8N / 0.75N / 0.7N 8mm 10mm (.4 ) H 0.001mm 1μm 0.8N / 0.75N / 0.7N 8mm 10mm (.4 ) mm 2μm 0.8N / 0.75N / 0.7N 8mm Sine-wave output 10mm (.4 ) mm 2μm 0.6N / 0.55N / 0.5N 8mm 10mm (.4 ) mm 2μm 0.8N / 0.75N / 0.7N 8mm w/ pneumatic cylinder 10mm (.4 ) mm 2μm 0.8N / 0.75N / 0.7N 8mm w/ pneumatic cylinder 5mm (.2 ) mm 2μm 0.65N / 0.6N / 0.55N 9.5mm Low measuring force 10mm (.4 ) mm 2μm 0.8N / 0.75N / 0.7N 9.5mm 10mm (.4 ) H 0.001mm 1μm 0.8N / 0.75N / 0.7N 9.5mm 10mm (.4 ) mm 2μm 0.8N / 0.75N / 0.7N 9.5mm Sine-wave output 10mm (.4 ) mm 2μm 0.6N / 0.55N / 0.5N 9.5mm Low measuring force 10mm (.4 ) mm 2μm 0.8N / 0.75N / 0.7N 9.5mm w/ pneumatic cylinder *Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 1μm Inch Resolution: Refer to the applicable counters Length standard: Photoelectric linear encoder Max. response speed: 900mm/s Contact point: ø3mm carbide Stem: ø8mm or ø9.5mm Bearing type: Stroke ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) (Sign-wave output: , ) Signal pitch: 4μm Cable length: 80 /2m Dust/Water protection level: IP54 Applicable Counters EF counter ( A, A) EB counter ( ) EG counter ( ) EV counter ( ) : Rubber boot for 5mm LGB (spare) : Rubber boot for 10mmLGB (spare) : Extension cable (5m) : Extension cable (10m) : Extension cable (20m) ø ø8 ø MASS: 145g (thread) 82.7 (HIROSE) RM12BPG-6P L ø ø9 0 ø ø14 Clamping nut No L=11.5 to MASS: 160g , H MASS: 140g Connecting cable (2m) Dsub 15-pin 7.3 ø Connecting cable (2m) ø4.2 ø7.9 Knurl ø12 ø9.5 ø14 Clamping nut No L=11.5 to , H MASS: 150g 34.9 L 4.9 (thread) (39.3) Air inlet (Applicable air hose: ID ø2.5) ø Stroke 10.5mm or longer MASS: 165g ø Clamping nut (No ) L=11.5 to 13.0 Applicable air hose (ID ø2.5) L MASS: 170g Knurl Stroke 10.5mm or longer 113 G-6

9 Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 5μm Inch Resolution: Refer to the applicable counters Length standard: Photoelectric linear encoder Max. response speed: 1400mm/s Contact point: ø3mm carbide Stem: ø8mm or ø15mm Bearing type: Stroke ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 20μm Cable length: 80 /2m Dust/Water protection level: IP66 (IP54: ) Applicable Counters EF counter ( A, A) EB counter ( ) EG counter ( ) EV counter ( ) Linear Gage LGE SERIES mm Reading The LGE Series Linear Gages are compact electronic gage heads designed to fit into very tight spaces. Employing linear ball bearings, the LGE is also highly durable for long life With a rubber boot for use in harsh environments. Optional thrust stem and tightening nut facilitate setup of the LGE linear gage in holes of a plate or fixture : 10mm rubber boot (spare) : 25mm rubber boot (spare) : 50mm rubber boot (spare) 02ADC730: ø9.5mm Thrust stem set (for 10mm LGE model) 02ADC740: ø18mm Thrust stem set (for 25mm/50mm LGE model) Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 10mm (.4 ) mm 20μm 1.2N / 1.1N / 1.0N 8mm 10mm (.4 ) mm 20μm 1.2N / 1.1N / 1.0N 8mm w/ pneumatic cylinder 25mm (1 ) mm 20μm 4.6N / 4.3N / 4.0N 15mm 50mm (2 ) mm 30μm 5.7N / 5.3N / 4.9N 15mm *Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) (at air supplied) 10.2 (stroke) (stroke) M9.5x (screw top height) MASS: 200g Applicable air hose (ID ø2.5) 0.6 (screw top height) ø M9.5x MASS: 220g ø ø M14x (stroke) MASS: 250g RM12BPG-6P (HIROSE) ø (screw top height) Connecting cable 2m ø M14x (stroke) MASS: 300g (screw top height) G-7

10 Linear Gage LGD / LGD-M SERIES / 0.01mm Reading The LGD is an ultra-compact ABS Linear Gage designed to fit into very tight spaces. It keeps track of its origin point once set. The use of an absolute scale* in the sensor makes it possible to maintain the origin setting even when the power is switched off Metric Special linear ball bearings are used for the spindle guide to ensure a long service life. Optional thrust stem and tightening nut facilitate setup of the LGD linear gage in holes of a plate or fixture. LGD-M employs the slide-bearing for higher cost-effectiveness Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 10mm mm 20μm 1.2N / 1.1N / 1.0N 8mm 10mm mm 20μm 1.2N / 1.1N / 1.0N 8mm w/ pneumatic cylinder 25mm mm 20μm 4.6N / 4.3N / 4.0N 15mm 50mm mm 30μm 5.7N / 5.3N / 4.9N 15mm Inch Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks N / 1.1N / 1.0N 8mm N / 1.1N / 1.0N 8mm w/ pneumatic cylinder N / 4.3N / 4.0N 15mm N / 5.3N / 4.9N 15mm Metric LGD LGD LGD-M Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 10mm mm 15μm 2.0N / 1.8N / 1.6N 8mm Using slide-bearing Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 1μm or.0005 Length standard: Capacitance-type ABSOLUTE linear encoder Max. response speed: Unlimited Contact point: ø3mm carbide Stem: Bearing type: ø8mm or ø15mm Stroke ball bearing (Slide-bearing: , ) Measuring force: Refer to the list of specifications Output signal: Digimatic output External input: Origin-setting signal (Absolute origin position can be changed externally.) Cable length: 80 /2mm Dust/Water protection level: IP66 (IP54: , ) Applicable Counters EC counter ( A) EB counter ( ) EG counter ( ) EV counter ( ) : 10mm rubber boot (spare) : 25mm rubber boot (spare) : 50mm rubber boot (spare) 02ADC730: ø9.5mm Thrust stem set (for 10mm model) 02ADC740: ø18mm Thrust stem set (for 25mm/50mm model) *: Digimatic Power Supply Unit * To denote your AC line voltage add the following suffixes to the order No. (e.g.: A): A for UL/CSA, D for CEE, E for BS, F for SAA, DC for China, K for EK, No suffix is required for JIS/100V Inch LGD-M Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks N / 1.8N / 1.6N 8mm Using slide-bearing *Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) (stroke) M (Screw top head) 0 ø / MASS: 200g (147.1) or longer (stroke) (screw top height) / MASS: 182g 0 ø (stroke) ø M (Screw top head) 0 ø / MASS: 220g M (stroke) ø (Screw top head) / MASS: 300g M (stroke) ø (Screw 19 top head) / MASS: 250g G-8

11 Linear Gage LGS SERIES / 0.01mm Reading The LGS is compact Linear Gage designed to fit into tight spaces. Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 0.01mm or.0005 Length standard: Capacitance-type ABSOLUTE linear encoder Max. response speed: Unlimited Contact point: ø3mm carbide (ø3mm steel: ) Stem: ø8mm or 3/8 DIA Bearing type: Slide-bearing Measuring force: Refer to the list of specifications Output signal: Digimatic output Cable length: 80 /2m Dust/Water protection level: IP66 Applicable Counters EC counter ( A) EB counter ( ) EG counter ( ) EV counter ( ) : Spare rubber boot : Air Drive Unit (metric) Air Drive Unit (inch) 02ADF640: SPC cable extension adapter 02ADD950: Extension cable (0.5m) : Extension cable (1m) : Extension cable (2m) : EC Counter Metric Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 12.7mm mm 0.015mm 2.0N / 1.8N / 1.6N 8mm Inch Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks N / 1.8N / 1.6N 3/8 DIA *Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) MASS: 190g G-9

