Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements

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1 558 Journal of Electrcal Engneerng & Technology Vol. 7, No., pp. 558~563, 1 Experments of a Novel Magnetc Levtaton Stage for Wde Area Movements Jeong-Woo Jeon, MtcaCaraan*, Hyeon-Seok Oh* and Sungshn Km** Abstract In ths paper, a novel planar type magnetc levtaton system wthout other assstant devces s proposed and t can move wth 6 degree of freedom (X, Y, Z, θ X, θ Y, θ Z ) n wafer sze as well as n nano scale postonng.the mover s composed wth -D Halbach permanent magnet array and the stator s composed wth 1 x 1 col arrays.it was composed n laboratory and tested wth short stroke ( [mm]) and long stroke (16 [mm])movements. The errors of short movement test s [X, Y, Z, θ X, θ Y, θ Z ] [±nm, ±nm, ±5nm, ±3urad, ±urad, ±1urad]The errors of long stroke movement test s [X, Y, Z, θ X, θ Y, θ Z ] [±nm, ±nm, ±5nm, ±1.5urad, ±urad, ±.5urad]. Keywords: Magnetc levtaton, Mag-Lev, Magnetc levtaton stage, Nano scale postonng 1. Introducton Recently, the varous types of magnetc levtaton stage are researchng for hgh precson postonng mechansm because an nterestng about manufacturng of more and more small sze n nano technology feld s ncreasng [1-9]. Already, we ntroduced a novel magnetc levtaton stage system whch can move n wafer sze as well as n nano scale postonng but only the possblty of nano scale postonng was shown [8]. Ths novel maglev stage system s composed wth a permanent magnet array (PM array) for a mover part and a col array for a stator part. The mover part can be moved wth 6 degree of freedom(x, Y, Z, θ X, θ Y, θ Z ) wthn an area of the col array by control of magnetc feld of t. The stator part s composed wth 1 x 1 col array for movements of wafer sze. We used three laser nterferometer systems and three capactance sensors for nano scale measurement and a hgh performance control system for control. Some advantages of ths system are as followngs: Smple Structures Fne Postonng wth nano-meter scale as well as Coarse Postonng wth ml-meter scale n one structure Easly Expanson of Workng Area Usable top part of Structure Compatble n Vacuum.1 Conceptual desgn The basc concept of magnetc levtaton motor s shown n Fg. 1. It s composed wth permanent magnet array (PM array) and col module. The permanent magnet array s composed wth several knd of magnet. Km el al. researched -D structure of Halbach permanent magnet array [1]. The shape of magnetc feld whch s the bottom of the PM array s as shown n Fg. (a). The col array s composed wth twelve rectangular shaped cols. It has two ptches. The magnetc feld of the col array can be control by nput current as shown n Fg. (b). These magnetc felds are the magnetc strength of N pole and S pole and these are estmated. The repulsve forces are generated between the same magnet poles of PM array and current. The Proposed Magnetc Levtaton Stage for Wde Area Movement Correspondng Author: Korea Electrotechnology Research Insttute, Korea. (jwjeon@ker.re.kr) * Korea Electrotechnology Research Insttute, Korea. ** Dept. of Electrcal Engneerng, Busan Natonal Unversty, Korea. Receved: August 9, 11; Accepted: March 13, 1 Fg. 1. The conceptual desgn of magnetc levtaton module

Jeong-Woo Jeon, MtcaCaraan, Hyeon-Seok Oh and Sungshn Km 559 dstrbuton of col array for reason of Lorentz Force.

The formulas of these forces for two ptches of the magnetc levtaton motor are as the followng [1]: F 1 π H V l q M NmGe F = μ η V d (1) π π ωl Γ Δ l l G = (1 e )(1 e ) () π (a) Magnet Array (b) Col

37e +6 [Turn/mm ], Nm s Number of actve magnet ptch and the value s, ω s PM array wdth and the value s.3 [m], l s col array ptch and the value s.3 [m], Γ s PM array thckness and the value s.

