Industrial Instruments General Catalogue. Industrial Instruments General Catalogue

Transcription

1 Industrial Instruments General Catalogue Industrial Instruments General Catalogue

2 INDEX Stereo Microscopes 3 Parallel Optics Type SMZ25 / SMZ18 / SMZ1270 / SMZ1270i / SMZ800N Greenough Type SMZ745 / SMZ745T / SMZ445 / SMZ460 / SMZ-2 Industrial Microscopes Upright Microscopes LVN / LVN / LV100ND / LV100ND / L300N / L300ND / LN / LND Inverted Metallurgical Microscopes M / M100N Polarizing Microscopes LV100NPOL / Ci POL Multi-purpose Zoom Microscopes Z100 / Z100M Digital Cameras for Microscopes Microscope Camera Microscope Camera DS-Ri2 DS-Fi3 Microscope Camera Control Unit DS-L4 Digital Microscopes / Super High Vertical Resolution Non-Contact 3D Surface Profilers Digital Microscopes ShuttlePix P-400Rv Objective Lenses Objective Lenses CFI60-2 / CFI60 / CF&IC 3D Surface Profilers W-D500 Series / W-S500 Series Near-infrared Objective Lenses NIR / NIR-C For Incorporation into Microscopes / Wafer Loaders Modular Focusing Units IM-4 / LV-IM / LV-FM / LV-FM Dynamic uto-focus Unit LV-DF CNC Video Measuring Systems CNC Video Measuring Systems NEXIV VM / VMR / VMZ-R / VMR-H Series CNC Confocal Video Measuring Systems NEXIV VMZ-K Series Measuring Microscopes Measuring Microscopes MM- / MM-400 / MM-800 Profile Projectors / Data Processing System Profile Projectors V-12 / V-20 Data Processing Software E-MX utocollimators / DIGIMICRO utocollimators 6-LED / 6D-LED Compact Reflected Microscopes CM Series Wafer Loaders NWL Series Data Processor DP-E1 Metrology Software U-DP DIGIMICRO MF-1001 / MF-501 / MH-15M Optical Flat / Optical Parallel / Standard 300mm Scale Stereo Microscopes SMZ25 25 : ( ) 60mm SMZ745 SMZ745T 7.5 : ( ) 115mm Parallel Optics Type SMZ18 18 : ( ) 60mm Greenough Type 4.4 : (8 35 ) SMZ445 SMZ mm SMZ1270 SMZ1270i 12.7 : ( ) 70mm 4.3 : (7 30 ) SMZ Series The highly cost-effective SMZ series offer outstanding optical performance, flexible system expandibility, and superb operability. Zoom Ratio Zoom Range Total Magnification* 1 (Standard combination* 2 ) W.D.* 3 Camera Zoom Ratio Zoom Range Total Magnification* 1 (Standard combination* 2 ) W.D.* 3 SMZ800N 78mm SMZ-2 5 : 1 8 : (10 80 ) : vailable / : Not available (8 40 ) 77.5mm Camera (SMZ745T only) : vailable / : Not available *1: Depending on combination of Eyepiece and Objective lens. *2: Combination of Eyepiece 10 and Objective lens 10. *3: Objective lens 1 or no uxilliary Objective lens. 2 3

3 Industrial Microscopes ECLIPSE Series Nikon's Industrial Microscopes utilize the CFI60-2 optical systems, highly evaluated for its unique concept of high N combined with long W.D. Upright Microcopes (General model) LVN LVN LVNL* Stand and illumination units are selectable according to observation methods and purpose of use. LVN LV100ND LV100ND Model offers various observation methods with reflected/transmitted illumination. LV100ND Inverted Metallurgical Microscopes M With its unique, solid-box structure, the M offers high stability, durability, and a smaller footprint than conventional models. M100N M100N is compact, inverted microscopes designed for brightfield and simple polarizing observations. Method F DF DIC FL POL 2-eam : vailable / : Not available DI F DF DIC POL FL Ph-C 2-eam Method DI F DF DIC S-POL FL F DF DIC S-POL FL : vailable / : Not available : vailable / : Not available : vailable / : Not available Illuminator Episcopic Episcopic / Diascopic Illuminator Episcopic / Diascopic Episcopic Stage 3 2 Stage (stroke 75 50mm) 6 6 Stage (stroke mm) *See the "LV-N Series" brochure for other compatible stages. 