Eclipse L300D / L300

Transcription

1 M327E 04.5.NF.1 FPD/300mm Wafer Inspection Microscope Eclipse L300D / L300 Instructions

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3 Thank you for purchasing Nikon products. This instruction manual is written for the users of the Nikon's FPD/300mm wafer inspection microscope "Eclipse L300D / L300" and describes the basic operations of the microscope. To ensure correct usage, read this manual carefully before operating the instrument. It is prohibited to reproduce or transmit this manual in part or whole without Nikon's expressed permission. The contents of this manual are subject to change without notice. Although every effort has been made to ensure the accuracy of this manual, if you note any points that are unclear or incorrect, contact your nearest Nikon representative. Some of the products described in this manual may not be included in the set you have purchased. Be sure to read the instruction manual for any other products used in combination with the microscope.

4 Warning / Caution Symbols Used in This Manual Warning / Caution Symbols Used in This Manual Although Nikon products are designed to provide you with the utmost safety during use, incorrect usage or disregard of these instructions can cause personal injury or property damage. Warranty does not cover failures and damage due to these kinds of actions. For your safety, read the instruction manual carefully and thoroughly before using the instrument. Do not discard this manual but keep it near the product for easy reference. In this manual, safety instructions are indicated with the symbols shown below. Be sure to follow the instructions indicated with these symbols to ensure correct and safe operation. Table-1 WARNING / CAUTION symbol Symbol WARNING CAUTION Meaning Disregarding instructions marked with this symbol may lead to death or serious injury. Disregarding instructions marked with this symbol may lead to injury or property damage. Meaning of Symbol Used on the Equipment The following symbol placed on the equipment indicates that you need to be cautious when you use the equipment. Before you operate the part of the equipment with this symbol, check this instruction manual. Caution symbol Figure-1 Symbol affixed positions Table-2 Meaning of symbol Symbol Meaning Caution for heat. This marking near the lamphouse and side surface of the microscope calls your attention on the following; Lamphouse becomes very hot during and immediately after the illumination. Risk of burns. Do not touch the lamphouse during and immediately after the illumination. Make sure that the lamphouse is sufficiently cool before the lamp replacement. I

5 Safety Notes Safety Notes Note the following for safe usage. WARNING 1 Intended product use. This product should only be used for microscopic observation. Do not use it for any other purpose. Do not use it to view overly large sample that sticks out beyond the stage. 2 Read the instruction manual thoroughly. For your safety, thoroughly read this instruction manual and the instruction manual of the equipment used along with this product. Be sure to observe the warnings and cautions explained in the beginning of this manual. 3 Do not disassemble. Disassembly may cause malfunction, electrical shock and/or injury. Do not disassemble any part other than those described in this manual. If you experience any problem with the microscope, contact your nearest Nikon representative. 4 Power cord. Use only the specified power cord. Using other power cords could result in failures or fire. Also note that the protection Class 1 equipment should be connected to the PE (protective earth) terminal for grounding. For details about the specified power cord, see "7 Technical specifications". To prevent electrical shock, always turn off the power switch (flip it to the O side) before connecting or disconnecting the power cord. 5 Heat from the light source. The lamp and the lamphouse become extremely hot. To avoid burns, do not touch the lamphouse while the lamp is lit or for thirty minutes after it has been turned off. Further more, in order to avoid the risk of fire, do not place fabric, paper or highly flammable volatile materials such as gasoline, petroleum benzene, paint thinner or alcohol near the lamphouse while the lamp is lit or for about thirty minutes after it has been turned off. The rear of the microscope also becomes hot during use. Although this is not a malfunction, be careful not to touch it. 6 Reflection. The polished surface of the sample will reflect strong light by the illumination. Do not look at the illuminated surface for a long time because the strong reflection may hurt your eyes. II

6 Safety Notes CAUTION 1 Disconnect this product from the power supply before assembling this product, attaching or removing the cord, replacing the lamp, or performing maintenance. To prevent electric shocks and failures, when you assemble this product, attach or remove the cord, replace the lamp, or clean the main body or objectives, you must turn off this product and other related equipment (flip the power switches to the O side) and unplug the power cords from the wall outlet. 2 Check the light source. Use only the specified lamp and the lamphouse on this product. The use of other lamps and lamphouses may lead to malfunction. For details about the specified lamp and lamphouse, see "7 Technical specifications". 3 Cautions on lamp replacement. To prevent burn injury, allow the lamp to cool for at least 30 minutes after turning off the power switch, before replacing the lamp. To prevent electrical shock and damage to the microscope, always turn off the power switch (flip it to the O side) and unplug the power cord from the wall outlet before connecting or disconnecting the lamphouse. Do not touch the glass surface of the lamp with bare hands. Fingerprints or grease on the bulb surface will reduce the illumination of the lamp. Wipe clean the fingerprints or grease with a clean piece of cloth. Securely attach the lamphouse cover to the lamphouse after replacing the lamp. Never light the lamp while the lamphouse cover is open. When you dispose of the replaced lamp, do not shatter it or dispose of it casually. Dispose of the used lamp as the special industrial waste or dispose of them according to the regulations and rules of your local authority. 4 Do not let the microscope become wet. Do not get this product wet. In addition, do not use this product in an environment where water will get into this product. If the product gets wet, a short circuit may result that may cause malfunction or abnormal heating of the product. If you accidentally spill a liquid on the microscope, immediately turn off the power switch (flip it to the O side) and unplug the power cord from the wall outlet. Then use a dry cloth to wipe away the moisture. If any liquid gets inside the microscope, do not use it; instead, notify your nearest Nikon representative. 5 Weak electromagnetic emission. This product emits weak electromagnetic waves. The accuracy of any precision electronic equipment may be adversely affected if positioned too close. If the microscope affects TV or radio reception, move the radio or TV further away from the microscope. 6 Installation location. This product is a precision optical instrument. Using or storing the microscope under unsuitable conditions may damage it or may have an adverse effect on its accuracy. The following conditions should be kept in mind when selecting the installation location. Avoid a brightly lit location such as a room that receives direct sunlight, or directly under room lights. The image quality deteriorates if there is excessive ambient light. Choose a location that is free from dust or dirt. III

7 Safety Notes Choose a flat surface with little vibration. Choose a sturdy desk or table that is able to bear the weight of the instrument. The main body of this instrument weighs about 40 kg. To install this instrument on a desk or a table, at least two people are required. Handle the instrument carefully and do not drop it. Dropping it may injure the person carrying it or damage the instrument. Install this product in a place where it will not be a hazard in case of an unexpected event such as an earthquake. In some locations, you may need to tie down this product to a workbench or secure object so that it will not overturn or fall down. Do not use this microscope in an environment where water can get into the microscope. Do not install the microscope in a warm, humid location. Install this microscope in a location where you can easily unplug the power cord from the AC inlet of this microscope in emergency. Provide enough space around the microscope referring to the layout diagrams on the next page. The installation conditions are as follows: Area required : 1050 mm (W) 1109 mm (D) or more (see the layout diagrams) Power source : 100 to 240 V AC ±10% (2.4 A) Humidity : Relative humidity 85% at maximum (no condensation) Operating environmental temperature : +5 to +35 C Weight of the microscope : 64 kg (including stage and eyepiece tube) approx. Be careful not to pinch your fingers or hands when moving the microscope. 7 Cautions on moving the microscope. The microscope is a precision optical instrument. Handle it carefully and do not subject it to a strong physical shock. When moving the microscope, first remove the stage. Then, have two or more people grasp the microscope from both sides. (Information) The main body of the L300/L300D weighs about 40 kg. With the eyepiece tube, lamphouse and other parts (except stage) attached, the microscope weighs about 46 kg. Do not grasp the focusing knobs, eyepiece tube, lamphouse, stage mount, breath shield plate, etc., when carrying the microscope. They may come off and may cause serious injury or malfunction. Ask your nearest Nikon representative for the carrying rods of the microscope. Before carrying the stage, attach the two fixing metals to hold the movement of the stage plate. Use the smaller fixing metal to secure the side of the stage and then use the larger fixing metal to secure the front of the stage. (See 4.5 Attaching the stage, the glass plate, and the wafer holder.) 8 Cautions on assembling the microscope. Be careful not to pinch your fingers or hands during the assembly. The scratches or fingerprints on the lens surface will adversely affect the microscope's image. Be careful not to scratch or touch the lens surfaces. IV