12 Laser Hologage LGH SERIES μm Reading These are extra-high accuracy gaging heads provided with resolution up to mm. The compact dimensions allow easy installation to very tight spaces. The Laser Hologage employs a unique holography scale as the length standard, ensuring excellent measuring accuracy and repeatability. The dedicated display unit (EF Counter) is optional. A linear ball bearing in the spindle guide provides excellent durability for an extended service life. The mm reading type LGB linear gage ( ) comes with a clamping nut on the stem Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 0.1μm Inch Resolution: Refer to the applicable counters Length standard: Laser-hologram measurement sensor Max. response speed: 250mm/s Contact point: R1.5mm carbide Stem: ø15mm Bearing type: High precision linear ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 0.25μm Cable length: 80 /2m Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 10mm (.4 ) μm 0.2μm 0.55N / 0.45N / 0.35N 15mm 10mm (.4 ) μm 0.2μm 0.1N / / 15mm Low measuring force *Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) Linear Gage LGB SERIES μm Reading Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 5mm (.2 ) μm 0.8μm 0.65N / 0.60N / 0.55N 9.5mm *Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) MASS: 200g Applicable Counters EF counter ( A, A) EG counter ( ) : Rubber boot : Stem fixture for fixing to top surface : Stem fixture for fixing to bottom surface : Spindle lifting cable : Laser Hologage stand Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 0.1μm Inch Resolution: Refer to the applicable counters Length standard: Photoelectric linear encoder Max. response speed: 380mm/s Contact point: R1.5mm carbide Stem: ø9.5mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 0.4μm Cable length: 80 /2m Dust/Water protection level: IP54 Applicable Counters EF counter ( A, A) EG counter ( ) : Extension cable (5m) : Extension cable (10m) : Extension cable (20m) : Rubber boot MASS: 160g G-10

13 Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 0.01μm Length standard: Laser-hologram measurement sensor Max. response speed: 250mm/s Contact point: R5mm carbide Stem: ø15mm Bearing type: High precision linear ball bearing Measuring force: Refer to the list of specifications Output signal: 90 phase difference, two-phase sine wave Signal pitch: 0.25μm Cable Length: 80 /2m 09CAA335: Zero-set remote controller : Stem fixture for fixing to top surface : Stem fixture for fixing to bottom surface : Spindle lifting cable : Laser Hologage stand Laser Hologage SERIES μm / 1μin Reading The Mitutoyo Laser Hologage is a high-end digital gaging system that employs diffracted laser beam interference to make highly accurate and repeatable measurements. It features ultra-fine diffraction gratings which are holographically recorded on the scale. The Laser Hologage is suitable for measuring ultra-high precision parts, especially those in semiconductor and related industries. Highly accurate measurement due to an ultra-high resolution of mm (0.01μm), which is close to the performance of laser interferometers. Excellent measuring stability the design is also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes. High-precision linear ball bearings are used in the guide for extremely smooth movement and exceptional durability. A display unit is provided. Gage head Display unit Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 10mm (.4 ) A 0.01μm / 1μinch 0.1μm 0.55N / 0.45N / 0.35N 15mm 10mm (.4 ) A 0.01μm / 1μinch 0.1μm 0.1N / / 15mm Low measuring force *Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) MASS: 200g MASS: 2kg G-11

14 6 6 Long Stroke Linear Gage LG/LGM SERIES / 1μm Reading There are three types including the standard model, low measuring force model, and rubber boot model (made-toorder) available Motor drive unit Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: 1μm or 0.1μm Inch Resolution: Refer to the applicable counters Length standard: Photoelectric linear encoder Max. response speed: 400mm/s (800mm/s: motor-driven type) Contact point: ø3mm carbide Stem: ø20mm Bearing type: Bearing guide Measuring force: Refer to the list of specifications Output signal: 90 phase difference, differential square wave (RS-422A equivalent) Cable length: 80 /2m Dust/Water protection level: IP54 Applicable Counters EF counter ( A, A) EG counter ( ) EB counter ( )* EV counter ( )* * Resolution 1μm LGM only Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 100mm (4 ) μm (2+L/100)μm 2.5μm 8.0N / 6.5N / 5.0N 20mm Standard 100mm (4 ) μm (2+L/100)μm 2.5μm 3.0N / / 20mm Low measuring force 100mm (4 ) μm (2+L/100)μm 2.5μm 8.0N / 6.5N / 5.0N 20mm w/ rubber boot 100mm (4 ) μm (2.5+L/100)μm 3μm 8.0N / 6.5N / 5.0N 20mm Standard 100mm (4 ) μm (2.5+L/100)μm 3μm 3.0N / / 20mm Low measuring force 100mm (4 ) μm (2.5+L/100)μm 3μm 8.0N / 6.5N / 5.0N 20mm w/ rubber boot *L = Measured length (mm) **Posture of gage: Upward / Horizontal / Downward Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 100mm (4 ) μm (2+L/100)μm 2.5μm 3.0N / 6.5N / 9.5N 20mm Motor-driven Type 100mm (4 ) μm (2+L/100)μm 2.5μm 4.5N / /6.0N 20mm Motor-driven Type 100mm (4 ) μm (2.5+L/100)μm 3μm 3.0N / 6.5N / 9.5N 20mm Motor-driven Type 100mm (4 ) μm (2.5+L/100)μm 3μm 4.5N / /6.0N 20mm Motor-driven Type *L = Measured length (mm) **Posture of gage: Upward ( ) / Horizontal ( ) / Downward ( ) With rubber boot: , Standard/Low measuring force type Rubber boot type Standard type (motor-driven type) Rubber boot type (motor-driven type) RM12BPG-6P (HIROSE) 2-ø4.5, ø9 depth Cable length (2m) Stroke 102 or longer ø MASS: 750g Connecting cable (2m) 11PRH/12PRH 236 (A counter varies depending on the gage) Stroke 102 or longer 6 RM12BPG-6P (HIROSE) MASS: 780g ø4.5, ø9 depth Rubber boot Drive unit cable length (2m) HR10A-7P-6P (HIROSE) Output cable length (2m) RM12BPG-6P (HIROSE) 2-ø4.5, 9 depth Stroke 102 or longer MASS: 940g ø6 17 MASS: 970g HR10A-7P-6P (HIROSE) Drive unit cable length (2m) 11PRH/12PRH (A counter varies depending on the gage) Output cable length (2m) RM12BPG-6P (HIROSE) 2-ø4.5, ø9 depth Stroke 102 or longer Rubber boot G-12

15 EC Counter SERIES 542 Assembly Type Display Unit for LGD and LGS Function Zero set Preset, GO/±NG judgment Output (selectable) Tolerance judgment: -NG, OK, +NG (open-collector) Data: Digimatic code (SPC) External control signal input Preset, data hold Power supply Via AC adaptor A (Standard accessory) Employed the DIN size (96X48mm) and mount-on-panel configuration, which greatly facilitates the incorporation into a system. Possible to produce either tolerance judgment output or Digimatic output (SPC) : SPC cable (40"/1m) : SPC cable (80"/1m) : PJ-2 (DC Plug) C : GO/±NG judgement cable Model EC-101D Order No A Applicable input Digimatic code (SPC) Applicable gage LGD, LGD-L, LGD-ML, LGS and SPC output gages. Number of gage input 1 Resolution.001,.0005,.0001, / 0.01mm, 0.001mm (Automatically set depending on the gage.) Display 6-digit and a negative [-] sign LED (Amber, Green, Red) MASS: 500g G-13

16 EG Counter SERIES 542 Assembly Type Display Unit Possible to produce 3-step/5-step X 3 kinds of tolerance output and BCD output. The smoothing function can reduce the fluctuation of display digits. Employed the DIN size (96X48mm) and mount-on-panel configuration, which greatly facilitates the incorporation into a system. Function Preset, direction switch, tolerance judgment (3/5-step, 3 kinds). peak (max., min., runout) measurement, constant number, smoothing, error display/output, protection over keys Output Tolerance judgment: L1 to L5 (Switchover between opencollector output and BCD output by means of the parameter) Control: NOM (normal signal) open-collector BCD: 6-digit (positive/negative-true logic) open-collector (Switchover between tolerance judgment output by means of the parameter) External control signal input Preset, display hold, peak value clear, tolerance judgment BANK switch Quantization error ±1 count Maximum input frequency 1.25MHz (The response speed depends on the gage being used.) Power supply voltage DC+12 to 24V Power consumption 6W (500mA) or less (Secure power supply more than 1A for each unit.) Model EG-101P EG-101Z EG-101D Order No Applicable input Differential square-wave Differential square-wave Digimatic code (SPC) w/origin point mark Applicable gage LGK, LGF, LGB, LGE, LGM, LGH LGF with origin point mark LGD, LGS (excluding with origin point and sign wave types) Number of gage input 1 Resolution (Depending on the linear gage type connected).001,.0005,.0001,.00005,.00001, / 0.01mm, 0.005mm, 0.001mm, mm, mm.001,.0005,.0001, / 0.01mm, 0.001mm Tolerance judgment display LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flash, Green, Red flash, Red) 02ADD930: Terminal connecting cable 02ADB440: I/O output connector 02AAA010: Power cable : AC adapter (must order 02ADD930 and 02AAA010) MASS: 400g G-14

