3D OPTICAL PROFILER MODEL 7503

Transcription

1 3D Optical Profiler MODEL 7503 Features: 3D OPTICAL PROFILER MODEL 7503 Chroma 7503 is a sub-nano 3D Optical Profiler developed using the technology of white light interference to measure and analyze the surface profile of micro-nano structures with sophisticated scanning system and innovative algorithms. It can work with color or monochrome camera as required for 2D and microscope measurements. The latest system modular design of Chroma 7503 has flexible configurations that can comply with diversified test applications. When equipped with electric nose gear, maximum 5 types of lens can be mounted and switched directly for use without changing manually. In addition, the equipped electrical adjustment mobile platform is able to adjust and position the sample automatically. The large scanning range of vertical and horizontal axis is applicable for various auto measurements. Nondestructive and rapid surface texture measurement as well as analysis can be done on the sample without any preprocessing that is most suitable for R&D, production, process improvement and academic research. The height resolution of Chroma 7503 is up to 0.1 nm and it can achieve 150mm when Z vertical axis is used to measure the scanning stroke. Also the horizontal axis is able to reach sub-micro resolution with scanning range up to mm when a PC is used to control the mobile platform as demand. The fast calibration procedure and algorithm theory enables the system calibration result to be traced to NIST standard. Combined with several innovative, robust and reliable algorithms, Chroma 7503 has the quality of high precision and large scale measurement. Master software along with the interference signal process algorithm of Chroma to analyze the spectrum of white light interference and prevent the boundary error problem. The system has dark point process function to filter out and correct the data that is incapable of creating interference to reduce the error in measurement. Since the dark point process runs while the data is retrieving, the dark point filter function can be executed effectively; meanwhile the correction is made by referencing the surrounding data that makes the measurement more robust and reliable. STA (Surface Texture Analysis) Master software analyzes and corrects the data of surface texture, also provides complete profiles in icon. It has more than 150 lines or surfaces profiling parameters including roughness, ripple, flatness, apex and valley. The high pass filter, low pass filter, fast Fourier transformation and cusp removal space filter tools allow the user to filter out the high/low/ bandpass signals. The software has polynomial fitting, region growth, the entire surface and multiple area leveling tools that can used for data processing and analysis flexibly. In many hi-tech industries such as semiconductor, flat panel display, fiber communication, MEMS, biomedical and electronic packaging, the accuracy of micro structure surface texture determines the performance and function of the product, thus it needs to be monitored for quality during manufacturing. Chroma 7503 has many surface measurement parameters such as section height, included angle, area, dimension, roughness, ripple, film thickness and flatness that can meet the requirements of the industries and R&D units. Up to 0.1 nm height resolution for measurement Use white light interference measurement technique to do nondestructive and rapid surface texture measurement and analysis Modulized design to select parts based on test demands or budget concerns Work with color or monochrome camera to do 2D measurement and enable the measuring microscope function Equipped with electric nose gear to mount various lens for switch programmatically LED or halogen light source for selection Measurement range 150 mm x150 mm Integrate low magnification lens (5X & 2.5X ratio) for large area 3D measurement Provide various surface measurement parameters, such as sectional difference, included angle, area, dimension, roughness, waviness, film thickness and flatness Equipped with dark point and boundary error correction algorithms Friendly user interface with simple graphical control system and 3D graphics display Exchangeable file format to save and read various 3D profile file formats Powerful STA (Surface Texture Analysis) Master software providing more than 150 lines and surfaces profiling parameters Automated rapid self calibration to ensure the system's measurement capability Provide Chinese/English user interface for switch Provide measurement script for auto test The configured auto scanning platform is able to find the best focus position via the automated vertical axis mobile platform with rapid autofocus algorithm. Moreover, the tilt adjustment platform is able to level the unit under test within a few seconds without complex operations. The commercial white light interference analyzers frequently use the centroid algorithm to calculate the surface height. Since the light diffraction causes incorrect height calculation of some positions and results wrong profiling data, Chroma 7503 applies the most advanced 3D Profiler Chroma 7503 has 2D and 3D measurements with fast switch of ratio and large area map interlinking function that can cope with various applications needs. Furthermore, the flexible modular design allows customization for practical use to gain the balance between price and performance. Chroma 7503 is the best choice for improving efficiency and saving cost.

