Intelligent Vacuum Metrology

Transcription

1 Sm rtline Intelligent Vacuum Metrology V a c u u m I n s t r u m e n t s

2 Sm rt line Intelligent Vacuum Transducers for 1200 to 5 x mbar Joy in innovation is our main driving force for developing vacuum metrology at its best. The new generation of Smartline sets highest standards with regard to precision, functionality and reliability. Durability That Pays Off The THYRACONT Pirani with extended measuring range activates ionization sensors below a very low pressure threshold. This protects the sensors and improves gauge life. Stay Connected The latest transducers offer an RS485 interface and an additional 0-10 V output or EtherCAT. Time Is Money Smartline s intelligent microcontrollers manage sensor control automatically. This guarantees an optimal interplay between the Pirani and ionization sensors without operator intervention. Further Smartline Advantages: Optionally with large LCD display Compact, metal sealed sensors Low thermal and electric interference with the vacuum process Insensitive to shock venting Replaceable sensor heads Correct pressure readings due to separate gas correction factors for each sensor

3 V S R t o 1 x m b a r P i e z o / P i r a n i Application Example process. At last the processed wafer is as the exact moment when atmospheric Silicon nitride is used in the semiconductor returned to the load-lock. After venting back pressure is reached after venting. The fast industry as an insulating material or for to atmospheric pressure and release of the response time and the precise pressure masking. It is deposited by PECVD (plasma- lock door, the wafer can be removed. For reading of the VSR allow for rapid door enhanced CVD) or LPCVD (low pressure CVD). short lead times, a fast reaction of the release, so very short lock cycles are possible. The feeding of the coating system is done via pressure reading is important. Due to outstanding long-term stability, the a load-lock to continuously keep the vacuum Solution transmitter is essentially maintenance-free. in the process chamber at 10-2 to 1 mbar. The pressure in the load-lock is monitored by Applications Challenge a VSR vacuum transmitter with Piezo / Pirani Analysis instruments The pressure must be measured accurately combination sensor, which measures 1200 to -4 Vacuum furnaces while evacuating the air lock, in order to take 1 x 10 mbar with high accuracy. Thus, the Coating plants in the wafer into the process chamber at the lock-pressure for the opening of the process Test of roughing pumps earliest possible moment to start the coating chamber can be measured accurately, as well Safety switching in vacuum systems V S P t o 1 x m b a r P i r a n i Application Example to avoid an overload of the turbo-molecular during the coating process. A VD10 Plastic components are provided with pump, e.g. by connecting it during multichannel vacuum display and control unit metallic coatings, either for aesthetic inapplicable system pressure, the pressure is used as a central control module. reasons or to shield sensitive components in the bypass line as well as the prevacuum from interferences. pressure of the turbo-molecular pump have Applications Challenge to be monitored. The metallization is done in a PVD coating Solution Analysis instruments system. It is evacuated with a rotary vane Vacuum furnaces The VSP Pirani Transmitter controls whether pump via a bypass line to a pressure of Coating the vacuum via the bypass line is sufficient 10-2 mbar. Then a turbo-molecular pump is Prevacuum control to connect the turbo-molecular pump. connected, which further evacuates to Safety switching in vacuum systems Another VSP monitors the necessary 10-5 mbar. The vacuum during the coating prevacuum pressure directly at the turboprocess, that takes place at 2 x 10-4 mbar, molecular pump. A VSM wide-range must be monitored continuously to ensure transmitter measures the ultimate vacuum consistently high quality coatings. In order inside the system, as well as the pressure V S M t o 5 x 1 0-9m b a r P i r a n i / C o l d C a t h o d e Application Example During the optical coating of mirrors for laser resonators the typical process pressure lies above 2 x 10-3 mbar. Challenge A suitable vacuum transducer must be able to monitor both, process pressure during the coating as well as the available minimum pressure of 10-6 mbar in the vacuum chamber. One of our customers used to work with a Pirani/cold cathode combination gauge, the cold cathode monitoring minimum and process vacuum. However, the continuous operation above 10-3 mbar resulted in rapid deterioration of the sensor. Solution In the VSM transducer a Pirani with extended range operates the cold cathode only below very low pressures. Further the transition between the two sensors can be configured to meet applications requirements. The entire coating process is now monitored by the Pirani. The cold cathode is saved because it is active only when the system pumps down to minimum pressure. The availability of the coating plant has improved significantly. For checking the pressure directly at the measurement location the integraded LCD of the VSM can be used. Applications Analysis instruments Coating plants Process engineering Controlling fine to high vacuum applications Sputtering appliances Vacuum furnaces V S H t o 5 x m b a r P i r a n i / H o t C a t h o d e Application Example Solution Applications Brazing, sintering or annealing requires an Two VSH transducers that have the required Analysis instruments oxygen free atmosphere which means that wide measuring range and are used to Coating processes processes are carried out under vacuum measure the pressure at the furnaces gas inlet Controlling fine to ultrahigh partially using inert gas. and vacuum port with high precision. The vacuum applications Challenge transducers are linked to the system PLC by Sputtering appliances their serial RS485 interfaces, so that both Process engineering The vacuum level must be monitored and kept pressure levels can be directly visualized constantly low during the process to avoid graphically which allows easy monitoring of oxidation of the products. One of our clients the pressure gradient inside the furnace tube. needed to measure the pressure in their high Optionally a VD12 2 channel vacuum display vacuum tube furnace near the gas inlet as well and control unit can be used for pressure as at the vacuum port with high accuracy. reading in the panel. Alterations reserved (SLA03)