8 Layout diagram Layout diagram Stage movable range (For LCD setting) Stage movable range (when the stroke limit pin is removed) (For semiconductor setting) Gravity point 613 E. P. 380 (0 ) 439 (15 ) 495 (30 ) Gravity point Figure-2 Layout diagram V

9 Operating Posture Operating Posture The figure below shows the posture that prevents strain on your body when you operate this equipment. Choose a workbench and a chair having the similar dimensions to those shown on the figure. The 95th-percentile male (Height: cm) (The height of the eye point) 415 (The height of the seating surface) 510 (The front clearance for the knees) 690 The upper clearance for the knees) 760 (The height of the workbench) The 5th-percentile female (Height: cm) 1140 (The height of the eye point) 472 (The height of the seating surface) 510 (The front clearance for the knees) 690 (The upper clearance for 760 (The height of the workbench) Figure-3 Operating Posture VI

10 Contents Warning / Caution Symbols Used in This Manual... I Meaning of Symbol Used on the Equipment... I Safety Notes... II Layout diagram...v Operating Posture...VI 1 Nomenclature and Functions Names of the parts Names of the operational parts Microscopy Episcopic bright-field microscopy Episcopic dark-field microscopy Episcopic DIC (differential interference contrast) microscopy Episcopic bright-field simplified polarization microscopy Episcopic fluorescent microscopy Diascopic bright-field microscopy (for L300D only) Diascopic bright-field simplified polarization microscopy (for L300D only) Operation of Each Part Filters The types and usage of the filters Placing the filter in and out of the optical path (for episcopic illumination) Placing the filter in and out of the optical path (for diascopic illumination) Coarse / fine focus knobs The relationship between the focus knob rotation and the stage vertical movement Adjusting the torque of the coarse focus knobs Coarse focus stopper ring Eyepiece tube Optical path selection Tilting function Vertical tube adapters Diopter adjustment Interpupillary distance adjustment Centering the objective VII

11 Contents 3.7 Field diaphragm Adjusting the size of the field diaphragm (for diascopic illumination only) Focusing the field diaphragm image (for diascopic illumination only) Centering the field diaphragm (for diascopic illumination only) Aperture diaphragm Adjusting the size of the aperture diaphragm Centering the episcopic aperture diaphragm Changing the illumination Stage The "coarse" mode The "fine" mode Focusing target How to use the focusing target Episcopic polarizer slider Attaching the polarizer slider Placing/removing the polarizer in/from the optical path Adjusting the orientation of the polarizer Episcopic rotatable polarizer slider Attaching the polarizer slider Placing/removing the polarizer in/from the optical path Setting the polarizer orientation Orientation of the polarizer during episcopic DIC microscopy Diascopic rotatable polarizer slider Attaching the polarizer slider Placing/removing the polarizer in/from the optical path Setting the polarizer orientation Analyzer slider Attaching the analyzer slider Placing/removing the analyzer in/from the optical path Rotatable analyzer slider Attaching the analyzer slider Placing/removing the analyzer in/from the optical path Setting the analyzer orientation Orientation of the analyzer during episcopic DIC microscopy DIC slider Attaching (removing) the DIC slider Placing/removing the DIC prism in/from the optical path Selecting the DIC prism position Selecting the interference color Pinhole slider Attaching the pinhole slider...37 VIII

12 Contents Placing/removing the pinhole in/from the optical path Centering the pinhole Assembly Required tools Installation location Assembling (schematic of complete assembly) Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replacing the lamp) Attaching the stage, the glass plate, and the wafer holder When using glass plate (when performing diascopic microscopy) When using wafer holder Attaching the eyepiece tube When removing the eyepiece tube Attaching the objectives When removing the objectives When the objectives not set correctly on the optical path when they are switched Centering the objectives Attaching the eyepieces Installing the filter block (for fluorescent illumination only) Attaching fiber adapter Attaching breath shielding plate Seismic restraint Connecting the power cord Attaching photomicrographic equipment or TV camera Photomicrographic equipment Photo-mask eyepiece TV cameras Digital cameras Troubleshooting Viewing and control systems Electrical Care and Maintenance Daily care and maintenance Cleaning the lens Cleaning tool and supplies (consumables) Cleaning procedure and notes...59 IX

13 Contents 6.3 Cleaning this product Storage Regular inspections (with charge) Technical Specifications...61 X

14 Contents XI

15 1 Nomenclature and Functions 1 Nomenclature and Functions 1.1 Names of the parts Analyzer slider* 1 or rotatable analyzer slider* 2 Episcopic polarizer slider* 1 or episcopic rotatable polarizer slider* 2 Eyepiece tube Eyepieces Lamphouse for episcopic illumination Slot for pinhole slider* 3 Arm of the microscope DIC slider* 4 Breath shielding plate Stage Sample holder (The glass plate is used in this figure.) Main body of the microscope Revolving nosepiece Objective Lamphouse for diascopic illumination Power cord Base of the microscope *1: For DIC microscopy or episcopic bright-field simplified polarization microscopy. :L300D only *2: For episcopic bright-field simplified polarization microscopy when the polarization is set to the desired direction. *3: For pinhole microscopy, insert the pinhole slider here. *4: For DIC microscopy. Figure-4 Names of the parts 1

16 1 Nomenclature and Functions 1.2 Names of the operational parts Rotatable analyzer dial *5 Dark-field/bright-field/ fluorescent selection lever Episcopic rotatable polarizer dial * 6 Pinhole centering screws Clamp for various adapters Diopter adjustment rings Prism movement knob Prism selection knob Optical path selection lever Condenser clamp screw Condenser focus lever Aperture diaphragm lever for diascopic illumination Pilot lamp (Lights when the power is ON.) Nosepiece rotation buttons Brightness control dial Episcopic/Diascopic illumination selection switch Episcopic aperture diaphragm control buttons *5: For the rotatable analyzer slider only. Coarse torque adjustment ring Coarse movement ON switch Stage coarse movement lever Coarse movement OFF switch Stage fine movement knob for Y-axis Stage fine movement knob for X-axis Fine focus knob Coarse focus knob *6: For the episcopic rotatable polarizer slider only. :L300D only Figure-5 Names of the operational parts (1) 2

17 1 Nomenclature and Functions Filter sliders Focusing target lever Aperture diaphragm centering screw holes Coarse focus stopper ring Holder clamp screw Diascopic polarizer dial Diascopic rotatable polarizer * 7 Screw hole for carrying rod Diascopic field diaphragm dial Slots for diascopic illumination filter Diascopic field diaphragm centering knobs :L300D only *7: For diascopic bright-field simplified polarization microscopy. Figure-6 Names of the operational parts (2) Caution for heat symbol CAUTION label Input voltage indication Power switch AC IN connector Screw holes for carrying rods Figure-7 Names of the operational parts (3) 3

