PSG55x ATM to Medium Vacuum Gauge

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1 The INFICON Pirani Standard Gauge (PSG55x) employs like his brothers PCG55x and PSG50x the most advanced digital Pirani technology available. The rugged sensor design combined with the compact size and the variety of features qualifies as the right product for measurement from low to the high vacuum range. BENEFITS Available with Tungsten (PSG550) or Nickel (PSG552) filament or with a fully ceramic (PSG554) sensor unit for highly corrosive applications Optional display, setpoints and digital interfaces Easy to exchange plug & play sensor element with on-board calibration data - guarantees high reproducibility and low cost of ownership Selectable output signal and various plug versions for easy integration Mounts in any orientation - provides engineering freedom in tool design Diagnostic port on all versions Compliance & standards: CE, EN, UL, CSA, RoHS 1

2 ORDERING INFORMATION 2

3 Measurement range mbar 5 10 ⁵ ⁵ ⁵ 1000 Measurement range Torr ⁵ ⁵ ⁵ 750 Accuracy (N₂) 5 10 ⁴ 1 10 ³ mbar % of reading ±50 ±50 ± ³ 100 mbar % of reading ±15 ±15 ± mbar % of reading ±50 ±50 ±50 Repeatability (N₂) 1 10 ³ 100 mbar % of reading ±2 ±2 ±2 Admissible pressure bar (absolute) Pressure, max. bar (absolute) Admissible temperature Operation (ambient) C Storage C Bakeout at flange C Bakeout at flange long tube C Supply voltage V (dc) Power consumption Without fieldbus W DeviceNet W Profibus W Output signal analog 3PIx- 0xx-xxx0 Output signal analog 3PIx- 0xx-xxx1 Output signal analog 3PIx- 0xx-xxx2 Output signal analog 3PIx- 0xx-xxx3 Measuring range 3PIx-0xxxxx0 Measuring range 3PIx-0xxxxx1 Measuring range 3PIx-0xxxxx2 V V V V V V V

4 Measuring range 3PIx-0xxxxx3 Voltage vs. pressure V PIx-0xx-xxx0 volts per decade PIx-0xx-xxx1 / -xxx2 / - xxx3 volts per decade Load impedance kω >10 >10 >10 Number of setpoints Relay contact n.o., potential free n.o., potential free n.o., potential free Range (N₂) mbar 5 10 ⁵ ⁵ ⁵ 1000 Hysteresis % of threshold Contact rating solid state relays Contact rating mechanical relays Contact rating solid state relays Contact rating mechanical relays V (dc) V (dc) A (dc) A (dc) Switching time ms Interface (digital) RS232C RS232C RS232C Electrical connection 3PIx-0xx-x0xx FCC, 8-pin FCC, 8-pin FCC, 8-pin 3PIx-0xx-x1xx D-Sub, 9-pin, D-Sub, 9-pin, D-Sub, 9-pin, 3PIx-0xx-x2xx 3PIx-0xx-x4xx with RS485, with RS485, with RS485, Cable length m (ft.) 100 ( 330) 100 ( 330) 100 ( 330) RS232C operation m (ft.) 30 ( 100) 30 ( 100) 30 ( 100) 4

5 Materials exposed to vacuum Internal volume W, Ni, NiFe, glass, SnAg, stainless steel Ni, NiFe, glass, SnAg, stainless steel Al₂O₃, stainless steel DN 16 ISO-KF cm³ DN 16 ISO-KF long tube cm³ DN 16 CF-F cm³ DN 16 CF-R long tube cm³ DN 25 ISO-KF, 4 VCR cm³ VCR cm³ /8'' NPT, 7/16-20 UNF cm³ Surface mount 29 mm/1.15 inch cm³ VCR 90 cm³ Weight Without fieldbus interface g With fieldbus interface g Degree of protection IP 40 IP 40 IP 40 Standards CE conformity EN /-6-3, EN ETL certification UL , CSA 22.2 No DeviceNet Protocol DeviceNet, group 2 slave only MAC ID - 63) or network Digital functions micron, counts; EN /-6-3, EN UL , CSA 22.2 No DeviceNet, group 2 slave only - 63) or network micron, counts; EN /-6-3, EN UL , CSA 22.2 No DeviceNet, group 2 slave only - 63) or network micron, counts; 5