4 VSR Smartline Vacuum Transducer Absolute Pressure 1200 to 1 x 10-4 mbar The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Sm rtline Typical Applications Benefits Load locks Wide measuring range due to Digital RS485 interface and combination sensor piezo / Pirani additional analog output signal Analysis technology V or EtherCAT High accuracy and optimal Coating plants resolution over the whole Digital adjustment of zero and measuring range atmospheric pressure via Vacuum furnaces pushbutton or interface Two independent, potential-free Leakage tests relay switch points Large, integrated LCD display with Operational control of background illumination Short response time roughing pumps (VSR53DL, VSR54DL) Excellent reproducibility and long Process engineering Display flashes in bright red color in term stability case of error, compared to green Mass spectrometers ligthing in the normal mode Small measuring cell volume (VSR53DL, VSR54DL) Safety circuits in vacuum systems e. g. 2 cm 3 for VSR53D Easy connection with PLCs Metal sealed stainless steel sensor, suitable for UHV The digital output signal applications can be transmitted error-free over long distances (up to 500 m) Filament is protected against oil and solvent vapors by a metal Baud rate 9.6 kbd to 115 kbd screen Rugged, EMI-proof metal housing Stable measurements due to optimized temperature Protection class IP54 compensation (VSR53E, VSR54E) Easily replaceable sensor heads Suitable for Thyracont with stored calibration data 2 and 4 channel display and control units VD12 / VD10 Measurements independent of gas type above 20 mbar and Vacuum connection using stainless adjustable gas type correction steel small flange DN 16 ISO-KF or factors for Pirani sensor conflat flange DN 16 CF-F LEDs for device status and switch points

5 Output (V) VSR53 VSR ,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03 Pressure (hpa) V (V) = log (p(hpa)) out 48 (V (V) - 5.5) p (hpa) = 10 out C Dimensions in mm Technical Data Measuring Principle Diaphragm piezo resistive / Pirani Materials In Contact With Vacuum Stainless steel , nickel, gold, silicon oxide, tungsten, glass Measurement Range x 10-4 mbar (900-1 x 10-4 Torr), max. overpressure 4 bar abs. Accuracy mbar: ±0.3% full scale 10-2 x 10-3 mbar: ±10% from reading Repeatability mbar: ±0.1 % full scale, 10-2x10-3 mbar: ±2% from reading Reaction Time mbar: < 30ms (piezo) 10-2 x 10-3 mbar: < 100 ms (Pirani) Voltage Supply VDC Electrical Connection VSR53D/DL, VSR54D/DL: SubD 15pol., male, lockable VSR53E, VSR54E: M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4 pol. Power Consumption 2.5 W, additionally 0.8 W for EtherCAT / relays /LCD Operating Temperature C (rel. humidity max. 80% at 30 C noncondensing) Storage Temperature C Max. Bake Out Temperature 125 C at the flange Output Signal 0-10 VDC, measuring range 1.5 to 8.58 VDC, logarithmic, 1V / decade, load resistor > 10 k W(VSR53D/DL, VSR54D/DL) Serial Interface RS485: 9.6 kbd to 115 kbd, address switch 1-16 Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA Vacuum Connection DN 16 ISO-KF (VSR53), DN 16 CF-F (VSR54) Protection Class IP54 (VSR53E, VSR54E), IP40 (VSR53D/DL, VSR54D/DL) Weight 220 g (VSR53D) Product Codes VSR53D Combi transducer piezo-pirani, x 10-4 mbar, DN16 ISO-KF connection, output RS485 and 0-10V VSR53DL As VSR53D, with LCD display VSR53E As VSR53D, output RS485 and EtherCAT VSR54D Combi transducer piezo-pirani, x 10-4 mbar, DN16 CF-F connection, output RS485 and 0-10V VSR54DL As VSR54D, with LCD display VSR54E As VSR54D, output RS485 and EtherCAT Accessories: SLN4 Plug-in power supply 24 V SLKUSB Interface converter RS485-USB VGR VacuGraph TM software for Windows W Measuring cable for VD12 and VD10, shielded, 2 m W As W , 6 m W As W , 20 m Replacement sensor heads B_VSR53, B_VSR54 Alterations reserved (VSRA03)