18 2 Microscopy 2 Microscopy In this chapter, each type of microscopy is described. Please also refer to "3 Operation of Each Part" for how to operate each part. 1. Episcopic bright-field microscopy p.5 2. Episcopic dark-field microscopy p.6 3. Episcopic DIC (differential interference contrast) microscopy p.7 4. Episcopic bright-field simplified polarization microscopy p.8 5. Episcopic fluorescent microscopy p.9 6. Diascopic bright-field microscopy (for L300D only) p Diascopic bright-field simplified polarization microscopy (for L300D only) p.11 4

19 2 Microscopy 2.1 Episcopic bright-field microscopy 1. Set each part as follows. You can perform steps in any sequence. Press in for 100% binocular viewing. Slide out the analyzer and the polarizer. Press in the NCB and ND filters. (Insert the NCB filter into the slot closer to the lamphouse.) Fully press in and pull out 1 click for BF (bright-field). Lower the stage to the limit. Slide out the DIC slider. Select 10x objective. Adjust the brightness. Press for EPI. Fully open the aperture diaphragm. : L300D only Place the sample on the stage. See x 12 Stage Move the stage to your right (or left) side. Focus on the sample. See x 12 Stage Use the focusing target for a sample with a polished surface. Adjust diopter. See 3.4 Diopter adjustment Adjust interpupillary distance. See 3.5 Interpupillary distance adjustment Switch to the desired objective and focus on the sample again. Adjust brightness. See 3.1 Filters Use the ND filters and brightness control dial. Adjust the size of the aperture diaphragm. See 3.8 Aperture diaphragm 5

20 2 Microscopy 2.2 Episcopic dark-field microscopy 1. Mount the BD objectives. However, only the objectives marked "BD" can be used on the dark-field microscopy. BD marking on the objective 2. Observe the sample with the episcopic bright-field microscopy. See 2.1 Episcopic bright-field microscopy 3. Switch to the dark-field microscopy. Adjust brightness with the ND filters. Fully slide out for DF (dark-field). Swing in the BD objective. 4. Adjust brightness with the brightness control dial. Fully open the aperture diaphragm. After dark-field microscopy, return to bright-field microscopy, if required. Adjust brightness with the ND filters. Press in 1 click for BF (bright-field). Adjust brightness with the brightness control dial. Adjust the size of the aperture diaphragm. 6

21 2 Microscopy 2.3 Episcopic DIC (differential interference contrast) microscopy Attach the analyzer, episcopic polarizer and DIC sliders. Slide them out to the click position. Observe the sample with the episcopic bright-field microscopy. See 2.1 Episcopic bright-field microscopy 3. Switch to the DIC microscopy. The objective with "LU" marking is suitable for DIC microscopy. When using the episcopic rotatable polarizer and the rotatable analyzer, set the direction of polarization for DIC microscopy. (See Orientation of the polarizer during episcopic DIC microscopy and Orientation of the analyzer during episcopic DIC microscopy.) Adjust brightness with the ND filters. Press in the polarizer and the analyzer. When using the episcopic rotatable polarizer and the rotatable analyzer, set the direction of polarization for DIC microscopy. Press in the DIC slider. Rotate to change the interference color. Adjust brightness with the brightness control dial. Rotate the knob to the position indicated on the objective. (For the objective on the right, turn the knob to match the letter A with the white dot.) 4. After DIC microsopy, return to bright-field microscopy, if required. Slide out the polarizer and analyzer. Adjust brightness with the ND filters. Slide out the DIC slider. Adjust brightness with the brightness control dial. 7

22 2 Microscopy 2.4 Episcopic bright-field simplified polarization microscopy Attach the analyzer and episcopic polarizer. Slide them out to the click position. Observe the sample with the episcopic bright-field microscopy. See 2.1 Episcopic bright-field microscopy 3. Switch to the episcopic bright-field simplified polarization microscopy. When you use the episcopic rotatable polarizer and the rotatable analyzer, you can perform polarization microscopy in a desired direction. (See 3.13 Episcopic rotatable polarizer slider and 3.16 Rotatable analyzer slider.) Adjust brightness with the ND filters. Press in the polarizer and the analyzer. (When using the episcopic rotatable polarizer and the rotatable analyzer, adjust the direction.) 4. Adjust brightness with the brightness control dial. After episcopic bright-field simplified polarization microscopy, return to bright-field microscopy, if required. Adjust brightness with the ND filters. Slide out the polarizer and analyzer. Adjust brightness with the brightness control dial. 8

23 2 Microscopy 2.5 Episcopic fluorescent microscopy Attach the filter block for the desired excitation method. See 4.9 Installing the filter block (for fluorescent illumination only) Observe the sample with the episcopic bright-field microscopy. See 2.1 Episcopic bright-field microscopy 3. Perform the episcopic fluorescent microscopy. Adjust brightness with the ND filters. Completely press in so the filter block enters the optical path. 4. Adjust brightness with the brightness control dial. Fully open the aperture diaphragm. After episopic fluorescent microscopy, return to bright-field microscopy, if required. Adjust brightness with the ND filters. Slide out 1 click for BF. Adjust brightness with the brightness control dial. Adjust the size of the aperture diaphragm. 9

24 2 Microscopy 2.6 Diascopic bright-field microscopy (for L300D only) 1. Set each part as follows. You can perform steps in any sequence. Press in for 100% binocular viewing. Slide out the analyzer. Fully pull out for DF (dark-field). Slide out the DIC slider. Set the NCB and ND filters. Lower the stage to the limit. Select 10 objective. Adjust the brightness. Turn ON the power. Press for DIA Place the sample on the stage. See x 12 Stage Move the stage to your right (or left) front side. Focus on the sample. The focusing target cannot be used for diascopic illumination. Adjust the focus using the diascopic field diaphragm as the guide. Adjust diopter. See 3.4 Diopter adjustment Adjust interpupillary distance. See 3.5 Interpupillary distance adjustment Switch to the desired objective and focus on the sample again. Fully open the aperture diaphragm. Adjust the size of the field diaphragm. See 3.7 Field diaphragm Adjust brightness. See 3.1 Filters Use the ND filters and brightness control dial. Adjust the size of the aperture diaphragm. See 3.8 Aperture diaphragm 10

25 2 Microscopy 2.7 Diascopic bright-field simplified polarization microscopy (for L300D only) 1. Observe the sample with the diascopic bright-field microscopy. See 2.6 Diascopic bright-field microscopy (for L300D only) Attach the analyzer and diascopic rotatable polarizer. Perform the diascopic bright-field simplified polarization microscopy. When you use the rotatable analyzer with the diascopic rotatable polarizer, you can perform polarization microscopy of the desired direction. (See 3.14 Diascopic rotatable polarizer slider and 3.16 Rotatable analyzer slider.) Press in the diascopic rotatable polarizer. Adjust the direction. Press in the analyzer. (When using the rotatable analyzer, adjust the direction.). Adjust brightness with the ND filters. 4. Adjust brightness with the brightness control dial. After diascopic bright-field polarization microscopy, return to bright-field microscopy, if required. Slide out the diascopic rotatable polarizer. Slide out the analyzer. Adjust brightness with the ND filters. Adjust brightness with the brightness control dial. 11