2 Jeong-Woo Jeon, MtcaCaraan, Hyeon-Seok Oh and Sungshn Km 559 dstrbuton of col array for reason of Lorentz Force. These forces are composed wth the vertcal force (F V ) and the horzontal force (F H ) n Fg. 1. The formulas of these forces for two ptches of the magnetc levtaton motor are as the followng [1]: F 1 π H V l q M NmGe F = μ η V d (1) π π ωl Γ Δ l l G = (1 e )(1 e ) () π (a) Magnet Array (b) Col Array Fg.. The estmated magnetc feld of MagLev module Here, μm s Magnet remanence and the value s.8 [T], η s Turn densty and the value s.37e +6 [Turn/mm ], Nm s Number of actve magnet ptch and the value s, ω s PM array wdth and the value s.3 [m], l s col array ptch and the value s.3 [m], Γ s PM array thckness and the value s.75 [m], Δs col array thckness and the value s.5 [m], V s Nomnal gap and the value s 1 [um]. The horzontal and vertcal forces of one ptch of our magnetc levtaton motor are as the followng: FH q.19 F = V d (3) If the values of nput current ( q, d ) are [A] for each, we obtan that the values of levtaton force (F V ) and tracton force (F H ) are 8.38 [N].The DQ current values are transformed to 3 phase currents as the followng equaton: cosα snα a d π π b cos( α ) sn( α ) = 3 3 q c π π cos( α ) sn( α ) 3 3 π where α = p, l s ptch (.3m), p s the current l poston on the sutable horzontal axs.. The prncple structure We proposed the prncple structure of the novel magnetc levtaton stage as shown n Fg. 3 [6]. It s composed of 16 col arrays such as checkered matrx. The PM Array s located on the top of these col arrays. The area of the PM Array s smlar wth these col arrays. Two knds of magnetc force between the col array and the PM array by each col array are generated. Let the central poston of col matrx s [x, y, z ] = [,, ]. The net force of Z drecton on the central poston s the sum of () Fg. 3. The proposal col array ( x ) for novel magnetc levtaton stage F Z1, F Z,, F Z16. Ths force s the levtaton force of the stage. The net force of X drecton on the central poston s the sum of F X1, F X3, F X6, F X8, F X9, F X11, F X1, F X16. The net force of Y drecton on the central poston s the sum of F Y, F Y, F Y5, F Y7, F Y1, F Y1, F Y13, F Y15. These forces are the tracton force of the stage. The rotaton torque (Yaw) of Z axs on the central poston also can be generated wth composed X and Y drecton forces. The rotaton torques (roll and Ptch) of X and Y axs on the central poston also can be generated wth composed Z drecton force [6].The formulas of these forces and torques are as followngs: (5) (6) (7) (8)

It s composed of the stator part and the mover part. The stator part s composed of 1(=1 x 1) col module arrays (I-1) Fg.

3 56 Expermentsofa Novel Magnetc Levtaton Stage for Wde Area Movements (9) (1) Here, x n = 1,,,16 and y m = 1,,,16 are x and y poston of center of each col modules. m s mass of mover and g s acceleraton due to gravty..3 The real structure We proposed the real structure of the novel magnetc levtaton stage as shown n Fg. and Fg. 5. It s composed of the stator part and the mover part. The stator part s composed of 1(=1 x 1) col module arrays (I-1) Fg.. The real structure of the magnetc levtaton stage whch are checkered matrx structure and the stator frame (I-). The mover part s composed of the PM array (II-1), the mover frame (II-), two plane mrrors (II-3) for the laser nterferometer system, and three capactance sensors (II-). The area of PM array s same wth x col module arrays. We used three laser nterferometer systems (III) wth composed of the stator part and the mover part. The stator part s composed of 1(=1 x 1) col module arrays (I-1) whch are checkered matrx structure and the stator frame (I-). The mover part s composed of the PM array (II-1), the mover frame (II-), two plane mrrors (II- 3) for the laser nterferometer system, and three capactance sensors (II-). The area of PM array s same wth x col module arrays..15nm of the resoluton from Aglent Company to measure X, Y and Yaw motons and three capactance sensors wth 7.8nm from ADE Company of the resoluton to measure Z, Ptch, and Roll motons. The weght of the mover s about 1 [kg].. The control block dagram The control block dagram of the proposed novel magnetc levtaton stage s shown n Fg. 6. For understandngs, we can consder a structure made of an array of 16 col modules (xmatrxes) and an nfnte PM array. The sze of the x colmodule array s same wth the sze of PM array n the actual structure.thus, col modules are completely faced by the magnet array, for anyposton of the mover.the Controller block takes the reference poston vector (P r ) and the current poston vector (P), apply the control algorthm provdng the values of DQ currents (I D [16] and I Q [16]) for all the col modules. A poston vector contans mover s coordnates n sx degree of freedom (X, Y, Z, θ X, θ Y, θ Z ). The control algorthm s run for all 16 col modules resultng 16 values of I D and 16 values of I Q. Ths block s completely mplemented n software.the Current generaton block makes the transformaton from DQ currents (I D [16], I Q [16]) to 3 phase currents (I A [16], I B [16], I C [16]) by software and outputs the values by means of lnear drvers.the Electromagnetc block contans the nteracton between the col modules and PM array whch yelds the vertcal (F Z [16]) and lateral (F X [8] or F Y [8]) forces.the Mechancal block s the mover whose poston s changed by the forces. The mover s poston s measured n the Poston measurement block resultng P. All the Plant P I r D, I Q Current Controller generaton P I A, I B, I C Electromagn etc block Poston measurement F x(y), F z Mechancal block poston Fg. 5. The expermental system Fg. 6. The Control Block Dagram