6 Specification Device type DeviceNet "Vacuum Gauge Device Profile" ''CG'' for combination gauge DeviceNet "Vacuum Gauge Device Profile" ''CG'' for combination gauge DeviceNet "Vacuum Gauge Device Profile" ''CG'' for combination gauge I / O slave messaging polling only polling only polling only Connector for DeviceNet DeviceNet Micro-Style, 5-pin, Data rate switch kbaud 125, 250, 500 or network DeviceNet Micro-Style, 5-pin, 125, 250, 500 or network Micro-Style, 5-pin, 125, 250, 500 or network Cable length 125 kbps m (ft.) 500 (1650) 500 (1650) 500 (1650) Cable length 250 kbps m (ft.) 250 (825) 250 (825) 250 (825) Cable length 500 kbps m (ft.) 100 (330) 100 (330) 100 (330) DeviceNet Supply voltage for DeviceNet 3PI6- / 3PI7- / 3PI8-0xx-xxxx DeviceNet Power consuption 3PI6- / 3PI7- / 3PI8-0xx-xxxx Profibus DP V (dc) W Baud rates kbaud 9.6 / 19.2 / / / 500 Profibus DP 9.6 / 19.2 / / / / 19.2 / / / 500 Baud rates Mbaud 1.5 / / / 12 Profibus DP Address - 127) or network Digital functions - 127) or network - 127) or network 6

7 Connector for Profibus DP D-Sub, 9-pin, fe D-Sub, 9-pin, fe D-Sub, 9-pin, fe RS485C Baud rates kbaud 9.6 / 19.2 / 38.4 / / 19.2 / 38.4 / / 19.2 / 38.4 /57.6 RS485C Address - 255) Digital functions Connector for RS485 EtherCAT Protocol EtherCAT protocol specialized for EtherCAT Communication standards ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" Node address Physical layer EtherCAT connector Cable Process data Mailbox (CoE) Explicit Device Identification 100BASE-Tx (IEEE 802.3) RJ45, 8-pin (socket), IN and OUT shielded Ethernet CAT5e or higher Fixed PDO mapping and configurable PDO mapping SDO requests, responses and information - 255) protocol specialized for EtherCAT ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" Explicit Device Identification 100BASE-Tx (IEEE 802.3) RJ45, 8-pin (socket), IN and OUT shielded Ethernet CAT5e or higher Fixed PDO mapping and configurable PDO mapping SDO requests, responses and information - 255) protocol specialized for EtherCAT ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" Explicit Device Identification 100BASE-Tx (IEEE 802.3) RJ45, 8-pin (socket), IN and OUT shielded Ethernet CAT5e or higher Fixed PDO mapping and configurable PDO mapping SDO requests, responses and information 7

8 EtherCAT Cable length m (ft.) 100 (330) 100 (330) 100 (330) 8

9 SPAREPARTS PSG550 Tungsten PSG552 Nickel PSG554 ceramic PSG550 Spare sensor, 1/8" NPT PSG550 Spare sensor, 29x29mm PSG550 Spare sensor, 4-VCR PSG550 Spare sensor, 4-VCR / PSG550 Spare sensor, 7/16-20 UNF PSG550 Spare sensor, 8-VCR PSG550 Spare sensor, DN 16 CF-F PSG550 Spare sensor, DN 16 CF-R, long PSG550 Spare sensor, DN 16 ISO-KF PSG550 Spare sensor, DN 25 ISO-KF PSG550 Spare sensor, DN16 ISO-KF, long PSG552 Spare sensor, 1/8" NPT PSG552 Spare sensor, 29 x 29mm PSG552 Spare sensor, 4-VCR PSG552 Spare sensor, 4-VCR / PSG552 Spare sensor, 7/16-20 UNF PSG552 Spare sensor, 8-VCR PSG552 Spare sensor, DN 16 CF-F PSG552 Spare sensor, DN 16 CF-R, long PSG552 Spare sensor, DN 16 ISO-KF PSG552 Spare sensor, DN 25 ISO-KF PSG552 Spare sensor, DN16 ISO-KF, long PSG554 Spare sensor, 1/8" NPT PSG554 Spare sensor, 29x29mm PSG554 Spare sensor, 4-VCR PSG554 Spare sensor, 4-VCR / PSG554 Spare sensor, 7/16-20 UNF PSG554 Spare sensor, 8-VCR PSG554 Spare sensor, DN 16 CF-F PSG554 Spare sensor, DN 16 CF-R, long PSG554 Spare sensor, DN 16 ISO-KF PSG554 Spare sensor, DN 16 ISO-KF, long PSG554 Spare sensor, DN 25 ISO-KF

10 ACCESSORIES PSG550 Tungsten PSG552 Nickel PSG554 ceramic Centering ring with fine filter DN 16 KF Clamping ring DN ISO-KF Diagnostic cable 1.9m (P3) DIMENSIONS

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