26 3 Operation of Each Part 3 Operation of Each Part 3.1 Filters Use filters to adjust color temperature, brightness, and contrast. Two types of filter holders are provided: one is for episcopic illumination and the other is for diascopic illumination. Note that the diascopic illumination filters can be used only for L300D. Up to four episcopic illumination filters can be installed to the left side of the microscope arm, while three diascopic illumination filters can be installed to the front of the lamphouse. Episcopic illumination filter sliders Diascopic illumination filter holders Figure-8 Filters The types and usage of the filters The filters as listed in the table below are provided for both episcopic illumination and diascopic illumination. These filters can be used independently or in combination with each other. Table-3 Types and usage of the filters Filters NCB (neutral color balancing filter) ND2 (transmission rate: 50%) ND4 (transmission rate: 25%) ND16 (transmission rate: 6%) GIF (green interference filter) Usage Color temperature adjustment for general use and color photomicrography. Brightness adjustment. Brightness adjustment. Brightness adjustment. Contrast adjustment. 12

27 3 Operation of Each Part Placing the filter in and out of the optical path (for episcopic illumination) You can insert an episcopic illumination filter slider in any of the two slots provided for each of two places on the left side of the microscope arm. You can feel two clicks as you place a filter slider in a slot. Slots for filter sliders Figure-9 Installation positions of episcopic illumination filters Placing the filter in the optical path Push in the filter slider to the second click to place the filter in the optical path. Up to four filter sliders can be combined at your desired way. The NCB filter, however, must be inserted in the nearest slot to the episcopic illumination lamphouse. Removing the filter from the optical path Slide out the filter slider to the first click to remove the filter from the optical path. Keep this state if the filter is not used Placing the filter in and out of the optical path (for diascopic illumination) You can insert a diascopic illumination filter holder in any of the three slots provided in front of the diascopic illumination lamphouse. Slots for filter holders Figure-10 Installation positions of diascopic illumination filters Placing the filter in the optical path Set the filter holder, so that the filter to be used is at the bottom, to desired slot in front of the lamphouse. Up to three filter holders can be combined at your desired way. The NCB filter, however, must be inserted in the nearest slot to the diascopic illumination lamphouse. Removing the filter from the optical path Remove all the filter holders from the slots in front of the lamphouse. 13

28 3 Operation of Each Part 3.2 Coarse / fine focus knobs The relationship between the focus knob rotation and the stage vertical movement The relationship between the direction of the focus knob rotation and the stage vertical movement is shown in the figure. Figure-11 Relationship between the focus knob rotation and the stage vertical movement The stage moves 0.1 mm by one full rotation of the fine focus knob. The stage moves 1 µm by one step of the fine focus knob graduations. The stroke (range) of the stage vertical movement is 29 mm. Note: When performing observation with the combination of the 14 x 12 stage, glass plate, and 0.7mm liquid crystal board, the stage vertical movement range is 7.2 mm up and 21.8 mm down from the focal plane. Reference: Never attempt either of the following actions. They will damage the microscope. Rotating the left and right knobs in opposite directions at the same time. Continuing to rotate the coarse focus knob after the stage has reached the limit of its motion. 14

29 3 Operation of Each Part Adjusting the torque of the coarse focus knobs The torque of the coarse focus knobs can be adjusted using the torque adjustment ring at the base of the right coarse focus knob. To increase the torque Torque adjustment ring Figure-12 Adjusting the torque of the coarse focus knobs Increasing the torque of the coarse focus knobs To increase the torque, turn the torque adjustment ring counter-clockwise. Reducing the torque of the coarse focus knobs To reduce the torque, turn the torque adjustment ring clockwise, but make sure that the stage does not fall on its own weight when you take your hands off the coarse focus knob Coarse focus stopper ring The coarse focus stopper ring is used to mark the vertical position of the stage, mainly the focal plane. Once the coarse focus stopper ring is clamped at a position, you can easily bring back the stage to that position even after it is lowered greatly for sample exchange. The coarse focus stopper ring is at the base of the left side coarse focus knob. The stage position is marked. Figure-13 Coarse focus stopper ring Coarse focus stopper ring Marking the stage position To mark the stage position, turn the ring clockwise to the limit. When the coarse focus stopper ring is clamped, the stage can no longer be raised up beyond the marked position by the coarse focus knobs. Reference: Do not excessively tighten the coarse focus stopper ring, otherwise the coarse focus stopper ring may become difficult to release. Use only the coarse focus knob to lower or raise the stage for sample exchange. To return the stage to the marked position after sample exchange, raise the stage to the limit by the coarse focus knob. Releasing the mark To release the mark, turn the coarse focus stopper ring counter-clockwise to the limit. 15

30 3 Operation of Each Part 3.3 Eyepiece tube Optical path selection The optical path selection lever can be used to switch the destination of light from the binocular part to the vertical tube. 0% 100% Push IN Pull OUT 100% 0% Figure-14 Optical path selection Tilting function The binocular part of the trinocular tilting eyepiece tube can be swung up and down for finding the best viewing position. Figure-15 Tilting function Vertical tube adapters When mounting the photomicrographic equipment or TV camera to the vertical tube of the trinocular eyepiece tube, you must first attach the adapter (photo adapter or direct C-mount adapter; both sold separately). Insert the adapter into the vertical tube and fix it by the clamp screw with the Allen wrench. Photo adapter Figure-16 Vertical tube adapters Set-screw Vertical tube of the trinocilar eyepiece tube. 16

31 3 Operation of Each Part 3.4 Diopter adjustment The diopter adjustment compensates for differences in eyesight between your left and right eyes. After the correct adjustment, you will find the observation with both eyes easier and the focus shift is reduced when switched to the different objectives. Be sure to adjust the diopter adjustment rings on both eyepieces. Outer tube edge Diopter adjustment ring Engraved line Figure-17 Diopter adjustment Turn the diopter adjustment rings on both eyepieces to align their engraved lines with the edge of the outer tube of the eyepiece. (This is the standard position for the diopter adjustment.) Focus on the sample with the 10 objective following the steps described in 2.1 Episcopic bright-field microscopy or 2.6 Diascopic bright-field microscopy (for L300D only). Bring the 50 objective in the optical path and focus on the sample using the focus knobs. (Using the focusing target makes the focusing easier on episcopic illumination. See 3.11 Focusing target.) Bring the 5 or 10 objective in the optical path. Looking through the right eyepiece with your right eye, focus on the sample by turning the diopter adjustment ring on the right eyepiece (not the coarse and fine focus knobs). Look through the left eyepiece with your left eye and focus on the sample with the diopter adjustment ring on the left eyepiece. Repeat steps 3 to 5 till the image keeps its focus even though the objective magnification is changed. 17

32 3 Operation of Each Part 3.5 Interpupillary distance adjustment Adjust the interpupillary distance to observe a sample with both eyes. Merge the viewfields into one Figure-18 Interpupillary distance adjustment Perform the diopter adjustment and focus on the image with the 10 objective. Adjust the interpupillary distance so that the viewfield for each eye is at the same position on the sample. 3.6 Centering the objective Among the six holes of the nosepiece, three (nosepiece addresses 4, 5, and 6) have the centering feature for objectives. When you center an objective, you can reduce the viewfield misalignment that occurs when you switch objectives of high magnification. Using the eyepiece with crosshairs (sold separately) lets you perform even more precise centering. Centering screw holes Figure-19 Centering screw holes Attach the desired objectives to nosepiece addresses 4, 5, and 6. Attach the eyepiece with crosshairs. (If you do not have an eyepiece with crosshairs, use a normal eyepiece.) Insert an objective with one-level lower magnification than the desired objective into the optical path and focus on the sample. Match the target in the sample (for example, a pattern that is easy to recognize) to the cross point of the cross in the viewfield (or center of the viewfield). Insert the objective attached to nosepiece address 4 into the optical path. 18