4 Jeong-Woo Jeon, MtcaCaraan, Hyeon-Seok Oh and Sungshn Km 561 other blocks except the Controller can be affected by specfc s.the basc control algorthm s Lead PI controlleras the followng: 5 35 Dsplacement of X axs s + As+ C H() s = K s + B s.5 The structure of control system (11) X [um] The structure of control system s shown n Fg. 7. The control system s composed wth hgher level control part and lower level control part. The hgher level control part whch s the Master DSP board manages measurement of postons of mover wth laser nterferometer and capactor probe and calculaton of 16 local poston of the mover.these poston values are transferred to lower level control part. The lower level control part whch s seven numbers of Slave DSP board manages executons of control algorthm and command to the Lnear Drver Module. Error of X [um] (a) The short step and settle moton The Error of X axs The Error of Y axs Error of Y [um] The Error of Z axs Error of Z [um] Fg. 7. the structure of control system 3. The Results of Experment The results of short dstance ( [mm]) step and settle moton are shown n Fg. 8. Here, the nomnal levtaton gap s 1 [um] and the nomnal speed s 1 [mm/sec]. The results of steady errors of each axs after settle are [X, Y, Z, Rx, Ry, Rz] [±nm, ±nm, ±5nm, ±3urad, ±urad, ±1urad]. It shows that nano scale postonng can be done. The results of long dstance (16 [mm]) step and settle moton are shown n Fg. 9. Here, the nomnal levtaton gap s [um] and the nomnal speed s [mm/sec]. The results of steady errors of each axs after settle are [X, Y, Z, Rx, Ry, Rz] [±nm, ±nm, ±5nm, ±1.5urad, ±urad, ±.5urad]. It shows that wafer sze movement as well as nano scale postonng can be done. The results of crcle moton wth 6 [mm] dameter are shown n Fg. 1. Here, the nomnal levtaton gap s [um] and the nomnal speed s 1 [mm/sec]. The results of trackng error of each axs are [X, Y, Z, Rx, Ry, Error of Rx [urad] Error of Ry [urad] - The Error of Rotaton of X axs The Error of Rotaton of Y axs Error of Rz [urad] - The Error of Rotaton of Z axs (b) The errors of each axs Fg. 8. the results of [mm] step and settle moton

5 56 Expermentsofa Novel Magnetc Levtaton Stage for Wde Area Movements 16 x 1 Dsplacement of Y axs 3 Dsplacement of X and Y axs Y [um] 8 6 Y [um] (a) The long step and settle moton X [um] (a) The crcle moton The Error of X axs The Error of X axs Error of X [um] Error of X [um] Error of Y [um] The Error of Y axs Error of Y [um] 1-1 The Error of Y axs Error of Z [um] The Error of Z axs Error of Z [um] - The Error of Z axs Error of Rx [urad] 1-1 The Error of Rotaton of X axs Error of Rx [urad] The Error of Rotaton of X axs Error of Ry [urad] 1-1 The Error of Rotaton of Y axs Error of Ry [urad] The Error of Rotaton of Y axs Error of Rz [urad] The Error of Rotaton of Z axs (b) The errors of each axs Fg. 9. the results of 16mm step and settle moton Error of Rz [urad] 1-1 The Error of Rotaton of Z axs (b) The errors of each axs Fg. 1. the results of crcle moton test wth 6mm dameter

Jeong-Woo Jeon, MtcaCaraan, Hyeon-Seok Oh and Sungshn Km 563 Rz] [±1um, ±1um, ±3um, ±urad, ±urad, ±5urad].