17 EB Counter SERIES 542 Assembly Type Display Unit with Multiple Limit Setting Function Preset, tolerance judgment output (3/5-step X 7 kinds), limit value output (2 kinds independently for each of the 7 channels), peak (maximum, minimum, runout) measurement, diverse data output (serial BCD, simplified analog) Output Tolerance judgment: L1 to L5, open-collector Control: Normal operation signal (NORMAL), open-collector External control signal input Preset, display hold, peak value clear, tolerance judgment BANK switch, open-collector or no-voltage contact signal (with/without contact point) Interface Serial BCD: Bit-serial format, open-collector Analog output: 2.5V + Counting value X voltage resolution (25mV/2.5mV): Full-scale 0 to 5V Digimatic input/output: Connecting to the external switch box (No. 02ADF180) makes it easy to enter tolerance limits and preset values. Note) This can not be used when the gage is connected to a Mitutoyo DP-1VR Digimatic Mini-Processor Possible to connect with a Mitutoyo DP-1VR Digimatic Mini-Processor. Number of tolerance steps can be expanded by making a set of EB-D counters. Quantization error ±1 count Possible to produce 3-step/5-step X 7 kinds of tolerance output and limit value output independently for each of 7 channels. Provided with serial BCD output capability, which makes the connection to a programmable controller or personal computer, etc. possible with the minimum cabling requirement Possible to perform dynamic measurement with the simplified analog output. Employed the DIN size (96X48mm) and mount-on-panel configuration, which greatly facilitates the incorporation into a system Maximum input frequency 1.25MHz (The response speed depends on the gage being used.) The response speed depends on the gage being used. ( ) Power supply voltage DC+12 to 24V Power consumption 6W (500mA) or less (Secure power supply more than 1A for each unit.) 02ADB440: I/O output connector 02ADF180: 10-key unit : SPC cable (40 /1m) : SPC cable (80 /2m) : AC adapter (must order 02ADD930 and 02AAA010) 02ADD930: Terminal block connecting cable 02AAA010: Power cable Model EB-11P EB-11Z EB-11D Order No Applicable input Differential square-wave Differential square-wave Digimatic code (SPC) w/origin point mark Applicable gage LGK, LGF, LGB, LGE LGF with origin point mark LGD, LGS Number of gage input 1 Resolution.0005,.0001,.00005, /.0005,.0001, / 0.01mm, 0.005mm, 0.001mm, mm 0.01mm, 0.001mm Tolerance judgment display LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flash, Green, Red flash, Red) AC adapter (527428A) 02ADD930 02ADB440 MASS: 400g G-15

18 EF Counter SERIES 542 Multi-function Display Unit DIN compatible Panel-mounting type and DIN size (144 x 72mm). It can be easily incorporated into each system instrument. This counter can be used on a desktop by mounting it on the supplied stand leg. The standard RS-232C interface allows easy communication with an external PC. The RS Link function permits multiple EF counters (6 units maximum) to be A A connected with daisy chain and data to be input/output from one channel of the terminal RS-232C interface. The maximum value, minimum value, and TIR (runout) measurements are possible. The 2-gage input type can perform 2-axis display and make addition or subtraction calculations between 2 gages. Function Zeroset, preset, limit setting (3 or 5-step), GO/±NG judgement, GO/±NG signal output, MAX/MIN/TIR (runout) measurement, counting direction switching, double reading, mm/inch switching, sum/difference calculation of 2 gages ( , only), output mode selection Output I/O: Tolerance judgment output (3/5 stages), normal operation output RS-232C or Digimatic code (selectable): Various measurement data External Control I/O: Preset, Data hold and Error clear RS-232C: Displayed value output,max/min/tir switching,zero set,peak value clear, preset value input, tolerance value input and error clear RS Link Up to six EF counters may be connected via one RS-232C port.(daisy chain) Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error Maximum input frequency 1.25MHz (differential square-wave): Max counting Speed : 5MHz Power supply: Standard accessory Via AC adaptor (12-24V DC, 700mA (max) : AC adapter 02AAA010: Power cable A A Model EF-11PRH EF-12PRH EF-11ZR EF-12ZR Order No A A A A Applicable input Differential square-wave Applicable gage LGK, LGF (excluding with scale reference point), LGB (excluding sign wave type), LGE, LGH (excluding sign wave type) LGF with scale reference point Number of gage input 1 (Single-display) 2 (Double-display) 1 (Single-display) 2 (Double-display) Resolution (Depending on the linear gage type connected) ,.00005,.0005 / mm, mm, 0.001mm, 0.005mm, 0.01mm ,.00005,.0005 / mm, 0.001mm, 0.005mm,0.01mm MASS 760g 800g 800g 840g Tolerance judgment display LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flash, Green, Red flash, Red) DIMENSIONS G-16

19 CONNECTION EXAMPLE Measurement of a curved plate thickness Step measurement Difference/Sum Unit LG-DF SERIES 542 This unit serves to output a differential calculation result (A+B, A-B) or single value (A, B) of the counting values obtained from the linear gages that are connected to A and B input connectors, respectively. *The minimum readings of the linear gages that are connected to A and B input connectors should be identical. Over-speed error output and the remedies If either of the gages being connected A and B input connectors displaces as to exceed the rated moving speed, the counter will display over-speed error. Response speed: 250mm/s (when 5/10μm linear gages are connected) 50mm/s (when 1μm linear gages are connected) Power supply: Via AC adaptor (DC9V, 500mA) Power consumption: 4.5W Dimensions: 236 (w) x 160 (D) x 44.2 (H) mm Standard Accessory : Connecting cable for linear gage Optional Accessory A: AC adapter CONNECTION EXAMPLE Power supply: Via AC adaptor (DC9V, 500mA) Dimensions: 236 (w) x 160 (D) x 44.2 (H) mm Switching of D/A conversion range and resolution When connected to a 0.001mm linear gage When connected to a 0.005/0.01mm linear gage Range Resolution Range Resolution ±1mm 0.001mm ±5mm 0.005mm ±2mm 0.002mm ±10mm 0.01mm ±5mm 0.005mm ±25mm 0.025mm ±10mm 0.01mm ±50mm 0.05mm ±20mm 0.02mm ±100mm 0.10mm ±50mm 0.05mm ±250mm 0.25mm A: AC adapter : Connecting cable for linear gage Model LG-DF Order No Response speed 250mm/s (when 5/10μm linear gages are connected) 50mm/s (when 1 /μm linear gages are connected) Dimensions 236 (W) x 160 (D) x 44.2 (H)mm MASS 2kg D/A Conversion Unit LG-DAI SERIES 542 This unit consists of the pulse control circuit, counting circuit, and D/A conversion circuit to output the amount of linear gage displacement in the form of analog voltage Model LG-DA1 Order No Dimensions 236 (W) x 160 (D) x 44.2 (H)mm MASS 1.5kg G-17

20 EV Counter SERIES 542 For Multi-gage System Up to six gages can be connected to one unit. Able to connect up to 10 EV counters to one personal computer using the RS link function to facilitate the configuration of a multi-point measurement system comprising a maximum of 60 gages. A range of output modes to choose from; I/O output for tolerance judgment and segment output, BCD data output and RS-232 output are available. Peak-hold measurements are possible for maximum value, minimum value, runout (TIR), etc. Able to calculate a sum, average, maximum, minimum, maximum difference, etc., between gages connected to the same unit Model EV-16P EV-16Z EV-16D Order No Applicable input Differential square-wave Digimatic code (SPC) Applicable gage LGB (ex mm resolution), LGF with origin point mark LGD, LGD-M, LGS LGF, LGE, LG Number of gage input 6 Resolution (internal) - no display capability ,.00005,.0005 / mm, 0.001mm, 0.005mm, 0.01mm *,.0005 / 0.001mm*, 0.01mm Mass 910g 910g 830g *: Will not be indicated when combined with a LG gage. DIMENSIONS Function GO/±NG judgment, GO/±NG signal output, MAX/MIN/TIR (runout) measurement, counting direction switching, mm/inch switching, calculation of sum, average, maximum, minimum and maximum difference between specified axes, and output-mode selection Output I/O: Normal operation output and GO/±NG signal (three steps), measurement data (BCD code), or 21-stage segment output (selectable) RS-232C: Various measurement data External Control I/O: Axis designation, preset, data hold, and error clear RS-232: Displayed value output command, MAX/MIN/TIR switching and peak value clear, zero set, preset value input, tolerance value input, error clear, and command to output calculated value between specified axes RS Link Up to 10 EV counters may be connected via a single RS-232 port. (daisy chain) EV and EF counters can be mixed (in which case a total of six counters can be connected). Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error Maximum input frequency 1.25MHz (differential square-wave): Max counting Speed : 5MHz Power supply Terminal block (M3 screws), DC +12 to +24V, 700mA (max.) 02ADB440: I/O output connector 02ADD400: D-EV (external display unit) : RS link connector cable (40"/1m) : RS link connector cable (80"/2m) : AC adapter (must order 02ADD930 and 02AAA010) 02ADD930: Terminal connecting cable 02AAA010: Power cable System Diagram Linear gage Linear gage D-EV Display unit EV Counter EF Counter Tolerance judgment output BCD output Segment output RS-232C output RS-232C output Programmable controller PC system G-18