6 VSP Smartline Vacuum Transducer Absolute Pressure 1000 to 1 x 10-4 mbar The processor controlled VSP with robust helix filament is ideal for precise measurements in the fine vacuum range. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Sm rtline Typical Applications Benefits Analysis instruments Durable Pirani helix filament Digital RS485 interface and additional analog output signal Operational control of roughing High resolution V or EtherCAT pumps and vacuum plants Good accuracy and excellent Digital adjustment of zero and Safety circuits in vacuum systems reproducibility atmospheric pressure via pushbutton or interface Vacuum furnaces Two independent, potential-free relay switch points Large, integrated LCD display with Leakage tests background illumination Short response time Freeze drying (VSP63DL, VSP64DL) Filament is protected against oil Process engineering Display flashes in bright red color in and solvent vapors by a metal case of error, compared to green screen Vacuum centrifuges ligthing in the normal mode Stable measurements due to (VSP63DL, VSP64DL) optimized temperature Easy connection with PLCs compensation The digital output signal Small volume of the measuring cell can be transmitted error-free e. g. 1,8 cm 3 for VSP63D over long distances (up to 500 m) Metal sealed stainless steel sensor, suitable for UHV applications Baud rate 9.6 kbd to 115 kbd Rugged, EMI-proof metal housing Easily replaceable sensor heads Protection class IP54 with stored calibration data (VSP63E/VSP64E) LEDs for device status and Vacuum connection by stainless switch points steel small flange DN 16 ISO-KF or conflat flange DN 16 CF-F Suitable for Thyracont 2 and 4 channel display and control units VD12 / VD10

7 Output (V) VSP63 VSP ,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03 Pressure (hpa) V (V) = log (p(hpa)) out 48 (V (V) - 5.5) p (hpa) = 10 out C Dimensions in mm Technical Data Measuring Principle Pirani Materials In Contact With Vacuum Stainless steel , nickel, tungsten, glass Measurement Range x 10-4 mbar (750-1 x 10-4 Torr), max. overpressure 4 bar abs. Accuracy mbar: ca. ±30 % from reading 20-2 x 10-3 mbar: < ±10 % from reading < 2 x 10-3 mbar: < factor 2 Repeatability ±2% from reading Reaction Time < 100 ms Voltage Supply VDC Electrical Connection VSP63D/DL, VSP64D/DL: SubD 15pol., male, lockable VSP63E, VSP64E: M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4 pol. Power Consumption 2.5W additonally 0.8 W for EtherCAT /relays / LCD Operating Temperature C (rel. humidity max. 80% at 30 C noncondensing) Storage Temperature C Max. Bake Out Temperature 125 C at the flange Output Signal 0-10VDC, measuring range 1.5 to 8.5 VDC, logarithmic, 1V / decade, load resistor > 10k W(VSP63D/DL, VSP64D/DL) Serial Interface RS485: 9.6 kbd to 115 kbd, address switch 1-16 Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA Vacuum Connection DN 16 ISO-KF (VSP63), DN 16 CF-F (VSP64) Protection Class IP54 (VSP63E, VSP64E), IP40 (VSP63D/DL, VSP64D/DL) Weight 190 g Product Codes VSP63D Pirani transducer x 10-4 mbar, DN 16 ISO-KF connection output RS485 and 0-10V VSP63DL As VS63D, with LCD display VSP63E As VS63D, output RS485 and EtherCAT VSP64D Pirani transducer x 10-4 mbar, DN 16 CF-F connection, output RS485 and 0-10V VSP64DL As VSP64D, with LCD display VSP64E As VSP64D, output RS485 and EtherCAT Accessories: SLN4 Plug-in power supply 24 V SLKUSB Interface converter RS485-USB VGR VacuGraph TM software for Windows W Measuring cable for VD12 and VD10, shielded 2 m W As W , 6 m W As W , 20 m Replacement sensor heads B_VSP63, B_VSP64 Alterations reserved (VSPA03)

