This is the automated approach feature. We will discuss this later. Make sure you zero the transducer before you start testing.

Transcription

1 HYSITRON STANDARD OPERATING PROCEDURE 1. Log onto the Hysitron Laptop. Connect all appropriate cables. Open the Hysitron Software by clicking on the icon on the desktop. 2. If you are planning on opening Hysitron data without running any tests, click analysis only. If you intend to run tests, do nothing and let the time expire.

2 3. In the SEM, center both beams on the tip of the Hysitron indenter. Do not worry about the sample for now. Raise the stage Z height in the FEI software until the tip is at the eucentric height and centered in both the SEM and the FIB. Shown below is an example image in the SEM where the tip is centered and at the Eutectic Height. 4. Stage Control. The Hysitron sample stage moved up/down, left/right, and in/out. The Hysitron transducer the indentation tip only moves during the indentation process. In order to align a feature on your sample with the Hysitron tip, you will have to move the sample stage. This is done in the PI 85 State Control Tab, shown below: This red button toggles the stage motor controls on and off. If the Hysitron senses movement with exceeds the motor control, the emergency stop will trigger and you will have to press this button to unlock the emergency stop. Make sure you zero the transducer before you start testing. This is the automated approach feature. We will discuss this later.

3 5. The stage controls move the sample as indicated in the graphic below. Sample moves ( Left ) Sample moves away from tip ( In ) Sample moves ( Right ) Sample moves towards tip ( Out ) Choose a velocity and distance appropriate to how far you need to travel. Keep this increment sufficiently small so that you do not crash your sample into the Hysitron tip! Sample moves ( Down ) Sample moves ( Up ) Approach to within 30um of the sample. The image on the left is the Hysitron setup as viewed from the SEM; the image on the right is the setup as viewed from the FIB. Up Left Out Down In Right In Left Up Down Right Out *Make sure to leave plenty of distance between the sample and the Hysitron tip MINIMUM 20um : the calibrations and air indents must be made out of contact.

4 6. Calibrations Open the Values.txt file on the desktop Shown below on the right hand side. Go to the calibrations tab in the Triboscan software. Make sure these values match! Click Calibrate once you have entered the appropriate values. After you click Calibrate, you will be taken to the screen below. Click Tube PID Click tune PID

5 This next screen will popup. Complete this screen as directed. Set Integral to 0.2 Set Q value to on and enter a value between 0.2 and 0.6. Typically Q=0.3 is appropriate Toggle Step response to off, and then back to on After you toggle the step response, the graph will be populated as shown below. Some noise in the signal is acceptable. If this noise is very high, increase the Q value by increments of 0.1 and toggle the step response again. Click Save when ready to move on.

6 After you click save you will be prompted to select a name and location. Simply save it as it is by clicking save. When asked if you want to override the original file, click yes, and then close. Now, back on the calibrations page. Double check the items described in the graphic below. When ready, click Cal Air Indent. When asked if the Load Function is setup correctly, click yes. Check the following: Displacement Controlled Set Integral to 0.2 Out of Contact Drift Correction Set Q to 0.3 Click Cal Air Indent when ready

7 The Calibration Air Indent should look something like what is represented below: When the indent is finished, you will be prompted with Do you want to keep this as your calibration indent data? Press yes if the data seems reasonable i.e. it somewhat resembles the example below.

8 7. Air Indent Next, program in the load function that is going to be appropriate for testing your sample. The displacement and loading/unloading rates varies based on the application. A typical load function is shown below. When satisfied that the load function is correct, click Air Indent. Watch the Hysitron tip move in the SEM to verify that it functions normally and travels through the programmed displacement schedule. The air indent should resemble what is shown below:

9 8. Sample Testing Use the stage controls to bring the Hysitron tip close to the sample. Be sure to use a velocity and distance increment that is sufficiently small so that you do not crash your sample into the Hysitron indenter tip. When you are within 1um of the sample, use the automated approach feature to find the surface of your sample: After contact is made, go to the Load Function Tab. Check that the load function is correct; Double check in the SEM and FIB to make sure the Hysitron is aligned where you intend to test. Click Perform Indent when ready.

10 8. How to Export Data In order to export data, go to the Analysis tab File Open Select file Below is an example of some data from a micro cantilever test.

11 You may export one, or multiple, text files at a time. Go to File and Click Export Multiple Text Files. When prompted Do you want the load segment separated style printout?, click yes. Select the file you would like to open, then click Add. Repeat as needed for all files you want to export. When you have completed this, click Ok.

12 If you took video during your test, you can export those videos in side by side format from the Frame Analysis tab. Go to File and click Save Side by Side Movie. These files may be large, and this saving process could take 5 20min.