33 3 Operation of Each Part If the target is not aligned with the cross point, use an Allen wrench (1.5 mm) to turn the centering screws of the nosepiece and bring the target to the cross point (or center of the viewfield). If you mainly connect the microscope to a monitor display, bring the target to the center of the monitor display. In the same manner, adjust the objectives attached to nosepiece addresses 5 and 6. Reference: If you turn the centering screw to the right and the screw hits the limit, do not turn the screw any further. If you do, you may damage the screw. 3.7 Field diaphragm The field diaphragm determines the range of light to samples. The more you narrow the field diaphragm, the more flaring is suppressed, improving contrast. You need to set the field diaphragm to an adequate size especially when you perform microscopy that requires high image quality (such as filming). For episcopic illumination, the built-in field diaphragm is set to the adequate size and it does not need to be adjusted Adjusting the size of the field diaphragm (for diascopic illumination only) While observing the sample, operate the diascopic field diaphragm dial so the size of the diaphragm is the same as that of the viewfield. For diascopic illumination, the adequate size of the diaphragm differs depending on the magnification of the objective in the optical path. Adjust the diaphragm so it is appropriate for the magnification in use. Diascopic field diaphragm dial Figure-20 Diascopic field diaphragm dial 19

34 3 Operation of Each Part Focusing the field diaphragm image (for diascopic illumination only) Bring the diaphragm image into focus when the microscope is delivered to you or when the way you use the microscope is changed. The diaphragm image may become out of focus depending on the thickness of the sample or whether a glass plate is used for mounting a sample Use the 10 objective to focus on the sample. Bring the part of the sample with less patterns in the optical path. Bring the diascopic field diaphragm dial to the minimum. While observing the sample, operate the condenser focus lever to focus the field diaphragm image. Condenser focus lever Figure-21 Condenser focus lever Centering the field diaphragm (for diascopic illumination only) Center the objectives (see 3.6 Centering the objective )and then perform this centering. Focus the diaphragm image, operate the diascopic field diaphragm centering knobs to move the diaphragm image to the center of the viewfield. Diaphragm image Diaphragm image Viewfield Moving the diaphragm image Viewfield Diascopic field diaphragm centering knobs 1. Figure-22 Centering the field diaphragm (diascopic illumination) Switch to the 50 objective and match the center of the diaphragm image and the center of the viewfield. At this time, operate the diascopic field diaphragm dial to reduce the diaphragm image so it is a little smaller than the viewfield, and then operate the centering knob. This way, you can achieve highly precise centering. 20

35 3 Operation of Each Part 3.8 Aperture diaphragm The aperture diaphragm adjusts the numerical aperture (N.A.) of the illumination system, and plays an important part in determining image resolution, contrast and depth of focus Adjusting the size of the aperture diaphragm When adjusting the size of the aperture diaphragm for episcopic illumination, use the episcopic aperture diaphragm control buttons. For diascopic illumination, use the aperture diaphragm lever for diascopic illumination Remove one eyepiece and look into the open sleeve. Inside, you can see the exit pupil of the objective as a bright circle. Adjust the size of the aperture diaphragm image to the appropriate size. Generally, the aperture diaphragm is to be stopped down to 70 to 80% of the objective N.A. Stopping down the aperture diaphragm excessively will lower the image resolution. The aperture should not be smaller than 60% of the objective N.A. The appropriate size of the aperture diaphragm 70 to 80% 100% Exit pupil of the objective Image of the aperture diaphragm Figure-23 Aperture diaphragm Aperture diaphragm lever for diascopic illumination Episcopic aperture diaphragm control buttons If your sample is of low reflectance and observed under episcopic illumination, you may not be able to see the aperture diaphragm image. In this case, replace the sample with of higher reflectance Centering the episcopic aperture diaphragm Tools required: Allen wrench (2 mm) 2 On normal usage, there is no need to center the episcopic aperture diaphragm since it is already centered at the factory. If you need very precise centering or off-centered diaphragm (such as for diagonal illumination), the position of the aperture diaphragm can be shifted. Center the episcopic aperture diaphragm using two aperture diaphragm centering holes at the back of the filter slider on the left side arm. 1. Remove the caps of the centering holes and insert the Allen wrench in the centering holes. You can look in the holes to find the centering screw heads. 21

36 3 Operation of Each Part 2. Remove one eyepiece from the microscope and look inside the open sleeve to find the image of the aperture diaphragm. Turn the centering screws to match the two centers of the exit pupil of the objective and the image of the aperture diaphragm in the same manner as adjusting the size of the aperture diaphragm. Image of the aperture diaphragm Exit pupil of the objective Aperture diaphragm centering screw holes Match two centers Figure-24 Centering the episcopic aperture diaphragm For precise centering, using a centering telescope (sold separately) is recommended with which you can see the exit pupil of the objective much easier. 22

37 3 Operation of Each Part 3.9 Changing the illumination You can use the dark-field/bright-field/fluorescent selection lever on the right of the arm to change illumination. Dark-field/bright-field/fluorescent selection lever Figure-25 Dark-field/bright-field/fluorescent selection lever For fluorescent illumination, attach the filter block inside the arm. (See 4.9 Installing the filter block (for fluorescent illumination only).) Table-4 Changing the illumination Lever position Type of illumination FL Fully push in. Fluorescent illumination (only when the filter block is attached) BF Pull out 1 click. Bright-field illumination DF Fully pull out. Dark-field illumination 23

38 3 Operation of Each Part Stage The stage can be moved in either the "coarse" mode for swift and long-ranging movement, or the "fine" mode for minute movement. To switch between the modes, use the coarse movement ON and OFF switches on the stage coarse movement lever The "coarse" mode Grip the stage coarse movement lever to press in the coarse movement ON switch at the back side of the lever. The stage is now in the "coarse" mode and can be moved freely in both X and Y direction. Once the coarse movement ON switch is pressed, the stage stays in the "coarse" mode. Take hold of the stage coarse movement lever and move the stage (the coarse mode is used at low magnification observation and changing samples). Moving the stage with the stage coarse movement lever without pressing in the coarse movement ON switch will damage the stage. Likewise, pushing or pulling the stage plate without pressing in the coarse movement ON switch will damage the stage. Make sure that the coarse movement ON switch is pressed in for the "coarse" mode before moving the stage coarse movement lever. When changing samples, lower the stage 5 to 10 mm below the focal plane. Use coarse focus stopper ring for easy adjustment. (See Coarse focus stopper ring".) Press in the coarse movement ON switch Figure-26 COARSE mode Stage coarse movement lever 24

39 3 Operation of Each Part The "fine" mode Press down the coarse movement OFF switch at the left side of the stage coarse movement lever. The stage is now in the "fine" mode. Turn the stage fine movement knobs to move the stage minutely in both X and Y direction. The fine mode is maintained until you press in the coarse movement ON switch at the back side of the stage coarse movement lever. Stage fine movement knob for X-axis Press down the coarse movement OFF switch Stage fine movement knob for Y-axis Figure-27 FINE mode 3.11 Focusing target When you are to observe a sample with a polished surface under the episcopic illumination, the use of the focusing target will facilitate the focusing How to use the focusing target Pull out the focusing target lever to put the focusing target in the optical path. Pull out the focusing target lever and look into the eyepieces. You will find dark shadows at 4 corners of the viewfield. When the sample is out of focus, the edges of the shadows are also blurred (see the figure below). Turn the focus knobs and focus on the edges of the shadows till they look sharp. After that, push in the focusing target lever to remove the focusing target from the optical path and find out that the sample is just as well in focus. Focusing target lever (Pull out to put the focusing target in the optical path.) Out of focus. In focus. The edges are blurred. The edges are sharp. Figure-28 Focusing target 25