8 VSM Smartline Vacuum Transducer Absolute Pressure 1000 to 5 x 10-9 mbar The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Sm rtline Typical Applications Benefits Analysis technology Wide range sensor Digital RS485 interface and Pirani / cold cathode additional analog output signal Coating plants and V or EtherCAT vapor deposition The cold cathode sensor is automatically controlled Digital adjustment of zero and Vacuum furnaces by the Pirani atmospheric pressure via pushbutton or interface Process engineering Pirani with extended range allows operation of cold cathode at lower Large, integrated LCD display with Measuring and controlling in pressure and increases lifetime background illumination fine and ultrahigh vacuum (VSM77DL, VSM79DL) Robust sensor design Sputtering plants Display flashes in bright red color in Small volume of the measuring cell case of error, compared to green e. g. 9 cm 3 for VSM77D ligthing in the normal mode (VSM77DL, VSM79DL) Excellent ignition behavior Easy connection with PLCs Insensitive against inrush of air The digital output signal Two independent, potential-free can be transmitted error-free relay switch points over long distances (up to 500 m) LEDs for device status and switch points Easily replaceable sensor heads with stored calibration data Correct pressure readings by means of separate gas type correction factors for Pirani and cold cathode Suitable for Thyracont 2 and 4 channel display and control units VD12 / VD10 Baud rate 9.6 kbd to 115 kbd Rugged, EMI-proof metal housing Vacuum connection by stainless steel small flange DN 25 ISO-KF or conflat flange DN 40 CF-F

9 Output (V) 139 VSM77 VSM E-09 0, , ,001 0,1 10 Pressure (hpa) 48 Vout /V = 0,6 log (p/mbar) + 6,8 p /mbar = 10 ( (Vout /V 6,8) / 0,6 ) Dimensions in mm Technical Data Measuring Principle Pirani / inverted magnetron, both depending on gas type Material In Contact With Vacuum Stainl. steel , nickel, tungsten, molybdenum, glass, ceramic Measurement Range x 10-9 mbar (750-5 x 10-9 Torr), max. overpressure 4 bar abs. Accuracy mbar: < 30 % from reading 10-2 x 10-3 mbar: < 10 % from reading 2 x 10-3 mbar - 1 x 10-8 mbar: < 25% from reading Repeatability 10-1 x 10-2 mbar: Approx. ±2% from reading 1 x x 10-8 mbar: Approx. ±7% from reading Response Time 200 ms (1s for activating the cold cathode) Cathode Voltage Max. 2.5 kv Voltage Supply VDC Electrical Connection VSM77D/DL, VSM79D/DL: SubD, 15pol., male, lockable VSM77E, VSM79E: M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. Power Consumption Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD Operating Temperature C Storage Temperature C Maximum Bake Out Temperature 160 C at flange (electronic detached) Output Signal 0-10 VDC, measuring range VDC, log., 0.6 V/decade load resistor > 10k W(VSM77D/DL, VSM79D/DL) Serial Interface RS485: 9.6 kbd to 115 kbd, address switch 1-16 Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA Vacuum Connection DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79) Protection Class IP54 (VSM77E, VSM79E), IP40 (VSM77D/DL, VSM79D/DL) Weight Approx. 555 g Product Codes VSM77D Combi transducer Pirani/inverted magnetron, x 10-9 mbar, DN 25 ISO-KF connection output 0-10 V and RS485 VSM77DL As VSM77D, with LCD display VSM77E As VSM77D, output RS485 and EtherCAT VSM79D Combi transducer Pirani/inverted Magnetron, x 10-9 mbar, DN 40 CF-F connection output 0-10 V and RS485 VSM79DL As VSM79D, with LCD display VSM79E As VSM79D, output RS485 and EtherCAT Accessories: SLN4 Plug-in power supply 24 V SLKUSB Interface converter RS485-USB VGR VacuGraph TM software for Windows W Measuring cable for VD12 and VD10, shielded 2 m W As W , 6 m W As W , 20 m Replacement sensor heads B_VSM77, B_VSM79 Alterations reserved (VSMA02)

