WHITE PAPER: GASGUARD AP11 CONTROLLER: THE BENCHMARK FOR GAS AND CHEMICAL DELIVERY

Transcription

1 WHITE PAPER: GASGUARD AP11 CONTROLLER: THE BENCHMARK FOR GAS AND CHEMICAL DELIVERY The GASGUARD AP11 Controller has logged more than 40 million opera ng hours with a reliability ra ng of % running on thousands of systems installed worldwide. The Versum Materials GASGUARD AP11 Controller remains the benchmark for opera ng and managing gas and chemicals delivery systems for the global semiconductor, display and photovoltaics industries. More than 8,000 GASGUARD AP11 Controllers are being used on more than 31,000 GASGUARD systems globally and have logged more than 40 million hours with a reliability ra ng of percent. The GASGUARD AP11 Controller is a con nuously evolving smart technology pla orm for fabwide gas delivery that lowers the cost of ownership and enhances the user experience. The emphasis is on reliability, safety, configurability, supportability, installa on, opera on, control and maintenance. The mission of the GASGUARD AP11 Controller is to keep the gas flowing since any interrup on of produc on that causes serious down me can be very costly. According to Automa on.com, at 50,000 wafer starts per month, one hour of down me costs up to $250,000. We understand that customers do not want any interrup ons to their process, no opera onal problems that will disrupt wafer produc on. A LONG HISTORY OF SERVICE Introduced by Air Products in the 1980s (Versum Materials operated for more than three decades as a division of Air Products), there are six previous legacy controllers the GASGUARD AP10, AP3, AP2, GG500, GG450 and GG250 Controllers. The current GASGUARD AP11 Controller, introduced in 2013, is the same size as previous controllers. It easily replaces all of these versions with a simple retrofit, func ons on all GASGUARD gas delivery systems and offers a seamless transi on from most legacy controllers. The state of the art GASGUARD AP11 Controller represents the latest genera on for specialty gas delivery systems mainly in large semiconductor fabs. The AP11 features a modular design with enhanced reliability, easy informa on access, simplified troubleshoo ng and it can be easily customized. It AP11 controller is the culmina on of opera ng and maintenance feedback from our global customer base, the exper se of Versum Materials engineers, and the company s MEGASYS total chemical management on site teams. Equally important, Versum Materials is focused on helping semiconductor manufacturers benefit increasingly from smart manufacturing by applying advanced analy cs, machine learning and ar ficial intelligence wherever possible to our en re offering of GASGUARD systems, including the GASGUARD AP11 Controller, a cri cal component in gas and chemicals distribu on.

2 GASGUARD AP11 CONTROLLER KEY FEATURES AND BENEFITS (Note: The Automa c Restart, Automa c Recovery, Global Communica ons System and Custom Facilita on Op ons are detailed later in this paper.) A key feature of the GASGUARD AP11 Controller is its 10.4 color touchscreen human machine interface, allowing for faster screen updates and for all data entry, (i.e. set points). It provides dynamic, real me flow schema cs with quick and easy access to system func ons. The system uses a high speed Intel Atom processor running in a Microso Windows CE environment, all in an industrystandard COM Express form factor. It is fully compa ble with the company s Global Communica ons System (GCS) or SCADA system and communicates to GCS or OPC so ware via Ethernet. The GASGUARD AP11 Controller is available in both PLC (Siemens or Omron) and industrial PC (microprocessor) systems. Because it s pla orm based, this controller is easy to upgrade and modify, for example, changing the custom facilita on op on or installing a board to accommodate the GASGUARD ev Temperature Control op on. The GASGUARD AP11 Controller is the only commercially available controller that has a second microprocessor as standard equipment for the Automa c Recovery System (ARS) feature. Solenoid management allows gas equipment to run uninterrupted while the controller is in service. Safety and reliability are key drivers for the GASGUARD AP11 Controller. It has numerous standard features that Versum Materials experience has shown to be essen al. For example, in the event of a fault, the Automa c Recovery System (ARS) will keep the gas flowing while the problem is corrected. There are other built in redundancies and fail safe valves. Safety systems cover UV/IR flame detec on, ven ng, purging, shutdown and dual isola on valves. To ensure reliable performance, the GASGUARD AP11 Controller uses FEMA in the design process and goes through a Highly Accelerated Life Test (HALT), as well as a rigorous tes ng process to receive its lis ngs, including CE, NRTL, SEMI S and Class 1, Division 2. The unit has the op on to have redundancy in power management, such as dual power supply/feed. Smart indicators simplify troubleshoo ng. Remote monitoring of GASGUARD systems can be a ained using the GASGUARD OPC Server so ware or GCS, Versum Materials SCADA system. Either method can provide con nuous online 24/7 monitoring of the status of all connected GASGUARD cabinets, valve manifold boxes (VMB) and bulk specialty gas (BSGS) systems. Figure 1: Top 10 GASGUARD AP 11 Controller Smart Features and Benefits Enhanced reliability; built in safety and power redundancy, i.e. automa c restart, two microprocessors Available in PLC and industrial PC based systems Modular, configurable, pla orm based; easily adaptable to accept a suite of current and future GASGUARD op ons Easy to use/more responsive color, touch screen HMI Field proven, reliable, trouble free process gas feed and control with the lowest overall cost of ownership. Built in override systems for maintenance and solenoid management for uninterrupted gas supply Advanced diagnos c LEDs and circuits to monitor system health; hard wired shutdown for safety cri cal inputs Smart indicators simplify troubleshoo ng and maintenance and keep the gas flowing Rigorous design and tes ng, i.e. FEMA, HALT Fully cer fied: Class 1, Division 2; CE, NRTL, SEMI S2, etc.