40 3 Operation of Each Part 3.12 Episcopic polarizer slider Use together with the analyzer slider for episcopic bright-field simplified polarization microscopy. Use together with the analyzer and the DIC sliders for episcopic DIC microscopy. Empty hole Orientation adjustment screw Polarizer Figure-29 Episcopic polarizer slider Attaching the polarizer slider Remove the cap near the indication "POLARIZER" at the right side of the microscope arm. Insert the polarizer slider with its nameplate facing toward the eyepieces. Slide the slider in and out of the microscope to find two clicks on the slider Placing/removing the polarizer in/from the optical path Episcopic polarizer slider Push in: The polarizer is in the optical path. Placing the polarizer in the optical path Figure-30 Episcopic polarizer Push in the slider till the second click to place the polarizer in the optical path. Adjust the orientation of the polarizer before using the polarizer slider for the first time. (See Adjusting the orientation of the polarizer.) 26

41 3 Operation of Each Part Removing the polarizer from the optical path Pull out the slider to the first click to remove the polarizer from the optical path. (The empty hole is now placed in the optical path.) Adjusting the orientation of the polarizer Turning the orientation adjustment screw at the bottom of the slider changes the orientation of the polarizer. Here is how to rotate the polarizer for the precise crossed Nicols adjustment. Place the polarizer and the analyzer in the optical path. Place a sample with flat and plane surface on the stage and set each part of the microscope for the episcopic simplified polarization microscopy. Remove one eyepiece from the microscope and look inside the open sleeve. You can see the objective's exit pupil as a bright circle. Turn the orientation adjustment screw in either direction till the dark cross appears in the field. This is the crossed Nicols position. Figure-31 Dark cross 3.13 Episcopic rotatable polarizer slider Use together with the rotatable analyzer for episcopic bright-field simplified polarization microscopy with the orientation of polarization that can be set to the desired direction. Using the episcopic rotatable polarizer slider with the analyzer slider and the DIC slider makes episcopic DIC microscopy possible. Dial Polarizer Empty hole Triangular mark Orientation indicators Figure-32 Episcopic rotatable polarizer slider 27

42 3 Operation of Each Part Orientation indicator of polarizer Dial Figure-33 Layout of dial and polarizer orientation Attaching the polarizer slider Remove the cap near the indication "POLARIZER" at the right side of the microscope arm. Insert the polarizer slider with its nameplate facing toward the eyepiece. Slide the slider in and out of the microscope to find two clicks on the slider Placing/removing the polarizer in/from the optical path Episcopic rotatable polarizer slider Placing the polarizer in the optical path Figure-34 Episcopic rotatable polarizer Push in the slider till the second click to place the polarizer in the optical path. Removing the polarizer from the optical path Push in: The polarizer is in the optical path. Pull out the slider to the first click (to the right) to remove the polarizer from the optical path. (The empty hole is now placed in the optical path.) 28

43 3 Operation of Each Part Setting the polarizer orientation While checking the orientation indicators of the dial, operate the dial so the desired indicator matches the triangular mark. To set the polarizer in the crossed Nicols position with the desired analyzer orientation, remove the eyepiece and rotate the dial so the objective's exit pupil in the eyepiece becomes a dark cross. Use a sample that is flat and plain. Figure-35 Dark cross Orientation of the polarizer during episcopic DIC microscopy Match the horizontal indicator of the dial with the triangular mark. Figure-36 Orientation of the polarizer during episcopic DIC microscopy 3.14 Diascopic rotatable polarizer slider Use together with the rotatable analyzer for diascopic bright-field simplified polarization microscopy with the orientation of polarization that can be set to the desired direction. Empty hole Orientation indicators Polarizer Dial Triangular mark Figure-37 Diascopic rotatable polarizer slider 29

44 3 Operation of Each Part Dial Orientation indicators Figure-38 Layout of dial and polarizer orientation Attaching the polarizer slider Remove the cap near the indication "POLARIZER" at the left side of the microscope base. Insert the polarizer slider with its nameplate facing up. Slide the slider in and out of the microscope to find two clicks on the slider. Insert the diascopic rotatable polarizer slider. Figure-39 Diascopic rotatable polarizer Placing/removing the polarizer in/from the optical path Diascopic rotatable polarizer slider Push in: The polarizer is in the optical path. Figure-40 Diascopic rotatable polarizer 30

45 3 Operation of Each Part Placing the polarizer in the optical path Push in the slider till the second click to place the polarizer in the optical path. Removing the polarizer from the optical path Pull out the slider to the first click (to the left) to remove the polarizer from the optical path. (The empty hole is now placed in the optical path.) Setting the polarizer orientation While checking the orientation indicators of the dial, operate the dial so the desired indicator matches the triangular mark. To set the polarizer in the crossed Nicols position with the desired analyzer orientation, remove the eyepiece and rotate the dial so the objective's exit pupil in the eyepiece becomes a dark cross. Use a sample that is flat and plain. Figure-41 Dark cross 31

46 3 Operation of Each Part 3.15 Analyzer slider Use together with the polarizer slider for episcopic bright-field simplified polarization microscopy. Use together with the polarizer and the DIC sliders for episcopic DIC microscopy. Empty hole Analyzer Figure-42 Analyzer slider Attaching the analyzer slider Remove the cap near the indication "ANALYZER" at the right side of the microscope arm. Insert the analyzer slider with its nameplate facing up. Slide the slider in and out of the microscope to find two clicks on the slider Placing/removing the analyzer in/from the optical path Analyzer slider Figure-43 Analyzer Push in: The analyzer is in the optical path. Placing the analyzer in the optical path Push in the slider till the second click to place the analyzer in the optical path. Since the orientation of the analyzer is already adjusted at the factory, you can easily get the crossed Nicols position by just placing the polarizer and the analyzer in the optical path. Removing the analyzer from the optical path Pull out the slider to the first click to remove the analyzer from the optical path. (The empty hole is now placed in the optical path.) 32

47 3 Operation of Each Part 3.16 Rotatable analyzer slider Use together with the episcopic rotatable polarizer or the diascopic rotatable polarizer for episcopic or diascopic simplified polarization microscopy with the orientation of polarization that can be set to the desired direction. Using the rotatable analyzer slider with the episcopic (or episcopic rotating) polarizer slider and the DIC slider makes episcopic DIC microscopy possible. Dial Analyzer Empty hole Triangular mark Orientation indicators Figure-44 Rotatable analyzer slider Figure-45 Layout of dial and analyzer orientation Attaching the analyzer slider Remove the cap near the indication "ANALYZER" at the right side of the microscope arm. Insert the analyzer slider with its nameplate facing upward. Slide the slider in and out of the microscope to find two clicks on the slider. 33

48 3 Operation of Each Part Placing/removing the analyzer in/from the optical path Rotatable analyzer slider Push in: The analyzer is in the optical path. Placing the analyzer in the optical path Figure-46 Rotatable analyzer Push in the slider till the second click to place the analyzer in the optical path. Removing the analyzer from the optical path Pull out the slider to the first click (to the right) to remove the analyzer from the optical path. (The empty hole is now placed in the optical path.) Setting the analyzer orientation While checking the orientation indicators of the dial, operate the dial so the desired indicator matches the triangular mark. To set the analyzer in the crossed Nicols position with the desired polarizer orientation, remove the eyepiece and rotate the dial so the objective's exit pupil in the eyepiece becomes a dark cross. Use a sample that is flat and plain. Figure-47 Dark cross Orientation of the analyzer during episcopic DIC microscopy Match the vertical indicator of the dial with the triangular mark. Figure-48 Orientation of the analyzer during episcopic DIC microscopy 34