10 VSH Smartline Vacuum Transducer Absolute Pressure 1000 to 5 x mbar The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Sm rtline Typical Applications Benefits Analysis technology Wide range sensor Digital RS485 interface and Pirani / Bayard Alpert additional analog output signal Coating plants and V or EtherCAT vapor deposition The hot cathode sensor is automatically controlled Digital adjustment of zero and Sputtering plants by the Pirani atmospheric pressure via pushbutton or interface Measuring and controlling in Pirani with extended range allows the fine and ultrahigh vacuum range operation of hot cathode at lower Large, integrated LCD display with pressure and increases lifetime background illumination Vacuum furnaces (VSH88DL, VSH89DL) Excellent accuracy and Process engineering repeatability Display flashes in bright red color in Space simulation chambers case of error, compared to green Low thermal and electrical ligthing in the normal mode interference with the vacuum (VSH88DL, VSH89DL) process Easy connection with PLCs Small volume of the measuring cell e. g. 20 cm 3 for VSH88D The digital output signal can be transmitted error-free Bayard-Alpert with blowing over long distances (up to 500 m) resistant, yttrium coated double filament Baud rate 9.6 kbd to 115 kbd Insensitive against inrush of air Rugged, EMI-proof metal housing Two independent, potential-free Vacuum connection by stainless relay switch points steel small flange DN 40 ISO-KF or conflat flange DN 40 CF-F LEDs for device status and switch points Easily replaceable sensor heads with stored calibration data Correct pressure readings by means of separate gas type correction factors for Pirani and hot cathode Suitable for Thyracont 2 and 4 channel display and control units VD12 / VD10

11 Output (V) VSH88 VSH89 10,00 9,00 8,00 7,00 6,00 5,00 4,00 3,00 2,00 1,00 1,0E-09 1,0E-07 1,0E-05 1,0E-03 1,0E-01 1,0E+01 Pressure (hpa) Vout /V = 0,6 log (p/mbar) + 6,8 p /mbar = 10 ( (Vout /V 6,8) / 0,6 ) Dimensions in mm Technical Data Measuring Principle Pirani / Bayard Alpert, depending on gas type Materials In Contact With Vacuum Stainl. steel , Ni, W, Pl, yttrium coated iridium, glass Measurement Range x10-10 mbar (750-5 x10-10torr), max. overpressure 4 bar abs. Accuracy mbar: < 30 % from reading 10-1 x 10-8 mbar: < 10 % from reading Repeatability ±2 % (10-1 x 10-2 mbar), 5% (1 x x 10-8 mbar) Response Time < 200 ms (2 s while switching BA emission current) Emission Current Automatic switching 10 µa, 100 µa, 1 ma, 2 ma Degas Ohmic heating of the anode Voltage Supply VDC Electrical Connection VSH88D/DL, VSH89D/DL: SubD, 15pol., male, lockable VSH88E, VSH89E: M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. Power Consumption Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD Operating Temperature C Storage Temperature C Maximum Bake Out Temperature 180 C at the flange (electronic detached) Output Signal 0-10 VDC, measuring range VDC, log., 0.6 V/decade load resistor > 10k W(VSH88D/DL, VSH89D/DL) Serial Interface RS485: 9,6 kbd to 115 kbd, address switch 1-16 Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA Vacuum Connection DN 40 ISO-KF (VSH88), DN 40 CF-F (VSH89) Protection Class IP54 (VSH88E, VSH89E), IP40 (VSH88D/DL, VSH89D/DL) Weight Approx. 555 g Product Codes VSH88D Combi transmitter Pirani/Bayert Alpert, x mbar, DN 40 ISO-KF connection, output 0-10 V log. and RS485 VSH88DL As VSH88D, with LCD display VSH88E As VSH88D, output RS485 and EtherCAT VSH89D Combi transmitter Pirani/Bayert Alpert, x mbar, DN 40 CF-F connection, output 0-10 V log. and RS485 VSH89DL As VSH89D, with LCD display VSH89E As VSH89D, output RS485 and EtherCAT Accessories SLN4 Plug-in power supply 24 V SLKUSB Interface converter RS485-USB VGR VacuGraph TM software for Windows W Measuring cable for VD12 and VD10, shielded 2 m W As W , 6 m W As W , 20 m Replacement sensor heads B_VSH88, B_VSH89 Alterations reserved (VSHA03)