21 D-EV Display Unit Number of connectable units: One display unit allows external display and setting for one EV counter. Displayed digits: It uses a single sign plus six digits (EV counter operates on eight-digit data internally but displays only the last six digits). LED display: Channel display (also for display of judgment result): 3 (three-color LED) Measurement mode display (current, maximum, minimum, runout): 2 Status display: 1 (two-color) Operating switches: 4 Switches and their functions: Channel switching, measurement mode switching (current value, maximum value, minimum value and runout), parameter setting, preset, and tolerance setting Input/output: RS Link connectors: 1 in and 1 out. Error display: Overspeed, gage error and others. Power supply: Terminal block (M3 screws), DC +12 to +24V, 200mA Display unit for the EV counter. Using this display allows various settings for the EV counter without a personal computer or other equipment. Able to display each axis measurement value and GO/NG judgment result, total GO/NG judgment result for all axes, setting details, and errors. Model Order No. D-EV 02ADD400 DIN compatible compact panel-mounting cutout dimensions 45 x The required power supply is DC +12 to +24V, 200mA ( AAA010) at the terminal block (02ADD930) A: AC adapter (must order 02ADD930) : AC adapter (must order 02ADD930 and 02AAA010) 02ADD930: Terminal connecting cable 02AAA010: Power cable 02ADD400 MASS: 150g SENSORPAK This software facilitates the loading of measurement data from a linear gage counter with the RS-232C interface into user s personal computer. Maximum 60 channels of measuring points can be processed. Possible to perform arithmetical calculation and maximum width calculation using the measurement data. Possible to export the measurement data into MS-Excel. Diverse graphic functions (numeric value display, meter display, bar-graph display, overall judgment display) Frequency of data loading: Max times (60ch) to times (6CH) Order No. Description 54SAA622 Sensorpak G-19

22 Litematic and Litematic Head SERIES 318 High-resolution Measuring Unit The Litematic is designed for measuring easily-deformed workpieces and highprecision parts such as pin gages, thin-wall bearings, plastic parts, and springs. Extra-low measuring force of 0.01N (1gf). Hands free operation with optional foot switch. Ceramic anvil models are free from corrosion and easy to maintain. The Litematic Head unit can be mounted onto fixtures or an optional stand to allow great flexibility of use. With SPC output. Accuracy: Refer to the list of specifications (excluding quantizing error) Resolution: Refer to the list of specifications Repeatability: =0.05μm Display unit: 8 digits and 14mm character height Stroke: 51.2mm (using standard contact point) Measuring force: 0.01N Spindle feed speed: 2mm/s, 4mm/s, 8mm/s Length standard: Photoelectric linear encoder Contact point: ø3mm carbide ball Power supply: V AC A Litematic : SPC cable (40 / 1m) : SPC cable (80 / 2m) : 300x250mm granite stand with bracket for Litematic Head : Contact point, Shell : Contact point, ø0.45mm needle (carbide) : Contact point, ø1.0mm needle (carbide) : Contact point, ø1.5mm needle (carbide) : Contact point, ø2.0mm needle (carbide) : Contact point, ø7.0mm spherical (carbide) : Contact point, ø10.5mm spherical (carbide) T: Foot switch A: Digimatic Mini-processor DP1-VR : Input tool (for USB port) 54SAA622: Sensorpak (data capture software w/ I/O cable) DP-1VR Sensorpak Input tool A Litematic Head Resolution Range Order No. Accuracy (at 20 C) Anvil Remarks 0-2 (50mm) A (0.5 + L / 100)μm 4 (100mm) 1 piece unit.5μinch, 5μinch, 50μinch, 0.01μm, 0.1μm, 1μm 0-2 (50mm) A L=Measured length (mm) (0.5+L/100)μm L=Measured length (mm) Grooved Ceramic None Seperate Type Application G-20

23 DIMENSIONS Litematic VL-50A A Interchangeable contact points ø5 SR2.5 Material: Hardened steel ø0.45 Material: Carbide Flatness: 3μm Clamp screw for Measuring table Contact point Measuring table ø100 Display Operation switch Order No. Measuring force N ød ød Order.No Order No. Measuring force N Measuring force 0.03N 0.06N D ø7.5 ø10.5 d ø6.5 ø Litematic Head VL-50AS A Optional stand for VL-50AS: ø50 Litematic head Column ø Measuring unit Hexagon socket head cap screw (4-M4x0.7) Bracket Base 157 Feed nut (11) 56 SR 7 10 SR Material: Carbide M4x0.7 depth 10 Connecting cable 2m Display unit Clamp 300 G-21

24 Mu-Checker Probe Selection Guide Type Remarks Effective range ±0.5mm ±1.0mm ±2.5mm ±5.0mm Lever Head Non-clutch Type Clutch Type (with Direction Switch) Low Measuring Force (Non-clutch Type) High-Accuracy (Non-clutch Type) Cartridge Head Slim Type (with Linear Ball Bearing) (90 ) Plain Type G-22

25 Mu-Checker System Diagram G-23

26 Lever Heads SERIES 519 Lever Type Probe Head for Electric Micrometer A half-bridge circuit connection. Non-clutch type lever heads provide automatic reversal of measuring direction lever head is provided with a direction switch. The contact point of lever head can be orientated at any direction. Contact Points for , 519, : ø1mm/.039 dia., carbide ball :* ø2mm/.079 dia., carbide ball : ø3mm/.118 dia., carbide ball Contact Points for , 519, : ø1mm/.039 dia., carbide ball :* ø2mm/.079 dia., carbide ball : ø3mm/.118 dia., carbide ball * Installed on leverhead Switch type reversible direction Order No.: Low measuring force type Order No.: High accuracy (Non-clutch type) Order No.: " to C/L CABLE.157" High-accuracy type Order No.: Non-clutch type reversible direction Order No.: " MIN. BEND RADIUS.30" TO.48" DEG. SWIVEL.35" 1.53" 1.18" TO.56" DEG. SWIVEL 1.16".27" 2.01".25"DIA.75" 1.65" 2.16" Lever Heads Order No Model MLH-321 MLH-322 MLH-326 MLH-327 M499 Measuring Range ±.020" (±0.5mm) ±.020" (±0.5mm) ±.020" (±0.5mm) ±.020" (±0.5mm) ±.020" (±0.5mm) Probe Stroke ±.024" (±0.6mm) ±.024" (±0.6mm) ±.024" (±0.6mm) ±.026" (±0.65mm) ±.024" (±0.6mm) Linearity ±0.5% ±0.5% ±0.3% ±0.5% 0.6% max Measuring Force 0.2N 0.02N 0.15N 0.15N Adjustable 0.02 to 0.2N Contact Point ø2mm, carbide ball ø2mm, carbide ball ø2mm, carbide ball ø2mm, carbide ball 1/8" (3.17mm) Cable Length 2m / 80" 2m / 80" 2m / 80" 2m / 80" 2m / 80" MASS 120g 130g 40g 140g 150g G-24

27 Dust/Water protection level: IP65 (except ) Standard Accessory 64PPP856: Spanner wrench 64PPP853: Vacuum pump with 1m/40 tubing 64PTS036: 64PTS037: 64PTS038: 02AZC291: Extension cable 2m/80 Extension cable 5m/197 Extension cable 10m/393 Stem collar OD3/8, ID 8mm Measuring Range: ±0.5mm Model Cartridge Heads SERIES 519 Cartridge Type Probe Head for Electric Micrometer A half-bridge circuit connection. The Slim Type Cartridge Head employs a linear ball bearing (except ) for excellent durability Measuring Range: ±1mm, ±2.5mm, ±5mmModel Order No. A A1 B C D Measuring Range Order No. Model No. Function Type Cable outlet Linearity Measuring Force +/-.020 / +/-0.5mm MCH-332 Spring push Axial +/-0.5% 0.17N +/-.020 / +/-0.5mm MCH-161 Spring push Axial +/-0.3% 0.17N +/-.020 / +/-0.5mm MCHR-162 Spring push 90 Deg. +/-0.3% 0.17N +/-.039 / +/-1.0mm MCH-163 Spring push Axial +/-0.25% 0.14N +/-.039 / +/-1.0mm MCHR-164 Spring push 90 Deg. +/-0.25% 0.14N +/-.039 / +/-1.0mm MCHR-165 Pneu. push 90 Deg. +/-0.25% 0.08N +/-.098 / +/-2.5mm MCH-166 Spring push Axial +/-0.5% 0.08N +/-.098 / +/-2.5mm MCHR-167 Pneu. push 90 Deg. +/-0.5% 0.08N +/-.098 / +/-2.5mm MCHR-168 Pneu. push 90 Deg. +/-0.5% 0.03N +/-.197 / +/-5.0mm MCH-169 Spring push Axial +/-0.5% 0.06N +/-.197 / +/-5.0mm MCHR-170 Spring push 90 Deg. +/-0.5% 0.06N +/-.197 / +/-5.0mm MCHR-171 Pneu. push 90 Deg. +/-0.5% 0.02N G-25