3 2 Stage (stroke 75 50mm) 6 4 Stage (stroke 100mm) *See the "LV-N Series" brochure for other compatible stages. Stage M2-SR Mechanical Stage (stroke 50 50mm) M-SR-N Rectangular 3-plate Stage N (stroke 50 50mm) M-SP-N Plain Stage N TS2-S-SM Mechanical Stage CH (stroke mm) *Please use in combination with M-SP-N Plain stage N. F: rightfield DF: Darkfield DIC: Differential Interference Contrast FL: Flourescence POL: Polarizing 2-eam: Two-eam Interferometry Ph-C: Phase-Contrast *Only F, DIC, and S-POL are available for LVNL F: rightfield DF: Darkfield DIC: Differential Interference Contrast S-POL: Simple Polarizing FL: Flourescence Upright Microcopes (Large-sized stage model) L300N L300ND LN LND Polarizing Microscopes LV100NPOL Ci POL Multi-purpose Zoom Microscopes Z100 Z100M Stage with stroke mm is available. Suitable for ø300mm wafer observation. L300ND Stage with stroke mm is available. Suitable for ømm wafer observation. LND High quality polarizing microscopes with superb optical performance that accommodate various observation needs. LV100NPOL Multizoom Z100 and Z100M combine the advantages of stereoscopic and metallographic microscopes. Z100 Method DI *L300ND only F DF DIC S-POL FL F DF DIC S-POL FL * DI * * Method F DF DIC S-POL FL : vailable / : Not available *LND only : vailable / : Not available : vailable / : Not available : vailable / : Not available DI F POL DI Illuminator Stage L300N : Episcopic L300ND : Episcopic / Diascopic Stage (stroke: mm) LN : Episcopic LND : Episcopic / Diascopic 8 8 Stage (stroke: mm) Illuminator Stage Episcopic/ Diascopic LV100NPOL : High precision rotating stage for polarizing observation Ci POL : Rotating stage with stage clamp Episcopic/ Diascopic 6 6 Stage (stroke mm) for episcopic 6 4 Stage (stroke 100mm) for diascopic F: rightfield DF: Darkfield DIC: Differential Interference Contrast S-POL: Simple Polarizing FL: Flourescence F: rightfield POL: Polarizing DF: Darkfield DIC: Differential Interference Contrast S-POL: Simple Polarizing FL: Flourescence 4 5

4 Digital Cameras for Microscopes Digital Sight Series Digital Microscopes ShuttlePix P-400Rv The Stand-lone Model is capable of high-definition image acquisition without a control unit. Microscope Camera DS-Ri2 Capable of expressing images as is, this microscope digital camera offers high resolution, color reproduction, and frame rate megapixel Color Stand-lone Model Microscope Camera DS-Fi3 Three main features of the previous models, high-resolution, high sensitivity and low noise, and high-speed live display are offered in 1 camera. 5.9 megapixel Color Highresolution Highresolution n all-new, one-of-a-kind digital microscope that can either be portable to accommodate any sample size or docked on a stand to take high-magnification images and perform various measurements. Motorized Focusing Stand + Touch Panel Monitor Through the intuitive operation of touching icons or using the screen stylus, precise image capturing and simple measurement are now possible. One-touch EDF EDF images can be easily acquired by selecting the start and end positions on the sample. Frame Rate 45fps ( ) 30fps ( ) Max Recordable Pixels Handheld Set Simple Stand *See the "Digital Sight series" catalog for other cameras. Microscope camera control unit DS-L4 DS-Fi3 can be optionally connected to theds-l4 tabletstyle control unit, eliminating the need and space requirements of a desktop PC. DS-L4 has a large number of built-in security for network connectivity. Scene Mode Optimal imaging parameters for each sample type and observation method can easily be set through the icons. Variety of Tool Features Enables easy measurements directly on images, with input of lines and comments. These can also be written and saved with the image,and measurement data can also be output. Measurement (two-point distance) Wafer/IC Metal, Ceramic/Plastic Circuit board Flat Panel Display Imaging software NIS-Elements