2 THEORY OF WHITE LIGHT INTERFERENCE MEASUREMENT The theory of white light interference utilizes the characteristic of white light that is difficult to produce interference due to coherence of short length. Through frequency and light wave of similar amplitude it can form a white light interference wave packet of low coherence. Comparing to monochromatic light, white light interference had the merit of less noise. When obtaining the 3D surface information, the white light interference uses two light waves of same characteristics that will show the most obvious of contrast stripe in zero optical path difference to judge the occurrence position of zero optical path difference and get the 3D profile change of UUT (Unit Under Test) Wave interference Electromagnetic waves Crest Electromagnetic waves Crest Synthesis of interference fringes Interference fringes generated by long wave 1 Interference wave of different single wave length Crest position Trough Trough + + Interference fringes generated by medium wave = Interference fringes generated by short wave 3 = Synthetic waveform Stronger due to the overlap of crest and crest, trough and trough Optical path difference is the integer times of Weaker due to the overlap of crest and trough Optical path difference is the integer times of + /2 Synthetic waveform Interference peak VSI (Vertical Scanning Interferometry) Via the shift of interferometric lens, it records the intensity of the same pixel in the images with different depth and gets the highest peak value. Since it is the height mapped for calculating the signal intensity, the signal is the function of vertical depth. Follow the scanned stride size it can calculate the amount of peak images and their positions to convert the UUT surface height that mapped to the pixel. PSI (Phase Shift Interferometry) The Phase Shift Interferometry adopted by 7503 is applicable for measuring the UUT of small scale. When the Z axis moves several fixed shifts, it can calculate the phase difference between reference and measurement light through the intensity change of interference stripe and get the height of each pixel via phase difference and wavelength. Phase shift of interference image capture Z Depth Different height of image The 1 st Step The 2 st Step X Direction Y Direction The N st Step The 3 st Step Analysis of the interference image Three-dimensional morphology reconstruction 2D morphology 3D morphology A B C

3 LONG DEPTH OF FIELD, TRUE COLOR 3D IMAGE 6 in. Polycrystalline Solar Panel conductive silver adhesive, the substrate surface is rough and the obliquity of silver adhesive is big, thus use high quality mode to scan the image Image of focal plane 1 Image of focal plane 2 Image of focal plane 3 Full-focus Image + + The traditional white light interference microscopy system makes the interferometric lens to focus on the UUT due to the lens characteristic. The image has obvious interference stripes and the depth of field is not enough that is unable to perform 2D defect inspection. The traditional color image color image optical microscope is unable to do 3D profiling uses multi-functions to structure the white light interference micro image capturing system and with the algorithm of long depth of field the white interference microscopy system is able to get the true color of UUT surface and 3D profile information at the same time to compensate the characteristics of interferometric lens in white light interference microscopy system. The structure also provides 3D profile and true color information and with the combination of 3D and 2D, the application for various kinds of measurements can be developed. ROUGHNESS MEASUREMENT True Color 3D Image + 3D morphology information 9002nm -5835nm nm STEP-HEIGHT/LINE WIDTH/ LINE SPACE/FLUCTUATION MEASUREMENT 9002nm -5835nm nm CONNECTING PICTURE FUNCTION 7503 white light interference microscopy system is able to adjust the UUT to best focus position and level it for inspection. Moreover, for a sample surface region larger than FOV that requires measurement, the user can use large area measuring function to set the start and end for horizontal scan. It measures each FOV and joints multiple profile data to get large area surface profile of the sample. Tradition single-fov size Multi-FOV connecting picture function 2D morphology 3D morphology

4 SYSTEM CONFIGURATION & OPTIONAL ACCESSORIES 3D Interferometric Lens Ti 2.5X Ti 5X Image System (CCD Camera) DI 10X DI 50X 1000X1000 Mono 1000X1000 Color 640X480 Mono 640X480 Color Nose Gear Tube Lens Motorize DI 20X DI 100X 2D Objective Lens 1X Manual CF Plan 5X CF Plan 50X 0.5X CF Plan 10X CF Plan 100X Calibration Standards 0.45X CF Plan 20X VLSI Step Height Standard Variable Frequency XY Mobile Platform XY Mobile Platform XY Manual Platform Motorize Manual Vibration-proof Table Electric Control System