49 3 Operation of Each Part 3.17 DIC slider Use together with the episcopic (or episcopic rotatable) polarizer and analyzer sliders for episcopic DIC microscopy. Prism selection knob Prism movement knob Sliding limit groove Figure-49 DIC slider Attaching (removing) the DIC slider Use an Allen wrench to loosen the DIC slider limit screw on the revolving nosepiece. Insert the DIC slider into the slot on the nosepiece and screw in the DIC slider limit screw. When removing the DIC slider from the nosepiece, first fully loosen the DIC slider limit screw, and then pull out the slider. DIC slider limit screw Figure-50 DIC slider 35

50 3 Operation of Each Part Placing/removing the DIC prism in/from the optical path Push in: The DIC prism is in the optical path. Figure-51 DIC slider Placing the DIC prism in the optical path Push in the slider till the second click to place the DIC prism in the optical path. Removing the DIC prism from the optical path Pull out the slider to the first click to remove the DIC prism from the optical path Selecting the DIC prism position According to the objective in use, select either A or B as the position of the DIC prism. The correct position to be used is indicated on the objective barrel after the magnification and the objective N.A. indications. See the objective figure below. The letter "A" on the barrel indicates that the correct DIC prism position for this objective is "A". Thus, when you use this objective, turn the prism selection knob on the DIC slider to match the letter "A" with the white dot. The correct position for the DIC prism selection knob is indicated here. Figure-52 Selecting the DIC prism position (objective) 36

51 3 Operation of Each Part Selecting the interference color Turn the prism movement knob to change the interference colors. Table-5 Selecting the interference color Interference color Dark Gray Sensitive red-violet Effects Observation similar to the dark-field microscopy can be performed. The changes in phase difference are shown as the difference in brightness. This color gives the highest sensitivity in detecting the phase difference. The changes in phase difference are shown as a difference in interference colors. The detection sensitivity is not good as the gray Pinhole slider When using the high magnification objectives, placing the pinhole on the optical path gives deep depth of focus to the image. This is especially effective when viewing contact holes. Pinhole slider adapter Pinhole Flat head screws Pinhole centering screws Figure-53 Pinhole slider Attaching the pinhole slider Remove the cover plate near the indication "PINHOLE" at the right side of the microscope arm. Attach the pinhole slider adapter instead, using two flat head screws supplied together with the pinhole slider. Insert the pinhole slider to the adapter. Slide the slider in and out of the microscope to find two clicks on the slider. Be sure to center the pinhole before observation Placing/removing the pinhole in/from the optical path Placing the pinhole in the optical path Push in the slider till the second click to place the pinhole in the optical path. When the pinhole is in the optical path, opening or closing down the aperture diaphragm will have no effect on the image since the pinhole aperture is smaller than the aperture diaphragm stopped down to the limit. 37

52 3 Operation of Each Part Removing the pinhole from the optical path Pull out the slider to the first click to remove the pinhole from the optical path and to make the aperture diaphragm effective Centering the pinhole Be sure to center the pinhole (match the centers of the pinhole and the optical path) before observation. Remove one eyepiece and while looking into the open sleeve, turn the pinhole centering screws to bring the pinhole image to the center of the exit pupil of the objective. For this adjustment, the use of centering telescope (sold separately) is recommended since it will facilitate the observation of the exit pupil. Pinhole slider Push in: The pinhole is in the optical path. Pinhole slider adapter Figure-54 Pinhole 38

53 4 Assembly 4 Assembly Assemble each part of the microscope referring to the diagram on the next page. WARNING Before assembling the microscope, be sure to read the WARNING and CAUTION at the beginning of this instruction manual and follow the instructions written therein. To avoid electrical shocks and fire, turn off the power switch (flip it to the O side) before assembling the microscope. CAUTION The main body of this instrument weighs about 40 kg. To install this instrument on a desk or a table, at least two people are required. Handle the instrument carefully and do not drop it. Dropping it may injure the person carrying it or damage the instrument. Take care not to pinch your hands or fingers during assembly. Scratches and fingerprints on the lenses will adversely affect the image. Take care not to get them on the lenses. If lenses and the like are contaminated, e.g., with fingerprints, clean them according to the description in "6.3 Cleaning this product." The microscope is a precision optical instrument. Take care when handling them and avoid strong shocks. (Especially on the objectives since they can be adversely affected even by a weak shock.) 4.1 Required tools To assemble this instrument, the following tools are required. (These tools are not supplied with the microscope.) Allen wrench or screwdriver 2 mm mm 1 4 mm 1 5 mm 1 Phillips screwdriver 1 39

54 4 Assembly 4.2 Installation location This product is a precision optical instrument. Using or storing the microscope under unsuitable conditions may damage it or may have an adverse effect on its accuracy. Read the warnings and cautions explained in the beginning of this manual and select the location that satisfies the indicated conditions. 4.3 Assembling (schematic of complete assembly) Eyepiece tube Eyepieces Polarizer Analyzer Episcopic rotatable polarizer Pinhole ND, NCB, GIF filters (for episcopic illumination) Rotatable analyzer Breath shielding plate DIC slider Lamp and lamphouse (for episcopic illumination) Objective mount adapter *1 (L300D only) ND, NCB, GIF filters (for diascopic illumination) Objective (with 25 mm screw) Objective (with 32 mm screw) (L300D only) Diascopic rotatable polarizer (for diascopic illumination) (L300D only) Lamp and lamphouse (for diascopic illumination) Glass plate and wafer holder Power cord Stage 1: Needs objective mount adapter to change the screw from 25 to 32 mm. Figure-55 Assembling 40

55 4 Assembly 4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replacing the lamp) CAUTION To prevent electrical shock and damage to the microscope, always turn off the power switch (flip it to the O side) and unplug the power cord from the wall outlet before connecting or disconnecting the lamphouse. To prevent burn injury, allow the lamp and the lamphouse to cool for at least 30 minutes after turning off the power switch, before replacing the lamp. Use only the specified lamp and the lamphouse on this product. The use of other lamps and lamphouses may lead to malfunction. For details about the specified lamp and lamphouse, see "7 Technical specifications". Do not touch the glass surface of the lamp with bare hands. Fingerprints or grease on the bulb surface will reduce the illumination of the lamp. Wipe clean any fingerprints or grease with a clean piece of cloth. Securely attach the lamphouse cover to the lamphouse after replacing the lamp. Never light the lamp while the lamphouse cover is open. When you dispose of the replaced lamp, do not shatter it or dispose of it casually. Dispose of the used lamp as the special industrial waste or dispose of them according to the regulations and rules of your local authority Turn off the power switch of the microscope (flip it to the O side) and disconnect the power cord plug from the outlet. Remove the lamphouse from the microscope if attached. (Use the Allen wrench (2 mm for episcopic illumination, 2.5 mm for diascopic illumination) to loosen the lamphouse clamp screw on the right side of the microscope and remove the lamphouse.) Remove the lamphouse cover by loosening the lamphouse cover clamp screw using a coin. Press down the lamp clamp lever, remove the old lamp, and insert a new lamp to the socket to the limit. (Do not hold the lamp by the bare hands. Use gloves.) Slowly return the lamp clamp lever to its original position. Take care not to tilt the lamp at this time. Securely close the lamphouse cover and tighten the clamp screw. Return the lamphouse to the microscope. Make sure that the plug on the lamphouse fits securely into the socket on the lamphouse mount. (For episcopic illumination) Lamphouse clamp screw Lamp clamp lever Figure-56 Lamphouse Lamphouse cover clamp screw 41