3 GASGUARD GAS DELIVERY SYSTEMS OVERVIEW Since the first gas cabinet delivery in 1983, the Versum Materials GASGUARD Delivery Systems and Services group has represented the company s commitment to provide state of the art equipment for specialty gas and chemicals storage, delivery and control to the global semiconductor, TFT LCD and photovoltaics industries. Versum Materials GASGUARD gas cabinets also comprise benchmark technology. With the experience of mul ple factories and design centers, a worldwide installa on base, hundreds of millions of service hours and the opera onal excellence of global MEGASYS on site management teams, GASGUARD equipment designs bring con nual focus on safety, reliability and costs. The GASGUARD product line includes automa c, semi automa c and manual systems in a variety of configura ons from a single source system to a three cylinder source and purge system. The different models can accommodate a full range of hazardous gases flammable, pyrophoric, corrosives, toxics and highly toxics that Versum Materials manufactures and supplies all tailored to meet customer needs. In keeping with Versum Materials commitment to safety, GASGUARD AP11 Controllers and equipment comply with applicable codes and guidelines by OSHA, TGO, NEC, CE, Uniform Fire Code (UFC 80), Interna onal Fire Code, Na onal Fire Protec on Agency (NFPA 318), SEMI S and NRTL. AUTO RECOVERY SYSTEM (ARS) The Auto Recovery System s (ARS) main objec ve is to maintain safe gas delivery in an unexpected event. As men oned, the GASGUARD AP11 Controller is the only commercially available controller that has a second microprocessor as standard equipment for the ARS benefit. Here s what happens when a problem occurs with the AP11 controller s main processor (Intel CT N 2800), for example, high temperature, data overload, networking issues, etc. COM Express (main processor) issues or faults are immediately detected by a highly reliable separate AVR processor or watch dog that monitors the main systems and control 24/7. If a fault is detected, ARS: Automa cally maintains last known state of COM Express opera ons (process cri cal valve posi ons, shutdowns etc.) A empts to recover or ride through COM Express issues Performs a complete power cycle The majority of errors are recoverable and ARS assures that gas is flowing All of this happens within milliseconds GASGUARD AP11 Controller Auto Recover System screen The AVR watch dog processor will not override safety inputs such as major alarms and shutdowns (i.e. UV/IR, E stops, etc.). It allows all safety ac ons to proceed. With the GASGUARD AP11 Controller, Auto Recovery comes fully enabled from the factory. It can be enabled or disabled through the controller with a 4 th level password. Processor related firmware and configura on so ware are customer specific.

4 AUTOMATIC RESTART SYSTEMS Like the Automa c Recovery System, the GASGUARD AP11 Controller s standard Automa c Restart System is designed to minimize down me and any disrup on to process gas delivery. In the event of a power loss while gas is flowing, when power resumes, Automa c Restart will return gas flow to its se ng when power was disrupted. No manual restart is needed. Being able to restart many cabinets from a single source is a significant mesaver. Also, the Automa c Restart capability will not override safety inputs, allowing all safety ac ons to proceed. With the GASGUARD AP11 Controller, Auto Restart also comes fully enabled from the factory. One of our long term customers praised the value of the GASGUARD AP11 Controller s built in Automa c Restart: Last Tuesday we experienced a brownout on the ammonia gas pad. When we went out to restart systems, we found the new AP11 system already started and both systems were online to the fab. Had we gone down it would have added a lot of grief pu ng the system back online to the fab, but because the system recovered automa cally, it saved us a lot of startup me. Both Automa c Recovery and Automa c Restart are intended to keep process gas systems opera ng or return them to their original se ngs. They will not override safety alarms. FOUR CUSTOM FACILITATION OPTIONS For maximum configurability, the GASGUARD AP11 Controller has four custom facilita on op ons, extending its reliability, safety, configurability and supportability: LITE OPTION: The basic applica on used with most GASGUARD delivery systems and primarily for shutdowns and other safety applica ons. STANDARD OPTION: This op on covers more complex applica ons than the lite version, such as the need to send out mul ple digital signals. One example would be an eight s ck VMB (valve manifold box) applica on. EXPANSION OPTION: This board includes eight J or K thermocouple inputs and is used for heater control and heat trace applica ons (for example, with the GASGUARD ev Temperature Control System). ANALOG OPTION: With its eight analog output, this board is designed for remote monitoring of up to eight channels. The analog op on is a perfect safety complement to SCADA or GLS systems in larger fabs, as well as for providing safe monitoring at R&D labs, universi es and smaller facili es using a variety of gases. All four op ons can be chosen for new equipment or retrofi ed to cabinets with a GASGUARD AP11 Controller. The analog op on can be installed as a stand alone or with each of the other three op ons.