28 Analog Mu-Checker SERIES 519 Standard, Differential and Limit Type Electric Micrometer The Analog Mu-Checker can output digital data via an optional interface unit. Analog Mu-Checkers are available in three types for diverse measuring requirements. Range/: ±5 / 0.1μm, ±15 / 0.5μm, ±50 / 1μm, graduation ±150 / 5μm, ±500 / 10μm, ±1500 / 50μm (± / , ±.0005 /.00001, ±.0015 /.00005, ±.005 /.0001, ±.015 /.0005, ±.05 /.001 ) ( ): Inch/Metric models Signal output: ±1V DC / full scale Power supply: Via AC adapter Standard Accessory A: AC Adapter (120V AC) Standard type analog Mu-Checker Order No.: A (Inch/Metric) Probe channels: 1ch Differential type analog Mu-Checker Order No.: A (Inch/Metric) Probe channels: 2ch (A, B) Display mode: A, B, A + B, A B, B A, (A + B) Functions Standard Differential Limit type type type Zero-set /+ switching GO/±NG judgment GO/±NG output 2-probe measurement SPC output * * * RS-232C output Analog output : Available, : Optional, *: Optional (Metric model only) A: RS-232C interface unit A: SPC output unit for metric models : Analog output cable (1m) Limit type analog Mu-Checker Order No.: A (Inch/Metric) Probe channels: 2ch (A, B) Display mode: A, B, A + B, A B, B A, (A + B) Inch / Metric Order No. Style Range Resolution Remarks : Analog limit signal output connector (7-pin) : SPC output cable (40 / 1m) : SPC output cable (80" / 2m) A Standard type (One Probe Type) ±.05" / ±1500μm ±.015" / ±500μm A Differential type ±.005 / ±150μm (Two Probe Type) ±.0015 / ±50μm A Limit type ±.0005 / ±15μm (Two Probe Type) ± / ±5μm.001 / 50μm.0005 / 10μm.0001 / 5μm / 1μm / 0.5μm / 0.1μm Accuracy: ±1% Full Scale Analog output Voltage: ±1VDC / Fullscale ±0.1% to ±0.3% depending on the probe Dimensions: 134(w) x 183(D) x 210(H) mm Mass: 1.8kg G-26

29 Digital Mu-Checker SERIES 519 Differential, Limit and Runout Type Electric Micrometer Range/: ±200 / 0.1μm, ±2000 / 1μm, graduation (±.008 / , ±.08 / ) ( ): Inch/Metric models Signal output: ±1V DC / full scale Power supply: Via AC adapter The Digital Mu-Checker offers easy-to-read digital displays and SPC data output to a wide variety of Mitutoyo Digimatic Mini- Processors. Digital Mu-Checkers are available in three types for diverse measuring requirements. Standard Accessory A: AC Adapter (120V AC) Functions Differential type Limit type Runout type Zero-set /+ switching Max, Min, Runout GO/±NG judgment GO/±NG output 2-probe measurement SPC output BCD output RS-232C output Analog output : Available, : Optional B: RS-232C interface unit Differential type digital Mu-Checker Order No.: A (Inch/Metric) Probe channels: 2ch (A, B) Display mode: A, B, A + B, A B, B A, (A + B) Limit type digital Mu-Checker Order No.: A (Inch/Metric) Probe channels: 2ch (A, B) Display mode: A, B, A + B, A B, B A, (A + B) A: BCD output unit : Analog output cable (1m) Runout digital Mu-Checker Order No.: A (Inch/Metric) Probe channels: 1ch : Analog limit signal output connector (7-pin) : SPC cable (40 / 1m) : SPC cable (80" / 2m Inch / Metric Order No. Style Range Resolution Remarks A Differential type (Two Probe Type) ±.08" / ±2mm / 0.001mm Accuracy: ±3 digit ±1 Analog output Voltage: ±1 VDC / Fullscale A Limit type ±.008" / ±0.2mm / mm (Accuracy ±0.1% to ±0.3% depending on the probe) (Two Probe Type) Data output: Digimatic Codeout Interface. Measuring Mode: ABS / CMP (switchable) A Runout Type Dimensions: 134(w) x 183(D) x 210(H) mm (One Probe Type) Mass: 1.7kg G-27

30 Multi Mu-Checker SERIES 519 Module Type Electric Micrometer The Multi Mu-Checker Main Rack Unit incorporates a power unit and analog indicator. It is available with 3 slots or 6 slots for different applications. Optional Calibration Meter ( ) is available for accurate and easy-to-read measurement. By selecting the appropriate add-on units that include Amplifier Unit for Mu-Checker probes, the Multi Mu-Checker System offers diverse measuring applications with minimum investment. Accuracy of indication: ±2.5% Analog output: ±1V DC / full scale for optional calibration meter System sample (6-slot model) Model MM3 MM6 Order No A A Number of Slots 3 Slots 6 Slots : Calibration meter Model GU2 GL2 DU2 AMU CU1 TJU RSU Order No Add-on Units Amplifier unit Amplifier unit with GO/NG Differential unit Analog memory unit Classification unit Total judgment unit Probe input Range/graduation setting /+ switching Difference/sum (2-probe) GO/±NG judgment GO/±NG output Classification of tolerance Total GO/±NG judgment Max, Min, Runout, Mean Difference/sum (2-unit) Analog output SPC output RS-232C output : Available, : Optional RS-232C interface unit : Calibration meter : Bus line connector : Blind panel set for a blank slot G-28

31 Multi Mu-Checker Add-On Units for Amplifier Unit : Range Plug, ±5μm (Graduation: 0.1μm) : Range Plug, ±15μm (Graduation: 0.5μm) : Range Plug, ±50μm (Graduation: 1μm) : Range Plug, ±150μm (Graduation: 5μm) : Range Plug, ±1500μm (Graduation: 50μm) : Range Plug, ±2500μm : Range Plug, ±5000μm (Graduation: 100μm) : Range Plug, ±.00015" (Graduation: ") : Range Plug, ±.0005" (Graduation:.00001") : Range Plug, ±.0015" (Graduation:.00005") : Range Plug, ±.005" (Graduation:.0001") : Range Plug, ±.015" (Graduation:.0005") : Range Plug, ±.05" (Graduation:.001") : Analog output connector : Bus line connector for Differential Unit : Analog output connector : Bus line connector Amplifier Unit Order No.: (w/ GO/±NG LED) Probe channels: 2ch (A, B) Range: ±500μm (By Range Plug provided) Graduation: 10μm (on Calibration Meter) Display mode: A, B, A + B, A B, B A, (A + B) GO/±NG judgment: By LED ( ) Analog output: ±1V DC / ±fullsacle GO/±NG output: Open collector ( ) Differential Unit Order No.: Calculation: Difference/sum between Add-On Units Probe channels: 2ch (A, B) GO/±NG judgment: By LED Analog output: ±1V DC / ±fullscale GO/±NG output: Open collector for Analog Memory Unit : Analog output connector (OUT1) : Analog output connector (OUT2) : External control connector : Bus line connector for Classification Unit : BCD output connector : Bus line connector : External control connector Analog Memory Unit Order No.: Measurement: Maximum, Minimum, Runout, Mean GO/±NG judgment: By LED Analog output: ±1V DC / ±fullscale GO/±NG output: Open collector Classification Unit Order No.: Classification display: Digital (0-9) Limit setting range: 10% - 100% fullscale Data output: BCD (0-9 classification) GO/±NG output: TTL for Total Judgment Unit : GO/±NG output connector : External control connector : Bus line connector for RS-232C Unit : Main Rack Unit connecting cable (BUS IN) : Bus line connector Total Judgment Unit Order No.: GO/±NG judgment: By LED GO/±NG output: Relay circuit RS-232C Interface Unit Order No.: Analog input channels: 11 Applicable range: ±50μm and more Analog input: ±1V DC/±fullscale Sampling speed: 12 times/s G-29

32 A/D Conversion Unit SERIES 519 For SPC Data Output The A/D Conversion Unit converts analog signals from the Mu-Checker into digital signals and outputs SPC data. When connected with a Digimatic Mini- Processor (DP-1VR ), the A/D Conversion Unit is powered by the processor Model A-D PACK 1 Order No Rear panel EV-16A Counter SERIES 519 With 6ch Analog Input for Multi-gage System Range/: ±5 / 0.01μm, ±15 / 0.01μm, ±50 / 0.1μm, resolution ±150 / 0.5μm, ±500 / 1μm, ±1500 / 1μm (± /.00001, ±.0005 /.00001, ±.0015 /.0001, ±.005 /.0001, ±.015 /.001, ±.05 /.001 ) ( ): Inch/Metric models Analog input channel: 1ch Signal input: ±1V DC / full scale Sampling time: 7.5times/s Data output: SPC Power supply: Via AC adapter Dimensions: 235(W) x 195(D) x 41(H)mm Mass: 1.3kg Optional Accessory A: AC adapter (120V AC) Model EV-16A Order No Range: 1μm (±2.000mm) / (±.08 ) 0.1μm (±0.200mm) / (±.008 ) Accuracy: ±3 Digits ± 1 Count Number of connection gage: 6 Analog output: ±1VDC Power supply: DC 12 to 240, 1000μA 02ADB440: Output connector 02ADD400: D - EV counter : RS link connecting cable (40 / 1mm) : RS link connecting cable (80 / 2mm) : Calibration meter Mass: 1kg G-30