series Image Stitching Stitches together images acquired from multiple fields of view to create one image. EDF (Extended Depth of Focus) Create a single, all-in-focus image from images of differing focus. The lightweight, ergonomic camera head allows for easy handling for all users. Super High Vertical Resolution Non-Contact 3D Surface Profilers This all-in-one set features a battery operated zoom camera head and a compact simple reflection stand, both of which can be taken anywhere to capture high-resolution images. Nikon's proprietary scanning-type optical interference measurement technology achives 1pm height resolution. Nikon offers variety application, lustrous surfaces, such as silicon wafer, glass and metallic deposition surfaces. Height Resolution (algorithm) Step Height Measurement Reproducibility Number of Pixels Height Measurement Time Field of view High Speed Model W-D500 Series s (10µm scan) < 2,015 2,015µm* 1pm 2,046 2, s (10µm scan) * The range can be extended by changing the relay lens or by stitching. High Pixel Resolution Model W-S500 Series σ: 8nm (8µm Step height measurement) 1,022 1, s (10µm scan) < 4,458 4,448µm* W-D500 Series/ W-S500 Series W-S507 Measurement function Position and size comparison functions Drawing functions Polished ceramic surface Metal Etching Surface Lens Glass Glossy paper 6 7

5 Objective Lenses Nikon's CFI60-2/CFI60/CF&IC optical systems are highly evaluated for its unique concept of high N combined with long working distance. These lenses have further evolved to achieve the apex in long working distance, correct chromatic abserration, and optimized lens weight. T Plan Plan (Semi-apochromat) TU Plan Fluor Universal Plan Fluor (Semi-apochromat) TU Plan po Universal Plan po (pochromat) L Plan (chromat) LU Plan po / Universal Plan po (pochromat) LU Plan po D Universal Plan po (pochromat) L Plan CR LCD Substrate Inspection Plan (chromat) *Offers valid while supplies last CF IC Plan Plan (achromat) CF IC Plan po Plan po (pochromat) CF IC Plan ELWD Long Working Distance Plan (chromat) CF IC Plan SLWD Super Long Working Distance Plan (chromat) CF IC Plan TI DIC Plan CF IC Plan DI DIC Plan Near-infrared Objective Lenses CFI60-2 / CFI60 / CF&IC chieves high transmission of 90% or more at visible range and 1,064 nm. Significantly improved machining accuracy at a small size with low power. Suitable for Semiconductor and LCD by laser repair. NIR, * 1 Near-Infrared Plan F: rightfield DF: Darkfield POL: Polarizing S-POL: Simple Polarizing DIC: Differential Interference Contrast UV-FL: UV Flourescence FL: Flourescence Model Magnification N W.D. (mm) F DF POL S-POL DIC UV-FL FL TU Plan Fluor P Polarizing Universal Plan Fluor (Semi-apochromat) TU Plan ELWD Long Working Distance Universal Plan (Semi-apochromat) T Plan SLWD Super Long Working Distance Plan (Semi-apochromat) TU Plan Fluor D Universal Plan Fluor (Semi-apochromat) TU Plan po D Universal Plan po (pochromat) TU Plan D ELWD Long Working Distance Universal plan (Semi-apochromat) Model Magnification N W.D. (mm) * 2 NIR-C, * 1 Near-Infrared Plan (glass thickness correction range mm) * 2 : vailable / : Not available Wave Length (n.m) 1,064/532 1,064/532 1,064/532 1,064/532 *1: Please ask us regarding transmission outside of vision range and 1064nm. *2: W.D. is measured from the object surface with 1.1mm thick cover glass. *3: ecause of a shift in parfocal position when used in conjunction with cover-less objective lens, parfocal distance is corrected by correction rings and washers. *: Set prism position at / : Set prism position at NIR / NIR-C Parfocal Distance (mm) * 3 95 * 3 For Incorporation into Microscopes Modular Focusing Units IM-4, LV-IM/LV-IM, LV-FM/LV-FM Suitable for incorporating into systems, these focusing units enable