12 VD12 2 Channel Vacuum Display And Control Unit -10 Absolute Pressure 1400 to 5 x 10 mbar VD12 is an intelligent control unit for applications in apparatus and plant engineering or special equipment construction. It offers two relay switches, one common or two independent set points. 19inch cassette 14 HP x 3 RE. Typical Applications Benefits Industrial plant engineering Simultaneous control of Large graphic LCD display with 2 measuring channels background illumination Process automation Can be combined with all Comfortable operation by menu- Apparatus engineering, e. g. Smartline and 0-10 V Analogline driven operator guidance process control and documentation transducers for quality assurance USB interface for process Pressure display in documentation and setpoint Mechanical engineering mbar, Torr, hpa programming Packaging technology Universal switched mode VacuGraph software: power supply VAC Documentation and evaluation of Chemical process engineering vacuum processes, programming (vacuum mixers) 2 potential-free relay switches set points, remote control Two- or three-step control On demand the controller can be configured ex works according to Robust 19" metal cassette with the customer s requirements foil-protected front panel EMI compatible Adjustable gas type correction factor

13 Dimensions in mm Technical Data Suitable Vacuum Transducers All Smartline transducers, VSC43MV, VSP63MV, VSP64MV, VCP63MV Display LCD graphic display, background illumination, resolution 128x64 Display Refresh Rate 2 Hz (0.5 s) Sample Rate RS485: 12,5 Hz (80 ms) / channel 0-10V: 50 Hz (20 ms) /channel Power Supply VAC, 50/60 Hz Power Consumption Max. 25 W incl. transducer Fuse 0.8 A/T Operating Temperature C Storage Temperature C Measuring Inputs 1 x RS485, SubD male, 15pole, for Smartline 2 x Amphenol C91E, 6pole, 0-10 V, female, for Analogline Control Outputs 2 x relay contact, potential free change over switches, Phoenix strip terminal 6-pole, lifetime > cycles, 4 A / 250 VAC, 2 A / 45 VDC Serial Interface Mini-USB, Type B, 5pole, female, Virtual Com Port Protocol Protection Class IP20 Weight 750 g Product Codes VD12S2 19inch cassette 14 HP x 3 RU, USB, VAC Complete Sets VD1253P ( x 10-4 mbar) VD12 + VSR53D + cable 2 m VD1263P ( x 10-4 mbar) VD12 + VSP63D + cable 2 m -9 VD1277P ( x 10 mbar) VD12 + VSM77D + cable 2 m -10 VD1288P ( x 10 mbar) VD12 + VSH88D + cable 2 m Accessories: W Measuring cable RS485 for Smartline transducers, shielded, 2 m W As W , 6 m VGR VacuGraph Windows software WUSB0002 Interface cable USB, shielded, 2 m Alterations reserved (12A01)

14 VD10 4 Channel Vacuum Display And Control Unit -10 Absolute Pressure 1000 to 5 x 10 mbar VD10 is an intelligent control unit for application in apparatus and plant engineering or special equipment construction. Eight potential free relay switches can be mapped to different measuring channels. Compact metal 19inch cassette 21 HP x 3 RU. Sm rtline Typical Applications Benefits Industrial plant engineering Simultaneous control of up to Large graphic LCD display with 4 measuring channels background illumination Process automation Can be combined with Comfortable operation by menu- Coating plants Smartline transducers driven operator guidance Vacuum furnaces 8 potential-free relay switches USB interface for process documentation Apparatus engineering, e. g. 2 programmable function keys process control and VacuGraph software: documentation for quality Universal switched mode Documentation and evaluation of assurance power supply VAC vacuum processes, remote control Special equipment construction Pressure display in On demand the controller can be mbar, Torr, hpa configured ex works according to the customer s requirements Fail safe operation due to the EMC compatible metal housing Foil-protected front panel