33 Laser Scan Micrometer Selection Guide MEASURING UNITS Appearance Model Laser Classification LSM-902* Visible (650nm), IEC Class 2/ FDA Class II Measuring range mm (.0002" -.08") Resolution (Selectable) 0.01μm - 10μm ( " ") LSM-500S Visible (650nm), IEC Class 2/ FDA Class II mm (.0002" -.08") 0.01μm - 10μm ( " ") LSM-501S Visible (650nm), IEC Class 2/ mm (.002" -.4") FDA Class II 0.01μm - 10μm ( " ") LSM-503S Visible (650nm), IEC Class 2/ FDA Class II mm (.012" ") 0.02μm - 100μm ( " -.005") LSM-506S Visible (650nm), IEC Class 2/ FDA Class II 1-60mm (.04" ") 0.05μm - 100μm ( " -.005") LSM-512S Visible (650nm), IEC Class 2/ FDA Class II 1-120mm (.04" ") 0.1μm - 100μm ( " -.005") LSM-516S Visible (650nm), IEC Class 2/ FDA Class II 1-160mm (.04" ") 0.1μm - 100μm ( " -.005") LSM-9506 Measuring unit - display unit one-piece structure for benchtop use only Visible (650nm), IEC Class 2/ FDA Class II mm (.02" ") 0.05μm - 100μm ( " -.005") With display unit DISPLAY UNITS Appearance Model Type Application Interface units equipped LSM-6200 LSM-6900* Multi-function type Bench-top use RS-232C I/O Analog output LSM-5100** Compact type (Low cost) Assembly/ bench-top use (DIN size) RS-232C I/O Analog output *LSM-902 and LSM-6900 are factory-set package. **When connecting with the LSM-500S series, the scanning speed becomes 1600 scans/sec. G-31

34 Laser Scan Micrometer Out of roundness (T.I.R) Diameter measurement Enamel wire (Coated wire) Cable Spring wire Tungsten wire Pressure hose Interval measurement Interval measurement Pins located in parallel Gap of rollers Rubber roller Roller bearing Motor shaft Reference edge Height measurement* Reference edge Tape width measurement Linearity measurement* Transparent part measurement* Scanning *Using offset function Optical fiber Glass tube *Only segment Nos. 1 and 2 can be used. Tape Belt Bracket cable Blade *Using offset function Reference edge Dual-Unit Measurement: By using an optional dual-type add on unit (02AGP150), one display unit can process the measurement data from two measuring units. e.g.) Two measurements with a single display unit Dual-Program Measurement: Two measurement programs with different conditions are set, and can be performed at the same time. e.g.) Measurement of two dimensions e.g.) XY measurement with a display unit [X Y or (X + Y)/2] PROG. 0 (segment No. 2 is ON.) and PROG. 5 (segment No. 4 is ON.) e.g.) Two laser units used to measure large diameter workpieces G-32

35 Laser Scan Micrometer LSM-9506 SERIES 544 Bench Top Type Non-contact Measuring System 02AGD170: Calibration gage set for LSM AGD600B: Thermal printer (w/120v AC adapter) LSM-9506 Model LSM-9506 Order No A Measuring range (0.5-60mm) Measuring area.02 x 2.36 (5 x 60mm) (*1) Scanning Rate 1600/sec Resolution to.005" ( to 0.1mm) [Selectable] Repeatability ±.00003" (±0.6μm) (±2 measuring rate: 0.32s) Accuracy Linearity (* 2 ) ±.0001" (±2.5μm) The optical axis direction ±.0001" (±2.5μm) The scanning direction ±( L/10000)" [L:inch] (* 3 ) ±(2.0+L/10)μm [L:mm] (* 3 ) Laser type Visible semiconductor laser Wavelengths: 670nm Scanning speed: 8900 /s (226m/s) Display Measuring function Fluorescent display 16-digit+11- digit, guidance LEDs Segment designation: 1 to 7 (1 to 3 for Transparent) 10 Program storage (PROG. 0 to PROG. 9) 255 Edge Designations can be detected Multi Limit GO/±NG Tolerance Judgment (up to 7 intervals) Dual-Axis LED Display Offset Setting and Mastering Reference Value Setting Automatic Workpiece Detection Dual-Gage Calibration Inch/mm Conversion Abnormal Data Elimination Dual Program Measurement Statistical Processing Workpiece Position display Foot-switch Connector Data output standard RS-232C, I/O Analog Interface, SPC Power Supply Power Cord Power Switch Operating Envirnoment AC100V - 240V ±10% 50/60Hz 40VA Key switch use 32~104 F(0~40 C), 35-85% RH (without condensation) (*1): The area given by [measuring range on the optical axis] x [Measuring range in the scanning direction]. (*2): Specified at the center of the measurement region. (*3): L=Deviation between the center of workpiece and the optical axis. (See fig. 1) MASS: 13kg G-33

36 Laser Scan Micrometer LSM-902 / 6900 SERIES 544 Ultra-high Accuracy Non-contact Measuring System LSM-6900 display unit A LSM-902 measuring unit LSM-902 Measuring range (0.1-25mm) Resolution to.0005 ( to 0.01mm) [Selectable] Repeatability* 1 ± (±0.05μm)* 2 Linearity* 1 Whole range ± (±0.5μm)* 3 Small range ± ( D) [ D:inch]* 3 * 4 ±( D)μm [ D:mm]* 3 * 4 Positional error* 1 * 5 ± " (±0.5μm) Measuring region ±.6 x 1.0" (±1.5 x 25mm)* 6 Number of scans 800/sec Laser wavelength 650nm [Visible LD], 1.5mW (peak) Laser scanning speed 2240"/sec (56m/sec) LSM-6900 Display Fluorescent display 16-digit + 11 digit, Guidance LEDs Measuring function* 7 Edge designation 1 to 255 Segment designation 1 to 7 (1 to 3 for Transparent material) Averaging method Simple averaging 1 to 2048 Moving averaging: 32 to 2048 Tolerance judgement (GO,±NG); Multi-limit judgement (7 classes); Offset/Zero-set; Abnormal data elimination; Automatic workpiece detection; Reference value setting; Data output condition; Laser power deterioration; Sample measurement; Statistical processing; Dual-program measurement; Automatic measurement using edge mode; Workpiece position display; Transparent object measuring; Key-lock function; mm/inch changeover; Dual-gage calibration; Selection of resolution; Judgement in ready state; Display of a comma to mark the thousandths position; Mastering; Nonedisplay unnecessary digits; Group judgement Scanning signal monitor connector Provided as standard (with the plug) Remote interlock connector Provided as standard (with the plug) Powerswitch Key switch used Built-in interface RS-232C; Foot switch connector; I/O analog interface Optional interface DCU slot Digimatic code output unit (2-ch) Expansion slot (1-slot) 2nd I/O analog I/F; BCD I/F; GP-IB I/F; Power supply AC 100V - 240V±10%, 50/60Hz, 40VA * 1 Accuracy inspection environment/temperature 20 C±1 C, Humidity: 50%±10%. * 2 The repeatability is determined by the value for ±2o- at the measurement interval of 1.28 sec. * 3 Specified at the center of the measurement region. * 4 D: Diameter difference to master gage. * 5 An error due to workpiece shift either in the optical axis direction or in the scanning direction. * 6 The area given by [measuring range on the optical axis] x [measuring range in the scanning direction.] * 7 The combination of functions is limited, details are described in the user s manual. 02AGD180: Calibration gage set for LSM-902/ AGD270: Workstage 02AGD280: Adjustable workstage 02AGD600B: Thermal printer (w/120vac adapter) LSM-902 MASS: 6.5kg LSM-6900 MASS: 5kg G-34

37 Laser Scan Micrometer LSM-500S SERIES 544 High Accuracy Non-contact Measuring System for LSM-500S 02AGD110: Calibration gage set (ø0.1mm, ø2.0mm) 02AGD200: Wire guiding pulley 02AGD220: Air blow cover : Air cleaner for air blow cover 02AGC780A: Extension signal cable 5m 02AGC780B: Extension signal cable 10m 02AGC780C: Extension signal cable 15m Model LSM-500S Order No Applicable display unit LSM-6200 Laser Scanning Range inch(mm) Up to.49 (12.5mm) (Detecting regions are limited to about.4 (10mm) approx.) Measuring range inch(mm).0002 to.08 (0.005 to 2mm).004 to.08 (0.1 to 2mm) [*1] Resolution inch(mm) to.0005" ( to 0.01mm) [Selectable] Repeatability [*2] inch(μm) ± " (±0.03μm) [*3] Linearity [*2] inch(μm) ± " (±0.3μm) [*4] Positional error [*2][*5] inch(μm) ± " (±0.4μm) Measuring region inch(mm).04 x.08" (1 x 2mm) [Optical axis direction x Scanning direction] Number of scans for scan 16 to 2048 [*6] averaging Laser classification Class 2 (Max. Output: 1.3mW with a scanning laser, semiconductor laser: wavelength 650nm) Number of laser scans /sec 3200 Laser scanning rate inch/sec (m/sec) 2992 /sec (76m/sec) Protection level IP64 Operation environment Temperature 0 C to 40 C Humidity 35%RH to 85%RH [without condensation] Altitude 2000m or less Storage environment Temperature -15 C to 55 C Humidity 35%RH to 85%RH [without condensation] [*1]: Measuring range available when set to "No extra-fine wire measurement or "Edge specification in the basic setup mode. [*2]: Environment for accuracy validation: 20 C ± 1 C temperature; 50% ± 10% humidity. [*3]: The value of ±2 with a 2mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation. [*4]: The value of measurements in the center of the measurement region. [*5]: Error due to the positional shift of the workpiece in the optical axis direction or scanning direction [*6]: Averaging scans between 1 and 8 times can be made if "No extra-fine wire measurement is specified in the basic setup mode. The measuring range, however, is limited to 0.1mm to 2mm in this case. MASS: 1.5kg G-35