the mounting of a universal illuminator and a motorized nosepiece. Dynamic uto-focus Unit LV-DF Hybrid uto-focus features a wide focus range and fast tracking ability. wide range of observation methods are supported, including brightfield, darkfield, and DIC. Reflective and transparent samples can both be observed. Compact Reflected Microscopes CM Series Ultra-compact reflected microscopes designed for integration into production lines to observe on monitors. Wafer Loaders Nikon's proprietary technology ensures reliable loading of ultra-thin 100µm wafers. The NWL series achieve highly reliable loading, suitable for inspection of next-generation semiconductors. ømm / ømm / ø125mm 8 9 Type Vertical Stroke Detection System F Light Source Focal Time Camera Mount Tube Lens Magnification Compatible Objectives Illumination Optical System ttachment Surfaces Wafer Diameter Thickness (standard) Thickness (option) Manual 30mm Surface, back side macro inspection IM-4 LV-IM/LV-IM LV-FM/LV-FM Split Projection System/ Contrast Detection System CM-5 Manual / Motorized 30/20mm Near Infrared LED (λ=770nm) within 0.7 sec (Obj. lens: 20, Distance from focal position: µm) rightfield, Darkfield, Polarizing, DIC CM-10/CM-10L um um Manual / Motorized 30/20mm CM-20/CM-20L C-mount (ENG-mount possible with option) 0.5 LV-IM series: CF IC Plan objectives / L series: CFI60-2/ CFI60 Plan objectives Koehler illumination (high-quality telecentric illumination) LV-FM CM-302/CM-30L2 1 NWL Series 4

6 CNC Video Measuring Systems Wide variety of stage strokes and magnifications are available for various customer requirements. Main ody (Type / Stage Stroke) NEXIV Series Main ody (Type /Stage Stroke) Confocal NEXIV Series Simultaneous wide-area height measurements with confocal optics and 2D measurement with 15 brightfield zoom optics. Wide FOV Type VM Model VM-6555 Series VM-4540 Series VM-2520 Series Standard Type VMR / VMZ-R Model VMR: VMR-1515/VMR-10080/VMR VMZ-R: VMZ-R3020/VMZ-R4540/VMZ-R6555 High ccuracy Type VMR-H Model VMR-H3030 VMZ-K3040 VMZ-K6555 inexiv VM-4540 NEXIV VMZ-R3020 NEXIV VMZ-R4540 NEXIV VMR-H3030 XY Stroke (mm) Magnification (Type S) Magnification (Type H) Z-axis Stroke (mm) Max. guaranteed loading capacity (kg) Max. permissible error U1X, U1Y (μm) Max. permissible error of Z axis (μm) / 3 / / L / L / / 3 / / L / L / 1000 Type XY Stroke (mm) Wide FOV Head Stardard Head High-Magnification Head Z-axis Stroke (mm) Max. guaranteed loading capacity (kg) Max. permissible errors (μm) EUX, MPE: Max. permissible errors in Z axis (μm) EUZ, MPE:* L/ L/50 Wide FOV Standard L/ L/ L/ L/ L/ L/ L/100 3+L/ L/ 1.2+5L/ L/ L/ L/ L/ L/ L/ High ccuracy L/ L/ FOV W(mm) D(mm) Type S Type H Zoom Heads Confocal Optics rightfield Optics W.D. 24mm 24mm 5mm 20mm 5mm oth brightfield and 3D images are available L = Length in mm *1: with Laser F or Touch Probing Zoom Heads Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of fine three-dimensional geometries. Confocal Optics are designed for wide FOV height measurement. Type Wide FOV and long working distance enables comfortable operation. Laser F and Touch Probe can be attached as optional accessories. *Touch Probe is an option only for VM series. Type 1 4 Equipped with top, bottom, and oblique ring lights with adjustable angles. TTL (Through The Lens) Laser F is a standard tool that can scan surfaces at 1000 points/second. Type TZ Equipped with 1-120x ultra high zoom ratio with 8 steps. Suitable for measurements of small targets up to several micrometers. High Contrast and Multileveled Sample (PCs) rightfield observation can sometimes be difficult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics. rightfield Image SEM image rightfield Contour 3D view Thin Transparent Samples (Metal Surface Film / Semiconductor Resist) Top layers of both thin transparent film and metal surface can be easily detected using Confocal optics. rightfield Image Metal Surface Film FOV W(mm) D(mm) Wide FOV Head Type Stardard Head Type 1 High- Magnification Head Type 2 Type 3 Type 4 Type TZ W.D. 73.5mm 50mm 30mm 9.8mm Confocal Image Confocal Image Difficult to detect thin layer films Top and bottom layers are accurately detected Top detected ottom detected 10 11