5 SYSTEM DIMENSION SPECIFICATION Unit.:MM(millimeter) X 480 Camera FOV & Pixel Dimension Resolution (um) FOV (mm x mm) Ratio Tube Lens 1X Tube Lens 0.5X Ratio Tube Lens 1X Tube Lens 0.5X 2.5X 2.96 * *1 2.5X 1.9 X 1.4 *1 3.8 X 2.8 *1 5X X 0.95 X X X X 0.47 X X X X 0.23 X X X X X X X X X X *1: It supports common lens except interferometric lens. * If the UUT is larger than a single FOV when performing 3D measurement, the measurement range can be expanded for 5X lens via joint X 1000 Camera FOV & Pixel Dimension Resolution (um) FOV (mm x mm) Ratio Tube Lens 1X Ratio Tube Lens 1X 2.5X 2.96 *1 2.5X 3 X 3 *1 5X X 1.48 X X X 0.74 X X X 0.36 X X X 0.15 X X X 0.07 X 0.07 *1 : It supports common lens except interferometric lens. * If the UUT is larger than a single FOV when performing 3D measurement, the measurement range can be expanded for 5X lens via joint. 3D OBJECTIVE LENS TYPE MICHELSON TYPE MIRAU TYPE Objective Lens Beamsplitter Reference Mirror Reference Mirror Objective Lens Beamsplitter Specimen Specimen

6 APPLICATION EXAMPLES µm µm µm µm µm nm nm LCD-Photo Spacer PCB-Laser Via Material-Rough Surface PCB-Wire high, wide, pitch µm 77.5 µm µm nm LCD-Prism Sheet 147.0µm Semiconductor-Thin Film Transistor D Optical Profiler Imaging System: pixel (mono), pixel (color) pixel (mono), pixel (color) Lens: 5X, 10X, 20X, 50X, 100X Interferometric lens: 2.5X*2,5X, 10X, 20X, 50X, 100X MEMS-HDD Read Head SPECIFICATION Model 7503 Measurement Noncontact 3D & 2D measurements Imaging system pixel (mono), pixel (color) (CCD video camera) Optional pixel (mono), pixel (color) *1 Lens 5X,10X, 20X, 50X, 100X Interferometric lens 2.5X *2, 5X, 10X, 20X, 50X, 100X Tube lens ratio supported 0.45X, 0.5X *6, 1.0X Nose gear Electric rotary 5 holes, Optional None, Manual rotary 5 holes Light source White light LED, Optional Halogen Measurement mode *3 PSI, VSI Stroke 150 mm XY mobile platform Resolution 2 m ( auto version ) Load capacity 1.1 Kg ( without carrying tray ) Control mode Auto Level Measurement Range mm Z axis Stroke 100 mm ( Electric platform ) Resolution < 0.5 m ( Electric platform ) Level adjustment platform Manual 2 axes, 6 PZT Scan Stroke 100 m Vertical Accuracy (VSI) 1.5% *4 (Step Height) (PSI) 5.0% *5 Repeatability (VSI) 0.14% *4 (Step Height) (PSI) 1.7% *5 Scan speed (PTZ) 12 m/sec Operating system Microsoft Windows XP ; Window 7 32bit Operating environment Noise: 60 db; environmental vibration: VC-C or above Input voltage range AC 100~240V, 50/60 Hz, 2KVA Operating temperature/ humidity 15~35 (47 F to 67 F); less than 75% relative humidity (non condensing) Dimension (H x W x D) mm Weight Approx. 220 Kg *7 MEMS-Printer Nozzle Remark *1: Support 1.0X tube lens ratio only. *2: Confocal is not available for 2.5X lens. *3: VSI: Vertical Scanning Interferometry; PSI: Phase Shift Interferometry. *4: Measure 8.0 m standard step height. *5: Measure 46nm standard step height. *6: True color function supports 0.5X tube lens only. *7: Actual weight varies with the optional items selected. * All specifications are subject to change without notice. Please visit the website of Chroma for up-to-date information. * All other brand and product names mentioned in this data sheet are trademarks or registered trademarks of their respective holders. Tube lens: 0.45X, 0.5X, 1.0X Nose Gear: None, Manual rotary 5 holes, Electric rotary 5 holes Light Source: White light LED, Halogen, Mono LED Vibration-proof Table Software: STA Master Developed and Manufactured by : CHROMA ATE INC. HEADQUARTERS 66 Hwaya 1st Rd., Kueishan Hwaya Technology Park, Taoyuan County 33383, Taiwan Tel: Fax: info@chromaate.com CHINA CHROMA ELECTRONICS (SHENZHEN) CO., LTD. 8F, No.4, Nanyou Tian An Industrial Estate, Shenzhen, China PC: Tel: Fax: JAPAN CHROMA JAPAN CORP. 472 Nippa-cho, Kouhoku-ku, Yokohama-shi, Kanagawa, Japan info@chromaate.com U.S.A. CHROMA ATE INC. (U.S.A.) 7 Chrysler Irvine, CA Tel: Fax: Toll Free: sales@chromausa.com EUROPE CHROMA ATE EUROPE B.V. Morsestraat 32, 6716 AH Ede, The Netherlands Tel: Fax: sales@chromaeu.com 7503-E PDF