15 Dimensions in mm Technical Data Suitable Vacuum Transducers All Smartline transducers, VSP63MV, VSP64MV, VCP63MV Display LCD graphic display, background illuminated, 57 x 35 mm, floating point: 2-4 digits, exponential, 2 digits mantissa, 1 digit exponent Display Refresh Rate 2 Hz (0.5 s) Sample Rate 5 Hz (200 ms) per channel (RS485-serial interface, digital) 30 Hz (33 ms) per channel (0-10 V input, analog) Power Supply VAC, 50/60 Hz Power Consumption Max. 45 W incl. transducer Fuse 2.0 A / T Operating Temperature C Storage Temperature C Measuring Inputs 1 x RS485, SubD, 15pole, male, for Smartline 2 x 0-10 V Amphenol C91E, 6pole, female, f. VSP63MV, VSP64MV Control Outputs 8 x relay, normally open contact, SP assignable, Phoenix strip terminal 16-pole, lifetime > cycles, 3 A, 250 VAC, 2 A 40 VD Serial Interface Mini-USB, type B, 5pole, female, Virtual Com Port protocol Protection Class IP20 Weight 1100 g Product Codes VD10S8 4 channel display and control unit, 19" cassette 21 HP x 3 RU, VAC Accessories: W Measuring cable RS485 for Smartline transducers, shielded, 2 m W As W , 6 m VGR VacuGraph Windows software WUSB0002 USB interface cable, shielded, 2 m Alterations reserved (10A02)

16 VGR TM VacuGraph 11 Windows -Software Together with Thyracont vacuum TM gauges, the advanced VacuGraph software serves as the ultimate tool to visualize, analyze and save measurements on your PC in an efficient and easy way. TM VacuGraph is self-explanatory and suited for all Thyracont instruments with either USB, RS232, RS485 or Bluetooth interface. Operating Systems: Windows XP/Vista/7/8/10 Typical Applications Visualize, analyze and document vacuum measurement data Automatic data logging of vacuum systems and pumps for quality assurance Tool for flexible parameter configuration of vacuum sensors (Smartline) for demanding vacuum applications Control software for the securing of production processes Support for preventive maintainance of vacuum plants Data management with export function to Windows applications (Excel, Access,..) Continuous leakage test by means of rate-of-rise method Benefits Intuitively operated user interface Read out Thyracont measurement gauges and data loggers Measurement data exportable as CSV files, e. g. for Microsoft Excel Online measurement: track data in real time on your PC Several measurement curves can be overlapped, compared, displaced and zoomed in for detailed analysis Simultaneous communication with a random number of active gauges Wide choice of pressure units e. g. mbar, Pa, Torr, psi, atm,... PC based regulation of control units by entering setpoints Remote control of vacuum controllers (e. g. keyboard lock/unlock of VD12, controller active/inactive) Various languages available Convenient leakage calculation by rate of rise measurement: Simply select curve section with the cursor, enter chamber volume and the leakage rate is automatically calculated Comfortable setting of all gauge parameters (e. g. units, output charac-teristics, gas type correction factors, switch and switchover points etc.) Curve illustration and graph headings are easily changeable e. g. for quality assurance records Curve parameters are adjustable (legend, grid etc.) Logarithmic or linear pressure scales Time line either absolute including date and time or relative to the time of measurement Mark, comment and print measurement curves Either numerical or graphical illustration of measurement values Export graphs as pixel or vector graphics Automatic VacuGraph updates Firmware Update Assistant: Benefit immediately from newly developed features and update the firmware of your Thyracont gauges simply yourself

17 Features Measurement data entry Electronic alignment Adjustment output signal Cathode control mode Controller status Degas Display unit Filament behaviour Gas correction factors Data logger mode Maximum operation time Keyboard lock Relais configuration Save/load profiles Value adjustment * Only with digital transducers VD8 VD6 VD12 VD10 VSR VSP VSM VSH ü ü ü ü ü ü ü ü ü ü ü ü ü ü ü ü ü* ü ü ü ü ü ü ü ü ü ü ü ü ü* ü ü ü ü* ü ü ü ü ü ü ü ü ü ü ü* ü ü ü ü ü ü ü ü ü ü ü ü ü L Product Codes VGR VacuGraph TM Windows software, download version Accessories: SLKUSB Interface converter RS485-USB for Smartline active gauges SLKBT Interface converter RS485- Bluetooth, for Smartline active gauges WUSB0002 Interface cable, 2m, for gauges with an USB interface (VD8, VD6, VD12 and VD10) Alterations reserved (VGRA05)

18 THYRACONT Vacuum Instruments GmbH Max-Emanuel-Straße Passau, Germany Tel.: +49 (0) Fax: +49 (0) info@thyracont-vacuum.de Expertise and Responsiveness: +49 (0) V a c u u m I n s t r u m e n t s