7 Measuring Microscopes Profile Projectors Focused on high-precision and easy operability, a wide range of MM-products are available. Compact Model asic Model Large-Stage Model Nikon's profile projectors apply Desktop Model Large-Screen Model the principles of optics to the MM- MM-400 MM-800 inspection of manufactured V-12 V-20 parts by projecting magnified silhouettes on a screen. Stage Size/ Loading Capacity Max. Workpiece Height Optical Head X-Y-Z CCD Obj. Magnification MM Type 50 50mm / With Nikon's optical technology and newly developed stages, high-precision measurement can be achieved. 5kg mm / 15kg 100mm / 15kg mm / 20kg 250 mm / 20kg 300 mm / 20kg Monocular inocular 2-axis 3-axis 110mm *For simple video head only * 1 /3 /5 /10 mm mm 1 /3 /5 /10 /20 /50 /100 : vailable / : Not available Universal Type Offers a line-up compatible with dimensional measurement and various observation methods. Stage Size/ Loading Capacity Max. Workpiece Height Screen Image Projection Lens Digital Protractor Digital Counter *1: ctual FOV = Effective diameter of screen / Lens magnification *2: Maximum sample height is 70mm when mm stage is installed. Data Processing Systems for Measuring Microscopes and Profile Projectors Data Processing Software E-MX 50 50mm / 5kg mm / 15kg 100mm / 15kg mm / 20kg 250 mm / 20kg mm / 30kg Magnification FOV (with 10 lens)* 1 100mm* 2 305mm Erect 5 /10 /20 /25 /50 /100 / 30.5mm Data Processor DP-E1 Metrology Software U-DP mm 500mm Inverted 5 /10 /20 /50 /100 50mm : vailable / : Not available Newly Developed High-Precision Stages The coarse/fine changeover lever and the RESET and SEND buttons are located near the X- and Y-axis knobs. Focusing id (F) The newly developed Split-Prism F delivers sharp patterns to allow accurate focusing during Z-axis measurements. F patterns are clearly visible because they are split vertically. Objective Provides the user with various advanced measurements and processing functions. utomated edge detection with sub-pixel processing enables more precise and repeatable measurements. Effectively used with a measuring microscope /profile projector, it quickly calculates and processes measurement data. Feature Oriented Operation of the DP-E1 allows the user to conduct measurements with the graphics, providing a seamless measuring environment. The browsered geometric dimensioning software can be effortlessy connected via Ethernet or Wifi to electronic devices. Interactive navigation enables immediate operation, while the simple screen layout enables easy measurement results confirmation. X-axis Knob Y-axis Knob Front Focus Focused Rear Focus Connected with profile projector, data processing functions only Connected with profile projector, retrofit counter and DP units are required. [Operating environment] OS: Windows 7 Required memory: 2G (min.) Recommended browsers: Windows Internet Explorer Ver or later 12 13