38 Laser Scan Micrometer LSM-501S SERIES 544 High Accuracy Non-contact Measuring System Model LSM-501S Order No Applicable display unit LSM-6200 Laser Scanning Range inch(mm) Up to.74 (19mm) Measuring range inch(mm).002 to.4 (0.05 to 10mm) Resolution inch(mm) to.0005" ( to 0.01mm) [Selectable] Repeatability [*1] inch(μm) ± " (±0.04μm) [*2] Linearity [*1] Whole range inch(μm) ±.00002" (±0.5μm) [*3] Narrow μm ±( D) measuring range inch ±( " " D) [*3][*4] Positional error [*1][*5] inch(μm) ±.00002" (±0.5μm) Measuring region inch(mm).08.4 (2 10mm) (Measuring region:.002 to.004 (0.05 to 0.1mm)).16.4 (4 10mm) (Measuring region:.004 to.4 (0.1 to 10mm)) [Optical axis direction Scanning direction] Number of scans for averaging scan 1 to 2048 Laser classification Class 2 (Max. Output: 1.3mW with a scanning laser, semiconductor laser: wavelength 650nm) Number of laser scans /sec 3200 Laser scanning rate inch/sec (m/sec) 4449 /sec (113m/sec) Protection level IP64 Distance between the laser emission unit and reception unit inch(mm) Standard 2.68 (68mm) Max (100mm) [*6] Operation environment Temperature 0 C to 40 C Humidity 35%RH to 85%RH [without condensation] Altitude 2000m or less Storage environment Temperature -15 C to 55 C Humidity 35%RH to 85%RH [without condensation] [*1] Environment for accuracy validation: 20 C ± 1 C temperature; 50% ± 10% humidity. [*2] A value of ±2 with a 10mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation. [*3] The value of measurements in the center of the measurement region. [*4] D is the difference in diameter of the workpiece and the master gage. [*5] Error due to the positional shift of workpiece in optical axis direction or scanning direction. [*6] The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy. for LSM-501S 02AGD120: Calibration gage set (ø0.1mm, ø10mm) 02AGD210: Wire guiding pulley 02AGD400: Adjustable workstage 02AGD440: Center support* 02AGD450: Adjustable V-block* 02AGD230: Air blow cover : Air cleaner for air blow cover 02AGC150A: Extension relay cable 1m 02AGC780A: Extension signal cable 5m 02AGC780B: Extension signal cable 10m 02AGC780C: Extension signal cable 15m *Use with an adjustable workstage. MASS: 1.9kg G-36

39 Laser Scan Micrometer LSM-503S SERIES 544 High Accuracy Non-contact Measuring System for LSM-503S 002AGD130: Calibration gage set (ø1mm, ø30mm) 02AGD490: Adjustable workstage 02AGD440: Center support* 02AGD450: Adjustable V-block* 02AGD240: Air blow cover : Air cleaner for air blow cover 02AGC150A: Extension relay cable 1m 02AGC150B: Extension relay cable 3m 02AGC150C: Extension relay cable 5m 02AGC780A: Extension signal cable 5m 02AGC780B: Extension signal cable 10m 02AGC780C: Extension signal cable 15m 02AGC780D: Extension signal cable 20m *Use with an adjustable workstage. Model LSM-503S Order No Applicable display unit LSM-6200 Laser Scanning Range inch(mm) Up to 1.3 (34mm) Measuring range inch(mm).012 to 1.18 (0.3 to 30mm) Resolution inch(mm) to.005" ( to 0.1mm) [Selectable] Repeatability [*1] inch(μm) ± " (±0.11μm) [*2] Linearity [*1] Whole range inch(μm) ±.00004" (±1.0μm) [*3] Narrow measuring μm ±( D) range inch ±( " " D) [*3][*4] Positional error [*1][*5] inch(μm) ±.00002"(±0.5μm) Measuring region inch(mm).08.4 (2 10mm) (Measuring region:.002 to.004 (0.05 to 0.1mm)).16.4 (4 10mm) (Measuring region:.004 to.4 (0.1 to 10mm)) [Optical axis direction Scanning direction] Number of scans for averaging scan 1 to 2048 Laser classification Class 2 (Max. Output: 1.3mW with a scanning laser, semiconductor laser: wavelength 650nm) Number of laser scans /sec 3200 Laser scanning rate inch (m/sec) 4449 /sec (113m/sec) Protection level IP64 Distance between the laser emission unit and reception unit inch(mm) Standard 5.12 (130mm) Max. 13 (350mm) [*6] Operation envirnoment Temperature 0 C to 40 C Humidity 35%RH to 85%RH [without condensation] Altitude 2000m or less Storage environment Temperature -15 C to 55 C Humidity 35%RH to 85%RH [without condensation] [*1] Environment for accuracy validation: 20 C ± 1 C temperature; 50% ± 10% humidity. [*2] A value of ±2 with a 10mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation. [*3] The value of measurements in the center of the measurement region. [*4] D is the difference in diameter of the workpiece and the master gage. [*5] Error due to the positional shift of workpiece in optical axis direction or scanning direction. [*6] The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy. MASS: 2.7kg G-37

40 Laser Scan Micrometer LSM-506S SERIES 544 High Accuracy Non-contact Measuring System Model LSM-506S Order No Applicable display unit LSM-6200 Laser Scanning Range inch(mm) Up to 2.6 (66mm) Measuring range inch(mm).04 to 2.36 (1 to 60mm) Resolution inch(mm) to.005" ( to 0.1mm) [Selectable] Repeatability [*1] inch(μm) ± " (±0.36μm) [*2] Linearity [*1] Whole range inch(μm) ±.00012" (±3.0μm) [*3] Narrow measuring μm ±( D) range inch ±(.00012" " D) [*3][*4] Positional error [*1][*5] inch(μm) ±.00016" (±4.0μm) Measuring region inch(mm).8 x 2.36" (20 x 60) [Optical axis direction Scanning direction] Number of scans for averaging scan 1 to 2048 Laser classification Class 2 (Max. Output: 1.3mW with a scanning laser, semiconductor laser: wavelength 650nm) Number of laser scans /sec 3200 Laser scanning rate inch/sec (m/sec) /sec (452m/sec) Protection level IP64 Distance between the laser inch(mm) Standard (273mm) emission unit and reception unit Max. 27 (700mm) [*6] Operation environment Temperature 0 C to 40 C Humidity 35%RH to 85%RH [without condensation] Altitude 2000m or less Storage environment Temperature -15 C to 55 C Humidity 35%RH to 85%RH [without condensation] [*1] Environment for accuracy validation: 20 C ± 1 C temperature; 50% ± 10% humidity. [*2] A value of ±2 with a 60mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation. [*3] The value of measurements in the center of the measurement region. [*4] D is the difference in diameter of the workpiece and the master gage. [*5] Error due to the positional shift of workpiece in optical axis direction or scanning direction. [*6] The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy. for LSM-506S 02AGD140: Calibration gage set (ø1mm, ø60mm) 02AGD520: Adjustable workstage 02AGD580: Center support* 02AGD590: Adjustable V-block* 02AGD250: Air blow cover : Air cleaner for air blow cover 02AGC150A: Extension relay cable 1m 02AGC150B: Extension relay cable 3m 02AGC150C: Extension relay cable 5m 02AGC780A: Extension signal cable 5m 02AGC780B: Extension signal cable 10m 02AGC780C: Extension signal cable 15m 02AGC780D: Extension signal cable 20m *Use with an adjustable workstage. MASS: 3.5kg G-38