. Conclusons Ths paper shows some expermental results of proposednovel magnetc levtaton stage system wthout other assstant devces.

The results of short ( [mm]) and long dstance (16 [mm]) moton test shows that the proposed magnetc levtaton stage system can be moved n wafer sze as well as n nono scale postonng.

ths novel magnetc levtaton stage could be appled to nano-scale postonng stage for semconductor. References [1] J. Km, D. L. Trumper, J. H.

6 Jeong-Woo Jeon, MtcaCaraan, Hyeon-Seok Oh and Sungshn Km 563 Rz] [±1um, ±1um, ±3um, ±urad, ±urad, ±5urad]. It shows that the good synchronous movement of X and Y drectons as well as control of other axs can be done.. Conclusons Ths paper shows some expermental results of proposednovel magnetc levtaton stage system wthout other assstant devces. Ths system has 1 x 1 col arrays whch are checkered matrx structure and PM arrays whch are correspondence wth x col arrays. The results of short ( [mm]) and long dstance (16 [mm]) moton test shows that the proposed magnetc levtaton stage system can be moved n wafer sze as well as n nono scale postonng. Also, the results of crcle moton wth 6 [mm] dameter shows that ths proposed system can be moved smultaneously n X and Y drectons.ths novel magnetc levtaton stage could be appled to nano-scale postonng stage for semconductor. References [1] J. Km, D. L. Trumper, J. H. Lang, Modelng and Vector Control of Planar MagnetcLevtator, IEEE Trans. On Industry Applcatons, Vol. 3, No. 6, Nov./Dec., 1998, pp. pp [] X. S. Shan, S. K. Kuo, J. Zhang, and C. H. Menq, Ultra Precson Moton Control of a Multple Degrees of Freedom Magnetc Suspenson Stage, IEEE/ASME Trans. on Mechatroncs, Vol. 7, No. 1, March, pp [3] M.Y.Chen, M.J.Wang, and L.C.Fu, A Novel dual axs repulsve maglev gudng system wth permanent magnet: modelng and controller desgn, IEEE/ASME Trans. on Mechatroncs, Vol. 8, No.1, 3, pp [] W.J. Km, N.Bhat and T. Hu, Integrated multdmensonal postoner for precson manufacturng, Proc. Instn Mech. Engrs Vol. 18 Part B,, pp.31-. [5] M. Maggore and R.Becerrl, Modelng and Control Desgn for a Magnetc Levtaton System, Internatonal Journal of Control, vol.77,, no.1, pp [6] J.W.Jeon, M.Caraan, Y.J.Km, H.S.Oh, S. S. Km, Development of Magnetc Levtated Stage for Wde Area Movements, Proceedng of Internatonal Conference on Electrcal Machnes and Systems, 7, pp [7] M. Caraan, J. W. Jeon, H. S. Oh, Modular control system for a magnetc levtated stage, Automaton, Qualty and Testng, Robotcs 8, Vol., 8, pp Jeong-WooJeon He receved B.S. degree and M.S. degree n electrcal engneerng from YoungnamUnversty, Korea n 199 and Hs research nterests are MagLev Stage and Hgh precson control. MtcaCaraan He receved a dplomate engneer n system control and automaton from Techncal Unversty Poltehnca Bucharest, Romana n Hs research nterests are desgn and control of MagLev Stage and pattern generaton for e-beam lthography. Hyeon-SeokOh He receved B.S.and M.S.degree n Mechancal engneerng from BusanUnversty, Korea n 198 and 198 respectvely, and the Ph.D. degree n Mechancal engneerng from TU Braunschweg, German n Hs research nterests are mcro and nano structure manufacturng machne usng MagLev technology. SungshnKm He receved B.S. and M.S. degrees n Electrcal engneerng from Yonse Unversty, Korea n 198 and 1986 respectvely, and the Ph.D. degree n Electrcal engneerng from Georga Insttute of Technology, USA n He s currently a professor n Department of Electrcal Engneerng, Pusan Natonal Unversty. Hs research nterests nclude fuzzy systems, data mnng, robotcs, and ntellgent systems.

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