8 utocollimators Optical Flat / Optical Parallel / Standard 300mm Scale utocollimator is an easy-to-use but precise metrology instrument for angularity, parallelism, perpendicularity, straightness of precision components machine guideway and many other applications. rightfield Type 6-LED Utilizes hallmark Nikon optics to illuminate surface details. Darkfield Type 6D-LED Optimal for measuring small, flat mirrors. Optical Flat The optical flat is used to check the flatness level of a surface provided with mirror-smooth finish. Flatness level can be measured by observing inteference fringes by placing the optical flat in contact with the workpiece. Diameter Thickness Flatness Glass (ø60mm) 15mm 0.1µm a b Glass (ø130mm) 27mm 0.1µm Optical Parallel oth planes of the optical parallel have been precisely finished flat and parallel. It is used to check the flatness and parallel levels of a workpiece by observing intereference fringes by placing the optical parallel in contact with the workpiece. Diameter Thickness Flatness Parallelism 30mm 12mm / 12.12mm / 12.25mm / 12.37mm within 0.1µm within 0.2µm Method Readout System Measuring Range Minimum Range Plane Mirror C oth sides are perfectly parallel, permitting its use as a reference for non-reflective surface. lso useful for measuring extremely small angles where a smaller mirror is desirable. *Wooden case provided. 6-LED: rightfield, 6D-LED: Darkfield djustment in viewfield and reading on micrometer 30 minutes of arc (both vertical and horizontal axes) 0.5 seconds of arc LED Illuminator C-L1 LED illumination unit for retrofitting onto utocollimator 6/6D illumination unit. Standard 300mm Scale Gauges stage travel accuracy up to 300mm. oth 10mminterval sensor patterns and calibrations are provided. Made of low heat-expansion glass, for minimizing influence of heat. *Within 1µm against compensation values. *Optical flats and parallels with greater precision are available by custom orders. Outer Diameter Thickness Parallelism 30mm 12mm 2 seconds of arc Power Source batteries 2, C adaptor DIGIMICRO With built-in photoelectric digital length measuring systems, DIGIMICRO offers flawless contact measuments of dimension, thickness, and depth. Mainunit MF Counter MFC Stand MS-21 Mainunit MF Counter TC Stand MS-11C Main Unit Measuring Range ccuracy (20 C) Measuring Force MF mm 3µm Downward direction to 1.813N (variable to about 0.441N), lateral to 1.225N MF mm 1µm Downward direction to 1.617N (variable to about 0.294N), lateral to 1.225N MH-15M 0 15mm 0.7µm Upward direction 0.245N, downward 0.637N, lateral 0.441N *With lifting release Operating Temperature 0 to 40 C 14 15

9 Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. June NIKON CORPORTION Microsoft and Windows are registered trademarks of Microsoft Corporation in the United States and other countries. Company and product names listed in this catalog are trademarks or registered trademarks of each company. N.. Export of the products* in this catalog is controlled under the Japanese Foreign Exchange and Foreign Trade Law. ppropriate export procedures shall be required in case of export from Japan. *Products: Hardware and its technical information (including software) NIKON CORPORTION Shinagawa Intercity Tower C, , Konan, Minato-ku, Tokyo , Japan phone: fax: ISO Certified for NIKON CORPORTION NIKON INSTECH CO., LTD. Shinagawa Intercity Tower C, , Konan, Minato-ku, Tokyo phone: fax: NIKON METROLOGY, INC Grand River venue, righton, MI U.S.. phone: fax: NIKON METROLOGY EUROPE NV Geldenaaksebaan 329, 3001 Leuven, elgium phone: fax: NIKON INSTRUMENTS (SHNGHI) CO., LTD. CHIN phone: fax: (eijing branch) phone: fax: (Guangzhou branch) phone: fax: NIKON INSTRUMENTS KORE CO., LTD. KORE phone: fax: NIKON SINGPORE PTE LTD. SINGPORE phone: fax: NIKON MLYSI SDN. HD. MLYSI phone: fax: PT. NIKON INDONESI INDONESI phone: fax: Nikon Sales (Thailand) Co., Ltd. THILND phone: fax: NIKON INDI PRIVTE LIMITED INDI phone: fax: NIKON CND INC. CND phone: fax: NIKON INSTRUMENTS S.p.. ITLY phone: fax: NIKON METROLOGY UK LTD. UNITED KINGDOM phone: fax: NIKON METROLOGY SRL FRNCE phone: fax: NIKON METROLOGY GMH GERMNY phone: fax: Printed in Japan ( ) m/m Code No. 2CE-IHWH-6