SEMI A1/A1.1 Horizontal Communication

Transcription

1 SEMI A1/A1.1 Horizontal Communication - An Advanced Interface for Automated manufacturing - As of Jan. 21, 2019 Visit Terry Asakawa Co-chair, Japan Chapter of Global Automation Technology Technical Committee /SEMI 1

2 Intended Application Area of SEMI A1 Areas which have the following characteristics Flow Shop manufacturing line Discrete WIP Integration of with Production Control capability SEMI Coverage - SEMI A1 GEM300 Application GEM300/300A / EDA Controller Topology Plant ERP ERP ERP Production Management Production Management YMS EES MES MCS Production Control AMHS S A S A S A S A S A S A S A S A S A S A S: Sensor, A: Actuator Complexity Low High Layout Flow Shop Job Shop Product Examples Oil Steel Automobile Consumer Electronics Biomedical Battery Photovoltaic PCB LCD Semiconductor Backend Frontend Type of WIP Fluid Continuum Discrete 2

3 SEMI E84 for Job Shop vs. SEMI A1 for Flow Shop Job Shop line Complicated WIP routing WIP transfer by independent AMHS for random access to any equipment SEMI E84 WIP Handoff only, no WIP Data transfer No General Data (GD) communication between equipment All control is taken by the host; Settings, Execution, and Log Fab System (Host) Flow Shop line Simple WIP flow WIP transfer between adjacent equipment including Branch and Merge SEMI A1 WIP and its Data at a time General Data (GD) communication between adjacent equipment Less Dependency to the Host; Settings and Log Fab System (Host) WIP GD GD GD WIP WIP WIP WIP WIP Data Data Data WIP AMHS WIP Transfer of General Data and WIP with its Data (Material Data) SEMI E84 PIO Transfer of WIP without its Data 3

4 Abstract of 4

5 Motivation for Enhance Inter-equipment Communication for Flow Shop Manufacturing Management Set, Trace, and Log by the Host Autonomous Process Execution by Production Control Object Oriented Material and Material Data Transfer Industry Network free PLC conformance 5

6 Concept of Host Management by the Host setting, watch, log Material Data creation, trace, log Information aggregation to the host Preset of Recipe, Route, etc. Start Event VC Exception Handling Completion Event Log (for analysis) Inter Communication Autonomous coordination along with the line Reduction of Host load/cost Inter- Collaboration Material Data + Material HC Handoff HC Handoff Inter- Collaboration Material Data + Material Simultaneous handoff of Material and Material Data Instance ID, Product ID, Log Material require equipment to process according to the Material Data Object Oriented Autonomous Execution by Refer Material Data and follow to the preset recipes Reduction of load and cost of the host VC: Vertical Communication HC: Horizontal Communication Standardized communication specification Direct use of TCP/IP Memory Block transfer for PLC conformance Connectivity, quick launch 6

7 Three communications Host and communication and communication via the adjacent Simultaneous handoff of Material and its Material Data Setting & Log by the Host Host General Data Autonomous Process Execution and Management by Chain General Data General Data General Data Material Data Material Data Material Data Material Material Material Object Oriented Material and Material Data Transfer throughout Chain 7

8 Pizza Factory Analogy of Usage Host Manufacturing Management: I am the host. I preset all work orders to my workers. I start material and take all working log. GD Handshake MD Handshake General Data: Work Order Setting and Log by the Host Work Order: Work Order: If Type A comes, I make If Type A comes, I put GD Handshake it t=5mm If Type B comes, I make it t=4mm GD Handshake cheese and tomatoes If Type B comes, I put four different cheeses GD Handshake E1 General Data: E2 General Data: E3 Hey, getting thick! I m getting sick Ok, I adjust! Ok, I halt. GD Handshake MD Handshake GD Handshake MD Handshake Work Order: If Type A comes, I bake it for 3 minutes If Type B comes, I bake it for 2 minutes GD Handshake MD Handshake Material Data: My name is #132 I am going to be Pizza Type A 13:20.15 Started Material Data: My name is #132 I am going to be Pizza Type A 13:20.15 Started 13: in. Material Data: My name is #132 I am going to be Pizza Type A 13:20.15 Started 13: in. 13:21.30 Cheese and tomatoes are General Data: Autonomous Process Execution and Management by Chain Material Data: Object Oriented Material and Material Data Transfer throughout Chain Material Data: My name is #132 I am going to be Pizza Type A 13:20.15 Started 13: in. 13:21.30 Cheese and tomatoes are 13:

9 General Data Communication Direct Inter- Communication Host Autonomous Process Execution and Management by Chain General Data General Data General Data Time Broadcast Response Specify equipment Adjacent Full Duplex Interleave Full Duplex, Broadcasting, Thread Management, Interleave Management 9

10 Material and Material Data Simultaneous Handoff of Material and Material Data Host Material Data Material Material Data Material Data Material Data Material Material Material Object Oriented Material and Material Data Transfer throughout Chain Object Oriented Material shows its characteristics by Material Data refers Material Data and executes predefined operation 10

11 Typical Example of Material Data (MD) Material Data is an identification tag of the WIP Consists of the following three sections Instance ID Identifier of the individual material Class ID Identifier of the product class, the material belongs to Log Result record at each equipment Applied parameters or measured results (value or classification) To be used as process log May also be used for notifications for process/route changes to the equipment after Field Mnemonic Definition Usage Instance ID Material ID Identifier of this individual material To be used to identify this individual material Class ID Product ID Identifier of Product this material to be To be used to select recipe or route Version ID Identifier of Version of the product May be used for modification of recipe or route Log Result E0 Result record at equipment 0 Control of process or branch in the equipment after Result E1 Result record at equipment 1 Result E2 Result record at equipment 2.. Result En Result record at equipment n 11

12 Communication Channels Information Full duplex data channel For General Data By Data Handshake Information 1.. n n tracks of half duplex transportation channels For Material and Material Data By Material Handshake 12

13 Three Types Uni-Direction Alternate-Direction Bi-Direction Types Multiple s per Uni-Direction A B Alternate-Direction A B Bi-Direction A B Single set S R A(S/R) A(S/R) X(S+R) X(S+R) Multiple set S R : : S R R S : : R S A(S/R) A(S/R) : : A(S/R) A(S/R) X(S+R) X(S+R) : : X(S+R) X(S+R) S: Send Port R: Receive Port A: Alternate Port X: Exchange Port 13

14 Topology Simple flow Simple thread with simply lined equipment Branch and Merge Branch into multiple lines Merge multiple lines into one line Bi directional flow Forward and Reverse between equipment Loop Loop back and Merge 14

15 Handoff Function Compatible with handoff mechanisms which require multiple handoff steps Handoff Step function Operator assistance and recovery Pause Recovery functions 15

16 Definition Overview of SEMI A1/1.1 SEMI A1 defines operation of Horizontal Communication between adjacent equipment Material Data (MD) Handshake which performs handoff of Material and its Data simultaneously General Data (GD) Handshake which performs generic communication Potential use for Vertical Communication Simple Memory Image Exchange type of messaging of the GD Handshake may have better conformance with equipment which is controlled by PLC SEMI A1.1 defines the messaging for Media interface for both MD and GD Handshakes Memory Image Exchange messaging scheme for better conformance with low cost control components such as PLC Direct mapping on TCP/IP for higher compatibility among various control components 16

17 Connectivity and Interoperability Interoperable functionality for production line () Messaging between the host and equipment General Data Handshake extension Messaging between adjacent equipment General Data Handshake Material and Data handoff Material Data Handshake Communication Protocol for SEMI A1 (SEMI A1.1) Direct mapping on TCP/IP Connectivity between different Fieldbus based PLCs (Intra equipment communication is done by own Fieldbus) PLC conformance (SEMI A1/1.1) Messaging to exchange Memory Mapped Data Applications System SEMI A1 SEMI A1.1 Fab System (Host) TCP/IP VC VC VC VC Applications Applications Applications Applications Fieldbus A SEMI A1 SEMI A1.1 Fieldbus B SEMI A1 SEMI A1.1 Fieldbus A SEMI A1 SEMI A1.1 Fieldbus B SEMI A1 HC SEMI A1.1 TCP/IP TCP/IP TCP/IP TCP/IP 17

18 Communication Block and Data Block A Communication Block CB RB WB Transfer Memory Image upon any change (And, predefined interval when no change) TCP/IP / Ethernet B Communication Block RB WB CB CB 0 RB 0 WB 0 RB 0 WB 0 CB 0 CB n RB 0 WB n RB n WB 0 CB n 18

19 Thank you! 19