41 Laser Scan Micrometer LSM-512S SERIES 544 High Accuracy Non-contact Measuring System for LSM-512S 02AGD150: Calibration gage set (ø20mm, ø120mm) 02AGD260: Air blow cover : Air cleaner for air blow cover 02AGC150A: Extension relay cable 1m 02AGC150B: Extension relay cable 3m 02AGC150C: Extension relay cable 5m 02AGC780A: Extension signal cable 5m 02AGC780B: Extension signal cable 10m 02AGC780C: Extension signal cable 15m 02AGC780D: Extension signal cable 20m Model LSM-512S Order No Applicable display unit LSM-6200 Laser Scanning Range inch(mm) Up to 5.0 (126mm) Measuring range inch(mm).04 to 4.72 (1 to 120mm) Resolution inch(mm) to.005" ( to 0.1mm) [Selectable] Repeatability [*1] inch(μm) ± " (±0.85μm) [*2] Linearity [*1] Whole range inch(μm) ±.00024" (±6.0μm) [*3] Narrow measuring μm ±( D) range inch ±(.00016" " D) [*3][*4] Positional error [*1][*5] inch(μm) ±.0003" (±8.0μm) Measuring region inch(mm) 1.2 x 4.72" (30 x 120) [Optical axis direction Scanning direction] Number of scans for averaging scan 1 to 2048 Laser classification Class 2 (Max. Output: 1.3mW with a scanning laser, semiconductor laser: wavelength 650nm) Number of laser scans /sec 3200 Laser scanning rate inch/sec (m/sec) /sec (904m/sec) Protection level IP64 Distance between the laser emission unit and reception unit inch(mm) Standard (321mm) Max. 27 (700mm) [*6] Operation environment Temperature 0 C to 40 C Humidity 35%RH to 85%RH [without condensation] Altitude 2000m or less Storage environment Temperature -15 C to 55 C Humidity 35%RH to 85%RH [without condensation] [*1] Environment for accuracy validation: 20 C ± 1 C temperature; 50% ± 10% humidity. [*2] A value of ±2 with a 120mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation. [*3] The value of measurements in the center of the measurement region. [*4] D is the difference in diameter of the workpiece and the master gage. [*5] Error due to the positional shift of workpiece in optical axis direction or scanning direction. [*6] The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy. MASS: 6.5kg G-39

42 Laser Scan Micrometer LSM-516S SERIES 544 High Accuracy Non-contact Measuring System Model LSM-516S Order No Applicable display unit LSM-6200 Laser Scanning Range inch(mm) Up to 6.7 (170mm) Measuring range inch(mm).04 to 6.3 (1 to 160mm) Resolution inch(mm) to.005" ( to 0.1mm) [Selectable] Repeatability [*1] inch(μm) ± " (±1.4μm) [*2] Linearity [*1] Whole range inch(μm) ±.00028" (±7.0μm) [*3] Narrow measuring μm ±( D) range inch ±(.00016" " D) [*3][*4] Positional error [*1][*5] inch(μm) ±.0003" (±8.0μm) Measuring region inch(mm) 1.57 x 6.3" (40 x 160) [Optical axis direction Scanning direction] Number of scans for averaging scan 1 to 2048 Laser classification Class 2 (Max. Output: 1.3mW with a scanning laser, semiconductor laser: wavelength 650nm) Number of laser scans /sec 3200 Laser scanning rate inch/sec (m/sec) /sec (1206m/sec) Protection level IP64 Distance between the laser emission unit and reception unit inch(mm) Standard (400mm) Max (800mm) [*6] Operation environment Temperature 0 C to 40 C Humidity 35%RH to 85%RH [without condensation] Altitude 2000m or less Storage environment Temperature -15 C to 55 C Humidity 35%RH to 85%RH [without condensation] [*1] Environment for accuracy validation: 20 C ± 1 C temperature; 50% ± 10% humidity. [*2] A value of ±2 with a 160mm-diameter gage has been measured for two minutes with a measurement interval of 0.32 seconds, where is the standard deviation. [*3] The value of measurements in the center of the measurement region. [*4] D is the difference in diameter of the workpiece and the master gage. [*5] Error due to the positional shift of workpiece in optical axis direction or scanning direction. [*6] The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy. for LSM-516S 002AGM300: Calibration gage set (ø20mm, ø160mm) 02AGC150A: Extension relay cable 1m 02AGC150B: Extension relay cable 3m 02AGC150C: Extension relay cable 5m 02AGC780A: Extension signal cable 5m 02AGC780B: Extension signal cable 10m 02AGC780C: Extension signal cable 15m 02AGC780D: Extension signal cable 20m G-40

43 LSM-5100 Display Unit SERIES 544 Compact Display Unit for Laser Scan Micrometer Main display: 9-digit LED Interface units equipped: RS-232C, Analog I/O, Foot switch Power supply: +24V DC±10%, 1A Function of Display Unit Zero-setting, presetting, GO/±NG judgment, Offset value setting, Sample measurement, Statistical calculation, Data output, Workpiece position display, mm/inch switching, Dual-gage calibration, Transparent object measurement, Automatic measurement, Abnormal data eliminating Panel-mount type (with dimensions conforming to DIN standards) allows easy system integration. Capable of calculating mean, maximum, minimum, and range (maximum - minimum). Model LSM-5100** Order No **When connecting with the LSM-500S series, the scanning speed becomes 1600 scans/sec. Either the segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be selected. The RS-232C interface and the I/O and analog interface are provided as standard. The arithmetical average or moving average can be selected. GO/±NG judgment function (Inch/Metric) Main display: 16-digit fluorescent tube Interface units equipped: RS-232C, Analog I/O, Foot switch Power supply: V AC±10%, 40VA, 50/60Hz Function of Display Unit Zero-setting, Presetting, GO/±NG judgment, Multi-limit judgment, Offset value setting, Sample measurement, Statistical calculation, Group judgment, Data output, Workpiece position display, mm/inch switching, Dual-gage calibration, Transparent object measurement, Dual-unit measurement (optional), Automatic measurement, Abnormal data eliminating QUICKTOOL QUICKTOOL is a free software program that makes programming the LSM-6200 quick and easy. Please contact your Mitutoyo office for more information. LSM-6200 Display Unit SERIES 544 Standard Display Unit for Laser Scan Micrometer With a dual-display design setup values can be continuously monitored. Also, two measurement value items can be displayed on the sub-display with the simultaneous measurement function. Either the segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be selected. Model LSM-6200 Order No A MASS: 1.4kg The RS-232C interface and the I/O and analog interface are provided as standard. A statistical calculation function and abnormal data eliminating function are provided A (Inch/Metric) MASS: 5kg G-41

44 Laser Scan Micrometer Application Example Drill / End mill (Odd-number teeth) outer-diameter standard function at LSM-6200 Display Unit G-42

45 for LSM Appearance Order No. Description Application 02AGD110 02AGD120 02AGD180 02AGD130 02AGD140 02AGD150 02AGM300 02AGD170 Calibration gage set Calibration gage set Calibration gage set Calibration gage set Calibration gage set Calibration gage set Calibration gage set Calibration gage set LSM-500S LSM-501S LSM-902 LSM-503S LSM-506S LSM-512S LSM-516S LSM AGP150 Dual-type add-on unit LSM AGC840 02AGC940 Extension signal cable Extension relay cable 02AGC840 02AGC880 02AGC910 02AGC940 02AGC780A 02AGC780B 02AGC780C 02AGC780D 02AGC150A 02AGC150B 02AGC150C Digimatic (SPC) codeout unit 2nd I/O & analog interface unit BCD interface unit GP-IB interface unit Extension signal cable (5m) Extension signal cable (10m) Extension signal cable (15m) Extension signal cable (20m) Extension relay cable (1m) Extension relay cable (3m) Extension relay cable (5m) LSM-6200/6900 LSM-6200/6900 LSM-6200/6900 LSM-6200/6900 Any model of LSM* Any model of LSM* Any model of LSM* Any model of LSM* Any model of LSM** Any model of LSM** Any model of LSM** SPC cable (1m) LSM-6200/6900/ T Footswitch LSM-6200/6900/ AGD270 02AGD400 02AGD280 02AGD490 02AGD520 02AGD370 02AGD680 02AGD440 02AGD580 02AGD450 02AGD590 02AGD200 02AGD210 Work stage Adjustable workstage Adjustable workstage Adjustable workstage Adjustable workstage Adjustable workstage Adjustable workstage Center support Center support Adjustable V-block Adjustable V-block Wire guiding pulley Wire guiding pulley LSM-501S/503S/902 LSM-501S LSM-902 LSM-503S LSM-506S LSM-9506 LSM-9506 LSM-501S/503S/902 LSM-506S/9506 LSM-501S/503S/902 LSM-506S/9506 LSM-500S LSM-501S 02AGD220 02AGD230 02AGD240 02AGD250 02AGD Air blow cover Air blow cover Air blow cover Air blow cover Air blow cover Air cleaner LSM-500S LSM-501S LSM-503S LSM-506S LSM-512S Any model of LSM 02AGD600B Thermal printer (120V AC) Any model of LSM * Except for LSM-902 ** Except LSM-500S/902 G-43

46 Laser Indicator SERIES 548 Non-contact Displacement Measuring System Scanning is non-directional due to the pinhole focal point detection method employed. Focusing speed is improved with the software servo. Automatic intensity compensation allows workpieces with high dispersion surfaces, such as ceramics, to be measured. A built-in high-intensity blue LED guide light is used so that the position of the measuring point can be checked visually. Order No (LI-H1001U) Resolution: 0.01μm Measuring range: 1mm (±500μm) Working distance: 1.0mm ( ), 15.5mm ( ) Linearity: 1.5μm Focusing method: Pinhole method Laser beam diameter: Approx. ø2.0μm Laser wavelength: 780nm Display: Touch-panel type 6-inch LCD (black and white) Power supply: V AC, 50/60Hz, 350W Order No (LI-H1015U) Order No (Display Unit) Model LI-H1001U LI-H1015U LI-H700P Order No DIMENSIONS G-44