5 GLOBAL COMMUNICATIONS SYSTEM (GCS) The GCS with its standard Versum Materials device graphic display screens, allows for remote monitoring and commanding of the GASGUARD AP11 Controller and other controllers with GE Cimplicity technology for wide hardware support. Central monitoring and control allows for monitoring of hazardous gases from a remote loca on. GCS is highly recommended for fabs that have more than 20 gas cabinets. Fewer technicians to oversee the gas and chemical supply system, cylinder usage trend monitoring to prevent runouts and full text alarm paging mean a lower cost of ownership. Delivery equipment can be configured automa cally from pre constructed smart objects there is no need for on site engineering service for each addi on. Current and historical trending is available. Also local users can make GASGUARD equipment addi ons, without the need for expensive systems integra on programming. Equipment graphics are grouped into logical rooms, organized by users. GCS, which includes a Dell PowerEdge T430 Server, is an OPC compliant interface to Ethernet based controllers including all GASGUARD and CHEMGUARD Gen I, II and III models. It is not for Versum Materials TE9 or TE10 controllers. EXAMPLES OF GASGUARD AP11 CONTROLLER SUPPORT FOR OTHER GASGUARD PRODUCTS The fully configured and fully automated modular AP11 controller is vital to two newer Versum Materials GASGUARD products Ac ve Control technology and the ev Temperature Control System. Semiconductor manufacturers are relying more on smart manufacturing ideas from suppliers to stay compeve. Recognizing that, Versum Materials developed Ac ve Control technology, which solves cri cal gas pressure challenges in distribu ng gas to the tool. As nodes get smaller, semiconductor manufacturers find it more difficult to maintain gas pressure control accuracy, as well as experiencing an increasing problem in sustaining the repeatability of gas pressure. Ac ve Control technology working in concert with the GASGUARD AP11 Controller, helps customers gain even more control in bringing gases to the tool at the correct pressure consistently to avoid costly down me. Ac ve Control technology is being introduced in several phases that singly and collec vely employ, for example, peer to peer communica on, special applica ons to allow operators to be more responsive regardless of where they are in the fab at any given moment, and pneuma c rather than manually controlled regulators. The new technology can be installed new or retrofi ed to opera ng gas cabinets. One of the goals is to offer product service hybrids that exploit intelligent technologies and transform the way gas cabinets are serviced. The ev Temperature Control System delivers state of the art fabwide heat sourcing and control of electronic specialty gases requiring hea ng to increase or maintain flow. In comparison with current methods used to heat cylinders of ammonia, CO 2 and other gases, the ev system includes an GASGUARD AP11 Controller, a new AP1602 heater control board, an ev control cabinet and a gas cabinet with two blankets and two heat traces that can accommodate two A or B size cylinders with automa c crossover and automa c purge. Equally important, the GASGUARD ev temperature control system is self contained, which eliminates the cost of and issues associated with remote loca ons for the blanket controller and associated wiring. In addi on to its tradi onal func ons, the GASGUARD AP11 Controller displays more informa on for the ev heat control system, including its two heat trace and two blanket temperature readings and alarm set points. The controller s high speed microprocessor means faster screen updates since precise hea ng is cri cal. The specially designed AP1602 heat control board integrated with the GASGUARD AP11 Controller monitors and controls temperature and protects against cylinder overhea ng. GASGUARD ev Heat Control System

6 SUMMARY The Versum Materials GASGUARD AP11 Controller remains the benchmark for opera ng and managing gas and chemicals delivery systems for the global semiconductor, TFT-LCD and photovoltaic industries. More than 8,000 AP11 controllers are being used on more than 31,000 GASGUARD systems globally and have logged more than 40 million hours with a reliability ra ng of percent. CONTACT Kerry M. Lanza: kerry.lanza@versummaterials.com For more informa on, please contact us at: VERSUM MATERIALS, INC. VERSUMMATERIALS.COM The informa on contained herein is offered without charge for use by technically qualified personnel at their discre on and risk. All statements, technical informa on and recommenda ons contained herein are based on tests and data which we believe to be reliable, but the accuracy or completeness thereof is not guaranteed and no warranty of any kind is made with respect thereto. Versum and the Versum Materials logo are trademarks of Versum Materials, Inc Versum Materials, Inc GLOBAL Nov18