56 4 Assembly 4.5 Attaching the stage, the glass plate, and the wafer holder The stage weighs about 15 kg. CAUTION Use caution not to drop it or get your hands and fingers caught When using glass plate (when performing diascopic microscopy) Set the glass plate on the stage when performing diascopic microscopy or when observing the sample such as the liquid crystal panel. Don't remove the stroke limit pins from the stage. (The longitudinal stroke of the stage becomes 270 mm.) If the stage is moved a large distance with the stroke limit pins removed, the interference occurs between the stage and the diascopic illumination condenser resulting in a malfunction of the microscope. Use the screw holes specified by the arrows in the figure below when fixing the stage on to the substage of the microscope base. Ball spline Side fixing metal Don't remove the stroke limit pins. (longitudinal stroke: 270 mm) Screw holes to fix the stage (for diascopic microscopy) Front fixing metal Figure-57 Screw holes to fix the stage (when performing diascopic microscopy) Move the condenser focus lever to the left and lower the condenser. Lower the substage to the limit using the coarse and fine focus knobs. Remove the four Allen screws from the substage. Use a 5-mm Allen wrench. Mount the stage on the substage and secure it using the four screws removed in step 3. Use the screw holes shown on the above figure. 42

57 4 Assembly Use a 5-mm Allen wrench. Mount the stage carefully. Make sure you do not hit the bottom of the stage with the top of the condenser. When you hold the stage, do not touch the ball spline. Doing so may cause rust. When you hold the stage, do not hold the fine movement knobs or the stage coarse movement lever. Doing so may damage those parts. Remove the two fixing metals that secure the stage plate. Use a 4-mm Allen wrench. The fixing metals are secured using four Allen screws. Attach the glass plate. Gently place the glass plate into the square hole on the upper surface of stage so that the fixing metal is placed on the left and the large chamfer is front right, viewing from you. Tighten the clamp screw on the left of the stage and secure the glass plate. (If you tighten the screw too strongly, the glass plate tilts.) Back Fixing metal Large chamfer Observer Figure-58 Glass plate When using wafer holder Set the wafer holder on the stage when observing the sample such as the 300mm wafer. Note that when the wafer holder is set on the stage, you cannot perform diascopic microscopy. The longitudinal stroke of the stage must be set to 304 mm by removing the stroke limit pins. Use the screw holes specified by the arrows in the figure below when fixing the stage on to the substage of the microscope base. 43

58 4 Assembly Ball spline Screw holes to fix the stage (for the semiconductor wafer) Side fixing metal Stroke limit pins (Remove two pins when not performing diascopic microscopy) Front fixing metal Figure-59 Screw holes to fix the stage (when not performing diascopic microscopy) Move the condenser focus lever to the left and lower the condenser. Lower the substage to the limit using the coarse and fine focus knobs. Remove the four Allen screws from the substage. Use a 5-mm Allen wrench. Mount the stage on the substage and secure it using the four screws removed in step 3. Use the screw holes shown on the above figure. Use a 5-mm Allen wrench. Mount the stage carefully. Make sure you do not hit the bottom of the stage with the top of the condenser. When you hold the stage, do not touch the ball spline. Doing so may cause rust. When you hold the stage, do not hold the fine movement knobs or the stage coarse movement lever. Doing so may damage those parts. While the condenser focus lever is at the left (the condenser is lowered), tighten the condenser clamp screw to secure the condenser (L300D only). If you move the stage while the condenser is up, the stage and the condenser interfere each other, causing damage. Secure the condenser in the lower position. Condenser clamp screw Condenser focus lever Figure-60 Fixing the condenser 44

59 4 Assembly Remove the two stroke limit pins using a flat-head screwdriver. Remove the two fixing metals that secure the stage plate. Use a 4-mm Allen wrench. The fixing metals are secured using four Allen screws. Attach the 300-mm wafer holder. Gently place the wafer holder into the square hole on the upper surface of stage so that you can read the erect images of the letters on the nameplate. Tighten the clamp screw on the left of the stage and secure the wafer holder. (If you tighten the screw too strongly, the wafer holder tilts.) 4.6 Attaching the eyepiece tube Fully loosen the eyepiece tube fixing screw with the Allen wrench. Fit the eyepiece tube on to the mount on the top of the microscope arm and tighten the eyepiece tube clamp screw When removing the eyepiece tube Grasp the eyepiece tube when loosening the eyepiece tube clamp screw since the eyepiece tube may fall out suddenly. 45

60 4 Assembly 4.7 Attaching the objectives Lower the stage to the limit. Screw in the objectives to the nosepiece so that their magnification becomes higher in the order of the nosepiece addresses of 1 to 6. The objectives of 25 mm and 32 mm screws can be attached to the nosepiece. Note that the 25 mm objectives need objective mount adapters to change their screws to 32 mm When removing the objectives To avoid breaking the objectives and the sample, first lower the stage to the limit and remove the sample on the stage. Then remove the objective using both hands so that the objective will not fall out suddenly When the objectives not set correctly on the optical path when they are switched When the objectives not set correctly on the optical path when they are switched, turn the revolving nosepiece several times. After these several turns, the objectives will be set correctly on the optical path. This trouble may happen when there are only a few objectives on the nosepiece, and all the objectives are set on one side of the nosepiece Centering the objectives Nosepiece addresses 4, 5, and 6 have the feature to center the objectives. By using this feature, you can avoid the viewfield misalignment that might occur when switching objectives of high magnification. (See 3.6 Centering the objective.) 4.8 Attaching the eyepieces Attach eyepieces with the same magnifications for the left and the right eyes. There is a positioning pin on the eyepiece sleeve. Insert the eyepiece so that its positioning groove matches the pin. 46

61 4 Assembly 4.9 Installing the filter block (for fluorescent illumination only) CAUTION Turn off the microscope (flip the switch to the O side) when installing or replacing the filter block. If you replace the filter block while the episcopic illumination is turned on, the strong light may hurt your eyes Remove the dark-field/bright-field/fluorescent selection lever. Remove the lid on the right of the arm. Loosen the knob until it is removed together with the lid. Mount the dark-field/bright-field/fluorescent selection lever and draw it out to near side. Insert the filter block along the block installation guide. Insert the block until you feel a click. You cannot remove the two illumination blocks at the back of the guide. Remove the dark-field/bright-field/fluorescent selection lever again and retain the lid at its original position. Mount the dark-field/bright-field/fluorescent selection lever. Dark-field/brightfield/fluorescent selection lever Knob State at step 3. Block installation guide Figure-61 Installing the filter block (fluorescent illumination) 47

62 4 Assembly 4.10 Attaching fiber adapter Attaching the fiber adapter instead of the episcopic lamphouse will enable the user to use the illuminator with the fiber luminous section. Fiber clamp screw Insert the fiber. Lamphouse clamp screw Fiber adapter Figure-62 Fiber adapter To avoid burns, attach the fiber adapter when the lamphouse is fully cooled (at least 30 minutes after it is turned off) Loosen the lamphouse clamp screw to remove the episcopic lamphouse. Insert the fiber adapter instead and fix it by the same clamp screw. Insert the fiber to the adapter to the limit and fix it by the fiber clamp screw Attaching breath shielding plate There are three screw holes for mounting the breath shielding plate under the front bottom side of the arm near the nosepiece. Screw on the breath shielding plate to the microscope by screwing in the screws on the breath shielding plate. The excessive loading on the transparent plastic plate such as to bend the plate may break the plate. Be careful when handling it. Screw holes for the breath shielding plate Figure-63 Breath shielding plate installation positions 48